Abstract: Examples include systems and methods for decomposition of error components between angular, forward, and sideways errors in estimated positions of a computing device. One method includes determining an estimation of a current position of the computing device based on a previous position of the computing device, an estimated speed over an elapsed time, and a direction of travel of the computing device, determining a forward, sideways, and orientation change error component of the estimation of the current position of the computing device, determining a weight to apply to the forward, sideways, and orientation change error components based on average observed movement of the computing device, and using the weighted forward, sideways, and orientation change error components as constraints for determination of an updated estimation of the current position of the computing device.

Abstract: The invention relates to a method for monitoring at least two redundant sensors, which are in particular arranged in a chemical plant or an aircraft, comprising providing a first sensor signal of a first sensor, the first sensor signal comprising at least one measured value, providing at least one further sensor signal from a further sensor, the further sensor signal comprising at least one further measured value, generating a first analysis signal from the first sensor signal, generating at least one further analysis signal from the further sensor signal, determining at least one relationship between the first sensor signal and the further sensor signal at least in dependence on the first analysis signal and the further analysis signal over a time horizon, comparing the relationship with at least one admissible range, and, depending on the result of the comparison, determining whether at least one sensor of the two redundant sensors is faulty.

Abstract: A system and method are presented for collecting and retrieving characterization data of measurement devices, such as flow meters. The system includes a meter, a radio frequency identification (RFID) tag for storing the meter characterization data, and electronics, such as a totalizer, to read the characterization data from the RFID tag and calibrate the meter measurements using the characterization data.

Abstract: The present disclosure relates to a method for estimating the position of a magnet using a tracking device comprising an array of magnetometers, the method comprising phases of determining an initial state vector associated with the magnet, of measuring a useful magnetic field, of estimating a magnetic field, of calculating a bias between the measured magnetic field and the estimated magnetic field, and of updating the state vector on the basis of the bias. It also comprises an identifying phase comprising a step of identifying a magnetic disturbance on the basis of an indicator calculated depending on an estimated magnetic field and a measured magnetic field.

Abstract: A sensor device includes a first pair of connection terminals extended from a first sensor and a second pair of connection terminals extended from a second sensor. A first negative connection terminal that is a negative connection terminal of the first pair of connection terminals and a second negative connection terminal that is a negative connection terminal of the second pair of connection terminals are electrically connected to each other.

Abstract: A posture adjusting device includes a support member with a pressure receiving surface to be pressed by a body of a user, multiple posture adjusting members each configured to change an uneven state of the pressure receiving surface, a sensor configured to output, when a given posture adjusting member is pressed by the body via the pressure receiving surface, a resistance value that constantly varies in accordance with a magnitude of a press force that is transferred via the given posture adjusting member, a drive unit configured to independently drive each of the multiple posture adjusting members, and a control unit configured to identify the pressed posture adjusting member based on the output of the sensor, and to control the drive unit to cause the pressed posture adjusting member to be moved or deformed to thereby cause the uneven state of the pressure receiving surface to change.

Abstract: An inductive absolute position sensor has a scale with planar conducting features on a pattern repeating every spatial period TC along a measuring path and a reading head with planar windings: multipolar sine and cosine sense windings of spatial period TF=TC/M, M an integer, a unipolar first drive winding surrounding the sense windings and a multipolar second drive winding of spatial period TC/N along the measuring path, with N=M±1. An electronic circuit makes a first mode measurement using the first drive winding and a second mode measurement using the second drive winding. The absolute position in a range TC is computed from both modes' measurements. The sensor may be as compact as the incremental sensor it replaces, as the scale pattern and second drive winding needed for making it absolute do not need extra space.

Abstract: A sensing system adapted to determine changes in phase when a capacitive object enters into the phase detection zone created by a pair of transmitting conductors. One of the transmitting conductors has a receiving conductor located proximate to it and transmits a signal at a certain frequency. The other transmitting conductor transmits a signal that is phase shifted from the signal transmitted by the other transmitting conductor. Capacitive objects entering the space between the two transmitting conductors impacts the phase. Measurements of the change in phase are used to determine the position of an object between the two transmitting conductors.

Abstract: Method for determining a measuring offset of a rotor position sensor (2) assigned to a rotor (3) of an electric machine (5) comprising stator windings that are supplied by an inverter (6) converting a voltage at a DC link capacitor (7) into an AC current, wherein a candidate value for the measuring offset is determined, comprising the following steps: —controlling a power unit (9) of the inverter (6) to provide the current based on rotor position information (19) measured by the rotor position sensor (2) to the stator windings such that the DC link capacitor (7) of the inverter (6) is actively discharged, —evaluating a plausibility of the candidate value for the measuring offset based on a voltage of the DC link capacitor (7) detected while the power unit (9) is controlled to actively discharge the DC link capacitor (7), and —providing the candidate value as determined measuring offset, if a result of the evaluation is positive.

Abstract: In order to provide a fluid device that makes it possible for operation command signals other than existing operation command signals to be received without a software modification having to be implemented in an already constructed system, in a fluid device that measures or controls physical quantities of a fluid, there are provided a command signal receiving unit that receives a predetermined plurality of types of operation command signals, and also command signal modes, which are values thereof or time series variations of the values thereof, and a command signal recognition unit that, when the command signal mode of a predetermined operation command signal received by the command signal receiving unit falls outside predetermined conditions that have been set in advance, recognizes the predetermined operation command signal that contains the command signal mode as being a different type of operation command signal.

Abstract: A flowmeter is inserted into a main passage through which a target fluid flows. The flowmeter includes a housing, a sub passage, an inlet portion, an outlet portion, a flow rate detector, and a protrusion. The housing includes a side surface and a tip end surface. A part of the target fluid flows into the sub passage from the main passage. The target fluid flows into the sub passage through the inlet portion and flows out of the sub passage through the outlet portion. The flow rate detector is configured to detect a flow rate of the target fluid flowing through the sub passage. The tip end surface includes a first end area and a second end area. The protrusion protrudes from the tip end surface and is located in both the first end area and the second end area.

Abstract: Methods and apparatuses associated with an example flow sensing device are provided. In some examples, the flow sensing device may include a flow cap component and a sensor component. In some examples, the flow cap component may include a heating element disposed in a first layer of the flow cap component. In some examples, the sensor component may include at least one thermal sensing element disposed in a second layer of the sensor component. In some examples, the first layer and the second layer are noncoplanar. In some examples, the flow cap component may be bonded to a first surface of the sensor component to form a flow channel. In some examples, the first layer and the second layer may be noncoplanar and separated by the flow channel.

Abstract: A flow sensor for a multi-phase medium flowmeter has a sensor carrier, and the sensor carrier has at least one first sensor array. The at least one first sensor array has a first permittivity sensor for determining a first permittivity of a multi-phase medium, a second permittivity sensor for determining a second permittivity of the medium, a density sensor for determining a density of the medium, and a first sensor axis. The first permittivity sensor, the second permittivity sensor, and the density sensor are arranged on the sensor carrier along the first sensor axis, and the first permittivity sensor and the second permittivity sensor are spaced apart with a permittivity sensor distance.

Abstract: A U-shaped tube is used to measure the mass flow rate of the fluid using both thermal method and the Coriolis principle simultaneously. Two resistant coils are wound on the tube to do the thermal measurement and an excitation coil and two optical sensors are used to do the Coriolis flow measurement. It takes the advantages of both technologies and create a flow sensor which is super accurate, gas type insensitive, long-term stable and fast responsive without too much pressure drop.

Abstract: A pitot tube includes an outer tube extending from a first tube end to second tube end. The second tube end defines a tip portion of the pitot tube. A tube sleeve is located inside of the outer tube and defines a tube passage extending from the first tube end to the second tube end. A heating element is located between the outer tube and the tube sleeve. The heating element is isolated from airflow into the tube passage. A method of forming a pitot tube includes installing a heating element to an outer surface of a tube sleeve, the tube sleeve defining a tube passage of the pitot tube. The tube sleeve is secured in an outer tube such that the heating element is between the tube sleeve and the outer tube and is isolated from airflow through the tube passage.

Abstract: Methods and systems for determining a base field prover volume of a field prover include connecting together a transfer meter assembly, a master prover, and the field prover in series. A flow of fluid at a first flow rate is provided and a calibration sequence is performed at the flow rate. The calibration sequence includes counting pulses generated by the transfer meter assembly over a duration of each pass of the master prover and a pass of the field prover. An intermediate calibrated field prover volume is determined from a ratio of the field prover pulse count to the average master prover pulse count, multiplied by a base master prover volume. The calibration sequence can be repeated to provide at least three intermediate calibrated field prover volumes at the first flow rate. The calibration sequence can be repeated at different flow rates to arrive at the base field prover volume.

Abstract: An instrument calibration apparatus and a calibration method using same. The apparatus comprises a physical quantity input/output unit, a physical quantity measurement unit, a physical quantity configuration unit, a display unit, a man-machine interaction unit, a storage unit, and a control unit. The apparatus can be widely applied to automatic calibration of multivariable instruments.

Abstract: An apparatus (1) for continuous gravimetric metering of pourable material comprises a housing (2) comprising a first and a second spaced wall (5,6), a charging port (7) through the first wall (5), and a discharging port (8) through the first wall (5) displaced from the charging port (7) and a primary air port (10) with a primary outlet opening (9) through the second wall (6) opposite to the discharging port (8). In the second wall (6) a secondary air port (12) is provided with a secondary outlet opening (11) having a substantially smaller outlet area than the primary outlet opening (9) and being displaced from the primary outlet opening in opposite direction to the rotational direction of the rotor (3) and being arranged opposite to the discharging port (8), and where the primary and secondary air ports (10,12) are connected to a compressed air supply.

Abstract: A swivel foot assembly for a force plate or balance plate is disclosed herein. The swivel foot assembly includes a foot attachment component including a stem portion and a body portion, the stem portion of the foot attachment component configured to be attached to a force plate or balance plate; and a foot base component including a receptacle for receiving the body portion of the foot attachment component, the foot base component configured to be disposed on a support surface. The swivel foot assembly is configured to accommodate an uneven support surface on which a force plate or balance plate is disposed so that a force measurement accuracy of the force plate or balance plate is not adversely affected by stresses resulting from the uneven support surface.

Abstract: Functionality of sensors on a shelf or other inventory location is tested by encouraging an interaction and determining if the output from the sensors on the shelf is consistent with the interaction. An interaction at the shelf can include, for example, a user adding or removing an item from the shelf. To encourage this type of interaction with the shelf or items therein, an announcement may be generated and presented to a user. The announcement may comprise an advertisement with some type of incentive for the user to add or remove an item from the shelf. Upon verifying such an interaction, sensor data before and after the interaction can be compared to generate diagnostic data for the sensor, which can indicate whether the sensor is operational or malfunctioning.

Abstract: A system for detecting vibrations from a surface is provided. The system includes a coherent light source for projecting a multi-beam pattern onto the surface and an imaging device for mapping a speckle field generated by each spot formed on the surface by the multi-beam pattern to a unique region of an imaging sensor. The system further includes a processor for processing speckle field information received by the imaging sensor and deriving surface vibration information.

Abstract: A directional acoustic sensor may include a plurality of resonators arranged in different directions; and a processor configured to calculate a time difference between a first signal that is received by the plurality of resonators directly from a sound source (e.g., a speaker) and a second signal that is received by the plurality of resonators from the sound source after being reflected on a wall surface around the sound source, and determine a distance between the sound source and the directional acoustic sensor based on the time difference.

Abstract: A device for detecting light intensity, a display screen and a mobile terminal are provided. The device for detecting light intensity includes a controller, and a first photosensitive sensor and a second photosensitive sensor which are electrically coupled to the controller, the first photosensitive sensor and the second photosensitive sensor being spaced apart and located in a same illumination environment, and the controller is configured to, when an external beam illuminates the first photosensitive sensor, perform calculation based on a difference value between illumination parameters of the first photosensitive sensor and the second photosensitive sensor to obtain a light intensity of the external beam.

Abstract: A computer numerically controlled machine may include a source of electromagnetic energy. A beam of electromagnetic energy from the source may be delivered to a destination such as, for example, a material positioned in a working area of the computer numerically controlled machine. The beam of electromagnetic energy may be susceptible to interferences while traveling from the source to the destination. The computer numerically controlled machine may include a beam detector configured detect an interference of the beam by measuring a power of the beam of electromagnetic energy at a location between the source and the destination. An interference of the beam may be detected if the power of the beam is less than a threshold value. A controller at the computer numerically controlled machine may perform one or more actions in response to the beam detector detecting the interference of the beam of electromagnetic energy.

Abstract: A spectral analysis device is provided herein. The spectral analysis device includes a first lens, a transmission grating, a lens set and a sensing element. The first lens is configured to receive and converge an incident light beam into a first light beam. The transmission grating is configured to disperse the first light beam into a plurality of second light beams. The lens set is configured to receive the plurality of second light beams. The sensing element includes a substrate and a plurality of pixels. The plurality of pixels is configured to respectively receive the plurality of second light beam. Such structure is used to analyze the spectrum of incident light.

Abstract: The present invention provides a wavelength detection device (10) provided with: a plurality of optical filters (12a, 12b); a splitting unit (11) which splits light and allows the split light to pass through each of the plurality of optical filters (12a, 12b); a plurality of light receiving elements (13a, 13b) which detect the intensities of different beams of light which have passed through the optical filters, respectively; and a calculation unit (16) which calculates, from the outputs of the plurality of light receiving elements, physical quantities related to the transmittances of the plurality of optical filters, and calculates the wavelengths of the beams of light which have passed through the plurality of optical filters, on the basis of the transmittance characteristics, wherein the transmittance characteristics of the plurality of optical filters have an inclination section in different wavelength ranges of the wavelength range of the object to be measured.

Abstract: The present disclosure relates to a spectral sensor for detection of individual light-emitting particles. The sensor is comprising an array of photo-sensitive detectors for detecting light emitted by said individual light-emitting particles and a filter array comprising a plurality of different band-stop filters. The filter array is configured to transmit wavelengths in a detectable wavelength region to the array of photo-sensitive detectors, and wherein each band-stop filter is associated with one or more particular photo-sensitive detectors, and the plurality of different band-stop filters are configured to reflect different wavelength intervals within said detectable wavelength region so that each photo-sensitive detector of the array is configured to detect the wavelengths of the detectable wavelength region other than the reflected wavelength interval of the band-stop filter being associated with the photo-sensitive detector.

Abstract: A spectrometer 1A includes a package 2 having a stem 4 and a cap 5, an optical unit 10A disposed on the stem 4, and a lead pin 3 for securing the optical unit 10A to the stem 4. The optical unit 10A includes a dispersive part 21 for dispersing and reflecting light entering from a light entrance part 6 of the cap 5, a light detection element 30 having a light detection part 31 for detecting the light dispersed and reflected by the dispersive part 21, a support 40 for supporting the light detection element 30 such that a space is formed between the dispersive part 21 and the light detection element 30, and a projection 11 protruding from the support 40, the lead pin 3 being secured to the projection 11. The optical unit 10A is movable with respect to the stem 4 in a contact part of the optical unit 10A and the stem 4.

Abstract: A photo-thermal speckle spectroscopy device having an infrared laser, a visible laser, a foam, and a camera. The infrared and visible lasers are focused on the foam, which causes the visible laser to scatter. A camera records the speckle pattern, which shifts when the IR laser is turned on. The related method of photo-thermal speckle spectroscopy is also disclosed.

Abstract: An identification apparatus includes: a plurality of light capturing units including light-capturing optical systems configured to capture a plurality of Raman scattered light fluxes from a sample, an optical fiber unit configured to include a plurality of optical fibers configured to respectively guide the captured Raman scattered light fluxes and in which the optical fibers are bundled at emission end portions thereof; a spectral element configured to disperse the guided Raman scattered light fluxes; an imaging unit configured to receive the dispersed Raman scattered light fluxes; and a data processor configured to acquire spectral data of the Raman scattered light fluxes from the imaging unit and configured to perform an identification process. The Raman scattered light fluxes dispersed by the spectral element are projected so that a spectral image formed on a light-receiving surface of the imaging unit extends along a main scanning direction of the imaging unit.

Abstract: A vehicle lamp includes a light emitting source, a support substrate configured to support the light emitting source, a heat sink configured to support the support substrate and dissipate heat from the light emitting source, and a light controller configured to control light from the light emitting source. The heat sink includes an opening configured to measure the radiant heat of the support substrate.

Abstract: The present invention is a motion detection system that will consistently report detected movement, while reducing the number of false reports. The motion detection system includes a receiver and a dual sensor motion detector. The dual sensor motion detector utilizes sensors mounted in a weatherproof chassis. The dual sensors are located at the same vertical height in the weatherproof chassis and separated by a predetermined distance from the center of the chassis. Each sensor is rotated at an angle away from the center of the chassis. Each sensor has a coverage area dictated by its viewing angle (or field-of-view) and viewing distance. By utilizing dual sensors, a user can set the dual sensor motion detector to an AND operation or an OR operation. Motion is detected when both sensors detect movement simultaneously or motion is detected when any one of the two sensors detects movement.

Abstract: A method for processing a raw image characterized by raw measurements Sp(i,j) that are associated with active bolometers Bpix_(i,j) of an imager, which bolometers are arranged in a matrix array, the imager being at an ambient temperature Tamb and furthermore comprising blind bolometers Bb_(k), the method, which is executed by a computer that is provided with a memory, comprising the following steps: a) a step of calculating the electrical resistances RTc(i,j) and RTc(k), at the temperature Tamb, of the active and blind bolometers, respectively, from their respective electrical resistances RTr(i,j) and RTr(k) at a reference temperature Tr, said resistances being stored in the memory; b) a step of determining the temperatures Tsc(i,j) actually measured by each of the active bolometers Bpix_(i,j) from the electrical resistances calculated in step a) and from the raw measurements Sp(i,j).

Abstract: Pyroelectric detection device, including at least: a substrate; a membrane arranged on the substrate; a pyroelectric detection element arranged on the membrane or forming at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes; a cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate; an element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane.

Abstract: This disclosure relates to a fluid conduit that incorporates sensors printed on an exterior wall of the fluid conduit. The sensors configured to sense an operating parameter of the fluid conduit. A protective layer is arranged to be deposited over at least selected portions of the printed electronic material.

Abstract: A method analyzes an operation of a power semiconductor device. The method includes: providing a set of reference voltages of the power semiconductor device and a set of corresponding reference currents; measuring an on-state voltage and a corresponding on-state current of the power semiconductor device to obtain a measurement point; adapting the set of reference voltages by adapting two of the set of reference voltages lying closest to the measurement point by extrapolating the measurement point; and using the adapted set of reference voltages to analyze the operation of the power semiconductor device. The extrapolation is based on a predefined reference increment current and a predefined reference increment voltage.

Abstract: Provided is a thermocouple transition body apparatus comprising: a transition body, having at least one recess; a positive electrical terminal; a negative electrical terminal; and, at least one cap; wherein the transition body, positive terminal, and negative terminal are configured to attach to conductors without the use of epoxy or crimping. The thermocouple transition body apparatus is able to withstand temperatures exceeding 500 degrees Fahrenheit.

Abstract: Implementations described herein generally relate to semiconductor manufacturing, and more specifically to a temperature measurement device. In one implementation, the temperature measurement device includes a substrate and a stack of metal layers coupled to the substrate. Each metal layer of the stack of metal layers extends continuously uninterrupted from edge to edge of the substrate. The first metal layer has a lower electrical resistivity than the second metal layers. The electrical resistivity of the stack is based on the electrical resistivity of the first metal layer, which is temperature dependent. Utilizing a known relationship between temperature measurements and resistivity measurements, the temperature measurement device can measure and store temperature information in various substrate processing processes.

Abstract: The invention relates to a load detection unit having a spring-elastic load carrier assembly for receiving the load (10) and a sensor (3) for the deformation of the load carrier assembly, which occurs under the load (10) that is to be detected, wherein a deformation transmission unit (6) is operatively arranged between the load carrier assembly and the sensor (3). A method, in which additionally a deformation transmission unit is used, is thus provided, which during operation picks up the deformation of the load carrier assembly and transmits it to the sensor as a changed force/path load.

Abstract: The wireless capacitive load cell features a two-component strain member has a spring body and force transduction plate, which deforms when a load is applied to the structure. During loading, the force transduction plate moves the cantilever spring body out of a position of rest, which results in an indenter, located within the force transduction plate, contacting a capacitive transducer. The capacitive transducer converts deformation of the strain member into an electrical signal which is correlated to a specific load value. The microelectromechanical system that accompanies the capacitive transducer processes and prepares the signal for wireless transmission. The microelectromechanical system has a capacitive transducer, signal conditioner, microcontroller unit, and telemetry system. Additional embodiments of the wireless load cell may include acceleration and temperature sensors embedded within the microelectromechanical system.

Abstract: A system is for detecting a location of a touch input on a surface of a propagating medium. The system includes a transmitter coupled to the propagating medium and configured to emit a signal. The signal has been allowed to propagate through the propagating medium and the location of the touch input on the surface of the propagating medium is detected at least in part by detecting an effect of the touch input on the signal that has been allowed to propagate through the propagating medium. The system includes a piezoresistive sensor coupled to the propagating medium. The piezoresistive sensor is configured to at least detect a force, pressure, or applied strain of the touch input on the propagating medium.

Abstract: The present invention achieves a force sensor in which an electrode, element, and/or the like connected to a strain gauge can be suitably attached to a strain element. The force sensor includes: a strain element including an arm portion that is deformable under an external force; and a strain gauge attached to the arm portion. The strain element includes a projection that sticks out from the arm portion in a direction intersecting the longitudinal direction of the arm portion.

Abstract: A sensor device is disclosed comprising at least one deformable substrate, at least one transducer element formed in or on a surface area of a first side of the deformable substrate, at least one other transducer element formed in or on a surface area of a second side of the deformable substrate, and electrical conductors formed on and/or in the substrate for electrically connecting between and to the transducer elements.

Abstract: A strain gauge includes a substrate formed of resin and having flexibility and a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate. The strain gauge includes a resistor formed as a film that contains Cr, CrN, and Cr2N and into which an element contained in the functional layer is diffused. The resistor is provided on one surface of the functional layer. A first substance having a function of controlling growth of crystal grains as a main component of the resistor, is added to the resistor.

Abstract: A force measurement system is disclosed herein. The force measurement system includes a plurality of force measurement assemblies, at least some of the plurality of force measurement assemblies configured to be independently displaceable from other ones of the plurality of force measurement assemblies such that one or more particular ones of the plurality of force measurement assemblies that are disposed underneath a subject varies over time. Each of the plurality of force measurement assemblies includes a top surface for receiving at least one portion of the body of the subject; and at least one force transducer, the at least one force transducer configured to sense one or more measured quantities and output one or more signals that are representative of forces and/or moments being applied to the top surface of the force measurement assembly by the subject.

Abstract: A torque sensor module for a steering device may include: a stator fixed to a designated position of a steering shaft and configured to detect a steering angle; a rotor rotatably fixed in the stator; a signal transmitter configured to transmit torsion information between the stator and the rotator to a Hall effect IC sensor (Hall IC); a printed circuit board having the signal transmitter and the Hall IC mounted thereon; and an ECU (Electronic Control Unit) of an EPS (Electronic Power Steering), mounted on the printed circuit board.

Abstract: A connection structure of a diaphragm pressure gauge contains: a holder, a coupling sleeve, a disc, a curved abutting bar, a fixing element, a case, a screw element, a circular film, and a defining element. The holder is connected to the coupling sleeve, multiple spaced ribs of the holder extend out of the coupling sleeve, and the holder includes the multiple spaced ribs. One of the multiple spaced ribs has at least one spaced protrusion, the disc includes at least one first locating orifice, the curved abutting bar includes a second locating orifice, and the at least one first locating orifice is fitted with the second locating orifice. The curved abutting bar abuts against the fixing element, and the defining element, the circular film and the screw element are connected below the fixing element to produce the diaphragm pressure gauge. The case is covered on the diaphragm pressure gauge.

Abstract: A sensor element includes: a supporting body; and a sensor body, the sensor body being planar in shape, being made of an elastic material, and having a first surface and a second surface coated so as to be electrically conductive. The sensor body includes a measuring segment and a fastening segment. A layer thickness of the fastening segment is greater than a layer thickness of the measuring segment.

Abstract: The present disclosure provides a pressure sensor, including a chamber and a film. The chamber includes a first wall with a first electrode and a second wall with a second electrode. The first wall faces the second wall, and the first electrode and the second electrode respectively include conductive or semiconductive material. The film lines a surface inside the chamber exclusive of the first electrode and the second electrode for blocking outgassing entering the chamber from the surface. A method of manufacturing the pressure sensor is also disclosed.

Abstract: A sensing device is provided in the present invention. The sensing device includes a first conductive element, a second conductive element, a processing unit, a cover and a base. The processing electrically connects to the first conductive element and the second conductive element. The cover has an opening. The base forms a space with the cover, and the first conductive element and the second conductive element are set on the base.