Abstract: A technology can efficiently dry the high-boiling point solvent contained in the object and achieve the space-saving and energy-saving of a drying apparatus. A drying method for drying an object containing a first solvent while conveying the object into a chamber (38), comprises: a first drying step of drying the object up to a drying point in the prestage of the chamber (38); and a second drying step of forming a vapor atmosphere of a second solvent having a lower boiling point than the first solvent in the chamber (38) and drying the object such that the temperature of the object in an inlet port of the chamber (38) is made to be lower by a predetermined temperature difference than the temperature of the vapor atmosphere.

Abstract: A cleaning machine, in particular a batch dishwasher, comprising an individual cleaning chamber in which the items to be cleaned are accommodated, a pump which circulates washing liquid within the cleaning chamber, and a further pump which delivers fresh water, and also a boiler which stores and heats fresh water, wherein the boiler has an associated heat exchanger by means of which heat is indirectly or directly transferred from waste water which is stored in a reservoir to the fresh water which is stored in the boiler.

Abstract: A cleaning apparatus comprises a container configured to hold an article to be cleaned, a cleaning solvent dispenser configured to supply a cleaning solvent to the container, an energy generator configured to provide thermal energy to an interior of the container; and a control device in communication with the energy generator and configured to select thermal energy sufficient to sublimate the particles. The cleaning solvent comprises a solvent and nanofabricated particles dispersed therein. The control device controls the energy generator to provide thermal energy to the cleaning solvent in container in which the article is submerged in order to cause sublimation of the particles.

Abstract: The disclosure features a method of performing a boil-out cleaning process in connection with a fryer. The fryer includes a vat, a vessel for receiving oil drained from the vat, the vessel movable from an under-unit position, an oil drain path leading from an outlet opening of the vat to the pan, and an oil return path from the vessel back to the vat. The oil return path includes a pump. A drain valve is located along the oil drain path. The drain valve is opened to drain oil from the vat into the vessel is opened. The drain valve is closed after draining the oil from the vat. A boil-out cleaning fluid is delivered to the vat and the boil-out cleaning fluid is heated. A boil-out drain path is provided with an inlet positioned for receiving boil-out fluid from the drain valve and an outlet positioned forward of a front of the fryer unit. A container is placed below the outlet of the boil-out drain path.

Abstract: A washing system for washing equipment in a milking plant includes a closed flow circuit, a washing liquid source (14), a feeding part (7, 16) adapted to supply washing liquid from the washing liquid source (14) to a first portion (15) of the closed flow circuit and circulating part (10) adapted to circulate the washing liquid in the closed flow circuit during a washing process of the equipment (1, 2, 3, 8). The washing system further includes a heating part (7, 23-28) adapted to supply steam to at least a second vertical portion (19a) of the closed flow circuit during at least a part of the washing process for supplying heat energy to the circulating washing liquid. The second portion (19a) of the closed flow circuit is located at a distance from the first portion (15) of the closed flow circuit.

Abstract: The support removal apparatus comprising in combination a retention tank having a manifold assembly comprising a plurality of nozzle heads, articulating arms or a combination of both in hydraulic communication with the discharge side of a pump, collectively configured for agitating an aqueous cleaning solution; a heating element mounted within the retention tank for heating the aqueous cleaning solution to a predetermined temperature set point; a basket strainer mounted within the retention tank in hydraulic communication with the intake side of the pump to mitigate passage of small rapid prototype parts and residual support material therethrough and into the pump and manifold assembly; a thermocouple for maintaining the temperature within a tolerable range for optimum removal of support material; a level indicator to ensure adequate solution level in the retention tank for operability of the pump and heating element; a cabinet having an interface controller mounted on an exterior panel thereof for setting ti

Abstract: A processing apparatus includes: a tank configured to store water; vapor generating unit configured to turn the water supplied from the tank into vapor; a processing chamber in which vapor supplied from the vapor generating unit is used to remove residues from a workpiece; cooling unit; and filtering unit. The cooling unit cools waste liquid ejected from the processing chamber. The filtering unit is provided between the cooling unit and the tank, and the filtering unit filters the waste liquid cooled in the cooling unit. A processing method includes: supplying vapor into a processing chamber; removing residues from a workpiece using the vapor; cooling waste liquid containing the removed residues to precipitate the residues as solids; and filtering the waste liquid containing the precipitates.

Abstract: A substrate cleaning apparatus, comprises a process tank that holds a mixture containing a hydrogen peroxide solution and sulfuric acid and is used for cleaning a substrate immersed in said mixture; circulation piping that extends between a primary side of said process tank on which said mixture is injected into said process tank and a secondary side of said process tank on which said mixture is discharged from said process tank and has a pump for causing circulation of said mixture; a heater disposed in said circulation piping configured to heat said mixture to a predetermined temperature; a chemical injection pipe configured to inject a hydrogen peroxide solution into said circulation piping at a position between the primary side of said process tank and a secondary side, which is a downstream side, of said heater; and a filter disposed in said circulation piping configured to remove particles in said mixture.

Abstract: An improved portable cleaning system for use in cleaning heat exchanger tube bundles, fin-fans, towers and other elongated components. The cleaning system comprises a cleaning unit having a cleaning enclosure that receives and cleans the component and a control unit that controls the operation of the system. The cleaning unit has a cleaning enclosure defining a chamber sized and configured to receive the component through a sealable lid. A roller assembly rotates the component while a spray assembly sprays cleaning fluid over and into the rotating component. The cleaning fluid is heated in the chamber using surface heating elements attached to heat transfer plates along sections of the chamber walls. A vapor recovery system captures and treats toxic vapors. In use, the cleaning system is transported to a facility to clean the components on-site using cleaning fluid supplied by the facility and discharging waste to the facility.

Abstract: A substrate cleaning apparatus, comprises a process tank that holds a mixture containing a hydrogen peroxide solution and sulfuric acid and is used for cleaning a substrate immersed in said mixture; circulation piping that extends between a primary side of said process tank on which said mixture is injected into said process tank and a secondary side of said process tank on which said mixture is discharged from said process tank and has a pump for causing circulation of said mixture; a heater disposed in said circulation piping configured to heat said mixture to a predetermined temperature; a chemical injection pipe configured to inject a hydrogen peroxide solution into said circulation piping at a position between the primary side of said process tank and a secondary side, which is a downstream side, of said heater; and a filter disposed in said circulation piping configured to remove particles in said mixture.

Abstract: The invention relates to a method for cleaning plant components of a power station, wherein a medium is continuously passed through one or more plant components for cleaning a closed circuit and a check of the medium for degree of purity is carried out in at least one operating plant component.

Abstract: Apparatuses and methods can reduce washout water use and facilitate removal of waste. A transport vehicle can include a water holding tank, a washout tub, and a means for conveying water. Water can be conveyed from the water holding tank to clean concrete from utensils, chutes, pumps, and other implements through a hose. The water can then be separated from the concrete and conveyed back into the water holding tank using a hose and a strainer.

Abstract: An assembly for recycling a solvent from a contaminated solvent solution includes a recycler module including a distillation assembly and an air handler assembly. The distillation assembly includes a distiller and a conduit that includes a condenser and a sight glass. The air handler assembly includes a duct having an intake port, an exhaust port and a source of air flow. The condenser is disposed within the duct and the sight glass is disposed external to the duct.

Abstract: A dish washer includes a steam generating unit that is configured to control the amount of steam in accordance with the amount of items in the dish washer. The steam generating unit is positioned outside of the tub and is configured to generate and supply steam to the tub. The dishwasher includes a fluid supplying passage that supplies washing fluid to the steam generating unit. A steam discharging passage is configured to discharge steam that is generated from the steam generating unit to the tub.

Abstract: Dish washing machine that includes a steam generator, which supplies steam during a washing operation, to aid in the washing of dishes and other items in the dish washing machine. The dish washing machine further including one or more dish washing racks that effectively orient the dishes, and other items to be washed, in such a way so as to avoid inhibiting the steam from being evenly distributed around each of the dishes and other items to be washed. The dish washing machine also including a steam zone indicator to aid in effectively positioning the dishes and other items to be washed by visually distinguishing the region or zone within the dish washing machine that corresponds with high-intensity steam.

Abstract: A condensing apparatus of a dish washer is provided. The condensing apparatus includes a blower and an air duct. The blower suctions vapor from inside a tub of the dish washer. The air duct is connected to the blower, and has a vapor passage formed therein through which the vapor flows and in which condensed water is formed. The vapor passage has a ridge formed thereon to stop the condensed water.

Abstract: A dishwasher includes a tub, a steam generator for generating steam, a water supply passage for supplying washing water to the steam generator, a release valve having a steam passage along which the steam generated by the steam generator is supplied to the tub, and a condensed water passage connected to the water supply passage to allow water condensed by the steam to fall to the water supply passage.

Abstract: A dishwasher includes a steam-generating vessel positioned in the wash chamber of the dishwasher's tub. A heating element heats water contained in the vessel to generate steam. The heating element may be embodied as thick-film heating element. The steam-generating vessel may be formed in the dishwasher's tub or embodied as a separate component that is secured to the tub.

Abstract: A parts washer including magnets located near a pump inlet to collect metallic particles suspended in the cleaning fluid; a casing to protect the pump mechanism from impact during handling; the pump oriented horizontally to take advantage of the separation of the cleaning fluid in successive vertical layers; two liquid level sensors to measure the level of the cleaning fluid in the reservoir; an evaporation control plate located at the interface between the reservoir and the receptacle of the reservoir to confine the vapor portion of the cleaning solution; protective handlebars placed next to the controls of a control module to protect the device from impact; and a pump motor control to provide a low flow rate of cleaning fluid using a pump without a variable regulator.

Abstract: A child care storage having a steam sterilizing apparatus, wherein the steam sterilizing apparatus includes an outer tub defined by walls of a steam sterilizing compartment; a hollow upstanding coupling member installed on the center bottom of the outer tub and having an interlocking hole formed at its top; an inner tub inserted inside the outer tub for accommodating infant accessories therein, the inner tub having a reception hole formed at its bottom center and a latch part formed along the circumference of its bottom center; an evaporation vessel having a flange along its circumference, the flange being coupled to the latch part of the inner tub; a flat-type heater installed under a rear bottom surface of the evaporation vessel; and a supporting plate for placing the flat-type heater thereon.

Abstract: A method for demulsifying water-oil emulsions through ultrasonic action, comprises a step of making the water-oil emulsions flow through at least one ultrasonic acting region in a flow direction, wherein: within the ultrasonic acting region, a concurrent ultrasonic wave whose traveling direction is the same as the flow direction of the water-oil emulsions is generated by at least a one first ultrasonic transducer provided at the upstream end of the ultrasonic acting region, and at same time, a countercurrent ultrasonic wave whose traveling direction is opposite to the flow direction of the water-oil emulsions is generated by at least a one second ultrasonic transducer provided at the downstream end of the ultrasonic acting region; and the concurrent ultrasonic wave and the countercurrent ultrasonic wave act simultaneously on the water-oil emulsions which flow through the ultrasonic acting region, so as to demulsify the water-oil emulsions.

Abstract: The present invention relates to a kitchen-range (1) and/or an oven (100) with a self-cleaning system, having a cleaning-element spraying assembly (6, 7, 106, 107), preferably water with detergent, arranged at the cooking top (13) and/or cooking chamber (113) for spraying it in a pressurized way and removing the existing dirt. A circuit is coupled to the cooking top (13) and/or cooking chamber (113), formed by conduits (5, 105, 4, 104) and a pump (19), so that the sprayed cleaning-elements can circulate and remove dirt from the surfaces to be cleaned.

Abstract: The invention relates to an industrial washing plant with at least one treatment chamber for washing objects that are dirtied with oily, greasy, or other processing residues and are treated with treatment media that require process heat for heating active washing fluids, rinsing fluids, for example, pure water or air for drying in an air flow, in order to improve the treatment result. A washing-fluid tank and a rinsing-fluid tank can be provided, and these tanks will supply the treatment chambers by means of electrical devices. Further, nearly pure fluid can be recovered from used washing fluid or rinsing fluid by distillation by means of an evaporator and re-introduced into a treatment medium. The object of the invention consists of creating an industrial washing plant that is designed in such a way that its overall operation leads to an improvement of economical and ecological balances.

Abstract: A kitchenware washing assembly in one embodiment generally includes a tank having an inside for holding fluid for washing kitchenware, and a heater for heating fluid within the inside of the tank. At least one securing device releasably secures the heater within the tank. The securing device has a releasing portion located within the tank that allows the securing device to be released solely from within the tank. In this embodiment, the heater can thus be removed from and/or installed within the tank without having to crawl under the tank.

Abstract: A method is provided for cleaning crevices between a plurality of tubes and a plurality of tube support plates supporting the tubes in a steam generator. The steps include filling a secondary side of the steam generator with a solvent to a first level above a first tube support plate to be cleaned, draining the solvent to a second level lower than the first tube support plate, and refilling the secondary side of the steam generator with the solvent to a third level above the first tube support plate. A cleaning system is also provided.

Abstract: The support removal apparatus comprising in combination a retention tank having a manifold assembly comprising a plurality of nozzle heads in hydraulic communication with the discharge side of a pump, collectively configured for agitating an aqueous cleaning solution comprised of sodium or potassium hydroxide, sodium or potassium carbonate, and water; a heating element mounted within the retention tank for heating the aqueous cleaning solution to a predetermined temperature set point; a basket strainer mounted within the retention tank in hydraulic communication with the intake side of the pump to mitigate passage of small rapid prototype parts and residual support material therethrough and into the pump and manifold assembly; a work surface mounted atop the retention tank and having a movable lid fitted with a basket for containing small rapid prototype parts; a thermocouple for maintaining the temperature within a tolerable range for optimum removal of support material; a level indicator to ensure adequate

Abstract: A cleaning appliance is provided for cleaning washware, which cleaning appliance is designed to subject the washware to the action of at least one cleaning fluid in at least one cleaning chamber. The cleaning appliance has a suction-removal apparatus for removing damp air from the cleaning chamber by suction, and at least one heat recovery device. The heat recovery device is designed to draw heat from the damp air and to feed it back to the cleaning appliance by means of a first cooling fluid. The cleaning appliance has a cooling-fluid line with at least one recirculation path and at least one heat accumulator path with at least one latent heat accumulator. The cleaning appliance is designed to conduct the first cooling fluid to the cleaning chamber and/or into a fluid tank via the recirculation path in at least one operating state after said cooling fluid has flowed through the heat recovery device.

Abstract: Provided are a method for treating a process solution and an apparatus for treating a substrate using the same. The apparatus includes a treating bath, a circulating line, a bypass line, and a filter. A process solution for a substrate is provided in the treating bath. The circulating line is connected to the treating bath, and the process solution circulates through the circulating line. The bypass line branches from a first position of the circulating line and couples at a second position of the circulating line. The filter is installed in a position of the circulating line between the first position and the second position.

Abstract: Beverage bottling plant for filling bottles with a liquid beverage filling material, and a method for the operation thereof. The beverage bottling plant has a treatment system to treat the beverage before the beverage is filled into the bottles, and then treat the beverage again after the filled bottles are closed. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims.

Abstract: An apparatus for testing a cleaning procedure for a material. The apparatus includes a rack having a seat configured to retain a plurality of test coupons at a predetermined angle, an upper tray that distributes a solution along the lines of the rack, a lower tray for receiving solution passed over coupons disposed on the rack, a meter that gauges a flow rate of the solution, a thermostatic heater adapted to bring the solution to a predetermined temperature, and a variable speed pump that directs the solution from a reservoir to the upper tray.

Abstract: A combination sink and jet parts washer for cleaning mechanical parts of oil, grease and contaminants. The washer has a cabinet which has a jet cleaning section and a reservoir. A parts receptacle in the jet cleaning section receives the parts which are cleaned by a spray from a spray manifold. The manifold is connected to a fluid pump which has its inlet communicating with the reservoir. A sink is positioned on the top of the cabinet and opens to access the jet washer and reservoir. In the closed position, the sink covers the top of the cabinet and may be used as a sink washer using the attached brush. In a preferred embodiment, the sink is hinged to the cabinet but may be a lift-off sink or may be on a track. The jet parts washer provides convenience, economy and the features of a sink and jet washer in a single, compact, mobile unit.

Abstract: The cleaning apparatus of the invention includes first and second cleaning tanks cleaning a mask with a predetermined cleaning solution, a vacuum evaporator vacuum-distilling the cleaning solution of the first and second cleaning tanks, a first cooler cooling the vacuum-distilled cleaning solution to room temperature, a first return pipe returning the cleaning solution cooled by the first cooler to the second cleaning tank, first and second rinse tanks rinsing the mask with a predetermined rinse solution, an atmospheric evaporator distilling the rinse solution of the first and second rinse tanks at atmospheric pressure, a second cooler cooling the rinse solution distilled at atmospheric pressure to room temperature, and a second return pipe returning the rinse solution cooled by the second cooler to the second rinse tank.

Abstract: If incorporated in a cleaning system using persulfuric acid, the invention serves for continuous cleaning while increasing the persulfuric acid concentration adequately to ensure enhanced cleaning performance. The invention provides a feeding apparatus that feeds persulfuric acid to a cleaning apparatus. The cleaning system uses an electrolysis reactor 10 that regenerates the persulfuric acid solution by performing electrolytic reaction to produce persulfate ions from sulfate ions contained in the solution, and a circulation line 4, 5, 6 that circulates the persulfuric acid solution between the cleaning vessel 1 and the electrolysis reactor 10. Configured as above, the invention can provides a feeding apparatus. The cleaning system comprises said configuration and a cleaning vessel 1 that cleans objects 30 using a persulfuric acid solution 2 as cleaning fluid.

Abstract: In a high pressure processing system configured to treat a substrate, a flow measurement device is utilized to determine a flow condition in the high pressure processing system. The flow measurement device can, for example, comprise a turbidity meter. The flow parameter can, for example, include a volume flow rate or a time to achieve mixing of a process chemistry within a high pressure fluid used to treat the substrate.

Abstract: A cleaning apparatus for a semiconductor wafer comprising: a double container including an inner container with an upper opening for accommodating a substrate to be cleaned and an outer container having an airtight space accommodating the inner container therein, the inner container being communicated to the outer container through the upper opening; a cleaning liquid supply conduit for supplying a cleaning liquid into the inner container; an inner container drain conduit for draining the cleaning liquid from the inner container; a solvent-containing gas supply conduit for supplying a solvent-containing gas into the inner container for drying the substrate; a solvent-resolving gas supply conduit for supplying a solvent-resolving gas into the inner container for resolving a solvent component attached on the substrate; an exhaust pipe for exhausting the gases from the double container, and an outer container drain conduit for draining the liquid spilled from the inner container to the outer container.

Abstract: A dishwasher that fits within the conventional U.S. residential dishwasher counter space and uses the conventional U.S. residential power supply to achieve within a convenient cycle time the same standard of sanitation as set forth for commercial and residential hot water sanitizing dishwashers.

Abstract: A bioremediation assembly and method for bioremediation are described and which includes a bioremediation reservoir defining a cavity; a pump mounted within the bioremediation reservoir and which removes the aqueous bioremediating fluid from the bioremediation reservoir; and a fluid dispensing manifold positioned within the bioremediation reservoir and which is coupled in fluid flowing relation relative to the pump, and which directs a stream of bioremediating fluid downwardly so as to aerate the volume of bioremediating fluid.

Abstract: In a dishwasher having a dishwashing compartment and a pump fluidically connected to the dishwashing compartment for channeling liquid to the dishwashing compartment, the pump disposed outside the dishwashing compartment and including a pump housing defining an interior and housing a motor and an impeller, a heater for heating dishwashing liquid includes a heating device disposed on the pump housing in heat-conducting contact with the interior of the pump housing.

Abstract: A circuit board processing system includes a wash tank configured to contain cleaning fluid, and a positioning subsystem configured to immerse a set of circuit boards into the wash tank. The system further includes a flow control subsystem having (i) a first set of nozzles disposed within the wash tank, (ii) a second set of nozzles disposed within the wash tank, and (iii) a controller. The controller is configured to direct the cleaning fluid through the first set of nozzles to provide a flow of the cleaning fluid in a first direction relative to the set of circuit boards. The controller is further configured to direct the cleaning fluid through a second set of nozzles to provide a flow of the cleaning fluid in a second direction relative to the set of circuit boards after providing the flow of the cleaning fluid in the first direction.

Abstract: A dishwasher that fits within the conventional U.S. residential dishwasher counter space and uses the conventional U.S. residential power supply to achieve within a convenient cycle time the same standard of sanitation as set forth for commercial and residential hot water sanitizing dishwashers.

Abstract: A dishwasher that fits within the conventional U.S. residential dishwasher counter space and uses the conventional U.S. residential power supply not only achieves within a convenient cycle time the same standard of sanitation as set forth for commercial hot water sanitizing dishwashers, but substantially surpasses the same.

Abstract: Microelectronic substrate processing systems include a microelectronic substrate processing chamber that is configured to contain therein at least one microelectronic substrate. A carbon dioxide supply system is configured to supply densified carbon dioxide to the microelectronic substrate processing chamber. A detergent supply system is configured to supply detergent to the microelectronic substrate processing chamber.

Abstract: The invention is an apparatus used for cleaning equipment including extremely high voltage energized electrical equipment using a dry ice blasting stream as the cleaning agent. The apparatus comprises a cleaning wand and a heating mechanism for impeding the formation of condensation and/or frost on the outer surface of the wand, thereby enabling the wand to operate for prolonged periods of time.

Abstract: Thermal cleaning and separation of metal parts is performed by a stator from an electric motor. Windings embedded in an organic, insulating material are placed and heated to 250°–500° C. under controlled conditions in a heating chamber, evaporating organic material and loosened windings. Flue gas is evaporated organic substances conducted through a closed pipe system to a condensator, where organic gases condense. The pipe system is designed so that condensate is conducted-on in the closed pipe system to a partly liquid filled vessel. Contents of this vessel are air and water that flow concurrently with the condensed flue gas as condensate, increasing content of organic material in the vessel and separating condensate from air. Air may be conducted to the oven for renewed absorption of organic material. All organic material evaporated from the heating chamber is collected in the vessel for later disposal in an environmentally correct and secure way.

Abstract: An apparatus for cleaning an object floating at the surface of water, e.g., a ship floating on the sea with ease and efficiency by use of a small amount of a cleaning agent is provided. This apparatus comprises a waterproof sheet having an area of covering a region to be cleaned of the object, and a buoyancy bag at its peripheral edge, air supply unit for supplying air into the buoyancy bag of the waterproof sheet laid under the object floating at the surface of water to float the waterproof sheet, so that a pool for accommodating the object is formed by the waterproof sheet, and a spacer for creating a clearance being filled with the cleaning agent between the waterproof sheet and the object accommodated in the pool. According to this apparatus, it is possible to clean the object floating at the surface of water on the spot without landing the object.

Abstract: A dishwasher includes a washing receptacle for items to be cleaned, a pump for liquid, a flow heater for liquid, a device for spraying items to be cleaned, a control device for wash cycles of the spraying device, and a device for providing steam having a separate steam dispenser and unit for producing a jet of steam supplied by the steam dispenser. The steam dispenser and the steam jet unit are disposed in the dishwasher in such a way that the steam jet unit always supplies steam to the same predetermined location in the washing receptacle specifically identified and configured for receiving particular items to be cleaned, e.g. particularly dirty items. An uncontrolled escape of steam from any section of the entire washing receptacle is prevented, thus improving the cleaning result with maximum usage of the steam and without also being dependent on activation of a separate steam washing cycle.

Abstract: A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.

Abstract: An apparatus for measuring the water content of a water-containing liquid mixture contained in a tight chemistry tank includes a heating device for controlling the temperature of the liquid mixture to a temperature near the boiling point of the liquid mixture, a cooling medium system disposed at the top of the tight chemistry tank having a cooling medium inlet and a cooling medium outlet, a temperature measurement system for determining the temperature difference between the cooling medium inlet and outlet, and a computing device for calculating the water content of the liquid mixture from the temperature difference. Also provided is a tank for supplying water to the liquid mixture, and a control system for adjusting the amount of water supplied from the tank based upon the water content measured by the measuring apparatus. Also provided is a method for measure the water content.

Abstract: A liquid processing system of the present invention controls a temperature of a processing liquid being in a stand-by circulation line by control means for controlling the heaters to heat the processing liquid stored in the tank, while controlling the opening/closing means to pass the cooling medium into the tank with the stored processing liquid.

Abstract: A cleaning tool for cleaning substrates, comprising a circulation conduit through which is circulated a cleaning liquid or gas. The circulation conduit is disposed in fluid communication with an upstream flow chamber and a downstream cleaning chamber, the cross-sectional area of which cleaning chamber is less than the cross-sectional area of the flow chamber. In use, the cleaning chamber receives a wafer substrate for cleaning of particles or removal of polymer films from the substrate. The smaller cross-sectional area of the cleaning chamber accelerates the flow of a cleaning fluid flowing through the cleaning chamber from the flow chamber. The rapidly-flowing cleaning fluid removes the particles and/or films from the substrate while preventing dropping of the removed particles or re-deposition of the film back onto the substrate. A particle filter may be provided in the circulation conduit downstream of the cleaning chamber for removing the particles.