Abstract: A spray monitoring device analyzes images obtained from a beam passing through a spray pattern applying a spray to a substrate, and identifies discontinuities in the image as indicative of a discontinuity in a spray pattern. The spray pattern is produced by a plurality of nozzles spaced apart across the substrate for applying a suitable coating thereto. The beam is produced by a laser, that preferably has a collimator for distributing the beam intensity. The beam is imaged by a camera that provides a constant image to a computers where the scattering of beam light by the spray pattern is processed by image processing software and optionally provided to a user interface for analysis. Discontinuities detected by the user or software indicate faulty spray nozzles and may trigger remedial action.

Abstract: An application device comprises a liquid tank for retaining a liquid, and a discharge unit to which the liquid is supplied from the liquid tank, and which discharges the liquid to an application-target area of an object at a set application width. The discharge unit comprises a head cylinder filled with the liquid supplied from the liquid tank, and the nozzle plate which is provided at one end of the head cylinder in a replaceable manner and which is provided with plural nozzle holes discharging the liquid. The application width can be changed by merely replacing the nozzle plate without changing of an application condition.

Abstract: A droplet applying device (2) includes: application heads (2d) configured to eject an application liquid as multiple droplets toward to-be-coated subjects (K1, K2); a moving mechanism (2c) configured to move each of the to-be-coated subjects (K1, K2) and the application heads (2d) relative to each other; and a rotating mechanism (2b) configured to rotate the to-be-coated subjects (K1, K2) in a plane intersecting with an ejecting direction in which the multiple droplets are ejected.

Abstract: The present invention relates to a continuous process for producing insulated pipes comprising a conveying pipe, a jacketing pipe, a layer made of at least one polyurethane between conveying pipe and jacketing pipe, and a foil tube between the at least one polyurethane and the jacketing pipe, comprising at least the steps of (A) in a gripper-belt system, providing a foil tube formed continuously from a foil, and providing a conveying pipe, where the arrangement has the conveying pipe within the foil tube in such a way that an annular gap is formed between conveying pipe and foil tube, (B) charging a polyurethane system comprising at least one isocyanate component (a) and at least one polyol mixture (b) to the annular gap, (C) foaming the polyurethane system and allowing the same to harden, and (D) applying a layer made of at least one thermoplastic to the foil tube via extrusion, in order to form the jacketing pipe, which comprises using a multiple nozzle system having curvature corresponding to the radius of

Abstract: The temperature of a developing solution is varied depending on the type of resist or the resist pattern. The developing solution is applied while scanning a developer nozzle having a slit-shaped ejection port that has a length matching the width of the effective area of the substrate. After leaving the substrate with the developing solution being coated thereon for a predetermined period of time, a diluent is supplied while scanning a diluent nozzle, thereby substantially stopping the development reaction and causing the dissolved resist components to diffuse. A desired amount of resist can be quickly dissolved through the control of the developing solution temperature, while the development can be stopped before the dissolved resist components exhibit adverse effect through the supply of the diluent a predetermined timing, whereby achieving a pattern having a uniform line width and improved throughput.

Abstract: A printing apparatus according to the present invention includes a printing section configured to print ink on a surface of a substrate. The printing section prints conductive ink containing a conductive material by offset printing and prints conductive ink containing a conductive material different from the conductive material on the conductive ink by offset printing. Preferably, the printing apparatus further includes a conveyor configured to convey the substrate. Further, the printing section preferably includes a first printing machine configured to print first conductive ink and a second printing machine configured to print second conductive ink.

Abstract: A developer nozzle supplies a developer onto the surface of a substrate rotating around a vertical axis, while a pure water nozzle supplies pure water onto the surface of the rotating substrate. The pure water nozzle is spaced apart from the developer nozzle and located on an outer side of the substrate with respect to the developer nozzle. The pure water restricts flow of the developer on the substrate and causes the developer to spread toward a clockwise side of the substrate when the substrate rotates in a clockwise direction. A liquid film containing the developer and the pure water is formed on the substrate. The developer nozzle and the pure water nozzle are spaced apart from each other to suppress splattering of the developer and the pure water due to collision of the developer with the pure water.

Abstract: A production method of the present invention is a method of producing a reaction instrument for electrophoresis (10), which is constituted by (i) a substrate (1) and (ii) an electrophoresis gel (3) which is immobilized on the substrate (1), including the steps of: (i) discharging a liquid to a surface of the substrate (1) on which surface the gel is to be immobilized, thereby forming a liquid pool (5); and thereafter (ii) discharging a gel solution to the liquid pool (5). This provides a method of producing a reaction instrument for electrophoresis, which method makes it possible to form a gel with high reliability in high yield.

Abstract: The instant invention relates to a method for changing characteristics of a plastic component, wherein a medium is introduced into the plastic component, which encompasses a porosity and wherein the medium forms a homogenous compound with the plastic component by at least partially dissolving the plastic component.

Abstract: A distribution manifold having a manifold and a removable cartridge with a plurality of needle tubes extending from the removable cartridge is disclosed. The distribution manifold can be used with a pre-metered coating system to apply coating material to a substrate.

Abstract: A liquid drop discharge device provides a head unit 420 which discharges filter element material relative to each of various colors of color filters. The head unit 420 is composed of an ink jet heads which are arranged on one end of a print substrate plate having a shape of rectangular card and head devices 433 which are arranged on the other end of the print substrate plate comprising connectors 441. The head devices 433 are aligned in two rows, as two groups, in a staggered arrangement so that a portion on which the connectors 441 are aligned in one of the two rows does not face to the same portion of the other in the two rows and protrudes outside of the print substrate plate. The head unit 420 discharges the filter element material onto predetermined portions in a superimposing manner while shifting along a direction which intersects to a direction along which the head devices 433 are arranged.

Abstract: A tire coating apparatus for applying fluid to vehicle tires in a vehicle washing system, includes a pair of mechanical applicators, which each have at least one coating applicator disposed thereon for contacting the vehicle tires to apply the fluid. One mechanical applicator is intended to engage the tires on a right side of a vehicle while the other mechanical applicator is intended to engage the tires on a left side of the vehicle. The mechanical applicators also include a guide portion for guiding the vehicle wheel when a patron had elected not to have a coating fluid applied to the vehicle wheels. The mechanical applicators are rotatable between an initial position where the coating applicators are in a non-coating position to a second position where the coating applicators are intended to contact a vehicle tire.

Abstract: Head for the automatic positioning of fiber blankets, which determines a path for the fiber blanket (2) to be positioned, as far as a positioning zone (5), passing via a resin-impregnation zone (4) and via a cutting zone (3), including, in front of and behind said zones (3 and 4) individual sets of rollers (6-7) that convey the fiber blanket (2) and control the tension thereof.

Abstract: A spin coating device includes a container and a rotating member. The container is used for holding a first solution and includes a sidewall which a plurality of substrates are arranged on. The rotating member is rotatable within the container and includes an inlet and at least one outlet. A second solution flows into the rotating member through the inlet, and flows into the container through the at lease one outlet. A mixture of the first solution and the second solution is spread onto the substrate by centrifugal force of the rotating member.

Abstract: A nozzle for dispensing a random pattern of liquid adhesive filaments. The nozzle may include first and second air shim plates, an adhesive shim plate and first and second separating shim plates. The first and second air shim plates each have respective pairs of air slots. Each air slot has a process air inlet and a process air outlet and the air slots of each pair converge toward one another such that the process air inlets are farther apart than the process air outlets in each pair. The adhesive shim plate includes a plurality of liquid slots each with a liquid outlet. Four process air outlets are associated with each of the liquid outlets. The process air slots are adapted to receive pressurized process air and the liquid slots are adapted to receive pressurized liquid adhesive. The pressurized process air discharges from each group of the four process air outlets and forms a zone of turbulence for moving the filament of liquid adhesive discharging from the associated liquid outlet in a random pattern.

Abstract: A coating device includes a coating mechanism which includes nozzles for ejecting a liquid material onto front and rear surfaces of the substrate while rotating a substrate in an upright state at a predetermined coating position, a carrying mechanism which carries the substrate between a substrate loading position, the coating position, and a substrate unloading position, and a dummy substrate holding mechanism which holds a dummy substrate at a holding position which is a position different from the substrate loading position, the coating position, and the substrate unloading position, and at which the carrying mechanism is allowed to connect with the dummy substrate.

Abstract: Tubular structures, for example pipes, are coated at least in an interior thereof with a nickel containing coating via at least one distribution manifold with ports which are received in the interior of the tubular structure. An electroless nickel coating solution may be pumped or supplied via gravity feed to the distribution manifold. The tubular structure may concurrently be immersed in electroless nickel coating solution in a tank. A second distribution manifold may deliver electroless nickel coating solution to the interior of the tubular structure in an opposite direction from the first. The two distribution manifolds may be used as part of a support structure to lift or move the tubular structure. Additional tanks may hold other solutions, for instance cleaning solutions, etching solutions and rinses.

Abstract: A system and method for spray gun or nozzle control wherein the spray gun liquid discharge pattern is dynamically varied to correspond to the dimensions of a moving target object or a portion of the moving target. The spray gun includes inputs for fan air, atomizing air, and liquid, as well as cylinder air. Upon detection of a target object approaching, such as on a conveyor belt, the fan air pressure, atomizing air pressure, liquid pressure, and cylinder air pressure are varied according to predefined or contemporaneously generated curves to provide a spray pattern that corresponds to the shape of the target object or portion of the target object, thus minimizing waste and inefficiency due to overspray.

Abstract: The invention relates to an application device for the simultaneous and uniform discharge of a foamable reaction mixture on to a surface, a device for the production of sandwich composite elements and a process for the continuous or discontinuous production of sandwich composite elements, especially foam composite elements with rigid and flexible outer layers.

Abstract: The present invention provides a coating apparatus for a glass substrate. The apparatus comprising a main body, and the main body includes a movable base, and the movable base is used to allow the glass substrate to be placed thereon, and the coating apparatus further comprises a first nozzle and a roller. The first nozzle and the roller are disposed at both sides of the main body, respectively, and the first nozzle moves from one side of the main body to the roller along a predetermined trace for pre-dispensing. The present invention further provides a coating method of the coating apparatus for the glass substrate.

Abstract: There are provided n number of line-type inkjet nozzles (2) which include nozzles (4) that eject a liquid material and are arranged in a row, and which are arranged in parallel with each other so that positions of the nozzles (4) are shifted from each other by 1/n of a nozzle pitch (P1). Thus, an inkjet head (1) as a whole has a state equivalent to a state in which the nozzles (4) are arranged at 1/n of a nozzle pitch of one line-type inkjet nozzle (2). The inkjet head (1) is capable of adjusting a timing of ejecting the liquid material for each line-type inkjet nozzle (2). Accordingly, adjustment of a dot pitch such as fine coating and rough coating can be performed with ease.

Abstract: The invention relates to a device for spraying a surface of a substrate, wherein the device comprises at least one first spray nozzle for the supply of a fluid to the surface of the substrate to be treated and the first spray nozzle is arranged at a first distance from the substrate, wherein at least one second spray nozzle is arranged at a second distance from the substrate and a ratio of the second distance to the first distance is in a range from 0.1 to 0.8. At most a first volume flow of the fluid can be passed through the at least one first spray nozzle and at most a second volume flow of the fluid can be passed through the at least one second spray nozzle, wherein the ratio of the second volume flow to the first volume flow is in a range from 0.005 to 0.5.

Abstract: A protective member (14) and a nozzle assembly (11) incorporating the protective member (14) are provided. The protective member (14) is for use with a nozzle (12) having a strand guide passageway (18) for receiving a strand (16) of material. Protective member (14) comprises a body (60) configured to be received in the strand guide passageway (18) of the nozzle (12). The body (60) of the protective member (14) has a passageway (63) for the strand (16) and is disposed between the strand guide passageway (18) and the moving strand (16). The body (60) of the protective member (14) is composed, at least in part, of a material having a wear resistance sufficient to resist wear caused by the strand (16) being guided thereby. Alternatively, a portion of the body (60) may be coated with a material having a wear resistance sufficient to resist wear caused by the strand (16).

Abstract: A liquid discharge method is a method for depositing liquid on a plurality of target discharge partitioned areas formed on a substrate as the liquid is selectively discharged from a plurality of discharge nozzles while the substrate and the discharge nozzles are moved relative to each other. The liquid discharge method includes setting an arrangement pattern according to shapes and positions of the target discharge partitioned areas so that a number of the discharge nozzles selected to be used among the discharge nozzles capable of depositing the liquid in the target discharge partitioned areas is the same in each discharge timing.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, an apparatus having a tube with an ingress opening to receive a liquid, and an egress opening to release the liquid, a conductor positioned in a conduit of the tube, the conductor and the conduit having dimensions to cause a surface tension of the liquid to prevent a constant flow of the liquid from the egress opening, and a power supply coupled to the conductor to apply a charge to the liquid to overcome the surface tension and form at the egress opening a single jet stream of the liquid applicable on a substrate to create a pattern. The single jet stream can be controllable in part by a viscosity of the liquid. Additional embodiments are disclosed.

Abstract: When using a liquid droplet ejection method, a conventional photomask is not required, however, it is required instead that a moving path of a nozzle or a substrate is controlled with accuracy at least in ejecting liquid droplets. According to the characteristics of compositions to be ejected or their pattern, such ejection conditions are desirably set as the moving rate of a nozzle or a substrate, ejection quantity, ejection distance and ejection rate of compositions, atmosphere of the space that the compositions are ejected, the temperature and moisture of the space, and heating temperature of the substrate.

Abstract: Devices for preserving components with a preservative agent, e.g., for cavity preservation of motor vehicle body components, are disclosed. An exemplary device, in addition to a preservative agent, may apply a hardener configured to react with the preservative agent, which causes the preservative agent to harden.

Abstract: A recording method includes applying and overcoating. A color ink is applied to a region on a medium. A clear ink is applied to the region. The applied color ink and the applied clear ink are overcoated.

Abstract: A coating apparatus for conducting coating by discharging liquid droplets onto a substrate, is provided with a discharging head having an external terminal to receive control signals and a plurality of nozzles to discharge liquid droplets in response to the control signals; a drive control board to output the control signals to the discharging head; a cable to transmit the control signals from the drive control board to the discharging head; a relay board having a first terminal to form a first joint section to joint with the external terminal of the discharging head and a second terminal to form a second joint section to joint with the cable; and an intercepting member to intercept contact between the first joint section and outside air and to intercept contact between the second joint section and outside air.

Abstract: An exemplary spray apparatus includes a first nozzle assembly and a second nozzle assembly, which are parallel to each other. The first nozzle assembly includes a plurality of feed inlets and a feed outlet in communication with the feed inlets. The first nozzle assembly configured for spraying a liquid coating material on a substrate. The feed inlets are aligned along a first imaginary straight line. The second nozzle assembly includes a plurality of air inlets and an air outlet in communication with the air inlets. The second nozzle assembly is configured for spraying air with uniform air toward the liquid coating material applied on the substrate. The air inlets are aligned along a second imaginary straight line parallel with the first imaginary straight line.

Abstract: A single-cell workstation for processing a tire-wheel assembly including a tire and a wheel is disclosed. The single cell workstation includes a soaping sub-station. The soaping sub-station includes a housing defined by a support surface and one or more walls extending from the support surface and a plurality of fluid dispensing portions extending from the support surface. An apparatus for lubricating one or more beads of a tire is also disclosed. The apparatus includes a head portion; a plurality of radially-adjustable clamping portions axially extending from the head portion; and a plurality of radially-adjustable lubrication applicators axially extending from the head portion.

Abstract: An apparatus and system for stirring liquid inside a flow cell. In one implementation, the apparatus includes a rotatable disc configured to receive liquid at a top side of the disc and distribute the liquid substantially evenly around a periphery of the flow cell. The disc has a triangular cross sectional area. The apparatus may further include a set of fins attached to a bottom side of the disc, wherein the set of fins is configured to draw the liquid from the periphery of the flow cell into the center of the flow cell.

Abstract: The present invention provides a liquid crystal sealant forming device and a display panel assembly apparatus using the same. The display panel assembly apparatus comprises the liquid crystal sealant forming device, an alignment assembly device, a transporting device and a curing device. The liquid crystal sealant forming device comprises a forming substrate; a plurality of liquid crystal dispensing openings formed on one side of the forming substrate for dispensing a liquid crystal on a substrate; and at least one sealant coating opening disposed around the liquid crystal dispensing openings for coating a sealant on the substrate. The present invention can form the liquid crystal and the sealant in the same apparatus.

Abstract: The present invention provides a method that can maintain the temperature of a wafer at a process temperature before a coating process is performed by supplying a photoresist. According to the present invention, a thinner which helps a diffusion of the photoresist is supplied onto the wafer before the photoresist is supplied. The thinner is supplied in a temperature-controlled state such that the wafer has the process temperature by the thinner.

Abstract: A pattern forming apparatus includes a first nozzle part 52 in which discharge nozzles 523 for discharging an application liquid are arranged in a row in a direction (Y-direction) perpendicular to a scan-moving direction relative to a substrate, and a second nozzle part 72 including a pair of discharge nozzles 723, the positions of which in the Y-direction can be changed by a ball screw mechanism 740. A plurality of pattern elements parallel to each other and having the same length are formed by the discharge of the application liquid from the first nozzle part 52 and, on the other hand, pattern elements having lengths different from these pattern elements are formed by the second nozzle part 72, the application of which is controlled at timings independent of the first nozzle part 52.

Abstract: An electrohydrodynamic spraying or spinning deposition system, which includes a common source of pressurized liquid within a manifold, and an array of 2 or more spraying tips, each tip being fed from the common source of pressurized liquid to create a liquid flow path. An individual flow impedance device is disposed within each tip's individual liquid flow path from the pressurized liquid source into each spraying tip. The individual flow impedance devices are disposed within a replaceable sheet, which can be easily cleaned or changed to accommodate the instance liquid viscosity and composition. A high voltage source is applied to create a high voltage potential applied between the tip array and a deposition surface.

Abstract: A droplet discharge apparatus is configured to move a droplet discharge head and a weight measurement unit relative to each other so that the droplet discharge head is placed in a position that faces the weight measurement unit by controlling a weight measurement unit movement part and a weight measurement unit secondary movement. The droplet discharge apparatus is also configured to control the droplet discharge head to perform a weight measurement discharge for measuring a weight of the liquid material discharged from the droplet discharge head during the feed/removal period, which includes a period for feeding and removing the substrate from the stage, and a period in which the stage is moved in relative fashion by the stage movement unit for performing feeding and removal operations.

Abstract: The present invention is to provide an apparatus for coloring an electrical wire to improve a visibility and design of the electrical wire. The apparatus includes a coloring device for ejecting a liquid coloring material to an outer surface of the electrical wire and a sliding device for moving relatively the coloring device in a direction perpendicular to a longitudinal direction of the electrical wire so as to color each whole outer surface of a plurality of coloring regions thereof responsive to a belt-shaped design pattern.

Abstract: A gumming device and method can reduce or avoid generation of air bubbles between layers thereby improving quality and manufacturing efficiency of TFT LCD. The gumming device comprises a nozzle, a gum feeding mechanism connected with the nozzle and a nozzle moving mechanism. Wherein at least two rows of gum injection holes are included in the nozzle, and the two adjacent rows of gum injection holes are separated by a spacer. The gumming method comprises that the nozzle is moved on the substrate by the nozzle moving mechanism, and each row of gum injection holes in the nozzle is successively opened in a direction opposite to the moving direction of nozzle for applying gum. The gumming device is used for applying multilayer gum.

Abstract: The present invention comprises an automated apparatus capable of spray depositing polyelectrolytes via the LbL mechanism with minimal or no human interaction. In certain embodiments, the apparatus sprays atomized polyelectrolytes onto a vertically oriented substrate. To counteract the effects of irregular spray patterns, the substrate is preferably slowly rotated about a central axis. In certain embodiments, the apparatus also includes a forced pathway for the droplets, such as a pathway created by using a vacuum. In this way, a thicker or three-dimensional substrate can be coated. In certain embodiments, the apparatus is designed so as to be scalable. Thus, through the use of multiple instantiations of the apparatus, a large or irregularly shaped substrate can be coated. Rolls of textile can therefore be coated using the apparatus. Additionally, the present invention includes a method to uniformly coat a substrate, such as a hydrophobic textile material, using aqueous solutions of polyelectrolytes.

Abstract: A coating die that includes a removable manifold section with each side of the manifold section defining a manifold, a land, and an outlet or lip. The two manifolds, lands and outlets may be the same or different, respectively. The manifold section is removably connected to at least one die body and can be removed from the die body to switch between the two sides of the manifold section. The coating die is designed and configured for web or substrate coating, either on-roll (supported web) coating or off-roll (tension web) coating.

Abstract: A dispensing apparatus includes a frame, a support coupled to the frame, a gantry coupled to the frame, a first dispensing unit coupled to the gantry, a second dispensing unit coupled to the gantry, and an imaging system coupled to one of the frame and the gantry. The imaging system may be configured to capture at least one image of a first pattern and a second pattern, with the second pattern being identical to the first pattern. The dispensing apparatus further includes a controller configured to verify whether the first pattern and the second pattern are properly positioned on the support with respect to one another based on the at least one captured image to permit simultaneous dispense operations of the first dispensing unit on the first pattern and the second dispensing unit on the second pattern. Other embodiments and methods of dispensing are further disclosed.

Abstract: A dispenser for a liquid crystal display panel includes a table on which a substrate is loaded, an aligning substrate provided at least along one side of the substrate, at least one syringe having a nozzle at an end portion for supplying a material onto the substrate or onto the aligning substrate; and an image camera provided at a side of the syringe for detecting an image of the material on the substrate or on the aligning substrate.

Abstract: A spray system and method of using such spray system to fabricate a polymer membrane structure for use as a vascular graft or tissue engineered scaffold is provided. Generally, this spray system includes the use of at least two spray apparatus to apply different polymer and solvent mixtures to the outer surface of a mandrel to form a blended layer. Upon curing of the blended layer, phase separation occurs leading to the formation of a polymer membrane structure having variable properties along at least a portion of its longitudinal axis.

Abstract: An exemplary adhesive dispenser includes a container configured for supplying an adhesive, a plurality of nozzles configured for dispensing the adhesive, and a temperature controller connected between the container and the nozzles. The temperature controller has a chamber defined therein, and the chamber is configured for accommodating the adhesive. The container and each nozzle communicate with the chamber respectively. The temperature controller is configured for maintaining the adhesive therein in a predetermined temperature.

Abstract: A substrate processing apparatus is provided. The substrate processing apparatus includes a substrate supporting member including a spin head on which a substrate is placed, a nozzle discharging processing liquid to the substrate placed on the spin head, and a processing liquid supplying source supplying the processing liquid to the nozzle. The nozzle includes a nozzle main body that has a plurality of discrete discharging openings and an integration discharging opening. The discrete discharging openings have a slit-shaped cross section having a first length and are arrayed in series in a predetermined direction. The integration discharging opening is formed by connecting the discrete discharging openings to each other in a single slot shape having a length greater than the first length, and finally discharges the processing liquid.

Abstract: An apparatus for applying a layer to a hydrophobic surface. The apparatus including: a chuck having a top surface and rotatable about a axis perpendicular to the top surface and passing through a center point of the top surface; and hollow first and second dispense nozzles having respective first and second bores, the first and second dispense nozzles mounted on a application head disposed above the top surface of the chuck, the application head moveable in a direction parallel to the top surface of the chuck, the first dispense nozzle alignable over the center point when the application head is in a first position and the second dispense nozzle alignable over the center point when the application head is in a second position, at least a portion of the bore of second dispense tube having a maximum cross-sectional dimension of between about 0.5 millimeters and about 2.0 millimeters.

Abstract: A production assembly and associated process for mass producing such as a thermoplastic pallet and which utilizes a multiple insert supporting and continuously moving carousels inter-faceable with an input line upon which is transported a plurality of rigid and planar shaped inserts, as well as an output line a spaced relationship from the input line for removing, from the carousel, the resin coated articles. The invention further teaches a series of subset variants for spray applying a two part resin and hardener upon the insert according to a selected thickness, following which the inserts are cured and dried prior to transferring to the output line and in order to create a finished product.

Abstract: The invention relates to systems and methods for forming coatings that can elute active agents and coating produced by the same. In an embodiment, the invention includes an apparatus for applying a coating to a medical device including a first spray nozzle, a first coating composition supply conduit, a second spray nozzle, and a second coating composition supply conduit. In an embodiment, the invention includes a method of applying a coating to a medical device including forming a first spray stream, forming a second spray stream, and directing the spray streams toward the medical device so that the first spray stream intersects the second spray stream before hitting the medical device. In an embodiment, the invention includes an apparatus for applying a coating to a medical device including a spray nozzle, a first coating composition supply conduit and a second coating composition supply conduit.

Abstract: In the present invention, a substrate is first rotated at a first rotation speed, and a resist solution is applied to the rotated substrate. Subsequently, the rotation of the substrate is decelerated to a second rotation speed lower than the first rotation speed so that the substrate is rotated at the low speed to smooth the resist solution on the substrate. The rotation of the substrate is then accelerated to a third rotation speed higher than the second rotation speed, and a solvent for the coating solution and/or a dry gas are/is supplied to the resist solution on the substrate. In this event, the solvent gas is supplied to a portion of the resist solution on the substrate thicker than a set thickness, and the dry gas is supplied to a portion of the coating solution on the substrate thinner than the set thickness. This thins the thicker portion of the resist solution and thickens the thinner portion to uniform the resist solution.