Abstract: An optical element includes a plurality of stacked liquid crystal cells. The plurality of stacked liquid crystal cells each includes a first substrate on which a first transparent electrode, a second transparent electrode, a first pad, a second pad, and a third pad are arranged, a second substrate on which a third transparent electrode and a fourth transparent electrode are arranged, and a liquid crystal layer between the first substrate and the second substrate. The first pad, the second pad, and the third pad of each of the plurality of stacked liquid crystal cells are electrically connected to a first inter-cell conductive member, a second inter-cell conductive member, and a third inter-cell conductive member, respectively, extending in a stacking direction.

Abstract: A display device including a display panel including a base layer, a circuit layer disposed on the base layer, and a pad part having a plurality of pads disposed on the base layer; and a driving chip disposed on the pad part and including a plurality of chip pads. The plurality of pads include a first pad having a smaller area than a corresponding chip pad among the plurality of chip pads and a second pad electrically connected to the circuit layer.

Abstract: An electro-optical device includes a substrate, a pixel electrode disposed at the substrate, and a pixel circuit portion disposed between the substrate and the pixel electrode. The pixel circuit portion includes a scanning line disposed along a first direction, a data line disposed along a second direction intersecting the first direction, a first constant potential line disposed along the scanning line, a second constant potential line disposed along the data line, and a transistor disposed corresponding to an intersection position of the scanning line and the data line and including a gate electrode electrically coupled to the scanning line, a source region electrically coupled to the data line, and a drain region electrically coupled to the pixel electrode. The pixel circuit portion also includes a coupling portion disposed corresponding to the intersection position and configured to electrically couple the first constant potential line and the second constant potential line.

Abstract: The present application provides a display panel and a manufacturing method thereof, and an electronic device. The display panel includes a light-transmitting region and a light-shielding region disposed at a periphery of the light-transmitting region. A thickness of a passivation layer of the display panel in the light-transmitting region is less than a thickness of the passivation layer in the light-shielding region, so as to reduce a thickness of an insulating layer between a pixel electrode and a common electrode. In this way, when a certain electric field is formed, a driving voltage which is required can be reduced, so as to reduce power consumption of the display panel, thereby alleviating an urgent need to reduce power consumption of display screen in prior art.

Abstract: A display device includes a substrate including a display region including three or more divided regions disposed in a first direction on a main surface, a scanning line extending in a first direction, a data line extending in a second direction, a plurality of pixels, and a scanning line connection wiring line extending in the second direction, which are disposed in each divided region, a plurality of data line drive circuits respectively connected to the data lines in each divided region, and a plurality of scanning line drive circuits corresponding to each divided region.

Abstract: Some embodiments of the present disclosure provide an array substrate and a display pane. Multiple pixel electrode branches in a corresponding one of the pixel regions are divided into a first pixel electrode branch and a second pixel electrode branch by a corresponding one of the metal common electrodes. The first pixel electrode branch and the second pixel electrode branch, which are located in the same pixel regions, are connected to different TFTs. In each pixel region, an end of the first pixel electrode branch close to a corresponding one of the scan lines is connected to a corresponding one of the TFTs, and an end of the second pixel electrode branch close to another corresponding one of the scan lines is connected to another corresponding one of the TFTs.

Abstract: An electrooptic apparatus includes a substrate, a first conductive member provided on one side of the substrate, a first pixel electrode electrically coupled to the first conductive member, a second conductive member provided on the one side of the substrate, and disposed further close to an edge of the substrate than the first pixel electrode, and a second pixel electrode electrically coupled to the second conductive member. The second pixel electrode includes a first portion not electrically coupled to the second conductive member, and a second portion electrically coupled to the second conductive member and disposed around and spaced apart from the first portion in plan view.

Abstract: An electro-optic apparatus includes a substrate; a first conductive member disposed on one side of the substrate; a pixel electrode; a second conductive member disposed outside of a display region; a dummy pixel electrode; and an insulating layer disposed between the pixel electrode and the dummy pixel electrode, and the substrate. The pixel electrode includes a first pixel electrode layer overlapping the first conductive member, and a second pixel electrode layer, overlapping an opening region of a pixel, thinner than the first pixel electrode layer. The dummy pixel electrode includes a first dummy pixel electrode layer overlapping the second conductive member, and a second dummy pixel electrode layer, overlapping the first dummy pixel electrode layer, thinner than the first dummy pixel electrode layer. The insulating layer and the first dummy pixel electrode layer in a portion not overlapping the second conductive member face each other with a gap therebetween.

Abstract: Disclosed are a display substrate, a display panel and a display device. The display substrate includes: a base substrate, multiple gate-line groups, multiple data lines, the multiple data line include: first type of data lines and second type of data lines alternately arranged along the first direction; multiple transistors, transistors in the same sub-transistor group are connected with the same gate line, transistors in adjacent sub-transistor groups are connected with different gate lines, and transistors of the same sub-transistor group are connected with different data lines; multiple pins, the multiple pins include: first type of pins and second type of pins alternately arranged along the first direction; two adjacent first type of data lines are connected with a same first type of pin, and adjacent second type of data lines are connected with a same second type of pin.

Abstract: A liquid crystal panel including an array substrate, in which a common electrode layer is disposed on a substrate and includes a common electrode and a reflective portion, the common electrode is disposed corresponding to a pixel region, the reflective portion is disposed corresponding to a non-pixel region, a signal component is disposed corresponding to the non-pixel region, at least a part of the signal component is disposed on the reflective portion, an insulating unit layer is disposed on the signal component and covers the common electrode layer and the substrate, a pixel electrode is disposed corresponding to the pixel region on the insulating unit layer, and the pixel electrode and the common electrode are configured to generate an electric field.

Abstract: The lighting device disclosed in the embodiment includes a substrate, a light emitting device disposed on a lower surface of the substrate, a reflective layer disposed to face a light emitting surface of the light emitting device, a first resin layer disposed between the substrate and the reflective layer, and a light-transmission control layer disposed on an upper surface of the substrate, wherein the light-transmission control layer may include a liquid crystal layer including a cholesteric liquid crystal, and light emitted through the light emitting surface of the light emitting device may be reflected by the reflective layer and be provided to the light-transmission control layer through the substrate.

Abstract: A light control sheet includes a first transparent electrode layer, a second transparent electrode layer, and a light control layer including a liquid crystal composition having positive dielectric anisotropy and including chiral nematic liquid crystals. A control unit of a light control device controls voltage applied between the transparent electrode layers to a first voltage to bring the light control sheet into a first state of reflecting infrared light and transmitting visible light, controls the voltage applied between the transparent electrode layers to a second voltage to bring the light control sheet into a second state of scattering infrared light and visible light, and controls the voltage applied between the transparent electrode layers to a third voltage to bring the light control sheet into a third state of transmitting infrared light and visible light.

Abstract: Methods and materials to fabricate electrochromic including electrochemical devices are disclosed. In particular, emphasis is placed on the composition, fabrication and incorporation of electrolytic sheets in these devices. Composition, fabrication and incorporation of redox materials and sealants suitable for these devices are also disclosed. Incorporation of EC devices in insulated glass system (IGU) windows is also disclosed.

Abstract: An optical modulator includes an optical waveguide, a first electrode, two second electrodes, and a third electrode that generates a potential difference from the first electrode and the second electrodes. Each second electrode receives a voltage with an identical phase to a voltage applied to the first electrode. In a cross-sectional view perpendicular to a direction in which the optical waveguide extends, the first electrode is on a first side of the optical waveguide in a thickness direction, one second electrode is spaced apart from the first electrode on a first side of the first electrode in a width direction of the optical waveguide, the other second electrode is spaced apart from the first electrode on a second side of the first electrode in the width direction of the optical waveguide, and the third electrode is on a second side of the optical waveguide in the thickness direction.

Abstract: A method includes propagating light in a first waveguide of a 1×2 optical switch. The first waveguide is adjacent to a second waveguide in a coupling region. The 1×2 optical switch comprising an input to receive the light and couple the light to the first waveguide. The 1×2 optical switch further comprising a first output to output light from the first waveguide and a second output to output the light from the second waveguide. The method further includes coupling the light to the first output and the second output based on absorption values of the second waveguide in the coupling region; adjusting absorption values of the second waveguide in the coupling region such that light is directed from the input to only the first output; and coupling light to only the first output based on the adjusted absorption values of the second waveguide in the coupling region.

Abstract: An optical pulse train generation device includes a storage unit and a characteristic setting unit. The storage unit stores a plurality of phase patterns in advance. The plurality of phase patterns are phase patterns for forming, from a first optical pulse, an optical pulse train including a plurality of second optical pulses having time differences therebetween and having different center wavelengths. Between the plurality of phase patterns, one or both of a first characteristic regarding the first optical pulse and a second characteristic regarding the optical pulse train are different. The characteristic setting unit sets the first characteristic and the second characteristic in response to the user's input. The storage unit stores the plurality of phase patterns in association with the first characteristic and the second characteristic. A spatial light modulator displays a phase pattern corresponding to the first characteristic and the second characteristic set by the characteristic setting unit.

Abstract: The present disclosure provides a new visible light swept source that enables ultrafast visible light OCT to operate at a faster rate to reduce the motion artifacts and increase the field of view without sacrificing image quality. The new visible light swept source further provides for improved roll-off performance and mitigation of influence of RIN and wash-out effect for wide-field imaging. With a much-improved increase in imaging speed, increased signal-to-noise ratio (SNR), and increased imaging depth, visible light swept-source OCT (vis-ss-OCT) has the capability to perform more accurate functional and structural imaging.

Abstract: A laser amplification device includes an amplification unit and a phase adjustment unit; the amplification unit includes a signal light source, an excitation light source, and a nonlinear optical crystal; the nonlinear optical crystal has a plurality of spatially different crystal portions; the signal light source, the excitation light source, and the nonlinear optical crystal are arranged such that signal light and excitation light are simultaneously incident on the plurality of crystal portions and that the elements of at least one of a set of the angles of incidence between the crystal axes of the plurality of crystal portions and the signal light and a set of the angles of incidence between the crystal axes of the plurality of crystal portions and the excitation light are different.

Abstract: The present embodiment relates to a camera device comprising: a base; a lens disposed on the base; a substrate unit being coupled to an image sensor, a coil coupled to the substrate; and a magnet disposed to correspond to the coil, wherein the lens and the image sensor move in a direction opposite to each other by the magnet.

Abstract: A blade open-close device includes an aperture blade having an opening on an optical axis of a lens and extending in an intersecting direction intersecting with a direction in which the optical axis of the lens extends, a blade on the aperture blade to be movable in the intersecting direction to open and close the opening, a drive that moves the blade to one of a closed position to close the opening or an open position to open the opening, a body to which the aperture blade, the blade, and the drive are attached, and a mount to which the body is attached in a detachable manner.

Abstract: A voice coil motor includes a magnet, a yoke accommodating the magnet and extending in a movement axis direction; and a coil member formed by winding a single coil several times in a direction perpendicular to the movement axis direction, wherein the yoke includes a guider inserted into and penetrating through the coil member in the movement axis direction, and guiding a straight line motion of the coil member in the movement axis direction, and among two sides of the coil member extending in the vertical direction, an upper side close to the magnet has a curved shape when observed in the movement axis direction.

Abstract: An imaging apparatus includes a fixed member including a fixed base; a movable member that is movable relative to the fixed member, the movable member including a lens holder configured to hold a lens body so as to face an imaging element; a first shape memory alloy wire; a second shape memory alloy wire; a first conductive path; a second conductive path; a common conductive path; and a driver configured to be electrically connected to the first conductive path, the second conductive path, and the common conductive path, and supply a current to the first shape memory alloy wire and the second shape memory alloy wire and drive the first shape memory alloy wire and the second shape memory alloy wire.

Abstract: An optical element driving mechanism is configured to receive light. The light is incident to a light-path adjustment element via an incident axis, and travels into the optical element driving mechanism along a first axis, and the incident axis is not parallel to the first axis. The optical element driving mechanism includes a movable portion, a fixed portion, and a driving assembly. The movable portion has a receiving space configured to connect an optical element. The fixed portion includes a base, the movable portion is movable relative to the fixed portion, and the base has a first surface facing the movable portion. The driving assembly is configured to drive the movable portion to move. The movable portion further includes an opening connected to the receiving space, and when viewed along the first axis, the sidewall of the optical element is located between the opening and the first surface.

Abstract: A shooting device that is convenient to fix a shooting terminal includes a first light emitting piece, a first circuit board, and a fixing piece. The first circuit board is electrically connected to the first light emitting piece. The first circuit board is configured to adjust color temperature, and/or color, and/or brightness of the first light emitting piece. The first light emitting piece is disposed on a peripheral side of the fixing piece. The fixing piece includes a top shell, a limiting frame, and a bottom shell. The limiting frame is connected between the top shell and the bottom shell. The shooting terminal is disposed in the limiting frame. A display surface of the shooting terminal abuts against an inner surface of the top shell to maintain fixation of the shooting terminal relative to the fixing piece.

Abstract: A detection device and a method for detecting a camera module of a product are provided. The first detection assembly includes a first platform, a turntable, and first detection members. The turntable rotatably is provided with first detection positions. The first detection members are connected to the first platform and surround the turntable. Each first detection position can support the second surface of the product to cause the camera module to face a corresponding first detection member. The turntable rotates the product to cause the camera module to face the next first detection member. The second detection assembly includes a second platform, a fixing table, and a second detection member. The fixing table is provided with a second detection position supporting the first surface of the product to cause the camera module to face the second detection member. The rotation assembly rotates the product detected by the first detection members.

Abstract: Digital cameras comprising a lens assembly comprising N lens elements L1-LN starting with L1 on an object side, wherein N is ?4, an image sensor having a sensor diagonal SD, and a pop-out mechanism that controls a largest air-gap d between two consecutive lens elements within lens elements L1 and LN to bring the camera to an operative pop-out state and a collapsed state, wherein the lens assembly has a total track length TTL in the operative pop-out state and a collapsed total track length cTTL in the collapsed state, wherein SD is in the range of 7-20 mm and wherein cTTL/SD<0.6.

Abstract: A camera module comprises: a lens holder; a first body in which the lens holder is disposed; a second body coupled to the first body; a substrate disposed between the first body and the second body; and an adhesive for coupling the first body to the second body, wherein the first body includes a first protruding part, the second body includes a second groove facing the first protruding part, and the second groove has an inclined surface which is disposed on the bottom surface thereof and of which the distance to the first protruding part in the direction of an optical axis gradually increases toward the outer side thereof.

Abstract: An accessory that is mountable at a camera body and is capable of communicating with the camera body, includes: a first transmission unit capable of transmitting information pertaining to a drive target member that is driven by a drive unit to the camera body according to at least one communication specification; and a second transmission unit that transmits to the camera body a first value specifying a communication specification according to which the information is transmitted to the camera body, wherein: the first transmission unit transmits the information pertaining to the drive target member to the camera body according to the communication specification specified by the first value.

Abstract: There is provided a lens barrel from which stable operation feeling of an operation ring is obtained regardless of part accuracy. A stop ring (6) is provided with a ring-shaped multipolar magnet (12) that is magnetized to have multiple poles at regular angular intervals in a circumferential direction. A stationary frame (7) is provided with a sheet metal part (13). The sheet metal part (13) includes a body portion (24A) and a protrusion portion (13B). The body portion (24A) is disposed on a flange (8) of the stationary frame (7), and the protrusion portion (13B) is disposed on the outer periphery of the stationary frame (7). The stop ring (6) is click-stopped at regular angular intervals by a magnetic attractive force acting between the multipolar magnet (12) and the protrusion portion (13B) of the sheet metal part (13).

Abstract: A shooting device includes a support bracket, a universal adjusting piece, a first light emitting piece, and a fixing piece. The universal adjusting piece is a shapeable coiled pipe, or, the universal adjusting piece includes a ball head and a fixing rotating sleeve, and the ball head is rotatably disposed in the fixing rotating sleeve. The fixing piece fixes a shooting terminal, the universal adjusting piece is disposed between the fixing piece and the support frame, and the first light emitting piece is disposed on a peripheral side of the fixing piece, so that the first light emitting piece synchronously moves with the shooting terminal, and the shooting terminal realizes pitch angle adjustment, left and right flip adjustment, and switch between a landscape mode and a portrait mode with respect to the support bracket, which enables the shooting terminal to quickly adjust the shooting angle in different dimensions.

Abstract: An optical engine module, configured to receive an illumination light beam, includes a light valve module, an optical prism, and a first connecting layer. The optical prism is disposed on a transmission path of the illumination light beam and configured to guide the illumination light beam to the light valve module and to guide an image light beam from the light valve module. The light valve module is disposed on the transmission path of the illumination light beam from the optical prism and configured to convert the illumination light beam into the image light beam. The first connecting layer is disposed between the light valve module and the optical prism. The image light beam from the light valve module sequentially passes through the first connecting layer and the optical prism to transmit in a direction. There is no air gap between the optical prism and the light valve module.

Abstract: A laser projection apparatus includes a reflecting unit, a reflecting diffuser, a first lens array having a length and a width, a condensing lens having first and second lens portions and first and second center axes, a laser set emitting a first color light, an imaging module, and a projection lens. The reflecting unit reflects the first color light to the first lens portion. The reflecting diffuser reflects the first color light to travel along a light-exit axis of the second lens portion. The first lens array is disposed on the light-exit axis. The length along the first center axis and the width along the second center axis are less than or equal to one half of a diameter of the condensing lens and the diameter, respectively. The imaging module is disposed on the light-exit axis. The imaging module and the projection lens receive the first color light sequentially.

Abstract: A projection device including an imaging module, a freeform-surface reflective mirror, and a projection lens assembly is provided. The imaging module is configured to provide imaging beams and includes a display panel and a light-source module. The imaging beams are transmitted toward the projection lens assembly by the freeform-surface reflective mirror. The projection lens assembly includes a first optical axis and a second optical axis. The first optical axis passes through the projection lens assembly. The imaging beams emitted by the projection device form an imaging-beam region, in which the first optical axis does not pass through a geometric center of the imaging-beam region, and the second optical axis passes through a geometric center region of the display panel. The geometric center region is a region having a distance less than or equal to 40% of a minimum width of the display panel from a geometric center of the display panel.

Abstract: A projection screen and a projection apparatus are provided. The projection screen includes a base, a rolling mechanism, a lifting mechanism, an optical curtain and a guide roller. The rolling mechanism is disposed on the base, and the rolling mechanism includes a reel. A first end of the lifting mechanism is fixedly connected to the base. A first end of the optical curtain is fixedly connected to the rolling mechanism, and a second end of the optical curtain is fixedly connected to a second end of the lifting mechanism, the optical curtain includes an optical film, a first end of the optical film is fixedly connected to the reel. The guide roller is disposed at a position where the second end of the lifting mechanism is proximate to the rolling mechanism, and the guide roller is configured to press the optical curtain.

Abstract: Provided is a mask blank comprising a phase shift film A mask blank comprises a phase shift film on a transparent substrate. The phase shift film is made of a material comprising a transition metal, silicon, and nitrogen. A ratio of the total content of nitrogen and oxygen to the content of the transition metal is 12 or more and 19 or less in an internal region, wherein the internal region excludes a neighboring region of the phase shift film at an interface with the transparent substrate and a surface layer region of the phase shift film which is located opposite the transparent substrate.

Abstract: An inspection apparatus includes: an inspection apparatus includes: a stage configured to receive a photomask; a radiation source configured to emit a first radiation beam for inspecting the photomask; and an aperture stop configured to receive a second radiation beam reflected from the photomask through an aperture of the aperture stop, wherein the aperture is tangent at a center of the aperture stop.

Abstract: An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a Z-axis direction. Each chuck actuator comprises an actuator output and a lever arrangement between the actuator output and a chuck drive member. The lever arrangement enables an increase in positioning accuracy and increased stiffness, compared to the direct control of position using the actuator output.

Abstract: A manufacturing method including applying a resin composition for forming an etching mask pattern onto a support to form a layer containing a block copolymer and having a film thickness of 25 nm or more, and phase-separating the layer. The resin composition contains a block copolymer having a first block and a second block, the first block is includes a constitutional unit having General Formula (b1), and the second block is a random copolymer of a constitutional unit of General Formula (b2m) and a constitutional unit of General Formula (b2g). In the formulas illustrated below, R1 is an alkyl group which may have an oxygen atom or a silicon atom; R2 is an alkyl group; R3 is an alkylene group; and x represents a molar ratio and is more than 0 and 0.

Abstract: A nozzle unit for a liquid treatment apparatus that performs a liquid treatment on a substrate using a liquid, includes a first gas nozzle having a discharge flow path for allowing a first gas to flow through the discharge flow path and a first discharge port for discharging the first gas flowing through the discharge flow path toward a surface of the substrate, wherein the first discharge port is formed so as to extend in a first direction along the surface, and wherein a width of the discharge flow path in the first direction increases as the discharge flow path approaches the first discharge port, so that the first gas is discharged radially from the first discharge port.

Abstract: A chemically amplified resist composition is provided which is excellent in LWR and resolution and can prevent a resist pattern from collapsing in far ultraviolet lithography and EUV lithography, an onium salt for use therein, and a pattern forming process using the resist composition. The chemically amplified resist composition includes an onium salt having the following formula (1).

Abstract: a photosensitive resin composition, a photosensitive resin layer, and a color filter manufactured using the same, the photosensitive resin composition includes a colorant; a photopolymerizable compound; a photopolymerization initiator; a binder resin; and a solvent; wherein the colorant includes a pigment, a dispersant, and a dispersion aid represented by Chemical Formula 1:

Abstract: The present invention is a resist material containing a repeating unit-a containing a sulfonium salt or iodonium salt of a monovalent aromatic carboxylic acid that is iodinated, is substituted or unsubstituted, and is bonded to a polymer main chain via an ester bond. This provides: a resist material having higher sensitivity and higher resolution than conventional positive resist materials, small edge roughness and size variation, and excellent pattern profile after exposure; a resist composition containing the resist material; a patterning process; and a monomer to be an ingredient for the resist material.

Abstract: The present invention is a resist material containing: a repeating unit-a containing at least one iodine atom between a polymer main chain and a carboxylate; and a repeating unit-b, being a sulfonium salt or iodonium salt of a sulfonic acid bonded to a polymer main chain. This provides: a resist material having higher sensitivity and higher resolution than conventional positive resist materials, small edge roughness and size variation, and excellent pattern profile after exposure; a resist composition containing the resist material; and a patterning process.

Abstract: There is provided a positive resist composition that exhibits higher sensitivity and resolution than those of conventional positive resist compositions, has reduced edge roughness (LWR), has satisfactory dimensional uniformity (CDU), and has a satisfactory pattern profile after exposure, and to provide a pattern forming process. The positive resist composition comprises a base polymer containing repeat units (a) having a sulfonium salt structure or an iodonium salt structure of trihydrocarbylsulfonylmethide acid free of a fluorine atom on a carbon atom bonded to a sulfonyl group.

Abstract: A thinner composition includes: (B) a solvent containing: (B1) a compound represented by the following general formula (b-1): wherein R1 is an alkyl group having 1 to 10 carbon atoms. A method for manufacturing a semiconductor device includes applying the thinner composition to a substrate, before applying a photoresist film material or a photoresist underlayer film material to the substrate.

Abstract: A cover device includes a guide module which is coupled to an upper end portion of the container, has an upward inclination at a predetermined angle, has an inclined protruding unit that protrudes, and is formed with a communication port through which the inside and the outside of the housing space communicate; a discharge module in which one side along a longitudinal direction penetrates the communication port and is disposed inside the container, the other side is exposed to the outside to form a discharge port, and an intermediate portion along the longitudinal direction has an expansion fixing unit which is expanded, at least a part of periphery is in contact with an inner surface of the communication port, and is inserted and fixed; and a fixing module which is fixedly coupled to the inclined protruding unit in a state in which the other part of the discharge module penetrates.

Abstract: Methods of forming structures including an adhesion layer and structures including the adhesion layer are disclosed. The adhesion layer may include nitrogen. The method can include forming a metal oxide resist overlying and in contact with the adhesion layer. Exemplary methods further include forming the photoresist underlayer.

Abstract: Development of resists are useful, for example, to form a patterning mask in the context of high-resolution patterning. Development can be accomplished using a halide-containing chemistry such as a hydrogen halide. A metal-containing resist film may be deposited on a semiconductor substrate using a dry or wet deposition technique. The resist film may be an EUV-sensitive organo-metal oxide or organo-metal-containing thin film resist. After exposure, the photopatterned metal-containing resist is developed using wet or dry development.

Abstract: The present disclosure relates to a method for selecting a photosensitive resin composition, the method including: a step of applying a photosensitive resin composition on a substrate and drying the photosensitive resin composition to form a resin film; a step of heat-treating the resin film in a nitrogen atmosphere to obtain a cured film; and a step of raising the temperature from 25° C. to 300° C. at a rate of 10° C./min in a nitrogen atmosphere and then measuring weight loss of the cured film, in which a photosensitive resin composition capable of producing the cured film having a weight loss ratio at 300° C. of 1.0% to 6.0% is selected.

Abstract: A plate for use in an imaging system to determine at least two optical properties of an illumination beam of the imaging system, the imaging system configured to illuminate an illumination region with the illumination beam, the plate including a plurality of markers, wherein a first subset of the plurality of markers includes a first type of markers for determining a first optical property of the illumination beam, and a second subset of the plurality of markers includes a second type of markers for determining a second optical property of the illumination beam, wherein the plurality of markers are located within a marker region of the plate and the marker region generally corresponds to the illumination region.