Abstract: Hot melt adhesive pellets are melted and pressure pumped in a controlled application pattern on the substrate at the application site. The high frequency power supply, induction heated melting susceptor, pressure pump, and pattern control electronics are all contained in a single unit within adhesive projection distance.

Abstract: A magnetic film forming apparatus can form a magnetic film, especially a magnetic alloy film, selectively on a metal surface exposed on a surface of a substrate, such as a semiconductor wafer. The magnetic film forming apparatus comprises an electroless plating apparatus having a magnetic field generation apparatus for generating a magnetic field around and parallel to a substrate disposed such that the surface of the substrate is in contact with a plating solution in a plating tank.

Abstract: A serpentine tube used in the manufacture of a fluorescent lamp is coated with a reflective or phosphor material. A magnetic material and coating material slurry is placed within one end of a serpentine glass tube. A magnet is placed adjacent the magnetic material and coating material slurry and is moved in a path conforming to the shape of the serpentine tube. The magnet causes the magnetic material and coating material slurry to travel along therewith, coating a portion of the interior surface of the serpentine tube with a reflective, phosphor, or other material. In another embodiment of the invention, abrasive magnetic material is placed within the serpentine lamp for removing a previously coated material resulting in an aperture being formed. The present invention is particularly suited to the manufacture of serpentine fluorescent lamps that are used to illuminate flat panel displays.

Abstract: The magnetic recording medium provided is produced by forming a substrate having a nanoparticle layer comprising an array of nanoparticles, and an organic compound between said array of nanoparticles; irradiating the nanoparticle layer with an infrared beam to magnetize the nanoparticles; applying a magnetic field to the nanoparticle layer to orient easy axis of magnetization of the magnetic nanoparticles in a substantially uniform direction; and irradiating the nanoparticle layer with an ultraviolet beam to bind said organic compound to thereby produce a magnetic recording medium wherein easy axis of magnetization of the nanoparticles has been oriented in a direction substantially parallel to a direction at a particular angle with the substrate. The resulting magnetic recording medium experiences no deterioration of the underlying layer or the soft magnetic layer, and exhibits good magnetic properties.

Abstract: An endless belt includes a layer including at least a first composition and a second composition different from the first composition, a content ratio of the second composition relative to the first composition being changed in a layer thickness direction.

Abstract: Disclosed is an apparatus for electrifying spacers and an apparatus for scattering spacers using the same. For the purpose of maintaining a cell gap of a LCD, the spacer is electrified to have a first electrified voltage by a first electrifying pipe having a first curvature, and the spacer is electrified by a second electrifying pipe having a second curvature to have a second electrified voltage level high enough to prevent the spacers from being lumped. Thus, the spacer is not lumped by increasing an electrified voltage thereof, thereby preventing a quality of an image from being deteriorated, the spacer from being lost.

Abstract: A device (10) for the direct or indirect application of liquid or pasty application medium (16) to one or both sides of a material web (20), in particular of paper or board, comprises an applicator unit (12) which discharges the application medium (16) onto the material web (20) in the form of a free application medium jet (18). In this case, in the region of the applicator unit (12) there is provided a device (30) for producing an electric field, which exerts on the application medium jet (18) moving from the applicator unit (12) to the material web (20) a force which assists its movement. Additionally or alternatively, edge guiding elements can be provided, which guide the lateral edges of the application medium curtain (18) at least on part of its movement under the force of gravity.

Abstract: A powdery layer is formed on a first side of a web (W) which serves as a substrate by applying electrically charged particles on the web while a rotating grounding electrode is located at a second side of the web.

Abstract: An object of the present invention is to provide a manufacturing apparatus and method for a carbon nanotube, by which it is possible to efficiently synthesize a high purity carbon nanotube on an industrial basis.

Abstract: There is provided an apparatus for spin-coating a semiconductor substrate, including (a) a rotary table rotatable in opposite directions, (b) a nozzle dropping coating material onto a semiconductor substrate lying on the rotary table, (c) an electrode having a ring-shaped cross-section and disposed around the rotary table, and (d) a power source applying a voltage to the electrode, the voltage having an electric polarity opposite to an electric polarity of the coating material. Coating material dropped onto the semiconductor substrate is attracted to an electric field generated by the electrode around the semiconductor substrate. Hence, the coating material is not concentrated around a center of the semiconductor substrate, but is facilitated to uniformly spread over the semiconductor substrate, ensuring formation of a coating layer having a uniform thickness.

Abstract: Provided, among other things, is a re-circulating particle feed apparatus comprising: a circular conduit of dimensions suitable for circulating gas with suspended particles; a deposition station comprising an opening onto the conduit, into which opening an electrostatic chuck fits, with a deposition surface of the chuck available to the interior of the conduit; and a propulsion device for maintaining fluid and particle circulation through the conduit, wherein the propulsion device is adapted to maintain fluid and particle circulation at a rate that brings a deposition effective amount of particles within a range of electro-attractive influence at the deposition station.

Abstract: The present invention is generally directed to various processes and systems for forming layers and coatings on substrates, such as semiconductor wafers and solar cells. In one embodiment, the process of the present invention is directed to forming a layer on a substrate from a liquid precursor. The liquid precursor is atomized and exposed to light energy. Besides light energy, the parent material may also be exposed to an electric field and/or to sonic energy. In an alternative embodiment of the present invention a stress measurement device monitors stress in the substrate as a layer is deposited on the substrate. This stress measurement information is then sent to a controller for automatically controlling the amount of energy, such as light energy being emitted onto the substrate.

Abstract: A spray coating device for coating powder, comprising an electrode support (24) fitted with an electrically insulating tubular segment (26) running at least 1.5 cm from an electric contactor (34) into a powder duct (8).

Abstract: A system and method for directing metal or ceramic particles toward a substrate (18) in a vacuum chamber includes a powder hopper (11), an enclosure (12) containing multiple differentially pumped vacuum chambers (19), a charging lamp (13), a tube (14), multiple charging and heating diodes 15, and an electromagnetic field generating device (EFGD) (17). The hopper (11) holds metal or ceramic particles, the chambers (19) propel the particles through the tube (14) towards substrate (18) positioned close to the tube, charging lamp (13) charges the particles, diodes (15) are used to heat the particles, and the EFGD (17) controls the direction of the particles propelled out of the tube.

Abstract: A method and apparatus are presented for electrostatic deposition of dry powder to a tablet, capsule, or a specific area of any of a wide range of pharmaceutical substrates. The apparatus includes: a magnetic brush having a rotatable multi-pole magnetic core and a stationary outer shell; a developer supply for supplying a magnetic developer powder, consisting of a magnetic carrier particles and pharmaceutical dry powder particles, to the magnetic brush; a print head on the outer shell; a tablet or other pharmaceutical substrate arranged in spaced relation to the print head to define a pharmaceutical powder transfer region through which the substrate can be moved.

Abstract: A system for applying a fluid coating onto a substrate includes forming a fluid wetting line by introducing a stream of fluid onto a first side of the substrate along a laterally disposed fluid-substrate contact area. An electrical force is created on the fluid from an electrical field (originating from electrical charges which are on the second side of the substrate) that is substantially at and downstream of the fluid wetting line. The electrical field can be generated by charges that have been transferred to the second side of the substrate from a remote charge generator.

Abstract: Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

Abstract: The present invention relates to a device and method for dusting smooth or sheet-like products, comprising at least one duster for spraying an air/powder mixture on said products. In order to ensure efficient dusting with no dirt accumulation in the printer or the surrounding area, it is suggested that part of the powder particles be magnetized and means be provided for creating a magnetic field in the powder deposit area so that said powder particles are subjected to a force drawing them towards the product.

Abstract: The described device is introduced into a plastic container with a narrow opening and serves a plasma enhanced process for treating the inside surface of the container. The device (2) extends between the container opening and the container bottom along the container axis (X) and comprising a gas feed tube (23) for feeding a process gas into the container and permanent magnets (24) for establishing a stationary magnetic field inside the container. The magnets (24) form a column of superimposed magnets which is arranged inside the gas feed tube (23). The north and south poles of each magnet are positioned on opposite sides of the container axis (X). The device may also comprise cooling means (25) for cooling the gas feed tube and the magnets.

Abstract: An electrostatic dispensing system for dispensing flowable liquid material onto a moving substrate. The electrostatic dispensing system includes multiple liquid dispensers that are aligned along a common axis and supported in spaced, non-contacting relationship on one side of the moving substrate. Each of the liquid dispensers includes a valve to control the flow of fluid through the dispenser. An electrostatic field generator is supported in spaced, non-contacting relationship on the opposite side of the moving substrate to generate an electrostatic field through the moving substrate. The electrostatic field operates to attract flowable liquid material from dispensing outlets associated with the multiple liquid dispensers as a series of spaced, continuous streams or beads which intersect a surface of the moving substrate facing the liquid dispensers.

Abstract: There is provided an apparatus for spin-coating a semiconductor substrate, including (a) a rotary table rotatable in opposite directions, (b) a nozzle dropping coating material onto a semiconductor substrate lying on the rotary table, (c) an electrode having a ring-shaped cross-section and disposed around the rotary table, and (d) a power source applying a voltage to the electrode, the voltage having an electric polarity opposite to an electric polarity of the coating material. Coating material dropped onto the semiconductor substrate is attracted to an electric field generated by the electrode around the semiconductor substrate. Hence, the coating material is not concentrated around a center of the semiconductor substrate, but is facilitated to uniformly spread over the semiconductor substrate, ensuring formation of a coating layer having a uniform thickness.

Abstract: The present invention provides solid preparations having two or more colors or a pattern of two or more different colors which can solve the problems of the prior art including the complexity of production processes and the low strength of solid preparations. Specifically, an object of the present invention is to provide solid preparations coated with a continuous film coating layer having two or more different colors or a pattern of two or more different colors which preparations are obtained by irradiating a part of the film coating layer containing one or more colorants with light, a process for the preparation of such solid preparations, and a film coating agent therefor.

Abstract: Plant for powder coating the surfaces of objects with polymeric powder having a melting and softening temperature below 100° C. The polymeric powder includes a polymer curable under the influence of electromagnetic radiation. Objects to be coated are prepared to retain powder charged with static electricity. The objects are then sprayed with powder charged with static electricity and thereafter heated to a surface temperature of about 100° C. thereby melting the powder retained on the surface by exposure to infrared radiation and heated air. The objects are radiated by electromagnetic radiation for curing of the powder over the surface of the objects.

Abstract: A semiconductor device is fabricated by the steps of coating an underlayer formed on a semiconductor substrate with chemically amplified resist, exposing the resist to light, bringing the resist into contact with an alkaline developing solution with applying a magnetic field to the alkaline developing solution for conducting development to form a resist pattern, and etching the underlayer on the semiconductor substrate using the resist pattern as a mask.

Abstract: Cold-reduced flat-rolled low carbon steel strip is surface cleansed of iron fines, iron oxide particulate and associated debris which result from cold-reduction operations. Such ferromagnetic contaminants are permanently separated from the strip steel production and finishing system by continuous regenerative processing of alkali cleansing solution, in which contaminants are continuously filtered and concentrated and are flushed from a continuous-flow filtering apparatus for magnetically-assisted separation of such contaminants which are retained for complete and permanent disposal from the system, providing uniform cleansing solution, on a continuing basis, free of large-volume periodic dumping of contaminated solution, and free of interruption of operations for surface cleansing purposes.

Abstract: A method and apparatus for coating a paper or board web or the like (7) using a coating mix aerosol generated by means of an ultrasonic atomizer. The output power of a plurality of ultrasonic transducers (15) disposed proximate to a surface of the moving web (7) is passed via a vibrated beam (14) to a coating mix flow (2) flowing proximate to the web (5). Ultrasonic vibrations applied to the coating mix atomize the upper layer of the coating mix flow into an aerosol (11) which is emitted toward the web (7) and adheres thereto.

Abstract: A system (100, 100′, 100″) and method for robotic manipulation of objects (130) is provided wherein particulates (110, 110′) are agitated by the transfer of energy thereto to establish patterned granular motion of the particulates (110, 110′). The patterned granular motion of the particulates (110, 110′) forms standing waves (112). The objects (130) align themselves with the standing waves (112) and thus are dynamically arranged in a configuration established by the location of the standing waves (112). The location of the standing waves (112) can be predetermined by controlling the waveform of the signals applied to the energy application system (140). The predetermined waveforms are supplied from the signal source (150, 154) to the energy application system (140).

Abstract: A method and system are provided for adjusting a discharge width of a powder feeder. The system includes a supply hopper that is spaced from the powder feeder. The powder feeder includes a receiving opening and a discharge opening and at least one adjustable wall. Preferably, two adjustable walls are provided. Movement of the two adjustable walls provides variations in the width of the discharge opening and therefore facilitates use of the powder feeder on target volumes or target areas having different widths. A rotatable auger brush is in communication with the supply hopper for causing powder withdrawn from the supply hopper to be transported to the powder feeder and disposed uniformly across the receiving opening of the powder feeder. The brush is immersed within the powder and extends across the receiving opening of the powder feeder, and maintains a filled level powder feeder. The powder feeder is particularly well-suited for use in a coating apparatus, as well as a dual-side coating apparatus.

Abstract: A hot dip coating system comprises a bath of molten coating metal contained in a vessel having a strip passage opening located below the top surface of the bath. A metal strip is directed along a path extending through the strip passage opening and through the bath of molten coating metal, to coat the strip. An electromagnet is employed to prevent the escape of the bulk of the molten coating metal from the bath through the strip passage opening while permitting the strip to move along its path. Expedients are provided to reduce leakage of molten coating metal through the strip passage opening.

Abstract: A system for producing three dimensional components by bonding together successive layers of a porous material with droplets of a binder material. A binder printhead has an array of nozzles which controllably supply jets of binder material droplets to the layers of porous material. The printhead is scanned in a raster scan fashion over each layer of porous material along a first scan axis in one direction to provide first fast scanning paths of droplets. The printhead is then moved laterally of such one direction and is then moved along the fast-scan axis in the opposite direction to provide second fast scanning paths of droplets which are interlaced with the first scanning paths. The supply of the droplets to the porous material can be controlled so as to control the overlapping thereof to produce various desired surface and interior characteristics of the components.

Abstract: An apparatus for forming an electromagnetic field in a processing chamber, including a first pair of electrodes for generating a first electromagnetic field within the processing chamber and a second pair of electrodes for generating a second electromagnetic field within the processing chamber. The first and second pairs of electrodes are oriented so that the first and second electromagnetic fields are oriented generally perpendicular to each other. When energized, the first and second electromagnetic fields combine and may take the form of a lissajous pattern. When a gas is exposed to the combined electromagnetic field a plasma may be formed in the general shape of the combined electromagnetic field.

Abstract: Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising:an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing;a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; andan optical detection device for quantifying the amount of grains deposited.

Abstract: An apparatus for use in electrostatically applying coating material to an object includes a nozzle which directs a flow of coating material toward the object. A power supply unit provides an electric field to electrostatically charge the coating material. Control circuitry is provided to monitor the operating efficiency of the power supply unit and to provide an output signal when there is an impending failure of the power supply unit. The control circuitry monitors the relationship between an input current to the power supply unit and an output current from the power supply unit. When the relationship between the input current to the power supply unit and the output current from the power supply unit is outside of a predetermined range, the control circuitry is effective to provide an output signal to notify an operator that there is an impending power supply unit failure.

Abstract: A backup apparatus for an electronic circuit or part which is installed in a location where access is difficult. The apparatus includes a photoconnector that treats a component by a deposition of a material or by ionic implantation. The photoconnector includes a first light source for generating pulsed luminous energy and a first optical wave guide which has one end connected to the light source. A second light source is attached to the second end of the optical wave guide to receive the luminous energy emitted by the first source and transform it into a shockwave. At least one miniaturized photoionic head is associated with the second light source and diffuses the light supplied by the second light source. An automatic system controls emissions of luminous energy transmitted by the first light source along the optical wave guide.

Abstract: A plasma generating source for processing semiconductor integrated circuits is provided. The plasma generating source is configured to control the amount of electromagnetic energy and the distribution of the electric and magnet energies coupled to the plasma. The plasma generating source comprises a plasma containing region and a source of electromagnetic energy for generating a plasma. An electrostatic shield is disposed between the source of electromagnetic energy and the plasma containing region. The electrostatic shield has a plurality of openings therethrough configured to control the amount and distribution of electromagnetic energy coupled from the source into the plasma containing region. The openings may be configured in a variety of ways to control the magnitude and distribution of electromagnetic energy coupled to the plasma.

Abstract: An apparatus for holding molten metal in a container having an opening at the bottom thereof comprising an electromagnet for generating a horizontal magnetic field in a lower part of the molten metal in the container and a conductive block for guiding part of eddy currents induced in the molten metal by the generation of the horizontal magnetic field, to flow outside the molten metal.

Abstract: An apparatus 100 is provided with: a supply section 1 for supplying a paper base material P; a storage section 21 for storing a white fine particles coating; a development section 2 having a sleeve 22 for holding the white fine particles coating from the storage section 21, a blade 23 for controlling a thickness of the white fine particles coating held by the sleeve 22, and a charge drum 24 for absorbing the white fine particles coating from the sleeve 22; a transfer section 3 for electrostatically transferring the white fine particles coating absorbed by the charge drum 24 onto the paper base material P; a fixing section 4 having a heat roller 41 and a press roller 42, and for fixing the white fine particles coating on the paper base material P; and a ejection section 5 for ejecting the paper base material P fixed the white fine particles coating by the fixing section 4. By using the apparatus 100, the thermal transfer image receiving sheet S on which a high quality image can be formed, is produced easily.

Abstract: In-line flat-rolled steel cleansing and finishing methods and apparatus are disclosed which enable flat-rolled steel, as supplied with surface areas contaminated with iron fines and other debris from gauge reduction operations, to be continuously processed in-line, free of interruptions for cleansing purposes. Continuous-strip methods and apparatus are disclosed which enable in-line continuous-strip cleansing in a manner which decreases iron fines carried by strip surfaces to a desired level while providing for continuous uniform cleansing. Carry-over of iron fines from the cleansing operations so decreases such that iron content of a coating means is decreased resulting in improved corrosion-protection coating. Diminishing iron content in a hot-dip galvanizing bath increases efficiency of aluminum additions and diminishes iron-aluminum dross.

Abstract: Apparatus for treating a material having a miniaturized photoionic head including at least one optical fiber (2), a pulsed light source permitting the treatment of the material (10), a light injector for injecting light into one end of the fiber and a miniaturized photoionic head (8) having a ring (16). One side of the ring is fixed to the other end of the fiber, and the other side of the ring is against the material. This ring confines a plasma forming, due to the pulsed light, in the space defined by the ring, from a material or a substance (20) placed in the space, for the treatment of the material such as surface treatment of metals.

Abstract: An electrically self-propelled pulsating multi-directional magnetic brush having an insert for use in toner deposition or removal devices associated with imaging machines of the electrostatic type (dry or liquid), the magnetic type, and the reprographic type. The insert further has skewed magnetic sections, made of permanent magnets or electro-magnets, therearound. The insert is used in conjunction with a permanent or electro-magnet and is contained within a rotatably mounted drum to provide an insulation for the drum and to further provide a driving force to uniformly rotate and multi-directionally pulsate developer mixture material around the drum.

Abstract: The invention is directed to a process and apparatus for coating the surf of elongated materials, in particular steel strips, with a metallic coating. The material is guided in one direction through a tank holding the molten coating material. The tank has a through-duct surrounded by an electric field below the surface of the molten bath. An electromagnetic force is generated in the region where the through-duct opens into the melt, which electromagnetic force is equal to or greater than the metallostatic pressure, directed oppositely thereto vectorially and quantitatively proportional to the product of the cross-sectional area of the inlet opening and the metallostatic pressure, and in which the dwell of the strip in the melt can be controlled independently of the rate of feed of the strip.

Abstract: An apparatus for producing an object using stereolithography includes a container, a bath of a liquid or powder material filling the container and having a free surface, the material being solidifiable under the action of electromagnetic radiation, a support for positioning the object relative to the free surface of the bath so as to form a layer of the material adjacent to the free surface, a device for solidifying the layer using electromagnetic radiation, a wiper device extending along a first direction across the free surface and drive means for moving the wiper device across the free surface along a second direction.

Abstract: A process and a device for coating the surface of strip material, especially non-ferrous metal and steel strip, with a metal coating, wherein the material is conducted without reversal of direction through a container holding the molten coating material. The container has a passage duct below the level of the melting bath, in which induction currents are induced by an electromagnetic travelling field and produce, in interaction with the electromagnetic travelling field, an electromagnetic force for restraining the coating material. In order to stabilize the melt in the passage duct as well as in the container, and in order to attain, to a large extent, a counterbalance between hydrostatic and electromagnetic forces, a constant direct or alternating current field is directed opposite to the travelling field in the area near the container, damping the movement in the coating material.

Abstract: A coating apparatus and method for applying a coating to a workpiece, comprising:a vessel to contain molten metal;an induction coil disposed about said vessel; and,temperature regulation means;wherein, in use, said induction coil induces a magnetic field within said vessel such that a meniscus of molten metal is formed above said vessel, through which said workpiece is passed for coating, whilst said temperature regulation means regulates temperature of said molten metal and/or controls the meniscus height of said meniscus.

Abstract: A method and an apparatus for producing a product having a magnetically formed pattern, capable of forming any desired pattern in diversely different shapes with a clear visual recognizability, at high speed, by a simple procedure, and a painted product produced by these method and apparatus. The product is produced by forming a paint layer from a paint medium mixed with magnetic non-spherical particles, and applying a magnetic field containing the lines of magnetic field in a shape corresponding to the desired pattern to be formed.

Abstract: An extrusion coating device has a die fitted with a paint sink fed with a paint, a slit extending from the paint sink to the distal end of the die, and a smoothing plate provided in the vicinity of the distal end of the die. The paint is extruded onto a continuously travelling support so as to be coated on the support. The smoothing plate is formed of a magnetic material and is magnetized to an opposite polarity to that of a magnet disposed via a gap of a pre-set length from the smoothing plate. The support is caused to travel along the end face of the smoothing plate so that the paint is coated on the support. The coating device enables a good coating film of a reduced film thickness to be produced while enabling high speed coating.

Abstract: A conveyor device for applying a high voltage to a work transported in a coating booth includes a conveyor device main body having a running base running in the coating booth and an electrode attachment attached to the running base being insulated therefrom for carrying the work and applying a high voltage to the work, an electromagnetic wave transmitter disposed in the coating booth for transmitting electromagnetic waves to the running base during running in a high voltage application zone and a low voltage generator means for receiving electromagnetic waves from the electromagnetic transmitter means and a high voltage generator for stepping-up a low voltage outputted from the low voltage generator and supplying a high voltage to the electrode attachment, mounted on the running base.

Abstract: In-line flat-rolled steel cleansing and finishing apparatus is disclosed which enable flat-rolled steel, as supplied with surface areas contaminated with iron fines and other debris from gauge reduction operations, to be continuously processed in-line, free of interruptions for cleansing purposes. Continuous-strip apparatus is disclosed which enable in-line continuous-strip cleansing in a manner which decreases iron fines carried by strip surfaces to a desired level while providing for continuous uniform cleansing. Carry-over of iron fines from the cleansing operations so decreases such that iron content of a coating means is decreased resulting in improved corrosion-protection coating. Diminishing iron content in a hot-dip galvanizing bath increases efficiency of aluminum additions and diminishes iron-aluminum dross.

Abstract: A method of delivering a substance into a material mass including the steps of measuring a quantity of a carrier fluid and a material to be delivered, mixing the carrier fluid and the material to be delivered, and subjecting the mixture to a magnetic influence for increasing a permeability and effectiveness thereof by affecting the organization of the molecules of the mixture. Finally the mixture is introduced to the material mass for penetrating therein and direct, substantial absorbing of the mixture by the material mass.

Abstract: A plasma processor includes a cylindrical processing chamber storing a semiconductor wafer to be processed, a slot antenna, wound around the outside of a peripheral wall of the processing chamber, for feeding an electromagnetic wave of several tens MHz to the chamber, and an electromagnetic coil, provided on the outside of the processing chamber, for generating plasma in a plasma generating section due to electron cyclotron resonance by applying a magnetic field of 30 gausses or less to said processing chamber. The slot antenna has an elongated conductive plate having a length of about 1/2 of the wavelength of the electromagnetic wave, and an elongate slot formed in the conductive plate.