Cdhgte Containing {c30b 29/48} Patents (Class 117/957)
  • Patent number: 11761080
    Abstract: Aspects of the present disclosure generally relate to oscillating a boundary layer of a flow of process gas in methods and systems for processing substrates. In one aspect, one or more of a pressure, a gas flow rate, and/or a height of a substrate are oscillated during processing. In one implementation, a method of processing a substrate includes conducting a processing operation on the substrate in an interior volume of a processing chamber. The conducting the processing operation on the substrate includes moving a flow of one or more process gases over a surface of the substrate. The method also includes oscillating a boundary layer of the flow of one or more process gases while the flow of one or more process gases moves over the surface of the substrate.
    Type: Grant
    Filed: January 5, 2021
    Date of Patent: September 19, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Tsung-Han Yang, Christopher S. Olsen
  • Patent number: 8834628
    Abstract: A method is described for the manufacture of semiconductor nanoparticles. Improved yields are obtained by use of a reducing agent or oxygen reaction promoter.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: September 16, 2014
    Assignee: Life Technologies Corporation
    Inventors: Donald A. Zehnder, Joseph Treadway
  • Patent number: 7875957
    Abstract: Provided is a semiconductor substrate for epitaxial growth which does not require any etching treatment as a pretreatment in the stage of performing an epitaxial growth of HgCdTe film. A CdTe system compound semiconductor substrate for the epitaxial growth of the HgCdTe film is housed in an inactive gas atmosphere, in a predetermined period of time (for example, 10 hours) after mirror finish treatment thereof, to thereby regulate the proportion of Te oxide of the total amount of Te on the substrate surface which is obtained by XPS measurement so as to be not more than 30%.
    Type: Grant
    Filed: August 17, 2007
    Date of Patent: January 25, 2011
    Assignee: Nippon Mining & Metals Co., Ltd.
    Inventors: Kenji Suzuki, Ryuichi Hirano, Hideki Kurita
  • Patent number: 7767021
    Abstract: A growing method of a SiC single crystal includes the steps of thermal treatment of a high purity SiC source for decreasing a specific surface area and increasing a ratio of ?-phase and making a mole fraction of C greater than that of Si in the source, providing the SiC source into a crucible, arranging a SiC seed in the crucible, and growing the SiC single crystal by heating the SiC source.
    Type: Grant
    Filed: September 28, 2006
    Date of Patent: August 3, 2010
    Assignee: NeosemiTech Corporation
    Inventors: Soo-Hyung Seo, Joon-Suk Song, Myung-Hwan Oh
  • Patent number: 7537659
    Abstract: The invention relates to the field of CdTe or CdZnTe single crystal production and to an improved solid-phase method of obtaining large CdTe or CdZnTe crystals having an excellent crystalline structure.
    Type: Grant
    Filed: August 6, 2002
    Date of Patent: May 26, 2009
    Inventors: Robert Georges Lucien Triboulet, Said Assoumani Said Hassani
  • Patent number: 7465352
    Abstract: A method of homogeneously forming metal chalcogenide nanocrystals includes the steps combining a metal source, a chalcogenide source, and at least one solvent at a first temperature to form a liquid comprising assembly, and heating the assembly at a sufficient temperature to initiate nucleation to form a plurality of metal chalcogenide nanocrystals. The plurality of metal chalcogenide nanocrystals are then grown without injection of either the metal source or the chalcogenide source at a temperature at least equal to the sufficient temperature, wherein growth proceeds substantially without nucleation to form a plurality of monodisperse metal chalcogenide nanocrystals. An optional nucleation initiator can help control the final size of the monodisperse crystals. Such synthesis, without the need for precursor injection, is suitable for the industrial preparation of high-quality nanocrystals.
    Type: Grant
    Filed: July 25, 2005
    Date of Patent: December 16, 2008
    Assignee: University of Florida Research Foundation, Inc.
    Inventor: Yunwei Charles Cao
  • Patent number: 7316746
    Abstract: A method for a growing solid-state, spectrometer grade II-VI crystal using a high-pressure hydrothermal process including the following steps: positioning seed crystals in a growth zone of a reactor chamber; positioning crystal nutrient material in the nutrient zone of the chamber; filling the reactor with a solvent fluid; heating and pressuring the chamber until at least a portion of the nutrient material dissolves in the solvent and the solvent becomes supercritical in the nutrient zone; transporting supercritical from the nutrient zone to the growth zone, and growing the seed crystals as nutrients from the supercritical fluid deposit on the crystals.
    Type: Grant
    Filed: March 18, 2005
    Date of Patent: January 8, 2008
    Assignee: General Electric Company
    Inventors: Mark Philip D'Evelyn, Dong-Sil Park, John Thomas Leman
  • Patent number: 7147712
    Abstract: A method is described for the manufacture of semiconductor nanoparticles. Improved yields are obtained by use of a reducing agent or oxygen reaction promoter.
    Type: Grant
    Filed: October 1, 2002
    Date of Patent: December 12, 2006
    Assignee: Invitrogen Corporation
    Inventors: Donald A. Zehnder, Joseph A. Treadway
  • Patent number: 7144458
    Abstract: Nanocrystals are synthesized with a high degree of control over reaction conditions and hence product quality in a flow-through reactor in which the reaction conditions are maintained by on-line detection of characteristic properties of the product and by adjusting the reaction conditions accordingly. The coating of nanocrystals is achieved in an analogous manner.
    Type: Grant
    Filed: December 2, 2003
    Date of Patent: December 5, 2006
    Assignee: Invitrogen Corporation
    Inventors: Donald A. Zehnder, Marcel P. Bruchez, Joseph A. Treadway, Jonathan P. Earhart
  • Patent number: 7014702
    Abstract: A heat treatment chamber (30) is provided comprising a treatment region containing a charge (5) of compound material comprising a plurality of n atomic species, each atomic species being associated with at least one gas species. The chamber (30) is placed in a furnace (7). The chamber has a gas permeable barrier, constituted by a plug (4) and wadding (6), which partially encloses the treatment region. The barrier serves as an effusive hole to inhibit, but not prevent, gas vapour release, thereby to elevate the gas vapour pressure in the treatment region. Application of inert gas through a valve (8) is also used to increase background pressure in the treatment region during heat treatment. The elevated gas pressures present in the treatment region during treatment are measurable in an absorption cell (3) adjacent to the treatment region. It is thus possible to monitor the gas pressures during heat treatment and thereby stop the heat treatment once a desired charge stoichiometry is achieved.
    Type: Grant
    Filed: May 30, 2001
    Date of Patent: March 21, 2006
    Assignee: Pirelli Cavi e Sistemi S.p.A.
    Inventors: Andrea Zappettini, Lucio Zanotti, Mingzheng Zha, Francesco Bissoli
  • Patent number: 6849122
    Abstract: A CVD method deposits conformal metal layers on small features of a substrate surface. The method includes three principal operations: depositing a thin conformal layer of precursor over some or all of the substrate surface; oxidizing the precursor to convert it to a conformal layer of metal oxide; and reducing some or all of the metal oxide to convert it to a conformal layer of the metal itself. The conformal layer of precursor may form a “monolayer” on the substrate surface. Examples of metals for deposition include copper, cobalt, ruthenium, indium, and rhodium.
    Type: Grant
    Filed: March 7, 2002
    Date of Patent: February 1, 2005
    Assignee: Novellus Systems, Inc.
    Inventor: James A. Fair
  • Patent number: 6682596
    Abstract: Nanocrystals are synthesized with a high degree of control over reaction conditions and hence product quality in a flow-through reactor in which the reaction conditions are maintained by on-line detection of characteristic properties of the product and by adjusting the reaction conditions accordingly. The coating of nanocrystals is achieved in an analogous manner.
    Type: Grant
    Filed: December 26, 2001
    Date of Patent: January 27, 2004
    Assignee: Quantum Dot Corporation
    Inventors: Donald A. Zehnder, Marcel P. Bruchez, Joseph A. Treadway, Jonathan P. Earhart
  • Patent number: 6299680
    Abstract: An object of the present invention is to reduce the etch pit density (EPD) and the full-width-half-maximum (FWHM) value of the double crystal X-ray rocking curve, and to provide a CdTe crystal or a CdZnTe crystal which does not include deposits having Cd or Te and the process for producing the same. After a CdTe crystal or a CdZnTe crystal was grown, while the temperature of the crystal is from 700 to 1050° C., the Cd pressure is adjusted so as to keep the stoichiometry of the crystal at the above temperature. The crystal is left for time t which is determined so that each of a diameter L(r) of the crystal and a length L(z) thereof satisfies the following equation 1: {L(r),(L(z))}/2<{4exp(−1.15/kT)×t}½. Then, when the crystal is cooled, the temperature of the crystal is decreased within a range in which the temperature of the crystal and that of a Cd reservoir satisfy the following equation 2: −288+1.68×TCd<TCdTe<402+0.76×TCd.
    Type: Grant
    Filed: January 6, 2000
    Date of Patent: October 9, 2001
    Assignee: Japan Energy Corporation
    Inventors: Akio Koyama, Ryuichi Hirano
  • Patent number: 6179912
    Abstract: Provided is a system and continuous flow process for producing monodisperse semiconductor nanocrystals comprising reservoirs for the starting materials, a mixing path in which the starting materials are mixed, a first reactor in which the mixture of starting materials is mixed with a coordinating solvent and in which nucleation of particles occurs, a second reactor in which controlled growth of the nanocrystals occurs, and a growth termination path in which the growth of the nanocrystals is halted.
    Type: Grant
    Filed: December 20, 1999
    Date of Patent: January 30, 2001
    Assignee: BioCrystal Ltd.
    Inventors: Emilio Barbera-Guillem, Marlin O. Thurston
  • Patent number: 6066204
    Abstract: An apparatus and method is disclosed for providing vapor-phase epitaxial growth on a substrate using a Metal Organic Chemical Vapor Deposition (MOCVD) process. The process is performed in a reactive chamber pressurized to greater than one atmosphere. The reactant gases to be deposited on the substrate are also pressurized to the equivalent pressure, and then introduced into the reactor chamber. By performing the MOCVD process at a pressure greater than one atmosphere, a reduced amount of reactant gas is required to complete the deposition process.
    Type: Grant
    Filed: January 8, 1997
    Date of Patent: May 23, 2000
    Assignee: Bandwidth Semiconductor, LLC
    Inventor: Victor E. Haven
  • Patent number: 6043141
    Abstract: A method of growing a p-type doped Group II-VI semiconductor film includes the steps of forming a lattice comprising a Group II material and a Group VI material wherein a cation-rich condition is established at a surface of the lattice. The method further includes the steps of generating an elemental Group V flux by evaporating an elemental Group V material and providing the elemental Group V flux to a Group VI sublattice of the lattice.
    Type: Grant
    Filed: November 6, 1997
    Date of Patent: March 28, 2000
    Assignee: Hughes Electronics Corporation
    Inventors: Owen K. Wu, Rajesh D. Rajavel
  • Patent number: 6036770
    Abstract: Methods are described for the depositing of a plurality of films, preferably mercury cadmium telluride (HgCdTe), whose compositions vary in a controlled manner to provide unique infrared spectral absorption and detection properties. HgCdTe films 64 and 70 are deposited on opposite sides of electrically insulating, IR transmissive film 42. Initially these HgCdTe films may be of uniform composition laterally from 62 to 66 and 68 to 72. However the interdiffusion and segregation coefficients of Hg and Cd are different and vary differently with respect to temperature. By placing film 70 in contact with heater 9, a controlled lateral gradient in composition of the film may be effected because 44 is hotter than 45 and will produce higher Cd concentration at 68 than 72. Similarly 62 will be higher in Cd than 66, however, the gradient will be much less because 64 is cooler than 70. Through the use of a heater 60, the lateral compositional gradient of 64 may be varied with respect to film 70.
    Type: Grant
    Filed: April 2, 1997
    Date of Patent: March 14, 2000
    Assignee: Raytheon Company
    Inventors: Dipankar Chandra, Donald F. Weirauch, Thomas C. Penn
  • Patent number: 6001271
    Abstract: A composition of matter comprising a bulk material of uniform composition having first and second spaced apart surface regions and a dopant in the bulk material of progressively increasing concentration in a direction from the first to said second surface regions providing an interface intermediate the first and second surface regions wherein the portion of the bulk material on one side of the interface is electrically conductive and the portion of the bulk material on the other side of the interface is relatively electrically insulative. The bulk material is one of Ge, Si, group II-VI compounds and group III-V compounds and preferably GaAs or Gap. The dopant is a shallow donor for the bulk material involved and for GaAs and GaP is Se, Te or S. The ratio of the resistivity of the portion of the bulk material on one side of the interface to the portion of the bulk material on the other side of the interface is at least about 1:10.sup.7.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: December 14, 1999
    Assignee: Raytheon Company
    Inventor: Paul Klocek
  • Patent number: 5998235
    Abstract: A variable bandgap infrared absorbing material, Hg.sub.1-x Cd.sub.x Te, is manufactured by use of the process termed MOCVD-IMP (Metalorganic Chemical Vapor Deposition-Interdifffused Multilayer Process). A substantial reduction in the dislocation defect density can be achieved through this method by use of CdZnTe layers which have a zinc mole fraction selected to produce a lattice constant which is substantially similar to the lattice constant of HgTe. After the multilayer pairs of HgTe and Cd.sub.0.944 Zn.sub.0.056 Te are produced by epitaxial growth, the structure is annealed to interdiffuse the alternating layers to produce a homogeneous alloy of mercury cadmium zinc telluride. The mole fraction x in Hg.sub.1-x (Cd.sub.0.944 Zn.sub.0.056).sub.x Te can be varied to produce a structure responsive to multiple wavelength bands of infrared radiation, but without changing the lattice constant. The alloy composition is varied by changing the relative thicknesses of HgTe and Cd.sub.0.944 Zn.sub.0.056 Te.
    Type: Grant
    Filed: June 26, 1997
    Date of Patent: December 7, 1999
    Assignee: Lockheed Martin Corporation
    Inventor: Pradip Mitra
  • Patent number: 5693138
    Abstract: According to this invention, a magnetooptical element represented by (Cd.sub.1-X-Y Mn.sub.X Hg.sub.Y).sub.1 Te.sub.1 (0<X<1, 0<Y<1) comprises, so as to be used in a range around each of wavelength bands of 0.98 .mu.m, 1.017 .mu.m, 1.047 .mu.m, and 1.064 .mu.m, a single crystal having a composition contained in an area defined in a quasi ternary-element phase diagram of MnTe-HgTe-CdTe by four points a, b, c, and d of:Mn.sub.0.5 Hg.sub.0.5 Te,Mn.sub.0.6 Hg.sub.0.4 Te,Cd.sub.0.83 Mn.sub.0.13 Hg.sub.0.04 Te,andCd.sub.0.83 Mn.sub.0.05 Hg.sub.0.12 Te,the single crystal having a thickness not smaller than 300 .mu.m and containing substantially no twin crystal and no segregation in composition.
    Type: Grant
    Filed: August 17, 1995
    Date of Patent: December 2, 1997
    Assignee: Tokin Corporation
    Inventor: Koichi Onodera
  • Patent number: 5535699
    Abstract: A method for producing a photo-voltaic infrared detector including growing a crystalline CdHgTe layer on a CdTe substrate by liquid phase epitaxy using a growth melt including tellurium as a solvent to which indium is added as a dopant impurity in a concentration of from 0.01 to 0.1 ppm; annealing the CdHgTe layer to produce a p-type CdHgTe layer including indium as an n-type background dopant impurity; forming an n-type region of a desired depth as a light receiving region at the surface of the p-type CdHgTe layer by implanting a dopant impurity producing n-type conductivity and annealing; and forming an n-side electrode on the n-type region and a p-side electrode a prescribed distance from the n-type region on the p-type CdHgTe layer.
    Type: Grant
    Filed: April 7, 1995
    Date of Patent: July 16, 1996
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Zempei Kawazu, Akihiro Takami
  • Patent number: 5512511
    Abstract: A method for fabricating a two layer epitaxial structure by a liquid phase epitaxy (LPE) process, the structure being comprised of a Group II-VI semiconductor material. The method includes the steps of providing an LPE growth chamber that contains a molten Group II-VI semiconductor material 24, the molten Group II-VI semiconductor material having a first temperature (T.sub.1); growing, at the first temperature, a base layer (22) from the molten Group II-VI semiconductor material, the base layer being grown to have a first bandgap energy; employing a shutter mechanism (30) to isolate the base layer from the molten Group II-VI semiconductor material without removing the base layer from the growth chamber; reducing the first temperature of the molten Group II-VI semiconductor material to a second temperature (T.sub.
    Type: Grant
    Filed: May 24, 1994
    Date of Patent: April 30, 1996
    Assignee: Santa Barbara Research Center
    Inventor: Murray H. Kalisher
  • Patent number: 5477809
    Abstract: The invention provides an epitaxial growth method of CdTe on silicon by molecular beam epitaxy in which a Si(221) tilted by 6.degree. or less toward [-1 -1 4] is used, whose surface is rinsed in an ultra high vacuum for a subsequent epitaxial growth of CdTe on the rinsed surface of the Si(221)off substrate. The invention also provides an epitaxial growth method of CdTe on silicon by molecular beam epitaxy in which a silicon substrate is used, whose surface is rinsed for a Cd irradiation on the rinsed silicon surface and a subsequent epitaxial growth of CdTe thereon by molecular beam epitaxy. The Cd irradiation on the rinsed surface of the silicon may be carried out at a temperature in the range of from 670.degree. C. to 750.degree. C. Further, the Cd irradiation on the rinsed surface of the silicon is continued until an entire surface of the silicon is completely covered with CdTe in an epitaxial growth of CdTe by molecular beam epitaxy.
    Type: Grant
    Filed: June 23, 1994
    Date of Patent: December 26, 1995
    Assignee: NEC Corporation
    Inventor: Masaya Kawano
  • Patent number: 5456207
    Abstract: Triisopropylindium diisopropyltelluride adduct, ((CH.sub.3).sub.2 CH).sub.3 In:Te(CH(CH.sub.3).sub.2).sub.2 is synthesized and is used as a universal n-type dopant for both II/VI semiconductor materials as well as III/V semiconductor materials is disclosed. This dopant precursor is particularly suited for indium doping of II/V semiconductor materials at low carrier concentrations down to 10.sup.14 cm.sup.-3 and does not exhibit an appreciable memory effect.
    Type: Grant
    Filed: May 16, 1994
    Date of Patent: October 10, 1995
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Robert W. Gedridge, Jr., Ralph Korenstein, Stuart J. C. Irvine