Abstract: The present disclosure provides a substrate processing apparatus including: a processing chamber configured to process a substrate; a fluid supply source configured to supply a substrate processing fluid used in processing for the substrate in a predetermined pressure; a constant pressure supplying path configured to supply the substrate processing fluid from the fluid supply source to the processing chamber in a predetermined pressure without boosting the pressure of the substrate processing liquid; a boosted pressure supplying path configured to boost the pressure of the substrate processing fluid from the fluid supply source into a predetermined pressure by a booster mechanism and supply the pressure boosted substrate processing fluid to the processing chamber; and a control unit configured to switch over the constant pressure supplying path and the boosted pressure supplying path.

Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes a container providing a space in which a supercritical fluid flows or is received, a recovery tube having one end connected to the container to discharge the supercritical fluid within the container, the recovery tube including a valve, and a waste tube connected to the container to discharge the supercritical fluid within the container, the waste tube including a safety valve. The recovery tube having the other end connected to a recovery container in which the supercritical fluid discharged from the container is received for reusing.

Abstract: The present disclosure is directed to fluid filtering systems and methods for use during semiconductor processing. One or more embodiments are directed to fluid filtering systems and methods for filtering ions and particles from a fluid as the fluid is being provided to a semiconductor wafer processing tool, such as to a semiconductor wafer cleaning tool.

Abstract: An apparatus for cleaning and conditioning the surface of a semiconductor substrate such as wafer includes a rotatable chuck, a chamber, a rotatable tray for collecting cleaning solution with one or more drain outlets, multiple receptors for collecting multiple cleaning solutions, a first motor to drive chuck, and a second motor to drive the tray. The drain outlet in the tray can be positioned directly above its designated receptor located under the drain outlet. The cleaning solution collected by the tray can be guided into designated receptor. One characteristic of the apparatus is having a robust and precisely controlled cleaning solution recycle with minimum cross contamination.

Abstract: Provided is an example of bin washing system. The bin washing system may include a first solid-liquid separating device, a second solid-liquid separating device, a pump, and an inlet structure. The first solid-liquid separating device may be configured to receive a first solid-liquid suspension having first solids and second solids, separate the first solids from the second solids, and dispatch a second solid-liquid suspension having the second solids. The second solid-liquid separating device may be configured to receive the second solid-liquid suspension, capture the second solids, and dispatch cleaned water. The pump may be configured to pump cleaning water to the first solid-liquid separating device. The inlet structure may be configured to receive waste water that includes the first and second solids. The bin washing system may be configured to combine the cleaning water pumped by the pump with the waste water to form the first solid-liquid suspension.

Abstract: A cleaning system can include a noble gas, and one or more vessels configured to convert the noble gas into a supercritical fluid, and/or receive and clean an article of manufacture with the noble gas in the supercritical fluid state. A cleaning process can include converting a noble gas into a supercritical fluid state; and cleaning an article of manufacture with the noble gas in the supercritical fluid state so as to remove one or more contaminates from the article of manufacture. A cleaning composition can include a noble gas in a supercritical fluid state, and a textile article of manufacture having one or more contaminates located in the supercritical noble gas.

Abstract: In situ cleaning systems and methods of use are disclosed and provide cleaning use solutions with minimal chemical additives providing environmentally-friendly cleaning compositions. The in situ cleaning system provides one or more in situ cleaning components, including water treatment components, oxidizing agent generating component and/or alkalinity generating component, providing a cleaning use solution to a washing system.

Abstract: A method and system for removing hydrocarbon deposits from a heat exchanger tube bundle using an organic solvent. After contact with a heat exchanger tube bundle, the contaminated organic solvent may be treated to remove solids, base waters, and/or suspended hydrocarbons, and then again contacted with a heat exchanger tube bundle for the removal of hydrocarbon deposits. This allows for the removal of hydrocarbon deposits from a heat exchanger tube bundle in an efficient and environmentally friendly manner. The treatment of the heat exchanger tube bundle is also preferably performed using a method and system by which, through contact of the heat exchanger tube bundle with an organic solvent, a large percentage of hydrocarbon deposits are removed from the heat exchanger tube bundle in a short period of time.

Abstract: An assembly for recycling a solvent from a contaminated solvent solution includes a recycler module including a distillation assembly and an air handler assembly. The distillation assembly includes a distiller and a conduit that includes a condenser and a sight glass. The air handler assembly includes a duct having an intake port, an exhaust port and a source of air flow. The condenser is disposed within the duct and the sight glass is disposed external to the duct.

Abstract: A wash pad that includes a wash floor for supporting a wash item and a catch trough disposed in fluid communication with a longitudinal central portion of the wash floor. The catch trough collects at least one of wash fluid and debris from the wash floor. The wash pad also includes an evacuator disposed in fluid communication with the catch trough and an elevator disposed in fluid communication with the evacuator. The evacuator substantially removes wash fluid received from the catch trough, and the elevator elevates debris from a collection height to a dump height for dumping.

Abstract: A device and method of use for a towed portable cleaning facility is disclosed. The device employs storage tanks for both the storage and transport of cleaning fluids. The tanks serve the additional function of surrounding and enclosing the cleaning area an area that may be used for cleaning or storage. By utilizing the tanks as walls, the present invention provides a portable cleaning station. The device may further include the ability to treat and clean used fluids in order to either reuse or safely dispose of the used fluids as well as the ability to recover heat energy from an engine compartment to heat cleaning fluids.

Abstract: A dishwasher is provided that advantageously enables reduction of the amount of water required during the rinsing cycle in order to thereby minimize operational costs and to improve environmental compatibility. A water preparation system has a water preparation container which can receive at least one part of the rinsing liquid used during operation of the dishwasher. The impurities contained in the rinsing liquid are at least partially biodegraded during a water preparation phase with the aid of microorganisms. By preparing and recycling at least one part of the used rinsing water, it is possible to reduce the requirement for fresh water. This enables the burden on the environment to be reduced since at least one part of the water used during the rinsing process is biologically cleansed while it is still in the dishwasher and the requirement for fresh water for the dishwasher is thus reduced.

Abstract: Embodiments, presented herein are directed to a filtration system including an outer pipe, an inner pipe and a stirrer. The outer pipe is configured to receive a working fluid from a filter inlet. The outer pipe includes a venturi neck and an outer channel. The venturi neck is located downstream of the filter inlet. The outlet channel is located downstream of the venturi neck, wherein the outlet channel is configured to provide an outlet for a first type of impurity. The inner pipe is co-axially positioned with the outer pipe, wherein the inner pipe is configured to receive a second type of impurity. The stirrer is positioned inside the outer pipe, wherein the stirrer rotates with the inner pipe to substantially separate at least the first and the second types of impurities from the working fluid.

Abstract: The present disclosure relates to semiconductor device manufacturing and, more particularly, to removing a mask material, especially an ion implanted and patterned photo resist, using an aqueous cerium-containing solution. The present invention relates to a method and apparatus for cleaning the chemical materials utilized for cleaning semiconductor wafers. The invention utilizes a centrifugal filter to eliminate heavy materials from the cleaning solution.

Abstract: A distillation assembly that reduces malodors resulting from a process of recycling a solvent from a contaminated solvent solution that includes a distillation chamber defined by a top wall, a side wall and a bottom wall, a heating element disposed in the distillation chamber including an active portion and an inactive portion. The contaminated solvent solution disposed at a level within the distillation chamber such that the active portion always disposed below the level.

Abstract: An assembly for removing contaminants from objects and recycling a solvent from a contaminated solvent solution includes a parts washer assembly including a container for a contaminated solvent solution and a recycling assembly that includes a reservoir module connected to a recycler module. The reservoir module includes a mounted reservoir including an interior volume and a removable lid that reduces the interior volume and includes an access port. The recycler module includes a distillation assembly and an air handler assembly. The distillation assembly includes a distiller and a conduit including a condenser and a sight glass. The air handler assembly includes a duct having an intake port, an exhaust port and a source of air flow. The condenser is disposed within the duct and the sight glass is disposed external to the duct.

Abstract: A dishwasher, in which a reservoir provided with an electrolyzer is connected to a water collector via a flow path change valve, and wash water in the reservoir is electrolyzed by the electrolyzer during non-operation of the wash water, to generate sterilizing water and to circulate the sterilizing water into the dishwasher, thereby achieving an enhancement in sterilizability of the dishwasher. A method for controlling a dishwasher makes it possible to suppress propagation of microorganisms left in the dishwasher and to remove organic substances, using a sterilizing agent or high-temperature water. It is also possible to reduce generation of offensive odor caused by decomposition of bacteria, through a reduction in the amount of bacteria in the dishwasher. Since sterilization of the dishwasher is automatically carried out, enhanced user convenience is provided.

Abstract: A modular recycling cleaning system comprising in combination: a pressure washing and control module, a vacuum motor assembly module, a reservoir module, an air/liquid separator module, a flexible hose system, a control system and a cleaning head, capable of being easily configured so as to function as any one of: a straight through pressure washer with cleaning liquid supplied from an external source; a straight through pressure washer with cleaning liquid supplied internally from an integral water reservoir; a recycling pressure washer with cleaning liquid being supplied and reused from an integral cleaning liquid reservoir replenished with cleaning liquid by means of a vacuum recovery system; a straight through pressure washer with recovery of contaminated cleaning liquid but without reuse; a conventional wet vacuum cleaning system or a conventional dry vacuum cleaning system. The appliance being capable of further configuration as a shampooing machine.

Abstract: The equipment is based on the use of active-carbon filters (5) for the absorption of halogens originating from the cleaning of containers of chemical product, which includes a chassis (1) that supports a stainless-steel tank (3), which contains the containers to be treated or cleaned, and also conduits (9) that finish off as flexible nozzles (10) via which water is propelled towards the inside of the containers, the bottom of said tank (3) having a manual purge device (14), positioned in a well (13). The equipment comprises boost (15) and sorption (16) pumps, for the cleaning liquid and for dissolution towards the active-carbon filters, respectively, and also rigid and flexible connections (17) corresponding to the hydraulic circuit for distribution of the liquid and dissolution. The chassis (1) has wheels (2) so that it can be moved from place to place.

Abstract: The in situ cleaning system provides an inlet capable of providing feed water to an in situ cleaning component, one or more in situ cleaning components, including water treatment components, an oxidizing agent generating component and/or alkalinity generating component, and an outlet in fluid communication with a washing system, providing a cleaning use solution to the washing system.

Abstract: An electric household appliance has a chamber that is at least partially filled with liquid during operation of the appliance. A motor drives a pump for drawing liquid from the chamber. A monitoring device detects the rotational speed and the power of the motor, compares detected values for the rotational speed and power to a predefined characteristic, and signals an exceptional state if the comparison indicates that the detected values deviate significantly from the characteristic.

Abstract: A cleaning system which includes an enclosure and having a door with a transparent window. The door is opened and closed to load and unload products to be cleaned. An operator puck on the outside of the enclosure couples magnetically to another actuator puck on the inside of the enclosure. This coupling allows an operator to move and direct the inside puck to actuate spray or air blast functions, without opening the enclosure. The outside operator puck includes one or more switches which turn on the various electronic components such as the liquid pump, light, or air blast valve. The cleaning system enables a user to efficiently direct cleaning action to parts inside to minimize the cleaning time, and to prevent exposure of chemicals. The cleaning fluid is cycled out of the enclosure continuously, and into a “trap” box, through a pump and back into the cleaner box in a closed loop cycle.

Abstract: A caustic recovery arrangement for a clean-in-place system permits recovery of the caustic solution used for cleaning sanitary liquid-food processing equipment. A recovery tank receives the caustic aqueous solution and entrained solids. The caustic recovery tank has an upper barrel portion and a lower conic portion. The caustic solution remains in the recovery tank for about eight hours to allow the solids to settle out into the conic portion. A solution drain conduit at a lower end of the barrel portion connects to a caustic recovery line with a pump that feeds the recovered solution back to a main caustic supply tank. A solids drain conduit leads from an outlet at the bottom end of the conic portion of the caustic recovery tank to a solids receptacle so that the solids can be recovered for use, e.g., as animal feed or as fertilizer.

Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus according to embodiments of the present invention may include a cleaning chamber cleaning foreign objects on a substrate, and a recycling unit recycling by recovering a mixed solution including a first chemical and a second chemical used in cleaning of the substrate, wherein the recycling unit includes a separation unit separating the mixed solution recovered from the cleaning chamber, a recovery line connecting the separation unit and the cleaning chamber and allowing the mixed solution to flow into the separation unit, a decompression line having one end connected to the separation unit and exhausting the mixed solution evaporated from the separation unit, and a decompression unit installed in the decompression line and reducing pressure in the separation unit.

Abstract: A plasma generator 1 includes a first electrode 12 provided in a gas storage section 5, and a second electrode 13 provided in such a manner that at least a portion coupled with the first electrode 12 comes into contact with a liquid 17 in a liquid storage section 4. Electrical discharge is caused between the first electrode 12 and the second electrode 13 so that plasma is produced in a gas region in the liquid 17 in the liquid storage section 4, and hydroxyl radical is produced from water contained in the liquid 17 and oxygen contained in the gas.

Abstract: A fluidic tile having a first substrate containing macrofluidic structures bonded to a second substrate containing microfluidic structures. The microfluidic structures correspond to the macrofluidic structures in the first substrate and provide fluid flow paths between the macrofluidic structures. One of the microfluidic structures is a washing siphon that provides a fluid flow path between a purification chamber and a waste chamber. The washing siphon is configured to be primed when a volume of liquid in the purification chamber exceeds a predetermined amount causing the washing siphon to initiate transfer of the liquid in the purification chamber to the waste chamber when the volume of the liquid in the purification chamber exceeds the predetermined amount.

Abstract: A mobile mattress sanitizing and cleaning system. A cleaning chamber and drying chamber may be located within the body of truck which may also carry a water supply and steam generator. The cleaning and drying chambers are dimensioned and configured to receive a mattress therein, and may be separate or combined. The mattress is steam cleaned in the cleaning chamber and air dried in the drying chamber. The cleaning and drying chambers may face the rear of the truck to facilitate loading and may be oriented such that mattresses stand on edge when being cleaned and dried. The system may include a water purifier. Drying may be conducted by blowers mounted to the drying chamber. Drying air may be heated.

Abstract: The present invention relates to methods, apparatuses, and systems for treating water. The methods, apparatuses and systems reduce scaling associated with solubilized water hardness using a sequence of water treatment agents, including a first threshold agent shedding weak cation exchange resin and a second magnesium compound conversion agent water treatment. The system or apparatus and methods according to the invention provide synergistic reduction of hard water scaling and elimination of cementing on the insoluble magnesium compound.

Abstract: A cleaning apparatus for cleaning a hair-cutting portion of an electric hair-cutting device includes a cleaning-liquid basin for receiving the hair-cutting portion of the electric hair-cutting device in a central area such that the hair-cutting portion is at least partially immersed in the cleaning liquid. The electric hair-cutting device is cleaned by generating a cleaning-liquid flow revolving within the basin around the central area of the basin, the hair-cutting portion being at least partially immersed in the cleaning liquid. The liquid flow effectively entrains debris away from the hair-cutting portion.

Abstract: The softener is based on a capacitive-deionization (CDI) cell, in which the hardness ions are extracted, and disposed of still intact, in concentrated form. The softener is combined with a chelate to inhibit precipitation, in the appliance, from the concentrated effluent. The chelate being citric acid, the acidity is effective to keep the hardness ions in solution. The purify and regenerate modes of operation of the softener can be timed to coincide with the washing and rinsing cycles of the appliance, whereby the presence of the softener does not affect the speed and performance of the appliance.

Abstract: In certain embodiments of the present disclosure, a fluid filtration assembly for a dishwasher system is described. The dishwasher system includes a tub defining a wash chamber configured to receive dishwasher contents. The fluid filtration assembly includes a filter assembly having a filter material, a filter fluid inlet, and a filter fluid outlet. The filter fluid inlet is in flow communication with the wash chamber and the filter material. The filter assembly further includes a cleaning fluid inlet that is configured to backflush the filter material. The filter fluid outlet is in flow communication with both the cleaning fluid inlet and the filter fluid inlet. The fluid filtration assembly further includes a valve assembly in flow communication with the cleaning fluid inlet through a first flow path.

Abstract: A system for regulating a reverse osmosis system to obtain zero wastewater. A reverse osmosis apparatus filters water from the fresh water supply into a concentrate rinse stream and a permeate rinse stream. A concentrate storage tank and a permeate storage tank are downstream of the reverse osmosis apparatus and receive the concentrate rinse stream and the permeate rinse stream, respectively. A concentrate solenoid valve and a permeate solenoid valve control the flow of the concentrate rinse stream and the permeate rinse stream from their respective storage tank. An institutional dishmachine receives the concentrate rinse stream and the permeate rinse stream during a rinse cycle of the institutional dishmachine. A control system is operatively connected to the concentrate solenoid valve and the permeate solenoid valve and control flow of the rinse streams into the institutional dishmachine.

Abstract: A method of cleaning a particle filter, in particular for combustion engines, includes the steps of adding heat to the inner of the particle filter during a certain time period in order to burn off the enclosed particles, to add liquid material to the inner of the filter during a certain time period in order to remove the burnt particles from the particle filter.

Abstract: A self-contained, mobile system for cleaning trash receptacles. The system comprises a water system and a lift system that work in conjunction with each other to provide an automated method for cleaning trash receptacles. The water system acts as a water purification system minimizing waste of the cleaning solution and maximizing efficiency. The system may be adapted to clean multiple trash receptacles sequentially or simultaneously.

Abstract: Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.

Abstract: Device for separating ferritic impurities, such as crown caps, out of bottle cleaning machines, including a circulating band screen for the filtration of rinsing water, wherein the band screen is provided with one or more magnetic units.

Abstract: A method measures a property of a germicidal solution in an endoscope processor spectroscopically by placing a quantity of the solution into a cuvette and passing a light therethrough. A reservoir receives a quantity of the solution and bubbles are filtered out via a cross-flow filter prior to putting a sample therefrom into the cuvette for measuring.

Abstract: A water-using household appliance includes a treatment chamber, a water softener for wash or rinse water, a regenerating device associated with the water softener and configured to contain a supply of brine, and a storage container disposed in a thermally conductive relationship with the treatment chamber. The storage container includes a liquor volume, a regeneration volume for producing the brine supply, and a first outlet operable for substantially emptying the storage container.

Abstract: A fluid separation apparatus suitable for separating a mixed fluid with different properties and capable of separating a complex fluid mixture efficiently is provided. The fluid separation apparatus includes a sampling entrance, a first separation column, a second separation column, a bypass line, a detector and a guide multi-channel valve. A mixed fluid flows into the first separation column via the sampling entrance. The second separation column is connected to the first separation column in series and connected to the bypass line in parallel. The detector is connected to the second separation column and the bypass line. The guide multi-channel valve has different modes to control a flow-through status and a closed status between the first separation column and the second separation column, between the first separation column and the bypass line, between the second separation column and the detector, and between the bypass line and the detector.

Abstract: A bi-solvent cleaning system for cleaning precision components without the use of VOC solvents. The bi-solvent cleaning system provides for is a two mode operation for cleaning and rinsing precision components using VOC exempt solvents that is as effective as prior art VOC solvent based systems while subsequently allowing for recovery and reuse of a VOC exempt solvent.

Abstract: A container for sterilizing and storing surgical materials and preserving surgical materials in a sterilized condition is disclosed herein. The container includes a lid, liner and in many embodiments, a frame. The lid and liner are desirably disposable and recyclable after a single use while the frame should be reusable many times. The liner and optionally the lid is substantially transparent so that a user can inspect the instruments while the container is closed without compromising the sterile nature of the inside of the container.

Abstract: A washing unit for turboprops, in particular of aircrafts, characterised in that it comprises at least one hydraulic pump (6, 7) which draws cleaning liquid contained in one or more external tanks in order to spill that liquid from a supply outlet (12) with a predetermined pressure and a predefined flow.

Abstract: A dishwasher having a UV generator that sterilizes dishes is provided. The dishwasher includes a tub that holds dishes to be washed, a sump that holds washing water, a spray nozzle that sprays the washing water into the dishwasher, and at least one UV generator that directs a UV beam into the dishwasher.

Abstract: A filtration system for a dishwasher, and an associated apparatus and method, are provided, comprising a macerator chamber adapted to house a macerator device. The macerator chamber is configured to receive washing fluid for the macerator device to comminute contaminants within the washing fluid. A drain chamber is in fluid communication with the macerator chamber and is configured to receive the washing fluid and comminuted contaminants therefrom via a fluid port therebetween. The drain chamber has a vented member associated therewith, which defines at least one first vent providing fluid communication between the drain chamber and the washing fluid circulation system. The vented member is spaced apart from the fluid port, and is configured to strain the comminuted contaminants from the washing fluid so as to retain the comminuted contaminants within the drain chamber while allowing the washing fluid to pass therethrough to the washing fluid circulation system.

Abstract: Methods and apparatus for recovery and reuse of reagents are provided herein. In some embodiments, a system for processing substrates may include a process chamber for processing a substrate; a reagent source coupled to the process chamber to provide a reagent to the process chamber; and a reagent recovery system to collect, and at least one of purify or concentrate the reagent recovered from an effluent exhausted from the process chamber. In some embodiments, a method for recovering unreacted reagent may include providing reagent from a reagent source to a process chamber; exposing a substrate disposed in the process chamber to the reagent, forming an effluent; exhausting the effluent from the process chamber; and recovering unreacted reagent from the effluent in a reagent recovery system.

Abstract: The present invention relates to a method and a device for cleaning ophthalmic lenses, particularly contact lenses. The method and the device are suitable for integration into an automated production of ophthalmic lenses, particularly contact lenses.

Abstract: A method for removing particles or deposits from a surface having particles or deposits thereon. The method involves contacting a surface with a chemical composition sufficient to selectively dissolve and remove at least a portion of the particles or deposits from the surface. The chemical composition is compatible with the surface. This disclosure also relates to a system of specially designed equipment for removing particles or deposits from a surface having particles or deposits thereon. The disclosure is useful, for example, in cleaning porous surfaces, media for cartridge, pleated and membrane surfaces, and internal walls of tanks or filter housings.

Abstract: A rotary spray washer for heavy duty applications. Each spray device in the system comprises a rotary coupling and two sets of radially extending spray arms. Each set of arms has nozzles at the distal ends to direct water generally toward a target area but angled enough to produce a rotation-producing reaction torque. One set of arms is longer than the other whereby the shorter arms produce a reaction torque which limits the overall speed of rotation without the need for a friction brake or fluid pump brake.

Abstract: A dishwasher comprises a wash chamber and a water-collecting sump member which is fastened to an opening in a lower end portion of the wash chamber by means of a water-tight connection, wherein the sump member is made at least in part of plastics material and comprises at least one water inlet or outlet opening that is formed as an integral part of the sump member. The dishwasher comprises a water softening device and the sump member comprises a water inlet and an integrated first passage which is formed at least in part of plastics material as an integrally formed part of the sump member for passing water from the water inlet to the water softening device.

Abstract: A cleaning system can include a noble gas, and one or more vessels configured to convert the noble gas into a supercritical fluid, and/or receive and clean an article of manufacture with the noble gas in the supercritical fluid state. A cleaning process can include converting a noble gas into a supercritical fluid state; and cleaning an article of manufacture with the noble gas in the supercritical fluid state so as to remove one or more contaminates from the article of manufacture. A cleaning composition can include a noble gas in a supercritical fluid state, and a textile article of manufacture having one or more contaminates located in the supercritical noble gas.