Abstract: A substrate processing apparatus includes a process chamber including a first body and a second body that are coupled to each other to form a processing space therein, a clamping member configured to clamp the first body and the second body, and an anti-friction member mounted in a groove formed in a contact region between the first body or the second body and the clamping member.

Abstract: The disclosure provides a substrate processing apparatus that processes a surface of a substrate with a processing fluid in a supercritical state, in which the substrate is protected from the pressure fluctuation caused by partial vaporization of the processing fluid in the flow path. A substrate processing apparatus which processes a surface of a substrate with a processing fluid in a supercritical state includes a chamber housing provided therein with a processing space capable of housing the substrate and a flow path which receives the processing fluid from outside and guides the processing fluid to the processing space, and a fluid supply part which pressure-feeds the processing fluid to the flow path, wherein a plurality of bent parts which change a flow direction of the processing fluid are provided in the flow path.

Abstract: An ion implantation system including an ion implanter, a dopant source gas supply system and a monitoring system is provided. The ion implanter is inside a housing and includes an ion source unit. The dopant source gas supply system includes a first and a second dopant source gas storage cylinder in a gas cabinet outside of the housing and configured to supply a dopant source gas to the ion source unit, and a first and a second dopant source gas supply pipe coupled to respective first and second dopant source gas storage cylinders. Each of the first and second dopant source gas supply pipes includes an inner pipe and an outer pipe enclosing the inner pipe. The monitoring system is coupled to the outer pipe of each of the first and the second dopant source gas supply pipes.

Abstract: One or more embodiments described herein generally relate to drying environments within semiconductor processing systems. In these embodiments, substrates are cleaned and dried within a drying environment before returning to the factory interface. However, due to an opening between the factory interface and the drying environment, air flows from the factory interface into the drying environment, often reducing the effectiveness of the drying processes. In embodiments described herein, the air flow is blocked by a sliding door that raises up to the closed position when a substrate enters the drying portion of the dryer located within the drying environment. After the substrate exits the dryer and before the substrate enters the factory interface, the sliding door lowers to the opened position such that the substrate can enter the factory interface. As such, these processes allow for multiple substrates to dry quickly and consistently within the system, improving throughput.

Abstract: A washing machine having a plurality of washing apparatuses is provided. The washing machine includes a tub, a drum rotatably disposed inside the tub, a discharge member provided in the tub to discharge air in the drum to the outside of the tub, and a cap coupled to the discharge member to prevent water in the drum from being discharged to the outside of the tub through the discharge member.

Abstract: Disclosed are a supercritical process chamber and an apparatus having the same. The process chamber includes a body frame having a protrusion protruding in an upward vertical direction from a first surface of the body frame and a recess defined by the protrusion and the first surface of the body frame; a cover frame; a buffer chamber arranged between the body frame and the cover frame; and a connector. The buffer chamber includes an inner vessel detachably coupled to the body frame providing a chamber space in the recess and an inner cover detachably coupled to the cover frame. The inner cover is in contact with a first surface of the inner vessel enclosing the chamber space from surroundings. The connector couples the body frame and the cover frame having the buffer chamber arranged therebetween such that the enclosed chamber space is transformed into a process space in which the supercritical process is performed.

Abstract: A substrate processing apparatus according to an exemplary embodiment to the present disclosure includes: a main body which has therein a processing space capable of accommodating the substrate; a holding unit which holds the substrate in the main body; a supply unit which is provided at a side of the substrate held by the holding unit and supplies the processing fluid into the processing space; a discharge unit which discharges the processing fluid from an inside of the processing space; and a flow path limiting unit which limits a lower end of a flow path at an upstream side which is formed while the processing fluid flows from the supply unit to the discharge unit. Further, an upper end of the flow path limiting unit is disposed at a position higher than the upper surface of the substrate held by the holding unit.

Abstract: A laundry appliance includes a cabinet and a top panel coupled to a top edge of the cabinet. A console shell is coupled to the top panel. The console shell defined left and right shoulders extending from the console shell towards a front of the cabinet. An edge-to-edge lid is coupled to the left and right shoulders via left and right wire hinges, respectively.

Abstract: A dishwasher has a treating chamber for receiving dishes for treatment according to an automatic cycle of operation and a dispensing system for storing and dispensing treating chemistry to the treating chamber during the cycle of operation. The dishwasher can be provided with a lifetime supply of a treating chemistry for the dispensing system.

Abstract: A washing basket assembly and a tray assembly for a dish-washing machine as well as a dish-washing machine are provided. The washing basket assembly includes a first basket body and a second basket body. The second basket body s disposed to the first basket body and switchable between an opened position and a closed position. When the second basket body is in the closed position, the second basket body and the first basket body are configured to define a receiving cavity having an opening and used for receiving tableware. When the second basket body is in the opened position, a sum of a projection area of the first basket body in a horizontal plane and a projection area of the second basket body in the horizontal plane is larger than the projection area of the first basket body in the horizontal plane.

Abstract: Support structures for dishwashers are disclosed. An example dishwasher for treating dishes according to a cycle of operation includes a tub defining a treating chamber with an opening, a frame coupled to and structurally supporting at least a portion of the tub, a dish rack mount coupled to the frame, and a dish rack coupled to the dish rack mount, wherein the weight of the dish rack is substantially borne by the frame.

Abstract: Dust that is accumulated in an exhaust passage provided in a chamber, the exhaust passage for discharging gas in the chamber of a semiconductor crystal manufacturing device, is removed by being sucked from the outside of the chamber. Moreover, an opening and closing valve for cleaning that is detachably attached to an opening of the exhaust passage, the opening facing the chamber, is opened and closed intermittently in a suction state. Furthermore, the opening and closing valve for cleaning is driven by a valve driving unit. The dust accumulated in the exhaust passage is removed efficiently, whereby the time required to clean the exhaust passage is shortened and fluctuations of the pressure inside the chamber when a semiconductor crystal is manufactured are suppressed.

Abstract: A dishwasher appliance includes a cabinet defining a wash chamber for receipt of articles for washing. The dishwasher appliance also includes a spray arm disposed within the wash chamber and rotatable about an axis. In addition, the spray arm defines an interior and aperture providing selective fluid communication between the interior and the wash chamber. The dishwasher appliance also includes a valve positioned within the interior of the spray arm, and the valve is stationary relative to the spray arm. The spray arm is rotatable between a first position and a second position. In the first position, the valve allows fluid communication between the interior and the wash chamber through the aperture. In contrast, when the spray arm is in the second position, the valve obstructs fluid communication between the interior and the wash chamber through the aperture.

Abstract: A substrate processing device includes a suction drying section drying a surface of a substrate by absorbing and removing a liquid droplet of volatile solvent formed on the surface of the substrate by a heating operation of a heating section.

Abstract: A brush-cleaning apparatus is disclosed for use in cleaning a semiconductor wafer after polishing. Embodiments of the brush-cleaning apparatus implemented with a multi-branch chemical dispensing unit are applied beneficially to clean semiconductor wafers, post-polish, using a hybrid cleaning method. An exemplary hybrid cleaning method employs a two-chemical sequence in which first and second chemical treatment modules are separate from one another, and are followed by a pH-neutralizing—rinse that occurs in a treatment module separate from the first and second chemical treatment modules. Implementation of such hybrid methods is facilitated by the multi-branch chemical dispensing unit, which provides separate chemical lines to different chemical treatment modules, and dispenses chemical to at least four different areas of each wafer during single-wafer processing in an upright orientation.

Abstract: A dishwasher includes a shiftable rack provided with multiple, distinct washing fluid spray arms connected to a common, rack supported manifold. When the rack is shifted to a retracted position within a tub of the dishwasher, the manifold mates with a coupling of a fluid distribution system including a multi-tube feed arrangement configured to selectively distribute washing fluid from a pump assembly to the multiple spray arms.

Abstract: A heat exchanger includes a header, a plurality of tubes, and a distributor. The header is configured to define an inlet for the heat exchanger. The tubes extend away from and are fluidicly coupled to the header. The distributor is located within the header and is configured to distribute refrigerant flowing along a longitudinal axis from the inlet to the tubes via a plurality of openings defined by the distributor through a wall of the distributor. The openings include a first opening configured to direct refrigerant in a first direction, and a second opening configured to direct refrigerant in a second direction. The first direction and the second direction are selected such that refrigerant emitted from the first opening and the second opening substantially intersect each other.

Abstract: A dish washer according to an embodiment of the present invention includes a cabinet which forms a dish washing space; a door which opens and closes an opened front surface of the cabinet; wherein door includes an out plate which is made of metal plate material and forms the front surface of the door and at least a portion of appearance of a peripheral surface of the door by being bent the front surface, an operating unit which is formed on the peripheral surface of the door so that a user operates by touch, a PCB assembly which is in close contact with a rear surface of the operating unit and on which a plurality of touch sensors detecting displacement of the operating unit are mounted, a mounting bracket which is mounted to be fixed to an inside surface of the out plate, and an elastic member which is mounted on the mounting bracket and presses and supports the PCB assembly to the a rear surface of the operating unit.

Abstract: A stored value card activation system includes a server in communication with one or more computing devices configured in kiosks. The server receives stored value card type information associated with one of multiple non-activated stored value cards from the computing device. The server also receives monetary amount information to be associated with the selected stored value card from the kiosk, and payment information from a user of the kiosk. From this information, the server conducts a financial transaction with a financial account server associated with an account of the user, and activates the selected stored value card in accordance with the financial transaction.

Abstract: In one aspect, a dishwasher having sidewalls at least partially defining a treating chamber and defining an access opening, a rack rail mount, and a rack rail coupled to the tub mount slidably mounting a dishrack. The tub mount includes at least a light source and an electrical connection configured to provide electrical connection from the light source to a wiring harness adjacent the sidewall.

Abstract: Dishwasher utensil caddies are disclosed. A disclosed example utensil caddy for a dishwasher having a tub and a door at least partially defining a treating chamber, and dish rack in the treating chamber, includes an attachment member configured to attach the utensil caddy to a side of the dish rack in a space between the dish rack and the tub or the door, and a slot oriented at an angle relative to the dish rack, and configured to receive a handle of a cooking utensil.

Abstract: A pipe support structure which is constructed to utilize the Coriolis force and the reaction force caused, thereby making it possible to suppress the hose compliance amount in the high temperature area while maintaining the degree of freedom of mountability specific for the resin pipe and to realize the above suppressing effect by the simple construction and at a low cost.

Abstract: The present invention relates to a dishwasher (1) comprising a tub (2) wherein the washing items are washed, rinsed and dried, a fan (4) that enables the hot and humid air to be sucked from a suction channel (3) opening into the tub (2) during the drying process and to be mixed with the dry air from the outside environment in a certain ratio, an outlet port (5) that directs the air blown by the fan (4), a discharge channel (6) that is connected to the outlet port (5) of the fan (4) and that enables the air blown by the outlet port (5) of the fan (4) to be delivered to the outside environment, and a return channel (7) that enables the air blown by the outlet port (5) to be redelivered into the tub (2).

Abstract: A multi-compartment dishwasher may include a treating chemistry dispenser for storing and dispensing treating chemistry into the multiple compartments of the dishwasher. In one embodiment, the treating chemistry may be dispensed into a liquid recirculation circuit. In another embodiment, the treating chemistry dispenser may be located between the multiple chambers of the dishwasher.

Abstract: A gasket usable with a washing machine capable of reinforcing the strength thereof while improving the vibration reducing performance of the gasket, a gasket connecting a tub to the front surface frame, wherein the gasket includes a body having a hollowness part configured to accommodate a portion of the door and a periphery part configured to surround the hollowness part, and a reinforcing rib formed by protruding at least one portion of the periphery part so as to reinforce a strength of the gasket, and wherein the reinforcing rib has a rear surface further concaved than an inner surface of the periphery part that is adjacent to the rear surface. The gasket further comprise a connection lip that contacts the closed door, such that the connection lip has a connection rib having a greater thickness in the lower portion of the lip than the upper portion of the lip.

Abstract: A dishwasher includes a tub at least partially defining a treating chamber and a sprayer for spraying liquid to the treating chamber. The sprayer may include a liquid passage and at least one outlet extending from an interior to an exterior of the sprayer and in fluid communication with the liquid passage. A membrane may have at least one opening and may be in fluid communication with the liquid passage to control the flow of liquid through the at least one outlet.

Abstract: A domestic appliance, and a dishwasher in particular, which includes a rack which is able to be reversibly pulled out from within the dishwasher for the placement of dishware and/or crockery, wherein the rack includes an actuator configured to rotate a multi-sided rotatable tine body such as to select between a discrete number of predetermined tine configurations which differ in tine height, spacing, and the distance between tines.

Abstract: A brush-cleaning apparatus is disclosed for use in cleaning a semiconductor wafer after polishing. Embodiments of the brush-cleaning apparatus implemented with a multi-branch chemical dispensing unit are applied beneficially to clean semiconductor wafers, post-polish, using a hybrid cleaning method. An exemplary hybrid cleaning method employs a two-chemical sequence in which first and second chemical treatment modules are separate from one another, and are followed by a pH-neutralizing-rinse that occurs in a treatment module separate from the first and second chemical treatment modules. Implementation of such hybrid methods is facilitated by the multi-branch chemical dispensing unit, which provides separate chemical lines to different chemical treatment modules, and dispenses chemical to at least four different areas of each wafer during single-wafer processing in an upright orientation.

Abstract: An automatic dishwasher having a tub defining a treating chamber and a housing physically separate from the tub and defining a sump to receive liquid sprayed into the tub, the housing having an inlet fluidly connected to a liquid outlet of the tub and an outlet fluidly coupled to a sprayer located within the tub to define a recirculation path for the sprayed liquid.

Abstract: An appliance such as a dishwasher comprises an upper region and a lower region forming an appliance footprint. Positioned in the upper region is a spray arm assembly and a wash tub forming a wash zone. The wash zone has a low or reduced capacity, thereby holding fewer objects than conventional dishwashers but maintaining the appliance footprint so that the dishwasher fits an appliance opening, e.g., in kitchen cabinetry, that has a standard width dimension and a standard height dimension. In one embodiment, the wash zone has an opening through is received a rack, which supports the objects in the wash zone. The rack is moveable between a first position and a second position, and in one example, the rack is configured to move between the first position and the second position relative to the wash zone and independent of the spray arm assembly.

Abstract: A dish rack for use in a dishwasher is provided. The dish rack includes a front wall, a pair of spaced apart and opposite side walls, and a back wall interconnected so as to bound a space. A hydraulic circuit is disposed within the walls of the dish rack and a spray nozzle is mounted on the wall.

Abstract: An automatic warewashing machine includes a washing chamber, a hinged door configured to close the washing chamber, and a force-locking latching mechanism configured to hold the door in a closed position and release the door in response to a pulling force. The force-locking latching mechanism is disposed on the washing chamber or on a body enclosing the washing chamber. A door opening system is also included and has a push-open unit configured to automatically open the door to at least an ajar position. The push-open unit includes a motor-driven push-type opening bar.

Abstract: A domestic appliance includes at least one component having a surface that can become laden with organic dirt. The surface includes a photocatalyst and is made from a primary-formed first material in which the photocatalyst is dispersed. A photoradiation source is provided for irradiating the photocatalyst with an activating electromagnetic radiation.

Abstract: An ice dispensing system includes an ice hopper structure including a plurality of walls having inner surfaces that define an inner volume storing ice therein. The ice hopper may include a drain. A cleaning structure is coupled to the ice hopper structure. The cleaning structure includes a pump linked to a spray mechanism positioned within the inner volume of the ice hopper structure. The spray mechanism disperses a liquid on an inner surface of the ice hopper structure during a cleaning cycle of the ice dispensing mechanism.

Abstract: A spray arm assembly for a dishwasher system is disclosed. The spray arm assembly includes a spray arm which has an internal chamber, a liquid inlet in flow communication with the internal chamber to supply the internal chamber with liquid from a source of liquid, an outlet passageway in flow communication with the internal chamber for discharging liquid from the internal chamber, an air inlet in flow communication with the outlet passageway, and a region adjacent the air inlet and defining part of the outlet passageway. The region is configured to create a venturi effect at the air inlet when the liquid passes through the region so that air is drawn into the outlet passageway from the air inlet and a mixture of air and liquid is discharged from the outlet passageway. A dishwasher system incorporating such a spray arm assembly is also disclosed.

Abstract: A device for gently cleaning, sterilizing, and drying large volumes of small parts, having a stationary, preferably spherical treatment container optionally having a cooling device and having a rotating inner basket disposed in the interior thereof. The inner basket is preferably sealed off from the treatment container and driven by a stepper motor or servo motor.

Abstract: The present invention is an improved cutting board device. The device allows a user to prepare food on one side of the cutting board while the other is being cleaned. The device provides a user a quick and easy transition to a new, clean, cutting board work surface without the need to carry waste to a disposal bin, without having to stop to wash and dry the soiled surface of the cutting board.

Abstract: A wash arm arrangement (20) for a dishwasher is disclosed. The wash arm arrangement comprises a central arm (21) adapted to be rotatably connected with a first shaft (23) through which liquid under pressure is fed into the central arm during operation. A second shaft (24) is arranged on the central arm to provide liquid to a satellite arm (22) which is rotatably connected with the second shaft. The satellite arm comprises a collimating nozzle (25) with an exit. The collimating nozzle is arranged for providing a collimated jet for distributing liquid to a washing area of the dishwasher. The inventive concept is based on an understanding that by utilizing a collimated liquid jet with sufficient pressure and flow a good cleaning performance is achieved with a reduced water consumption.

Abstract: Cleaning mechanisms for optical elements are disclosed herein. Example apparatus disclosed herein to clean an optical element can include a cover positionable over a first side of the optical element. In some examples, the cover is controllable to transition between a first position and a second position. For example, the cover can form a gap between a first side of the optical element and the cover when the cover is in the first position, and the cover can provide the optical element with access to a field-of-view when the cover is in the second position. Such example apparatus can also include a flushing assembly controllable to inject cleaning fluid into the gap when the cover is in the first position. In some examples, the flushing assembly also includes a valve that is controllable to permit the cleaning fluid to exit the gap after having been injected into the gap.

Abstract: A paint roller enclosure and cleaning device is disclosed that eliminates the need for a user to manually clean a roller tool after its use. The device comprises an enclosure with an interior volume wherein a used paint roller is secured. A spray pipe with a plurality of apertures directs fluid directly onto the roller. Feed for the spray pipe is controllable by a ball valve that regulates the flow of fluid, updating the intensity and volume of fluid being entered into the enclosure. When flowing, the fluid sprays from the spray pipe within the enclosure directed at a paint roller and handle. The roller is forcibly rotated by the spray fluid and cleaned of residual paint and debris without requiring the user to do so by hand. Fluid then drains through a drainage hole at the base of the enclosure, into a flex pipe and into a drain or appropriate container.

Abstract: A dishwasher includes a wash tub enclosing an interior and a clean water feed line which passes through a port of the wash tub into the interior. The feed line has a line end leading from outside to the wash tub. An inlet bolt can be fastened from the interior to the line end and has an axial bore to extend the feed line. The axial bore leads into a plurality of inlet openings which are distributed over a circumference on a circumferential surface of the inlet bolt projecting into the interior. The inlet bolt has an end which faces the interior and is implemented as a cover to protect the axial bore from ingress of splash water.

Abstract: A dishwasher having a tub defining a wash chamber and at least one dish rack located within the wash chamber. The dishwasher also has at least two spray zones and a diverter valve that controls the supply of liquid from a liquid supply to one of the two spray zones.

Abstract: A device according to the present invention can be used for the hydraulic and mechanical connection of a distributor circuit of washing liquid of a trolley carrying objects to be washed to a feed circuit of a washing liquid for a washer machine for objects. The washer machine provides a washing chamber in which to position the trolley which has at least a lateral wall with respect to the direction of insertion of the trolley into the washing chamber. The device comprises a connection member of the distributor circuit, a corresponding delivery or coupling mouth of the feed circuit provided on said lateral wall and at least a connection bushing associable on one side to the connection member of the distributor circuit and on the other side to a corresponding delivery or coupling mouth of the feed circuit that faces inside a washing chamber of the washer machine, so as to determine the mechanical and hydraulic connection between feed circuit and distributor circuit.

Abstract: A wash arm arrangement (100) for a dishwasher is disclosed. The wash arm arrangement comprises a central arm (121) adapted to be rotatably connected with a first liquid supply shaft (123) for providing pressurized liquid during operation of the dishwasher. The central arm has a first nozzle (130) arranged for outputting a jet of liquid during operation thereby providing a first reaction force Fc for rotating the central arm about its axis of rotation in a first direction. The wash arm arrangement further comprises a satellite arm (122) rotatably arranged on a second liquid supply shaft (124) arranged on an outer end of the central arm, the satellite arm having a second nozzle (131) arranged for outputting a jet of liquid during operation thereby providing a second reaction force Fs for rotating the satellite arm about its axis of rotation in a second direction being opposite to the first direction.

Abstract: A dishwasher is provided. The dishwasher may include a case, a tub provided in the case and forming a dishwashing space, a re-using section provided inside the case and forming a space for storing wash water to be sprayed into the tub, and a water storing section provided inside the case and forming another space, separated from the re-using section, for storing externally supplied wash water.

Abstract: An exemplary cleaning apparatus includes a cleaning member, a connecting member, a drying member, and a workpiece holder. The connecting member includes a main housing defining two opposite surfaces and two blocks received in the main housing. The main housing defines a first chamber and two second chambers communicating with the first chamber, each of the second chambers extending through to one of the two opposite surfaces and near to the other opposite surface. The cleaning member and the drying member are connected to the two opposite surfaces and communicate with each other via the first chamber. The two blocks are movable between the first chamber the second chambers, respectively. Each block defines an engaging surface, facing the other engaging surface. When the blocks move into the first chamber and the engaging surfaces engage with each other, the blocks shut off communication between the cleaning member and the drying member.

Abstract: A dishwasher includes a cabinet; a washing tub provided at an inside of the cabinet; a sump provided at a lower side of the washing tub to store wash water; a heater to heat the wash water; a spray nozzle configured to spray the heated wash water that is pumped from the sump toward inside of the washing tub; and a door configured to open and close a front of the washing tub, the door including a drying device configured to cool high-temperature/high-humidity air from the washing tub and then to discharge the cooled air outside of the dishwasher. The drying device includes a condensation duct to condense the high-temperature/high-humidity air from the washing tub; a first fan to draw in air from the washing tub to the condensation duct; and a second fan to draw in external air to the condensation duct.

Abstract: A dishwasher having a tub defining a wash chamber and at least one dish rack located within the wash chamber. The dishwasher also has at least one spray arm located in the wash chamber and at least one nozzle located in the wash chamber and configured to provide a spray of liquid into the dish rack. A diverter valve controls the supply of liquid from a liquid supply to the at least one nozzle.

Abstract: The present invention relates to a dishwasher and a method of controlling the dishwasher. A dishwasher according to an exemplary embodiment of the present invention includes: a tub forming a dishwashing space; a plurality of wash arms disposed in the tub and spraying wash water; a plurality of wash arm pipes connected with the wash arms, respectively, and supplying wash water; a reusing pipe diverging from at least any one of the wash arm pipes; and a reusing section storing wash water supplied from the reusing pipe.

Abstract: A dishwasher includes a tub at least partially defining a wash chamber and at least one dish rack located within the wash chamber. The dishwasher also has at least one sprayer located in the wash chamber and at least one nozzle located in the wash chamber and configured to provide a spray of liquid into the dish rack. A diverter valve controls the supply of liquid from a liquid supply to the at least one nozzle.