With Heating, Cooling Or Heat Exchange Means Patents (Class 134/105)
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Publication number: 20130025636Abstract: [Problem] To provide a substrate treatment device which can more efficiently heat and more efficiently use a treatment solution to treat the surface of a plate-shaped substrate.Type: ApplicationFiled: January 20, 2011Publication date: January 31, 2013Inventors: Yoshiaki Kurokawa, Koichi Hamada, Nobuo Kobayashi, Yuji Nagashima
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Patent number: 8360137Abstract: A regenerative heat exchanger is disclosed and described for gas streams that perform heat exchange between one another using a buffer that is continuously immersed in the gas streams. The buffer is cleanable by a pivotable blowing arm that uses spray nozzles to clean the buffer. The blowing arm has an axis that is positioned parallel to the flow direction of the gas streams across the buffer and allows for the use of two blowing arms which extend in a mirror image opposite to one another. The spray nozzles each distribute compressed air and/or pressurized water.Type: GrantFiled: October 3, 2008Date of Patent: January 29, 2013Assignee: Balcke-Dürr GmbHInventor: Manfred Flender
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Publication number: 20130019908Abstract: A bioremediation device (10) for degrading hydrocarbons on components, the bioremediation device having a housing (18), a basin (28) partially seating within the housing with the basin (28) including an upper condensation chamber (39) to permit vapour from a lower basin portion (35) to enter and to condense to be returned to the lower basin portion (37). A control module (46) is immersed in the lower basin portion (37) and has a heater (52), a pump (56,76), a filter (74) and a valve (58) for directing fluid either to the filter (74) or to an aeration device (44).Type: ApplicationFiled: January 4, 2011Publication date: January 24, 2013Inventor: Jacques St-Pierre
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Publication number: 20130014788Abstract: The invention relates to a high-pressure cleaning appliance, comprising a heatable heat exchanger for heating a liquid that can be discharged by the high-pressure cleaning appliance, a motor having a drive shaft that defines a drive axis, a pump unit for increasing the liquid pressure, a blower wheel for generating a combustion air flow, and a fuel pump for delivering a fuel to the heat exchanger, wherein the pump unit, the blower wheel, and the fuel pump are disposed along the drive axis and can be driven by means of the drive shaft and form an assembly together with the motor. In order to improve such a high-pressure cleaning appliance in such a manner that it has a more compact construction and a smaller space requirement, the assembly of the high-pressure cleaning appliance according to the invention, with regard to a height direction thereof, is disposed below the heat exchanger.Type: ApplicationFiled: March 30, 2012Publication date: January 17, 2013Applicant: Alfred Kaercher GmbH & Co. KGInventor: Werner Schwab
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Patent number: 8349091Abstract: A teat cup cleaning device having a heating chamber (2), provided with a discharge (3) which is closable by a valve (4), and arranged for connection to a teat cup. A filling device (20) is provided for filling the heating chamber (2) with an amount of cleaning liquid (11), and a heating arrangement is arranged to heat the contents of the heating chamber (2) to a temperature T higher than the boiling point Tk of the cleaning liquid at ambient pressure. The valve (4) opens in this situation to deliver the heated cleaning liquid to the teat cup. The teat cup cleaning device also comprising a connecting line (17) between a liquid supply and the discharge.Type: GrantFiled: May 23, 2008Date of Patent: January 8, 2013Assignee: Maasland N.V.Inventors: Karel Van Den Berg, Gerard Mostert
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Publication number: 20130003063Abstract: A conveying apparatus for conveying an object, the object having at least a non-opaque portion, including a light source, an optical detector and a backing measurement apparatus, the light source for illuminating the object, the optical detector for acquiring information at least relating to at least one chromatic characteristic of the non-opaque portion, the backing measurement apparatus including a backing material, a backing support and a plurality of rollers, the backing material exhibiting at least one of determined chromatic characteristics and determined optical characteristics, the backing support for supporting the backing material, the plurality of rollers for rolling the backing material over the backing support, wherein light emitted by the light source optically interacts with the backing material consistently through the non-opaque portion.Type: ApplicationFiled: December 12, 2011Publication date: January 3, 2013Applicant: ADVANCED VISION TECHNOLOGY (A.V.T.) LTDInventors: STEVEN C. HEADLEY, Alan M. Then, Rui Xu, Mark Rasmussen
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Publication number: 20130000684Abstract: A cleaning method of cleaning a joint surface of a processing target substrate separated from a superposed substrate, while the processing target substrate is placed inside an annular frame and held by a tape bonded to a surface of the frame and a non-joint surface of the processing target substrate, the cleaning method including: a placement step of placing a cleaning jig to face the processing target substrate such that a supply surface of the cleaning jig for supplying a solvent for the adhesive onto the joint surface of the processing target substrate covers the joint surface and a distance between the supply surface and the joint surface is a predetermined distance; and a cleaning step of then supplying the solvent between the supply surface and the joint surface and diffusing the supplied solvent over the joint surface by a surface tension.Type: ApplicationFiled: June 15, 2012Publication date: January 3, 2013Applicant: TOKYO ELECTRON LIMITEDInventors: Yasutaka SOMA, Naoto Yoshitaka, Hiroshi Komeda, Eiji Manabe, Osamu Hirakawa, Masatoshi Deguchi, Takeshi Tamura
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Publication number: 20130000678Abstract: A method and system is described for removing contamination from a conductive particulate matter sensor. The sensor has a substrate with two electrodes on the substrate configured to collect particulate matter between the electrodes, thereby establishing an electrically conductive path through collected particulate matter between the electrodes that can be detected by measuring electrical resistance between the electrodes. The method includes heating the sensor to a first temperature for a first duration of time, wherein the first temperature and first time are sufficient to remove collected particulate matter from the sensor. The method further includes heating the sensor to a second temperature for a second duration of time, wherein the second temperature is higher than the first temperature, to remove contaminants that cannot be removed by heating to the first temperature for the first duration of time.Type: ApplicationFiled: June 30, 2011Publication date: January 3, 2013Applicant: DELPHI TECHNOLOGIES, INC.Inventors: LARY R. HOCKEN, CHARLES S. NELSON
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Patent number: 8336564Abstract: An apparatus serves for cleaning a coating machine for coating confectionery products with a coating mass. The apparatus is designed to be arranged in the coating machine which includes a rotatingly driven grating belt. The grating belt is designed and arranged to support confectionery products to be coated. The grating belt defines a grating belt plane. The apparatus includes a cart. The cart is designed to be moved back and forth in the coating machine above the grating belt plane in the mounted position of said cart in the coating machine. The cart includes a plurality of spraying nozzles. The spraying nozzles are designed and arranged to spray pressurized hot water onto the coating machine in an automatically controlled way.Type: GrantFiled: December 22, 2005Date of Patent: December 25, 2012Assignee: Sollich KGInventor: Thomas Sollich
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Publication number: 20120318307Abstract: Disclosed is a toothbrush storage and sanitizing container, comprising a housing having a lower portion and an upper portion. The lower portion comprises an interior fluid reservoir and an open interior between the reservoir and the walls of the housing for retaining the handles of at least one toothbrush. The upper portion is a removable enclosure that supports the toothbrush heads in an upstanding configuration. A nozzle device connects the reservoir to the upper portion of the housing, while a heating element within the reservoir rapidly heats and vaporizes the water therein. High pressure and high temperature steam is communicated through the nozzle ports in the upper portion of the housing to subject the toothbrush heads to a burst or continuous spray of steam for cleaning and sanitation purposes.Type: ApplicationFiled: June 18, 2012Publication date: December 20, 2012Inventor: Margaret Talarico
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Publication number: 20120312335Abstract: There is provided a vacuum degreasing and cleaning apparatus, including a cleaning chamber having an injector and a sprayer that eject a solvent to an object to be cleaned, a plurality of storage tanks that store the solvent, a distiller that distills the solvent in the storage tank, and a replenisher tank that stores the solvent distilled by the distiller, wherein a heating means is provided in the inside of the sprayer in a nesting way. There is also provided a vacuum degreasing and cleaning method using the aforementioned vacuum degreasing and cleaning apparatus, wherein the solvent is pressurized and supplied to the inside of the sprayer, heated to a temperature not lower than a saturation temperature in the cleaning chamber under a reduced pressure, and thereafter sprayed in the cleaning chamber under the reduced pressure.Type: ApplicationFiled: May 23, 2012Publication date: December 13, 2012Applicant: NACHI-FUJIKOSHI CORP.Inventor: Akira Sakai
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Patent number: 8327861Abstract: Methods and apparatus are provided for using various megasonic apparatus including megasonic tanks, scanning megasonic plates, megasonic jets, and megasonic sweeping beams etc., in combination with selective chemistries to remove sub-micron particulate contaminants from the surfaces of the processing equipment used in semiconductor, medical, or any other processing environments.Type: GrantFiled: December 19, 2006Date of Patent: December 11, 2012Assignee: Lam Research CorporationInventors: Yaobo Yin, Linda (Tong) Jiang
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Publication number: 20120305028Abstract: Provided is a buffer unit, which includes a frame including a base plate, a first vertical plate, and a second vertical plate, wherein the first and second vertical plates are spaced apart from each other on the base plate, a first buffer on which a photomask is placed, the first buffer being allowed to be reversed between the first and second vertical plates; and a plurality of driving parts disposed at outsides of the first and second vertical plates, and driving the first buffer to grip and reverse the photomask placed on the first buffer.Type: ApplicationFiled: May 30, 2012Publication date: December 6, 2012Applicant: SEMES CO., LTD.Inventors: Kihoon Choi, Byung Man Kang, Byung Chul Kang, Donghyuk Jang
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Publication number: 20120291807Abstract: A device for cleaning the surface of a molybdenum wire at high temperature, comprises a wire pay-off mechanism, a first wire guiding wheel, a cleaning mechanism, a second wire guiding wheel, and a wire take-up mechanism; wherein the two ends of a furnace body of the cleaning mechanism are provided with an inlet hole and an outlet hole for the molybdenum wire. Electrodes connected to a power supply are provided at the inlet hole and in a central part inside the furnace body. An upper part of the furnace body is provided with a gas outlet and a lower part thereof is provided with a wet hydrogen inlet; a heating section is formed between the electrode located at the inlet hole and the electrode located in the central part, and a cooling section is formed between the electrode located in the central part and the outlet hole.Type: ApplicationFiled: August 10, 2011Publication date: November 22, 2012Applicant: CHENGDU HONGBO INDUSTRIAL CO., LTD.Inventors: Qingchun He, Qi Zhou, Jian Li
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Publication number: 20120291806Abstract: Provided are a system and method capable of providing a sulfuric acid solution containing peroxosulfuric acid for use in cleaning even in an installation-limited space such as a clean room while suppressing the fluid pressure in a heating part such as a rapid heating heater.Type: ApplicationFiled: May 26, 2011Publication date: November 22, 2012Applicant: KURITA WATER INDUSTRIES LTD.Inventors: Minoru Uchida, Toru Otsu
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Patent number: 8313708Abstract: An apparatus for treating objects with a treatment gas comprises a treatment chamber, a chamber input through which objects enter the treatment chamber, and a chamber output (which may be the same as the chamber input) through which the objects leave the treatment chamber. The treatment chamber encloses the treatment gas, which can be steam. The chamber output and/or the chamber input include an intermediate medium, such as a liquid, through which the objects pass. The intermediate medium prevents escape of the treatment gas from the treatment chamber and the ingress of external gases into the treatment chamber, while facilitating input of the objects to the chamber, and output of the objects from the chamber.Type: GrantFiled: February 17, 2005Date of Patent: November 20, 2012Assignee: The Penn State Research FoundationInventor: Paul N. Walker
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Patent number: 8307839Abstract: A cleaning appliance is provided for cleaning washware, which cleaning appliance is designed to subject the washware to the action of at least one cleaning fluid in at least one cleaning chamber. The cleaning appliance has a suction-removal apparatus for removing damp air from the cleaning chamber by suction, and at least one heat recovery device. The heat recovery device is designed to draw heat from the damp air and to feed it back to the cleaning appliance by means of a first cooling fluid. The cleaning appliance has a cooling-fluid line with at least one recirculation path and at least one heat accumulator path with at least one latent heat accumulator. The cleaning appliance is designed to conduct the first cooling fluid to the cleaning chamber and/or into a fluid tank via the recirculation path in at least one operating state after said cooling fluid has flowed through the heat recovery device.Type: GrantFiled: November 7, 2008Date of Patent: November 13, 2012Assignee: Meiko Maschinenbau GmbH & Co. KGInventors: Thomas Peukert, Bruno Gaus, Thomas Naeger
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Publication number: 20120279526Abstract: A cleaning apparatus is described and which includes a housing which is moveable across a supporting surface; a first electrically actuated fluid pump which is mounted in the housing, and which is operable to deliver a first stream of fluid at a pressure of at least about 150 PSI to less than about 1200 PSI; a second electrically actuated fluid pump which is mounted in the housing, and which is operable to deliver a second stream of fluid, at a pressure, of less than about 600 PSI; and an electrically actuated heater which is mounted in the housing, and which is operable to impart heat energy to the second fluid stream.Type: ApplicationFiled: July 13, 2012Publication date: November 8, 2012Applicant: U.S. ProductsInventor: Steve Williams
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Publication number: 20120279525Abstract: A cleaning system for use with a heat exchanger includes a fluid pressurizing assembly, a wand assembly and a movement mechanism configured to selectively move the wand assembly about a pivot axis. The wand assembly includes a first wand positioned adjacent to the heat exchanger and in fluid communication with the fluid pressurizing assembly, a second wand positioned adjacent to the first wand and in fluid communication with the fluid pressurizing assembly, and a mounting assembly defining the pivot axis. The first and second wands each have a first orifice configured to eject fluid toward the heat exchanger, and the first and second wands are both attached to the mounting assembly such that first and second wands both pivot together relative to the pivot axis.Type: ApplicationFiled: May 2, 2012Publication date: November 8, 2012Applicant: Horton, Inc.Inventors: Stephen Anthony Stone, Michael J. Campbell, Jamil Orfali, Jacob Vincent VandeHei, Kevin Watson, Thomas Schmidt
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Publication number: 20120273015Abstract: A dishwasher includes a washing container, devices for washing dishes by means of rinsing liquor, and a sorption drying device which is connected in an air-conducting manner to the washing container via an outlet of the washing container and an inlet of the washing container.Type: ApplicationFiled: July 9, 2012Publication date: November 1, 2012Applicant: BSH BOSCH UND SIEMENS HAUSGERATE GMBHInventors: Helmut Jerg, Kai Paintner
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Patent number: 8297291Abstract: A combination parts washer for cleaning mechanical parts of oil, grease and contaminants. The washer has a cabinet which has two reservoirs. A parts receptacle in the one of the reservoirs receives the parts which are cleaned by ultrasonic waves. An operable sink for manual cleaning is positioned on the top of the cabinet and opens to access the cabinet and reservoir. Fluid from the sink drains to the first reservoir. In the closed position, the sink covers the top of the cabinet and may be used as a sink washer using the attached brush supplied by fluid from the first reservoir. Initial pre-cleaning may be performed in the sink using the brush. Subsequent precision cleaning may be accomplished by immersion and ultrasonic cleaning in the second reservoir.Type: GrantFiled: January 29, 2009Date of Patent: October 30, 2012Assignee: Heritage-Crystal Clean, LLCInventors: Ronald H. Bluestone, Ryan J. Bluestone
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Publication number: 20120266918Abstract: A method of cleaning a particle filter, in particular for combustion engines, includes the steps of adding heat to the inner of the particle filter during a certain time period in order to burn off the enclosed particles, to add liquid material to the inner of the filter during a certain time period in order to remove the burnt particles from the particle filter.Type: ApplicationFiled: October 26, 2010Publication date: October 25, 2012Applicant: STOCKFORSA INVEST AKTIEBOLAGInventor: Mickael Håkansson
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Patent number: 8291922Abstract: The present invention relates to a dish washing machine, and more particularly to a dish washing machine having a structure in which a bottom surface of the dish washing machine is not wet with water. The dish washing machine includes a washing chamber (150) for washing dishes, a fan (90) for discharging air from the washing chamber (150), a housing for a space to install the fan (90), an exhaust duct (92) for guiding the air from the housing (94) to an outside of the dish washing machine, and a passage for draining water to an outside of the housing (94) whenever the water is present in the housing (94).Type: GrantFiled: July 30, 2008Date of Patent: October 23, 2012Assignee: LG Electronics Inc.Inventors: Jung Youp Han, Yong Jin Choi, Joon Ho Pyo, Young Hwan Park, Seong Ho Kim
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Publication number: 20120260947Abstract: Provided are a substrate cleaning apparatus, a substrate cleaning method, and a substrate cleaning program that preferably cleans the substrate without causing damage on the surface of the substrate. The substrate cleaning apparatus includes a liquid layer holding unit including a substrate cleaning nozzle that holds a liquid layer of the cleaning solution, a substrate heating unit that heats the surface of the substrate higher than the boiling point of the cleaning solution, and a moving up/down mechanism that approaches a substrate cleaning nozzle to the substrate. The moving up/down mechanism is controlled to boil the liquid layer held in the substrate cleaning nozzle by the heat of the surface of the substrate heated by the substrate heating unit to form a vapor layer between the surface of the substrate and the liquid layer to clean the surface of the substrate.Type: ApplicationFiled: April 11, 2012Publication date: October 18, 2012Inventor: Satoshi KANEKO
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Patent number: 8277565Abstract: Method and apparatus for removing residues of hazardous materials from vapor in a tank (1), wherein such a vapor is heated, passed outside the tank and subsequently cooled and the remaining dry vapor is recirculated, characterized in that a) said vapor is heated to a temperature of at least 5° C. above the melting point and below the self ignition point of the hazardous material, b) the vapor mixture thus formed is passed by means of a pump (3) from the tank through a discharge unit to a recovery unit, c) is cooled to a temperature of at least 5° C. lower and above the melting point of the hazardous material in a recovery unit, d) the liquid components of the vapor are recovered and the dry gas mixture is recirculated to the tank after reheating to the desired temperature, e) said recirculation being repeated as required.Type: GrantFiled: November 5, 2009Date of Patent: October 2, 2012Assignee: VCS Global Systems B.V.Inventor: Perry Van Der Bogt
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Publication number: 20120240965Abstract: A dishwashing machine is provided. The dishwashing machine includes a washing container, at least one device for washing crockery using a washing solution, a heating device, and a sorption drying device communicated with the washing container for the passage of air between the sorption drying device and the washing container. The sorption drying device contains reversibly dehydratable material that operates to withdraw moisture from air during the passage of the air through the sorption drying device. The sorption drying device is housed in a housing and has air passing from the washing container into the sorption drying device via an air inlet and thereafter flowing along a flow path through the sorption drying device and eventually exiting the sorption drying device via an air outlet. The heating device is located upstream of the air inlet relative to the flow of air through the sorption drying device.Type: ApplicationFiled: June 7, 2012Publication date: September 27, 2012Applicant: BSH BOSCH UND SIEMENS HAUSGERATE GMBHInventors: Helmut Jerg, Kai Paintner
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Publication number: 20120240962Abstract: A method is provided for operating a dishwasher with at least one partial program step that includes heating a rinsing solution to a nominal temperature. Air that is heated by a heating device and used for desorption of a reversibly dehydratable material is conducted from a washing container of the dishwasher or ambient air is conducted through a sorption column with reversibly dehydratable material into the washing container in order to heat the rinsing solution and/or items to be washed. The heating device continues to operate after the desorbed state of the reversibly dehydratable material has been attained until the nominal temperature of the rinsing solution is reached.Type: ApplicationFiled: June 8, 2012Publication date: September 27, 2012Applicant: BSH Bosch und Siemens Hausgeräte GmbHInventors: Helmut Jerg, Kai Paintner
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Publication number: 20120234365Abstract: The invention relates to a high-pressure cleaning appliance, comprising a heatable heat exchanger for heating up a liquid dispensable by the high-pressure cleaning appliance, a blower with a flow channel connected thereto for supplying combustion air to the heat exchanger, and a setting member for setting the amount of combustion air suppliable to the heat exchanger, the setting member having a channel constriction section which is positionable in the flow channel and movable relative thereto for changing the free cross-sectional area of the flow channel. In order to develop a generic high-pressure cleaning appliance further so that the amount of combustion air suppliable to the heat exchanger can be better adjusted, it is proposed that the channel constriction section be configured so as to be slidingly displaceable relative to the flow channel.Type: ApplicationFiled: March 30, 2012Publication date: September 20, 2012Applicant: Alfred Kaercher GmbH & Co. KGInventors: Michael Boehm, Peter Pfaff, Werner Schwab
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Patent number: 8262803Abstract: A method for cleaning cavities in workpieces, a cleaning device for this purpose and a device for the supply of media to a cleaning device of this type. Supercritical carbon dioxide is introduced into the cavity and the cavity is rinsed. The supercritical carbon dioxide located in the cavity is relieved of pressure after rinsing of the cavity, so that carbon dioxide gas and carbon dioxide snow are formed in the cavity and subsequently driven out of the cavity.Type: GrantFiled: June 2, 2006Date of Patent: September 11, 2012Assignee: Fraunhofer-Gesellschaft zur Forderüng der Angewandten Forschung e.V.Inventors: Christof Zorn, Ralf Grimme
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Publication number: 20120204911Abstract: A dishwasher is provided that allows the dishes that are to be cleaned that have been placed in a cleaning container to be washed and dried efficiently from an economic perspective while keeping the energy consumption associated therewith as low as possible. The dishwasher includes a washing container and a conduit system that is connected in an air-conveying manner to the washing container. A heat tube of the conduit system is used for both cooling, and thus drying, and heating air penetrating the washing container and both ends of the heat tube protrude into the washing container.Type: ApplicationFiled: April 23, 2012Publication date: August 16, 2012Applicant: BSH BOSCH UND SIEMENS HAUSGERÄTE GMBHInventors: Egbert Classen, Helmut Jerg, Kai Paintner
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Patent number: 8235061Abstract: Provided are a substrate processing apparatus and a substrate processing method capable of processing of a substrate using a supercritical fluid without exposing the pattern formed on the substrate to an atmospheric environment. The substrate processing apparatus includes a cleaning bath configured to accommodate a substrate and clean the substrate by flowing a cleaning solution, and a processing vessel configured to accommodate the cleaning bath and process the substrate with a supercritical fluid.Type: GrantFiled: June 28, 2010Date of Patent: August 7, 2012Assignee: Tokyo Electron LimitedInventors: Takayuki Toshima, Kazuo Terada, Kazuyuki Honda
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Publication number: 20120164840Abstract: A substrate processing method includes a liquid processing process that supplies a processing liquid onto a substrate to process the substrate; a heating process that heats the substrate on which a liquid film of the processing liquid is formed; a supplying process that supplies a volatile processing liquid to the substrate on which the liquid film of the processing liquid is formed; a stopping process that stops the supply of the volatile processing liquid to the substrate; and a drying process that dries the substrate by removing the volatile processing liquid, in which the heating process starts before the supplying process that supplies the volatile processing liquid and the substrate is heated so that the surface temperature of the substrate is higher than a dew point before the surface of the substrate is exposed from the volatile processing liquid.Type: ApplicationFiled: December 21, 2011Publication date: June 28, 2012Inventors: Satoru Tanaka, Takehiko Orii, Hirotaka Maruyama, Teruomi Minami, Mitsunori Nakamori
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Patent number: 8205625Abstract: A surface treatment apparatus of a substrate can clean a substrate surface in the air without employing a vacuum apparatus, and can remove a natural oxide film or an organic material, such as BTA, from the substrate surface without resorting to plasma cleaning. The surface treatment apparatus includes: an inert gas supply section for supplying an inert gas to the whole or part of a substrate surface to form an oxygen-blocking zone; a heating section for keeping the substrate surface at a predetermined temperature; and a cleaning gas supply section for supplying a cleaning gas to the oxygen-blocking zone to clean the substrate surface.Type: GrantFiled: November 27, 2007Date of Patent: June 26, 2012Assignee: Ebara CorporationInventors: Hideki Tateishi, Tsutomu Nakada, Akira Susaki, Shohei Shima, Yukio Fukunaga
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Publication number: 20120138096Abstract: An automatic dishwasher having a heater shared by the recirculation system and the air supply system to heat the liquid in the recirculation system and the air in the air supply system.Type: ApplicationFiled: December 3, 2010Publication date: June 7, 2012Applicant: WHIRLPOOL CORPORATIONInventors: BARRY E. TULLER, RODNEY M. WELCH
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Publication number: 20120138097Abstract: Improved removal of ion-implanted photoresist in a single wafer front-end wet processing station is achieved by dissolving gaseous ozone into relatively cool inorganic acid, dispensing the acid ozone mixture onto a wafer, and rapidly heating the surface of the wafer to a temperature at least 30° C. higher than the temperature of the acid ozone mixture.Type: ApplicationFiled: December 3, 2010Publication date: June 7, 2012Applicant: LAM RESEARCH AGInventors: Harald OKORN-SCHMIDT, Franz KUMNIG, Rainer OBWEGER, Thomas WIRNSBERGER
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Publication number: 20120138095Abstract: A reticle is cleaned by vapor condensing on the active surface of the reticle. An embodiment includes positioning the reticle in a cleaning chamber having a bottom surface, with the active surface of the reticle facing the bottom surface of the cleaning chamber, and directing vapor at the active surface of the reticle. Embodiments further include filling a reservoir in a bottom portion of the cleaning chamber with liquid and directing vapor by heating the liquid. Embodiments further include cooling the reticle concurrently with heating the liquid. Embodiments further include rotating the reticle concurrently with heating the liquid and cooling the reticle. Embodiments further include emptying the reservoir and dry spinning the reticle, subsequent to cleaning the reticle.Type: ApplicationFiled: December 2, 2010Publication date: June 7, 2012Applicant: GLOBALFOUNDRIES Inc.Inventor: Arthur Hotzel
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Publication number: 20120125368Abstract: There are provided a liquid processing method and a liquid processing apparatus capable of removing a resist film without removing an underlying film when removing the resist film from a substrate on which the underlying film and the resist film are formed in sequence from the bottom and into which ions have been previously implanted. In the liquid processing method capable of processing a substrate by a processing solution, the method includes removing the resist film from the substrate by supplying the processing solution at a temperature of about 120° C. or higher to the substrate. The processing solution includes a sulfuric acid and a nitric acid at a preset ratio, and the substrate has thereon the underlying film and the resist film formed on the underlying film, and ions have been previously implanted into the substrate.Type: ApplicationFiled: November 21, 2011Publication date: May 24, 2012Applicant: TOKYO ELECTRON LIMITEDInventors: Miyako KANEKO, Yasushi FUJII, Kenji SEKIGUCHI
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Publication number: 20120125364Abstract: A self-contained, mobile system for cleaning trash receptacles. The system comprises a water system and a lift system that work in conjunction with each other to provide an automated method for cleaning trash receptacles.Type: ApplicationFiled: November 17, 2011Publication date: May 24, 2012Inventors: Patrick John Wiley, James William Joyce
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Publication number: 20120118335Abstract: A pressure wash system includes a heat exchanger having a first fluid path with an inlet and an outlet and a second fluid path with an inlet and an outlet. A heat exchange takes place between the fluids passing along the first fluid path and fluids passing along the second fluid path. A boiler water circulation loop circulates hot water from a boiler installation along the first fluid path from the inlet to the outlet. A cold water source is upstream of the inlet for the second fluid path of the heat exchanger. A spray nozzle is downstream of the outlet for the second fluid path. A pump drives water from the cold water source along the second fluid path of the heat exchanger where it is heated by a heat exchange with hot boiler water and delivered under pressure to the spray nozzle.Type: ApplicationFiled: November 17, 2010Publication date: May 17, 2012Inventor: Dean Gillingham
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Publication number: 20120118330Abstract: A dishwasher with multiple, physically separate treating chambers includes a liquid supply system supplying liquid to the treating chambers, an air supply system supplying air to the treating chambers, and a common heating element for simultaneously heating the air and liquid. A method for operating a dishwasher including simultaneously heating the air and the liquid with a common heating element is also provided.Type: ApplicationFiled: November 16, 2010Publication date: May 17, 2012Applicant: WHIRLPOOL CORPORATIONInventors: BARRY E. TULLER, RODNEY M. WELCH
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Publication number: 20120117745Abstract: An on-board optical sensor cover includes a holder and a washer nozzle. The holder holds an optical sensor. The optical sensor has a lens and is mounted above a window of a vehicle outside the vehicle. The washer nozzle performs a washing operation to wash a lens surface of the lens of the optical sensor held in the holder or a glass surface of a cover glass located facing the lens if the cover glass exists by spraying a washer fluid, supplied from a washer fluid tank, onto the lens surface or the glass surface. The optical sensor cover is located above the window outside the vehicle so that the washer fluid spayed from the washer nozzle flows to a window surface of the window after washing the lens surface or the glass surface.Type: ApplicationFiled: January 23, 2012Publication date: May 17, 2012Applicant: DENSO CORPORATIONInventors: Toshihiro HATTORI, Manabu ONO
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Patent number: 8177913Abstract: A cleaning apparatus comprises a container configured to hold an article to be cleaned, a cleaning solvent dispenser configured to supply a cleaning solvent to the container, an energy generator configured to provide thermal energy to an interior of the container; and a control device in communication with the energy generator and configured to select thermal energy sufficient to sublimate the particles. The cleaning solvent comprises a solvent and nanofabricated particles dispersed therein. The control device controls the energy generator to provide thermal energy to the cleaning solvent in container in which the article is submerged in order to cause sublimation of the particles.Type: GrantFiled: November 12, 2010Date of Patent: May 15, 2012Assignee: Empire Technology Development LLCInventor: Takahisa Kusuura
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Patent number: 8176654Abstract: By a method and a device for preventing corrosion on and in the region of a gas inlet nozzle during nitric acid condensation, contact of the condensing gas with the nozzle and with the surroundings of the nozzle are supposed to be minimized. This is achieved in that the gas inlet nozzle has a sleeve on the inside in the transition region to the interior of the condenser, by which sleeve a gas inlet orifice in the form of an annular gap is formed, whereby the annular space is provided with at least one feed opening for secondary air, so that an enveloping flow of secondary air is produced around the entering NO gas.Type: GrantFiled: November 21, 2007Date of Patent: May 15, 2012Assignee: ThyssenKrupp Uhde GmbHInventor: Rainer Maurer
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Publication number: 20120111056Abstract: Apparatus, systems and methods for improving chemical strengthening of glass are disclosed. In one embodiment, a mechanical stress can be induced on a glass article while undergoing chemical strengthening. In another embodiment, vibrations, such as ultrasonic vibrations, can be induced during chemical strengthening of a glass article. The use of mechanical stress and/or vibrations during chemically strengthening of a glass article can enhance the effectiveness of the chemical strengthening process. Accordingly, glass articles that have undergone chemical strengthening processing are able to be not only thin but also sufficiently strong and resistant to damage. The strengthened glass articles are well suited for use in consumer products, such as consumer electronic devices (e.g., portable electronic devices).Type: ApplicationFiled: May 14, 2011Publication date: May 10, 2012Inventor: Christopher Prest
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Patent number: 8161986Abstract: Dish-washing machine comprising a chamber (2) for washing articles (3), an air inlet line and an air outlet line both communicating with the chamber, air circulating means for forcing an inlet airflow sucked from the atmosphere into the chamber (2) via said air inlet line and exhausting an outlet airflow saturated with moisture after passing over said articles (3) to the atmosphere via said air outlet line; heating means are provided for heating said outlet airflow before exhausting to the atmosphere in order to reduce the relative humidity of the discharged air.Type: GrantFiled: March 28, 2006Date of Patent: April 24, 2012Inventor: Roberto Alessandrelli
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Publication number: 20120090650Abstract: An appliance for washing objects is described that can store energy from a first fluid such as washing fluid that drains from a basin in the appliance. The appliance is likewise configured to transfer the stored energy to a second fluid, which in one example is a washing fluid received from a fluid supply such as a municipal water supply. In one embodiment, the appliance comprises a thermal retention device with a fluid conducting feature through which flows the first fluid and the second fluid so as to raise the temperature of the second fluid before the second fluid flows directly into the basin of the appliance.Type: ApplicationFiled: November 23, 2010Publication date: April 19, 2012Inventor: Ronald Scott Tarr
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Publication number: 20120090105Abstract: A surface cleaning device having a steering assembly is provided. The surface cleaning device includes a foot, a handle assembly with a user manipulated handle, and a steering assembly coupling the handle assembly to the foot. The steering assembly includes a means for biasing the foot with respect to the handle assembly. Movement of the handle assembly stores energy within the biasing means so that the biasing means exerts a corresponding force on the foot.Type: ApplicationFiled: October 14, 2011Publication date: April 19, 2012Inventor: Gregg A. Henderson
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Publication number: 20120080055Abstract: The present application provides a pulsed detonation cleaning system for cleaning an enclosed structure. The pulsed detonation cleaning system may include a pulsed detonation combustor cleaner and an external fuel-air flow. The pulsed detonation combustor cleaner delivers the external fuel-air flow into the enclosed structure and ignites the external fuel-air flow to clean the enclosed structure.Type: ApplicationFiled: October 1, 2010Publication date: April 5, 2012Applicant: GENERAL ELECTRIC COMPANYInventors: Tian Xuan Zhang, David Michael Chapin
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Publication number: 20120073611Abstract: A pulse detonation cleaning system is provided and includes a common tube, which is fluidly coupled to a vessel, a first array, including a plurality of elongate detonation tubes arrayed about a common axis, each of the plurality of the detonation tubes being disposed upstream from and fluidly coupled to an interior of the common tube and a second array, including a plurality of detonators arrayed about the common axis, each of the plurality of the detonators being disposed upstream from and operably coupled to a corresponding one of the plurality of the detonation tubes such that actuation of each of the plurality of the detonators leads to combustion in the corresponding one of the plurality of the detonation tubes.Type: ApplicationFiled: September 28, 2010Publication date: March 29, 2012Applicant: GENERAL ELECTRIC COMPANYInventors: Tian Xuan Zhang, David Michael Chapin, Robert Warren Taylor
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Publication number: 20120073608Abstract: A dishwasher includes a wash cavity for accommodating wash items and a water inlet device having a hot water inlet for intake of hot water from an external hot water supply, and a cold water inlet for intake of cold water from an external cold water supply. At least one reservoir is in communication with the water inlet device for allowing water to be filled by the water inlet device and in heat-conducting contact with the wash cavity. At least one wash program for controlling at least one wash cycle for cleaning wash items is stored by a program control device, with the wash program providing at least one program step for washing wash items using hot water from the hot water supply and at least one drying step for drying wash items, wherein the reservoir is filled at least at times with cold water from the cold water supply.Type: ApplicationFiled: June 1, 2010Publication date: March 29, 2012Applicant: BSH BOSCH UND SIEMENS HAUSGERÄTE GMBHInventors: Roland Rieger, Michael Georg Rosenbauer