Patents Issued in March 1, 2018
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Publication number: 20180059499Abstract: A display for an electronic device includes a plurality of pixel portions. Each pixel portion includes one or more electrophoretic capsules disposed above an organic light emitting diode layer. A first electrode assembly and a second electrode assembly are operable to control the one or more electrophoretic capsules. A control circuit selectively controls the first electrode assembly to cause operation of the one or more electrophoretic capsules in an optically non-transmissive state and the second electrode assembly to cause operation of the one or more electrophoretic capsules in an optically transmissive state.Type: ApplicationFiled: August 23, 2016Publication date: March 1, 2018Inventors: Alexander Klement, Kevin Dao
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Publication number: 20180059500Abstract: The present invention is directed to an electrophoretic dispersion comprising charged pigment particles, in particular, an electrophoretic dispersion including both uncharged or lightly charged neutral buoyancy particles and uncharged or lightly charged additive particles. The combination improves the performance of an electrophoretic display, in particular the color state stability over time.Type: ApplicationFiled: November 6, 2017Publication date: March 1, 2018Inventors: Robert A. SPRAGUE, Bo-Ru YANG, Peter B. LAXTON
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Publication number: 20180059501Abstract: Particles having a first region and a second region surrounding the first region where the second region includes a copolymer extending across a thickness of the second region are described. The volume of the second region is at least 75 percent of the volume of the particle. The particles have a composition and a refractive index that each vary across the thickness of the second region.Type: ApplicationFiled: April 12, 2016Publication date: March 1, 2018Inventors: Andrew J. Ouderkirk, Audrey A. Sherman, Michael D. Crandall, Brett J. Sitter, Zhipeng Song, Jenna M. Lundquist, Belma Erdogan-Haug, Albert I. Everaerts, Robert L. Brott
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Publication number: 20180059502Abstract: A pluggable electric connector can communicate a communication data signal and a control signal with an optical communication apparatus. An optical signal output unit includes a Mach-Zehnder type optical modulator including a phase modulation area and outputs an optical modulation signal modulated according to the communication data signal. An optical power control unit can control optical power of the optical modulation signal. A pluggable optical receptor can output the optical modulation signal to an optical fiber. A control unit controls a modulation operation of the optical signal output unit and the bias voltage applied to the phase modulation area. The control unit determines the bias voltage applied to the phase modulation area according to phase angle information of the control signal. The optical signal output unit applies the bias voltage determined by the control unit to the phase modulation area.Type: ApplicationFiled: March 18, 2016Publication date: March 1, 2018Inventor: Katsuhiro YUTANI
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Publication number: 20180059503Abstract: An optical modulator includes an optical modulation element including a plurality of signal electrodes and the like, a plurality of lead pins and the like for inputting radio frequency signals, and a relay substrate in which conductor patterns and the like that electrically connect the lead pins with the signal electrodes respectively are formed, the relay substrate is disposed so that a propagation direction of the radio frequency signals that have propagated through the lead pins is bent and guided to the conductor patterns, and the relay substrate is constituted so that widths of gaps between the plurality of conductor patterns in the optical modulator-side edge of the relay substrate is smaller than, preferably smaller than 50% of widths of gaps between the plurality of conductor patterns in the lead pin-side edge.Type: ApplicationFiled: August 24, 2017Publication date: March 1, 2018Inventors: Norikazu MIYAZAKI, Toru SUGAMATA
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Publication number: 20180059504Abstract: Methods and systems for a vertical junction high-speed phase modulator are disclosed and may include a semiconductor device having a semiconductor waveguide including a slab section, a rib section extending above the slab section, and raised ridges extending above the slab section on both sides of the rib section. The semiconductor device has a vertical pn junction with p-doped material and n-doped material arranged vertically with respect to each other in the rib and slab sections. The rib section may be either fully n-doped or p-doped in each cross-section along the semiconductor waveguide. Electrical connection to the p-doped and n-doped material may be enabled by forming contacts on the raised ridges, and electrical connection may be provided to the rib section from one of the contacts via periodically arranged sections of the semiconductor waveguide, where a cross-section of both the rib section and the slab section in the periodically arranged sections may be fully n-doped or fully p-doped.Type: ApplicationFiled: September 1, 2017Publication date: March 1, 2018Inventors: Attila Mekis, Subal Sahni, Yannick De Koninck, Gianlorenzo Masini, Faezeh Gholami
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Publication number: 20180059505Abstract: An optical modulating device, a beam steering device, and a system employing the same are provided. The optical modulating device includes an active layer, a driver configured to electrically control a refraction index of the active layer, and a nano-antenna disposed on the active layer, and having a dual nano-antenna structure including a first nano-antenna and a second nano-antenna, the first nano-antenna having a length different from a length of the second nano-antenna, and the first nano-antenna being spaced apart from the second nano-antenna. The driver includes a first driver electrically connected to the first nano-antenna, and a second driver electrically connected to the second nano-antenna.Type: ApplicationFiled: August 23, 2017Publication date: March 1, 2018Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jisoo KYOUNG, Seokho SONG, Changgyun SHIN, Duhyun LEE
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Publication number: 20180059506Abstract: Nano antenna structures and methods of manufacturing the same are provided. A nano antenna structure includes a reflective layer, a transparent conductive layer disposed on the reflective layer, an insulating layer disposed on the transparent conductive layer, a nano antenna material layer disposed on the insulating layer, and an adhesion layer disposed between the insulating layer and the nano antenna material layer.Type: ApplicationFiled: August 23, 2017Publication date: March 1, 2018Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Changbum LEE, Sunil KIM, Duhyun LEE, Byounglyong CHOI
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Publication number: 20180059507Abstract: A laser beam steering device and a system including the same are provided. The laser beam steering device includes a waveguide through which a laser beam passes, and a cladding layer disposed on the waveguide. The cladding layer has a refractive index which changes according to an electrical signal applied thereto and thus a phase of a laser beam passing through the waveguide may be changed.Type: ApplicationFiled: August 25, 2017Publication date: March 1, 2018Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sunil KIM, Duhyun LEE, Changbum LEE, Byounglyong CHOI
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Publication number: 20180059508Abstract: Apparatus for generating ultraviolet (UV) pulsed laser-radiation for material-processing includes a laser-source providing infrared (IR) pulsed laser-radiation and a frequency-conversion module. A lithium tetraborate (Li2B4O7) crystal located within the frequency-conversion module converts the IR pulsed laser-radiation to UV pulsed laser-radiation by non-linear harmonic generation. The frequency-conversion module is an airtight enclosure that may be evacuated or contain a dry gas. A flexible optical fiber-assembly transports the IR pulsed laser-radiation from the laser-source to the frequency-conversion module.Type: ApplicationFiled: July 31, 2017Publication date: March 1, 2018Inventor: Ralf KNAPPE
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Publication number: 20180059509Abstract: An image capturing apparatus, comprises an image sensor having a focus detection pixel; a focus detection unit configured to perform focus detection, by using a signal from the focus detection pixel; a focus adjustment unit configured to control focus adjustment of an imaging lens; a lock unit configured to lock the focus adjustment of the imaging lens; and a control unit configured to control so as to, if the focus adjustment of the imaging lens is caused to transition from a locked state to a state where the focus adjustment lock is cancelled in continuous shooting, temporarily cause the continuous shooting to stop, and, after performing the focus adjustment of the imaging lens and confirming that the imaging lens has focused on the subject, restart the continuous shooting.Type: ApplicationFiled: August 17, 2017Publication date: March 1, 2018Inventor: Yasutaka Naka
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Publication number: 20180059510Abstract: Embodiments are directed to systems and methods for obstructing or preventing light from reaching a light detecting portion of a camera. In one scenario, a camera obstructing device is described which includes a structural housing that supports an obstructing member. The structural housing has a top channel and a bottom channel through which the obstructing member slides from an open position to a closed position. The obstructing member includes a raised edge that contacts an outside edge of the structural housing when in the open position, and another raised edge that contacts an opposite edge of the structural housing when in the closed position. The obstructing member has a section with an aperture that allows light to reach a camera in the open position, and another section with blocking material that prevents light from reaching the camera in the closed position.Type: ApplicationFiled: November 7, 2017Publication date: March 1, 2018Inventor: Ronald Glen Gustaveson, II
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Publication number: 20180059511Abstract: At least certain embodiments described herein provide a continuous autofocus mechanism for an image capturing device. The continuous autofocus mechanism can perform an autofocus scan for a lens of the image capturing device and obtain focus scores associated with the autofocus scan. The continuous autofocus mechanism can determine an acceptable band of focus scores based on the obtained focus scores. Next, the continuous autofocus mechanism can determine whether a current focus score is within the acceptable band of focus scores. A refocus scan may be performed if the current focus score is outside of the acceptable band of focus scores.Type: ApplicationFiled: July 28, 2017Publication date: March 1, 2018Inventors: Ralph Brunner, David Hayward
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Publication number: 20180059512Abstract: An electronic device is provided. The electronic device includes an image sensor for capturing an image; a barrel including a lens group arranged about a first axis perpendicular to the image sensor, a first housing fixed to the barrel; a second housing disposed under the first housing and coupled to the first housing; at least one magnetic substance disposed at one side of the first housing; and at least one coil disposed at one side of the second housing. When power is supplied to the at least one coil, electromagnetic force is generated between the at least one coil and the at least one magnetic substance. And if the electromagnetic force is generated, the first housing rotates clockwise or counterclockwise, and the barrel moves along the first axis.Type: ApplicationFiled: August 7, 2017Publication date: March 1, 2018Inventors: Hyung Jin RHO, Byung Kwon KANG, Young Bok YU, Sung Wook CHOI, Dong Hun YU, Ki Huk LEE
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Publication number: 20180059513Abstract: The present invention provides as an aspect thereof an accessory apparatus detachably attachable to an image-capturing apparatus. The accessory apparatus includes an accessory communicator configured to enable communication with the image-capturing apparatus, and an accessory controller configured to perform the communication with the image-capturing apparatus through the accessory communicator. The accessory controller is configured, in response to detecting an error in the communication, to transmit an error notice that notifies the image-capturing apparatus of the error, and to perform a communication restoration process for restoring the communication, without waiting for a response to the error notice from the image-capturing apparatus.Type: ApplicationFiled: August 17, 2017Publication date: March 1, 2018Inventor: Shunichiro Ikeda
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Publication number: 20180059514Abstract: A swivel mount locking apparatus is configured to mount a camera system onto a target user, an object, or a surface. The camera system is mounted on a swivel component which can be rotated to a variety of different positions relative to a base component. To fix the camera position, a locking protrusion of a release lever in the base component is compressibly inserted into a detent located on the swivel component. When a new orientation of the camera system is desired, a user may forcibly pivot the release lever away from the swivel component to decouple the locking protrusion from the detent. The user can then rotate the mounted camera system and the swivel component to the new orientation relative to the base component. At the new orientation, the user may recouple the locking protrusion of the release lever into a different detent of the swivel component, thereby fixing the camera system into the desired, new orientation.Type: ApplicationFiled: August 29, 2016Publication date: March 1, 2018Inventors: Joshua Todd Druker, Christopher Aaron Clearman
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Publication number: 20180059515Abstract: A camera mount, assembly, and method for supporting a number of cameras side-by-side along a linear or curvilinear path. The camera mount includes a rigid body having a tab and a coupling flange extending from opposite ends thereof. Tabs and flanges of adjacent mounts are overlapped and coupled via a fastener installed therethrough. A spring washer is installed on the fastener to preload the joint against relative movements, but the mounts are pivotable by hand about an axis formed by the fastener. Angular orientation between adjacent mounts can be defined using a gauge inserted between opposing faces of the mounts. Cameras are disposable on each mount and retained thereon by an elastic band extending over the camera and retained on catches provided on each side of the mount. The assembly of camera mounts is substantially rigid thus requiring few support devices.Type: ApplicationFiled: August 30, 2016Publication date: March 1, 2018Applicant: Freedom360 LLCInventor: Steven M. Greenthal
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Publication number: 20180059516Abstract: An adjustable mount (2) for a camera, comprising a base (6) for mounting to an object in a fixed position and a body (4) that is removably connected to the base (6), the base (6) defining a horizontal plane for the adjustable mount (2), and wherein, when the body (4) is connected to the base (6) in use, the body (4) is rotatable about a vertical axis passing through the base (6) and a mounting portion (32) of the body (4) is pivotable away from the horizontal plane so as to enable adjustment of an orientation of a camera supported on the mounting portion (32).Type: ApplicationFiled: April 29, 2016Publication date: March 1, 2018Inventors: Christopher James Taylor, Martin Riddiford
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Publication number: 20180059517Abstract: A projection display device includes a plurality of reflective liquid crystal panels, a plurality of polarizers, and a combining optical system. The combining optical system includes a first incident surface to which first color light emitted from a first reflective liquid crystal panel and reflected by a combining surface of the combining optical system is incident and a second incident surface to which second color light emitted from a second reflective liquid crystal panel and passing through the combining surface is incident. The polarizes include a first polarizer, which reflects the first color light to the first incident surface, and a second polarizer which reflects the second color light to the second incident surface. An alignment direction of the liquid crystal of the first reflective liquid crystal panel is orthogonal to an alignment direction of the liquid crystal of the second reflective liquid crystal panel.Type: ApplicationFiled: August 15, 2017Publication date: March 1, 2018Inventors: Takatsugu Aizaki, Shinji Kikuma
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Publication number: 20180059518Abstract: Provided are: a light source device; first, second, and third color separation elements; first, second, and third reflective members which reflect first, second, and third color light in a third direction; first, second, and third reflective liquid crystal panels which optically modulate the first, second, and third color light; a combining optical system which combines the optically modulated first, second and third color light to generate combined light; a projection optical system which projects the combined light; and a relay optical system which is arranged in an optical path of the first color light between the first color separation element and the first reflective liquid crystal panel and forms an erect image.Type: ApplicationFiled: August 29, 2017Publication date: March 1, 2018Inventors: Takatsugu Aizaki, Shinji Kikuma, Yasuki Arihara
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Publication number: 20180059519Abstract: Provided are a zoom lens that has a small size with a wide angle and has a simple configuration, a projection display device including the zoom lens, and an imaging apparatus including the zoom lens. The zoom lens forms an intermediate image at a position conjugate to a reduction side imaging plane and forms the intermediate image again on a magnification side imaging plane. The zoom lens includes: a first optical system on the magnification side; and a second optical system on the reduction side. The intermediate image is formed between the magnification side and the reduction side. The second optical system includes two movable lens groups, which move by changing spacings between the groups adjacent to each other in a direction of an optical axis during zooming, and two stationary lens groups which remain stationary with respect to the reduction side imaging plane during zooming.Type: ApplicationFiled: August 28, 2017Publication date: March 1, 2018Applicant: FUJIFILM CorporationInventors: Yukiko NAGATOSHI, Kazuki INOUE, Akiko NAGAHARA
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Publication number: 20180059520Abstract: A wall controller is provided. The wall controller includes a projection screen having an input device and a projector arranged to project a digital image onto the projection screen from the projector, wherein the projector has an optical axis that is non-orthogonal to the projection screen. The wall controller includes a housing having the projection screen mounted thereto at a first end of the housing, the housing having the projector at a second end of the housing. The housing is dimensioned to fit the second end of the housing through an aperture in a first wall, fit the second end into a wall space between the first wall and a second wall, and fit a majority of the first end of the housing into the aperture until the projection screen is parallel to a surface of the first wall and a front portion of the projection screen is flush with, recessed in or extends from the surface of the first wall. The aperture dimensioned to fit the first end of the housing or the front portion of the projection screen.Type: ApplicationFiled: August 30, 2017Publication date: March 1, 2018Applicant: Kinestral Technologies, Inc.Inventors: Antoine Dubois, John Bogdan, Paul Nagel, Craig Henricksen, Stephen Coffin, Wally Barnum
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Publication number: 20180059521Abstract: A light source device includes a first light-source unit, a second light-source unit, and a third light-source unit emitting light of spectra different from each other. Each of the first through third light-source units includes a heat dissipator and a light source. The light source includes a light emitting device. The heat dissipators of the first through third light-source units are disposed in an ascending order of values of T/Q of the first through third light-source units, in a direction of cooling air flow. “Q” represents a heat generation amount from the light source of each of the first through third light-source units, when the light sources are driven to obtain predetermined light intensity and lifespan. “T” represents a preset, upper-limit temperature for the light emitting device of each of the first through third light-source units to obtain the predetermined light intensity and lifespan.Type: ApplicationFiled: July 10, 2017Publication date: March 1, 2018Applicant: Ricoh Company, Ltd.Inventors: Takehiro NISHIMORI, Tetsuya Fujioka, Yasunari Mikutsu, Hideo Kanai, Satoshi Tsuchiya, Jun Mashimo
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Publication number: 20180059522Abstract: A light converter (200) comprises: a solid-state light conversion material (201) that generates emission light from excitation light incident on its surface; a filler layer (230, 240) on the surface of the solid-state light conversion material (201); and an optical coating (220, 250) on the filler layer. The optical coating (220, 250) may be a thin film, such as an anti-reflective coating (220) and/or a high-reflective coating (250). A metallic coating (260) may additionally be provided. The light converter (200) may be used for an optical device, such as a phosphor wheel or automotive headlight.Type: ApplicationFiled: April 7, 2015Publication date: March 1, 2018Inventors: Yuyong Huang, Simon Cao
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Publication number: 20180059523Abstract: An illumination device includes a first light source section adapted to emit first colored light having a peak wavelength at a first wavelength, a second light source section adapted to emit second colored light having a peak wavelength at a second wavelength, a wavelength conversion element adapted to convert a part of the first colored light and a part of the second colored light into third colored light, and then emit another part of the first colored light, another part of the second colored light, and the third colored light, and a control section adapted to individually control an amount of light per unit time of the first colored light emitted from the first light source section, and an amount of light per unit time of the second colored light emitted from the second light source section.Type: ApplicationFiled: August 4, 2017Publication date: March 1, 2018Applicant: SEIKO EPSON CORPORATIONInventor: Kunihiko TAKAGI
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Publication number: 20180059524Abstract: The present disclosure provides an image display method and an image display system. The image display system includes a light source, a light-splitting device and n display devices, where n is greater than or equal to 2. The light source is configured to generate an initial light beam and project the initial light beam to the light-splitting device. The light-splitting device is configured to split the initial light beam into n light beams with an identical light intensity and project each light beam to a respective one of the display devices. Each display device is configured to modulate the light beam projected from the light-splitting device, so as to display a predetermined region of a target image. The predetermined regions displayed by the n display devices are combined into the target image.Type: ApplicationFiled: July 25, 2017Publication date: March 1, 2018Applicants: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO. LTD.Inventor: Hui DONG
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Publication number: 20180059525Abstract: The present invention is directed to a laser light source for a vehicle.Type: ApplicationFiled: October 27, 2017Publication date: March 1, 2018Inventors: James W. Raring, Paul Rudy
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Publication number: 20180059526Abstract: A optical projection apparatus including a refractive system and a reflective system includes a optical projection enclosure and a light transmissive plate, which transmits projection light. The optical projection enclosure includes a light transmissive plate holding section. An interposing member (a first interposing member, a second interposing member) having elasticity is provided between the light transmissive plate and the holding section, and the interposing member covers the entirety of divided portions of the holding section. The first interposing member is disposed in the holding section or on a side section of the light transmissive plate, and the second interposing member is disposed on an outer circumferential end surface of the light transmissive plate. The interposing member is pressed by the light transmissive plate and held in the light transmissive plate holding section.Type: ApplicationFiled: March 1, 2016Publication date: March 1, 2018Applicant: SEIKO EPSON CORPORATIONInventors: Naoto TAKEHANA, Nobuyuki OTSUKI, Satoshi KOMATSU
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Publication number: 20180059527Abstract: A mountable projector for illuminating an area near the mountable projector. The mountable projector includes a body and a light source, the light source providing light. The mountable projector also includes an image filter, where the light from the light source passes through the image filter and produces an image and a lens, where the lens focuses the image produced by the light filter. The mountable projector also includes an attachment, where the attachment is configured to allow the body to be mounted to a desired surface.Type: ApplicationFiled: September 5, 2017Publication date: March 1, 2018Inventor: Matthew Aaron Alexander
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Publication number: 20180059528Abstract: Provided herein are systems and methods to configure an immersive theater environment by moving one or more screens. A movie screen can be provided with one or more actuators coupled to the movie screen, wherein the one or more actuators are configured to move the movie screen in a plurality of directions including, for example, up, down, left, right, back, forward, pitch, roll, and yaw. This system can include a processor coupled to the actuator, wherein the processor is configured to control the movement of the one or more actuators, synchronize cinema content for movement of the movie screen, process cinema content for metadata cues indicating movement of the movie screen, and track positions of the movie screen.Type: ApplicationFiled: September 5, 2017Publication date: March 1, 2018Inventor: Alexander William Gocke
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Publication number: 20180059529Abstract: The disclosure is related to a lithographic mask for EUV lithography, to a method for producing the mask, to a method for printing a pattern with the mask, to a stepper/scanner configured to print a pattern with the mask as well as to a computer-implemented method for calculating a deformation of the pattern. The mask comprises an absorber pattern, which is intentionally deformed in the 2-dimensional plane of the EUV mask, with respect to the intended pattern. The deformation of the pattern is based on a previous measurement of the location of multilayer defects on the blank, and calculated so that in the deformed pattern, a maximum of multilayer defects are covered by absorber material. When the pattern is subsequently printed on a semiconductor wafer in a stepper/scanner, the scanner operation is modulated so that the pattern deformation is not reproduced on the wafer.Type: ApplicationFiled: August 30, 2017Publication date: March 1, 2018Applicant: IMEC VZWInventors: Rik Jonckheere, Koen D'have
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METHOD FOR MANUFACTURING MULTILAYER FILM-DEPOSITED SUBSTRATE AND MULTILAYER FILM-DEPOSITED SUBSTRATE
Publication number: 20180059530Abstract: A method for manufacturing a multilayer film-deposited substrate includes stacking a plurality of lamination units on the substrate while rotating the substrate around a rotational axis perpendicular to a substrate surface. Each of the lamination units has a plurality of layers formed by a dry deposition process. When a plurality of the multilayer film-deposited substrates are manufactured by the dry deposition process, a deposition is performed in a condition satisfying at least one of the following requirements (1) and (2), with estimating a change with time in a deposition rate: [Tdepo-unit/Tr<(m?0.02) or (m+0.02)<Tdepo-unit/Tr] (1), and [(n?0.02)?Ti/Tr?(n+0.02)] (2). m and n are independently any integer. Ti is a time interval between the depositions among each layer of the plurality of layers. Tdepo-unit is a deposition unit time required for depositing the one lamination unit. Tr is a rotation period of the substrate.Type: ApplicationFiled: August 2, 2017Publication date: March 1, 2018Applicant: ASAHI GLASS COMPANY, LIMITEDInventors: Yunosuke Ishikawa, Masaki Mikami, Makoto Kurumisawa -
Publication number: 20180059531Abstract: The present disclosure provides a phase shift mask. The phase shift mask includes a transparent substrate; an etch stop layer disposed on the substrate; and a tunable transparent material layer disposed on the etch stop layer and patterned to have an opening, wherein the tunable transparent material layer is designed to provide phase shift and has a transmittance greater than 90%.Type: ApplicationFiled: May 17, 2017Publication date: March 1, 2018Inventors: Yun-Yue Lin, Hsin-Chang Lee
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Publication number: 20180059532Abstract: A halftone phase shift mask blank comprising a transparent substrate and a halftone phase shift film thereon is prepared through the step of depositing the halftone phase shift film on the substrate by using a sputtering gas containing rare gas and nitrogen gas, and plural targets including at least two silicon targets, applying powers of different values to the silicon targets, effecting reactive sputtering, and rotating the substrate on its axis in a horizontal direction. The halftone phase shift film has satisfactory in-plane uniformity of optical properties.Type: ApplicationFiled: August 11, 2017Publication date: March 1, 2018Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventor: Yukio INAZUKI
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Publication number: 20180059533Abstract: Methods for correcting target patterns and masks having corrected target patterns are provided. An exemplary correction method includes dividing contours of target patterns into fragments; performing an optical proximity correction to obtain mask patterns; obtaining simulated exposure patterns; detecting the simulated exposure patterns to find out existence of at least one weak point; determining a correction window in the target patterns; comparing the target patterns in the correction window with the simulated exposure patterns to obtain a position error of each fragment; calculating an effect value of a correction value of each fragment in the correction window on position errors of all fragments in the correction window; determining the correction value of each fragment according to the effect value of the correction value in the correction window on position errors of all fragments and the position error of each fragment; and obtaining corrected target patterns using the correction value.Type: ApplicationFiled: August 3, 2017Publication date: March 1, 2018Inventors: Yao Jun DU, Liang LI
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Publication number: 20180059534Abstract: A method includes depositing a first material layer over a first substrate; and depositing a graphene layer over the first material layer. The method further includes depositing an amorphous silicon layer over the graphene layer and bonding the amorphous silicon layer to a second substrate, thereby forming an assembly. The method further includes annealing the assembly, thereby converting the amorphous silicon layer to a silicon oxide layer. The method further includes removing the first substrate from the assembly and removing the first material layer from the assembly, thereby exposing the graphene layer.Type: ApplicationFiled: November 18, 2016Publication date: March 1, 2018Inventors: Chih-Chiang Tu, Chun-Lang Chen, Chue San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai, Ping-Yin Liu, Hsin-Chang Lee, Chih-Cheng Lin, Yun-Yue Lin
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Publication number: 20180059535Abstract: A method includes depositing a first material layer over a substrate; and depositing a graphene layer over the first material layer, thereby forming a first assembly. The method further includes attaching a carrier to the graphene layer; removing the substrate from the first assembly; and removing the first material layer from the first assembly.Type: ApplicationFiled: November 18, 2016Publication date: March 1, 2018Inventors: Chih-Chiang Tu, Chun-Lang Chen
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Publication number: 20180059536Abstract: There is provided a pellicle frame which prevents particles such as carbon black particles or filler particles from contaminating a photomask even when stray light hits the inside face of the pellicle frame in the exposure step of photolithography. More specifically, provided are a pellicle frame including a frame base, and a polymer coating layer coating at least an inner circumferential surface of the frame base, the polymer coating layer including an outermost polymer layer on a side farthest away from the frame base and one or more inner polymer layers between the frame base and the outermost polymer layer, wherein at least one of the one or more inner polymer layers contains particles, and the outermost polymer layer contains no particles or has a particle concentration lower than a highest particle concentration among the one or more inner polymer layers; and a pellicle including the pellicle frame.Type: ApplicationFiled: August 16, 2017Publication date: March 1, 2018Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventor: Yuichi HAMADA
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Publication number: 20180059537Abstract: A method of forming patterns is provided. The method includes forming a resist layer on a substrate, forming a lattice-shaped extrusion barrier region in the resist layer to define pattern transfer regions corresponding to a plurality of separate windows, and positioning a template on the resist layer so that a patterned surface of the template faces the resist layer. The patterned surface provides a plurality of transfer patterns. The template is pressed to perform an imprint step for embedding the transfer patterns of the template into the pattern transfer regions of the resist layer.Type: ApplicationFiled: May 8, 2017Publication date: March 1, 2018Inventor: Woo Yung JUNG
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Publication number: 20180059538Abstract: A method for forming a color filter array includes the step of forming a first color filter array by forming a first color filter film on a surface of a base member using a coating method and by patterning the first color filter film and the step of forming a second color filter array by forming a second color filter film on the surface so as to cover the first color filter array using a coating method and by patterning the second color filter film. The color filters in the first color filter array are uneven in the width of the clearance between the color filters and/or the widths of the color filters.Type: ApplicationFiled: August 23, 2017Publication date: March 1, 2018Inventors: Mitsuhiro Yomori, Yuto Nozaki, Mariko Furuta, Kiyoto Murakumo
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Publication number: 20180059539Abstract: A substrate processing apparatus according to the present disclosure includes: a nozzle that ejects a processing liquid to a wafer; a force-feeding unit that force-feeds the processing liquid to the nozzle side; a liquid feeding pipeline that includes first and second valves and guides the processing liquid from the force-feeding unit to the nozzle; and a controller. The controller is configured to perform opening the first valve in a state where the second valve is closed and a pressure between the first and second valves is higher than a pressure between the force-feeding unit and the first valve, controlling the force-feeding unit to increase the pressure between the first and second valves that has been decreased by the opening of the first valve, and opening the second valve after the pressure between the first and second valves is decreased by the opening of the first valve.Type: ApplicationFiled: August 22, 2017Publication date: March 1, 2018Inventors: Shinichi Hatakeyama, Masanobu Watanabe, Kouzo Nishi, Seiya Totsuka, Kentaro Yoshihara
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Publication number: 20180059540Abstract: According to several embodiments, a composition of matter includes: a three-dimensional structure comprising photo polymerized molecules. At least some of the photo polymerized molecules further comprise one or more protected click-chemistry compatible functional groups; and at least portions of one or more surfaces of the three-dimensional structure are functionalized with one or more of the protected click-chemistry compatible functional groups. An additive manufacturing resin suitable for fabricating a click-chemistry compatible composition of matter includes: a photo polymerizable compound; and a click-chemistry compatible compound.Type: ApplicationFiled: August 31, 2016Publication date: March 1, 2018Inventors: Patrick Campbell, Eric Duoss, James Oakdale
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Publication number: 20180059541Abstract: According to various embodiments, systems, methods, and computer program products for click-chemistry compatible structures, additive manufacturing resins for forming the same, and method of formation of such structures and resins, as well as techniques for functionalizing click-chemistry compatible structures are disclosed. The inventive structures generally include a plurality of photo polymerized molecules structurally arranged according to a three-dimensional pattern, while surfaces of the structure are functionalized with one or more click-chemistry compatible molecules each having one or more click-chemistry compatible functional groups. The structures may be formed from single- or dual-component resins, each having unique synthetic pathways. The resulting structures may be functionalized for utility in a wide range of applications by leveraging click chemistry to further functionalize the structure with organic additives also compatible with click-chemistry reaction schemes.Type: ApplicationFiled: August 31, 2016Publication date: March 1, 2018Inventors: Patrick Campbell, Eric Duoss, James Oakdale
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Publication number: 20180059542Abstract: A photoacid-generating compound has the structure where R1, R2, R3, R4, Q, and X are defined herein. The photoacid-generating compound can be used as a component of a photoresist composition, or as a monomer incorporated into a polymer useful in a photoresist composition. The photoacid-generating compound provides a desired balance of solubility and line width roughness.Type: ApplicationFiled: August 31, 2016Publication date: March 1, 2018Inventors: Emad Aqad, William Williams, III, Cong Liu
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Publication number: 20180059543Abstract: A sulfonium salt containing an acid-eliminatable substituent group which is effective for improving contrast is highly soluble and uniformly dispersible. A resist composition comprising the sulfonium salt as photoacid generator forms a pattern with a high resolution, rectangularity, and reduced LWR.Type: ApplicationFiled: August 30, 2017Publication date: March 1, 2018Applicant: Shin-Etsu Chemical Co., Ltd.Inventors: Ryo Mitsui, Takayuki Fujiwara, Ryosuke Taniguchi, Koji Hasegawa, Masaki Ohashi
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Publication number: 20180059544Abstract: A liquid solder resist composition contains a carboxyl group-containing resin, a photopolymerizable compound containing at least one compound selected from a group consisting of a photopolymerizable monomer and a photopolymerizable prepolymer, a photopolymerization initiator, and a titanium dioxide. The photopolymerization initiator contains a bisacylphosphine oxide-based photopolymerization initiator, a first ?-hydroxyalkyl phenone-based photopolymerization initiator that is a liquid at 25° C., and a second ?-hydroxyalkyl phenone-based photopolymerization initiator that is a solid at 25° C.Type: ApplicationFiled: November 7, 2017Publication date: March 1, 2018Inventors: Yoshio Sakai, Nobuhito Hamada, Michiya Higuchi, Tokuzan Miyake
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Publication number: 20180059545Abstract: In one preferred embodiment, polymers are provided that comprise a structure of the following Formula (I): Photoresists that comprises such polymers also are provided.Type: ApplicationFiled: August 31, 2016Publication date: March 1, 2018Inventors: Eui Hyun Ryu, Min Kyung Jang, Jung Woo Kim, Kwang-Mo Choi, Hyun Jeon, Woo-Hyung Lee, Myung-Yeol Kim
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Publication number: 20180059546Abstract: Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si—O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.Type: ApplicationFiled: September 1, 2016Publication date: March 1, 2018Inventors: Li Cui, Charlotte A. Cutler, Suzanne M. Coley, Owendi Ongayi, Christopher P. Sullivan, Paul J. LaBeaume, Shintaro Yamada, Mingqi Li, James F. Cameron
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Publication number: 20180059547Abstract: Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si—O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.Type: ApplicationFiled: September 1, 2016Publication date: March 1, 2018Inventors: Charlotte A. Cutler, Suzanne M. Coley, Owendi Ongayi, Christopher P. Sullivan, Paul J. LaBeaume, Li Cui, Shintaro Yamada, Mingqi Li, James F. Cameron
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Publication number: 20180059548Abstract: A microlithographic exposure system includes a catadioptric projection objective that includes a plurality of lenses and at least one concave mirror arranged as first, second, and third objective parts. The system also includes a plurality of manipulators each coupled to a respective optical element, each manipulator coupled to a lens being configured to adjust the respective lens, and a manipulator coupled to the at least one concave mirror being configured to vary a shape of the concave mirror. A scanning system is configured to move the mask and wafer relative to the objective. A control system is programmed to synchronize operation of the manipulators and the scanning system to vary a field curvature and a distortion of the catadioptric projection objective, and least one of the lenses is adjusted during motion of the mask and wafer relative to the objective.Type: ApplicationFiled: June 6, 2017Publication date: March 1, 2018Inventor: Dirk Juergens