Abstract: The present invention provides a system and methodology for dummy-dispensing resist though a dispense head while mitigating waste associated with the dummy-dispense process. The dummy dispensed resist is returned to a reservoir from which it was taken. Between substrate applications, the dispense head can be positioned to dispense resist into a return line. The flow of resist from the dispense head keeps resist from drying at the dispense head. By funneling the dummy-dispensed resist into a return line with low volume, for example, waste from the dummy-dispensing process can be mitigated.

Abstract: A substrate-processing apparatus includes a sample table which mounts thereon a to-be-processed substrate, a first line which supplies a chemical solution, a second line which supplies a cleaning liquid, a three-way valve connected to the first and second lines and configured to select one of the first and second lines, a filter provided across the first line upstream of the three-way valve, and configured to eliminate a foreign material from the chemical solution, and a nozzle provided downstream of the three-way valve and configured to discharge the chemical solution or the cleaning liquid when the first or second line is selected via the three-way valve. The three-way valve selects the first line when the substrate is coated with the chemical solution, and selects the second line in other cases.

Abstract: An arrangement for coating a workpiece with a working surface comprises a movement rail and a lacquering robot. The movement rail is moveable relative to a stationary reference point parallel to the working surface. The lacquering robot is disposed on the movement rail and is moveable on the movement rail. A lacquering cabin for coating a workpiece comprises at least two chassis parallel to one another and a lacquering apparatus with an opening. The lacquering apparatus is supported on the two chassis and is moveable with the chassis. A method for coating a workpiece using a lacquering cabin comprises subdividing the workpiece into adjacent sections, moving the lacquering cabin to a position corresponding to a section, and coating the section.

Abstract: A tire dressing system for efficiently and accurately applying tire dressing to vehicle tires. The tire dressing system generally includes a support unit, a spray unit movably positioned within the support unit, an actuator unit connected to the spray unit, a tire sensor to determine the size of a vehicle tire, and a tire position sensor to determine the location of the vehicle tire. The spray unit includes a hollow cone nozzle telescopically supported within the spray unit to adjust the spray pattern applied to the sidewall of the vehicle tire depending upon the size of the vehicle tire. After the size of the vehicle tire is determined, the proximity of the hollow cone nozzle is adjusted to apply the desired spray pattern to the sidewall. The hollow cone nozzle then applies the dressing to the sidewall of the vehicle tire as the vehicle moves by the spray unit.

Abstract: A method in connection with a spraying head, which spraying head comprises at least one nozzle (2) for spraying medium 5 and a protective element (3) which is in a protective position in front of the nozzle (2) and mechanically protects a possible triggering element (14) of the spraying head when the spraying head is in a non-10 active mode, and which protective element (3) is movable to a second position in which at least one nozzle (2) and the possible triggering element (14) are not protected by the protective element (3). A force effect 15 is directed in the protective element (3) by pressure medium from the effect of which the protective element (3) moves from the first position to the second position.

Abstract: To date, it has been difficult to extrude precision films onto large substrates efficiently, thus, limiting the size of the substrate. One reason for the difficulty is natural sag or deflection in an extrusion head applying the film to the substrate. To counteract this deflection or sag, a crossbar has been designed that provides a substantially rigid platform to mount an extrusion head, which counteracts the deflection or sag, thus allowing for efficient extrusion of precision films over exceedingly large substrates.

Abstract: The present invention is a method and device, which is suitable for use in an operating theater just prior to implantation, for selectively applying a medical coating to an implantable medical device, for example a stent. Disclosed is a device for use with a stent deployed on a catheter balloon. The device is configured to apply a medical coating of a desired thickness to the surface of a stent only. This is done by use of a drop-on-demand inkjet printing system in association with an optical scanning device. The device is further configured so as to, if necessary, apply a plurality of layered coats, each layered coat being of a different coating material, and if appropriate, different thickness. The section of the housing in which the stent is held during the coating procedure is detachable from the housing base. The detachable housing section may be easily cleaned and re-sterilized or simply disposed or simply disposed of.

Abstract: In a first aspect, a system is provided. The system includes (1) a stage adapted to move a substrate relative to print heads during printing; (2) at least one print head suspended from a support above the stage and adapted to be moveable in a plane above the stage; (3) a controller operable to rotate the print head about a center of the print head; and (4) an imaging system adapted to capture an image of the print head and to determine a center point of the print head based upon images of the print head captured as the print head is rotated. Numerous other aspects are provided.

Abstract: First link members (56A and 56B), a pair of second link members (57A and 57B), and three head holders (51R, 51G, and 51B) are installed rotatably. Rotational pivots (50A and 50B) provided at intermediate portions of the second link members (57A and 57B) and a reference nozzle of the reference head holder (51R) are positioned on the same line in a main scanning direction. The reference head holder (51R) is rotated about the reference nozzle, and the other head holders (51G and 51B) are also rotated simultaneously. The head holders (51G and 51B) are formed to be movable parallel to a sub scanning direction, irrespective of the rotation angles thereof.

Abstract: A device allowing a user to create creating artistic designs on an underlying surface is provided. The device includes a base comprising a plurality of legs. The base supports a central hub at an elevated position. A paint tube is rotatably received in the hub and is spun by a motor. The paint tube has an opening therein for receiving paint and a transverse section comprising multiple open ends for expelling paint during use. The user pours paint into a funnel, which directs the paint into the paint tube. Gravity pulls the paint into the transverse section. When the motor is activated, the motor rotates the paint tube. Centrifugal forces expel the paint from the paint tube, creating a swirl design on the underlying surface.

Abstract: A system and method for performing high flow rate dispensation of a chemical onto a photolithographic component are disclosed. The system and method includes providing a photolithographic component in a manufacturing tool. The photolithographic is positioned at a predetermined distance from a nozzle dispensing a chemical. Dispensation of a chemical at a high flow rate onto a photolithographic component, the rate of flow operable to reduce harmful effects from occurring on the surface of the photolithographic substrate.

Abstract: A composite structure forming apparatus adapted to ejecting and causing an aerosol generated by scattering brittle material fine particles in a gas to collide with a substrate at high speed to form a structure made of the brittle material. The apparatus includes an aerosol generator for generating the aerosol, a nozzle for ejecting the aerosol, a shredder for shredding the brittle particles cohering in the aerosol and preventing cohesion of the brittle material fine particles, and a classifier for classifying the brittle material fine particles in the aerosol. The apparatus also includes a pretreatment device for creating internal strain in the brittle material fine particles, and a position control device for controlling the position of the nozzle relative to the substrate. The apparatus further includes a container having a sieve and a vibration device, and one or more of these components may be associated with the aerosol generator.

Abstract: A spray coating device having a an adjustable handle is provided. The adjustable handle can be extended or folded relative the body of the spray coating device. This provides the user with an ability to easily manipulate and move the spray coating device. The spray coating device also includes a plurality of molecular components adapted to ease replacement at ports within the spray coating device.

Abstract: A sealer coater (20) comprising cylinder unit (22) arranged to be joined with a robot arm (16), a floating base (24) joined with the piston rod of this cylinder unit, a compression spring (25) provided between the floating base and the cylinder unit to urge the piston rod in the forward direction, and a plurality of nozzles (21) attached to the floating base to eject sealer. The nozzles for applying sealer are supported on one cylinder unit, thereby eliminating the need of a plurality of cylinder units and enabling downsizing of the sealer coater.

Abstract: Above a substrate holder 1, an ordinary fluid jet nozzle 2 which is capable of injecting drops of a solution having ordinary particle diameters, a fine fluid jet nozzle 3 which is capable of injecting drops of a solution having fine particle diameters which are smaller than the ordinary particle diameters, and a regular reflection laser displacement gauge 4 are disposed. These are attached on the same plate, thereby forming a head 10. The head 10 freely moves in directions X, Y and Z, as an X-axis drive portion 41, Y-axis drive portions 42 and 43 and a Z-axis drive portion 44 operate in accordance with operation commands received from a controller 50 which controls the apparatus as a whole. It is therefore possible to set the head 10 to a predetermined position on a substrate S which is held by the substrate holder 1. Thus, the respective nozzles supply the solutions to any desired positions the substrate S.

Abstract: A coating solution is sprayed on a rotating wafer held horizontally from a nozzle provided above the wafer while the nozzle is travelling over the wafer from a wafer center to a wafer outer area, thus spirally spraying the coating solution on the wafer. The nozzle stops when the coating solution has reached the wafer outer area and the coating solution is sprayed in circle on the wafer outer area while the wafer is rotating. A coating solution including a component of a coating film and a solvent may be sprayed on a first area to be coated of the wafer and the coating solution and a solvent for the coating film may be sprayed on a second edge area located outside the first area of the wafer.

Abstract: A method of using inkjet printing (IJP) to deposit catalyst materials onto substrates such as gas diffusion layers (GDLs) that in one application are made into membrane electrode assemblies (MEAs) for polymer electrolyte fuel cells (PEMFC). The inventive IJP method can deposit smaller volumes of water-based catalyst ink solutions with picoliter precision. By optimizing the dispersion of the ink solution, this technique can be used with catalysts supported on different specimens of carbon black.

Abstract: An insulated hose for a high voltage paint application apparatus including an inner hose containing a fluid or paint charged at a high voltage. The flexible inner tube hose is arranged inside at least one flexible mechanical protection tube or layer and an air excluding medium is enclosed between flexible inner tube and first flexible mechanical protection layer. A mechanical protection layer may be surrounded by an electrical protection layer which is grounded. A system for applying paint or other fluid materials at a high voltage is also described.

Abstract: A spray guide is disclosed herein for implementation with a spray assembly comprising a spray wand and a spray nozzle. The spray guide includes an arm having a first end and a second end. A mechanism is used for removably attaching the first end of the arm to the swivel angle head, so that the arm will extend over the swivel angle head and the spray nozzle. A wheel is also provided. Another mechanism is provided for rotatably connecting the wheel to the second end of the arm. When an edge of the wheel is placed in a corner joint between a wall and a ceiling and the spray wand manually moved therealong, the wheel will rotate in the corner joint to allow paint to be evenly sprayed from the spray nozzle onto an area of the wall adjacent to the ceiling.

Abstract: Film coating unit has a substrate holder for holding a wafer, a coating solution discharge nozzle, and anti-drying boards opposed to a surface of the wafer. The coating solution is applied to the surface of the wafer in a direction from a front end toward a rear end of the wafer while relatively moving the substrate holder with respect to the coating solution discharge nozzle. During that time, the anti-drying boards are disposed at height of maximum 2 mm from the surface of the wafer so as to form dense atmosphere of a solvent between the surface of the wafer and the anti-drying board. Thereby the coating solution on or over the surface of the wafer is restrained from being dried and a coating film is formed with even thickness on or over the surface of the wafer.

Abstract: This invention relates generally to the application of a sprayed insulation mixture, and more particularly to an apparatus and method for applying the sprayed mixture in high reach areas of extended elevation and removing any excess mixture therefrom. In one embodiment of a system for spraying an insulation mixture into a cavity and removing any excess mixture therefrom, the system preferably comprises a lift defining upper end lower ends, with the upper end of the lift being adjustably movable between lowered and raised positions. An insulation applicator is located on the lift proximal to the upper end for spraying the insulation mixture into the cavity. The applicator may be rotatably connected to the lift and driven to move in a reciprocating, sweeping motion. A scrubber is also located on the lift, preferably above the applicator, for removing or scrubbing any excess insulation from the cavity.

Abstract: A film forming apparatus by which uniform and large area films can be formed according to the AD method. The film forming apparatus includes: a film forming chamber; a substrate holder located in the film forming chamber, for holding a substrate on which a structure is to be formed; an exhaust pump for exhausting an interior of the film forming chamber; an aerosol generating unit for generating an aerosol by blowing up a raw material powder placed in a container with a gas; a carrier pipe for introducing the generated aerosol into the film forming chamber; a nozzle for spraying the aerosol introduced via the carrier pipe toward the substrate; and a control unit for chaotically changing a relative position of the substrate held by the substrate holder and the nozzle.

Abstract: Methods and apparatus for controllably dispensing photoresist solutions and other fluids in semiconductor manufacturing equipment from an array of syringe-based fluid dispensers. A multi-syringe fluid dispensing system is provided for photoresist coating within a wafer track coating module. The coating module may contain a spin chuck that is positioned within a catch cup. A robotic dispense arm and gripper assembly may be positioned within the coating module for gripping and positioning a fluid syringe. An array of syringes may be stored on a solution tray within the wafer track coating module for holding a plurality of fluid syringes containing photoresist solutions.

Abstract: An apparatus is provided to reduce the defect rate and decrease production yield by removing foreign objects even when the foreign objects are mixed in with the thermally sprayed film. The operation for forming thermally sprayed film on inner surface of cylinder bore is paused, and protrusions generated in the thermally sprayed film by foreign objects are detected by visual observation and removed by a manual operation. The thermal spraying operation is then performed until thermally sprayed film reaches the prescribed film thickness. After formation of the thermally sprayed film, a finishing operation is performed by means of honing.

Abstract: In the present invention, a plurality of solvent supply nozzles for solvents having different solubility parameters are provided in a coating treatment apparatus. For a solvent supply nozzle for use at the time of edge rinse, a solvent supply nozzle is selected that discharges a removal solvent having a solubility parameter different by a set value or more from that of a coating solvent contained in a coating solution. During coating treatment, the coating solution is discharged from a coating solution supply nozzle onto the central portion of a rotated substrate to form a solution film having a predetermined film thickness. Immediately after the formation, edge rinse is started with the coating solution on the substrate not dry yet, in which the removal solvent is supplied to the peripheral portion of the substrate from the selected solvent supply nozzle.

Abstract: A painting system having a painting robot with a stationary base mounted to a wall of a paint booth in cantilever fashion. A stand is mounted to the stationary base and is rotatable around a first axis that is disposed substantially horizontal. A first arm is rotatably mounted to the stand around a second axis, and a second arm is rotatably mounted to the first arm around a third axis. The second arm is operable to rotate around the third axis 180 degrees relative to the first arm. An end effector is connected between the second arm and a painting tool. The end effector is operable to orient the painting tool.

Abstract: An apparatus includes a drop unit, a transfer unit and a position adjusting unit. The drop unit drops droplets of an organic material. The transfer unit transfers the drop unit along a first direction. The position adjusting unit is interposed between the drop unit and the transfer unit to adjust a position of the drop unit. Therefore, the apparatus of dropping the organic material has a small size and may drop droplets of the organic material onto an accurate position. Furthermore, the transfer unit moves the drop unit quickly, and the position adjusting unit adjusts the position of the drop unit accurately. Therefore, a time difference for drying the organic material injected into a cavity is reduced.

Abstract: A coating method includes rotatably supporting both ends of the piston or product to be coated; injecting coating material to a first parts of the piston or product to be coated through a first nozzle while rotating the piston, and simultaneously spreading to a uniform film thickness the coating material applied to the first part of the piston or product to be coated thereby removing excess coating material; fixedly supporting both ends of the piston or product to be coated; injecting coating material to a second pad of the piston or product to be coated through a second nozzle while sliding the second nozzle in an axial direction of the piston or product to be coated, and simultaneously spreading to a uniform film thickness the coating material applied to the second part of the piston or product to be coated thereby removing excess coating material.

Abstract: An apparatus for dispensing fluid during semiconductor substrate processing operations. The apparatus includes a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources and a first processing chamber positioned to a first side of the central fluid dispense bank. The apparatus also includes a second processing chamber positioned to a second side of the central fluid dispense bank and a dispense arm adapted to translate between the central fluid dispense bank, the first processing chamber, and the second processing chamber.

Abstract: A functional film fabrication method for fabricating a functional film on a base having a flat surface includes an installation step and an application step. In the installation step, a base is installed so that the flat surface is on top, and a droplet discharge head with a plurality of nozzles aligned in a first direction is arranged above the flat surface. In the application step, a functional film is fabricated on the flat surface by repeating a discharge step and a nozzle movement step. In the discharge step, droplets of a functional liquid are discharged from the nozzles onto the base. In the nozzle movement step, the nozzles are moved relative to the base in a second direction perpendicular to the first direction over a distance shorter than the distance between the nozzles in the first direction.

Abstract: An apparatus for coating a photoresist onto a substrate includes a slit nozzle to apply the photoresist to the substrate, a slit nozzle driving unit to move the slit nozzle, and a photoresist supply unit connected to the slit nozzle to supply the photoresist to the slit nozzle.

Abstract: The bowl according to the invention is equipped with first magnetic coupling means adapted to cooperate with second complementary magnetic coupling means fixed on a non-rotary part of a sprayer, these first and second coupling means being adapted to exert an at least partially axial effort inducing the coupling in rotation of the bowl with a corresponding drive member. The radial width of an annular or truncated surface defined by the first coupling means is greater than the total radial width of the coupling means borne by the non-rotary part.

Abstract: Apparatus for spraying maintenance enhancing material onto the periphery of a tubular member positioned above a ground surface, that comprises means for generating spray onto the periphery of the tubular member; means for delivering maintenance enhancing material to the spray generating means; and means for positioning the spray generating means in such a way that the periphery of the tubular member is completely impinged by the spray issuing from each spray generating means and that a line corresponding to the shortest distance of a spray issuing from the spray generating means to the periphery of the tubular member is not necessarily colinear with the radius of the tubular member.

Abstract: A film forming apparatus to form a coating film by applying a coating material to an outer circumferential surface of a cylindrical object to be coated, includes a material applying device having a nozzle unit to apply the coating material to the outer circumferential surface of the object and a material supplying unit to supply the coating material to the nozzle unit and a moving device configured to move the nozzle unit relatively to the object such that the coating material is applied uniformly to the outer circumferential surface of the object. The moving device includes an object holding unit configured to hold the object, a nozzle moving unit configured to move relatively the nozzle unit with respect to the object holding unit along a longitudinal axis of the object holding unit, and a guide unit configured to guide the nozzle unit along the object holding unit as the nozzle unit moves along the object holding unit such that an interval between the nozzle unit and the object is maintained constant.

Abstract: A film forming apparatus is provided which includes a device A that generates liquid fine particles having controlled particle diameters; a device B including a via for guiding the generated liquid fine particles while controlling a temperature thereof; a device C that sprays the guided liquid fine particles; and a device D including a space for forming a transparent conductive film by coating the sprayed liquid fine particles onto a subject to be processed.

Abstract: The present invention aims to provide a viscous fluid application device which allows improving manufacturing efficiency of semiconductor packages without deteriorating application position accuracy and decreasing designing flexibility. The device includes: an application unit (101) which applies viscous fluid to a substrate 140a; an application head (100) having a supply unit (102) which supplies the viscous fluid to the application unit (101); an X axis unit (110); a Y axis unit (120); a Z axis unit (130); a substrate carrying unit (140); a head height detection sensor (150); and a control unit (160). The supply unit (102) moves in the Y direction in cooperation with a movement in the Y direction of the application unit (101), and remains unmoved irrespective of a movement in the X and Z direction of the application unit (101).

Abstract: A device carried on a moving vehicle for creating marking lines, which are a plurality of elements and are made of a highly viscous marking material, on a surface that is to be marked. The device includes a housing formed by walls and a discharge slot formed in at least one of the walls of the housing and extending transversely to a direction of movement of the vehicle, the discharge slot being limited in extent by a front discharge slot edge and a rear discharge slot edge, seen in the direction of movement of the vehicle. A pressurized material supply line leads to an interior of the housing. A rotatable hollow cylinder formed of a jacket is located in the interior of the housing and is arranged to rotate with the movement of the vehicle carrying the device. The cylinder is provided with a plurality of passages through the jacket, which, depending on a rotary position of the cylinder, establish a connection between the pressurized material supply line and the discharge slot.

Abstract: Painting system for painting large objects comprising a paint booth with surrounding walls and a robot installation comprising a plurality of painting robots, each painting robot comprising a stationary base, a stand carried by the base rotatably arranged around a first axis, a first arm carried by the stand rotatably arranged around a second axis, a second arm carried by the first arm rotatably arranged around a third axis and a forth, a fifth and a sixth arm part carried by the second arm for orienting an attached painting tool.

Abstract: The present disclosure includes a method of applying a coating material to an air duct including inserting a first end of a supply line including a spray head and a camera through a first opening in the air duct; initiating flow of coating material to the spray head through the supply line; pulling the supply line and the attached spray head and camera so that the spray head deposits coating material onto the interior surfaces of the duct while capturing the deposition of coating material using the camera. Using the process and apparatus of the present disclosure provides for the coating of the inside of a air duct while being able to observe and monitor the deposition of coating material in order to ensure that the coating material is applied consistently and evenly along the length of the air duct.

Abstract: A paint booth for plants for painting products comprising: a supporting structure (10); one or more sheets (11), which define at least one portion of internal space (12) of said booth; and means (13) for surface treatment of said products. At least one of said sheets is mobile and has an opening through which said treatment means face within said portion of internal space, said at least one mobile sheet and/or at least one of said treatment means being connected to movement means (15), which impart a reciprocating motion simultaneously on said at least one mobile sheet and on said at least one treatment means.

Abstract: The invention provides a film forming method that improves throughput in a preliminary discharge. The film forming method according to the present invention can include a preliminary discharge step of preliminarily discharging liquid droplets from a head and a liquid droplet discharge step of relatively moving the head and the work to discharge the liquid droplets onto the surface of the work from the head. The preliminary discharge of the liquid droplets is carried out while the head and the work are moved relative to each other.

Abstract: A cover for a robot which includes an electrostatic spray gun with a nozzle which sprays charged material. The cover includes an insulating layer adapted to generally surround the robot except at an aperture where the nozzle extends from the cover. The cover also includes a conductor on the insulating layer near the aperture and spaced apart from the robot. A charge source provides an electric charge to the conductor.

Abstract: A liquid crystal dispensing apparatus includes a container to contain liquid crystal, a discharge pump, and a nozzle to dispense liquid crystal from the discharge pump onto a substrate. The discharge pump has a separably formed case, a cylinder received in the case, a piston inserted into the cylinder and having a groove at a lower portion such that the piston draws in and discharges liquid crystal by rotating and moving up-down, and a suction opening and a discharge opening through which liquid crystal is to be respectively drawn in and discharged as the piston is moved.

Abstract: A film forming apparatus includes a processing chamber defined by walls, an application preparation room in which an applicator is temporary provided, a first carrier transporting the applicator from the application preparation room to the processing chamber, a stage on which a substrate is disposed and a maintenance part disposed adjacent to the application preparation room. A liquid is applied from the applicator onto the substrate to form a film on the substrate.

Abstract: A slit coater including buffer members having elasticity and installed at both sides of a slit nozzle unit, compensating for a height difference between both sides, preventing breakdown due to excessive stress generated by the height, and reducing set-up time. The slit coater includes: a table on which an object to be processed is mounted; a slit nozzle unit formed above the table for applying coating solution onto the object; a driving unit moving the slit nozzle unit in a predetermined direction; and buffer members having elasticity installed at both sides of the slit nozzle unit.

Abstract: A fluid injection apparatus for discharging a fluid against a surface in a controlled manner is disclosed. The fluid injection apparatus includes at least one fluid supply conduit, at least one rotatable and vertically-movable fluid injector provided in fluid communication with the fluid supply conduit and at least one fluid conduit provided in the fluid injector. By selective vertical movement of the fluid injector, each fluid conduit in the fluid injector can be selectively blocked from or provided in fluid communication with the fluid supply conduit to impart a desired flow configuration of a processing fluid against the surface. By selective rotational movement of the fluid injector, a rotational or swirling motion can be imparted to the fluid as it contacts the surface.

Abstract: The present invention provides film forming equipment that can reduce the space necessary for coating. The film forming equipment has an object conveyor for moving an object (50); a spray gun conveyor (41) for moving a spray gun (30) that sprays a coating material; and a controller for controlling operations of the object conveyor (41), the spray gun (30), and the spray gun conveyor, wherein the controller moves the object (50) in a specific direction while spraying a coating material from the spray gun (30) and reciprocates the object (50) so that partial layer coating can be sequentially conducted, and while coating the object (50), the controller shifts the object (50) and the spray gun (30) while keeping the relative positions of the object and the spray gun to each other constant.

Abstract: Aspects of the invention are directed to systems and methods for dispensing materials onto a substrate. In one aspect, a dispensing system includes a dispenser having a dispensing outlet positionable over a top surface of the substrate, the dispenser having a substantially vertical dispensing axis along which material from the dispenser is dispensed, and a vision system, coupled to the dispenser, the vision system being positionable to obtain images of the top surface of the substrate along an optical axis, wherein the vision system is constructed and arranged such that the optical axis intersects the dispensing axis.

Abstract: A painting robot outer arm includes a non-conductive housing mounting a color changer on the outside and a paint canister on the inside connected by an isolating paint transfer line. The paint canister is releasably attached to a piston ram and drive motor by a quick disconnect coupling. The paint supply is isolated from the applied high voltage by cleaning and drying the transfer line. The rate of filling of the canister can be controlled in response to sensed torque applied by a drive motor moving a piston in the paint canister.

Abstract: An apparatus for dispensing fluid during semiconductor substrate processing operations. The apparatus includes a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources and a first processing chamber positioned to a first side of the central fluid dispense bank. The apparatus also includes a second processing chamber positioned to a second side of the central fluid dispense bank and a dispense arm adapted to translate between the central fluid dispense bank, the first processing chamber, and the second processing chamber.