Moving Projector Patents (Class 118/323)
  • Patent number: 6749688
    Abstract: A coating apparatus has a spin chuck for attracting and holding a semiconductor wafer in a horizontal state by means of vacuum. A movable beam is arranged above the spin chuck. The movable beam includes first and second nozzles integrally formed. The first nozzle is used for supplying a photo-resist liquid while the second nozzle is used for supplying a solvent for the photo-resist liquid. When a coating process is performed, the movable beam above the wafer is horizontally moved in one direction. The solvent is first supplied onto the wafer from the second nozzle, and the coating or photo-resist liquid is then supplied from the first nozzle, following the solvent. Wettability of the wafer relative to the photo-resist is increased by the solvent, prior to supply of the photo-resist liquid.
    Type: Grant
    Filed: March 17, 1999
    Date of Patent: June 15, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Kiyohisa Tateyama, Kimio Motoda, Noriyuki Anai
  • Patent number: 6746535
    Abstract: An apparatus is provided for coating a continuously advancing article. The apparatus includes a housing defining a spray chamber having an inlet end and an outlet end. Walls in the spray chamber form an inlet buffer zone adjacent the inlet end, an outlet buffer zone adjacent the outlet end and a spraying zone between the inlet and outlet buffer zones. A conveyor transports articles to be coated through the spray chamber. A plurality of spray guns are mounted on the housing to substantially surround an article on the conveyor transported through the spraying zone. The spray guns are adapted for spraying an ultraviolet curable coating composition. The spray guns are mounted substantially entirely outside the spraying zone, with only nozzle portions of the spray guns located inside the spraying zone.
    Type: Grant
    Filed: October 1, 2002
    Date of Patent: June 8, 2004
    Assignee: Dubois Equipment Company, Inc.
    Inventors: Benjamin W. Hasenour, John R. Stenftenagel, James F. Arvin
  • Patent number: 6739526
    Abstract: A coating apparatus for coating a material to be coated with a solution is disclosed, preferably for coating pharmaceuticals. A spray bar having a spray gun receptacle, a solution inlet conduit and an atomizing air conduit is disclosed. The spray gun is positionable in the spray gun receptacle and has a body portion adapted to fit in the receptacle and an insertion portion having a sealable orifice at a spraying end thereof. The body portion has an internal void constructed and arranged to be in fluid communication with the solution inlet conduit and the atomizing air conduit when the spray gun is positioned in the spray gun receptacle and the insertion portion is in an open position. The insertion portion is moveable between an open position defining a passage between the body portion void and the spraying end orifice a closed position sealing the insertion portion against the body portion to close said passage.
    Type: Grant
    Filed: March 14, 2002
    Date of Patent: May 25, 2004
    Assignee: Thomas Engineering, Inc.
    Inventor: James T. Wlodarczyk
  • Patent number: 6736900
    Abstract: A highly-viscous-fluid applying apparatus including a fluid supply device operable to supply a highly viscous fluid, a delivery nozzle from which the highly viscous fluid is delivered, a pump disposed between the fluid supply device and the delivery nozzle and operable to feed the highly viscous fluid received from the fluid supply device, to the delivery nozzle, and a pump control device operable to control the pump, for controlling an amount of delivery of the highly viscous fluid to be delivered from the delivery nozzle.
    Type: Grant
    Filed: December 10, 2001
    Date of Patent: May 18, 2004
    Assignee: Fuji Machine Mfg. Co., Ltd.
    Inventors: Takeyoshi Isogai, Hiroshi Katsumi, Toshihiko Yamasaki
  • Publication number: 20040086631
    Abstract: An ink jet printing device for manufacturing an organic electroluminescent device. The ink jet printing device includes a chamber, an inkjet unit, and a pressure adjusting unit. The chamber has a space, and a basement is provided inside the space for supporting the organic electroluminescent device. The inkjet unit has a print head, which includes print holes. The print head is set in the chamber and is used to inject ink toward a substrate of the organic electroluminescent device. The pressure adjusting unit connects to the space so as to steady the pressure of the space within a specific value. Furthermore, an ink jet printing method for manufacturing an organic electroluminescent device is also disclosed.
    Type: Application
    Filed: October 22, 2003
    Publication date: May 6, 2004
    Inventors: Yu-Kai Han, Hsia-Tsai Hsiao, Pi-Chun Weng
  • Patent number: 6730612
    Abstract: A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.
    Type: Grant
    Filed: May 8, 2003
    Date of Patent: May 4, 2004
    Assignee: Micell Technologies, Inc.
    Inventors: Steven Lee Worm, Michael E. Cole
  • Publication number: 20040081759
    Abstract: In manufacturing a display panel of a PDP, a CRT, or the like, for example, a screen stripe is formed on a panel surface in a production cycle time equivalent to or faster than that of the screen printing system. By using a dispenser of a variable flow rate type for a display panel that has an effective display area in which a paste layer is formed and a non-effective display area in which no paste layer is formed outside this effective display area, paste discharge is promptly interrupted when a discharge nozzle runs through the non-effective display area of the display panel.
    Type: Application
    Filed: December 19, 2002
    Publication date: April 29, 2004
    Inventors: Teruo Maruyama, Nobutaka Hokazono, Takayuki Furukawa, Koji Matsuo, Takashi Kanehisa, Takafumi Okubo, Takahiro Yoshida
  • Patent number: 6726773
    Abstract: A method is disclosed for providing a steady transition state for an integral pneumatic dispensing system that is related to a robot. The method dispenses a single material using a pneumatic dispensing system having a single output including first and second shotmeters having first and second meters, first and second encoders and first and second pressure transducers. The method includes the step of loading the first shotmeter with the material. Once loaded, a pressure is applied to the material. The material is then dispensed out of the first shotmeter by forcing the material through the single output. Once the material in the first shotmeter is dispensed to a predetermined volume, the method begins to transition the flow of material from the first shotmeter to the second shotmeter. The transition includes the control of the volume being dispensed and the pressure applied to the material.
    Type: Grant
    Filed: September 25, 2002
    Date of Patent: April 27, 2004
    Assignee: Fanuc Robotics North America, Inc.
    Inventors: Akihiro Yanagita, Douglas L. Potts, Raymond J. Guzowski
  • Publication number: 20040062875
    Abstract: A coating apparatus for coating a rollable device including a device rotator having a pair of rollers and spray nozzle is described. The spray nozzle produces a spray of coating material that is directed towards a gap that is between the rollers of the pair. The majority of any spray not deposited on the rollable device during a coating process passes through the gap between the rollers.
    Type: Application
    Filed: September 27, 2002
    Publication date: April 1, 2004
    Applicant: SurModics, Inc.
    Inventors: Ralph A. Chappa, Mark F. Carlson
  • Publication number: 20040062874
    Abstract: A system and method for wet cleaning a semiconductor wafer utilizes a nozzle assembly to combine two or more input fluids to form a cleaning fluid at the point-of-use. The input fluids are received at the nozzle assembly and combined in a chamber of the nozzle assembly to form the cleaning fluid. The nozzle assembly may include an acoustic transducer to generate an acoustic energy, one or more valves, e.g., three-way valves, to control the receipt of input fluids and/or a flow control mechanism, e.g., a pressure spring valve, to control dispensing of the cleaning fluid onto a surface of the semiconductor wafer.
    Type: Application
    Filed: August 14, 2002
    Publication date: April 1, 2004
    Inventors: Yong Bae Kim, Kent Child, Yong Ho Lee, In Kwon Jeong, Jungyup Kim
  • Patent number: 6709699
    Abstract: Disclosed is a film-forming method, comprising dispensing from a dispenser nozzle a coating solution, which is prepared by adding a solid component to a solvent and controlled to be spread on the substrate in a predetermined range, onto a target substrate to be processed while relatively moving the dispenser nozzle and the target substrate so as to form a liquid film on the entire surface of the target substrate, and arranging a sucking nozzle above and apart from the target substrate such that the sucking nozzle is not in contact with the surface of the liquid film so as to permit the sucking nozzle to suck the solvent vapor right under the sucking nozzle while moving the sucking nozzle relative to the target substrate, thereby removing the solvent from the liquid film and, thus, forming a coated film.
    Type: Grant
    Filed: September 25, 2001
    Date of Patent: March 23, 2004
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tatsuhiko Ema, Shinichi Ito, Katsuya Okumura
  • Patent number: 6706641
    Abstract: A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.
    Type: Grant
    Filed: September 13, 2001
    Date of Patent: March 16, 2004
    Assignee: MiCell Technologies, Inc.
    Inventors: Steven Lee Worm, Michael E. Cole
  • Publication number: 20040047995
    Abstract: The automated system includes a fluid dispenser having an applicator tip which is used to apply a fluid to an object. A compliance mechanism is utilized to assist in maintaining the applicator tip of the fluid dispenser in contact with the object during the coating operation. A robot can be utilized to advance the object past the applicator tip during the coating operation. The fluid dispenser is mounted on a movable arm to allow the fluid dispenser to be moved or rotated into and away from the position where fluid is applied to the object. The automated system provides a fluid application system that can apply a precise and repeatable layer of fluid to an object. The use of the robot allows larger objects to be easily handled and for the coating process to be done in a rapid fashion. The automated system is flexible and can readily accommodate changes in the object that is to be coated or the configuration of the coating that is to be applied to the object.
    Type: Application
    Filed: September 8, 2003
    Publication date: March 11, 2004
    Inventor: Wallace F. Krueger
  • Patent number: 6702893
    Abstract: A process and station for changing product in an installation for spraying coating product, by bringing a first reservoir towards a suitable area of a cleaning/filling station, separating a sub-assembly composed of the first reservoir and a first spray associated therewith, with respect to the robot, connecting with the robot a second, similar sub-assembly composed of a second reservoir and a second spray, adapted to be used for spraying coating product during cleaning and/or filling of the first reservoir and the first spray, and proceeding with cleaning and/or filling of the first reservoir and the first spray in the area.
    Type: Grant
    Filed: April 8, 2002
    Date of Patent: March 9, 2004
    Assignee: Sames Technologies
    Inventors: Caryl Thome, Philippe Provenaz, Louis Sentis
  • Patent number: 6699324
    Abstract: The invention relates to a coating system in the form of a vehicle (3), which can travel in a pipe (1) or a duct. The coating system is pulled over an appropriately stabilised section of piping (4) in such a way that the inner wall (58) can be evenly coated by a rotating distributor (18) with an outlet opening (29). The various product and supply lines (20, 21, 22, 136) are securely accommodated inside the section of piping (4) by means of a highly resistant flexible tube (138) into which they are drawn. Said flexible tube is air-tightly sealed by covers (148, 149) or a terminal block (150) at the ends and is also configured to absorb tensile forces. The individual supply and product lines (20, 21, 22, 136) are thereby protected in the section of piping (4) without being subjected to excessive pulling or other forces. They are also prevented from interfering with each other.
    Type: Grant
    Filed: November 19, 2001
    Date of Patent: March 2, 2004
    Inventors: Klaus Berdin, Eckehard Deggerich, Klaus Mathmann
  • Patent number: 6695923
    Abstract: A multiple orifice applicator system for dispensing a plurality of rows of fluid material onto a work piece is disclosed. A source of fluid material is in fluid communication with the multiple orifice applicator. The multiple orifice applicator is mounted to a robotic arm, which positions the multiple orifice applicator relative to the work piece to enable the multiple orifice applicator to dispense fluid material onto the work piece. Fluid material is caused to flow from the source of fluid material into the multiple orifice applicator. The fluid material enters the multiple orifice applicator through an inlet port and is dispersed and spread out in a dispersing chamber. The fluid material is dispensed onto the work piece through a plurality of outlet orifices in the multiple orifice applicator.
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: February 24, 2004
    Assignee: Sealant Equipment & Engineering, Inc.
    Inventors: Carl L. Schultz, Denise Dudra, Thomas R. Tudor
  • Patent number: 6692573
    Abstract: The present invention provides a work station and method for applying a blocking material such as pitch or the like to a selected location on a workpiece or workpieces, wherein the work station includes an automated blocking material dispenser, an X-Y stage for positioning the workpiece(s) and a microprocessor, and wherein the method includes the synchronized operation of the X-Y stage and the dispenser under control of the microprocessor to deposit a selected amount and shape of the blocking material in a selected location or locations on a workpiece or workpieces with a high degree of repeatability in a short cycle time.
    Type: Grant
    Filed: June 1, 2000
    Date of Patent: February 17, 2004
    Assignee: Agilent Technologies, Inc.
    Inventor: Richard Des Jardin
  • Patent number: 6689214
    Abstract: An apparatus for applying fluid to a substrate which is movable relative to the apparatus. A slotted nozzle assembly of the apparatus communicates with a fluid supply and includes an elongated slot with an outlet aperture. The length of the slot may be varied using a stopper which can move in the slot and seal it off laterally. In another aspect, the entire slot can be shifted and fixed in the direction of the longitudinal axis of the slot using a guiding and adjusting device.
    Type: Grant
    Filed: November 9, 2001
    Date of Patent: February 10, 2004
    Assignee: Nordson Corporation
    Inventors: Thomas Burmester, Jorg Steffens
  • Publication number: 20040020426
    Abstract: A method and apparatus for dispensing a finish product with the concurrent in-line addition of an additive to the finish product onto vehicles in a vehicle wash station includes providing a base product, adding the additive to the base product to create a resultant solution, and applying the resultant solution to the vehicle.
    Type: Application
    Filed: May 1, 2003
    Publication date: February 5, 2004
    Inventors: Paul J. Mattia, Terry J. Klos, Michael E. Besse, Jerry D. Hoyt
  • Patent number: 6682777
    Abstract: In processing a substrate, adsorption members provided on a table play an important role in whether “indirectly influenced marks” are left on the rear surface of the substrate. Groups of adsorption members are selected in a predetermined order for use in the adsorption operation. Adsorption at a first group of members is terminated before an “indirectly influenced mark” is left on the substrate, and another adsorption operation is initiated at a second group of members. In this manner, the substrate is held on the table by migrating adsorption sites on the rear surface of the substrate.
    Type: Grant
    Filed: August 29, 2001
    Date of Patent: January 27, 2004
    Assignee: Tokyo Electron Limited
    Inventor: Tsutae Omori
  • Publication number: 20040011282
    Abstract: A physical barrier having a carrier device and a sealer material applied to the carrier device. The sealer material is configured to expand when it is activated. In its pre-activation state, the sealer material is flowable. The sealer material is applied directly to the carrier in its pre-activation state through a dispensing orifice without being previously molded.
    Type: Application
    Filed: July 18, 2002
    Publication date: January 22, 2004
    Inventors: Robert D. Myers, Gerald E. Fitzgerald, Cheong Kow, Randy Stratman
  • Patent number: 6676754
    Abstract: Methods of applying a polymer coating to a substrate are disclosed. By disrupting a bank of polymer precursor, a smooth coating of fast setting polymer can be applied to a substrate. Apparatus for applying a polymer coating is also disclosed. In one embodiment, an oscillating dispenser is used to apply polymer precursor onto to a dispersive surface. The polymer precursor flows down the surface and is transferred to a moving web. Flowing solvent downwardly through the dispenser can provide efficient cleaning without the need for disassembly or production delays.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: January 13, 2004
    Assignee: 3M Innovative Properties Company
    Inventors: Robert J. Fleming, Michael E. Mehsikomer, David J. Schreifels, Steven H. Gotz
  • Publication number: 20040003772
    Abstract: A device and a process for delivering fluid to moving webs, especially for delivering an adhesive to one or more strips. An applicator head can be moved in an essentially horizontal plane by an adjusting mechanism from an operating position, in which the discharge orifice of the nozzle is located in the region of the path of movement of the web, to a maintenance position, in which the applicator head is horizontally distanced from the path of movement of the web. The process is characterized by the fact that the mass flow or volume flow of the gas stream fed to and discharged from an application device is controlled as a function of the relative speed.
    Type: Application
    Filed: April 15, 2003
    Publication date: January 8, 2004
    Applicant: Nordson Corporation
    Inventors: Hubert Kufner, Thomas Burmester, Axel Krzenzck
  • Patent number: 6666164
    Abstract: When replacing a paint cartridge (25) on the coating apparatus (11), a replenished paint cartridge of a next paint color is picked up from one of paint replenisher units (55a to 55n) by one gripper member (101) of a cartridge gripper (100). In the next place, while the replenished paint cartridge (25) is being continuously gripped on one gripper member (101), a consumed or empty paint cartridge (25) is gripped and removed from the housing (12) by the other gripper member (102). Then, the replenished paint cartridge on one gripper member (101) is loaded on the housing (12), and the empty paint cartridge (25) is returned to a corresponding one of the paint replenisher units (55a to 55n). Thus, the paint cartridges (25) can be replaced in a significantly simplified manner.
    Type: Grant
    Filed: March 1, 2002
    Date of Patent: December 23, 2003
    Assignee: ABB K.K.
    Inventors: Osamu Yoshida, Hidetsugu Matsuda, Toshio Hosoda
  • Patent number: 6660087
    Abstract: An adhesive applying apparatus is used in joining together a hull and a deck with an adhesive. The apparatus includes an adhesive applying gun for ejecting an adhesive, and a guide means attached to the gun. The guide means guides the gun in such a manner that the gun moves along an upper edge portion of the hull.
    Type: Grant
    Filed: November 26, 2002
    Date of Patent: December 9, 2003
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Masatoshi Murakami, Toshihiro Tsuchiya, Kouji Shinma
  • Patent number: 6660091
    Abstract: A liquid output portion is arranged above and moves relative to a semiconductor substrate with determined film formation and non-film-formation regions. The liquid output portion continuously outputs a liquid in a constant amount to the substrate. Below the liquid output portion is a liquid shut-out-portion. A liquid controlled to spread in a constant amount is continuously output from the liquid output nozzle to the substrate. While the nozzle and the substrate relatively move, the liquid is supplied to a first region, and the liquid is supplied to a second region in such a way that the liquid supplied and spread in the second region is in contact with the liquid supplied and spread in the first region. Where projections and depressions are formed on the surface of the substrate, an amount of the liquid supplied varies depending upon the ratio between the projections and depressions.
    Type: Grant
    Filed: March 7, 2002
    Date of Patent: December 9, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shinichi Ito, Katsuya Okumura
  • Publication number: 20030224105
    Abstract: In a method and apparatus for forming a plurality of films on the surface of a substrate, at least two liquid samples are deposited by a deposition device onto the substrate surface. The substrate is moved so that the liquid samples on the substrate are subjected to a non-contact spreading force sufficient to cause the samples to spread over the surface to form a respective film thereon. At least a portion of each film is discrete from one or more other films formed on each substrate surface. In another embodiment, liquid samples of different compositions are deposited on an array of substrates. The liquid samples on at least two of the substrates are subjected to non-contact spreading forces during overlapping durations of time whereby the spreading forces are sufficient to cause the samples to spread over respective surfaces of the substrates to form films thereon.
    Type: Application
    Filed: May 30, 2002
    Publication date: December 4, 2003
    Applicant: Symyx Technologies, Inc.
    Inventors: Konstantinos Chondroudis, C. Eric Ramberg, Martin Devenney, Keith Cendak, Sum Nguyen, Qun Fan, Xuejun Wang
  • Patent number: 6652652
    Abstract: A device (1) for patterning plane substrates (5) without a template includes at least one stationary printing station (2) which applies a substance to the substrate and the substrate (5) passes the station along a conveying path. Each printing station (2) is equipped with a dye-spraying head (21) mounted on a carrying device (22). The spraying head carrying device (22) is part of a movable unit (3) which can be displaced to a side in a direction transverse to the conveying direction (B) of the substrate (5) out of a first operating position (I), adopted in the patterning region of the substrate (5), into a second set-up and service position (II), which partially releases the substrate (5).
    Type: Grant
    Filed: September 18, 2001
    Date of Patent: November 25, 2003
    Inventor: Anton Naschberger
  • Patent number: 6649220
    Abstract: A compliance mechanism (10) is disclosed for maintaining a fluid applicator (47) in contact with the surface of object (71) for fluid application. The compliance mechanism includes an L-shaped bracket (15) having a first leg (17) and a second leg (19), each leg having a tab. A first dual acting fluid operated cylinder (32) is slidably positioned on the first leg (17) of the L-shaped bracket (15). First cylinder (32) has a piston rod that advances during fluid actuation of the first cylinder. A second dual acting fluid operated cylinder (35) is slidably positioned on the second leg (19) of the L-shaped bracket (15). The second cylinder (35) has piston rod that advances during fluid actuation of the second cylinder (35). A fluid applicator (47) is on first cylinder (32) for applying fluid to object (71). The first cylinder (32) allows fluid applicator (47) to move relative to the object in a second direction whereby fluid applicator (47) is maintained in contact with object (71) during fluid application.
    Type: Grant
    Filed: May 14, 2001
    Date of Patent: November 18, 2003
    Inventors: Wallace F. Krueger, David L. Dehn
  • Patent number: 6641667
    Abstract: A robot arm with a coating gun mounted on a distal end thereof houses therein a first color changing valve mechanism for supplying a base compound, an electropneumatic transducer, and a second color changing valve mechanism for supplying a hardener, which are successively arranged in the order named toward the coating gun. The base compound and the hardener supplied from these mechanisms controlled by the electropneumatic transducer can be mixed highly accurately at a desired mixing ratio, and applied to coat a workpiece with a high-quality coating layer.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: November 4, 2003
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hiroshi Ochiai, Hiroyoshi Nozaki, Hidenori Taguchi, Shinobu Tokin
  • Patent number: 6634571
    Abstract: A torch for thermal spraying stored rotatably in the front portion of a nozzle and having a discharge member with a droplet passage at the center, wherein a projection is formed at the tip of the discharge member, an air jet space allowing rotating air to be blown therein is formed at the rear of the discharge member projectedly from the discharge member by integrally forming with each other a plurality of arms disposed in an air jet cylinder, and a rotating force is given to the discharge member by the air blown from an air jet port disposed on the outside of the air jet space, so as to bring the rotational speed of the discharge member into the range of 800 to 6000 rpm, whereby thermal spraying can be performed on the internal surfaces of pipes and cylinders, and the thickness of a thermal spraying film can be optimized.
    Type: Grant
    Filed: July 1, 2002
    Date of Patent: October 21, 2003
    Assignee: Shimazu Kogyo Yugenkaisha
    Inventor: Tadahiro Shimazu
  • Patent number: 6632476
    Abstract: After a thin liquid agent film is formed by supplying a liquid agent onto a plate-like developer holder, this liquid agent film and the surface of a substrate are opposed. The liquid agent film and the substrate are brought into contact with each other at a point by declining the substrate and moving it close to the liquid agent film, or by curving the substrate toward the liquid agent film. Then, the substrate is made parallel to the liquid agent film, and the liquid agent is supplied such that the contact area of the liquid agent film spreads over the entire surface by the interfacial tension between the liquid agent film and the substrate. Since a thin liquid agent film can be uniformly formed below the substrate, processing can be performed with a small consumption amount. Additionally, the liquid agent can be supplied to the substrate without holding air.
    Type: Grant
    Filed: March 14, 2001
    Date of Patent: October 14, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroko Nakamura, Hisashi Kaneko, Tetsuo Matsuda
  • Publication number: 20030183167
    Abstract: A slit nozzle includes a solution feeding mechanism having an elastic element and a plurality of piezoelectric devices and embedded in a side surface of a flow passage near a slit in the slit nozzle. Control is effected so that the piezoelectric devices are vibrated to cause the elastic element to produce traveling waves toward the slit. A resist solution serving as a processing solution is pumped by the traveling waves, thereby to be discharged through the slit toward a substrate. This provides a substrate processing apparatus capable of smoothly discharging the processing solution to accomplish high discharge accuracy.
    Type: Application
    Filed: March 18, 2003
    Publication date: October 2, 2003
    Applicant: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Hiroyuki Kitazawa, Tsutomu Ueyama
  • Patent number: 6616763
    Abstract: A dispenser device for dryable fluids is positioned at a product packaging machine dispenser station, with a first conveyor for feeding pieces of packaging material through the dispenser station, and a second conveyor for feeding the products to be packaged; the dispenser device being between the first and the second conveyors and designed to dispense a dryable fluid, consisting of an adhesive substance, onto the pieces at the dispenser station; the device having a dispenser part, with a plurality of nozzles for dispensing the adhesive substance and being located in a cylindrical shell of a hollow body; the shell having an opening which is opposite the pieces in the dispenser station, and the dispenser part being mobile relative to the hollow body between an operating position, in which the nozzles are at the opening, and a non-operating position in which the nozzles are at least at a cleaning and/or washing station inside a sealed chamber formed by the dispenser part and the shell.
    Type: Grant
    Filed: October 5, 2001
    Date of Patent: September 9, 2003
    Assignee: G. D. S.p.A.
    Inventor: Mario Spatafora
  • Patent number: 6616761
    Abstract: The present invention provides a finely-divided powder spray apparatus having a spray nozzle pipe for discharging spacers for liquid crystal displays from the tip together with a gas flow, which is disposed at a prescribed distance from a member to be sprayed, and comprising: a touch panel which enters control factors for controlling the moving-speed of the tip of the spray nozzle pipe at individual spray points the surface of the glass substrate; and an actuator driver which controls the moving speed of the tip of the spray nozzle pipe in accordance with the control factor entered by the touch panel.
    Type: Grant
    Filed: June 20, 2001
    Date of Patent: September 9, 2003
    Assignees: Nisshin Seifun Group Inc., Nisshin Engineering Co., Ltd.
    Inventors: Shin Doi, Masaki Ban, Goro Watanabe
  • Publication number: 20030157243
    Abstract: An apparatus including: a movement device that moves an object to be coated; a slot die coater equipped with a position sensor mounted on at least one end of the slot die coater and which slot die coater controllably dispenses coating material onto the moving object; and at least one servor motor-controller system in electrical contact with the position sensor, wherein the position sensor senses the position of the slot die coater relative to the object and wherein the at least one servor motor-controller system adjusts the position of the slot die coater relative to the object if the position of the slot die coater relative to the moving substrate deviates from a set of predetermined coordinates.
    Type: Application
    Filed: February 19, 2003
    Publication date: August 21, 2003
    Applicant: Xerox Corporation
    Inventors: Thomas A. Trabold, Robert F. Dunham, John M. Hammond
  • Patent number: 6605315
    Abstract: The object of the present invention is to provide a bonding paste applicator and a method of applying a bonding paste which allow satisfactory paste applying quality and excellent operability to be realized. A bonding paste application method for applying a bonding paste by making a drawing with a paste applying nozzle made to move to a position, where a chip is mounted on a substrate, comprises the steps of storing in advance in a storing unit 46 a drawing pattern for controlling each of X, Y and Z axes to move a paste applying nozzle and a drawing pattern setting table 53 to show a category corresponding to the size of a chip to be bonded, selecting a drawing pattern corresponding to the size of the chip, which has been designated, by means of a drawing pattern selecting unit 54 and obtaining a speed pattern for each of the X, Y and Z axes based on the selected drawing pattern by means of a speed pattern computing unit 55.
    Type: Grant
    Filed: November 3, 2000
    Date of Patent: August 12, 2003
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Mitsuru Ozono, Seiichi Sato, Nobuyuki Suefuji, Nobuyuki Iwashita
  • Patent number: 6605153
    Abstract: An apparatus includes a holding portion for holding a substrate, a nozzle, provided to face the substrate held by the holding portion, for discharging a solution to the substrate, a driver for moving the nozzle along a surface of the substrate relatively with respect to the substrate while the solution is being discharged to the surface of the substrate from the nozzle, a mask unit covering a portion other than a film formation area of the substrate and including a mask member for catching the solution from the nozzle, and a cleaner provided in the mask unit. The coating solution can be supplied to the surface of the substrate in a way similar to a picture drawn with a single stroke of a brush. A cleaning unit for cleaning the mask member does not need to be provided separately, leading to the facilitation of cleaning and a reduction in space.
    Type: Grant
    Filed: December 14, 2000
    Date of Patent: August 12, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita, Hirofumi Ookuma, Masami Akimoto
  • Patent number: 6602382
    Abstract: A developing processing apparatus for supplying a developing solution to a wafer on which a photoresist film has been formed to thereby perform developing processing includes a wafer holding portion for horizontally holding the wafer, a linear nozzle held above the wafer holding portion for supplying the developing solution onto the wafer while moving in a predetermined horizontal direction, and a resistance bar for imparting discharge resistance to the developing solution discharged from the linear nozzle. This allows all discharge ports to discharge the developing solution uniformly, especially even when discharge pressure for the developing solution to be supplied is low in development of a scan method using a linear nozzle or a slit nozzle.
    Type: Grant
    Filed: October 25, 2000
    Date of Patent: August 5, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Yuji Matsuyama, Shuichi Nagamine
  • Patent number: 6589343
    Abstract: The invention concerns a device for application of dope on male threads, comprising a swivel motor (3), the swivel motor operating a rotatable top (6), on said top at least one dope application nozzle (7) being arranged. The dope application nozzle (7) is arranged at a distance from the rotational axis of the top (6), said distance being larger than the radius of a thread section to be doped.
    Type: Grant
    Filed: March 26, 2001
    Date of Patent: July 8, 2003
    Assignee: Maritime Hydraulics AS
    Inventor: Terje Egeland
  • Patent number: 6589344
    Abstract: A glass sealer spray system for a vehicle windshield, the system including: an air controller; a sealer spray frame with the air controller mounted at one side of the sealer spray frame; glass contact rollers each mounted at left and right sides of the sealer spray frame; a spray nozzle unit movably mounted on the midsection of the sealer spray frame between the glass contact rollers; a glass press roller unit rotated by power transmitted to it and mounted at one side of the spray nozzle; and a variable motor unit disposed underneath the sealer spray frame for transmitting power to the glass press roller unit.
    Type: Grant
    Filed: December 28, 2000
    Date of Patent: July 8, 2003
    Assignee: Hyundai Motor Company
    Inventor: Kyu-Tag Cho
  • Patent number: 6578773
    Abstract: An assembly for jetting droplets of a viscous medium. The assembly is releasably mountable in a machine using the assembly for providing a substrate with deposits. The assembly comprises an assembly holder having first holding means mating with an assembly support of a docking device of the machine, a nozzle, an eject mechanism connected to the nozzle, a viscous medium container connected to the eject mechanism, and signal interface means. Thus, the assembly is to be regarded as a separate, exchangeable unit.
    Type: Grant
    Filed: October 5, 2001
    Date of Patent: June 17, 2003
    Assignee: Mydata Automation AB
    Inventors: William Holm, Johan Kronstedt, Hakan Sandell
  • Publication number: 20030097979
    Abstract: An adhesive applying apparatus is used in joining together a hull and a deck with an adhesive. The apparatus includes an adhesive applying gun for ejecting an adhesive, and a guide means attached to the gun. The guide means guides the gun in such a manner that the gun moves along an upper edge portion of the hull.
    Type: Application
    Filed: November 26, 2002
    Publication date: May 29, 2003
    Applicant: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Masatoshi Murakami, Toshihiro Tsuchiya, Kouji Shinma
  • Patent number: 6551403
    Abstract: A system for improving manufacture, said system including but not limited to a Polyimide solvent dispensing nozzle proximate to a Polyimide dispensing nozzle. In one embodiment, the Polyimide solvent dispensing nozzle proximate to a Polyimide dispensing nozzle further includes but is not limited to the Polyimide solvent dispensing nozzle coupled with a bracket assembly adjustable in three dimensions. In one embodiment, the Polyimide solvent dispensing nozzle coupled with a bracket assembly adjustable in three dimensions further includes but is not limited to a bracket assembly adjustable in an x-axis direction, y-axis direction, and z-axis direction. In one embodiment, the Polyimide solvent dispensing nozzle proximate to a Polyimide dispensing nozzle further includes but is not limited to the Polyimide solvent dispensing nozzle mounted on an arm holding the Polyimide dispensing nozzle.
    Type: Grant
    Filed: June 28, 2000
    Date of Patent: April 22, 2003
    Assignee: NEC Electronics, Inc.
    Inventor: Mark J. Crabtree
  • Patent number: 6547878
    Abstract: A sealant dispensing system is disclosed which is capable of applying sealant material to irregularly shaped, i.e., non-circular, closure members. To accomplish this, the closure member is loaded onto a rotary chuck in a conventional manner. The sealant applying gun, however, is moveable relative to the end. In this manner, through a combination of rotation of the closure member and movement of the gun, the gun is able to follow the outline of a closure member of any shape. In order to allow non-circular closure members to be loaded onto a chuck, the chuck must first be stopped. After the closure member is loaded, chuck rotation is then initiated. In order to allow this selective chuck rotation, the chuck may be attached to a servo motor. An electromagnet may be located in proximity to each chuck of the sealant dispensing system.
    Type: Grant
    Filed: October 29, 2001
    Date of Patent: April 15, 2003
    Assignee: Alcoa Packaging Machinery, Inc.
    Inventors: Clinton W. Rutledge, Tracy J. Fowler
  • Patent number: 6544337
    Abstract: A system and method for finishing a series of golf balls is disclosed herein. The system automatically transfers each of the golf balls from station to station on the system. The system has at least one coating station that has at least one spray gun that moves in relation to a golf ball being conveyed through the coating station. The spray gun moves in a track extending from a position below the golf ball to a position above the golf ball. The system has a transfer means that includes a series of transport pucks. Each transport puck has a plurality of shafts with spindles attached to the top of each of the shafts. Each spindle holds a golf ball for processing through the system. The spindles are rotated at relatively high rates during the coating process. In order to reduce tip marks on the finished golf ball, the golf balls are transferred from each spindle utilizing a high pressure gas. The system may be used to coat each golf ball with a basecoat, an indicia and a topcoat.
    Type: Grant
    Filed: October 3, 2001
    Date of Patent: April 8, 2003
    Assignee: Callaway, Golf Company
    Inventors: Walter Skrabski, Steven C. Crast, Brian J. Webb, Michael G. Lucero, Ramon B. Dineros, Dennis O'Lenick
  • Patent number: 6541757
    Abstract: The subject invention is an optical detection assembly (26) for detecting dispensed material (28). The detection assembly (26) includes a housing (38) having a number of optical sensors (42) mounted to the housing (38). A material applicator (30) is mounted within a central opening (44) of the housing (38) and extends through the opening (44) such that the sensors (42) substantially surround the applicator (30) to continuously detect the material (28) being dispensed through the applicator (30). The subject invention also includes the method of detecting the material (28) being dispensed upon a workpiece (32) utilizing a robotic apparatus (20) having an articulated arm (24) with the housing (38) mounted to the arm (24).
    Type: Grant
    Filed: February 21, 2001
    Date of Patent: April 1, 2003
    Assignee: Fanuc Robotics North America, Inc.
    Inventors: Leonard H. Bieman, Edward W. Roney
  • Patent number: 6540152
    Abstract: An assembly for dispensing droplets of a viscous medium. The assembly is releasably mountable in a machine using the assembly for providing a substrate with deposits. The assembly comprises an assembly holder having first holding portions mating with an assembly support of a docking device of the machine, a nozzle, an eject mechanism connected to the nozzle, a viscous medium container connected to the eject mechanism, an assembly property element holding information about properties of the assembly, and signal interface. Thus, the assembly is to be regarded as a separate, exchangeable unit.
    Type: Grant
    Filed: October 5, 2001
    Date of Patent: April 1, 2003
    Assignee: Mydata Automation AB
    Inventors: William Holm, Johan Kronstedt, Hakan Sandell
  • Patent number: 6541063
    Abstract: The present invention is directed to methods and apparatus for controlling the quanatity of material dispensed from dispensing systems. In one aspect of the present invention, a dispensing system includes a weight scale upon which material is dispensed from a dispensing system during a calibration routine. The weight of the dispensed material is determined and compared with a target weight. If the weight of the dispensed material varies from the target weight by more than a predetermined amount, then characteristics of the dispensing system are adjusted, and the calibration routine is repeated.
    Type: Grant
    Filed: November 2, 2000
    Date of Patent: April 1, 2003
    Assignee: Speedline Technologies, Inc.
    Inventors: Thomas C. Prentice, Brian P. Prescott
  • Patent number: 6540832
    Abstract: A liquid dispensing system has a number of cartridges, preferably two or four, selectively coupled to a single motor with a respective clutch for dispensing dots of liquid at high speed. The motor drives a spur gear that meshes with individual spur gears associated with each of the clutches. Multiple cartridges are thus activated with a single motor and are housed together in one housing. Each cartridge is movable relative to the housing and is biased downward to a dispensing position with a spring. Air is selectively provided between the dispensers and the housing to drive the cartridges upward to a non-dispensing position. When the air is not provided, the spring returns the cartridge to its downward position. By moving the cartridge relative to the housing, the assembly can dispense at different locations without it being necessary to move the entire pump assembly every time a dot is dispensed.
    Type: Grant
    Filed: April 30, 2001
    Date of Patent: April 1, 2003
    Assignee: Speedline Technologies, Inc.
    Inventor: William A. Cavallaro