With Means To Prepare Work Surface For Coating Patents (Class 118/72)
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Publication number: 20110155444Abstract: A method of metallizing the surface of a substrate electrolessly, by spraying one or more oxidation-reduction solutions thereonto. The steps of this method include: a) physical or chemical treatment to reduce the surface tension of the substrate before metallization; b) electroless metallization of the surface of the substrate treated in step a), by spraying one or more oxidation-reduction solutions in the form of one or more aerosols thereonto; and c) formation of a top coat on the metallized surface. Compact devices for implementing this method and the products obtained are also disclosed.Type: ApplicationFiled: July 30, 2009Publication date: June 30, 2011Inventor: Samuel Stremsdoerfer
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Publication number: 20110147205Abstract: A method for producing nanostructured coatings on a substrate, comprising: preparing a nanocrystalline powder of a powder size comprised between 1 and 60 ?m; and combining cleaning the surface of the substrate and cold spraying the nanocrystalline powder on the surface of the substrate, and a system for producing nanocrystalline coatings on a substrate, comprising a spray head, a cleaning head and a handling system monitoring the spray head and the cleaning head relative to the substrate to be coated, the spray head being a first cold spray head, the first cold spray head depositing on the substrate at least one nanocrystalline powder, the cleaning head optimizing the surface being coated with the at least one layer of nanocrystalline powder.Type: ApplicationFiled: December 21, 2010Publication date: June 23, 2011Inventors: Daniel GUAY, Eric Irissou, Jean Gabriel Legoux, Lionel Roue
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Publication number: 20110129732Abstract: Embodiments of the invention contemplate forming an electrochemical device and device components, such as a battery cell or supercapacitor, using thin-film or layer deposition processes and other related methods for forming the same. In one embodiment, a battery bi-layer cell is provided. The battery bi-layer cell comprises an anode structure comprising a conductive collector substrate, a plurality of pockets formed on the conductive collector substrate by conductive microstructures comprising a plurality of columnar projections, and an anodically active powder deposited in and over the plurality of pockets, an insulative separator layer formed over the plurality of pockets, and a cathode structure joined over the insulative separator.Type: ApplicationFiled: July 19, 2010Publication date: June 2, 2011Applicant: APPLIED MATERIALS, INC.Inventors: Robert Z. Bachrach, Sergey D. Lopatin, Connie P. Wang, Donald J.K. Olgado
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Publication number: 20110129596Abstract: A deposition apparatus that improves deposition characteristics and the uniformity of a deposited layer, and a method of manufacturing an organic light emitting device using the deposition apparatus. The deposition apparatus includes: a base; a heat blocking layer formed on the base; a heat emitting layer patterned into stripes and formed on the heat blocking layer to heat a deposition material to be deposited; and a barrier rib formed and patterned on the heat blocking layer to define a space in which the deposition material is disposed.Type: ApplicationFiled: June 16, 2010Publication date: June 2, 2011Applicant: Samsung Mobile Display Co., Ltd.Inventors: Jung-Min Lee, Choong-Ho Lee, Yoon-Chan Oh, Soo-Jin Park
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Publication number: 20100326354Abstract: A substrate processing system includes a processing unit, a substrate loading unit, a substrate unloading unit, and a carrying unit. A carrying device has a constitution in which a suction portion suctioning and holding a substrate is rotatable about an arm portion provided in a base portion and the substrate is rotated in the state where the substrate is held by a holding portion. A coating device has a constitution in which a liquid material is ejected from a nozzle to both surfaces of the substrate rotating in an upright state.Type: ApplicationFiled: September 8, 2010Publication date: December 30, 2010Applicant: TOKYO OHKA KOGYO CO., LTD.Inventors: Tsutomu SAHODA, Futoshi SHIMAI, Akihiko SATO
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Patent number: 7849812Abstract: The present invention provides an automated continuous coating apparatus for coating industrial components such as porcelain, glass, and polymeric insulators. The apparatus consists of a several stage continuous inline operation. The stages are a cleaning operation, followed by drying and heating, coating, and curing.Type: GrantFiled: February 28, 2006Date of Patent: December 14, 2010Assignee: CSL Silicones Inc.Inventors: Farooq Ahmed, Faisal Huda, Seraj ul Huda, John Barr, Steve Moss
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Publication number: 20100304039Abstract: A processing device for coating a surface of a rudder unit of an aircraft includes a plurality of spatially delimited work stations, wherein each of the plurality of work stations are disposed in succession and are configured to produce an assembly line-like coating process, wherein the plurality of work stations. The work stations include a pretreating station configured to activate the surface so as to form an activated surface; a painting station disposed downstream of the pretreating station and configured to paint the activated surface with at least one layer of paint having a first color so as to form a painted surface and configured to dry the painted surface immediately after the painting; and a decorating station.Type: ApplicationFiled: May 27, 2010Publication date: December 2, 2010Applicant: AIRBUS DEUTSCHLAND GMBHInventors: Dirk BAUSEN, Daniel LAHIDJANIAN, Birgit KUHLENSCHMIDT, Karl HAUSMANN, Rolf BENSE
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Publication number: 20100291300Abstract: The invention provides a device and a method for coating wheel rims, which allow the production of both standard rims and special rims, configured as gloss-copied rims. The device comprises a pre-treating station that is followed by a powder priming station followed by a basecoat application station and a final coating station, in particular an acrylate powder station, the final coating station being coupled to both the powder priming station and the pre-treating station by at least one conveyor, respectively. The system permits a proportion of special rims to be introduced in addition to standard rims without any impairment of the spindle-synchronous operation of the device.Type: ApplicationFiled: August 21, 2009Publication date: November 18, 2010Inventor: Gerd Wurster
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Publication number: 20100192844Abstract: An apparatus and method for treating a substrate are provided. The apparatus includes a load port, an index module, a first buffer module, a coating/developing module, a second buffer module, a pre/post-exposure treatment module, and an interface module, which are sequentially arranged in a direction. The coating/developing module includes a coating module and a developing module, which are arranged in different layers. The pre/post-exposure treatment module includes a pre-treatment module and a post-treatment module, which are disposed at different layers. The pre-treatment module coats a protective layer on the wafer before an exposure process. The post-treatment module performs a wafer cleaning process and a post-exposure bake process after the exposure process. A robot for transferring the wafer is disposed in each of the pre-treatment and post-treatment modules.Type: ApplicationFiled: January 29, 2010Publication date: August 5, 2010Inventors: Dong Ho Kim, Jinyoung Choi, Jaeseung Go, Hyoung Rae Noh
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Publication number: 20100101526Abstract: A method of preparing the surface of a substrate (3) for applying a thermal spray coating (2), wherein recesses are introduced in the surface to be coated, which are subsequently shaped such that the created structures have undercuts. A web (4) having a flat plateau surface (4-1) is created by machining, which, starting at the center (5) of the plateau surface (4-1), is shaped into a widened region (6) such that roof-shaped projections (6?, 6?) directed opposite one another on both sides are created, which form undercuts (10) with the sides thereof facing the surface (3-1) of the substrate (3).Type: ApplicationFiled: October 23, 2008Publication date: April 29, 2010Applicant: Gehring Gmbh & Co. KGInventors: Michael Schaefer, Robert Vandermolen, Deny Tanis, Gerhard Flores
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Publication number: 20100093183Abstract: Provided are a unit for supplying chemical liquid, and apparatus and method for treating a substrate using the unit. A pre-wet, photoresist, and edge bead removal nozzles are mounted on a single nozzle body. Therefore, the equipment installing space can be saved as compared with a case where the nozzles are installed on respective nozzle arms, thereby making better use of a space for installing equipments.Type: ApplicationFiled: September 30, 2009Publication date: April 15, 2010Inventors: Dae Sung Kim, In Cheol Ryu
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Publication number: 20100071722Abstract: A film roll comprises an elongated substrate film for film deposition wound into a roll, the substrate film including: at least one elongated product-film portion having a pair of surfaces opposite with each other, with one of the surfaces serving as a surface for film deposition; and at least one cleaning-film portion connected to an end of the product-film portion and having a pair of surfaces opposite with each other, with at least one of the surfaces serving as a cleaning surface having a dust removal function.Type: ApplicationFiled: September 22, 2009Publication date: March 25, 2010Applicant: FUJIFILM CorporationInventor: Masami NAKAGAME
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Publication number: 20100050940Abstract: A substrate processing system includes a processing unit, a substrate loading unit, a substrate unloading unit, and a carrying unit. A carrying device has a constitution in which a suction portion suctioning and holding a substrate is rotatable about an arm portion provided in a base portion and the substrate is rotated in the state where the substrate is held by a holding portion. A coating device has a constitution in which a liquid material is ejected from a nozzle to both surfaces of the substrate rotating in an upright state.Type: ApplicationFiled: August 25, 2009Publication date: March 4, 2010Applicant: TOKYO OHKA KOGYO CO., LTD.Inventors: Tsutomu Sahoda, Futoshi Shimai, Akihiko Sato
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Publication number: 20100021985Abstract: A method of producing at least one of microscopic and submicroscopic particles includes providing a template that has a plurality of discrete surface portions, each discrete surface portion having a surface geometry selected to impart a desired geometrical property to a particle while being produced; depositing a constituent material of the at least one of microscopic and submicroscopic particles being produced onto the plurality of discrete surface portions of the template to form at least portions of the particles; separating the at least one of microscopic and submicroscopic particles comprising the constituent material from the template into a fluid material, the particles being separate from each other at respective discrete surface portions of the template; and processing the template for subsequent use in producing additional at least one of microscopic and submicroscopic particles.Type: ApplicationFiled: September 21, 2009Publication date: January 28, 2010Applicant: The Regents of the University of CaliforniaInventor: Thomas G. Mason
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Publication number: 20090301867Abstract: A system for processing a semiconductor substrate during fabrication of semiconductor devices provides a plurality of semiconductor substrate processing stations in a physically integrated system, as well as a semiconductor substrate transport system for transporting a semiconductor substrate between the respective processing stations. In particular, the processing system according to the present invention favors the use of liquid phase process steps, particularly deposition process steps, instead of gas or vapor phase processing. Even more particularly, the system contemplates deposition of a metallic barrier layer 30 on the semiconductor substrate in liquid phase.Type: ApplicationFiled: February 24, 2006Publication date: December 10, 2009Applicant: CITIBANK N.A.Inventors: Janos Farkas, Cindy Goldberg, Katie Yu, Srdjan Kordic
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Patent number: 7614272Abstract: A prespray processing method includes preparing a work surface for spray coating, roughing the work surface by pressing a tool against the work surface, having a material of the work surface displaced thereon to form a depression thereinto, and keeping the material of the work surface unremoved therefrom.Type: GrantFiled: September 16, 2005Date of Patent: November 10, 2009Assignee: Nissan Motor Co., Ltd.Inventors: Takashi Sekikawa, Masahiko Iizumi, Takashi Ogino, Kimio Nishimura, Eiji Shiotani, Hideo Takahashi
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Patent number: 7608304Abstract: A substrate carrying method for removing the electrical charges on a substrate and then carrying the substrate includes forming a conductive layer with conductivity on a part of the surface of the substrate, and carrying the substrate while supporting a conductive layer-forming region of the substrate by a grounded substrate supporting unit with conductivity.Type: GrantFiled: February 14, 2006Date of Patent: October 27, 2009Assignee: Seiko Epson CorporationInventor: Minoru Koyama
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Patent number: 7578882Abstract: A liquid dispensing module and nozzle or die tip for discharging at least one liquid filament. The nozzle includes a strand guide for guiding a substrate past the nozzle. The strand guide is a concave or rounded notch in the nozzle which receives and aligns a strand to allow accurate placement of a liquid such as adhesive.Type: GrantFiled: January 20, 2004Date of Patent: August 25, 2009Assignee: Nordson CorporationInventors: Michael W. Harris, Hubert Kufner, Joel E. Saine
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Publication number: 20090061644Abstract: A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.Type: ApplicationFiled: January 14, 2008Publication date: March 5, 2009Inventors: Tony P. Chiang, Sunil Shanker, Chi I. Lang
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Publication number: 20090053395Abstract: A method and a system for obtaining an image of a cross section of a specimen, the method includes: milling the specimen so as to expose a cross section of the specimen, whereas the cross section comprises at least one first portions made of a first material and at least one second portion made of a second material; smoothing the cross section; performing gas assisted etching of the cross section so as generate a topography difference between the at least one first portion and the at least one second portion of the cross section; coating the cross section with a thin layer of conductive material; and obtaining an image of the cross section; wherein the milling, smoothing, performing, coating and obtaining are preformed while the specimen is placed in a vacuumed chamber.Type: ApplicationFiled: April 15, 2008Publication date: February 26, 2009Inventor: Dror Shemesh
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Patent number: 7462240Abstract: A liquid dispensing module and nozzle or die tip for dispensing at least one liquid filament from a liquid discharge passage onto at least one moving strand. A strand guide is used for guiding each strand past the nozzle and/or locating each strand relative to the discharged liquid filament. The nozzle includes a process air outlet that supplies a stream of process air impinging each moving strand before the liquid filament is dispensed onto the strand.Type: GrantFiled: January 21, 2004Date of Patent: December 9, 2008Assignee: Nordson CorporationInventors: Michael W. Harris, Joel E. Saine
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Publication number: 20080280026Abstract: The present invention is directed to methods and systems for aligning and coating a medical device during a single coating cycle. A first section of an applicator may apply a contact force to surfaces of the medical device. The contact force may align and remove surface irregularities from the medical device prior to coating the medical device with coating. The coating may be resident on a second section of the applicator.Type: ApplicationFiled: May 8, 2008Publication date: November 13, 2008Applicant: BOSTON SCIENTIFIC SCIMED, INC.Inventors: Tim O,Connor, Dave McMorrow
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Publication number: 20080196659Abstract: A deposition method which deposits a CdS buffer layer on a surface of a solar cell from a process solution including all chemical components of the CdS buffer layer material. CdS is deposited in a deposition chamber by heating the surface of the solar cell absorber to cause the transfer of heat from the solar cell absorber layer to at least a portion of the process solution that is in contact with the surface. Used solution is cooled, and replenished in a solution container and redirected into the deposition chamber.Type: ApplicationFiled: February 25, 2008Publication date: August 21, 2008Inventor: Bulent M. Basol
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Publication number: 20080156257Abstract: A cluster tool is provided for the implementing of a clustered and integrated surface pre-cleaning of the surface of semiconductor devices. More particularly, there is provided a cluster tool and a method of utilization thereof in an integrated semiconductor device surface pre-cleaning, which is directed towards a manufacturing aspect in which a chamber for performing a dry processing chemical oxide removal (COR) on the semiconductor device surface is clustered with other tools, such as a metal deposition tool for silicide or contact formation, including the provision of a vacuum transfer module in the cluster tool.Type: ApplicationFiled: October 16, 2007Publication date: July 3, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Sadanand V. Deshpande, Ying Li, Kevin E. Mello, Renee T. Mo, Wesley C. Natzle, Kirk D. Peterson, Robert J. Purtell
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Patent number: 7364419Abstract: Disclosed is: (i) a mold-spraying apparatus of a molding system and/or (ii) a molding system having a mold-spraying apparatus, and/or (iii) a method of a mold spraying apparatus of a molding system, and/or (vi) a method of a molding system having a mold-spraying apparatus, amongst other things.Type: GrantFiled: March 23, 2007Date of Patent: April 29, 2008Assignee: Husky Injection Molding Systems Ltd.Inventors: Jacek Kalemba, Josef Graetz
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Publication number: 20080081123Abstract: A system and method for controlling curl in multi-layer webs. The method can include providing a coated web, bending the web to induce a strain or pre-curl in the web, and curing the coating to form a multi-layer web. Some coatings at least partially shrink when cured such that curing the coating induces a curl in the multi-layer web. Bending the web occurs prior to curing the coating, and the pre-curl can be configured to at least partially counteract the curl induced by curing to form a multi-layer web having a desired curvature. The system can include a curing section configured to cure a coating, and can further include a web bending section configured to bend the web to induce a strain in the web. The web bending section can be positioned upstream of the curing section such that the web is bent prior to the coating being cured.Type: ApplicationFiled: September 26, 2007Publication date: April 3, 2008Inventors: Ronald P. Swanson, Andrew J. Henderson
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Patent number: 7169260Abstract: A paper or paperboard web (W) is precalendered. A web that has undergone earlier dewatering stages is calendered to attain a suitable surface for the coating process. The web is calendered (C) one-sidedly in such a manner that the absorption level of the second side (W2) of the web entering the calendering, which is higher than the absorption level of the first side (W1), is reduced in the calendering nearly to the same level or at least to the same level with the first side (W1).Type: GrantFiled: June 20, 2001Date of Patent: January 30, 2007Assignee: Metso Paper, Inc.Inventors: Johan Grön, Kari Sipi
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Patent number: 7097711Abstract: An electrostatic flocking operation of a workpiece (5) is advantageously performed in a condition in which the moisture content of an adhesive layer formed on a surface of the workpiece (5) is kept at a favorable value by a humidifier (1). The humidifier (1) is provided between an electrostatic flocking chamber and an adhesive applicator which is disposed in the upstream side of the electrostatic flocking chamber. In the humidifier (1), a current of a moisture bearing air (2) is driven upon the adhesive layer of the workpiece (5).Type: GrantFiled: August 22, 2000Date of Patent: August 29, 2006Assignees: Mesac Corporation, Sumitomo CorporationInventors: Masaaki Abe, Teruyuki Tatsumi
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Patent number: 6946165Abstract: A method and device of treating an irregularly shaped article to prepare the article for painting is provided. The device includes a burner which can produce an adjustable flame tongue which can fit into crevices, openings and other irregular topographical features of an item to be painted or otherwise coated. The burner device further provides means to apply a grafting chemical on a freshly oxidized surface. Further, the invention provides means to colorize treated objects so that they may be recognized as having been treated. In another embodiment, the grafting chemicals may be enhanced with electrolytic solutions such that electrostatic methods of painting may be subsequently employed on the item. In an alternate embodiment, the burner is adapted to spray a powder inside of a generally enclosed flame, and is used in conjunction with chop guns to manufacture glass or carbon fiber preforms.Type: GrantFiled: October 2, 2003Date of Patent: September 20, 2005Assignee: FTS, LLCInventors: Russell Brynolf, Michael D. Elberson
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Patent number: 6881446Abstract: A method for production of endless plastic hollow profiles, in particular tubes, comprises several production stages for the plastic tube and a coating stage for a metal coating. A reduced pressure is provided in the coating stage, whereby the metal is transferred into the gas phase and deposited on the tube as a surface layer homogeneously bonded thereto.Type: GrantFiled: March 20, 2002Date of Patent: April 19, 2005Assignee: Ivt Installations - und Verbindungstechnik GmbH & CO KGInventor: Christoph Hennig
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Patent number: 6849124Abstract: An improved method and system for cleaning a cylinder of a printing press. One method involves soaking a strip of cleaning fabric on a press with a low volatility organic compound solvent. Excess solvent, if any, is removed to place the strip of cleaning fabric in functional equilibrium with the solvent. The cleaning fabric is then used to clean a cylinder. Alternatively, the strip of cleaning fabric is soaked on site by contacting the strip of cleaning fabric with the solvent and wrapping the strip of cleaning fabric into a cleaning fabric supply roll. The cleaning fabric is then brought in engagement with a printing press having a cylinder to be cleaned without disposing a sleeve around the fabric roll and without substantially disturbing the distribution of the solvent in the fabric roll and detrimentally affecting the cleaning ability of the fabric.Type: GrantFiled: June 15, 1998Date of Patent: February 1, 2005Assignee: Baldwin Graphics Systems, Inc.Inventors: C. Robert Gasparrini, Peter E. Anselmo, Walter H. Cano
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Patent number: 6830619Abstract: A method and apparatus for controlling a temperature of a microelectronic substrate. In one embodiment, the apparatus can include a substrate support configured to engage and support the microelectronic substrate. The apparatus can further include a temperature controller having one or more thermal links coupled directly with the substrate when the substrate is supported by the substrate support. The thermal links can maintain thermal contact with the substrate when the substrate is either stationary or mobile relative to the temperature controller. The temperature controller can heat or cool different portions of the substrate at different rates with one or more of several heat transfer devices, including liquid jets, gas jets, resistive electrical elements and/or thermoelectric elements.Type: GrantFiled: August 7, 2001Date of Patent: December 14, 2004Assignee: Micron Technology, Inc.Inventor: Paul D. Shirley
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Patent number: 6824613Abstract: A substrate processing apparatus can efficiently form, e.g. by electroless plating, an interconnects-protective layer on the surface of a substrate at a low initial cost for the apparatus and a low running cost without the need for a wide installation space. The substrate processing apparatus includes a loading/unloading and cleaning area accommodating a first transfer robot which has a hand adapted for handling a dry substrate and a hand adapted for handling a wet substrate, a loading port which loads a substrate cassette that houses a substrate, and a cleaning unit for cleaning a substrate. A plating treatment area accommodates a second transfer robot which has a back surface-attracting type of hand provided with a reversing mechanism, a pretreatment unit for carrying out pretreatment of a substrate before plating, and a plating treatment unit for carrying out plating treatment of the substrate.Type: GrantFiled: May 30, 2002Date of Patent: November 30, 2004Assignee: Ebara CorporationInventors: Naoki Dai, Masaya Seki, Akihiro Yazawa, Toshio Yokoyama, Akira Owatari
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Publication number: 20040221871Abstract: A semiconductor wafer processing apparatus (10) includes a front-end robot (28), a wafer scrubber/dryer (30), a moisture detector (34) and a load/lock chamber (38, 40). The front-end robot (28) moves a wafer to be processed between the wafer cassette (21-24), the wafer scrubber (30), the moisture detector (34) and the load/lock chamber (38, 40). Optionally, the load/lock chamber (38, 40) may include an additional moisture detector. The load/lock chamber (38, 40) functions as an interface to a vacuum processing chamber (50, 52, 54) for performing various deposition processing steps where introduction of moisture would be destructive to the wafer.Type: ApplicationFiled: May 7, 2003Publication date: November 11, 2004Inventors: Matthew F. Fletcher, Lesley A. Smith, Olivier G. Vatel, Olubunmi O. Adetutu
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Publication number: 20040202787Abstract: A spray nozzle system is useful for applying imageable materials onto substrates. The system may be used for on-site fabrication of lithographic printing surfaces for use in printing. A wash nozzle and vacuum port are integrated with the spray nozzle for use in cleaning the printing residues from a used printing surface in preparation for a subsequent print job. The integrated nozzle assembly is useful in coating and cleaning operations, performed either on-press or off-press, and enables the reuse of a single printing substrate in a number of print jobs.Type: ApplicationFiled: March 3, 2003Publication date: October 14, 2004Applicant: Creo Inc.Inventors: Julian Y. Chia, Fernando Lopes, Bradley J. F. Palmer
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Patent number: 6767406Abstract: A painting apparatus includes a conveyor having incrementally spaced attachment structures configured to secure objects thereon for painting and being movable to move the attachment structures between consecutive incremental positions in a downstream direction. The distance between consecutive incremental positions is generally equal to an incremental spacing between consecutive attachment structures. A washing station is disposed beneath the conveyor and is operable to clean objects disposed therein. A painting station downstream of the washing station includes a paint reservoir disposed beneath the conveyor and which contains a volume of paint. The reservoir can be raised to dispose the object within the volume of paint and lowered to thereby allow the object to be conveyed downstream from the painting incremental position. A heating station downstream of the paint reservoir applies heat to objects in a heating incremental position.Type: GrantFiled: January 9, 2003Date of Patent: July 27, 2004Assignee: Ames True Temper, Inc.Inventor: Donald Vitale
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Patent number: 6660086Abstract: A coating apparatus and method are disclosed that applies a coating to a product in a uniform and controlled manner. The coating apparatus comprises a feeding stage, an optional pre-treatment stage, at least one coating stage and a finishing stage. The coating stage(s) comprise a coating material feeder and a coating device. The coating device includes an aperture conforming to the perimeter of a substrate to be coated in a first and second dimension. As the substrate passes through the aperture, coating material is applied in a uniform and consistent layer ranging from 0.001″ to 0.250″. The coating material also back fills minor surface imperfections and blemishes on the substrate to achieve a consistent finish across the whole area where coating material is applied. The coating device includes first and second shell portions. The first shell portion has a concave surface surrounding the aperture portion.Type: GrantFiled: March 6, 2000Date of Patent: December 9, 2003Assignee: Innovative Coatings, Inc.Inventors: Kendall W. Prince, Gordon L. King, Roderick Hughes, Richard B. Flora
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Publication number: 20030221612Abstract: There is provided a substrate processing apparatus which can efficiently form, e.g. by electroless plating, an interconnects-protective layer on the surface of a substrate at a low initial cost for apparatus and a low running cost without the need for a wide installation space.Type: ApplicationFiled: May 30, 2002Publication date: December 4, 2003Inventors: Naoki Dai, Masaya Seki, Akihiro Yazawa, Toshio Yokoyama, Akira Owatari
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Patent number: 6610373Abstract: In a device for forming magnetic film which deposits magnetic material on a substrate 12, a device is provided which, before the magnetic film is formed in a magnetic film-forming chamber 11, cleans one or both of the film-forming face and reverse face of the substrate 12 in a cleaning processing chamber 13. The cleaning mechanism carries out cleaning by placing a substrate on a horseshoe-shaped insulator substrate-holding part 51 which moves up and down, and emission of gas from the reverse face of the substrate and the like is brought about by generating Ar plasma between the upper periphery of the substrate, the substrate and a lower insulator 61 of the substrate.Type: GrantFiled: October 10, 2001Date of Patent: August 26, 2003Assignee: Anelva CorporationInventors: Daisuke Nakajima, Koji Tsunekawa, Naoki Watanabe
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Publication number: 20030116179Abstract: An apparatus for chemically treating a metal part which includes an immersion tank containing a liquid chemical treatment solution, a conveyor conveying parts over the immersion tank, immersing and removing the part and at least one spray nozzle assembly located above the immersion tank which is supported on a track extending to a side wall of the tank and permitting maintenance of the spray nozzle assembly without draining the tank.Type: ApplicationFiled: December 10, 2002Publication date: June 26, 2003Inventors: Richard A. Jarvis, Eduardo E. Vazquez, Clive Snell, David J. Cole
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Patent number: 6576567Abstract: In a film deposition method of depositing a film by adhering an organometallic fluid onto a to-be-processed body such as a semiconductor wafer and causing a pyrolytic decomposition reaction to occur, an organic solvent such as heptadecane is first applied onto the wafer. At this time, since heptadecane has favorable wettability to the wafer, it efficiently permeates over the entire wafer and flows into holes and trenches without an occurrence of bubbles. Next, an organic metal such as a fluid mainly containing, for example, (hfac)Cu+1(tmvs) is applied onto wafer W. At this time, since the heptadecane that is first applied is a solvent for the organic metal, the organometallic fluid is highly adaptive to heptadecane, it efficiently permeates over the entire wafer W, and evenly flows into holes etc. This allows filling-in to be performed without the development of vacancies.Type: GrantFiled: April 30, 2001Date of Patent: June 10, 2003Assignee: Applied Materials, Inc.Inventors: Yuichi Wada, Hiroyuki Yarita, Hisashi Aida, Naomi Yoshida
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Patent number: 6562139Abstract: An apparatus for finishing marine vessel surfaces including track-mounted robots, movable relative to the vessel being finished. The robots are controlled by a computer, with each robot having a plurality of tools attachable to the robots both for mapping the surface contours of the vessel and for painting or otherwise finishing the surface.Type: GrantFiled: January 3, 2002Date of Patent: May 13, 2003Assignee: Visions East, Inc.Inventor: John Stephen Morton
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Patent number: 6551442Abstract: A method of producing a semiconductor device having a multilayered wiring conductors and a system for producing the same. The nonuniformity of SOG coating film effectively suppressed and various treatments are simple and less time-consuming. A wiring conductor is formed on a semiconductor substrate, and an insulating layer covering the wiring conductor and the semiconductor substrate is formed, and the insulating layer is then subjected to a wet etching prior to the formation of SOG layer, thereby to increase a wettabiltity by the coating solution on the insulating layer.Type: GrantFiled: January 23, 2001Date of Patent: April 22, 2003Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Kojiro Yuzuriha
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Patent number: 6544337Abstract: A system and method for finishing a series of golf balls is disclosed herein. The system automatically transfers each of the golf balls from station to station on the system. The system has at least one coating station that has at least one spray gun that moves in relation to a golf ball being conveyed through the coating station. The spray gun moves in a track extending from a position below the golf ball to a position above the golf ball. The system has a transfer means that includes a series of transport pucks. Each transport puck has a plurality of shafts with spindles attached to the top of each of the shafts. Each spindle holds a golf ball for processing through the system. The spindles are rotated at relatively high rates during the coating process. In order to reduce tip marks on the finished golf ball, the golf balls are transferred from each spindle utilizing a high pressure gas. The system may be used to coat each golf ball with a basecoat, an indicia and a topcoat.Type: GrantFiled: October 3, 2001Date of Patent: April 8, 2003Assignee: Callaway, Golf CompanyInventors: Walter Skrabski, Steven C. Crast, Brian J. Webb, Michael G. Lucero, Ramon B. Dineros, Dennis O'Lenick
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Publication number: 20030034578Abstract: A manufacturing method of a polyurethane foam injected with strand mats and a device for increasing the volume of the strand mats. The method comprises the steps of: increasing the volume of each of the strand mats to weaken the cohesion between glass fibers in each of the strand mats; continuously supplying and transferring the volume-increased strand mats; spraying a polyurethane foam solution on the continuously transferred strand mats; and foam molding the polyurethane foam solution in which the strand mats are immersed, into a polyurethane foam. Because the cohesion between the glass fibers in the strand mat is weakened and the volume of the strand mat is increased, the polyurethane foam solution uniformly permeates into the strand mats. As a result, the productivity of the polyurethane foam is improved and the variations in a variety of the mechanical properties are minimized.Type: ApplicationFiled: July 2, 2002Publication date: February 20, 2003Applicant: HAN KUK FIBER GLASS CO., Ltd.Inventors: Jong Sik Kim, Young Soo Kwon, Jung Meung Roh
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Patent number: 6513435Abstract: A process for modifying the surface of a solid substrate includes modifying the surface with at least one oxidizing flame and modifying the surface with at least one silicatising flame. The process is particularly beneficial in preparing glass and other surfaces for printing thereon.Type: GrantFiled: April 19, 2001Date of Patent: February 4, 2003Assignee: ISIMAT GmbH SeibdruckmaschinenInventor: Peter Detzner
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Patent number: 6514340Abstract: The present invention provides a lubricant coat forming apparatus for forming a dry coat of water dry type lubricant on the surface of each of cold plastic working materials. The apparatus includes a heating unit for heating the cold plastic working materials to a predetermined temperature, a lubricant applicator for applying the lubricant on the surfaces of the cold plastic working materials heated at the heating unit, and a drying unit for drying the lubricant applied on the surfaces of the cold plastic working materials by applying cooling air stream to them. The cooling air stream has a temperature lower than that of the cold plastic working materials heated by the heating unit.Type: GrantFiled: September 7, 2000Date of Patent: February 4, 2003Assignee: Okaya & Co., Ltd.Inventors: Kimio Momose, Mamoru Yamamoto, Seiichi Akimoto, Ryosuke Fukuchi, Kenichirou Ikeda, Kazuhiro Matsushita
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Publication number: 20020166504Abstract: An apparatus for cleaning a mold die set includes a pair of brushes, a pair of vacuum holes, and multiple nozzles. One of the brushes is positioned to scrub a first surface of the mold die set, and the other of the brushes is positioned to scrub a second surface of the mold die set to separate a residue from the first and second surfaces of the mold die set. The vacuum holes receives the separated residue from the first and second surfaces of the mold die set, and through the nozzles, a parting compound is provided to coat the first and second surfaces of the mold die set. The apparatus further includes multiple air holes through which air is blown to the first and second surfaces of the mold die set. An apparatus for semiconductor manufacturing includes a mold die set having a first surface and a second surface and a mold die set cleaner that can remove a residue from the first and second surfaces of the mold die set and coat a parting compound on the first and second surfaces.Type: ApplicationFiled: December 20, 2001Publication date: November 14, 2002Inventor: Cheol Joon Yoo
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Patent number: 6436556Abstract: The invention relates to a method and a device for the production of a strip-like metallic composite material by the high-temperature dip coating of a metallic carrier strip, consisting of a metallurgic vessel for receiving the liquid depositing material, through which the carrier strip is capable of being led in a preferably vertical run-through direction by means of pairs of rollers arranged on the entry and the exit side, and of a preheating device for the carrier strip, said preheating device being located upstream of the metallurgic vessel. At the same time, the preheating device (41) is arranged in a housing (61) which is arranged in the entry region upstream of the metallurgic vessel (11) and surrounds the carrier strip (21) and into which the medium coming from a media supply (52) is capable of being introduced via at least one feed (51) led into the housing.Type: GrantFiled: August 11, 2000Date of Patent: August 20, 2002Assignees: SMS Demag AG, Thyssen Krupp Stahl AGInventors: Wolfgang Bleck, Rolf Bünten, Frank Friedel, Oliver Picht, Wolfgang Reichelt, Wilhelm Schmitz, Dieter Senk, Paul Splinter, Ulrich Urlau
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Patent number: 6432200Abstract: An apparatus is provided for making mirrors having enhanced reflective layer resistance to corrosion. The reflective layer of the mirror, typically silver, is contacted, preferably simultaneously, with a first solution containing a specific cation and a second solution containing a specific anion, or alkaline material which forms hydroxyl ions, the specific cation and specific anion or hydroxyl ion reacting to form a water insoluble precipitate on the silver surface. The mirror may then be painted to provide additional corrosion resistance to the mirror. The apparatus device for forming the precipitate eliminates the need for a device to form a copper layer on the silver surface and the device may be incorporated into existing mirror production lines as a replacement for the copper layering device. Also provided are mirrors made using the apparatus of the invention. A preferred cation containing solution contains tin (e.g., SnCl2) and a preferred anion containing solution contains hydroxyl ions (e.g, NaOH).Type: GrantFiled: November 29, 2000Date of Patent: August 13, 2002Assignee: Lilly Technologies, Inc.Inventor: Joseph Soltys