Work Surface Shields, Masks Or Protectors Patents (Class 118/504)
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Publication number: 20100267227Abstract: A mask frame assembly for thin film deposition including a frame having an opening portion and a support portion, and a mask having a deposition area in a position corresponding to the opening portion, wherein the mask includes a first layer including the deposition area and a peripheral portion disposed outside the deposition area and a second layer including a first surface and a second surface opposite to the first surface, at least a part of the first surface of the second layer faces the first layer and contacts the peripheral portion, and the second surface is welded to the support portion of the frame.Type: ApplicationFiled: November 24, 2009Publication date: October 21, 2010Inventors: Jung-Woo Ko, Sang-Shin Lee, Taek-Kyo Kang, Seung-Ju Hong
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Publication number: 20100252188Abstract: A template formed of an optically-transparent material according to an embodiment includes a contact surface which contacts a resist material, a concave portion for resist pattern formed on the contact surface in which the resist material is filled and cured so as to form a resist pattern part, and a concave portion for alignment mark formed on the contact surface which is used for an optical alignment of the template, includes an opening and a bottom portion and has a shape that an area of the opening is larger than that of the bottom portion or a shape that a depth thereof is deeper than that of the concave portion for resist pattern.Type: ApplicationFiled: March 18, 2010Publication date: October 7, 2010Inventors: Ryoichi Inanami, Shinji Mikami, Takuya Kona
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Patent number: 7806982Abstract: The apparatus for fabricating an organic electroluminescent device which can distribute stress applied to the mask uniformly to form precise and reliable light emitting layers is disclosed. The apparatus for fabricating an electroluminescent device according to the present invention comprises a plurality of grippers disposed in a zigzag state at a periphery of a mask for clamping the mask, a plurality of jaws formed on each gripper and contacting with the mask, and power supplying units for supplying power to the grippers to stretch the mask. Each of the grippers is divided into a connecting section connected to the power supplying unit and a head section integrated into the connecting section, and a plurality of jaws are formed on the head section of each gripper, and odd (or even)-numbered grippers disposed at each side of the mask are disposed in a more forward position than even (or odd)-numbered grippers.Type: GrantFiled: March 20, 2006Date of Patent: October 5, 2010Assignee: LG Display Co., Ltd.Inventors: Chong Hyun Park, Yoon Heung Tak
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Patent number: 7802537Abstract: A mask frame assembly for depositing a thin film including at least two unit masks, ends of the unit masks being coupled to a frame having an opening, and each unit mask includes a plurality of deposition openings. A first gap has a width substantially equal to a width of the deposition openings and is located between the unit masks.Type: GrantFiled: July 8, 2005Date of Patent: September 28, 2010Assignee: Samsung Mobile Display Co., Ltd.Inventor: Chang-Ho Kang
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Publication number: 20100224125Abstract: A deposition mask that includes a mask sheet and a frame to support the perimeter of the mask sheet. The frame includes a contact surface that is attached to the mask sheet, and a non-contact surface that faces and is spaced apart from the mask sheet, the non-contact portion extends from the contact portion, to an opening formed in the center of the frame. The non-contact portion may form an acute angle, with respect to the plane of the mask sheet.Type: ApplicationFiled: February 17, 2010Publication date: September 9, 2010Applicant: Samsung Mobile Display Co., Ltd.Inventors: Sang-Shin Lee, Jung-Woo Ko, Taek-Kyo Kang, Seung-Ju Hong
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Publication number: 20100224124Abstract: A vehicle masking cover (10) for protecting external areas of a vehicle (100) from overspray during a refinishing process, comprising a plurality of panel sections (20), each panel section being provided with a fastening means (96, 98) which detachably interconnects with the fastening means (96, 98) of an adjacent panel section to form a sealed seam. The arrangement is such that a portion of a panel section (20) is folded back from the vehicle masking cover (10) to expose an external area of the vehicle (100) to be refinished while the external area of the vehicle (100) underneath the interconnected panel sections (20) of the vehicle masking cover (10) is protected from overspray, the folded panel section (20) remaining attached to the vehicle masking cover (10) at a portion of the folded panel section (20).Type: ApplicationFiled: September 5, 2007Publication date: September 9, 2010Applicant: ZIPPMASK.COM PTY LTDInventor: Steven Derek Bush
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Patent number: 7784514Abstract: Provided is a glue wheel arrangement for a printer having an integral page binding arrangement. The glue wheel arrangement is configured to apply glue to an edge of a sheet of paper passing through the printer. The glue wheel arrangement includes a glue wheel and a partially hollow axle connected to the glue wheel, said axle having a rotating coupling for a glue supply hose from a glue cartridge of the printer. The arrangement also includes a housing assembly arranged on the wheel and configured to expose the wheel when urged towards the sheet. A media feed assembly feeds the sheet of paper from the printer past the glue wheel to the binding arrangement.Type: GrantFiled: July 10, 2008Date of Patent: August 31, 2010Assignee: Silverbrook Research Pty LtdInventors: Kia Silverbrook, Tobin Allen King
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Publication number: 20100206222Abstract: A mask adhesion unit for a deposition apparatus includes a magnetic assembly, a cap plate spaced apart from the magnetic assembly, and a magnetic control unit between edges of the magnetic assembly, and the cap plate. A deposition apparatus using the same is capable of adhering a substrate and a mask assembly together using the mask adhesion unit to improve deposition precision, while preventing deformation of a slit of the mask assembly.Type: ApplicationFiled: January 28, 2010Publication date: August 19, 2010Inventors: Dong-Young Sung, Jae-Jung Kim
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Patent number: 7772314Abstract: Process of masking cooling holes of a gas turbine component with an external surface, comprising a cavity and a plurality of cooling holes before coating the gas turbine component, comprising the steps of first applying a mask material to the cooling holes so that the cooling holes are filled at least closest to the external surface, whereby the mask material contains a substance which fluoresces under ultraviolet light and a filler material. Then the mask material within the cooling holes is thickening. An inspection using ultraviolet light to locate any unwanted residual mask material on the external surface is carried out and unwanted residual mask material is removed before the coating is applied to the external surface of the component and the masked cooling holes. In the end the mask material is removed from the cooling holes.Type: GrantFiled: August 10, 2006Date of Patent: August 10, 2010Assignee: Alstom Technology LtdInventors: John Fernihough, Andreas Boegli, Alexander Stankowski
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Patent number: 7770536Abstract: A sleeve is positioned over a radially-expandable rod assembly and a stent is positioned over the sleeve. A mandrel is inserted into the rod assembly to thereby press the sleeve against the inner surface of the stent and expand the stent. A coating (such as a solvent, a polymer and/or a therapeutic substance) is then applied to the outer (abluminal) surfaces of the stent, by spraying, for example. The sleeve advantageously prevents the coating material from being applied to inner (luminal) surfaces of the stent and also allows the coating material to be efficiently applied to the abluminal surfaces.Type: GrantFiled: April 15, 2008Date of Patent: August 10, 2010Assignee: Advanced Cardiovascular Systems, Inc.Inventors: Yung Ming Chen, Jeff H. Smith, Celenia Gutierrez
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Publication number: 20100197125Abstract: An improved technique for processing a substrate is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for processing a substrate. The method may comprise ion implanting a substrate disposed downstream of the ion source with ions generated in an ion source; and disposing a first portion of a mask in front of the substrate to expose the first portion of the mask to the ions, the mask being supported by the first and second mask holders, the mask further comprising a second portion wound in the first mask holder.Type: ApplicationFiled: January 28, 2010Publication date: August 5, 2010Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOICTES, INC.Inventors: Russell J. Low, William Weaver, Nicholas P.T. Bateman, Atul Gupta
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Publication number: 20100192856Abstract: A mask assembly includes a mask frame, the mask frame having an opening and a frame surrounding the opening, a pattern mask on the mask frame, the pattern mask including a pattern portion having at least one pattern overlapping the opening and a welding portion attached to the frame, and at least one support bar crossing the opening and attached to the pattern mask.Type: ApplicationFiled: February 4, 2010Publication date: August 5, 2010Inventors: Dong-Young Sung, Dae-Sik Jang
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Publication number: 20100183805Abstract: A method and apparatus for manufacturing an optical workpiece. In the method at least one side of the workpiece is coated. The workpiece is handled through a jig attached non-detachably to an optical area of the workpiece.Type: ApplicationFiled: July 3, 2008Publication date: July 22, 2010Applicant: THETA OPTICS LTD OYInventor: Olavi Nieminen
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Patent number: 7757627Abstract: An automatic coating device uses a driving motor and a conveyer to form a cyclically rotating module. An injector filled with a coating material is disposed on one side of the conveyer. When an object to be coated is disposed on the other side of the moving conveyer, the coating material is then applied onto the object by the injector. This can increase the coating speed and quality.Type: GrantFiled: December 15, 2006Date of Patent: July 20, 2010Assignee: Inventec CorporationInventors: Yi-Lun Cheng, Feng-Ku Wang, Chun-Lung Lin, Chih-Kai Yang
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Patent number: 7752998Abstract: A paint protection apparatus includes a body formed from paint-impermeable material configured in a wound and tubular configuration, and having integrally coupled outer and inner layers covering an entire surface area thereof. The inner layer is formed from an adhesive material. A plurality of perforations passes through the layers, and extends along the entire longitudinal length of the body. A mechanism separates the body along a linear axis registered orthogonal to a longitudinal length of the body while the body is separated along at least one of the perforations. A mechanism unwinds and dispenses the body while one user hand remains spaced from the unwinding and dispensing mechanism during operating conditions. The separating mechanism is slidably positioned along a longitudinal length of the unwinding and dispensing mechanism.Type: GrantFiled: November 17, 2006Date of Patent: July 13, 2010Inventor: James Noble
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Publication number: 20100159153Abstract: An end station for an ion implantation system is provided, wherein the end station comprises a process chamber configured to receive an ion beam. A load lock chamber is coupled to the process chamber and configured to selectively introduce a workpiece into the process chamber. An electrostatic chuck within the process chamber is configured to selectively translate through the ion beam, and a shield within the process chamber is configured to selectively cover at least a portion of a clamping surface of the electrostatic chuck to protect the clamping surface from one or more contaminants associated with the ion beam. A docking station within the process chamber selectively retains the shield, and a transfer mechanism is configured to transfer a workpiece between the load lock chamber and the electrostatic chuck, and to transfer the shield between the docking station and the clamping surface of the electrostatic chuck.Type: ApplicationFiled: December 22, 2008Publication date: June 24, 2010Applicant: Axcelis Technologies, Inc.Inventors: Kan Ota, Stanley W. Stone, Steve T. Drummond
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Publication number: 20100147214Abstract: A dynamic film thickness control system/method and its utilization consisting of a minimum of one mask plate arranged between a substrate and a vapor source. A film thickness control device is utilized for real-time control over deposited film thickness and gradually moves the mask plate according to the film thickness control value acquired by the film thickness control device, enabling the mask plate to mask film zones on the said substrate to achieve the film thickness of a design objective. When the required zones of deposition are masked, the deposition of a particular film layer is completed.Type: ApplicationFiled: September 17, 2008Publication date: June 17, 2010Inventors: Kow-Je LING, Jiunn-Shiuh Juang
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Publication number: 20100139561Abstract: A printing screen which, in one embodiment, is adapted to print resistors on a substrate including conductors. An emulsion material covers at least a first area of the screen and at least a second area of the screen defines a region of the screen through which a thick film paste material passes and is deposited onto the substrate to form the resistors. A pattern of recesses, defined in the bottom surface of the layer of emulsion material, matches the pattern of conductors on the substrate. When the screen is lowered onto or near the substrate, the conductors are fitted into the respective recesses to assure that during printing the screen lays flat against the substrate irrespective of the number, size, or location of the conductors on the substrate for forming resistors of uniform thickness and thus uniform resistance.Type: ApplicationFiled: December 8, 2009Publication date: June 10, 2010Inventor: Terry R. Bloom
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Publication number: 20100126416Abstract: A paint shield for preventing the misapplication of coating material comprises a shielding member having a leading edge and a base member, an extension handle for enabling a user to hold the leading edge of the paint shielding member against a surface, a pivot member connected to the base member for angularly positioning the shielding member, and a storage location positioned in said base member for storing the pivot member and the extension handle when the pivot member is selectively removed from the base member. The pivot member preferably includes two walls having at least one frictional pad disposed on an inner surface of each wall for frictionally engaging the base member and allowing a user to angularly pivot the shielding member without loosening the pivot member.Type: ApplicationFiled: November 25, 2008Publication date: May 27, 2010Inventor: Donald GRINGER
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Publication number: 20100122655Abstract: Embodiments disclosed herein generally include an alignment assembly for aligning a shadow frame on a susceptor. For producing large area flat panel displays or solar panels, the shadow frame that protects the areas of the susceptor not covered by the substrate from deposition may be so large that the shadow frame bends and doesn't properly align. By utilizing an alignment assembly having one or more ball bearings, the shadow frame may roll on the susceptor to a proper alignment position. Thus, the shadow frame may be prevented from bending and also align on the susceptor.Type: ApplicationFiled: November 9, 2009Publication date: May 20, 2010Inventors: Robin L. Tiner, John M. White, Kyung-Tae Kim
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Patent number: 7717058Abstract: The invention relates to a method of preparing turbine blades for spray coating their blade region that is subjected to the medium flowing through during operation in a spray coating apparatus, in which the turbine blade is inserted with its blade root into a cavity of a mounting in such a way that it protrudes with the blade region that adjoins the blade root from an opening of the cavity to form a gap between the rim of the opening and the turbine blade, and in which the gap is bridged by a shielding fixed on the mounting, which is characterized in that a shielding layer of a plastic which is resistant during the spray coating is used for the shielding, the shielding layer being arranged in such a way that it reaches up to the boundary between the blade root and the blade region.Type: GrantFiled: September 8, 2006Date of Patent: May 18, 2010Assignee: Siemens AktiengesellschaftInventors: Thomas Beck, Francis-Jurjen Ladru, Benjamin Lippke, Marcus Mensing
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Publication number: 20100101492Abstract: A masking device that is adapted to be reusable in high temperature applications and for a variety of masking applications, is cost-effective to manufacture, and which includes a magnetic component insulated on three or all four surfaces. The invention includes a system of interchangeable components in varying shapes and sizes, which may be selectively attached, assembled and combined providing versatility for a range of masking operations.Type: ApplicationFiled: September 11, 2009Publication date: April 29, 2010Inventors: Kissak Sarajian, Christopher Malone
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Patent number: 7704326Abstract: A deposition mask with which position precision of a passage hole is improved and deposition can be conducted precisely and a manufacturing method thereof are provided. A mask body made of a metal thin film is fixed and tightly mounted on a frame body having an opening. The mask body has at least one pattern region including a plurality of passage holes for letting through a deposition material, a stress relaxation region including a plurality of fine holes provided at the periphery of the pattern region, and a holding region provided at the periphery of the stress relaxation region. The mask body is tightly mounted on the frame body at a holding region.Type: GrantFiled: December 2, 2004Date of Patent: April 27, 2010Assignee: Sony CorporationInventors: Nobuo Hagiwara, Hideo Nagasaki, Tsutomu Mori, Tatsushiro Hirata, Hajime Yagi
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Publication number: 20100089315Abstract: A shutter disk suitable for shield a substrate support in a physical vapor deposition chamber is provided. In one embodiment, the shutter disk includes a disk-shaped body having an outer diameter disposed between a top surface and a bottom surface. The disk-shape body includes a double step connecting the bottom surface to the outer diameter.Type: ApplicationFiled: September 21, 2009Publication date: April 15, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Karl M. Brown, Jason Schaller
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Patent number: 7694648Abstract: An organic EL display device and a method for fabricating the same are disclosed, wherein an organic luminescence layer is formed at a crossing region of first and second electrodes using a shadow mask on which a plurality of holes are connected by bridges.Type: GrantFiled: December 29, 2004Date of Patent: April 13, 2010Assignee: LG Display Co., Ltd.Inventor: Chang Nam Kim
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Patent number: 7695596Abstract: A device to fix a substrate for a thin film sputter, includes a mask, a mask pressing plate, a magnetic body, and a driving unit. The mask having patterns is positioned under the substrate so as to form the patterns on the substrate. The mask pressing plate is positioned over the substrate and moves toward and contacts a back surface of the substrate at a predetermined pressure. The magnetic body is placed over the mask pressing plate and moves toward the mask pressing plate so as to have the mask adhere closely to the substrate by a magnetic force of the magnetic body. The driving unit applies a driving force to move the magnetic body. Where the mask pressing plate descends, the mask pressing plate adheres closely to the substrate. Thereafter, the magnetic body descends toward the back surface of the substrate which is supported by the mask pressing plate. The mask underneath the substrate adheres closely to a front surface of the substrate by the magnetic force of the magnetic body.Type: GrantFiled: May 17, 2006Date of Patent: April 13, 2010Assignee: Samsung Mobile Display Co., Ltd.Inventors: Chang Ho Kang, Yong Weon Jang, Tae Seung Kim
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Publication number: 20100080915Abstract: When a position of a film formation mask is recognized by irradiating the film formation mask with light, an image having a high contrast cannot be obtained, which unstabilizes reproducibility of measurement accuracy for an alignment mark position, leading to an alignment error between a substrate and a mask. Provided is a film formation mask including a mask sheet having a positioning opening and a mask frame, in which a reflective member having a reflectance higher than that of the mask sheet is provided to the positioning opening. When light is irradiated onto the positioning opening of the film formation mask, an intensity difference between light reflected by the mask sheet and light reflected by the reflective member becomes stable. Therefore, the position of the film formation mask may be determined with high reproducibility.Type: ApplicationFiled: September 17, 2009Publication date: April 1, 2010Applicants: CANON KABUSHIKI KAISHA, HITACHI DISPLAYS, LTD.Inventors: Masamichi Masuda, Takehiko Soda, Masataka Eida, Kazushi Miyata
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Publication number: 20100075051Abstract: A method and apparatus for coating a surface is provided. The apparatus includes a shield. The shield includes a substantially planar body including a thickness, a length, and a width. The body further includes a first edge matingly shaped complementary to a boundary between an area of an object to be coated and an area of the object to be protected from being coated, and a first side wall extending outwardly from a second edge of the body, the second edge adjacent the first edge.Type: ApplicationFiled: September 24, 2009Publication date: March 25, 2010Inventor: Curtis William Darling
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Publication number: 20100055295Abstract: A mask for masking a stent during a coating procedure may include a mask body that has a negative pattern or an approximate negative pattern of a stent pattern being masked by the mask body. An apparatus for selectively coating a predetermined portion of a medical article may include a dispenser of a coating composition, a mask, a device for creating a relative movement between the mask and the medical article.Type: ApplicationFiled: November 11, 2009Publication date: March 4, 2010Inventors: Syed F.A. Hossainy, Gordon Stewart, Srinivasan Sridharan, Arkady Kokish, Klaus Kleine, Benjamyn Serna, Bjorn G. Svensson
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Publication number: 20100055810Abstract: A mask for thin film deposition used in forming an organic thin film or a conductive layer in an organic light emitting device is disclosed. In one embodiment, the mask includes i) a base member, ii) a plurality of slits configured to penetrate through the base member, wherein the plurality of slits have a predetermined length and extend in a first direction, wherein the plurality of slits comprise an outermost slit positioned in an outermost in a second direction having a predetermined angle with respect to the first direction, and wherein the outermost slit comprises two sub-slits separated from each other and iii) a rib supporting part formed between and contacting the two sub-slits, wherein the rib supporting part extends from a rib which is adjacent to the outermost slit.Type: ApplicationFiled: January 23, 2009Publication date: March 4, 2010Applicant: Samsung Mobile Display Co.,Ltd.Inventors: Dong-Young SUNG, Hong-Ryul Kim
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Patent number: 7669548Abstract: The invention relates to methods and apparatuses that reduce problems encountered during coating of a device, such as a medical device having a cylindrical shape. In an embodiment, the invention includes an apparatus including a bi-directional rotation member. In an embodiment, the invention includes a method with a bi-directional indexing movement. In an embodiment, the invention includes a coating solution supply member having a major axis oriented parallel to a gap between rollers on a coating apparatus. In an embodiment, the invention includes a device retaining member. In an embodiment, the invention includes an air nozzle or an air knife. In an embodiment, the invention includes a method including removing a static charge from a small diameter medical device.Type: GrantFiled: October 6, 2006Date of Patent: March 2, 2010Assignee: SurModics, Inc.Inventor: Ralph A. Chappa
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Publication number: 20100024978Abstract: Improved layouts take better advantage of desirable cap-layer induced transverse and vertical stress. In one aspect, roughly described, a tensile strained cap material overlies the transistor channels in the N-channel diffusion regions but not the P-channel diffusion regions. The material terminates at an edge that is located as far as practical from the N-channel diffusion, toward the P-channel diffusion. In another aspect, roughly described, a gate conductor crosses a P-channel diffusion region and terminates as far as practical beyond the edge without making undesirable electrical contact with any other features of the integrated circuit design, and without overlying any other diffusion regions. A compressively strained cap layer overlies the P-channel diffusion. In yet another aspect, roughly described, a gate conductor crosses an N-channel diffusion and extends by as short a distance as practical before terminating or turning. A tensile strained cap material overlies the N-channel diffusion.Type: ApplicationFiled: October 9, 2009Publication date: February 4, 2010Applicant: SYNOPSYS, INC.Inventors: VICTOR MOROZ, DIPANKAR PRAMANIK
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Patent number: 7635418Abstract: Apparatus and methods for shielding a feature projecting from a first area on a substrate to a plasma while simultaneously removing extraneous material from a different area on the substrate with the plasma. The apparatus includes at least one concavity positioned and dimensioned to receive the feature such that the feature is shielded from the plasma. The apparatus further includes a window through which the plasma removes the extraneous material. The method generally includes removing the extraneous material while shielding the feature against plasma exposure.Type: GrantFiled: December 3, 2004Date of Patent: December 22, 2009Assignee: Nordson CorporationInventors: Robert S. Condrashoff, James D. Getty, James S. Tyler
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Publication number: 20090308310Abstract: What is disclosed is a driveway protector for use in protecting a driveway from stains during the application of coating products to the outside surface of an automobile tire.Type: ApplicationFiled: June 12, 2009Publication date: December 17, 2009Inventor: Dino Marino
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Publication number: 20090304931Abstract: Four masks respectively corresponding to the four sides of a rectangular glass substrate are prepared. The four masks are set in a deposition chamber in a divisional state. When the masks are moved linearly on a plane flush with the glass substrate in directions perpendicular to the respective sides of the glass substrate, the divisional masks are connected to each other and form a mask as one assembly. At this time, the masks cover the periphery of the glass substrate entirely.Type: ApplicationFiled: June 2, 2009Publication date: December 10, 2009Applicant: CANON ANELVA CORPORATIONInventor: Takahide Uenosono
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Patent number: 7628859Abstract: A mounting assembly for a stent and a method of coating a stent using the assembly are provided.Type: GrantFiled: December 27, 2002Date of Patent: December 8, 2009Assignee: Advanced Cardiovascular Systems, Inc.Inventors: Syed F. A. Hossainy, Charles Snyder, Anh Tran, Arthur J. Wen
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Publication number: 20090291203Abstract: A substrate tray which holds a substrate and is arranged to oppose a thin film material source is characterized by including a holding member which holds the substrate and is provided with an opening through which thin film material particles emitted from the thin film material source to be deposited on the substrate pass, a first mask which is arranged between the holding member and the substrate and shields the thin film material particles passing through the opening not to deposit on the substrate, to form a thin film having a predetermined shape on the substrate, and a second mask which is arranged between the holding member and the first mask and covers the first mask at least partly to shield the thin film material particles not to deposit on the first mask.Type: ApplicationFiled: July 4, 2007Publication date: November 26, 2009Applicant: CANON ANELVA CORPORATIONInventors: Seiji Hagi, Seiji Hatayama, Kazutoshi Nishio
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Patent number: 7622003Abstract: An improved paint edger is provided having a laterally elongated edger head supported by a perpendicularly affixed handle. The blade itself is formed integrally to the frame, but demarcated by a joint aligning the tapered upper surface. Opposite the tapered upper surface, a flat lower surface is recessed by an offset of a specific dimension to receive an absorbent tape. The tape is affixed to the flat lower surface by an adhesive, and provides an absorbent material to provide a wicking action for paint that may pass the outer edge. Finally, the tape is provided with a non-porous barrier film that prevents passage of fluid (paint) and allows the paint to be retained within the tape.Type: GrantFiled: January 19, 2006Date of Patent: November 24, 2009Inventor: Marie Heysek
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Publication number: 20090283037Abstract: Process chamber shields having specially profiled edges exhibit increased lifetime in PVD and CVD deposition chambers. Edge profiling reduces flaking and delamination of materials deposited onto the shields, thereby prolonging shield life, and, consequently, reducing costs associated with deposition. In one embodiment, a shield having an edge portion terminating in a rounded tip, where the tip has high curvature and a small thickness, is provided. In another aspect, a shield having a concave portion connecting with an edge portion, where an upper (inner) surface of the edge portion forms a tangent plane to the upper (inner) concave surface of the concave surface, is provided. In yet another aspect, a shield with a tapered edge portion is provided. Shields, having profiled edges in accordance with these aspects and in accordance with combinations of these aspects, can better support deposited films, particularly films containing compressively stressed materials, such as metal nitrides.Type: ApplicationFiled: May 19, 2008Publication date: November 19, 2009Applicant: NOVELLUS SYSTEMS, INC.Inventors: Kedar Hardikar, Yajie Liu, Viraj Pandit
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Patent number: 7615119Abstract: An elevated containment structure in the shape of a wafer edge ring surrounding a surface of a semiconductor wafer is disclosed, as well as methods of forming and using such a structure. In one embodiment, a wafer edge ring is formed using a stereolithography (STL) process. In another embodiment, a wafer edge ring is formed with a spin coating apparatus provided with a wafer edge exposure (WEE) system. In further embodiments, a wafer edge ring is used to contain a liquid over a wafer active surface during a processing operation. In one embodiment, the wafer edge ring contains a liquid having a higher refractive index than air while exposing a photoresist on the wafer by immersion lithography. In another embodiment, the wafer edge ring contains a curable liquid material while forming a chip scale package (CSP) sealing layer on the wafer.Type: GrantFiled: April 27, 2006Date of Patent: November 10, 2009Assignee: Micron Technology, Inc.Inventor: Peter A. Benson
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Publication number: 20090260566Abstract: A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.Type: ApplicationFiled: October 2, 2008Publication date: October 22, 2009Applicant: Applied Materials, Inc.Inventors: Heike Landgraf, Uwe Schuessler, Stefan Bangert
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Patent number: 7604700Abstract: A stent mandrel fixture for supporting a stent during the application of a coating substance is provided. A method supporting a stent during the application of a coating substance is also provided.Type: GrantFiled: January 16, 2007Date of Patent: October 20, 2009Assignee: Advanced Cardiovascular Systems, Inc.Inventors: Jason Fox, Nathan Harold, Barry Templin, Andrew Tochterman
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Publication number: 20090258465Abstract: A silicon crystallization mask of the present invention includes; a main exposure portion including a plurality of complete light transmission regions which completely transmit light therethrough, and a preliminary exposure portion including a plurality of incomplete light transmission regions, which each partially transmit light therethrough, wherein at least two of the incomplete light transmission regions have different magnitudes of light transmittance from each other.Type: ApplicationFiled: March 19, 2009Publication date: October 15, 2009Applicant: SAMSUNG ELLECTRONIC CO., LTD.Inventor: Se-Jin CHUNG
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Patent number: 7595271Abstract: Described herein is an apparatus useful for depositing a material on a substrate. At least one component of the apparatus comprises a protective coating, which facilitates the cleaning and/or removal of the deposited material from the component. Also described are methods for depositing a material on a substrate using the disclosed apparatus, for fabricating the apparatus, and for cleaning the apparatus.Type: GrantFiled: December 1, 2006Date of Patent: September 29, 2009Assignee: ASM America, Inc.Inventor: Carl L. White
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Publication number: 20090223445Abstract: The object of the present invention is to attach a part firmly to a component. A part attaching seat 7 of the component to which the part is to be attached, and a plural number of stud bolts 4,4 are covered with a masking member 9. The masking member 9 consists of a panel shaped seat covering part 10 and a bolt covering part 11, and the seat covering part 10 covers the part attaching seat 7 and the bolt covering part 11 covers the stud bolts 4,4 to protect the part attaching seat 7 and the stud bolts 4,4 from coating.Type: ApplicationFiled: October 12, 2006Publication date: September 10, 2009Inventors: Masanori Ogawa, Katsumi Terada, Junichi Hasegawa
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Patent number: 7585368Abstract: A simply-constructed paint-spraying platform comprises: a platform body comprising a top wall, a ventilation part, a bottom wall, two support plates, and a backing plate. When in use, the paint-spraying platform is expanded, and the article to be painted is hung on the first and second hooking holes or placed on the backing palate for spraying paint by using a spray gun. Therefore, the advantages including easy carriage, good ventilation, low cost, and enhanced steadiness can be provided.Type: GrantFiled: July 19, 2006Date of Patent: September 8, 2009Assignee: Hua Yan Top Co., Ltd.Inventors: Chi Kuang Lin, Jing-Yuan Chang
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Patent number: 7575637Abstract: A method for processing a substrate article is provided. The method includes masking a first portion of the substrate article with a maskant that includes a formed graphite piece that overlays and contacts the first portion of the substrate such that a second portion of the substrate is not overlaid nor contacted by the maskant; and processing the substrate article such that a coating of material is deposited on the second portion of the substrate, and wherein the maskant facilitates preventing the coating from being deposited on the first portion of the substrate article.Type: GrantFiled: June 6, 2006Date of Patent: August 18, 2009Assignee: General Electric CompanyInventors: Nripendra Nath Das, W. Michael Gmerek, Jr., David W. Koch
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Patent number: 7572338Abstract: A mask for depositing a thin film of a flat panel display and a method of fabricating the mask are disclosed. Embodiments of the mask can improve position accuracy and prevent problems caused by thermal expansion of the mask by attaching a reinforcing member and mask pattern units arranged on openings of the reinforcing member using a buffer member. The mask includes a reinforcing member including a plurality of first openings; mask pattern units arranged corresponding to the first openings of the reinforcing member and supported by the reinforcing member; and a buffer member including a plurality of second openings corresponding to the first openings of the reinforcing member, and attaching the reinforcing member to the mask pattern units to support the reinforcing member and the mask pattern units.Type: GrantFiled: November 17, 2005Date of Patent: August 11, 2009Assignee: Samsung SDI Co., Ltd.Inventors: Eui-Gyu Kim, Tae-Hyung Kim
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Patent number: 7568489Abstract: Impurities can be eluted simultaneously from a plurality of local areas of a surface layer of a semiconductor substrate. A supporting unit supports the substrate, and a sample plate is disposed on the surface of the substrate. The sample plate has a plurality of holes that expose the local areas of the surface of the substrate. Eluant is provided onto the local areas of the surface layer of the substrate through the holes in the sample plate. The impurities are thus dissolved by the eluant to produce a sample. A nozzle transfers the sample from the local areas of the surface of the substrate to a plurality of sample cups. Therefore, samples from the surface layer of the substrate may be produced in a short amount of time.Type: GrantFiled: July 19, 2004Date of Patent: August 4, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Sung-Jae Lee, Bok-Soon Ko
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Publication number: 20090188890Abstract: There is disclosed a method, system, and screen for reducing solder voids on circuit boards. In an embodiment, there is provided a method of reducing solder voids on a circuit board, comprising: locating via holes provided at a conductive landing pad; and covering at least some of the via holes with a coating, whereby gases from the covered via holes are prevented from expanding and forming voids. In another embodiment, the method further comprises covering the location of at least some of the via holes in a pattern of strips, whereby more of the via holes may be covered by the coating while reducing areas of the conductive landing pad covered by the coating. In another embodiment, the coating and removal process may be performed at the same time as when all other areas of the circuit board are coated and removed, such that a separate manufacturing step is not required.Type: ApplicationFiled: January 30, 2008Publication date: July 30, 2009Inventor: Atiq KHAN