Abstract: A welding structure includes: a first metal member and a second metal member that are superimposed and welded together. The first metal member has a hole. The second metal member includes a nugget portion where a part of the second metal member has been melted by heat of laser light and has re-solidified. A peripheral portion of the hole in the first metal member covers the nugget portion. A part of the nugget portion is exposed through the hole.

Abstract: The present disclosure provides methods of forming products using one or more lasers. In at least one aspect, a method for powder bed additive manufacturing includes defining a uniform pitch raster path for a laser traveling at a predetermined rate of travel. The raster path alternates back and forth within a strip width of less than 0.5 mm such that the laser's power density level is at least 80 percent of maximum power and the predetermined rate of travel yields a travel speed in the scan width direction of not less than 1,000 mm/s. The method includes depositing a layer of powder onto a substrate and causing the laser to solidify a quantity of the powder according to the defined raster path and the laser power setting.

Abstract: The present disclosure relates to an additive manufacturing system for forming a part using a powder material. In one embodiment the system makes use of a primary heat generating subsystem to generate a fusing beam for heating and fusing at least one of select portions of a powder layer, or an entire area of a powder layer, deposited on a build plate. The system also incorporates a beam steering subsystem for steering the fusing beam over the powder layer. A supplemental heating subsystem is used to generate a wide area beam to heat a portion of the powder layer either prior to fusing, along with the fusing operation, or subsequent to fusing of the powder with the fusing beam. The wide area beam has an intensity which is insufficient to fuse the powder, and alters a microstructure of the powder layer as the powder layer is at least one of fused or as it cools, to thus relieve stress in the part.

Abstract: A method for forming a gradient metallic body can include forming a first metallic deposit by providing a first quantity of metal feedstock and selectively applying energy via an energy source to the first quantity of metal feedstock, and iteratively forming additional metallic deposits by providing an additional quantity of metal feedstock contiguous with a previously formed metallic deposit and selectively applying energy via the energy source to the additional quantity of metal feedstock. The energy applied via the energy source while forming the additional metallic deposits is iteratively varied such that the gradient metallic body is formed and comprises a first end, a second end, and a middle portion, wherein a material characteristic of the gradient metallic body transitions in the middle portion between the first end and the second end.

Abstract: An assembly for measuring metal powder material mass flow rate during direct metal deposition is disclosed. A detection strip is placed in the gas-blown metal powder material flow path. The detection strip is fixed in one end and suspended at the other end. The flowing metal powder material particles induce displacement to the detection strip. A displacement measurement sensor measures the amount of displacement of the detection strip. The amount of displacement of the detection strip gives relationship to the amount of the metal powder material flowing in the metal powder material flow path. Preferably, the detection strip and the sensor are enclosed in a housing with a metal powder material inlet port and metal powder material outlet port and includes internal features for smooth travel of metal powder material particles.

Abstract: A fixture for use in an additive manufacturing and heat treatment process is disclosed. The fixture includes a tool with an upper surface and a lower surface, and an attachment system configured to releasably secure a substrate to the upper surface of the tool. The tool includes a body with an upper face and a lower face, and a reinforcement layer cladding the upper or lower face of the body. The reinforcement layer may be a superalloy.

Abstract: An electronic device includes a support member and a mount member mounting on the support member. The support member and the mount member are sealed by a resin member. The support member includes a surface having a laser irradiation mark. The mount member includes a surface having a rough portion with an accumulation of material of the support member.

Abstract: A laser processing method includes a first step of irradiating a surface of a composite material with laser to form a hole processing groove on the composite material in a manner of scanning paths from an outside corresponding to an inner peripheral surface side of the through hole to be formed to an inside corresponding to a center side of the through hole, the paths being across a width direction of the hole processing groove; and a second step of irradiating and penetrating through the hole processing groove with the laser to form the through hole in a manner of scanning paths from the outside to the inside after the first step, the paths being across the width direction of the hole processing groove. The laser used at the first step has a smaller heat input amount per unit time than the laser used at the second step.

Abstract: A welding machine includes a main transformer having first primary winding, a second primary winding, and a secondary winding; a power board configured to receiving mains power and to convert the mains power to converted power to be input to the main transformer; a switch having an input connected to an output of the power board, a first output connected to the first primary winding of the main transformer, and a second output connected to the second primary winding of the main transformer; and a control board configured to control the switch to be arranged in one of (i) a first configuration in which the converted power is supplied, in series, to a first primary winding of a main transformer switching and a second primary winding of the main transformer, and (ii) a second configuration in which the converted power is supplied, in parallel, to the first primary winding of the main transformer and to the second primary winding of the main transformer.

Abstract: Systems and methods are provided for braiding Metal Matrix Composite (MMC) tape. One method includes drawing multiple lanes of MMC tape, comprising a matrix of metal reinforced by fibers, from bobbins arranged around a mandrel. The method also includes braiding the multiple lanes to form a preform at the mandrel for an MMC part and consolidating the preform via application of heat and pressure.

Abstract: Laser cutting on a plated steel sheet is executed by cutting the plated steel sheet by irradiating the plated steel sheet covered with a plate metal with laser light at a wavelength in a 1 micrometer band; and emitting assist gas onto a cut surface of the plated steel sheet, the cut surface being formed. in the step of cutting, to make the plate metal fused by irradiation of the laser light flow to the cut surface so as to cover the cut surface with the plate metal.

Abstract: Provided herein is a solder paste that can be used for solder connection requiring a high melting point, while, at the same time, ensuring excellent applicability, high adhesion, and excellent solder joint reliability. A mount structure mounting an electronic component with such a solder paste is also provided. The solder paste is a solder paste that includes a solder powder and a flux. The flux contains an epoxy resin, a phenolic resin, a benzooxazine compound, and an activating agent. The phenolic resin contains at least one type of phenolic resin having a phenolic hydroxyl group and an allyl group within the molecule.

Abstract: Paste compositions comprising 40-70 percent by weight (wt %) of a low melting point (LMP) particle composition comprising Y; 25-65 wt % of a high melting point (HMP) particle composition comprising M; and 1-15 wt % of a fluxing vehicle. The reaction products formed between M and Y are crystalline intermetallics that are solids at temperature T1 and the surface area of said HMP particle composition is in the range of 0.07 to 0.18 square meters per gram of Y in said composition. Also provided are methods of contacting electronic compositions using the paste compositions.

Abstract: A solder alloy has an alloy composition consisting of, in mass %, Ag: from 3.2 to 3.8%, Cu: from 0.6 to 0.8%, Ni: from 0.01 to 0.2%, Sb: from 2 to 5.5%, Bi: from 1.5 to 5.5%, Co: from 0.001 to 0.1%, Ge: from 0.001 to 0.1%, and optionally at least one of Mg, Ti, Cr, Mn, Fe, Ga, Zr, Nb, Pd, Pt, Au, La and Ce: 0.1% or less in total, with the balance being Sn. The alloy composition satisfies the following relationship (1): 2.93?{(Ge/Sn)+(Bi/Ge)}×(Bi/Sn) (1). In the relationship (1), each of Sn, Ge, and Bi represents the content (mass %) in the alloy composition.

Abstract: A gas shielded arc welding wire contains, based on total mass of the wire in terms of mass %: C: 0.01% to 0.50%; Si: 0.01% to 1.50%; Mn: 0.10% to 2.50%; Cr: 5% to 15%; Ni: 0.05% to 1.50%; Mo: 0.1% to 2.0%; V: 0.1% to 1.0%; Nb: 0.01% to 0.20%; REM: 0.001% to 0.050%; S: 0.0010% to 0.0200%; and O: 0.025% or less (including 0%), which satisfies the following relationship: 3.0?(Nb+10×REM)/(S+O)?200.0.

Abstract: A sacrificial material for use in ultrasonic additive manufacturing processes that includes at least one water-soluble solid; and at least one water-soluble binding agent, wherein the at least one water-soluble solid is partially dissolved or suspended in the at least one water-soluble binding agent and cured at a predetermined temperature for a predetermined period of time prior to use in ultrasonic additive manufacturing.

Abstract: A method for reducing stress and distortion in a component during a friction welding process includes securing first and second workpieces of the component within an inertia welding machine such that the first and second workpieces are affixed in opposition to each other. The method also includes securing at least one annular support member at least partially around the first workpiece and/or the second workpiece at a location having a reduced cross-section as compared to remaining portions of the first workpiece and/or the second workpiece. Further, the method includes rotating the first workpiece to a predetermined rotational speed. In addition, the method includes engaging the second workpiece with the rotating first workpiece so as to generate frictional heat therebetween, thereby welding the first and second workpieces together. As such, the annular support member(s) supports the location having the reduced cross-section during welding.

Abstract: A welding fixture includes a flexible substrate, which is sufficiently flexible to be reconfigurable between a planar configuration and a folded or rolled compact configuration and is dimensioned to support a plurality of frame members to form a structural frame for a recreational vehicle (RV). The welding fixture further includes a plurality of guide surfaces mounted to the flexible substrate, which are arranged on the flexible substrate to align the frame members in a predefined arrangement with a plurality of weld points and to align the frame members in the predefined arrangement while being welded together at the weld points.

Abstract: A method of monitoring a rotating component includes gathering an electrical signal from a sensor arranged adjacent a rotating component of an assembly. The electrical signal is transformed from a time domain into a frequency domain. The electrical signal is compared to an expected signal.

Abstract: There is provided a tool blade comprising a backing strip, binding material forming a binder layer, with discrete regions of binder layer formed as teeth along an edge of the backing strip, and abrasive particles bound to the backing strip by the binder layer, wherein each tooth is formed with a ductile region bonded to the backing strip, a crown and an intermediate region of thermal material disposed between the ductile region and the crown so as to absorb thermal expansion and contraction. The binding material powder is heated by laser beam to form a binder layer which binds the abrasive particles to the backing strip. The laser beam is used to form discrete regions of binder layer as teeth. The binding material is typically braze material.

Abstract: A centering cone for positioning a fastening element in a receptacle of a clamping device. The centering cone has an internally located cone section with a cone-shaped inner surface to which a one-piece spring section is connected in a radial direction. The spring section is configured to deform slightly under a radially applied force to provide a certain tolerance for receiving the fastening element.

Abstract: An arrangement for processing workpieces includes at least one processing machine, a machine magazine assigned to a respective processing machine for accommodating processing tools, and a robot arranged on a driverless base frame. Processing tools may be supplied to and/or removed again from the machine magazine using the driverless base frame. The driverless base frame is additionally provided with a temporary magazine for accommodating processing tools.

Abstract: A dust collecting system includes a power tool and a dust collector. The power tool is configured to perform processing operation on a workpiece by driving a tool accessory. The dust collector is configured to collect dust generated by the processing operation. The power tool includes a first motor and a driving mechanism configured to drive the tool accessory by power of the first motor. The dust collector includes a second motor and a fan configured to be rotationally driven by the second motor to generate air flow for collecting dust. The dust collecting system includes a first control device configured to control a rotation speed of the second motor according to a driving state of the power tool.

Abstract: The invention relates to method of controlling a transport vehicle for transporting exactly one sliver can (2) in a spinning mill between a filling station (3) for depositing a sliver into cans (2) and working positions of the cans (2) at workstations of the spinning machines (4), which ensures supplying the spinning machines with full cans (2) with a sliver.

Abstract: Appropriate control is performed in accordance with the state of a power tool and/or a dust collection attachment. A dust collection system for a power tool includes a hammer drill to hold a bit, a dust collection attachment connected to the hammer drill, and a dust collection controller that controls the operation of the hammer drill and/or the dust collection attachment in accordance with the specifications of the hammer drill and/or the dust collection attachment.

Abstract: A dust collecting system includes a power tool and a stationary dust collector. The power tool is configured to perform processing operation on a workpiece by driving a tool accessory. The stationary dust collector is configured to be placed separately from the power tool and to collect dust generated by the processing operation. The power tool includes a first motor and a driving mechanism configured to drive the tool accessory by power of the first motor. The dust collector includes a second motor and a fan configured to be rotationally driven by the second motor to generate air flow for collecting dust. The dust collecting system includes a control device configured to control a rotation speed of the second motor according to a driving state of the power tool.

Abstract: A grinder selection device includes: an input unit that inputs a grinding condition for a workpiece as a grinding target of grinding machining including at least the geometry of the workpiece and vibration data indicating vibration of a grinding machine, and grinder information about one or more grinders as grinder candidates to be used for the grinding machining; a learned model acquired through supervised learning using training data containing input data and label data, the input data containing an arbitrary grinding condition for a workpiece as a grinding target of grinding machining by an arbitrary grinding machine including at least the geometry of the workpiece and vibration data indicating vibration of the grinding machine, and grinder information about an arbitrary grinder, the label data being data indicating the adequacy or inadequacy of a combination between the grinding condition and the grinder information about the grinder; and a judgment unit.

Abstract: The invention discloses an orientation apparatus for drilling machinery comprising an orientation device provided with a casing with fastening means for coupling the orientation device to the drilling machinery, and detection means in data communication with electronic means provided in the casing configured to determine the relative orientation of the orientation device with respect to true north, and an interface device in data communication with the orientation device and configured to display directional information of said orientation device which enables the axial alignment of the drilling machine with respect to the axial axis of a hole to be drilled.

Abstract: A control device includes: a storage unit that stores a working program and a tool length correction amount; a control unit that causes a table and a spindle to relatively move on the basis of the working program and the tool length correction amount; a region setting unit that sets an interference checking region including a tool held by the spindle on the basis of the tool length correction amount; and an interference determination unit that determines whether the interference checking region interferes or not with obstacles in surroundings of the tool in a case in which the tool and the table are caused to relatively move on the basis of the working program and the tool length correction amount.

Abstract: The dust concentration is prevented from increasing with uncollected dust scattering in a work environment. A dust collection system for a power tool includes a power tool, a dust collection apparatus connected to the power tool, and a system control unit that controls an operation of the system for controlling an operation of the power tool and/or an operation of the dust collection apparatus in accordance with the dust concentration obtained from an external unit.

Abstract: A monitoring device includes: a distribution generating unit configured to generate an execution time distribution that is a frequency distribution of an execution time of the program; a storage unit configured to store at least one kind of abnormality information indicative of an execution time distribution as to an abnormality; a calculation unit configured to calculate an occurrence probability of abnormality, based on information indicating the execution time distribution generated by the distribution generating unit and the abnormality information stored in the storage unit; a threshold setting unit configured to set a probability threshold for the abnormality information; and a determination unit configured to determine that there is a sign of an abnormality when the occurrence probability is equal to or higher than the probability threshold.

Abstract: A tool replacement timing management system includes a data acquisition section configured to acquire time series data indicating a machining state from a machine, a data cutout section configured to cut out specimen data from the time series data according to at least one condition or a combination of conditions selected from among machining, a tool, a workpiece, and a tool speed, a machining state variable calculating section configured to calculate a machining state variable, which is a statistical index, from the specimen data, a tool deterioration state generation section configured to generate tool deterioration state data in which the machining state variable is aligned in a time series, and a tool replacement timing calculating section configured to calculate a tool replacement timing on a basis of the tool deterioration state data.

Abstract: A spindle vibration measuring system which measures vibration of a spindle in a machining device that performs a cutting or abrading process on a workpiece. The machining device has a workpiece holder that holds the workpiece, the spindle that holds a tool, and a moving mechanism that relatively moves the workpiece holder and the spindle. The spindle vibration measuring system acquires positional variation data or vibration data of the moving mechanism when the spindle rotates, and a result related to vibration of the spindle to output or store based on the positional variation data or the vibration data.

Abstract: Provided is a servo controller that can prevent an unnecessary cut from being generated in a workpiece during oscillation machining. A servo controller 20 includes: an oscillation command generating unit 23 that generates an oscillation command for causing a workpiece W and a tool 11 to relatively oscillate; a position deviation estimating unit 31 that estimates an estimated position deviation from a moving command for causing the workpiece W and the tool 11 to relatively move; an adder that applies the oscillation command to a position deviation based on the moving command; a subtractor that deducts the estimated position deviation from a position deviation to which the oscillation command is applied; and a learning control unit that calculates a compensation amount from a position deviation based on the moving command after deducting the estimated position deviation.

Abstract: Provided is a servo controller that can prevent an unnecessary cut from being generated during oscillation machining. A servo controller which controls a machine tool 10 that turns a workpiece W by cooperative operation of a plurality of axes includes: an oscillation command generating unit 23 that generates an oscillation command for causing the workpiece W and the tool 11 to relatively oscillate; a deviation deducting unit 31, 241 that applies the oscillation command to a position deviation based on a moving command for causing the workpiece W and the tool 11 to relatively move, and deducts a steady-state position deviation; and a learning control unit 27 that calculates a compensation amount from a position deviation based on the moving command after deducting the steady-state position deviation.

Abstract: The disclosure discloses a double-station wheel deburring device consisting of two major systems. One is a wheel double-station exchange system responsible for feeding and discharging of two wheels, switching between a first working table and a second working table, switching between an upper station and a lower station, and rotation of the wheels. The other is a cutter feeding system responsible for feeding of a rim deburring blade, a riser deburring blade and brushes. The device can simultaneously remove burrs on outer rims, risers and valve holes of two wheels. Through the interactive double-station working tables, the feeding and discharging operation and the deburring operation are simultaneously carried out at separate stations. The device can be applied to deburring of wheels of different specifications. The disclosure also discloses a double-station wheel deburring method.

Abstract: A device for deburring edges of a pile of metal blanks includes a first roller, a second roller, at least one motor, and a main body. The first roller is supported for rotation about a first axis. The second roller is supported for rotation about a second axis. The at least one motor is drivingly coupled to the first and second rollers to rotate the first roller in a first rotational direction and the second roller in a second rotational direction that is opposite the first rotational direction. The main body supports the first roller, the second roller, and the at least one motor. The main body is movable about a periphery of the pile of metal blanks and is configured to permit contact between the first and second rollers and the edges of the pile of metal blanks.

Abstract: A tool attachment for cleaning wheel hub components, comprises a tool body having a drive end, and a cleaning end. The cleaning end comprises a lug receiving opening extending into the tool body from an axial end thereof, and an axial end face. Moreover, a brush strip is positioned in an interior surface of a chamber within the cleaning end of the tool body. In some embodiments, the brush strip is replaceable. Further, the tool attachment includes an abrasive disk having an aperture therethrough that aligns with the lug receiving opening. In this regard, the abrasive disk attaches to the axial end face of the tool body. In some embodiments, the abrasive disk is replaceable.

Abstract: A cleaning apparatus capable of effectively removing dirt attached to a bottom surface of a heat exchanger, is disclosed. The cleaning apparatus cleans the heat exchanger for regulating a surface temperature of a polishing pad. This cleaning apparatus includes: a moving mechanism configured to move the heat exchanger between a temperature-regulating position in which the heat exchanger can exchange heat with the polishing pad, and a retreat position in which the heat exchanger is separated from a surface of the polishing pad; and a cleaning mechanism configured to clean a bottom surface of the heat exchanger moved to the retreat position The retreat position is located on a side of the polishing pad. The cleaning mechanism includes at least one cleaning nozzle for ejecting a cleaning liquid to the bottom surface of the heat exchanger, or a cleaning tank in which the bottom surface of the heat exchanger can be immersed.

Abstract: The present invention relates to a polishing pad that minimizes the occurrence of defects and a process for preparing the same, Since the polishing pad comprises fine hollow particles having shells, the glass transition temperature (Tg) of which is adjusted, the hardness of the shells and the shape of micropores on the surface of a polishing layer are controlled. Since the content of Si in the polishing layer is adjusted, it is possible to prevent the surface damage of a semiconductor substrate caused by hard additives. As a result, the polishing pad can provide a high polishing rate while minimizing the occurrence of defects such as scratches on the surface of a semiconductor substrate during the CMP process.

Abstract: In a method of polishing a silicon wafer, a final polishing step includes an upstream polishing step and a subsequent finish polishing step. In the upstream polishing step, as a polishing agent, a first alkaline aqueous solution containing abrasive grains with a density of 1×1014/cm3 or more is first supplied, and the supply is then switched to a supply of a second alkaline aqueous solution containing a water-soluble polymer and abrasive grains with a density of 5×1013/cm3 or less. In the finish polishing step, as a polishing agent, a third alkaline aqueous solution containing a water-soluble polymer and abrasive grains with a density of 5×10?13/cm3 or less is supplied. Thus, the formation of not only PIDs but also scratches with small depth can be suppressed.

Abstract: A polishing pad is provided. The polishing surface of the polishing pad corresponds to a two-dimensional orthogonal coordinate system having a first coordinate direction and a second coordinate direction, the rotating axis of the polishing pad corresponds to the original point of the two-dimensional orthogonal coordinate system, and the polishing pad includes a polishing layer and a surface pattern. The surface pattern is disposed in the polishing layer, and includes at least one first groove and at least one second groove respectively distributing along the first coordinate direction, wherein the at least one first groove has a first cutting trajectory direction, the first cutting trajectory direction is forward with the first coordinate direction, and the at least one second groove has a second cutting trajectory direction, the second cutting trajectory direction is reverse with the first coordinate direction.

Abstract: To reduce a risk generated at a time of collision of a substrate with a retainer. According to one embodiment, a head for holding a polygonal substrate as a polishing object of a polishing apparatus is provided. The head includes a substrate holding surface configured to hold a substrate and a retainer positioned outside the substrate holding surface. The retainer has an end region. The end region is arranged adjacent to a corner portion of the substrate held onto the head. The end region has an end surface on a side of the substrate holding surface. The end surface is configured to increase in distance from the substrate holding surface with approaching an end portion in a longitudinal direction of the retainer.

Abstract: A substrate transfer device configured to transfer a substrate while holding a first surface of the substrate by a substrate holder and configured to deliver a second surface of the substrate is provided. The substrate transfer device includes a tilting mechanism configured to perform tilting of the substrate holder when viewed from a side; and a fixing mechanism configured to stop the tilting of the substrate holder when viewed from the side.

Abstract: In an optical fiber ferrule polishing holder 20 used for polishing an optical fiber ferrule 30 having a rectangular cross section, the optical fiber ferrule polishing holder 20 having: a body part 21 having an insertion hole 21A into which the optical fiber ferrule 30 can be inserted, the body part 21 being capable of abutting on the optical fiber ferrule 30 at a support wall 21A1 of the insertion hole 21A; and a fixing part 25 (29) having a pressing wall 25B (29B) for pressing the optical fiber ferrule 30 to the support wall 21A1 at a predetermined pressure, wherein the support wall 21A1 is inclined at a predetermined angle with respect to a vertical axis which is vertically extended from a polishing surface 13 of an optical fiber ferrule polishing machine 10, and the support wall 21A1 has a protrusion 21C toward the pressing wall 25B (29B).

Abstract: The present application relates to systems and methods for obtaining real-time abrasion data. An example computer-implemented method could include receiving, at a computing device, sensor data from one or more sensors. The one or more sensors are disposed in proximity to an abrasive product or a workpiece associated with the abrasive product. The one or more sensors are configured to collect abrasion operational data associated with an abrasive operation involving the abrasive product or the workpiece. The computer-implemented method could further include training, based on the sensor data, a machine learning system to determine product specific information of the abrasive product and/or workpiece specific information. The computer-implemented method could also include providing the trained machine learning system using the computing device.

Abstract: An assistance apparatus includes a status information acquiring section that acquires a grinding condition as a status information, the grinding condition including set states associated with a plurality of movement command data, an evaluation result acquiring section that acquires evaluation results of a plurality of evaluation objects that are obtained under the grinding condition, a reward calculating section that calculates a reward for the status information based on the evaluation results, a policy storing section that stores a policy which is obtained from a value function, an action determining section that determines the movement command data to be adjusted and an adjustment amount at which said movement command data is adjusted, from among candidates of the plurality of movement command data that are adjustable, based on the status information and the policy, and an action information outputting section that is configured to output determined contents including an action information.

Abstract: An apparatus for chemically mechanically polishing includes an arm configured to move a conditioner module. The conditioner module is configured to contact a pad so as to change a degree of roughness of the pad. The pad is configured to contact and polish a semiconductor wafer. The arm has a first end and a second end opposite to the first end. The first end has an electromagnetic module. The conditioner module is detachably magnetically coupled to the arm by means of the electromagnetic module. The second end is coupled to a knob and configured to pivot at the knob. The arm moves the conditioner module through the pivoting of the second end at the knob. The conditioner module is disconnected from the arm when a magnetic polarity at the electromagnetic module is changed.

Abstract: Provided is a liquid circulation device for a machine tool including a tank which has an introduction portion and a lead-out portion of a liquid, and in which a liquid circulated between the liquid circulation device and the machine tool is stored; and a heat exchanger disposed in the tank, in which the tank has a throttle portion in which a cross-sectional area of a liquid passage between the introduction portion and the lead-out portion is reduced and a first storage portion on the introduction portion side from the throttle portion, and at least a portion of the heat exchanger is disposed between a center of the first storage portion and the throttle portion.

Abstract: Methods and apparatus for removing particles from a substrate surface after a chemical mechanical polish. In some embodiments, the apparatus may include a manifold configured to receive and atomize a fluid and at least one spray nozzle mounted to the manifold and configured to spray the atomized fluid in a divergent spray pattern such that the substrate surface is cleansed when impinged by spray from the at least one spray nozzle, wherein the at least one spray nozzle sprays the atomized fluid at a pressure of approximately 30 psi to approximately 2500 psi.