Abstract: A method and apparatus are disclosed for forming thin films of chemical compounds utilized in integrated circuits. The method includes steps of forming a precursor liquid comprising a chemical compound in a solvent, providing a substrate within a vacuum deposition chamber, producing a mist of the precursor liquid, and flowing the mist into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried to form a thin film of a solid material on the substrate, then the integrated circuit is completed to include at least a portion of the film of solid material in a component of the integrated circuit.

Abstract: A variable form spray system includes a robot manipulator, a masking tool assembly integrated with the manipulator, sealer supply hardware which supplies spray material to the manipulator and sealer recovery hardware which recovers material sprayed and skived by the masking tool assembly. Spray pattern form is controlled by collecting overspray using adjustable skive manifolds of the assembly on each side of the spray pattern which function to vacuum off the edges of the airless spray pattern. The positions of the skive manifolds are programmable.

Abstract: A device for the formation, by pyrolysis, of a coating of metal or a metal compound on one face of a hot glass substrate which is in motion by bringing the face into contact with a gaseous reagent includes a roof; support device for conveying the hot glass substrate along a path through a coating chamber defined between the roof and the face of the hot glass substrate; at least one reagent gas inlet in the form of a slot opening directly into the coating chamber and extending transverse to the path of the hot glass substrate for supplying and distributing gaseous reagent to the coating chamber; and at least one exhaust gas outlet for discharging exhaust gas from the coating chamber.

Abstract: A spraying apparatus having a continuously moving conveyor belt which brings a vessel rim down to a spraying station, arrests movement of the vessel and aligns it with a vacuum gripping head, grips the vessel bottom and lifts and presents the vessel to a sprayer, rotates the vacuum gripped vessel rapidly to apply a plurality of thin layers of coating, and returns the coated vessel to the conveyor and releases the grip on the vessel so that the continuously moving conveyor can discharge the coated vessel from the spraying station.

Abstract: A powder coating system includes a powder spray booth having a single fan module which is operatively connected to at least two filter modules, each capable of being moved into position beneath or along side the powder spray booth and then moved out of position in order to permit access to the booth by another filter module. Each filter module contains a number of cartridge filters and a powder collection chamber wherein oversprayed powder removed from the booth interior can be collected for reuse or circulation back to one or more spray guns associated with the booth.

Abstract: An electrostatic spraying machine for coating product comprises a hollow insulative material beam disposed horizontally over objects to be coated and carrying at least one coating product sprayer. The beam encloses a plurality of coating product supply hoses for the sprayer(s). The interior of the hollow beam is divided longitudinally into at least two conduits separated by a common wall.

Abstract: Spray treatment device, particularly for spray-painting of objects, comprising a transport means and collection means for collecting the excess spray medium passing by the objects and the transport means. According to the invention, the collection means comprises an endless rotation belt independent of said transport means. A removal device removes the spray medium from said belt.

Abstract: Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.

Abstract: A continuous spray coating apparatus and process generally comprises a housing defining a closed coating chamber, the coating chamber having inlet and outlet openings. Automatic doors are provided to cover the inlet and outlet openings, and the opening and closing of the doors is selectively controlled such that only one of the doors will be open at any one time during the spray coating operation. The introduction of the coating composition into the chamber creates a predetermined atmosphere within the chamber which is substantially saturated with constituents of the coating material, and by means of the automatic doors and control thereof, introduction of air from the outside atmosphere into the chamber is substantially prevented to maintain a predetermined atmosphere within the chamber.

Abstract: An apparatus for spraying powder coating material includes a rotatable turret which moves articles to and from a work station. A powder spray gun is operable to spray a pattern onto each of the articles in turn while the article is at the work station. The powder flows through the spray gun as a series of pulses. A diverter assembly is operable to divert a portion of each pulse of powder away from the nozzle to more sharply define the pulse. An excess powder collector draws a flow of powder away from the work station. A virgin powder container supplies powder to a powder collector container which supplies powder to a powder feed container which supplies powder to the spray gun. Sensors associated with the virgin, collector and feed containers ensure that a predetermined quantity of powder is maintained in each container. During transport of powder from the virgin and collector containers, the containers and their associated pumps are vibrated to facilitate the flow of powder.

Abstract: Cell for repairing a portion of a vehicle, including a plurality of modular panels, forming ceiling, cladding, floor, wherein the panels are secured together so as to make up a volume encompassing, on the one hand, all or some of the vehicle and, on the other hand, all of the means necessary for repairing the said vehicle, the said volume being equipped on one of its sides with at least one opening for the introduction of the said vehicle, the said opening being provided over all or some of its periphery with a sealing member allowing the said cell to be used in a configuration in which the volume and energy required are reduced.

Abstract: A process for continuously producing coated particles, and in particular, particles in which the coating is uniform, contiguous and of minimal thickness is described, together with an apparatus for conducting the coating process in which a plurality of coating cells connected in series are provided wherein the particles are pneumatically conveyed during the coating application and in which controlled recirculation of particles occurs within each cell and a controlled spray is applied to the particles in order to produce a substantially uniform distribution of coating.

Abstract: A method for applying a thermal spray coating onto a substrate (24) includes the steps of providing chamber apparatus (10) including a chamber (16) having a gas flow assembly (23) that includes a gas injector (27) and a spray nozzle (30) therein for introducing, a gas and spray coating. The chamber has an adjustably sized restricted opening (18) that is continuously open to the ambient atmosphere (21) that is exterior of the chamber (16). The total gas flow is maintained from the gas flow assembly (23) at a predetermined rate based on the size of the restricted opening (18) and the amount of oxygen that is desired to be present during the spraying of the coating and thereafter until the spray coating solidifies on the substrate. Gas flow from the spray nozzle (30) is determined by optimum process parameters for coating specified materials. If the gas flow from the nozzle (30) is insufficient to provide the total gas flow, the gas injector (27) supplements the total gas flow.

Abstract: An apparatus and method for utilizing and controlling finer particles in a powder coating system returns the finer particles to the spraying apparatus to be sprayed on parts by the system. Finer particles are continuously removed from the system by application onto parts, and the accumulation of fines is thereby prevented. The finer particles may be sprayed through specially adapted spray guns, which also permits the utilization of the special advantages of spraying fine powder materials. By removing fine powder particles from the system before they build up, the present invention improves the powder coating operation in various respects.

Abstract: An apparatus for applying spin-on-glass material to a wafer under controlled humidity conditions is described, The apparatus comprises a treatment chamber. Within the treatment chamber are a spin-on-glass coater spin table, a plurality of hotplates connected to one another and from the coater spin table by a moving belt, and wafer handlers to transfer wafers onto the coater spin table and onto the moving belt. A dehumidifier is disposed on top of the treatment chamber and a humidity control unit is disposed on top of the dehumidifier through which air is drawn and whereby relative humidity within the treatment chamber can be controlled.

Abstract: Continuous process for recovering the overspray of aqueous coating agents during spray application by collecting it in an aqueous washing liquid which is continuously circulated in a circuit (A) to the spray booth, where the solids concentration of said washing liquid is maintained within the range of 1-1.5 wt.-%, whereby a part of the washing liquid containing overspray is fed to a first ultrafiltration circuit (B) in which the solids concentration of the circulating liquid is maintained within a range of 8-15 wt.-%, a part of the circulating liquid from ultrafiltration circuit (B) being fed to a further ultrafiltration circuit (C) in which the solids concentration of the circulating liquid is maintained approximately constant within a range between 35 wt.

Abstract: A coating apparatus using jet air streams, wherein a spray nozzle (2) of the coating apparatus includes: a powder blow-out path (4) provided in an axially central portion of the main body (3) of the nozzle; a coating liquid blow-out path (5) annularly formed on the outer periphery of the powder blow-out path (4); and a compressed air blow-out path (6) having a taper-shaped outlet portion and annularly formed on the outer periphery of the coating liquid blow-out path (5).

Abstract: A fluid dispenser for use in consistently depositing relatively thick and lumpy materials onto receiving surfaces which employs a supply path to a plurality of pump/valve combinations and a feedback pressure line to assure an adequate pressure at the point of deposit. There are positive displacement pumps which operate continuously through the plurality of valves with an additional feedback path to assure constant flow of the material.

Abstract: In a coating product sprayer device forming an overhead machine comprising a boom carrying at least one sprayer mobile relative to objects to be sprayed the boom is moved up and down and to track the objects laterally by flexible strips which form part of the wall of the booth. The invention can also be applied to a lateral machine, yielding a lateral machine with five degrees of freedom.

Abstract: The invention provides a method and apparatus for coating horizontal and vertical components of a vehicle body. The designations horizontal component and vehicle component generally refer to the in-body position of such components (panels) after final assembly. In the method, coating is conducted prior to assembly of such components. According to one aspect of the invention, the vertical panels are coated in their in-body position, and then moved to a horizontal position while baking sufficiently to set the coating. Preferably, the horizontal position is maintained for the entire bake cycle.

Abstract: Plant for the powdered-paint spraying of pieces to be painted, comprising a spraying booth with replaceable walls of the disposable type and a unit for feeding and recovering the paint that has not deposited on the pieces to be painted. The booth comprises a supporting frame which delimits a spraying chamber having at least two walls or half-booths which are arranged mutually opposite, have replaceable sheets and are movably mounted with respect to one another for moving mutually closer and further apart to vary the section of the spraying chamber according to the width of the pieces to be painted.

Abstract: An apparatus for cleaning a powder coating booth used to coat elongated articles while oriented vertically includes a pair of opposing vertical walls forming a coating booth, powder spray guns extending through the walls to powder coat articles located therebetween and an overhead conveyor for carrying the elongated articles along a coating line between the walls. A platform mounted to an elevator is vertically movable to any desired elevation in the booth, thereby to enable a cleaning person to clean accumulated powder from the inner surfaces of the walls after a job is finished or when a new color is used. The platform and elevator may be located below the booth, along the coating line. Alternatively, the platform and elevator may be located at a cleaning station away from the coating line and the booth moved to the cleaning station on a wheel-supported rack.

Abstract: A coating of paint on a panel is dried by directing a narrow jet of air from a supply, preferably from an air mover, held at a predetermined distance from the panel towards one edge region of the panel, the jet being substantially narrower, when it reaches the panel edge region, than the length of the panel edge and the jet being inclined to the plane of the panel such that the air from the jet is entrained by the panel in a spreading laminar flow across the panel surface from that edge region to all the other edges thereof. This induces such laminar flow over substantially the whole surface and replaces vapor-laden air closely adjacent the surface with fresh air to accelerate drying. In a painting booth for cars several such air movers use part of the bulk air flow in the booth.

Abstract: A powder coating booth and a recirculating air system is provided for electrostatic coating of articles. The booth includes an operator compartment and a spray chamber. A recirculating fan supplies air to the operator compartment which passes through a window into the spray chamber. The fan also provides air flow through orifice plates at the top of the spray chamber to surround the articles in a controlled manner. The fan additionally supplies air against the back wall of the spray chamber. All of the air in the spray chamber is passed through a reclamation filter and back to the fan. The entire system can be provided on a mobile base.

Abstract: This invention reduces the air pollution associated with spraying of paints, coatings, solvents or pesticides against a surface. Spraying invariable causes bounceback of sprayed solids as well as overspray consisting of bounceback and an aerosol of solids, solvent, and air and is an important source of air pollution. This invention is a resprayer consisting of a jet venturi induction pump located near the front of a spray gun which captures the overspray and a respray nozzle which redeposits the captured material on the work surface.

Abstract: A paint system utilizes a paint pumping station comprising a plurality of small paint pots, one for each color inventoried in the system. A pump is provided for each paint pot and is connected through a like plurality of lines to color changers at each paint station. Each color changer utilizes lighted push buttons that are energized by an encoder that tracks vehicles moving through the spray booth and directs the painter to the proper paint for the vehicle being painted.

Abstract: A method and device for keeping a coating rod and a rod cradle in a bar coater clean and for preventing leakage of the lubrication and/or cooling water used in the bar coater is disclosed. The invention is intended for a bar coater in which the coating rod is, supported revolvingly in a rod cradle substantially over its entire length. The rod cradle is attached to the frame constructions of the coater. The rod cradle is also provided with at least one groove substantially parallel to the coating rod and open towards said coating rod, in which grooves(s) water is circulated to lubricate, cleanse and/or cool the coating rod and the rod cradle. The coating rod is loaded towards the base to be coated by loading the rod cradle.

Abstract: Apparatus and methods for a system and process for applying a flux coating to a circuit board by pulsing an airless spray gun on and off to achieve excellent circuit board through-hole penetration and uniform film thickness. An overspray collection system is provided which reduces overspray and increases material utilization and transfer efficiency. A gun positioning mechanism, which can be automated, accurately locates the gun relative to the circuit board.

Abstract: A method and apparatus for the production of reinforced plastic objects uses a body form around which a casing having a cover is placed. The cover includes two cover units which between them defines an opening having an adjustable size and position. The opening provides access into the body form so that reinforced plastic material may be applied therein. The size of the opening is minimized to reduce the amount of environmentally harmful substances escaping therefrom, such as styrene. The position and size of the opening relative to the body form is adjustable to provide a convenient access into the body form.

Abstract: A booth for the spray coating of workpieces with a powder coating material has a cleaning device for cleaning the interior of the booth. The walls, ceiling and floor constitute the interior contour of the booth and the cleaning device is dimensioned so that a working gap exists between the cleaning device carrier and the interior contour of the booth. The working gap is bridged elastically by cleaning elements that scrape the booth interior to dislodge powder material that has settled. A vacuum source connected to the cleaning device then sucks the powder material released from the interior surfaces for recycling of the powder and cleaning of the booth.

Abstract: Apparatus and method for applying a fluid to a moving continuous web whereby fluid is collected and stored in a multichamber cylinder when application of fluid to the web is ceased, and substantially all of the fluid collected and stored is promptly and directly retrieved from the multichamber cylinder after application of fluid to the moving continuous web has recommenced. A storage chamber of the multichamber is sized to receive an amount of fluid such that the fluid level is below the bristles of an applicator brush.

Abstract: Air is blown into filter tow during or immediately after the application of plasticizer; this foams and distributes the plasticizer in the tow. Air may be delivered from a porous plate closely adjacent to the path of the tow or from nozzles in an air injecting unit. Alternatively air may be used to foam plasticizer at a location remote from the tow and foamed plasticizer subsequently conveyed to and into the tow by a roller.

Abstract: A paint apparatus includes a framework having a beam, a carriage constrained to move reciprocally along the beam, a first robot mounted to the carriage and movable relative to the carriage except in a direction parallel to the beam, and a second robot mounted to the carriage and movable relative to the carriage except in the direction parallel to the beam. The first and second robots and are spaced from each other in the direction parallel to the beam and in a direction perpendicular to the beam. As a result, interference between the first and second robots and is prevented and paint sprayed onto each other is prevented.

Abstract: A sprayer of an elongated shape receives a desired liquid from an outside urce and spray-applies the liquid onto a fiber in response to motivating force provided by pressurized gas. The unsprayed, virgin fiber enters the sprayer through an inlet hole, is sprayed on with the liquid as it travels the width of the sprayer and exits the sprayer as a sprayed fiber through an exit hole. The pressure of the motivating gas can be varied to provide the optimum jettisoning force for a selected liquid, taking into consideration the viscosity, volatility and other pertinent characteristics of the liquid.

Abstract: A coating device for coating a cathode-ray tube with a layer has a booth for accommodating a cathode-ray tube to be coated. The booth houses a coating robot with a spray nozzle for spraying a coating solution onto the cathode-ray tube in the booth to coat a layer on the cathode-ray tube. The inner wall surfaces of the booth are lined with a water-containing member which is supplied with water from a water supply pipe connected to the booth. An air-conditioning unit is mounted on the booth for controlling the temperature and humidity in the booth. The cathode-ray tube is introduced into the booth from a conveyor through an opening defined in a wall of the booth and fitted with a selectively closable door.

Abstract: A method and apparatus for powder spraying a automotive or other vehicle body in a powder spray booth includes a cabin purge zone in which a pair of inlet hood assemblies are positioned to the side window openings on each side of the body and the cavity is purged of excess powder by extracting the powder from the cavity through the inlet hood assemblies. The effective and efficient removal of suspended oversprayed powder from the interior of the vehicle cabin is accomplished through the production of a symmetrical air flow through the vehicle cabin in which air is exhausted through the two side window openings while the interior of the vehicle cabin is replenished with air through the front windshield opening and the rear window opening.

Abstract: A method and apparatus are disclosed for generating fine mists of liquids using a rotating turbine blade disposed within an enclosure. A mixture of a liquid and a carrier gas are flowed into the enclosure such that it immediately impacts on the rotating turbine blade disposed near a lower end of the enclosure, and the resulting mist is withdrawn under vacuum near an upper end of the enclosure. A method and apparatus are also disclosed for chemical vapor deposition of thin films of complex chemical compounds using the discussed mists.

Abstract: A deposition chamber for forming a deposited layer on a wafer having a mixing chamber is disclosed having a wafer support device for supporting the wafers in the mixing chamber, a nozzle located above the wafer support device which can eject the gas/particle mixture into the mixing chamber toward the wafer, a gas outlet device at the bottom end of the chamber from the gas nozzle which allows the gas to exit the chamber and a deionizing device located above the wafer support device and below the nozzle to deionize the gas/particle mixture thereby encouraging uniform deposition of the particles on the wafer. This deposition chamber may also comprise an exhaust fan below the gas outlet device.

Abstract: An airbrush vacuum system for removing paint particulate from the air that results from an airbrush painting operation. The airbrush paint vacuum system includes a vacuum chamber designed to fit interiorally of the garment being painted. A vacuum source is connected to the vacuum chamber, and in operation, a vacuum is generated in the vacuum chamber. This vacuum results in paint particulate being induced from the surrounding air through the garment itself into the vacuum chamber. Thereafter, the captured paint particulate is conveyed to a collection area.

Abstract: An apparatus for painting an edge of a workpiece that is moving in a travel direction generally parallel to the edge past a painting station has a support movable horizontally transversely of the direction in the station and an actuator connected to the support for displacing the support transversely of the direction. A generally tubular casing mounted on the support has a rear end and a front end and a front plate engaged over the front end of the casing is formed with a narrow nose in turn formed with a notch having a shape complementary to the workpiece edge. The front plate is releasably secured over the front end of the casing. A vacuum tank adjacent the station has a large-diameter flexible vacuum hose connected to the rear end of the casing for drawing in air through the nose at the notch.

Abstract: An arrangement for affecting the motions of gasborne, especially air-borne, particles at a movable device, (5,6) comprises an enclosure (12, 22) which encloses said device (5,6) and is connected to a means (16, 28) for supplying or discharging a gas, such as air, to and, respectively, from said enclosure in such an amount that a positive pressure or a negative pressure is maintained therein. Moreover, the enclosure (12, 22) is made of a flexible, gas-permeable material which provides a substantially laminar gas flow downstream of the enclosure and which does not generate particles.

Abstract: A method is provided for environmentally benign paint spraying with a dispersion of oven-curable lacquer in water in a paint spraying station having a cubicle with water-rinsed rear wall for collecting and washing out of overspray in cubicle waste water. The entire cubicle waste water is separated by ultrafiltration into permeate and lacquer-containing residue, the permeate being returned to the paint spraying station, the lacquer-containing residue being enriched with lacquer by removing water until its lacquer content is essentially equal to that of dispersion that is freshly fed to the spray painting station. The residue that is enriched with lacquer is admixed to the freshly fed dispersion for reuse in spray painting.

Abstract: A multi-color powder coat paint recovery apparatus that permits rapid color changes in a powder coat operation comprises a rotatable paint booth positioned adjacent to a painting station, with the booth having a plurality of individual paint color chambers angularly spaced around the periphery of the booth. Each chamber has an open outer side and a filter mechanism at an inner side, with the inner side being in communication with an exhaust outlet from the interior of the housing. The chamber further has primary and secondary paint hoppers positioned below each filter mechanism. An air circulating mechanism draws air inwardly from the painting station through the open outer side of the chamber, through the filter mechanism, out of the housing through the air outlet, and then returns the air through a filtered outlet in a plenum chamber behind the paint applicator. Each color chamber corresponds to a separate paint color.

Abstract: Method and system are provided wherein a process robot moves the door of a vehicle to an open position, performs a robotically controlled process within the vehicle and then moves the door back to a closed position. A separate, two-axis programmable arm holds the door in the open position. In particular, the process robot has attached thereto a tool extension whereby the process robot goes in through a window opening of the door of the vehicle, executes a door open path where the door contacts the inner panel of the door and opens the door over a magnetic holder positioned on the two-axis programmable arm below the bottom of the door. The magnet is of sufficient magnetic strength to accurately hold the door at the programmed holding position of the two-axis arm. The process robot then performs a production operation (i.e. painting, priming, sealing, etc.) within the vehicle.

Abstract: A spray booth ventilation system is adapted for receiving long, slender workpieces suspended from an overhead monorail conveyor. The pieces are carried into and out of this booth, where the paint is applied by conventional equipment. The gases within the booth, which are a mixture of fresh air and evaporated paint solvents, is partially recirculated and re-injected into the booth at discharge orifices defining the edges of the entrance of the booth. Arrangements are provided for equalizing the flow throughout the booth in a vertical direction to avoid points of stagnation which might cause fumes from the booth to emerge from the opening, so that the velocities of the inflow can be minimized to eliminate the danger of collision of the parts as they swing in response to the gas flow, and thus cause damage to the painted surfaces.

Abstract: A cabin for spray coating objects with powdered material has flat filter surfaces and a cleaning device that moves relative thereto. The rear face of the filter is divided into a plurality of individual cell shaped sections sealed with respect to one another. A nozzle directs air from the rear face of the filter toward the interior of the cabin to dislodge powdery material from the filter's inner surface. The nozzle moves across the field of cell shaped sections supplying compressed air to at least one of the sections at a time during the cleaning cycle.

Abstract: A powder coating booth and a construction method therefor comprise a pair of inflatable polymer walls defining between them a booth inner space, a booth entry end and a booth exit end, and supporting the inflatable walls in spaced orientation to define between them the booth inner space. A mechanism is provided between the walls for recovery of powder which does not adhere to articles conveyed through the booth inner space. The polymer walls comprise one or more cells. The step of providing the polymer walls comprises inflating the cells. The method also includes the step of covering the cells with a sheet of polymer film forming an envelope for the cells. Illustratively, the cells comprise a layer of bubble packaging material. Alternatively, the polymer walls comprise thermoformed cores and a polymer film envelope enveloping each core and closed to provide suitable inflation of each wall. Illustratively, the inflatable walls are supported in spaced orientation by a conventional powder spray booth.

Abstract: As a liquid is sprayed onto a sheet, some of the liquid is oversprayed beyond an edge of the sheet. Two movable collectors for collecting such overspray, each having two pans arranged below the edges of the sheet, and vapor-retaining structures extending over the pans to define a plurality of narrow apertures which permit the overspray to pass into the pans, while resisting the passage of vapors upwardly through the apertures and back into the spray chamber. The vapor-retaining structure comprises a plurality of inverted V-shaped strips which are arranged parallel to one another such that the bottom edges of adjacent strips define the narrow apertures, the width of the apertures being in the range of about 1/32 to 1/4 inch. This apparatus can be used as a hazardous waste minimization effort for spray coating operations.

Abstract: A filter unit (12) or a cyclone unit (22) can alternately be attached to a cabin (2) to draw powder out of the cabin. The units move on wheels. In an operating position adjacent to the cabin (2), they are automatically aligned with flow connections and can be connected. A common fan (52) for both units is connected with the filter unit (12) via a compressed air cleaning device (42) in terms of flow, if the former is in the operating position, and at the same time it closes off the inlet to a post-filter unit (32), while when the filter unit (12) is removed and the cyclone unit (22) is in the operating position, this cyclone unit (22) is connected with the fan (52) via the post-filter (32), and the cyclone unit (22) closes off a flow inlet of the compressed air cleaning unit (42). In this way, color changes can be carried out in a short period of time, and good exhaust cleaning is achieved by the filter unit (12) during extended operation with the same color, without a color change.

Abstract: A coating apparatus includes two spin chucks located in a single casing to support and rotate wafers. A waiting trench is located between the spin chucks to discharge that part of coating liquid which has been hardened at the tip of a nozzle. The wafers are loaded and unloaded to and from the spin chucks by a single carrying member located outside the casing. A coating liquid supply mechanism includes the single nozzle for dispensing coating liquid onto the wafers supported by the spin chucks. The nozzle is moved between the spin chucks by a moving arm. Processing cycles relative to the spin chucks are set for a same processing time and the processing cycle relative to one of the spin chucks is shifted from that relative to the other by a half cycle. The nozzle is rested on the waiting trench at the time when it does not dispense the coating liquid onto the wafers supported by the spin chucks.