Abstract: A drain electrode 25 of a TFT 21 overlaps with a gate electrode formed integrally with a gate line 23. A pixel electrode 22 has a main body part formed on a first side of the gate line 23, and an extension part extending in an extending direction of a data line 24 and covering an overlapping portion of the gate electrode and the drain electrode 25. The drain electrode 25 is not formed on a second side of the gate line 23, whereas the extension part of the pixel electrode 22 is formed also on the second side of the gate line 23. Even when a position of the pixel electrode 22 is shifted in the extending direction of the data line 24, a parasitic capacitance between a drain and a source of the TFT 21 is kept constant, because an area of a portion where the extension part of the pixel electrode 22 overlaps with the gate line 23 does not change. With this, degradation of display quality due to a variation in the parasitic capacitance between the gate and drain of the TFT 21 can be prevented.

Abstract: A liquid crystal panel includes: first and second substrates arranged to be opposite each other at a predetermined gap; a liquid crystal layer filled between the first and second substrates; alignment films; a counter electrode pattern formed on the first substrate; and a pixel electrode pattern formed on the first substrate so as to have a plurality of electrode branches, wherein the extension direction of at least one of slits formed at both ends from among slits formed between the plurality of electrode branches crosses the alignment direction of the liquid crystal layer at an angle of 7° or larger.

Abstract: A common structure of HVA pads comprises a set of HVA pads for common use. The set of HVA pads includes n clock pads, m DC high potential pads for inputting DC high potentials, a DC low potential pad for inputting a DC low potential, and n clock transferring circuits corresponding to the n clock pads separately. m is a natural number larger than one illustrating the number of chips using in common the set of HVA pads, n is a natural number. The n clock pads are connected separately to the corresponding n clock transferring circuits for inputting corresponding clock signals to the n clock transferring circuits individually. The m DC high potential pads and the DC low potential pad are connected to each the clock transferring circuit for inputting m DC high potentials and a DC low potential to each the clock transferring circuit.

Abstract: The present invention provides an array substrate and a manufacturing method thereof. The array substrate includes: a backing plate, a TFT layer arranged on the backing plate, a protective layer covering the backing plate and the TFT layer, a color resist layer arranged on the protective layer, an organic planarization layer set on and covering the color resist layer and the protective layer, and a BPS light-shielding layer arranged on the organic planarization layer. The BPS light-shielding layer includes: a black matrix and a main photo spacer and a sub photo spacer arranged on the black matrix. The organic planarization layer is formed with a first recess in an area thereof that corresponds to at least a part of the black matrix and the first recess is filled up with the black matrix.

Abstract: According to one embodiment, a display device comprises a first substrate, the first substrate includes a gate line, first to third source lines, a first pixel electrode located between the first source line and the second source line and electrically connected with a first switching element, a second pixel electrode located between the first source line and the second source line and electrically connected with a second switching element, and a third pixel electrode intersecting the gate line, adjacent to the first pixel electrode and the second pixel electrode to sandwich the second source line and the third source line, and electrically connected with a third switching element.

Abstract: A display panel includes a substrate, a thin-film transistor (TFT) disposed on the substrate, a first electrode electrically connected to the thin-film transistor, a roof layer disposed on the first electrode and a liquid crystal layer. The roof layer includes an organic insulating material, and defines a cavity that overlaps the first electrode. The liquid crystal layer is disposed in the cavity and is in direct contact with the roof layer.

Abstract: A liquid crystal display including a semiconductor layer disposed on a substrate, a transparent electrode disposed n the semiconductor layer, the transparent electrode overlapping the semiconductor layer and including a source electrode, a drain electrode facing the source electrode, and a first electrode extending from the drain electrode, and an insulating layer disposed on the transparent electrode. The semiconductor layer contacts an entire surface of the source electrode, the drain electrode, and the first electrode.

Abstract: A manufacturing method of a TFT substrate uses a bottom gate structure and the entire process can be completely done with seven masks. The number of masks used is reduced. The manufacturing process of a TFT substrate is simplified. Product yield and increase productivity are effectively improved. By subjecting two ends of a semiconductor pattern to heavy ion doping to form a source electrode and a drain electrode, the manufacturing steps can be reduced and the source electrode and the drain electrode so formed do not need to extend through a via hole formed in an interlayer dielectric layer to get in connection with the two ends of the active layer so as to effectively reduce contact resistance and improve product yield. Also provided is a TFT substrate manufactured with the method.

Abstract: A pixel array substrate including a plurality of pixel units disposed on a substrate is provided. Each of the pixel units includes a scan line, a data line and an active element. The active element includes a semiconductor layer, a gate, a source electrode and a drain electrode. The semiconductor layer has a channel region, a source region, a drain region, a first connection region and a second connection region. The first connection region is connected between the channel region and the source region. The second connection region is connected between the channel region and the drain region. A normal projection of the first connection region on the substrate and a normal projection of the second connection region on the substrate are respectively located at two opposite sides of a normal projection of the data line on the substrate.

Abstract: An electrochromic (EC) privacy window includes an EC pane unit including a first EC device having a bright state and a dark state, and a privacy device facing the EC pane unit and having a bright state and a privacy state configured to attenuate visible radiation transmitted through the window. In some embodiments, when the privacy device is in the privacy state, the window has transmitted haze of greater that 80%. In other embodiments, when the privacy device is in the privacy state and the first EC device is in the dark state, the window has a visible transmittance of about 0.1% or less.

Abstract: A graphic display apparatus including a substrate including a first major surface and a second major surface, the substrate configured to transmit light when the graphic display apparatus is in a transmissive mode and reflect light when the graphic display apparatus is in a reflective mode; a reflective layer positioned on the first major surface of the substrate; a tint layer positioned on the second major surface; a diffuser layer including an image that is positioned on the tint layer such that the diffuser layer and the substrate sandwich the tint layer; and a light source located proximate the diffuser layer such that the light source and the diffuser layer sandwich the image, wherein, when the graphic display apparatus is in the transmissive mode, the light source illuminates the image such that the image is viewable from the first major surface of the substrate, and when the graphic display apparatus is in the reflective mode, the image is not illuminated by the light source and is not viewable from th

Abstract: A variable transmission display comprises an electrophoretic medium having electrically charged particles dispersed in a fluid, the electrophoretic medium being capable of assuming a light-transmissive state and a substantially non-light-transmissive state; a light-transmissive first electrode disposed adjacent one side of the electrophoretic medium; light-transmissive second electrodes disposed adjacent the other side of the electrophoretic medium; and voltage means for varying the potential each of the second electrodes independently of one another.

Abstract: A pluggable electric connector can communicate a communication data signal and a control signal with an optical communication apparatus. An optical signal output unit includes a Mach-Zehnder type optical modulator including a phase modulation area and outputs an optical modulation signal modulated according to the communication data signal. An optical power control unit can control optical power of the optical modulation signal. A pluggable optical receptor can output the optical modulation signal to an optical fiber. A control unit controls a modulation operation of the optical signal output unit and the bias voltage applied to the phase modulation area. The control unit determines the bias voltage applied to the phase modulation area according to phase angle information of the control signal. The optical signal output unit applies the bias voltage determined by the control unit to the phase modulation area.

Abstract: A functional optical device is disclosed. The functional optical device integrates a coupling unit, a waveguide photodiode (PD) and an optical waveguide on a semiconductor substrate. The coupling unit extracts an optical signal by performing interference of signal light with local light. The optical waveguide carries the optical signal from the coupling unit to the waveguide PD. The semiconductor substrate provides a heavily doped conducting layer and a buffer layer that is un-doped or lightly doped with n-type impurities by density smaller than density of impurities in the heavily doped conducting layer. The conducting layer and the buffer layer continuously and evenly extend from the optical waveguide to the waveguide PD.

Abstract: A device for controllably deflecting a first circularly-polarized (CP) light beam from an incident direction with fast response comprises a polarization selector (PS) to adjust the incident light beam's sense of rotation to a desired one to form a second CP light beam, and a polarization grating (PG) to deflect the second CP light beam according to the desired sense of rotation. The PS comprises an optical modulator sandwiched between two quarter-wave plates. The optical modulator has at least one ferroelectric liquid crystal (FLC) half-wave plate (HWP) being reconfigurable in fast axis orientation. The device has a fast response in beam steering due to a short time of reconfiguring the FLC HWP. Based on serially cascading multiple units each being this device, a beam-steering apparatus having fast response and enhanced steering resolution is obtained. The apparatus is usable for enhancing a field of view in projecting an image.

Abstract: The present invention is based on a two-dimensional photonic crystal where are inserted defects that originate two waveguides and one resonant cavity. An electromagnetic signal that crosses the device is confined in the interior of the defects, due to the photonic band gap associated with the periodic structure that surrounds it. Its main function is the control of the flux of an electromagnetic signal over a communication channel, blocking (state off) or allowing (state on) the passage of the signal. It also promotes the change in the propagation direction of an electromagnetic signal by an angle of 120 degrees, providing greater flexibility in the design of integrated optical systems. The working principle of the device is based on the excitation of dipole modes in its resonant cavity, accordingly to the application of an external DC magnetic field on the magneto-optical material that constitutes it. In states on and off the magneto-optical material is magnetized and nonmagnetized, respectively.

Abstract: A terahertz-wave generating element includes a waveguide including an electro-optic crystal; an optical coupling member that extracts a terahertz wave, which is generated from the electro-optic crystal as a result of light propagating through the waveguide, to a space; and at least two electrodes that cause a first-order electro-optic effect in the electro-optic crystal by applying an electric field to the waveguide so as to change a propagation state of the light propagating through the waveguide. A crystal axis of the electro-optic crystal of the waveguide is set such that the terahertz wave generated by a second-order nonlinear optical process and the light propagating through the waveguide are phase-matched.

Abstract: An optical device with photon flipping for converting an incident light flux into a practically monochromatic light beam, the device including a cladding area including a photon crystal microstructure, the photon crystal microstructure having an allowed spectral band and a spectral band gap; a flipping area including a flipping fluorescent dye which has a spectral band for absorbing fluorescence, which covers at least part of the allowed spectral band, and a spectral band for emitting fluorescence, which covers at least part of the spectral band gap of the photon crystal microstructure; a central area arranged to enable propagation of a monochromatic light beam having a wavelength in the spectral band gap, the central area being surrounded by the photon crystal microstructure; the core area having a thickness which is less than or equal to five times the wavelength of the maximum fluorescence emission of the flipping fluorescent dye.

Abstract: An apparatus for generating narrow-band single and multi-photon state with long coherence length is disclosed. The apparatus comprises a laser pump (20) producing laser light, a non-linear optical crystal (30) within an optical cavity (40), wherein the optical cavity (40) comprises at least two mirrors (42, 44); and a tuning crystal (50) situated between the non-linear optical crystal (30) and a first one (42) of the at least two mirrors.

Abstract: An actuator of a camera module includes: a detection target; and a position detecting unit disposed to face the detection target and including at least two sensing coils respectively forming at least two oscillation circuits, wherein the position detecting unit detects a position of the detection target depending on at least two oscillation signals generated by the at least two oscillation circuits and having different frequency ranges.

Abstract: An image processing apparatus including: a display control unit configured to display highlighting corresponding to an in-focus degree of a subject included in an image on the basis of predetermined sensitivity and to perform control so that the sensitivity is determined depending on a predetermined condition.

Abstract: A method capable of performing an automatic focus function upon a specific movable object in a real-time manner, the method being applicable to a photographic apparatus with the automatic focus function, includes: capturing real-time image within a field of view (FOV) of a lens; comparing images of a plurality of image areas of the real-time image with a feature image of the specific movable object to identify an image area corresponding to the feature image of the specific movable object; and, performing automatic focus on the identified image area.

Abstract: An image capturing module includes a camera unit, a circuit board device connected to the camera unit, a heat dissipation device, and a casing enclosing the camera unit, the circuit board device, and the heat dissipation device. The circuit board device includes a circuit board unit disposed at a periphery of the camera unit and including a functional module. The heat dissipation device includes a heat sink attached on a surface of the functional module for dissipating heat from the functional module. The casing includes a ventilating window including a first opening portion and a second opening portion connected to the first opening portion. The second opening portion is arranged farther away from the front enclosure than the first opening portion, inclined relative to an optical axis of the camera unit, and oriented towards the front enclosure.

Abstract: A golf club head includes a club face and a body. The club face is formed from a metallic material and includes a first, hitting surface, a second, rear surface that is opposite the first surface, and a flange that is separated from the second surface by a transverse distance. The body is formed from a polymeric material and includes a crown, a sole, a hosel, and a face support. The club face and the body cooperate to define a closed volume, and the face support extends to opposing sides of the flange and is operative to couple the club face to the body.

Abstract: To provide an interchangeable lens, a camera system, a communication method, and a program in which lens data can be caused to be efficiently stored in an interchangeable lens, necessity of storing the lens data in the accessory can be eliminated by storing lens data in a case where an accessory is not mounted on the interchangeable lens and lens data in a case where the accessory is mounted on the interchangeable lens, and it is unnecessary to have a particular function of transmitting appropriate lens data to the accessory. An interchangeable lens includes a specifying unit that specifies a mounted accessory by acquiring identification information from the accessory, a storage unit including a first storage area that stores first lens data and a second storage area that stores one or a plurality of pieces of second lens data, a third lens data generation unit, and a lens control unit.

Abstract: A spherical camera is disclosed. The camera includes an imaging unit. A base of the camera includes a track. A spherical housing includes a first housing part for containing the imaging unit. A second housing part includes a dove tail shaped to be slidably received within the track of the base. A loop is positionable around a periphery surface of the base, the loop being tightenable from a first position wherein the spherical housing is tiltable along the track to a second position wherein the spherical housing is locked in position.

Abstract: Disclosed is an articulating arm camera mount for mounting an imaging device. The disclosed camera mount comprises a base, one or more arms, and a head that are movably secured to one another and are generally interchangeable with different components and pieces. The disclosed camera mount allows for greater flexibility and creativity in the placement and positioning of an imaging device.

Abstract: An image projection device for displaying an image onto a remote surface. The image projection device employs a scanner to project image beams of visible light and tracer beams of light onto a remote surface to form a display of the image. The device also employs a light detector to sense at least the reflections of light from the tracer beam pulses incident on the remote surface. The device employs the sensed tracer beam light pulses to predict the trajectory of subsequent image beam light pulses and tracer beam light pulses that form a display of the image on the remote surface in a pseudo random pattern. The trajectory of the projected image beam light pulses can be predicted so that the image is displayed from a point of view that can be selected by, or automatically adjusted for, a viewer of the displayed image.

Abstract: A light source module includes a solid-state light source and a wavelength conversion wheel. The solid-state light source provides a light beam. The wavelength conversion wheel has a wavelength conversion region and a penetration region. The wavelength conversion region converts the light beam to generate a conversion beam. A substrate of the wavelength conversion wheel includes a first surface and a second surface opposite to the first surface. The wavelength conversion region includes a first conversion region and a second conversion region. The first and the second conversion regions are respectively located on the first and the second surfaces. The penetration region is connected to the first and the second surfaces. The wavelength conversion region and the penetration region are symmetrically disposed by using a symmetry point of the substrate as a reference point. A projection apparatus including the light source module is disclosed.

Abstract: A multi-projection screening system may include a projection apparatus projecting an image, a plurality of projection surfaces onto which the image is projected, a polymer dispersed liquid crystal (PDLC) panel disposed in some of the plurality of projection surfaces, and a server controlling the PDLC panel. A method of controlling a PDLC panel may include the steps of checking whether an image is projected onto the PDLC panel and controlling a color displayed on the PDLC panel. A multi-projection screening method may include the steps of projecting an image onto a projection surface disposed in the front of a theater, checking whether an image is projected onto a PDLC panel, and controlling a color displayed on the PDLC panel. In accordance with embodiments of the present invention, a totally uniform image can be provided, and a sense of difference between front and side projection images can be prevented from occurring.

Abstract: Methods and apparatus to create and display screen stereoscopic and panoramic images are disclosed. Methods and apparatus are provided to generate multiple images that are combined into a stereoscopic or a panoramic image. An image may be a static image. It may also be a video image. A controller provides correct camera settings for different conditions. An image processor creates a stereoscopic or a panoramic image from the correct settings provided by the controller. A plurality of lens/sensor units is placed on a carrier. Lens/sensor units are rotationally aligned. A controller rotationally aligns images of lens/sensor units that are rotationally misaligned.

Abstract: The present invention is a method and an apparatus that can image objects immersed in optically opaque fluids using ultrasound in a confined space and in a harsh environment. If the fluid is not highly attenuating at frequencies above 1 MHz, where commercial ultrasound scanners are available, such scanners can be adapted for imaging in these fluids. In the case of highly attenuating fluids, such as drilling mud, then a low frequency collimated sound source is used.

Abstract: A photographic mask is provided in the present disclosure. The photographic mask includes a silicon-on-insulator (SOI) base and a stepped opening formed in the SOI base. The SOI base includes a silicon substrate, a median layer and a silicon layer, the median layer is arranged between the insulator substrate and the insulator layer. The stepped opening includes a first opening portion and a second opening portion, the first opening portion penetrates through the silicon layer and has a first opening area; the second opening portion at least penetrates through the silicon substrate and is aligned with the first opening portion. The second opening portion has a second opening area greater than the first opening area of the first opening portion. The present disclosure further provides a method for making a photographic mask.

Abstract: The present invention provides an imprint apparatus which performs an imprint process for forming a pattern on an imprint material on a substrate using a mold, the apparatus including an obtaining unit configured to obtain each shape of a plurality of shot regions on the substrate before the mold and the shot region as an imprint target on the substrate face each other, a first correction unit configured to correct, for each shot region on the substrate, a shape difference between a pattern of the mold and the shot region, a measurement unit configured to measure a displacement between the pattern of the mold and the shot region on the substrate, a second correction unit configured to correct the displacement, and a control unit configured to control the imprint process.

Abstract: According to one embodiment, an imprinting apparatus is provided. The imprinting apparatus includes a controller that controls a resist drop position on a wafer to be imprinted with a pattern, using a first resist drop recipe corresponding to a first topography of the wafer.

Abstract: The present invention provides an imprint apparatus including a chamber configured to define a first space including a processing unit which includes a discharge unit configured to discharge an imprint material onto a substrate and is configured to perform an imprint process of forming a pattern of the imprint material on the substrate by using a mold, and an enclosure configured to define a second space including a tank configured to store the imprint material supplied to the discharge unit, wherein the tank has a first opening open to the second space, and the enclosure has a supply port configured to supply, to the second space via the first opening, a gas cleaner than a gas supplied to the first space.

Abstract: A novel imprint material and film produced from the material, on which a pattern is transferred. An imprint material having: a component (A); a component (B); a component (C); and a component (D), wherein, (A): a compound of Formula (1), Formula (2), or Formula (3): wherein, X is C1-5 linear alkylene, R1 is H or CH3; each of R2, R3, and R4 is independently H, CH3, or C2H5; and the sum of the number of carbon atoms on R2, R3, and R4 is 0 to 2; (B): a silsesquioxane compound having a repeating unit of Formula (4), and having two or more polymerizable groups of Y; (C): a silicone compound having a repeating unit of Formula (5), and having two polymerizable groups on its ends: wherein, each of R6 and R7 is independently C1-3 alkyl; R5 is C1-3 alkylene; and k is 0 to 3; and (D): photopolymerization initiator.

Abstract: A resin composition comprises a polymer comprising a structural unit that comprises a group represented by formula (1), and a solvent. In the formula (1), R1 to R4 each independently represent a hydrogen atom, a fluorine atom or a monovalent organic group having 1 to 20 carbon atoms, wherein at least one of R1 to R4 has the fluorine atom or a group including the fluorine atom. R5 represents a substituted or unsubstituted trivalent chain hydrocarbon group having 1 to 7 carbon atoms. * denotes a binding site to other moiety of the structural unit. The structural unit is preferably represented by any one of formulae (2-1) to (2-3). In the formulae (2-1) to (2-3), Z represents a group represented by formula (1).

Abstract: Photosensitive, developer-soluble bottom anti-reflective coatings are described. Compositions and methods of forming the same are also disclosed along with resulting microelectronic structures. The anti-reflective compositions comprise a multi-functional epoxy compound having multiple epoxy moieties pendant therefrom and one or more crosslinkable chromophores bonded thereto. The compounds are dispersed or dissolved in a solvent system with a vinyl ether crosslinker and can be used to create crosslinkable and de-crosslinkable coatings for microelectronics fabrication.

Abstract: A hardmask composition includes a first material including one of an aromatic ring-containing monomer and a polymer containing a repeating unit including an aromatic ring-containing monomer, a second material including at least one of a hexagonal boron nitride and a precursor thereof, a chalcogenide-based material and a precursor thereof, and a two-dimensional carbon nanostructure and a precursor thereof, the two-dimensional carbon nanostructure containing about 0.01 atom % to about 40 atom % of oxygen, and a solvent.

Abstract: A substrate processing apparatus includes a spin chuck that holds a substrate, a processing liquid supply unit that supplies a first processing liquid having first specific gravity and a second processing liquid having second specific gravity smaller than the first specific gravity to a surface to be processed of the substrate held by the spin chuck, a collection tank that stores the used first and second processing liquids that have been supplied to the substrate, and a processing liquid separating mechanism that separates the first processing liquid and the second processing liquid based on specific gravity, the first and second processing liquids being stored in the collection tank.

Abstract: A method for generating a radiation light in a lithography exposure system. The method includes producing a predetermined gas pressure in a storage chamber to supply a first load of a target fuel in the storage chamber via a nozzle. The method further includes irradiating the target fuel from the nozzle with a laser to generate the radiation light. The method also includes increasing the gas pressure in a buffer chamber which receives a second load of target fuel to the predetermined gas pressure. In addition, the method includes actuating the flow of the target fuel from the buffer chamber to the storage chamber.

Abstract: In various embodiments, an exposure mask may include a carrier, a first exposure structure in a first structure plane of the carrier, and a second exposure structure in a second structure plane of the carrier. The two structure planes differ from one another.

Abstract: A real time software and array control software application platform which maintains the ability to manage the synchronization between substrate alignments and image projection systems during maskless lithography patterning in a manufacturing process is disclosed. The application coordinates and controls the image projection systems such that discrepancies in and misalignments of the substrate may be determined and accounted for in real time. The image projection systems may run in parallel and may be controlled by a central processor.

Abstract: Methods of reducing a pattern displacement error, contrast loss, best focus shift, and/or tilt of a Bossung curve, of a portion of a design layout used in a patterning process for imaging that portion onto a substrate using a lithographic apparatus. The methods include determining or adjusting one or more characteristics of one or more assist features using one or more rules based on one or more parameters selected from: one or more characteristics of one or more design features in the portion, one or more characteristics of the patterning process, one or more characteristics of the lithographic apparatus, and/or a combination selected from the foregoing.

Abstract: In a method of controlling a lithographic apparatus, historical performance measurements are used to calculate a process model relating to a lithographic process. Current positions of a plurality of alignment marks provided on a current substrate are measured and used to calculate a substrate model relating to a current substrate. Additionally, historical position measurements obtained at the time of processing the prior substrates are used with the historical performance measurements to calculate a model mapping. The model mapping is applied to modify the substrate model. The lithographic apparatus is controlled using the process model and the modified substrate model together. Overlay performance is improved by avoiding over- or under-correction of correlated components of the process model and the substrate model. The model mapping may be a subspace mapping, and dimensionality of the model mapping may be reduced, before it is used.

Abstract: Disclosed is a method of measuring a parameter of a lithographic process, and associated inspection apparatus. The method comprises measuring at least two target structures on a substrate using a plurality of different illumination conditions, the target structures having deliberate overlay biases; to obtain for each target structure an asymmetry measurement representing an overall asymmetry that includes contributions due to (i) the deliberate overlay biases, (ii) an overlay error during forming of the target structure and (iii) any feature asymmetry. A regression analysis is performed on the asymmetry measurement data by fitting a linear regression model to a planar representation of asymmetry measurements for one target structure against asymmetry measurements for another target structure, the linear regression model not necessarily being fitted through an origin of the planar representation. The overlay error can then be determined from a gradient described by the linear regression model.

Abstract: A method is described that includes illuminating a patterning device pattern with a radiation beam having a symmetric illumination mode, the patterning device pattern comprising a first pattern feature that substantially diffracts radiation of the radiation beam, and a second pattern feature that does not substantially diffract radiation of the radiation beam, introducing an asymmetry, relative to an optical axis, in the substantially diffracted radiation using a phase modulation element, illuminating a radiation beam receiving element with radiation emanating from the phase modulation element to form a receiving element pattern that is related to the patterning device pattern, the receiving element pattern having first and second receiving element pattern features related to the first and second pattern features respectively, and determining information at least indicative of a focal property from positional information regarding the relative positions of the first and second receiving element pattern featur

Abstract: A method of devising a target arrangement, and associated target and reticle. The target includes a plurality of gratings, each grating having a plurality of substructures. The method includes: defining a target area; locating the substructures within the target area so as to form the gratings; and locating assist features at the periphery of the gratings, the assist features being configured to reduce measured intensity peaks at the periphery of the gratings. The method may include an optimization process including modelling a resultant image obtained by inspection of the target using a metrology process; and evaluating whether the target arrangement is optimized for detection using a metrology process.

Abstract: A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission, falling within the semiconductor manufacturing equipment technology.