Photoelectric Sensor Patents (Class 118/691)
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Patent number: 11959868Abstract: Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first electrode. In an embodiment the first electrode comprises first fingers. In an embodiment, the gas concentration sensor further comprises a second electrode. In an embodiment, the second electrode comprises second fingers that are interdigitated with the first fingers.Type: GrantFiled: February 3, 2021Date of Patent: April 16, 2024Assignee: Applied Materials, Inc.Inventors: Xiaopu Li, Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati, Philip Allan Kraus, Kenric T. Choi, William John Durand
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Patent number: 11656075Abstract: Measurement apparatuses and methods are disclosed for generating high-precision and -accuracy gas concentration maps that can be overlaid with 3D topographic images by rapidly scanning one or several modulated laser beams with a spatially-encoded transmitter over a scene to build-up imagery. Independent measurements of the topographic target distance and path-integrated gas concentration are combined to yield a map of the path-averaged concentration between the sensor and each point in the image. This type of image is particularly useful for finding localized regions of elevated (or anomalous) gas concentration making it ideal for large-area leak detection and quantification applications including: oil and gas pipeline monitoring, chemical processing facility monitoring, and environmental monitoring.Type: GrantFiled: August 11, 2021Date of Patent: May 23, 2023Assignee: Bridger Photonics, Inc.Inventors: Aaron Thomas Kreitinger, Michael James Thorpe
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Patent number: 11285728Abstract: In various examples, colorant sensors can include a printing device comprising a hopper to receive a colorant, a supply to receive the colorant from the hopper, an aperture disposed between the hopper and the supply, a light emitter to emit light that passes through the aperture, and a light sensor located on the opposite side of the aperture relative the light emitter to sense a portion of the emitted light that passes through the aperture to permit determination of whether colorant present in the aperture based on the portion of the emitted light sensed by the light sensor.Type: GrantFiled: April 13, 2018Date of Patent: March 29, 2022Assignee: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.Inventors: Sean Daniel FitzGerald, Jeff Luke, Mathew Lavigne
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Patent number: 11256192Abstract: The control unit controls supply of toner from the toner container to the developing device. The control unit is capable of executing a normal supply in which toner is supplied from the toner container to the developing device based on a detection result of the toner amount detection sensor, and a toner installation mode in which a larger amount of toner than the normal supply is supplied from the toner container to the developing device. When the toner installation mode is selected, the control unit calculates a toner amount T1 required for executing the toner installation mode and a toner remaining amount T2 in the toner container, and prohibits the execution of the toner installation mode when T1>T2.Type: GrantFiled: November 30, 2020Date of Patent: February 22, 2022Assignee: KYOCERA DOCUMENT SOLUTIONS INC.Inventor: Yoichi Uekuri
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Patent number: 10921239Abstract: An analysis system is provided which enables an optical analysis with high accuracy. An analysis system A in which light is radiated on a liquid sample to analyze the sample includes a reaction part 1 which includes a reaction tank 12, an inlet port 14, and an outlet port 16, an analysis part 2 which includes an analysis cell 22a, at least one light source part 24, and at least one light receiving part 26, and a flow path tube 3 which includes a first flow path 32 and a second flow path 34. A measurement part 222 of the analysis cell 22a includes a first measurement portion 2221 and a second measurement portion 2222, which have mutually different sectional areas.Type: GrantFiled: December 3, 2018Date of Patent: February 16, 2021Assignee: HITACHI, LTD.Inventors: Shunsuke Kono, Takuya Kambayashi, Toshimitsu Noguchi
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Patent number: 10649365Abstract: A developing device for forming an image by developing an electrostatic latent image formed on an image carrier with a developer, includes: a developing container that accommodates the developer; a developing roller that faces the image carrier, is disposed adjacent to the developing container, and conveys the developer accommodated in the developing container to the image carrier, and a developer discharging part that is provided in the developing container and discharges a part of the developer, wherein a discharge amount of the developer discharged by the developer discharging part is controlled on the basis of a charge amount of a toner included in the developer.Type: GrantFiled: October 12, 2018Date of Patent: May 12, 2020Assignee: Konica Minolta, Inc.Inventors: Wataru Watanabe, Shota Sakurai, Tomohiro Kawasaki, Takenobu Kimura, Ryoei Ikari
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Patent number: 10289024Abstract: A method for estimating an amount of toner remaining in a reservoir of a replaceable unit for an image forming device according to one example embodiment includes receiving by processing circuitry pulses from a magnetic sensor. Each pulse is indicative that the magnetic sensor detected a magnet on a moving paddle positioned in the reservoir. The processing circuitry counts the number of the pulses received from the magnetic sensor. Upon receiving a request from a controller of the image forming device, the processing circuitry sends to the controller of the image forming device the count of the pulses received from the magnetic sensor and resets the count of the pulses received from the magnetic sensor.Type: GrantFiled: January 3, 2018Date of Patent: May 14, 2019Assignee: Lexmark International, Inc.Inventors: Michael Craig Leemhuis, Jeffrey Allen Abler, Charles Alan Bast, Todd Alan Dutton, David Anthony Schneider
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Patent number: 9285709Abstract: A developing device includes: a container, a stirring member, a developing roller, a toner concentration detection section, a stirring plate, and an elastic member. The stirring plate is attached to the rotary shaft of the stirring member in a manner such as to be rotatable together with the rotary shaft, and has a tip part located in the radial direction at a predefined distance from the detection surface. The elastic member has elasticity, is attached to the stirring plate in a manner such as to surround a one-side surface, an another-side surface, and the tip part in a rotation direction of the stirring plate, has a sufficient length in the radial direction enough to abut the detection surface, and makes sliding-contact with the detection surface while rotating together with the stirring plate.Type: GrantFiled: July 29, 2015Date of Patent: March 15, 2016Assignee: KYOCERA Document Solutions Inc.Inventors: Yu Sasaki, Yoshinobu Yoneima
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Publication number: 20140137799Abstract: A deposition apparatus and a method of forming a thin film are provided. The deposition apparatus includes a reaction gas supply unit supplying a reaction gas, a buffer unit temporarily storing the reaction gas supplied from the reaction gas supply unit, and a deposition unit forming a thin film by using the reaction gas supplied from the buffer unit.Type: ApplicationFiled: January 9, 2012Publication date: May 22, 2014Applicant: LG INNOTEK CO., LTD.Inventors: Yeong Deuk JO, Moo Seong KIM, Seok Min KANG
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Patent number: 8544408Abstract: A system for applying a metal particulate onto an object is disclosed herein. The system can include sources for a metal particulate and a hot pressurized air in communication with a spraying device having a nozzle assembly configured to: receive, mix, and expel the metal particulate and the hot pressurized air. The hot pressurized air can form a venturi effect within the nozzle assembly to draw in the metal particulate. The nozzle assembly can include a nozzle cap with a tapered nozzle having a helical channel, and an outer tip connected to the nozzle cap having a venturi effect chamber, a mixing conduit, and rifling. The helical channel can form a vortex flow of the metal particulate, and the mixing conduit can form a vortex flow of the air metal mixture. A nozzle orifice can expel the air metal mixture to onto the object to form a coating thereon.Type: GrantFiled: March 23, 2011Date of Patent: October 1, 2013Inventor: Kevin Wayne Ewers
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Patent number: 8440473Abstract: A method for etching features into an etch layer in a plasma processing chamber is provided. An optically timed deposition phase is provided comprising providing a flow of deposition phase gas, detecting the presence of deposition gas within the plasma processing chamber, providing RF energy for forming a plasma from the deposition phase gas in the plasma processing chamber, and stopping the flow of the deposition gas into the plasma processing chamber. An optically timed etching phase is provided, comprising providing a flow of an etch gas, detecting the presence of the etch gas within the plasma processing chamber, providing RF energy for forming a plasma from the etch gas in the plasma processing chamber, and stopping the flow of the etch gas into the plasma processing chamber.Type: GrantFiled: June 6, 2011Date of Patent: May 14, 2013Assignee: Lam Research CorporationInventors: Qing Xu, Camelia Rusu, Brian K. McMillin, Alexander M. Paterson
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Patent number: 7946247Abstract: In a measurement mechanism for continuously measuring a thickness of a coating layer, provided in an apparatus for forming the coating layer on a conductive elongate base material in a coating treatment base station while the base material is fed, a sensing portion for measuring a capacitance value of the coating layer is arranged before and after the base station, and tension applied to the base material at the sensing portion is set to be greater than tension applied to the base material at the base station. Thus, in forming the coating layer on the elongate base material while the base material is continuously fed, variation in a feeding speed is suppressed, influence of sway of a measurement surface in a direction of thickness at the thickness sensing portion during feeding is minimized, and a thickness of the coating layer can be measured with higher accuracy.Type: GrantFiled: May 8, 2007Date of Patent: May 24, 2011Assignee: Sumitomo Electric Industries, Ltd.Inventors: Hideaki Awata, Katsuji Emura, Kentaro Yoshida
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Patent number: 7927472Abstract: To provide a method of controlling film thickness of dielectric multilayer film, such as optical thin film, with high precision, an optical film thickness controlling apparatus and a dielectric multilayer film manufacturing apparatus that can control the film thickness based on the same method, and dielectric multilayer film manufactured using the controlling apparatus or manufacturing apparatus. An optical film thickness controlling apparatus includes a film formation device 15 having a rotatable substrate 23 and a sputtering target 28, a photodiode 16 that detects each of a plurality of monochromatic light beams applied to the rotatable substrate along a radius thereof at predetermined intervals, and an A/D converter 17, in which a movable shutter 29 that moves along the direction of the radius of the rotatable substrate 23 to shut off film formation on the substrate 23 is provided between the substrate 23 and the target 28.Type: GrantFiled: June 29, 2007Date of Patent: April 19, 2011Assignee: Ulvac, Inc.Inventors: Haruo Takahashi, Kouichi Hanzawa, Takafumi Matsumoto
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Patent number: 7588643Abstract: A method and an apparatus for measuring the amount (CW) of a coating (2) on a paper web (1). The amount (CA) of at least one component in the coating (2) on the paper web (1) is measured and the composition (CC) of the coating (2) to be transferred to the paper web (1) is determined. The amount (CW) of the coating (2) on the paper web (1) is determined on the basis of the amount (CA) of at least one component in the coating (2) on the paper web (1) and the composition (CC) of the coating (2) to be transferred to the paper web (1).Type: GrantFiled: April 15, 2003Date of Patent: September 15, 2009Assignee: Metso Automation OYInventor: Markku Mäntylä
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Patent number: 7485189Abstract: This invention provides a thin film deposition process making it possible to form a thin film having a desired composition with good reproducibility and high efficiency; a thin film deposition device therefore; a FTIR gas analyzer used in the thin film deposition process; and a mixed gas supplying device used in the thin film deposition process. The thin film deposition process comprises the steps of mixing a plurality of organic metal gases in a gas mixing chamber and supplying the mixed gas into a reaction chamber to deposit a thin film on a substrate positioned in the reaction chamber, wherein the mixture ratio between/among the organic metal gases supplied into the gas mixing chamber is measured with a FTIR gas analyzer fitted to either the gas mixing chamber or the reaction chamber and then on the basis of results of the measurement, the flow rates of the organic metal gases are individually adjusted.Type: GrantFiled: February 26, 2001Date of Patent: February 3, 2009Assignee: Horiba, Ltd.Inventors: Tsukasa Satake, Koji Tominaga, Hiroshi Funakubo
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Patent number: 7087118Abstract: A coating film forming apparatus for forming a film by applying a coating solution to a substrate, which is provided with a cassette section, coating unit, developing unit, pre-treatment/post-treatment units and a main arm for transferring the substrate between the respective units. In the coating unit, provided is a coating section in which a resist is applied on the substrate in a manner of single stroke by intermittently moving the substrate in a Y-direction and by moving a nozzle in an X-direction, and provided is a reduced-pressure drying section for drying under reduced pressure the substrate after being applied, and further provided is equipment for removing the coating film adhered to a periphery of the substrate. Additionally, when the reduced-pressure drying section is arranged outside the coating unit, the main arm is covered with a cover so that the inside thereof is under a solvent atmosphere.Type: GrantFiled: March 16, 2005Date of Patent: August 8, 2006Assignee: Tokyo Electron LimitedInventors: Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita, Hirofumi Ookuma, Masami Akimoto
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Patent number: 6946157Abstract: In a method of monitoring the formation of a coating on a single particle (P), an apparatus is used which comprises means (2,5,6,9) for arranging said particle (P) at a given spatial location, and a fluid supply unit (3) adapted to apply a coating fluid to the particle (P) such that the coating is formed. Further, the apparatus has a measurement unit (4) which is adapted to perform a spectrometric measurement on the coating during formation thereof, and to derive a measurement value of at least one principle parameter related to the coating. This, such principle parameters, for example the thickness, thickness growth rate and physical and/or chemical properties related to the quality of the coating, as well as heat, mass and momentum transfer, can be continuously and non-invasively monitored during the coating process on the single particle (P).Type: GrantFiled: January 8, 2001Date of Patent: September 20, 2005Assignee: AstraZeneca ABInventors: Staffan Folestad, Ingela Niklasson Björn, Anders Rasmuson, Daniel Ström
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Patent number: 6863730Abstract: An apparatus including: a movement device that moves an object to be coated; a slot die coater equipped with a position sensor mounted on at least one end of the slot die coater and which slot die coater controllably dispenses coating material onto the moving object; and at least one servor motor-controller system in electrical contact with the position sensor, wherein the position sensor senses the position of the slot die coater relative to the object and wherein the at least one servor motor-controller system adjusts the position of the slot die coater relative to the object if the position of the slot die coater relative to the moving substrate deviates from a set of predetermined coordinates.Type: GrantFiled: February 19, 2003Date of Patent: March 8, 2005Assignee: Xerox CorporationInventors: Thomas A. Trabold, Robert F. Dunham, John M. Hammond
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Patent number: 6859629Abstract: A developer container for accommodating a developer used for developing an electrostatic latent image formed on an electrophotographic photosensitive member by a developing member for developing the electrostatic latent image includes, a first light-transmitting window for guiding detection light emitted from a light emitting member provided in a main body of an image forming apparatus into the developer container, a second light-transmitting window for guiding the detection light entering from the first light-transmitting window and passing through the developer container to a photosensing member provided in the main body of the image forming apparatus, in order to detect the remaining amount of the developer accommodated within the developer container when the developer container is mounted in the main body of the image forming apparatus, and a rotatable feeding member including a stirring blade for feeding the developer within the developer container toward the developing member when rotating, and for remoType: GrantFiled: October 29, 2002Date of Patent: February 22, 2005Assignee: Canon Kabushiki KaishaInventors: Koji Miura, Jun Miyamoto, Kojiro Yasui, Takeshi Arimitsu
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Publication number: 20030200924Abstract: A system and method for real time deposition process control based on resulting product detection, where the system and method detect an amount of at least one reaction product in real time, while the deposition process is being performed, the detected amount of reaction product is compared with a reference amount, and a comparison result is fed back in real time to adjust a supply of one or more reactants. The system and method provide real time control over the deposition process and/or reduce the number of wafers produced that do not meet processing target values.Type: ApplicationFiled: April 30, 2002Publication date: October 30, 2003Inventors: Chang-Hyun Ko, Jai-Dong Lee, Jin-Hee Lee
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Patent number: 6522009Abstract: A new method of electroless plating a metal layer onto a semiconductor substrate in the manufacture of an integrated circuit device has been achieved. A semiconductor substrate is provided. A metal layer is electroless plated onto the semiconductor substrate. Light is shielded from the semiconductor substrate to thereby eliminate the photoelectric effect in the semiconductor substrate during the electroless plating. A new apparatus for electroless plating a metal layer onto a semiconductor substrate is achieved. The apparatus comprises, first, an electroless plating tank capable of holding an electroless plating solution. The sidewalls and bottom of said electroless plating tank prevent light intrusion into the electroless plating solution during a plating process. Second, a wafer fixture capable of suspending a semiconductor substrate wafer in the electroless plating solution in the electroless plating tank during the plating process is provided.Type: GrantFiled: April 8, 2002Date of Patent: February 18, 2003Assignee: Megic CorporationInventor: Jin-Yuan Lee
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Patent number: 6370342Abstract: A toner concentration sensor has a pair of optical members for optically coupling a light emitting device and a photodetector. The optical members are disposed with a gap therebetween for introducing liquid developer to measure transparency of the liquid developer and to evaluate the toner concentration. The optical member is coated with a chemical adsorption film as an anti-fouling film including at least one of organosilane compounds expressed by the following formulas: wherein each of R1, R2 and R3 represents an organic functional group, and each of X1, X2 and X3 is a desorption group.Type: GrantFiled: October 16, 2000Date of Patent: April 9, 2002Assignee: NEC CorporationInventor: Tomohiro Masumura
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Patent number: 6364953Abstract: A method for making an aerogel film includes the steps of performing a gelation reaction of a metal alkoxide on a substrate to prepare a substrate with a wet-gel film, and converting the wet-gel film into an aerogel film by a supercritical or sub-critical drying process of the substrate with the wet-gel film, wherein the degree of gelation of the wet-gel film is controlled to be a predetermined value at the start of the supercritical or sub-critical drying process. Aerogel films having uniform qualities are produced by the supercritical or sub-critical drying process in one lot.Type: GrantFiled: May 23, 2000Date of Patent: April 2, 2002Assignee: Kabushiki Kaisha Kobe Seiko Sho.Inventors: Nobuyuki Kawakami, Yoshito Fukumoto, Kenichi Inoue, Kohei Suzuki, Takashi Kinoshita, Katsuhiro Uehara
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Patent number: 6061535Abstract: A developing cartridge for developing a latent image formed on the photosensitive member, wherein the developing cartridge is detachably mountable to a main assembly of an electrophotographic image forming apparatus, the developing cartridge includes a cartridge frame; a developing member for developing a latent image formed on the photosensitive member; a driving force receiving member for receiving driving force for rotating the developing member from the main assembly of the apparatus when the developing cartridge is mounted to the main assembly, the driving force receiving member being exposed from a portion of the cartridge adjacent one longitudinal end of the developing member; a developing bias contact for receiving a developing bias to be applied to the developing member from the main assembly when the cartridge is mounted to the main assembly; a toner accommodating portion for accommodating the toner to be used for development by the developing member; a first light-transmissive member and a second lType: GrantFiled: July 2, 1998Date of Patent: May 9, 2000Assignee: Canon Kabushiki KaishaInventors: Kanji Yokomori, Kazuhiko Kanno, Tachio Kawai
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Patent number: 6033503Abstract: Methods and apparatus for detecting imperfections in adhesive coatings formed on fingers of beams are disclosed. The present invention relates, in one aspect, to a method for preparing a first work piece for joining with a second work piece. The method involves forming a finger in the first work piece, then applying an adhesive coating on the finger. A determination is made to determine whether the adhesive coating is defective through the used of a sensing mechanism which is arranged to scan across a portion of the finger. In one embodiment, a defect in the adhesive coating on the finger is defined as a void.Type: GrantFiled: March 19, 1999Date of Patent: March 7, 2000Assignee: Steven K. RadowiczInventors: Richard D. Radowicz, Steven K. Radowicz
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Patent number: 6016408Abstract: A developing cartridge for developing a latent image formed on a photosensitive member, which is detachably mountable to a main assembly of an electrophotographic image forming apparatus, includes a developing member for developing a latent image formed on the electrophotographic photosensitive member with toner; a toner accommodating portion for accommodating the toner to be used by the developing member; first and second light transmitting portions provided in the toner accommodating portion; a first light guide for directing, to the first light transmitting portion, light emitted by a light emission member provided in the main assembly; and a second light guide for directing the light having passed through the second light transmitting portion to a light receiving element provided in the main assembly.Type: GrantFiled: October 3, 1997Date of Patent: January 18, 2000Assignee: Canon Kabushiki KaishaInventors: Kouji Hashimoto, Yoshiro Tsuchiya, Kenji Matsuda
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Patent number: 5991559Abstract: A control apparatus for controlling a concentration of a solute having a predetermined optical absorption characteristic is disclosed. A cell holding member has a plurality of cells formed therein, one of which is placed at a predetermined detection position so that the solution flows through that cell. A concentration of the solute is detected based on the intensity of light that has passed through the cell placed at the predetermined detection position. A cell changer replaces the cell with another cell by moving the cell holding member when a detected concentration has not changed as expected.Type: GrantFiled: October 7, 1998Date of Patent: November 23, 1999Assignee: NEC CorporationInventors: Junichi Suetsugu, Kazuo Shima, Toru Yakushiji
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Patent number: 5980975Abstract: The present invention is directed to providing thin-film-coated substrate manufacturing methods and apparatus that make it possible to manufacture large thin-film-coated substrates such as anti-reflection filters using relatively small production facilities. The thin-film-coated substrate manufacturing methods pertaining to the present invention area capable of producing thin films on substrates to be coated as large as the film formation area by using a film formation monitor or monitors placed outside of the film formation area or displaceably mobile therein, measuring the thickness of the monitor thin film or films formed on the film formation monitor or monitors, and controlling the film coating process based on the measured thickness of the monitor thin film or films. It is also capable of increasing the productivity of the manufacturing process through increased flexibility in the arrangement of substrate or substrates to be coated inside the film formation area.Type: GrantFiled: April 19, 1996Date of Patent: November 9, 1999Assignee: Toray Industries, Inc.Inventors: Fumiyasu Nomura, Takeshi Saito
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Patent number: 5916626Abstract: An HMDS supplying apparatus capable of sensing the flow of hexamethyldisilazane through a flowmeter and to control the amount thereof which is flowing, to thereby prevent a lowering of productivity due to inadequate or excessive flow amounts. The HMDS supplying apparatus includes a carrier gas supplier for supplying a carrier gas for HMDS; a container connected to the carrier gas supplier adapted for containing HMDS therein; a flowmeter for controlling the amount of flowing HMDS supplied together with the carrier gas from the container; and an HMDS processor for depositing HMDS supplied via the flowmeter on the surface of a wafer; wherein the apparatus further includes: an indicator for indicating the level of HMDS in the flowmeter; and an optical sensing device having an optical source and an optical sensor, for controlling the flow of HMDS by sensing whether the indicator is located at an optimum position.Type: GrantFiled: December 24, 1996Date of Patent: June 29, 1999Assignee: Samsung Electronics Co., Ltd.Inventors: Yun-jeon Moon, Seong-il Kim, Jeong-suk Kim, Won-yeal Sin
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Patent number: 5897240Abstract: A concentration measuring device, in an electrographic printer, for measuring the concentration of developer liquid supplied from a mixing container to a development device. The concentration measuring device includes a variable thickness body installed between the mixing container and the development device for changing the thickness of a developer liquid passage for light to transmit; a light emitting device installed a predetermined distance from one side of the variable thickness body for emitting light; and a light detector installed a predetermined distance from the other side of the variable thickness body for detecting the light from the light emitting device and measuring the concentration of developer liquid according to the amount of received light.Type: GrantFiled: June 15, 1998Date of Patent: April 27, 1999Assignee: Samsung Electronics Co., Ltd.Inventor: Yong-baek Yoo
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Patent number: 5860041Abstract: A device for measuring toner concentration of developer housed in a developing system, which developer comprising toner and carrier. The device has a transparent detection window facing the interior of the developing system, which transparent detection window comprising a first transparent plate member and a second transparent plate member being in contact with the first transparent plate member. The first transparent plate member is made of a material which becomes charged, through its contact with the second transparent plate member, with the opposite polarity from the charge polarity of the toner and the second transparent plate member is made of a material which becomes charged, through its contact with the carrier, with the same polarity from the charge polarity of the toner, so that the second transparent plate member strongly repels the toner having the same polarity charge and adherence of the toner to the second transparent plate member is reliably prevented.Type: GrantFiled: November 5, 1997Date of Patent: January 12, 1999Assignee: Minolta Co., Ltd.Inventors: Masaki Tanaka, Kuniya Matsuura, Toshifumi Watanabe
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Patent number: 5810928Abstract: A method of measuring gas component Concentrations of special material gases for semiconductor, and a semiconductor equipment are provided. The method and apparatus can be incorporated in a gas pipe line system in an inline manner, and measure the component and concentration of a gas flowing through a gas pipe line or a gas with which the gas pipe line system is filled, thereby eliminating any erroneous connection. In the method of measuring gas component concentrations of special material gases for semiconductor, as means for attaining the objects, an infrared gas detector is disposed in a gas pipe line between a gas cylinder containing a special material gas for semiconductor and a semiconductor producing section, so that the gas component and concentration are measured in an inline manner. An apparatus for supplying special material gases for semiconductor is also provided.Type: GrantFiled: November 16, 1995Date of Patent: September 22, 1998Assignees: Mitsubishi Corporation, Horiba Co. Ltd., Stec, Inc.Inventors: Hiroyuki Harada, Toshihiko Uno, Shigeyuki Akiyama, Tetuo Shimizu
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Patent number: 5682574Abstract: A developing apparatus for developing a latent image formed on an electrophotographic photosensitive member include a toner container for containing toner to be used for developing the latent image, a light transmitting member for transmitting light for detecting that an amount of the toner in the toner container is smaller than a predetermined level, a cleaning member for cleaning the light transmitting member, a stirring member reciprocating device for reciprocating a stirring member, and a cleaning member reciprocation device for reciprocating the cleaning member with a degree of displacement larger than that of the stirring member.Type: GrantFiled: January 30, 1995Date of Patent: October 28, 1997Assignee: Canon Kabushiki KaishaInventors: Haruhisa Oshida, Keiji Okano, Masahide Kinoshita, Koji Takahashi, Yasushi Shimizu, Akira Domon
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Patent number: 5678126Abstract: A filming attenuation correcting toner concentration sensor assembly and method of controlling in a container, a concentration of a mixture that includes a light absorbing substance and a clear liquid carrier in solution, while correcting the effects of container filming.Type: GrantFiled: September 30, 1996Date of Patent: October 14, 1997Assignee: Xerox CorporationInventor: Darrel R. Rathbun
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Patent number: 5625857Abstract: In an image forming apparatus using an electro-photographic process, using a plurality of colors of toner including black toner, a reflectance of a base medium on which a toner image is formed is higher than that of black toner itself and lower than that of color toner. A toner deposit amount sensor provided in the image forming apparatus has a light-receiving element provided in the regular reflection direction from a toner image on the base medium. The light-receiving element has a wide light-receiving area so as to receive at least a part of irregularly reflected light besides regularly reflected light. The light-receiving element is then stored in a container for preventing the element from being contaminated by scattered toner, except the time of toner deposit amount measurement. Measurement characteristics of the toner amount sensor are corrected when being stored in the container by using a correction plate provided in the container.Type: GrantFiled: January 5, 1995Date of Patent: April 29, 1997Assignee: Hitachi, Ltd.Inventors: Akira Shimada, Toru Miyasaka, Nobuo Tokoro, Shin-ya Sato
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Patent number: 5621221Abstract: An apparatus and method for detecting an empty condition of toner cartridges containing toner for copiers, fax machines, printers and the like is disclosed. The cartridges may be mounted to a rotary developing device. According to one embodiment, when a toner cartridge has been rotatably positioned to a developing position, an empty condition is detected by emitting light into the toner cartridge and detecting the light coming out of its bottom. To accomplish this detection, a light source and a light sensor are fixedly located near a bottom corner of the toner cartridge at the developing position. Light is emitted into the toner cartridge at a predetermined oblique angle with respect to a side wall of the toner cartridge. Light exits out from the bottom wall if a predetermined amount of toner does not exist in the toner cartridge. Due to the oblique angle, the distance between the light source and the light sensor is substantially reduced and provides an accurate measurement.Type: GrantFiled: December 22, 1994Date of Patent: April 15, 1997Assignee: Ricoh Company, Ltd.Inventors: Tadashi Shinohara, Kouichi Noguchi, Eiichi Sasaki, Kouichi Irie
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Patent number: 5617188Abstract: A developing apparatus has a rotatable developing unit having a plurality of developing devices each provided with a containing portion for containing a developer and a carrying member carrying the developer, a light emitting element for applying light toward the containing portion, and a light receiving element provided discretely from the developing unit and common to the plurality of developing devices and for receiving the light transmitted through the containing portion.Type: GrantFiled: November 1, 1995Date of Patent: April 1, 1997Assignee: Canon Kabushiki KaishaInventor: Mitsugu Inomata
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Patent number: 5601649Abstract: Disclosed herein is an apparatus for manufacturing an oxide superconducting film employing laser ablation method. This apparatus has a thin film forming chamber having a laser-transparent laser entrance window, a target being provided in the thin film forming chamber and containing components of an oxide superconductor, a laser beam source for irradiating the target with a laser beam from the exterior of the thin film forming chamber through the laser entrance window, and apparatus for controlling power of the laser beam which is applied to the target for preventing the power of the laser beam, being applied to the target, from reduction by contamination of the entrance window caused by scattered particles. According to the present invention, it is possible to form an oxide superconducting film having high and uniform characteristics even if a long time is required for film formation, thereby attaining a remarkable effect in improvement of superconductivity of a large area oxide superconducting film.Type: GrantFiled: June 29, 1995Date of Patent: February 11, 1997Assignee: Sumitomo Electric Industries, Ltd.Inventors: Kousou Fujino, Satoshi Takano, Noriyuki Yoshida, Tsukushi Hara, Hideo Ishii
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Patent number: 5534066Abstract: An apparatus for processing a layer on a workpiece includes a source of reactant fluid, a reaction chamber having a support for the workpiece and a fluid delivery apparatus for feeding an input fluid into the reaction chamber with the input fluid being utilized to process the material. An infrared sensor is adapted to cooperate with the fluid delivery apparatus for sensing the concentration of a component of the input fluid. The infrared sensor includes an infrared light source positioned to direct a beam of infrared light at an infrared light detector through the input fluid. The infrared light detector produces an electrical output signal indicative of the amount of light received by the detector and therefore not absorbed by the input fluid.Type: GrantFiled: October 29, 1993Date of Patent: July 9, 1996Assignee: International Business Machines CorporationInventors: James A. O'Neill, Michael L. Passow, Tina J. Cotler, Jonathan D. Chapple-Sokol, Richard A. Conti, Jyothi Singh
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Patent number: 5489338Abstract: An apparatus for manufacturing an oxide superconducting film employing laser ablation method having a thin film forming chamber having a laser-transparent laser entrance window, a target being provided in the thin film forming chamber and containing components of an oxide superconductor, a laser beam source for irradiating the target with a laser beam from the exterior of the thin film forming chamber through the laser entrance window, and a controller for controlling power of the laser beam which is applied to the target for preventing the power of the laser beam, being applied to the target, from reduction by contamination of the entrance window caused by scattered particles. According to the present invention, it is possible to form an oxide superconducting film having high and uniform characteristics even if a long time is required for film formation, thereby attaining a remarkable effect in improvement of superconductivity of a large area oxide superconducting film.Type: GrantFiled: July 26, 1993Date of Patent: February 6, 1996Assignee: Sumitomo Electric Industries, Ltd.Inventors: Kousou Fujino, Satoshi Takano, Noriyuki Yoshida, Tsukushi Hara, Hideo Ishii
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Patent number: 5402209Abstract: An apparatus includes a system controller which calculates a ratio of a first signal to a second signal and adjusts a control parameter of an electrophotographic reproduction process so that the density of fog indicated by the ratio is within a predetermined range. A first optical sensor outputs the first signal by detecting a reflectance of a non-image area on the photoreceptor between a developing unit and a transfer charger. A second optical sensor outputs the second signal by detecting a reflectance of a surface of the photoreceptor between a cleaning unit and a charger. The system controller controls developer including toner and carrier to be agitated when the ratio obtained after adjusting the control parameter is still outside the predetermined range. Since the density of fog is detected with accuracy by calculating the ratio, copy quality is stabilized even when temperature changes.Type: GrantFiled: August 5, 1993Date of Patent: March 28, 1995Assignee: Sharp Kabushiki KaishaInventors: Motoyuki Itoyama, Mitsuru Tokuyama, Toshiaki Ino, Kunio Ohashi
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Patent number: 5317369Abstract: An apparatus for detecting an amount of toner in a toner casing. A sensor detects the magnetic flux density of the toner in the toner casing and generates detection signals. A sampling device samples the detection signals. A selecting device selects a signal having the lowest value among the sampled signals. A device for setting up a threshold value determines the threshold value using the selected signal. A counting device counts the number of sampled signals lower than the threshold value. If the counted number is larger than a predetermined value, then an indicator lamp indicates that toner is lacking.Type: GrantFiled: September 17, 1992Date of Patent: May 31, 1994Assignee: Murata Kikai Kabushiki KaishaInventor: Keiichi Nakanishi
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Patent number: 5276481Abstract: An apparatus for optically measuring toner density, having a rotary member which rotates and retains a developer constituted by a toner and a carrier by magnetic force, a transparent detection window which is disposed at a position where the developer retained on the rotary member rubs said detection window through rotation of said rotary member, a detection device which illuminates the developer through the detection window and detects the amount of reflected light from the developer and the magnitude of variations of the amount in response to rotation of the rotary member, and a warning device which issues an abnormal warning when the magnitude is smaller than a predetermined reference value, and a method for optically measuring toner density by using the apparatus.Type: GrantFiled: May 13, 1992Date of Patent: January 4, 1994Assignee: Minolta Camera Kabushiki KaishaInventors: Naoyoshi Kinoshita, Kouichi Etou
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Patent number: 5270784Abstract: An image forming apparatus includes a measuring for measuring an amount of a toner agent deposited on the image carrier. The measuring device has measuring section facing the image carrier, and a conductive cover plate arranged between the measuring section and the image carrier. The cover plate is applied with a voltage whose polarity is equal to the polarity of the toner so that an electric field is generated between the image carrier and the cover plate. The electric field prevents the toner, dispersed from the image carrier, from reaching the measuring section. The toner may also be kept from adhering to the elements of the measuring section by placing a transparent plate between the image carrier and the measuring device.Type: GrantFiled: August 29, 1992Date of Patent: December 14, 1993Assignee: Kabushiki Kaisha ToshibaInventors: Rintaro Nakane, Jiro Egawa
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Patent number: 5253018Abstract: The present invention relates to a toner image density detecting mechanism for an image forming apparatus which includes an image bearing layer supported on a rotatable cylindrical member, a device for forming a plurality of toner reference patterns on the image bearing layer at respective positions which equally divide a circumference of the cylindrical member, a detector for detecting an image density of the toner image of the reference pattern, and a controller controlling an image forming condition in accordance with an output of the detector; wherein an average of the image densities is determined for use in a control operation of the controller. Preferably, the toner used has a reflective or absorbing rate not less than 1.5 times that of the image bearing layer.Type: GrantFiled: February 21, 1992Date of Patent: October 12, 1993Assignee: Canon Kabushiki KaishaInventors: Tatsuo Takeuchi, Koji Amemiya, Takao Ogata, Nobuatsu Sasanuma
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Patent number: 5216469Abstract: A developing device in an image forming apparatus has a developing sleeve through which a two-component toner material is applied onto a photosensitive surface. The developing device has an optical sensor assembly including a sensor casing opening towards the developing sleeve and closed by a transparent electroconductive windowpane to which one of two bias voltages is selectively applied for depositing or clearing toner on and off from the windowpane. The sensor assembly also includes an infrared light source for radiating infrared rays of light through the windowpane and a light receiving element for providing an output indicative of the density of toner deposited on the windowpane while the windowpane is electrically connected with the bias voltage source. A central processing unit operates in response to the output from the light receiving element to calculate the density of toner contained in the developing material. Any change in density of the toner in the developing material can be compensated for.Type: GrantFiled: May 14, 1991Date of Patent: June 1, 1993Assignee: Minolta Camera Kabushiki KaishaInventor: Takanobu Yamada
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Patent number: 5200021Abstract: A method for vapor deposition includes monitoring of growth of a semiconductor layer by way of in-situ monitoring. According to the invention, in-situ monitoring is performed by irradiating a light beam onto the surface of the growing layer in a direction nearly perpendicular to the surface. Growth parameters of the layer are detected by monitoring variation of the light reflected by the surface of the layer. A growth condition in a vapor deposition chamber is feedback controlled based on the detected growth parameter.Type: GrantFiled: October 31, 1988Date of Patent: April 6, 1993Assignee: Sony CorporationInventors: Hiroji Kawai, Syunji Imanaga, Ichiro Hase, Kunio Kaneko, Naozo Watanabe
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Patent number: 5200783Abstract: An image density correcting device for a color copying machine capable of producing monochrome copies and full color copies, the device including a toner density detecting means for detecting the toner density of a toner image transferred on a transfer medium; a toner density storing means for storing a predetermined reference value for the toner density; a toner density comparing/judging means for judging the toner density of the image by comparing the toner density detected by the toner density detecting means with the toner density reference value stored in the toner density storing means; and a toner density correcting means for correcting the toner density of the image based on the result of the comparison and judgment by the comparing/judging means, wherein the toner density is corrected after a black toner layer is formed in any non-black color detectable by the toner density detecting means, of areas where black toner layers are formed for monochrome copying with black toner.Type: GrantFiled: August 28, 1991Date of Patent: April 6, 1993Assignee: Sharp Kabushiki KaishaInventors: Yasutaka Maeda, Katsuhiro Nagayama
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Patent number: 5194297Abstract: A particle deposition system having an atomizer, wafer transport, sheath flow means, particle counter and computer control for accurately depositing a desired density of particles onto a surface. The sheath flow keeps an article clean, while the particle flux in the deposition chamber is rising from zero to an equilibrium state. The particle counter measures particle flux by sampling the atmosphere in the deposition chamber. The computer determines when the rate of change of particle flux is substantially zero and then actuates transport of the article completely or partially out of the sheath flow into the mist of falling particles. The computer also calculates the required deposition time for providing the article's surface with a desired particle density, actuating transport of the article back into the sheath flow after the desired density is reached. The operator of the system can specify particle size, desired density and full or partial coverage of the surface with particles.Type: GrantFiled: March 4, 1992Date of Patent: March 16, 1993Assignee: VLSI Standards, Inc.Inventors: Bradley W. Scheer, Paul A. Konicek
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Patent number: 5162131Abstract: A method is provided for measuring and regulating the quantity of coating in surface sizing or pigmenting of paper or board, wherein the coating agent is spread by means of a coating device in the form of a film onto the face of a roll in a size press. The film is transferred from the roll face onto the paper or board in the size press nip. A fluorescent marker agent is mixed into the roll coating or into the coating agent and the measurement of the coating quantity is carried out by means of X-ray fluorescence technique from the face of the size press roll before the film of coating agent is transferred onto the web.Type: GrantFiled: November 19, 1990Date of Patent: November 10, 1992Assignee: Valmet Paper Machinery Inc.Inventors: Rauno Rantanen, Juha Mykkanen, Markku Lummila