Patents Issued in September 21, 2021
  • Patent number: 11127817
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a semiconductor structure over a semiconductor substrate. The method also includes implanting carbon into the semiconductor structure. The method further includes implanting gallium into the semiconductor structure. In addition, the method includes heating the semiconductor structure after the implanting of carbon and gallium.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: September 21, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsan-Chun Wang, Chiao-Ting Tai, Che-Fu Chiu, Chun-Feng Nieh
  • Patent number: 11127818
    Abstract: An illustrative device includes a transistor including a first set of fins defined above a substrate, a second set of fins defined above the substrate, and a gate structure embedded in the substrate between the first set of fins and the second set of fins, wherein the first set of fins and the second set of fins are doped with a first dopant type and the substrate is doped with a second dopant type different than the first dopant type.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: September 21, 2021
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Jagar Singh, Srikanth Balaji Samavedam
  • Patent number: 11127819
    Abstract: Semiconductor devices and methods are provided. A semiconductor device according to the present disclosure includes a first gate-all-around (GAA) transistor that includes a plurality of first channel members and a first gate dielectric layer over the plurality of first channel members, and a second GAA transistor that includes a plurality of second channel members, and a second gate dielectric layer over the plurality of second channel members. A first width (W1) of each of the plurality of first channel members is greater than a second width (W2) of each of the plurality of second channel members. A first thickness (GL1) of the first gate dielectric layer is smaller than a second thickness (GL2) of the second gate dielectric layer.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: September 21, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon Jhy Liaw
  • Patent number: 11127820
    Abstract: A quantum well field-effect transistor (QWFET) includes a barrier layer, a quantum well layer, and a spacer layer. The quantum well layer is on the barrier layer. The barrier layer and the spacer layer comprise aluminum indium antimonide that is undoped. The quantum well layer comprises indium antimonide. The spacer layer is on the quantum well layer. The quantum well layer and the spacer layer are between a source contact and a drain contact. A gate contact is on a dielectric layer, which is on the spacer layer. By providing the barrier layer and the spacer layer as undoped layers, a performance of the QWFET may be improved.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: September 21, 2021
    Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
    Inventors: Michael James Manfra, Candice Fanny Thomas
  • Patent number: 11127821
    Abstract: The present disclosure relates to a Gallium-Nitride (GaN) based module, which includes a module substrate, a thinned switch die residing over the module substrate, a first mold compound, and a second mold compound. The thinned switch die includes an electrode region, a number of switch interconnects extending from a bottom surface of the electrode region to the module substrate, an aluminium gallium nitride (AlGaN) barrier layer over a top surface of the electrode region, a GaN buffer layer over the AlGaN barrier layer, and a lateral two-dimensional electron gas (2DEG) layer realized at a heterojunction of the AlGaN barrier layer and the GaN buffer layer. The first mold compound resides over the module substrate, surrounds the thinned switch die, and extends above a top surface of the thinned switch die to form an opening over the top surface of the thinned switch die. The second mold compound fills the opening.
    Type: Grant
    Filed: April 3, 2019
    Date of Patent: September 21, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll
  • Patent number: 11127822
    Abstract: At edge termination region, a trench is disposed near an interface of an active region. Inside the trench, an embedded insulating film is embedded, and inside the embedded insulating film, a FP long in a direction of depth is disposed. The FP curves outwardly away from an inner sidewall of the trench as a depth from a base front surface increases. At least near a bottom end of the FP, a distance between the FP and the inner sidewall of trench is greater than a width of the groove. The FP is connected to a front surface electrode that extends on the embedded insulating film. As a result, breakdown voltage can be enhanced, adverse effects of the surface charge can be reduced, and chip size can be further reduced.
    Type: Grant
    Filed: April 25, 2017
    Date of Patent: September 21, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Wentao Yang, Johnny Kin On Sin, Yuichi Onozawa, Kaname Mitsuzuka
  • Patent number: 11127823
    Abstract: A split gate structure is disclosed. The split gate structure includes a first polysilicon, a characteristic oxide, and a second polysilicon sequentially disposed in a trench in a vertical direction upward from a bottom of the trench. An upper surface of the characteristic oxide has a height difference less than 1500 ? between a higher center portion and a lower periphery portion. The split gate structure effectively improves the breakdown performance and the IGSS performance. A power MOS device having the split gate structure and a manufacturing method of the split gate structure are also provided.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: September 21, 2021
    Assignee: HeJian Technology (Suzhou) Co., Ltd.
    Inventors: Yuan Cheng Zheng, Xin Huan Shi
  • Patent number: 11127825
    Abstract: A method of forming a semiconductor structure includes forming a first portion of a source/drain contact over a source/drain region of a fin-type field-effect transistor (FinFET), the source/drain region being formed over a fin providing a channel region of the FinFET and being adjacent a gate spacer surrounding a gate region of the FinFET. The method also includes forming a first interlayer dielectric (ILD) layer over the first portion of the source/drain contact, the gate spacer and the gate region, and forming a second ILD layer over the first ILD layer. The method further includes forming a second portion of the source/drain contact over the first portion of the source/drain contact in a first opening in the first ILD layer, and forming a third portion of the source/drain contact over the second portion of the source/drain contact in a second opening in the second ILD layer. The second opening is larger than the first opening.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: September 21, 2021
    Assignee: International Business Machines Corporation
    Inventors: Chanro Park, Kangguo Cheng, Ruilong Xie, Hari Prasad Amanapu
  • Patent number: 11127826
    Abstract: A semiconductor device may include a semiconductor substrate, an upper electrode provided on an upper surface of the semiconductor substrate, a lower electrode provided on a lower surface of the semiconductor substrate, and a terminal connected to the upper electrode. The semiconductor substrate may include an active region in which switching elements are provided. The switching elements may be configured to pass a current between the upper electrode and the lower electrode. The active region may include a main region located under the terminal and an external region located outside the main region. The external region may include a low current region. A current density in the low current region may be lower than a current density in the main region in a case where the switching elements in the low current region and the main region are turned on.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: September 21, 2021
    Assignee: DENSO CORPORATION
    Inventors: Masayuki Kamiya, Takanori Kawashima
  • Patent number: 11127827
    Abstract: Various embodiments of the present application are directed towards a control gate layout to improve an etch process window for word lines. In some embodiments, an integrated chip comprises a memory array, an erase gate, a word line, and a control gate. The memory array comprises a plurality of cells in a plurality of rows and a plurality of columns. The erase gate and the word line are elongated in parallel along a row of the memory array. The control gate is elongated along the row and is between and borders the erase gate and the word line. Further, the control gate has a pad region protruding towards the erase gate and the word line. Because the pad region protrudes towards the erase gate and the word line, a width of the pad region is spread between word-line and erase-gate sides of the control gate.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: September 21, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Ling Hsu, Ping-Cheng Li, Hung-Ling Shih, Po-Wei Liu, Wen-Tuo Huang, Yong-Shiuan Tsair, Chia-Sheng Lin, Shih Kuang Yang
  • Patent number: 11127828
    Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate including a trench. The semiconductor device further includes a gate electrode disposed in the trench, and a gate insulating film disposed between the substrate and the gate electrode. The gate electrode includes a gate conductor and a metal element, and an effective work function of the gate electrode is less than an effective work function of the gate conductor.
    Type: Grant
    Filed: June 5, 2019
    Date of Patent: September 21, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Eunae Cho, Dongjin Lee, Ji Eun Lee, Kyoung-Ho Jung, Dong Su Ko, Yongsu Kim, Jiho Yoo, Sung Heo, Hyun Park, Satoru Yamada, Moonyoung Jeong, Sungjin Kim, Gyeongsu Park, Han Jin Lim
  • Patent number: 11127829
    Abstract: A semiconductor device comprises at least one cell. The structure of each cell comprises: a N-type substrate; at least one first trench unit and at least one second trench unit provided on one side of the N-type substrate; at least one P-type semiconductor region provided on the other side of the N-type substrate, the P-type semiconductor region consisting an anode region; at least one N-type carrier barrier region; and at least one P-type electric field shielding region. The purpose of the present invention is to provide a semiconductor device which has a novel cell structure to provide: a large safe operating area; a short-circuit resistance; elimination of the effect of parasitic thyristors; a low gate-collector charge (QGC) to provide a maximum resistance to dv/dt; increase of conductivity modulation at the emitter side to provide a large current density and an extremely low on-voltage drop; a small turn-off loss; and a low process complexity.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: September 21, 2021
    Assignee: Nanjing Sinnopower Technology Co., Ltd.
    Inventor: Xinjiang Lyu
  • Patent number: 11127830
    Abstract: Apparatus (e.g., semiconductor devices) include stack structures with at least one conductive region and at least one nonconductive material. A multidielectric spacer is adjacent the at least one conductive region and comprises first and second dielectric materials. The first dielectric material, adjacent the at least one conductive region, includes silicon and nitrogen. The second dielectric material, adjacent the first dielectric material, comprises silicon-carbon bonds and defines a substantially straight, vertical, outer sidewall. In methods to form such apparatus, the first dielectric material may be formed with selectivity on the at least one conductive region, and the second dielectric material may be formulated and formed to exhibit etch resistance.
    Type: Grant
    Filed: January 17, 2019
    Date of Patent: September 21, 2021
    Assignee: Micron Technology, Inc.
    Inventors: John A. Smythe, Silvia Borsari, Francois H. Fabreguette, Sutharsan Ketharanathan
  • Patent number: 11127831
    Abstract: Embodiments of the disclosure provide a transistor structure and methods to form the same. The transistor structure may include an active semiconductor region with a channel region between a first source/drain (S/D) region and a second S/D region. A polysilicon gate structure is above the channel region of the active semiconductor region. An overlying gate is positioned on the polysilicon gate structure. A horizontal width of the overlying gate is greater than a horizontal width of the polysilicon gate structure. The transistor structure includes a gate contact to the overlying gate.
    Type: Grant
    Filed: February 12, 2020
    Date of Patent: September 21, 2021
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Qizhi Liu, Vibhor Jain, John J. Pekarik, Judson R. Holt
  • Patent number: 11127832
    Abstract: A method for forming a semiconductor structure is provided. The method for forming the semiconductor structure includes alternately stacking first semiconductor layers and second semiconductor layers over a substrate, patterning the first semiconductor layers and the second semiconductor layers into a fin structure, removing the first semiconductor layers of the fin structure thereby forming gaps between the second semiconductor layers of the fin structure, forming a gate dielectric layer wrapping around the second semiconductor layers, forming a barrier material on the gate dielectric layer. At least a portion of the barrier material is oxidized to form a first barrier oxide. The method for forming the semiconductor structure also includes etching away the first barrier oxide, forming a work function layer to wrap around the second semiconductor layers, and forming a metal fill layer over the work function layer.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: September 21, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang Cheng, Ziwei Fang
  • Patent number: 11127833
    Abstract: A method of manufacturing a semiconductor device includes providing a substrate, forming a gate structure including a metal gate on the substrate, forming an interlayer dielectric layer on the gate structure, forming a first contact hole extending through the interlayer dielectric layer to expose a surface of the metal gate, and removing a portion of the metal gate using a wet etching process to form a second contact hole having a cross-sectional size larger than a cross-sectional size of the first contact hole.
    Type: Grant
    Filed: November 25, 2019
    Date of Patent: September 21, 2021
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Lin Chen, Qiang Lei
  • Patent number: 11127834
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to gate structures and methods of manufacture. The method includes: forming a first gate structure and a second gate structure with gate materials; etching the gate materials within the second gate structure to form a trench; and depositing a conductive material within the trench so that the second gate structure has a metal composition different than the first gate structure.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC
    Inventors: Jiehui Shu, Sipeng Gu, Halting Wang
  • Patent number: 11127835
    Abstract: There is provided a method for etching a dielectric layer covering at least partially a flank of a structure made of a semi-conductive material, the structure having at least one face, the method including a plurality of sequences, each including at least the following steps: a main oxidation so as to form an oxide film; a main anisotropic etching of the oxide film, carried out so as to etch a portion of the oxide film extending parallel to the flanks and at least some of the dielectric layer, be stopped before etching the structure and a whole thickness of another portion of the oxide film extending perpendicularly to the flanks, the steps being repeated until the complete removal of the dielectric layer located on the flanks of the structure.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: September 21, 2021
    Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Nicolas Posseme, Vincent Ah-Leung, Olivier Pollet
  • Patent number: 11127836
    Abstract: Gate structures and methods of forming the gate structures are described. In some embodiments, a method includes forming source/drain regions in a substrate, and forming a gate structure between the source/drain regions. The gate structure includes a gate dielectric layer over the substrate, a work function tuning layer over the gate dielectric layer, a metal-containing compound over the work function tuning layer, and a metal over the metal-containing compound, wherein the metal-containing compound comprises the metal as an element of the compound.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: September 21, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Chiang Wu, Chia-Ching Lee, Da-Yuan Lee, Hsueh Wen Tsau
  • Patent number: 11127837
    Abstract: Devices are described herein that include an epitaxial layer, a cap layer above the epitaxial layer, a gate layer adjacent to the epitaxial layer on which an etching process is performed, a trench above the cap layer, and a source/drain portion includes the epitaxial layer.
    Type: Grant
    Filed: October 28, 2019
    Date of Patent: September 21, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Ching-Feng Fu, Yu-Chan Yen, Chih-Hsin Ko, Chun-Hung Lee, Huan-Just Lin, Hui-Cheng Chang
  • Patent number: 11127838
    Abstract: A method of fabricating a metal gate transistor includes providing a substrate. An interlayer dielectric layer covers the substrate. A dummy gate is embedded in the interlayer dielectric layer. A high-k dielectric layer is disposed between the dummy gate and the substrate. Later, the dummy gate is removed to form a trench, and the high-k dielectric layer is exposed through the trench. After the dummy gate is removed, an ion implantation process is performed to implant fluoride ions into the high-k dielectric layer. Finally, after the ion implantation process, a metal gate is formed to fill in the trench.
    Type: Grant
    Filed: December 2, 2019
    Date of Patent: September 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhi-Cheng Lee, Wei-Jen Chen, Kai-Lin Lee
  • Patent number: 11127839
    Abstract: A method of manufacturing a trench oxide in a trench for a gate structure in a semiconductor substrate is described. The method includes: generating the trench in the semiconductor substrate; generating an oxide layer over opposing sidewalls of the trench; damaging at least a portion of the oxide layer by ion implantation; coating the oxide layer with an etching mask; generating at least one opening in the etching mask adjacent to one of the opposing sidewalls; and partly removing the oxide layer by etching the oxide layer beneath the etching mask down to an etching depth at the one of the opposing sidewalls by introducing an etching agent into the opening.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: September 21, 2021
    Assignee: Infineon Technologies AG
    Inventors: Moriz Jelinek, Kang Nan Khor, Armin Schieber, Michael Stadtmueller, Wei-Lin Sun
  • Patent number: 11127840
    Abstract: Disclosed is a method for manufacturing an isolation structure for LDMOS, the method comprising: forming a first groove on the surface of a wafer; filling the first groove with silicon oxide; removing part of the surface of the silicon oxide within the first groove by means of etching; forming a silicon oxide corner structure at the corner of the top of the first groove by means of thermal oxidation; depositing a nitrogen-containing compound on the surface of the wafer to cover the surface of the silicon oxide within the first groove and the surface of the silicon oxide corner structure; dry-etching the nitrogen-containing compound to remove the nitrogen-containing compound from the surface of the silicon oxide within the first groove, and thereby forming a nitrogen-containing compound side wall residue; with the nitrogen-containing compound side wall residue as a mask, continuing to etch downwards to form a second groove; forming a silicon oxide layer on the side wall and the bottom of the second groove; rem
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: September 21, 2021
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Shukun Qi, Guipeng Sun
  • Patent number: 11127841
    Abstract: Confined epitaxial regions for semiconductor devices and methods of fabricating semiconductor devices having confined epitaxial regions are described. For example, a semiconductor structure includes a plurality of parallel semiconductor fins disposed above and continuous with a semiconductor substrate. An isolation structure is disposed above the semiconductor substrate and adjacent to lower portions of each of the plurality of parallel semiconductor fins. An upper portion of each of the plurality of parallel semiconductor fins protrudes above an uppermost surface of the isolation structure. Epitaxial source and drain regions are disposed in each of the plurality of parallel semiconductor fins adjacent to a channel region in the upper portion of the semiconductor fin. The epitaxial source and drain regions do not extend laterally over the isolation structure.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: September 21, 2021
    Assignee: Intel Corporation
    Inventors: Szuya S. Liao, Michael L. Hattendorf, Tahir Ghani
  • Patent number: 11127842
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to single fin structures and methods of manufacture. The structure includes: an active single fin structure; a plurality of dummy fin structures on opposing sides of the active single fin structure; source and drain regions formed on the active single fin structure and the dummy fin structures; recessed shallow trench isolation (STI) regions between the dummy fin structures and the active single fin structure and below a surface of the dummy fin structures; and contacts formed on the source and drain regions of the active single fin structure with a spacing of at least two dummy fin structures on opposing sides of the contacts.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu
  • Patent number: 11127843
    Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A base layer is positioned in a cavity in a semiconductor layer, a first terminal is coupled to the base layer, and a second terminal is coupled to a portion of the semiconductor layer. The second terminal is laterally spaced from the first terminal, and the portion of the semiconductor layer is laterally positioned between the second terminal and the base layer.
    Type: Grant
    Filed: January 3, 2020
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Judson Holt, Alexander Derrickson, Ryan Sporer, George R. Mulfinger, Alexander Martin, Jagar Singh
  • Patent number: 11127844
    Abstract: A semiconductor device includes: a drift layer; a mesa region that is interposed between adjacent trenches on the drift layer; a gate electrode buried in each trench through a gate insulating film; a base region of buried in the mesa region; a plurality of emitter regions that are periodically buried in a surface layer portion of the base region along a longer direction of the trench; and contact regions that are alternately buried in the longer direction together with the emitter regions such that each emitter region is interposed between the contact regions, are deeper than the emitter region, and extend immediately below the emitter region so as to be separated from each other, a contact-region contact-width in the longer direction defined in a surface of the contact region being less than an emitter-region contact-width in the longer direction defined in a surface of the emitter region.
    Type: Grant
    Filed: January 26, 2017
    Date of Patent: September 21, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Hitoshi Abe, Hiroshi Miyata, Hidenori Takahashi, Seiji Noguchi, Naoya Shimada
  • Patent number: 11127845
    Abstract: A semiconductor structure is provided, which includes a semiconductor device, a first conductive layer, and a gate runner. The semiconductor device includes an upper surface, a gate terminal, a source terminal, and a drain terminal. The first conductive layer is deposited on the upper surface and coupled to the source terminal. The gate runner is overlapped with the first conductive layer and coupled to the gate terminal. The gate runner and the first conductive layer are configured to contribute a parasitic capacitance between the gate terminal and the source terminal.
    Type: Grant
    Filed: December 7, 2018
    Date of Patent: September 21, 2021
    Assignee: DELTA ELECTRONICS, INC.
    Inventors: Wen-Chia Liao, Ying-Chen Liu, Chen-Ting Chiang
  • Patent number: 11127846
    Abstract: A HEMT device includes a gate electrode disposed on a semiconductor layer; a first dielectric layer disposed on the gate electrode and having a first recess on a first side of the gate electrode, wherein a bottom surface of the first recess is lower than a top surface of the gate electrode; a source field plate disposed on the first dielectric layer and extending from a second side of the gate electrode into the first recess; a second dielectric layer disposed on the source field plate; a source electrode disposed on the second dielectric layer and electrically connected to the source field plate; a third dielectric layer disposed on the source electrode; and a drain structure disposed on the first side of the gate electrode and passing through the third dielectric layer, wherein the first recess is located between the drain structure and the gate structure.
    Type: Grant
    Filed: July 12, 2019
    Date of Patent: September 21, 2021
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventor: Chih-Yen Chen
  • Patent number: 11127847
    Abstract: A semiconductor device includes a compound semiconductor layer disposed over a substrate, a protection layer disposed over the compound semiconductor layer, and a source electrode, a drain electrode and a gate electrode which penetrate through the protection layer and are disposed on the compound semiconductor layer. The semiconductor device also includes a gate field plate connecting the gate electrode and disposed over a portion of the protection layer between the gate electrode and the drain electrode. The gate field plate has an extension portion extending into the protection layer.
    Type: Grant
    Filed: May 16, 2019
    Date of Patent: September 21, 2021
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Chia-Hao Lee, Chang-Xiang Hung, Manoj Kumar, Chih-Cherng Liao
  • Patent number: 11127848
    Abstract: A semiconductor structure includes a substrate structure having a plurality of first trenches extending in a first direction, a nucleation layer disposed on the substrate structure, a compound semiconductor layer disposed on the nucleation layer, a gate disposed on the compound semiconductor layer, and a source and a drain disposed on the compound semiconductor layer and at opposite sides of the gate.
    Type: Grant
    Filed: November 29, 2019
    Date of Patent: September 21, 2021
    Assignee: Vanguard International Semiconductor Corporation
    Inventor: Chih-Yen Chen
  • Patent number: 11127849
    Abstract: The present disclosure discloses an enhancement-mode field effect transistor. This enhancement-mode field effect transistor includes a substrate, a channel layer formed on an upper surface of the substrate, a source electrode and a drain electrode respectively formed on both sides of the channel layer, and a gate electrode formed on an upper surface of the channel layer, a region outside the corresponding region of the gate electrode in the channel layer is provided with a carrier-free region. Carriers are absent in the carrier-free region, and carriers are present in the remaining portion of the channel layer. The carrier-free region is not disposed below the gate electrode, but is disposed outside the corresponding region of the gate electrode in the channel layer, and the threshold voltage of the device can be regulated by regulating the width and number of the carrier-free region.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: September 21, 2021
    Assignee: The 13th Research Institute of China Electronics Technology Group Corporation
    Inventors: Yuanjie Lv, Yuangang Wang, Xubo Song, Xin Tan, Xingye Zhou, Zhihong Feng
  • Patent number: 11127850
    Abstract: A semiconductor device includes a first conductivity type semiconductor layer including an active cell portion and an outer peripheral portion around the active cell portion, a second conductivity type body region selectively formed at a surface portion of the semiconductor layer in the active cell portion, a first conductivity type source region formed at an inner part of the body region, a gate electrode that faces a part of the body region through a gate insulating film, a second conductivity type column layer straddling a boundary between the active cell portion and the outer peripheral portion inside the semiconductor layer such that the column layer is disposed at a lower part of the body region in the active cell portion, a source electrode that is electrically connected to the source region, and an outer peripheral electrode that is electrically connected to the column layer in the outer peripheral portion.
    Type: Grant
    Filed: January 25, 2018
    Date of Patent: September 21, 2021
    Assignee: ROHM CO., LTD.
    Inventor: Yusuke Kubo
  • Patent number: 11127851
    Abstract: A semiconductor device (A1) includes a semiconductor layer having a first face with a trench (3) formed thereon and a second face opposite to the first face, a gate electrode (41), and a gate insulating layer (5). The semiconductor layer includes a first n-type semiconductor layer (11), a second n-type semiconductor layer (12), a p-type semiconductor layer (13), and an n-type semiconductor region (14). The trench (3) is formed so as to penetrate through the p-type semiconductor layer (13) and to reach the second n-type semiconductor layer (12). The p-type semiconductor layer (13) includes an extended portion extending to a position closer to the second face of the semiconductor layer than the trench (3) is. Such structure allows suppressing dielectric breakdown in the gate insulating layer (5).
    Type: Grant
    Filed: May 13, 2020
    Date of Patent: September 21, 2021
    Assignee: ROHM CO., LTD.
    Inventor: Yuki Nakano
  • Patent number: 11127852
    Abstract: A trench gate metal oxide semiconductor field effect transistor (MOSFET) device includes an epitaxial layer on a substrate both doped a first conductivity type. Active area trenches have polysilicon gates over a double shield field plate. A junction termination trench includes a single shield field plate in a junction termination area which encloses the active area that includes a retrograde dopant profile of the second conductivity type into the epitaxial layer in the junction termination area. Pbody regions of a second conductivity type are between active trenches and between the outermost active trench and the junction termination trench. Source regions of the first conductivity type are in the body regions between adjacent active trenches. Metal contacts are over contact apertures that extend through a pre-metal dielectric layer reaching the body region under the source region, the single shield field plate, and that couples together the polysilicon gates.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: September 21, 2021
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Sunglyong Kim, Seetharaman Sridhar, Hong Yang, Ya Ping Chen, Yunlong Liu, Fei Ma
  • Patent number: 11127853
    Abstract: A transistor device is disclosed. The transistor device includes: a semiconductor body; a source conductor on top of the semiconductor body; a source clip on top of the source conductor and electrically connected to the source conductor; a first active device region arranged in the semiconductor body, covered by the source conductor and the source clip, and including at least one device cell; and a second active device region arranged in the semiconductor body, covered by regions of the source conductor that are not covered by the source clip, and including at least one device cell. The first active device region has a first area specific on-resistance and the second active device region has a second area specific on-resistance, the second area specific on-resistance being greater than the first area specific on-resistance.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: September 21, 2021
    Assignee: Infineon Technologies AG
    Inventors: Cristian Mihai Boianceanu, Liu Chen, Sebastian Sosin, Andrew Christopher Graeme Wood
  • Patent number: 11127854
    Abstract: A semiconductor device includes a semiconductor part, an first electrode, a control electrode and second electrodes. The control electrode and the second electrodes are provided between the semiconductor part and the first electrode, and provided inside trenches, respectively. The second electrodes include first to third ones. The first and second ones of the second electrodes are adjacent to each other with a portion of the semiconductor part interposed. The second electrodes each are electrically isolated from the semiconductor part by a insulating film including first and second insulating portions adjacent to each other. The first insulating portion has a first thickness. The second insulating portion has a second thickness thinner than the first thickness. The first insulating portion is provided between the first and second ones of the second electrodes. The second insulating portion is provided between the first and third ones of the second electrodes.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: September 21, 2021
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Hiroaki Katou, Atsuro Inada, Tatsuya Shiraishi, Tatsuya Nishiwaki, Kenya Kobayashi
  • Patent number: 11127855
    Abstract: A LDMOS transistor that may include (i) a first region that is a reduced surface field (RESURF) implant region of a first type; (ii) a second region that is a RESURF implant region of a second type, wherein the first type differs from the second type; (iii) a gate; (iv) a stepped oxide region and a gate oxide region that are positioned above the first region and below the gate.
    Type: Grant
    Filed: May 28, 2019
    Date of Patent: September 21, 2021
    Assignee: Tower Semiconductors Ltd.
    Inventors: Daniel Sherman, Sagy Levy, David Mistele
  • Patent number: 11127856
    Abstract: A method for improving breakdown voltage of a Laterally Diffused Metal Oxide Semiconductor (LDMOS) includes biasing a first well of a Field Effect Transistor (FET) to a first voltage. The first well is laterally separated from a second well. An isolation ring is charged to a second voltage in response to the first voltage exceeding a breakdown voltage of a diode connected between the isolation ring and the first well. The isolation ring laterally surrounds the FET and contacts a buried layer (BL) extending below the first well and the second well. A substrate is biased to a third voltage being less than or equal to the first voltage. The substrate laterally extends below the BL and contacts the BL.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: September 21, 2021
    Assignee: NXP USA, INC.
    Inventors: Xin Lin, Zhihong Zhang, Xu Cheng, Ronghua Zhu
  • Patent number: 11127857
    Abstract: Semiconductor devices and methods of manufacturing semiconductor devices are provided. In embodiments a treatment process is utilized in order to introduce silicon into a p-metal work function layer. By introducing silicon into the p-metal work function layer, subsequently deposited layers which may comprise diffusable materials such as aluminum can be prevented from diffusing through the p-metal work function layer and affect the operation of the device.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: September 21, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Yi Lee, Da-Yuan Lee, Ching-Hwanq Su
  • Patent number: 11127858
    Abstract: One of the objects is to improve display quality by reduction in malfunctions of a circuit. In a driver circuit formed using a plurality of pulse output circuits having first to third transistors and first to fourth signal lines, a first clock signal is supplied to the first signal line; a preceding stage signal is supplied to the second signal line; a second clock signal is supplied to the third signal line; an output signal is output from the fourth signal line. Duty ratios of the first clock signal and the second clock signal are different from each other. A period during which the second clock signal is changed from an L-level signal to an H-level signal after the first clock signal is changed from an H-level signal to an L-level signal is longer than a period during which the preceding stage signal is changed from an L-level signal to an H-level signal.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: September 21, 2021
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Atsushi Umezaki
  • Patent number: 11127859
    Abstract: A semiconductor device includes a channel structure, a dielectric structure, a gate structure, a first conductive structure, and a second conductive structure. The channel structure has a top surface, a bottom surface, and a sidewall extending from the top surface to the bottom surface. The first conductive structure is disposed on the bottom surface of the channel structure and includes a body portion and at least one convex portion, and a top surface of the convex portion is higher than a top surface of the body portion. The second conductive structure is disposed on the top surface of the channel structure and includes a body portion and at least one convex portion, and a bottom surface of the body portion is higher than a bottom surface of the convex portion.
    Type: Grant
    Filed: June 10, 2019
    Date of Patent: September 21, 2021
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Jhen-Yu Tsai
  • Patent number: 11127860
    Abstract: Structures for an extended-drain field-effect transistor and methods of forming an extended-drain field-effect transistor. A source region is coupled to a semiconductor layer, a drain region is coupled to the semiconductor layer, and a first gate structure is positioned over a channel region of the semiconductor layer. An extended drain region is positioned between the channel region and the drain region. The extended drain region includes a portion of the semiconductor layer between the first gate structure and the drain region. A second gate structure is arranged over the portion of the semiconductor layer.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Ming-Cheng Chang, Nigel Chan
  • Patent number: 11127861
    Abstract: An embodiment includes an apparatus comprising: a thin film transistor (TFT) comprising: source and drain contacts; first and second gate contacts: a semiconductor material, comprising a channel, between the first and second gate contacts; and a first dielectric layer, between the first and second gate contacts, to fix charged particles. Other embodiments are described herein.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: September 21, 2021
    Assignee: Intel Corporation
    Inventor: Abhishek A. Sharma
  • Patent number: 11127862
    Abstract: In a method of manufacturing a non-volatile memory device, a stack structure may be formed on a semiconductor substrate. The stack structure may be etched to form a contact hole through the stack structure. The contact hole may be filled with a gap-filling insulation layer. Ions may be implanted into a target position of the gap-filling insulation layer. The gap-filling insulation layer may be selectively removed to define a preliminary junction region. A junction region may be formed in the preliminary junction region.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: September 21, 2021
    Assignee: SK hynix Inc.
    Inventors: Eun Mee Kwon, Da Som Lee
  • Patent number: 11127863
    Abstract: This invention concerns a gate structure and a process for its manufacturing. In particular, the present invention concerns the gate structuring of a field effect transistor with reduced thermo-mechanical stress and increased reliability (lower electromigration or diffusion of the gate metal). The gate structure according to the invention comprises a substrate; an active layer disposed on the substrate; an intermediate layer disposed on the active layer, the intermediate layer-having a recess extending through the entire intermediate layer towards the active layer; and a contact element which is arranged within the recess, the contact element completely filling the recess and extending to above the intermediate layer, the contact element resting at least in sections directly on the intermediate layer; the contact element being made of a Schottky metal and the contact element having an interior cavity completely enclosed by the Schottky metal.
    Type: Grant
    Filed: November 20, 2017
    Date of Patent: September 21, 2021
    Assignee: FORSCHUNGSVERBUND BERLIN E.V.
    Inventors: Konstantin Osipov, Richard Lossy, Hans-Joachim Würfl
  • Patent number: 11127864
    Abstract: A method of producing a photovoltaic cell having a cover, comprising the steps of: providing a photovoltaic cell which comprises a crystalline silicon substrate; providing a transparent substrate; forming an antireflective coating on said transparent substrate to provide a coated transparent substrate; and covering the photovoltaic cell with said coated transparent substrate. The antireflective coating is a hybrid organic-inorganic material having an inorganic portion comprising silicon, oxygen and carbon, and further comprising an organic portion with organic groups connected to the inorganic portion. Methods of producing solar panels, coated glass substrates as well as antireflection coatings are disclosed as well as novel compositions of hybrid organic-inorganic materials.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: September 21, 2021
    Assignee: Optitune Oy
    Inventors: Ari Kärkkäinen, Milja Hannu-Kuure, Admir Hadzic, Jarkko Leivo, Henna Järvitalo, Rauna-Leena Kuvaja
  • Patent number: 11127865
    Abstract: An integrated energy harvesting and storage device (IEHSD) includes a solar cell (SC) including an active layer between an optically transparent top electrode and a bottom electrode, and an energy storage device (SD) secured below the solar cell including a separator between a first electrode and a second electrode. The bottom electrode and the first or second electrode are electrically common with one another and are within a distance of ?300 ?m from one another.
    Type: Grant
    Filed: August 1, 2018
    Date of Patent: September 21, 2021
    Assignee: University of Central Florida Research Foundation, Inc.
    Inventors: Jayan Thomas, Chao Li, Chait Renduchintala
  • Patent number: 11127866
    Abstract: Approaches for the metallization of solar cells and the resulting solar cells are described. In an example, a method of fabricating a solar cell involves forming a barrier layer on a semiconductor region disposed in or above a substrate. The semiconductor region includes monocrystalline or polycrystalline silicon. The method also involves forming a conductive paste layer on the barrier layer. The method also involves forming a conductive layer from the conductive paste layer. The method also involves forming a contact structure for the semiconductor region of the solar cell, the contact structure including at least the conductive layer.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: September 21, 2021
    Assignees: SunPower Corporation, Total Marketing Services
    Inventors: Richard Hamilton Sewell, David Aaron Randolph Barkhouse, Junbo Wu, Michael Cudzinovic, Paul Loscutoff, Joseph Behnke, Michel Arséne Olivier Ngamo Toko
  • Patent number: 11127867
    Abstract: A monocrystalline germanium wafer that increases the open-circuit voltage of multijunction solar cells, a method for preparing the monocrystalline germanium wafer and a method for preparing an ingot from which the monocrystalline germanium wafer is prepared. The monocrystalline germanium wafer that increases the open-circuit voltage of the bottom cell of multijunction solar cells is prepared by adjusting the amounts of the co-dopants silicon and gallium in the monocrystalline germanium wafer, the ratio of silicon to gallium in the preparation of the monocrystalline germanium.
    Type: Grant
    Filed: July 9, 2018
    Date of Patent: September 21, 2021
    Assignee: Beijing Tongmei Xtal Technology Co., Ltd.
    Inventors: Rajaram Shetty, Yuanli Wang, Yvonne Zhou, Weiguo Liu, Sung-Nee George Chu