Abstract: Kits and methods for detecting pathogens without the need for laboratory equipment are disclosed. The kits and methods described herein allow for near-room temperature amplification of pathogen polynucleotides in a biological sample in a one-compartment reaction vessel. The kits and methods may be used to detect any target nucleic acid, such as DNA or RNA from a bacterial, fungal, or viral pathogen.

Abstract: Techniques for measuring sequences of nucleic acids are provided. Time-based measurements (e.g., forming a histogram) particular to a given sequencing cell can be used to generate a tailored model. The model can include probability functions, each corresponding to different states (e.g., different states of a nanopore). Such probability functions can be fit to a histogram of measurements obtained for that cell. The probability functions can be updated over a sequencing run of the nucleic acid so that drifts in physical properties of the sequencing cell can be compensated. A hidden Markov model can use such probability functions as emission probabilities for determining the most likely nucleotide states over time. For sequencing cells involving a polymerase, a 2-state classification between bound and unbound states of the polymerase can be performed. The bound regions can be further analyzed by a second classifier to distinguish between states corresponding to different bound nucleotides.

Abstract: The present invention relates to controls for NGS methods. The present application discloses plasmids, kits, their uses and methods involving the controls according to the present invention.

Abstract: The present disclosure relates to the field of molecular biology and more specifically to microarrays and methods.

Abstract: In some aspects, the invention relates to a method for producing a barcoded DNA library, comprising: optionally fragmenting DNA to produce fragmented DNA; combining the DNA/fragments with control nucleotide sequences to produce a mixture of nucleic acids, each control nucleotide sequence comprising a variable nucleotide sequence, thereby barcoding the DNA/fragments; amplifying the mixture of nucleic acids to produce amplified nucleic acids; isolating a plurality of nucleic acids from the amplified nucleic acids; and rearranging the nucleic acids of the plurality, thereby producing the barcoded DNA library.

Abstract: A DNA sequencing and blood chemistry analysis system and method are provided including one or more sensor chips and one or more sample wells, wherein each sample well is configured to form a seal with one of the sensors. The one or more sensor chips may comprise Graphene transistors, and each transistor having an associated sequencing probe. The sensor chips interact with a biological sample introduced into the sample well, wherein changes in the current, transconductance, and resistance of the Graphene transistors are indicative of a DNA binding process. Based on the associated sequencing probes, the DNA sequence present in a biological sample can be identified.

Abstract: Methods are provided for predicting a subject's infection status using high-throughput T cell receptor sequencing to match the subject's TCR repertoire to a known set of disease-associated T cell receptor sequences. The methods of the present invention may be used to predict the status of several infectious agents in a single sample from a subject. Methods are also provided for predicting a subject's HLA status using high-throughput immune receptor sequencing.

Abstract: The present invention relates to the field of biomarkers. More specifically, the present invention relates to the use of biomarkers to predict post-traumatic stress disorder (PTSD). In one embodiment, a method for predicting PTSD in a subject comprises the steps of (a) measuring the DNA methylation level of a CpG dinucleotide in the 3? untranslated region of SKA2; (b) identifying the genotype at a SNP within the 3? UTR of SKA2, and (c) predicting PTSD in the subject using a prediction algorithm.

Abstract: The present invention provides a means for efficiently amplifying the exons of PKD1 and PKD2 genes, and a primer set that can amplify all the exons of PKD1 and PKD2 genes under a single set of PCR conditions.

Abstract: The present invention relates to a method for diagnosis of a change of the status of health of a subject based on the determination of expression profiles of miRNAs.

Abstract: The invention provides methods for predicting therapeutic responsiveness of a subject suffering from cognitive impairments or dysfunctions, psychotic and/or neurodegenerative disorders to an alpha 7 nicotinic acetylcholine receptor activator treatment.

Abstract: Provided herein is technology for esophageal disorder screening and particularly, but not exclusively, to methods, compositions, and related uses for detecting the presence of esophageal disorders (e.g., Barrett's esophagus, Barrett's esophageal dysplasia, etc.). In addition, the technology provides methods, compositions and related uses for distinguishing between Barrett's esophagus and Barrett's esophageal dysplasia, and between Barrett's esophageal low-grade dysplasia, Barrett's esophageal high-grade dysplasia, and esophageal adenocarcinoma within samples obtained through endoscopic brushing or nonendoscopic whole esophageal brushing or swabbing using a tethered device (e.g. such as a capsule sponge, balloon, or other device).

Abstract: A rapid, sensitive and cost-effective process of detection of porcine contamination in a food product sample is provided herein. The present invention further provides a real-time polymerase chain reaction (PCR) based process which uses highly specific oligonucleotides primers and ZEN™ probe, and a kit that contains the primers and/or probe useful for rapid detection of porcine DNA in a food sample. The oligonucleotide primers disclosed in the present invention provide amplification of the target gene porcine (Sus scrofa) mitochondrial 12S ribosomal RNA gene in highly sensitive and specific manner showing no cross amplification.

Abstract: A system and methods for detection of a nucleic acid including forming a plurality of nucleic acid detection complexes are described, each of the complexes including a nucleic acid analyte, a detection agent and a functionalized probe. The method further including binding the nucleic acid detection complexes to a plurality of functionalized particles in a fluid sample and separating the functionalized particles having the nucleic acid detection complexes bound thereto from the fluid sample using a density media. The nucleic acid analyte is detected by detecting the detection agent.

Abstract: Primers and probes for detecting an RNA virus, including HIV, HIV-1 subtypes of the M and O groups, and HCV, in a sample. The primers and probes can be used for monitoring the efficacy of anti-retroviral treatment in a subject infected with HIV and/or HCV, and for detecting acute HIV-1 infection, and/or acute HCV infection, in a subject. Included are inner, middle and outer primers that can be used in PCR, including triple nested PCR in a single tube. The methods are highly sensitive and specific, allowing for detection of as few as 4 copies of virus in a sample.

Abstract: The present invention relates to a novel polypeptide which displays IgG cysteine protease activity, and in vivo and ex vivo uses thereof. Uses of the polypeptide include methods for the prevention or treatment of diseases and conditions mediated by IgG, and methods for the analysis of IgG.

Abstract: A method of generating a refined sugar stream that comprises xylose from a biomass hydrolysis solution including contacting a biomass hydrolysis solution that includes a population of mixed sugars comprising xylose, an acid, and impurities, with an extraction solvent to form an extraction mixture; and separating from said extraction mixture a first stream that includes the acid and a second, refined sugar stream that includes the extraction solvent and xylose. The extraction solvent is a tri-alkyl phosphine oxide, a dialkylsulfoxide, or a dialkylphosphite, or any combination thereof.

Abstract: A high-strength cold-rolled steel sheet, in which the metal structure at a position of ¼ of the sheet thickness satisfies (1) to (4) below. (1) The area ratio of ferrite is 0% or more and 10% or less, with the balance being a hard phase including quenched martensite and retained austenite and including at least one selected from the group consisting of bainitic ferrite, bainite, and tempered martensite. (2) The volume ratio V? of retained austenite is 5% to 30%. (3) The area ratio VMA of an MA structure in which quenched martensite and retained austenite are combined is 3% to 25%, and the average circle-equivalent diameter of the MA structure is 2.0 ?m or less. (4) The ratio VMA/V? of the area ratio VMA of the MA structure to the volume ratio V? of the retained austenite is 0.50 to 1.50.

Abstract: Disclosed are a grain-oriented electrical steel sheet having strain regions extending in a direction transverse to a rolling direction at periodic interval s (mm) in the rolling direction. Each strain region has a closure domain region whose width in the rolling direction varies periodically on a steel sheet surface. Each closure domain region satisfies: Wmax/Wmin=1.2 or more and less than 2.5, where Wmax and Wmin respectively denote a maximum width and a minimum width on the steel sheet surface as measured in the rolling direction; Wave being 80 ?m or more, where Wave denotes an average width on the steel sheet surface as measured in the rolling direction; D being 32 ?m or more, where D denotes a maximum depth as measured in the sheet thickness direction; and (Wave*D)/s being 0.0007 mm or more and 0.0016 mm or less.

Abstract: A grain-oriented electrical steel sheet having a composition containing, in mass %, C: 0.005% or less, Si: 2.0% to 4.5%, and Mn: 0.5% or less, and also containing Sb and P in respective ranges satisfying 0.01%?[% Sb]?0.20% and 0.02%?[% P]?2.0×[% Sb], with a balance being Fe and incidental impurities, wherein when the steel sheet is excited to 1.0 T at 50 Hz in a rolling transverse direction, a magnetizing force (TD-H10) and an iron loss (TD-W10) are respectively (TD-H10)?200 A/m and (TD-W10)?1.60 W/kg. Thus, a grain-oriented electrical steel sheet having excellent transformer core loss can be obtained industrially stably at low cost.

Abstract: A hot-rolled steel sheet includes a predetermined chemical composition, and a structure which includes, by area ratio, a ferrite in a range of 5% to 60% and a bainite in a range of 30% to 95%, in which in the structure, in a case where a boundary having an orientation difference of equal to or greater than 15° is defined as a grain boundary, and an area which is surrounded by the grain boundary and has an equivalent circle diameter of equal to or greater than 0.3 ?m is defined as a grain, the ratio of the grains having an intragranular orientation difference in a range of 5° to 14° is, by area ratio, in a range of 20% to 100%.

Abstract: A stainless steel exhibiting an excellent brazeability includes in mass %: C: from 0.001% to 0.1%; Si: from more than 1.5% to 4.0%; Mn: from 0.05% to 4.0%; Cr: from 10.5% to 30%; Ni: 35% or less; N: from 0.001% to 0.4%; one or both of Ti: 0.002% to 0.030% and Al: 0.002% to 0.10%; and a balance being Fe and inevitable impurities, in which an Si content, a Ti content and an Al content satisfy Formula 1, and an oxide film with a composition satisfying Formula 2 is formed on a surface of the stainless steel, Sim/(Tim+Alm)?40??Formula 1 1.2×SimFem?Sif/Fef?5×Sim/Fem??Formula 2 in Formula 1 and Formula 2, a suffix “f” expresses the oxide film in a unit of atom %, and a suffix “m” expresses a base material in a unit of mass %.

Abstract: A steel sheet contains C: 0.15% to 0.22%, Si: 1.0% to 2.0%, Mn: 1.7% to 2.5%, P: 0.05% or less, S: 0.02% or less, Al: 0.01% to 0.05%, N: 0.005% or less, O: 0.01% or less, and the balance being iron and unavoidable impurities while satisfying [Si]/[Mn]?0.5 ([Si] and [Mn] represent Si and Mn contents, wherein the steel sheet has a structure including, in terms of area fraction, 60% to less than 100% of tempered martensite, 5% or less including 0% of untransformed austenite, and the balance being ferrite, and the ferrite has an average crystal grain size of less than 3.5 ?m, wherein less than 10 particles/100 ?m2 of Si—Mn compound oxide particles having a circle equivalent diameter of 5 ?m or less are present on a surface of the steel sheet, and the surface is covered with Si-based oxide at a coverage of 1% or less.

Abstract: A metastable austenite stainless steel strip of high strength and ductility. The steel strip including C: 0.05 to 0.15%, Si: 0.05 to 1%, Mn: 2% or less, Cr: 16 to 18%, Ni: 4 to 11%, Mo: 2.5 to 3.5%, Cu: 0.4 to 1.0% with a remaining part of Fe, a dual phase structure of an ?? phase and a ? phase where the ? phase is composed of a ?T phase and a ?R phase, a sum of the ?T phase and the ?R phase is 15 to 50 volume %, and a ?T phase area ratio defined by formula (2) (=100×(total area ratio of ?T phase of entire observation area)) is between 1% and 20% inclusive, and 0.2% yield strength (YS) of 1400 N/mm2 to 1900 N/mm2 where a value of YS-EL balance satisfies at least 21,000 to 48,000.

Abstract: Provided is a hydrometallurgical process for nickel oxide ore effectively reducing the amount of sulfuric acid used in the leaching step and the amount of a neutralizer such as slaked lime used in the final neutralization step without reducing nickel yield. The present invention is a method for pre-treating ore slurry to be submitted for leaching treatment in a hydrometallurgical process for nickel oxide ore, the method comprising: a separating step for separating the ore slurry into a coarse particle fraction, in which particles having a particle diameter of less than 45 ?m are 30 mass % of the solids or less, and a fine particle fraction, and feeding said fine particle fraction to the leaching process; and a vibration sieving step for separating the separated coarse particle fraction into oversize particles and undersize particles using vibration sieving and feeding the ore slurry of said undersize particles to the leaching process.

Abstract: A wet smelting method for nickel oxide ores from which nickel, cobalt, etc. are recovered is provided with which it is possible to reduce the consumption of an acid in leaching, such as sulfuric acid, and to recover valuable metals. The method comprises: step (A) in which nickel oxide ores as a raw material are separated into a limonite-type ore having a low magnesium content and a saprolite-type ore having a high magnesium content; step (B) in which the saprolite-type ore is subjected to normal-pressure leaching under given standardized leaching conditions using the pressure leachate obtained by pressure leaching in step (C); and step (C) in which the limonite-type ore obtained in step (A) is mixed with the normal-pressure leaching residue obtained in step (B) and the mixture is reacted with sulfuric acid in an acidic atmosphere having a high temperature and a high pressure, thereby conducting pressure leaching.

Abstract: Methods for the treatment of metallic particles such as heavy metal particles and objects contaminated with the metallic particles. For the treatment of objects contaminated with the metallic particles, a stabilizing composition may be applied to the object with or without a fixation agent. For the treatment of free-flowing metallic particles, an agglomeration agent may be used with or without a stabilizing agent.

Abstract: Disclosed herein is a novel approach to the chemical synthesis of titanium metal from a titanium oxide source material. In the approach described herein, a titanium oxide source is reacted with Mg vapour to extract a pure Ti metal. The method disclosed herein is more scalable, cheaper, faster, and safer than prior art methods.

Abstract: Nanocrystalline metal powders comprising tungsten, molybdenum, rhenium or niobium can be synthesized using a combustion reaction. Methods for synthesizing the nanocrystalline metal powders are characterized by forming a combustion synthesis solution by dissolving in water an oxidizer, a fuel, and a base-soluble, ammonium precursor of tungsten, molybdenum, rhenium, or niobium in amounts that yield a soichiometric burn when combusted. The combustion synthesis solution is then heated to a temperature sufficient to substantially remove water and to initiate a self-sustaining combustion reaction. The resulting powder can be subsequently reduced to metal form by heating in a reducing gas environment.

Abstract: A preparation method and an application of a three-dimensional interconnected porous magnesium-based material are provided. The method includes steps of: preparing a porous titanium preform or a porous iron preform; introducing a molten magnesium-based metal into the porous titanium preform or the porous iron preform through pressure infiltration, and obtaining a porous magnesium-based material precursor; and washing the porous magnesium-based material precursor, and obtaining the porous magnesium-based material.

Abstract: The present invention relates to devices that improve control by selection, inversion, fortification, uniformization and mapping background energy (including dark energy and/or dark matter) and including electromagnetic energies in various forms and states of aggregation, during a tailoring process and to processes of tailoring materials.

Abstract: Provided is a material endowed with high wear resistance in high-temperature environments. This high temperature wear-resistant aluminum-bronze-based material has an Al content of 9.0 mass % to 11.0 mass %, inclusive, an Ni content of 1.0 mass % to 3.0 mass %, inclusive, an Mn content of 8.5 mass % to 15.0 mass %, inclusive, an Si content of 2.0 mass % to 4.0 mass %, inclusive, an Fe content of 0.5 mass % to 5.0 mass %, inclusive, and a Co content of 0.01 mass % to 1.5 mass %, inclusive, with the remainder being substantially Cu.

Abstract: A nickel alloy composition comprising hafnium provides superior heat, corrosion, and stress resistance. Various nickel alloy compositions used in the oil and gas industry are improved for use by the addition of hafnium in suitable amounts. Hafnium increases the high temperature ductility by promoting the precipitation of randomly distributed MC carbides.

Abstract: A hot-rolled steel sheet includes a chemical composition represented by, in mass %, C: 0.010% to 0.100%, Si: 0.30% or less, Cr: 0.05% to 1.00%, Nb: 0.003% to 0.050%, Ti: 0.003% to 0.200% and others, wherein a proportion of grains having an intragranular misorientation of 5° to 14° in all grains is 20% or more by area ratio, the grain being defined as an area which is surrounded by a boundary having a misorientation of 15° or more and has a circle-equivalent diameter of 0.3 ?m or more.

Abstract: A deposition system and method for depositing a uniform film of a chalcogen-containing compound semiconductor are provided. The deposition system includes a vacuum enclosure connected to a vacuum pump, a sputtering system comprising at least one sputtering target located in the vacuum enclosure, a chalcogen-containing gas source, and a gas distribution manifold having a supply side and a distribution side. The distribution side has a plurality of opening regions having independent temperature control and the supply side is connected to the chalcogen-containing gas source. A method of reactive sputter depositing a chalcogen-containing compound semiconductor material includes sputtering at least one metal component of the chalcogen-containing compound semiconductor material onto the substrate, and providing a higher chalcogen flux to ends of the substrate than to a middle of the substrate to form the chalcogen-containing compound semiconductor material.

Abstract: A linear evaporation source includes: a crucible accommodating an evaporation material; a heating unit enclosing the crucible and heating the crucible; and a nozzle unit above the crucible, the nozzle unit including a nozzle plate and at least one nozzle protruding from the nozzle plate. A length of the crucible is about 5 times to about 30 times greater than a width of the crucible. The crucible includes molybdenum (Mo) in an amount of about 95.0 percentage by weight (wt %) to about 99.99 wt % and lanthanum oxide (La2O3) in an amount of about 0.01 wt % to about 5 wt %, with respect to the total weight of the crucible.

Abstract: A sputtering device capable of satisfying various requirements is provided. The sputtering device includes a rotation and revolution table, multiple sputtering targets, an RF plasma source, and a load-lock chamber 102. The rotation and revolution table is arranged inside a pressure-reducible container 101 and is rotatable by independent control. The multiple sputtering targets are arranged on a revolution orbit of the rotation and revolution table so as to correspond to multiple workpieces 107 to be set on the rotation and revolution table. The RF plasma source performs plasma treatment. The load-lock chamber 102 is used for setting the multiple workpieces on the rotation and revolution table. The rotation and revolution table is configured by arranging multiple rotation mounts 105 on a revolution table 104, and the rotations of the revolution table 104 and the multiple rotation mounts 105 are independently controllable.

Abstract: An endblock for a rotatable sputtering target, such as a rotatable magnetron sputtering target, is provided. A sputtering apparatus, including one or more such endblock(s), includes locating the electrical contact(s) (e.g., brush(es)) between the collector and rotor in the endblock(s) in an area under vacuum (as opposed to in an area at atmospheric pressure).

Abstract: An apparatus for containment of a molten substance using non-wetting materials comprising a crucible, and a layer of a non-wetting material deposited onto the crucible, wherein said layer of non-wetting material is deposited near the rim of the crucible and wherein the non-wetting material is deposited onto the crucible by one selected from the group consisting of RF magnetron sputtering, chemical vapor deposition, thermal spray, thermal evaporation, dip coating of precursors followed by thermal treatment, and spray coating of precursors followed by thermal treatment.

Abstract: An apparatus for coating substrates includes a vacuum chamber having an opening through which substrates can be received and a door configured to seal the opening; one or more targets arranged in the vacuum chamber; a cooling unit configured to cool the substrates and/or a heating unit configured to heat the substrates; rotating means configured to rotate substrates relative to the one or more targets, the cooling unit and/or the heating unit; and a lifting chamber that communicates with the interior of the vacuum chamber and is configured to receive the cooling unit and the heating unit. The vacuum chamber defines a lifting axis along which the cooling unit and/or the heating unit and the lifting chamber are arranged, and the apparatus further comprises displacement means configured to displace the cooling unit and/or the heating unit along the lifting axis and between the vacuum chamber and the lifting chamber.

Abstract: Embodiments of the present disclosure provides apparatus and method for stabilizing substrate temperature by flowing a flow of cooling gas to an inlet of cooling channels in a substrate support, receiving the flow of cooling gas from an outlet of the cooling channel using a heat exchanger, and releasing the cooling gas to an immediate environment, such as a cleanroom or a minienvironment.

Abstract: The disclosure describes in some examples a technique that includes the disclosure describes a technique that includes depositing a carbon powder and a resin powder on a surface of a fiber preform, where the fiber preform includes a plurality of fibers and defines interstitial spaces between the plurality of fibers, and vibrating the fiber preform to allow the carbon powder and the resin powder to infiltrate the interstitial spaces between the plurality of fibers of the fiber preform to form an infiltrated preform.

Abstract: A metal-containing film can be formed with high continuity with respect to a base when forming the metal-containing film on the base by CVD or ALD. A film forming method of forming, by ALD or CVD, a Ti-containing film on a base film of a processing target object having a SiO2 film as the base film includes performing a surface processing of accelerating formation of a silanol group on a surface of the SiO2 film by bringing a fluid containing O and H into contact with the surface of the SiO2 film; and performing a film forming processing of forming the Ti-containing film on the SiO2 film, on which the surface processing is performed, by the ALD or the CVD with a Ti source gas which reacts with the silanol group.

Abstract: An apparatus for forming a thin film on a substrate in a processing container under vacuum atmosphere by alternately supplying a first gas and a second gas, which are process gases, onto the substrate, including: n first processing regions spaced from each other along circumferential direction of the processing container and used to process the substrate by supplying the first gas; n second processing regions formed between the n first processing regions along the circumferential direction and used to process the substrate by supplying the second gas; an isolation part isolating the n first processing regions and the n second processing regions; mounting parts disposed to be revolved along the circumferential direction and used to mount substrates; and a control part intermittently revolving mounting parts so that the substrates are alternately located in the n first processing regions and the n second processing regions while a revolution is stopped.

Abstract: A gas supply apparatus for forming a film by supplying a source gas, a substitution gas, and a reaction gas to a substrate in a processing chamber includes a source gas flow passage; a reaction gas flow passage; a first and second carrier gas flow passages connected to the source gas flow passage and the reaction gas flow passage; a substitution gas flow passage configured to supply the substitution gas into the processing chamber through a supply control device; a gas storage part installed in the substitution gas flow passage, and configured to store the substitution gas; a valve installed in the substitution gas flow passage, and installed in a downstream side of the gas storage part; and a control unit configured to control opening/closing of the valve such that the substitution gas is stored in the gas storage part to increase an internal pressure of the gas storage part.

Abstract: A silicon nitride film forming method for forming a silicon nitride film on a substrate to be processed, includes forming a silicon nitride film doped with a predetermined amount of titanium by repeating, a predetermined number of times, forming a silicon nitride film by repeating, a first number of times, a process of causing a silicon source gas to be adsorbed onto the substrate and a process of nitriding the adsorbed silicon source gas with plasma of a nitriding gas, and forming a titanium nitride film by repeating, a second number of times, a process of causing a titanium source gas containing chlorine to be adsorbed onto the substrate and a process of nitriding the adsorbed titanium source gas with the plasma of the nitriding gas.

Abstract: A digital pattern generator has a MEMS substrate with a plurality of doping layers and a plurality of insulating layers between respective doping layers. A plurality of lenslets are formed as holes through the substrate. A charge drain coating is applied to the inner surfaces of the lenslets. The charge drain coating drains electrons that come into contact with the charge drain coating so that the performance of the digital pattern generator will not be hindered by electron charge build-up. The charge drain coating includes a doping material that coalesces into clusters that are embedded within a high dielectric insulating material.

Abstract: Method of depositing an atomic layer on a substrate. The method comprises supplying a precursor gas from a precursor-gas supply of a deposition head that may be part of a rotatable drum. The precursor gas is provided from the precursor-gas supply towards the substrate. The method further comprises moving the precursor-gas supply by rotating the deposition head along the substrate which in its turn is moved along the rotating drum.

Abstract: A substrate processing apparatus includes: a mounting stand provided with a substrate mounting region in which a workpiece substrate is mounted; a process vessel for defining a process chamber including a first region and a second region through which the substrate mounting region passes in order; a precursor gas supply unit for supplying a precursor gas to the first region; a process gas supply unit for supplying a first gas or a second gas differing from the first gas to the second region; at least one plasma generating unit for generating plasma of the first gas or the second gas in the second region; and a control unit for executing a repetition control of repeating a first operation for supplying the first gas to the second region for a first time and a second operation for supplying the second gas to the second region for a second time.

Abstract: A film thickness monitoring system is provided. The film thickness monitoring system includes a source, a valve, and a chamber. The source is configured to provide a deposition material. The valve is connected to the source. The chamber includes a manifold, a quartz crystal microbalance, and a pressure sensor. The manifold is connected to the valve and has at least one first nozzle and at least one second nozzle. The quartz crystal microbalance is disposed opposite to the at least one second nozzle. The deposition material is adapted to be deposited on the quartz crystal microbalance through the at least one second nozzle, and the quartz crystal microbalance includes a shutter facing the at least one second nozzle. The pressure sensor is disposed in the manifold. A method for monitoring a film thickness deposition process is also provided.