Patents Issued in September 21, 2021
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Patent number: 11127716Abstract: An integrated device package is disclosed. The package can include a carrier and an integrated device die having a front side and a back side. A mounting structure can serve to mount the back side of the integrated device die to the carrier. The mounting structure can comprise a first layer over the carrier and a second element between the back side of the integrated device die and the first layer. The first layer can comprise a first insulating material that adheres to the carrier, and the second element can comprise a second insulating material.Type: GrantFiled: March 27, 2019Date of Patent: September 21, 2021Assignee: Analog Devices International Unlimited CompanyInventors: Rigan McGeehan, Cillian Burke, Alan J. O'Donnell
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Patent number: 11127717Abstract: In one embodiment, a semiconductor device includes a first substrate including first and second regions on its surface, a first control circuit on the first substrate in the first region, a first memory cell array above the first control circuit in the first region and connected to the first control circuit, and a first pad above the first memory cell array in the first region and connected to the first control circuit. The device further includes a second control circuit on the first substrate in the second region, a second memory cell array above the second control circuit in the second region and connected to the second control circuit, a second pad above the second memory cell array in the second region and connected to the second control circuit, and a connection line above the first and second memory cell arrays and connecting the first and second pads.Type: GrantFiled: September 5, 2019Date of Patent: September 21, 2021Assignee: Toshiba Memory CorporationInventor: Tomoya Sanuki
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Patent number: 11127718Abstract: Examples described herein generally relate to multi-chip devices having stacked chips. In an example, a multi-chip device includes a chip stack that includes chips. One or more chips each includes a selection circuit and a broken via pillar that includes first and second continuous portions. The first continuous portion includes a through substrate via and a first metal line. The second continuous portion includes a second metal line. The first and second metal lines are disposed within dielectric layers disposed on a side of the semiconductor substrate of the respective chip. The first and second continuous portions are aligned in a direction normal to the side of the semiconductor substrate. An input node of the selection circuit is connected to one of the first or second metal line. An output node of the selection circuit is connected to the other of the first or second metal line.Type: GrantFiled: January 13, 2020Date of Patent: September 21, 2021Assignee: XILINX, INC.Inventors: Anil Kumar Kandala, Vijay Kumar Koganti, Santosh Yachareni
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Patent number: 11127719Abstract: A TSV of a first semiconductor die may extend from a semiconductor substrate of the first semiconductor die through at least one metallization layer of the die to connect to a metallization layer to supply power to the second semiconductor die. By extending the TSV, resistance may be reduced, allowing for enhanced power delivery to the second semiconductor die. Resistance may be further reduced by allowing for the TSV to connect to a thicker metallization layer than would otherwise be possible. Also, in some embodiments, the TSV may connect to a metallization layer that is suitable for supplying power to both semiconductor dies. The first semiconductor die may be a top die or a bottom die in a face-to-face arrangement. Disclosed concepts may be extended to any number of dies included in a die stack that includes the face-to-face arrangement.Type: GrantFiled: January 23, 2020Date of Patent: September 21, 2021Assignee: NVIDIA CORPORATIONInventors: Joseph Greco, Joseph Minacapelli
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Patent number: 11127720Abstract: A method of repairing a light emitting device assembly includes providing a repair source substrate with an array of first light emitting diodes, providing a first carrier substrate with a temporary adhesive layer thereupon, forming a first assembly including the first carrier substrate and at least one first light emitting diode that is a subset of the array of first light emitting diodes, where the at least one first light emitting diode is attached to the first carrier substrate through a respective portion of the temporary adhesive layer and detached from the repair source substrate, providing a second carrier substrate with a temporary bonding layer thereupon, attaching the at least one first light emitting diode to the temporary bonding layer, detaching the first carrier substrate from each portion of the temporary adhesive layer, removing each portion of the temporary adhesive layer from the at least one first light emitting diode, providing a light emitting device including at least one vacancy locatiType: GrantFiled: January 21, 2019Date of Patent: September 21, 2021Assignee: NANOSYS, INC.Inventors: Max Batres, Ansel Reed
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Patent number: 11127721Abstract: A full spectrum white light emitting device includes photoluminescence materials which generate light with a peak emission wavelength in a range from about 490 nm to about 680 nm; and a broadband solid-state excitation source operable to generate broadband excitation light with a dominant wavelength in a range from about 420 nm to about 480 nm. The device is operable to generate white light with a Correlated Color Temperature in a range from about 1800K to about 6800K, a CRI R9 less than 90, a spectrum whose intensity decreases from its maximum value in the orange to red region of the spectrum to about 50% of the maximum value at a wavelength in a range from about 645 nm to about 695 nm, and over a wavelength range from about 430 nm to about 520 nm, a maximum percentage intensity deviation of light emitted by the device is less than 60% from the intensity of light of at least one of a black-body curve and CIE Standard Illuminant D of the same Correlated Color Temperature.Type: GrantFiled: June 16, 2020Date of Patent: September 21, 2021Assignee: Intematix CorporationInventors: Yi-Qun Li, Xianglong Yuan, Jun-Gang Zhao
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Patent number: 11127722Abstract: A stack package includes sub-packages vertically stacked. Each of the sub-packages includes a semiconductor chip having a power pad and a signal pad, a first interposer bridge having a signal through via and a second power through via, and a second interposer bridge having a first power through via. Each of the sub-packages further includes a signal redistributed layer pattern extending to electrically connect the signal pad to a signal connection part and a power redistributed layer pattern to electrically connect the power pad to the first and second power through vias. An upper sub-package of the sub-packages is rotated relative to a lower sub-package, and the rotated upper sub-package is stacked on a lower sub-package of the sub-packages.Type: GrantFiled: June 4, 2020Date of Patent: September 21, 2021Assignee: SK hynix Inc.Inventor: Bok Kyu Choi
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Patent number: 11127723Abstract: A mass transfer method includes forming a photosensitive layer on a transfer substrate, heating the photosensitive layer at a temperature for the same to be in a partially cured state, disposing micro semiconductor elements on the photosensitive layer in the partially cured state, partially removing the photosensitive layer to form connecting structures, providing a package substrate and metallic support members, subjecting the metallic support members and the micro semiconductor elements to a eutectic process, breaking the connecting structures to separate the micro semiconductor elements from the transfer substrate, and removing the remaining connecting structures from the micro semiconductor elements.Type: GrantFiled: May 15, 2020Date of Patent: September 21, 2021Assignee: Xiamen Sanan Optoelectronics Technology Co., Ltd.Inventors: Zhibai Zhong, Chia-En Lee, Jinjian Zheng, Jiansen Zheng, Chen-Ke Hsu, Junyong Kang
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Patent number: 11127724Abstract: A light emitting diode device includes a thin film transistor substrate having a plurality of light emitting areas, a first diode electrode and a second diode electrode on the thin film transistor substrate, a first passivation pattern between the first diode electrode and the second diode electrode, a plurality of micro light emitting diodes on the first passivation pattern, a first bridge pattern on the micro light emitting diodes and electrically connecting the first diode electrode to the micro light emitting diodes, and a second bridge pattern on the first bridge pattern and electrically connecting the second diode electrode to the micro light emitting diodes, wherein each sidewall of each of the micro light emitting diodes and each sidewall of the first passivation pattern form a same plane.Type: GrantFiled: November 21, 2019Date of Patent: September 21, 2021Assignee: Samsung Display Co., Ltd.Inventors: Su Bin Bae, Yu Gwang Jeong, Shin Il Choi, Joon Geol Lee, Sang Gab Kim
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Patent number: 11127725Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a first light-emitting diode (LED) layer including a first LED of a first color type, the first LED layer having a first side and a second side opposite to the first side; a second LED layer over the first LED layer, the second LED layer including a second LED of a second color type, and the second LED layer having a first side and a second side opposite to the first side; and a third LED layer over the second LED layer, the third LED layer including a third LED of a third color type, and the third LED layer having a first side and a second side opposite to the first side; wherein the first color type, the second color type, and the third color type are different from each other.Type: GrantFiled: February 19, 2020Date of Patent: September 21, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Ping-Yin Liu, Yeong-Jyh Lin, Chi-Ming Chen
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Patent number: 11127726Abstract: According to a flexible light-emitting device production method of the present disclosure, after an intermediate region (30i) and flexible substrate regions (30d) of a plastic film (30) of a multilayer stack (100) are divided from one another, the interface between the flexible substrate regions (30d) and a glass base (10) is irradiated with lift-off light. The multilayer stack (100) is separated into a first portion (110) and a second portion (120) while the multilayer stack (100) is in contact with a stage (210). The first portion (110) includes a plurality of light-emitting devices (1000) which are in contact with the stage (210). The light-emitting devices (1000) include a plurality of functional layer regions (20) and the flexible substrate regions (30d). The second portion (120) includes the glass base (10) and the intermediate region (30i).Type: GrantFiled: May 9, 2018Date of Patent: September 21, 2021Assignee: SAKAI DISPLAY PRODUCTS CORPORATIONInventors: Katsuhiko Kishimoto, Kazunobu Mameno, Kohichi Tanaka
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Patent number: 11127727Abstract: An electronic device and associated methods are disclosed. In one example, the electronic device includes a plurality of dies, a logic die coupled to the plurality of dies, and a dummy die thereon. In selected examples, the dummy die is located between the logic die and the plurality of silicon dies. In selected examples, the dummy die is attached to the logic die.Type: GrantFiled: June 6, 2019Date of Patent: September 21, 2021Assignee: Intel CorporationInventors: Robert L. Sankman, Pooya Tadayon, Weihua Tang, Chandra M. Jha, Zhimin Wan
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Patent number: 11127728Abstract: A support die includes complementary metal-oxide-semiconductor (CMOS) devices, front support-die bonding pads electrically connected to a first subset of the peripheral circuitry, and backside bonding structures electrically connected to a second subset of the peripheral circuitry. A first memory die including a first three-dimensional array of memory elements is bonded to the support die. First memory-die bonding pads of the first memory die are bonded to the front support-die bonding pads. A second memory die including a second three-dimensional array of memory elements is bonded to the support die. Second memory-die bonding pads of the second memory die are bonded to the backside bonding structures.Type: GrantFiled: April 14, 2020Date of Patent: September 21, 2021Assignee: SANDISK TECHNOLOGIES LLCInventors: Fei Zhou, Raghuveer S. Makala, Adarsh Rajashekhar, Rahul Sharangpani
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Patent number: 11127729Abstract: A first wafer including a first substrate, first semiconductor devices overlying the first substrate, and first dielectric material layers overlying the first semiconductor devices is provided. A sacrificial material layer is formed over a top surface of a second wafer including a second substrate. Second semiconductor devices and second dielectric material layers are formed over a top surface of the sacrificial material layer. The second wafer is attached to the first wafer such that the second dielectric material layers face the first dielectric material layers. A plurality of voids is formed through the second substrate. The sacrificial material layer is removed by providing an etchant that etches a material of the sacrificial material layer through the plurality of voids. The substrate is detached from a bonded assembly including the first wafer, the second semiconductor devices, and the second dielectric material layers upon removal of the sacrificial material layer.Type: GrantFiled: June 12, 2020Date of Patent: September 21, 2021Assignee: SANDISK TECHNOLOGIES LLCInventors: James Kai, Murshed Chowdhury, Koichi Matsuno, Johann Alsmeier
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Patent number: 11127730Abstract: A semiconductor device including memory cell transistors on a substrate is provided. The semiconductor device includes a first wiring layer on the memory cell transistors and including a bit line and a first conductive pattern, a second wiring layer on the first wiring layer and including a ground line, a first via interposed between and electrically connecting the bit line and a source/drain of a first memory cell transistor among the memory cell transistors, and a first extended via interposed between the ground line and a source/drain of a second memory cell transistor among the memory cell transistors. The ground line is electrically connected to the source/drain of the second memory cell transistor through the first extended via and the first conductive pattern. The first extended via has a width greater than that of the first via.Type: GrantFiled: August 13, 2019Date of Patent: September 21, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Inhak Lee, Sang-Yeop Baeck, JaeSeung Choi, Hyunsu Choi, SangShin Han
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Patent number: 11127731Abstract: An electronic device can include a transistor having a gate electrode, a first portion, and a second portion, wherein along the gate electrode, the first portion of the transistor has a first gate-to-drain capacitance and a first gate-to-source capacitance, the second portion of the transistor has a second gate-to-drain capacitance and a second gate-to-source capacitance, and a ratio of the first gate-to-drain capacitance to the first gate-to-source capacitance is less than a ratio of the second gate-to-drain capacitance to the second gate-to-source capacitance.Type: GrantFiled: April 13, 2020Date of Patent: September 21, 2021Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Balaji Padmanabhan, Kirk K. Huang, Prasad Venkatraman, Emily M. Linehan, Zia Hossain
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Patent number: 11127732Abstract: To solve a problem in that an antenna or a circuit including a thin film transistor is damaged due to discharge of electric charge accumulated in an insulator (a problem of electrostatic discharge), a semiconductor device includes a first insulator, a circuit including a thin film transistor provided over the first insulator, an antenna which is provided over the circuit and is electrically connected to the circuit, and a second insulator provided over the antenna, a first conductive film provided between the first insulator and the circuit, and a second conductive film provided between the second insulator and the antenna.Type: GrantFiled: July 6, 2018Date of Patent: September 21, 2021Inventors: Yoshiaki Oikawa, Shingo Eguchi
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Patent number: 11127733Abstract: An ESD protection device may include: a first vertically integrated ESD protection structure comprising a first semiconductor portion, a first contact region disposed on a first side of the first semiconductor portion and a first terminal exposed on a second side of the first semiconductor portion opposite the first side of the first semiconductor portion, a second vertically integrated ESD protection structure comprising a second semiconductor portion, a second contact region disposed on a first side of the second semiconductor portion and a second terminal exposed on a second side of the second semiconductor portion opposite the first side of the second semiconductor portion, an electrical connection layer, wherein the first vertically integrated ESD protection structure and the second vertically integrated ESD protection structure are disposed on the electrical connection layer laterally separated from each other and are electrically connected with each other anti-serially via the electrical connection layType: GrantFiled: February 6, 2020Date of Patent: September 21, 2021Assignee: Infineon Technologies AGInventors: Andre Schmenn, Stefan Pompl, Damian Sojka, Katharina Umminger
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Patent number: 11127734Abstract: An electrostatic discharge (ESD) protection circuit includes an input terminal, a transistor, and an output terminal. The input terminal is configured to receive an input signal. The transistor includes a first source/drain region, a second source/drain region, and a drift region that has a resistance in series between the first and second source/drain regions and that is configured to attenuate an ESD voltage in the input signal. The output terminal is connected to the second source/drain region.Type: GrantFiled: November 7, 2019Date of Patent: September 21, 2021Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Jean-Pierre Colinge, Ta-Pen Guo, Carlos H. Diaz
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Patent number: 11127735Abstract: A display substrate comprises a display area and a non-display area around the display area; at least one ground terminal located in the non-display area; a first wiring disposed in the non-display area and being around the display area; and a second wiring disposed between the first wiring and the display area and being positioned around the non-display area. The second wiring is provided with at least one tip on a side closer to the first wiring, the at least one tip pointing to the side of the first wiring. The first wiring and the second wiring are respectively connected to the at least one ground terminal.Type: GrantFiled: June 6, 2019Date of Patent: September 21, 2021Assignees: Ordos Yuansheng Optoelectronics Co., Ltd., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Yanwei Ren, Jingyi Xu, Wulijibaier Tang, Tianlei Shi, Min Liu, Peng Liu
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Patent number: 11127736Abstract: A method of making MIM capacitors includes: forming well regions in a semiconductor substrate, forming a gate dielectric layer on the semiconductor substrate, forming a polysilicon gate structure on a surface of the well region, forming a dummy gate on the gate dielectric layer and removing the dummy gate to expose the gate dielectric layer, and forming a metal gate structure on the exposed gate dielectric layer, wherein the metal gate structure comprises an electrode barrier layer on the gate dielectric layer and a metal gate on the gate dielectric layer. A lower electrode plate of the MIM capacitor is formed in the process of forming the metal gate structure, forming a capacitor dielectric layer above the lower electrode plate, and forming an upper electrode plate on the capacitor dielectric layer. Manufacturing of the MIM capacitor can be integrated in the process of manufacturing the semiconductor integrated circuit.Type: GrantFiled: March 13, 2020Date of Patent: September 21, 2021Assignee: Shanghai Huali Integrated Circuit CorporationInventor: Yongji Mao
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Patent number: 11127737Abstract: A number of monolithic diode limiter semiconductor structures are described. The diode limiters can include a hybrid arrangement of diodes with different intrinsic regions, all formed over the same semiconductor substrate. In one example, two PIN diodes in a diode limiter semiconductor structure have different intrinsic region thicknesses. The first PIN diode has a thinner intrinsic region, and the second PIN diode has a thicker intrinsic region. This configuration allows for both the thin intrinsic region PIN diode and the thick intrinsic region PIN diode to be individually optimized. The thin intrinsic region PIN diode can be optimized for low level turn on and flat leakage, and the thick intrinsic region PIN diode can be optimized for low capacitance, good isolation, and high incident power levels. This configuration is not limited to two stage solutions, as additional stages can be used for higher incident power handling.Type: GrantFiled: February 12, 2020Date of Patent: September 21, 2021Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.Inventors: James Joseph Brogle, Joseph Gerard Bukowski, Margaret Mary Barter, Timothy Edward Boles
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Patent number: 11127738Abstract: A microelectronic circuit structure comprises a stack of bonded layers comprising a bottom layer and at least one upper layer. At least one of the upper layers comprises an oxide layer having a back surface and a front surface closer to the bottom layer than the back surface, and a plurality of FD-SOI transistors built on the front surface. At least a first back gate line and a second back gate line extend separate from each other above the back surface for independently providing a first back gate bias to a first group of transistors and a second back gate bias to a second different group of transistors.Type: GrantFiled: February 9, 2018Date of Patent: September 21, 2021Assignee: Xcelsis CorporationInventors: Javier A. Delacruz, David Edward Fisch, Kenneth Duong, Xu Chang, Liang Wang
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Patent number: 11127739Abstract: A semiconductor device includes a substrate and first and second gate electrodes on the substrate. The first gate electrode includes a first gate insulation film having a bottom portion on the substrate and sidewall portions extending from the bottom portion and away from the substrate defining a first trench having a first width and a first functional film filling the first trench. The second gate electrode includes a second gate insulation film having a bottom portion on the substrate and sidewall portions extending from the bottom portion defining a second trench having a second width different from the first width, a second functional film conforming to the second gate insulation film in the second trench and defining a third trench, and a metal region in the third trench. The first width may be less than the second width.Type: GrantFiled: July 5, 2018Date of Patent: September 21, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hye-Lan Lee, Sang-Bom Kang, Jae-Jung Kim, Moon-Kyu Park, Jae-Yeol Song, June-Hee Lee, Yong-Ho Ha, Sang-Jin Hyun
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Patent number: 11127740Abstract: In a method of forming a semiconductor device including a fin field effect transistor (FinFET), a sacrificial layer is formed over a source/drain structure of a FinFET structure and an isolation insulating layer. A mask pattern is formed over the sacrificial layer. The sacrificial layer and the source/drain structure are patterned by using the mask pattern as an etching mask, thereby forming openings adjacent to the patterned sacrificial layer and source/drain structure. A dielectric layer is formed in the openings. After the dielectric layer is formed, the patterned sacrificial layer is removed to form a contact opening over the patterned source/drain structure. A conductive layer is formed in the contact opening.Type: GrantFiled: July 30, 2018Date of Patent: September 21, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tung Ying Lee, Meng-Hsuan Hsiao, Tsung-Lin Lee, Chih Chieh Yeh, Yee-Chia Yeo
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Patent number: 11127741Abstract: Example embodiments relating to forming gate structures, e.g., for Fin Field Effect Transistors (FinFETs), are described. In an embodiment, a structure includes first and second device regions comprising first and second FinFETs, respectively, on a substrate. A distance between neighboring gate structures of the first FinFETs is less than a distance between neighboring gate structures of the second FinFETs. A gate structure of at least one of the first FinFETs has a first and second width at a level of and below, respectively, a top surface of a first fin. The first width is greater than the second width. A second gate structure of at least one of the second FinFETs has a third and fourth width at a level of and below, respectively a top surface of a second fin. A difference between the first and second widths is greater than a difference between the third and fourth widths.Type: GrantFiled: November 6, 2019Date of Patent: September 21, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Han Lin, Kuei-Yu Kao, Shih-Yao Lin, Ming-Ching Chang, Chao-Cheng Chen, Syun-Ming Jang
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Patent number: 11127742Abstract: A semiconductor device includes a fin field effect transistor. The semiconductor device includes a first gate electrode, a first source/drain (S/D) region disposed adjacent to the first gate electrode, a first S/D contact disposed on the first S/D region, a first spacer layer disposed between the first gate electrode and the first S/D region, a first contact layer in contact with the first gate electrode and the first S/D contact, and a first wiring layer integrally formed with the first contact layer. There is no interface between the first contact layer and the first wiring layer in a cross sectional view, and the first contact layer has a smaller area than the first wiring layer in plan view.Type: GrantFiled: December 20, 2019Date of Patent: September 21, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Fang Chen, Jhon Jhy Liaw, Min-Chang Liang
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Patent number: 11127743Abstract: A transistor including a carrier transit layer that includes a compound semiconductor and a carrier supply layer in contact with the carrier transit layer. The carrier supply layer includes a compound semiconductor of a different type from the carrier transit layer. The transistor includes a gate electrode provided on the carrier supply layer, and a source electrode and a drain electrode provided on another surface of the carrier transit layer that is opposite to one surface on which the carrier supply layer is provided.Type: GrantFiled: November 4, 2016Date of Patent: September 21, 2021Assignee: SONY CORPORATIONInventors: Shigeru Kanematsu, Katsuhiko Takeuchi, Masashi Yanagita, Shinichi Wada
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Patent number: 11127744Abstract: Some embodiments include an assembly having first and second pillars. Each of the pillars has an inner edge and an outer edge. A first gate is proximate a channel region of the first pillar. A second gate is proximate a channel region of the second pillar. A shield line is between the first and second pillars. First and second bottom electrodes are over the first and second pillars, respectively; and are configured as first and second angle plates. An insulative material is over the first and second bottom electrodes. The insulative material may be ferroelectric or non-ferroelectric. A top electrode is over the insulative material. Some embodiments include methods of forming assemblies.Type: GrantFiled: January 8, 2020Date of Patent: September 21, 2021Assignee: Micron Technology, Inc.Inventors: Giorgio Servalli, Marcello Mariani
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Patent number: 11127745Abstract: A method of forming an apparatus comprises forming a first metal nitride material over an upper surface of a conductive material within an opening extending through at least one dielectric material through a non-conformal deposition process. A second metal nitride material is formed over an upper surface of the first metal nitride material and side surfaces of the at least one dielectric material partially defining boundaries of the opening through a conformal deposition process. A conductive structure is formed over surfaces of the second metal nitride material within the opening. Apparatuses and electronic systems are also described.Type: GrantFiled: June 19, 2020Date of Patent: September 21, 2021Assignee: Micron Technology, Inc.Inventors: Kentaro Ishii, Yongjun J. Hu, Amirhasan Nourbakhsh, Durai Vishak Nirmal Ramaswamy, Christopher W. Petz, Luca Fumagalli
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Patent number: 11127746Abstract: Fin-based well straps are disclosed for improving performance of memory arrays, such as static random access memory arrays. An exemplary well strap cell is disposed between a first memory cell and a second memory cell. The well strap cell includes a p-well, a first n-well, and a second n-well disposed in a substrate. The p-well, the first n-well, and the second n-well are configured in the well strap cell such that a middle portion of the well strap cell is free of the first n-well and the second n-well along a gate length direction. The well strap cell further includes p-well pick up regions to the p-well and n-well pick up regions to the first n-well, the second n-well, or both. The p-well has an I-shaped top view along the gate length direction.Type: GrantFiled: August 1, 2019Date of Patent: September 21, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Feng-Ming Chang, Chia-Hao Pao, Lien Jung Hung, Ping-Wei Wang
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Patent number: 11127747Abstract: A transistor comprises a 2D material structure and a gate structure. The 2D material structure conformally extends on and between surfaces of dielectric fin structures extending in parallel in a first horizontal direction, and comprises a source region, a drain region, and a channel region positioned between the source region and the drain region in the first horizontal direction. The gate structure overlies the channel region of the 2D material structure and extends in a second horizontal direction orthogonal to the first horizontal direction. The gate structure is within horizontal boundaries of the channel region of the 2D material structure in the first horizontal direction. Microelectronic devices, memory devices, and electronic systems are also described.Type: GrantFiled: August 23, 2019Date of Patent: September 21, 2021Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Akira Goda, Sanh D. Tang, Gurtej S. Sandhu, Litao Yang, Haitao Liu
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Patent number: 11127748Abstract: A semiconductor device includes a substrate, a first insulating layer, a second insulating layer above the first insulating layer, a void space between the first and second insulating layers, and contact electrodes extending through the first insulating layer, the void space, and the second insulating layer. Each of the contact electrodes includes a first end facing the substrate, a second end opposite to the first end, and a first width portion between the first end and the second end. The first width portion has a width in a second direction parallel to the substrate that is greater than a width of the first end in the second direction and a width of the second end in the second direction. The first width portion is within the void space.Type: GrantFiled: September 3, 2019Date of Patent: September 21, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventors: Shizuka Kutsukake, Hiroshi Matsumoto, Hiroto Saito
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Patent number: 11127749Abstract: A single poly non-volatile memory device that includes: a first type lower well; first and second wells separately formed in an upper portion of the first type lower well; a source electrode, a selection transistor, a sensing transistor, and a drain electrode sequentially disposed in an upper portion of the first well. A control gate is formed in an upper portion of the second well with separated on an opposite side of the source electrode from the first well and connected to the gate of the sensing transistor.Type: GrantFiled: December 1, 2020Date of Patent: September 21, 2021Assignee: Key Foundry Co., Ltd.Inventors: Su Jin Kim, Hye Jin Yoo
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Patent number: 11127750Abstract: According to one embodiment, a semiconductor memory device includes a first conductive layer, a first semiconductor body, a second semiconductor body, a first memory layer, and a second memory layer. The first conductive layer includes first to fourth extension regions, and a first connection region. The first extension region extends in a first direction. The second extension region extends in the first direction and is arranged with the first extension region in the first direction. The third extension region extends in the first direction and is arranged with the first extension region in a second direction crossing the first direction. The fourth extension region extends in the first direction, is arranged with the third extension region in the first direction, and is arranged with the second extension region in the second direction.Type: GrantFiled: December 31, 2019Date of Patent: September 21, 2021Assignee: Toshiba Memory CorporationInventors: Takuya Inatsuka, Tadashi Iguchi, Murato Kawai, Hisashi Kato, Megumi Ishiduki
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Patent number: 11127751Abstract: Back gates and related apparatuses, systems, and methods are disclosed. An apparatus includes a channel material including a first side and a second side opposite the first side. The apparatus also includes word lines comprising electrically conductive material spaced along the first side of the channel material. The apparatus further includes a back gate comprising electrically conductive material proximate to the second side of the channel material. A method includes biasing a bit line and a word line associated with a memory cell according to a memory operation, and biasing the back gate while biasing the bit line and the word line.Type: GrantFiled: January 6, 2020Date of Patent: September 21, 2021Assignee: Micron Technology, Inc.Inventors: Andrew Bicksler, Marc Aoulaiche, Albert Fayrushin
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Patent number: 11127752Abstract: A semiconductor device includes a substrate, having cell region and high-voltage region. A memory cell is on the substrate within the cell region. The memory cell includes a memory gate structure and a selection gate structure on the substrate. A first spacer is sandwiched between or respectively on sidewalls of the memory cell structure and the selection gate structure. First high-voltage transistor is on the substrate within the high-voltage region. A first composite gate structure of the first high-voltage transistor includes a first gate structure on the substrate, an insulating layer with a predetermined thickness on the substrate in a -like structure or an L-like structure at cross-section, and a second gate structure on the insulating layer along the -like structure or the L-like structure. The selection gate structure and the second gate structure are originated from a same preliminary conductive layer.Type: GrantFiled: February 21, 2020Date of Patent: September 21, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chia-Ching Hsu, Wang Xiang, Shen-De Wang, Chun-Sung Huang
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Patent number: 11127753Abstract: A semiconductor storage device of the embodiment includes a stacked body in which a plurality of conductive layers and a plurality of insulating layers are alternately stacked, the stacked body including a stepped portion in which ends of the plurality of conductive layers are stepped, a pillar penetrating the stacked body, the pillar having a memory cell at a height position of each of the plurality of conductive layers, a contact disposed at the stepped portion, the contact being connected to an n-th conductive layer when counted from a lowermost conductive layer of the plurality of conductive layers, and a region in an (n?1)th conductive layer when counted from the lowermost conductive layer of the plurality of conductive layers, the region being disposed at a position below the contact, the region being insulated from the (n?1)th conductive layer surrounding a periphery.Type: GrantFiled: March 12, 2020Date of Patent: September 21, 2021Assignee: Kioxia CorporationInventor: Koichi Yamamoto
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Patent number: 11127754Abstract: A semiconductor storage device includes a base body, a stacked body, a plurality of columns, and a plurality of first contacts. The base body includes a substrate, a semiconductor element on the substrate, a lower wiring layer above the semiconductor element in a thickness direction of the base body and connected to the semiconductor element, and a lower conductive layer above the lower wiring layer in the thickness direction. The stacked body is above the lower conductive layer and including an alternating stack of conductive layers and insulating layers. Each of the columns includes a semiconductor body extending through the stacked body and electrically connected to the lower conductive layer. The plurality of first contacts extend through the stacked body and electrically connected to the lower conductive layer. The lower conductive layer is separately provided under each of the plurality of first contacts.Type: GrantFiled: May 27, 2020Date of Patent: September 21, 2021Assignee: KIOXIA CORPORATIONInventor: Go Oike
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Patent number: 11127755Abstract: Embodiments of three-dimensional (3D) memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a gate electrode above the substrate, a blocking layer on the gate electrode, a plurality of charge trapping layers on the blocking layer, a tunneling layer on the plurality of charge trapping layers, and a plurality of channel layers on the tunneling layer. The plurality of charge trapping layers are discrete and disposed at different levels. The plurality of channel layers are discrete and disposed at different levels. Each of the channel layers corresponds to a respective one of the charge trapping layers.Type: GrantFiled: December 26, 2019Date of Patent: September 21, 2021Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventor: Hongbin Zhu
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Patent number: 11127756Abstract: Provided is a three-dimensional memory device including a substrate, first and second stacked structures and an etching stop layer. The substrate has a cell region and a periphery region. The first stacked structure is disposed on the cell region and the periphery region, and has a first vertical channel pillar on the cell region that penetrates through the first stacked structure. The second stacked structure is located on the first stacked structure, is disposed on the cell region and the periphery region, and has a second vertical channel pillar on the cell region that penetrates through the second stacked structure. The second vertical channel pillar is electrically connected to the first vertical channel pillar. The etching stop layer is located between the first and second stacked structures, is disposed on the cell region and extends onto the periphery region, and surrounds the lower portion of the second vertical channel pillar.Type: GrantFiled: July 16, 2019Date of Patent: September 21, 2021Assignee: MACRONIX INTERNATIONAL CO., LTD.Inventors: Chih-Kai Yang, Tzung-Ting Han
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Patent number: 11127757Abstract: Embodiments of structure and methods for forming a three-dimensional (3D) memory device are provided. In an example, a 3D memory device includes a memory stack, a plurality of channel structures, and a source structure. The memory stack is over a substrate and includes interleaved a plurality of conductor layers and a plurality of insulating layers. The plurality of channel structures extend vertically in the memory stack. The source structure extend in the memory stack. The source structure includes a plurality of source contacts each in a respective insulating structure, and two adjacent ones of the plurality of source contacts are conductively connected to one another.Type: GrantFiled: October 16, 2019Date of Patent: September 21, 2021Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Wenxiang Xu, Wei Xu, Pan Huang, Ping Yan, Zongliang Huo, Wenbin Zhou, Ji Xia
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Patent number: 11127758Abstract: Embodiments of three-dimensional (3D) memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate and a plurality of memory decks stacked above the substrate. Each of the memory decks includes a gate electrode, a blocking layer on the gate electrode, a plurality of charge trapping layers on the blocking layer, a tunneling layer on the plurality of charge trapping layers, a channel layer on the tunneling layer, and an inter-deck dielectric layer on the channel layer. The plurality of charge trapping layers are discrete and disposed at different levels. A top surface of the inter-deck dielectric layer is nominally flat. The gate electrode of another one of the memory decks immediately above the memory deck is disposed on the top surface of the inter-deck dielectric layer.Type: GrantFiled: December 26, 2019Date of Patent: September 21, 2021Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventor: Hongbin Zhu
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Patent number: 11127759Abstract: An alternating stack of insulating layers and sacrificial material layers is formed over a substrate. Memory openings are formed through the alternating stack. A layer stack including a charge storage layer, a tunneling dielectric layer, a semiconductor material layer, and a dielectric material layer is formed in the memory openings. The dielectric material layer may include a doped silicate glass layer. A doped silicate glass pillar can be formed at a bottom portion of each memory opening, and a bottom portion of the semiconductor material layer can be converted into a source region by outdiffusion of dopants from the doped silicate glass pillar. Alternatively, the semiconductor material layer can be heavily doped, and can be recessed to form a source region.Type: GrantFiled: February 25, 2020Date of Patent: September 21, 2021Assignee: SANDISK TECHNOLOGIES LLCInventors: Tomoyuki Obu, Daisuke Miyake
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Patent number: 11127760Abstract: Embodiments of the present disclosure provide an apparatus and methods for forming stair-like structures with accurate profiles and dimension control for manufacturing three dimensional (3D) stacked memory cell semiconductor devices. In one embodiment, a memory cell device includes a film stack comprising alternating pairs of dielectric layers and conductive structures horizontally formed on a substrate, an opening formed in the film stack, wherein the opening is filled with a channel layer and a center filling layer, and a protective liner layer disposed between the conductive structure and the channel layer.Type: GrantFiled: February 1, 2019Date of Patent: September 21, 2021Assignee: Applied Materials, Inc.Inventors: Jaesoo Ahn, Thomas Kwon, Mahendra Pakala
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Patent number: 11127761Abstract: The present invention teaches a TFT array substrate, including a substrate; a first metallic layer disposed on the substrate; a gate insulation layer disposed on the first metallic layer and the substrate, where the gate insulation layer includes a level section above the first metallic layer and a pair of step sections respectively connected to lateral sides of the level section; a second metallic layer disposed on the level section, where an area of the second metallic layer's vertical projection onto the top side of the substrate is smaller than an area of the level section's top side; and a protection layer disposed on the second metallic layer and the gate insulation layer. As the second metallic layer is withdrawn for a distance from the level section's circumference, the protection layer is not required to rise continuously, and the protection layer is less prone to broken film and oxidization.Type: GrantFiled: August 31, 2018Date of Patent: September 21, 2021Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Yang Zhao
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Patent number: 11127762Abstract: A semiconductor device includes a semiconductor film, a semiconductor auxiliary film, a wiring line, a first metal film, and an interlayer insulating film. The semiconductor film includes a channel region and a low-resistance region. The semiconductor film includes indium and oxygen. The semiconductor auxiliary film is in contact with the low-resistance region of the semiconductor film and reduces the electric resistance of the semiconductor film. The wiring line is electrically coupled to the low-resistance region of the semiconductor film. The first metal film covers the wiring line and has a higher standard electrode potential than the indium. The interlayer insulating film covers the semiconductor film with the first metal film interposed therebetween. The interlayer insulating film has a first hole and a second hole. The first hole is provided at a position opposed to the low-resistance region of the semiconductor film. The second hole reaches the first metal film.Type: GrantFiled: July 22, 2019Date of Patent: September 21, 2021Assignee: JOLED INC.Inventors: Eri Matsuo, Yasuhiro Terai
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Patent number: 11127763Abstract: A display panel and a manufacturing method thereof, and a display device is provided. The display panel includes a base substrate, and a light-shielding layer and a plurality of wires which are sequentially located on the base substrate in a direction away from the base substrate. The light-shielding layer includes a plurality of light-shielding structures. The display panel has a transparent display region. Orthographic projections of at least two wires located on the transparent display region on the base substrate are located within an orthographic projection of one light-shielding structure on the base substrate. The one light-shielding structure is configured to shield external light which is emitted to the at least two wires through the base substrate. It is conducive to reducing the influence of external light on the display effect of the display panel.Type: GrantFiled: July 23, 2019Date of Patent: September 21, 2021Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventor: Mingche Hsieh
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Patent number: 11127764Abstract: The present disclosure provides a circuit substrate, a method for manufacturing the same, a display substrate and a tiled display device. The circuit substrate includes: a base substrate; a driving circuit on the base substrate; and conductive connection portions. A plurality of grooves is defined in a lateral side of the base substrate; each of the plurality of grooves extends through a top surface and an opposite bottom surface of the base substrate. The driving circuit includes signal lines on the top surface of the base substrate and signal-line leads on the bottom surface of the base substrate. The plurality of conductive connection portions are corresponding to the plurality of grooves in a one-to-one manner; at least one part of the conductive connection portion is in the corresponding groove. The conductive connection portion is connected with the corresponding signal line and the corresponding signal-line lead, respectively.Type: GrantFiled: December 4, 2019Date of Patent: September 21, 2021Assignees: BEIJING BOE DISPLAY TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Lianjie Qu, Yonglian Qi, Hebin Zhao, Yun Qiu, Xiaoling Xu, Ruizhi Yang, Guangdong Shi, Shiyu Xu, Shan Zhang
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Patent number: 11127765Abstract: A display device with high resolution is provided. A display device with high display quality is provided. A display device includes a display portion, a first terminal group, and a second terminal group. The display portion includes pixels, scan lines, and signal lines. The first terminal group and the second terminal group are apart from each other. The first terminal group includes first terminals and the second terminal group includes second terminals. The scan lines are each electrically connected to the pixels arranged in a row direction. The signal lines are each electrically connected to the pixels arranged in a column direction. The signal lines are each electrically connected to the first terminal or the second terminal. The display portion includes a first region where the signal lines electrically connected to the first terminals and the signal lines electrically connected to the second terminals are mixed.Type: GrantFiled: February 19, 2020Date of Patent: September 21, 2021Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Kei Takahashi, Shunpei Yamazaki