Abstract: A dishwasher includes a drawer which is slidably mounted in a frame and forms a washing chamber. A lid assembly is mounted to the frame for selectively sealing the washing chamber during a washing operation. A closing mechanism moves the lid assembly from a first or open position to a second or closed position that provides a water-tight seal during a washing operation. The dishwasher is further provided with a latching mechanism including a pivoting door front member, a locking member and a linking bar interconnecting the door front member with the locking member. Manipulation of the pivoting drawer front member causes the locking member to engage/disengage with the lid assembly. The latching mechanism further includes a locking bar and a micro-switch that combine to prevent operation of the dishwasher if the drawer is not properly positioned in the frame.

Abstract: The present invention relates to a dishwasher, and more particularly to a dishwasher having multiple wash zones. The dishwasher has an interior tub configured to provide an interior wash chamber for washing dishes. It also has a spray arm assembly configured to spray a first flow of wash liquid over a portion of the interior tub thereby providing a first wash zone. A spray manifold fixed adjacent a lower dish rack provided within the wash chamber is configured to provide a second flow of wash liquid toward the lower dish rack, thereby providing a second wash zone.

Abstract: The invention concerns a device and a method of adding rinse aids to a home appliance containing liquid, especially a household dishwasher, with a main tub (1), which has a service opening (4) to put the things to be washed into the main tub (1), whereby the device includes at least one dispensing unit (6) to hold and dispense the rinse aid. The dispensing unit (6) is placed in the main tub (1), whereby at least part of the dispensing unit (6) is placed so it can move or is movable and can be pulled out of the main tub (1), at least partly, in the direction of the service opening (4).

Abstract: A lid mechanism for a dishwasher having an least one washing unit provided with a lid includes at least one bracket that can be mounted to one of an outer support body and opposing side edge portions of a lid. The bracket includes a pin element that extends laterally outwardly from the bracket. The lid mechanism further includes at least one guide member that can be mounted to another of the outer support body and the opposing side edge portions of the lid. The guide member establishes a cam member and a guide track which cooperates with the pin element to raise and lower the lid relative to the washing unit. A spring is provided to biase the lid in a direction away from the washing unit.

Abstract: A mixing valve assembly 42 is communicated with a dedicated tank 51D, storing therein a compatibilizer D, via an inlet valve 43 and is also communicated with dedicated tanks 51A-51C via three injection valves, the tanks storing therein auxiliaries A-C respectively. A chemical formulation is prepared by selectively injecting any one(s) of four chemical agents into the mixing valve assembly 42 by way of on-off control of the inlet valve 43 and the injection valves and blending together the injected chemical agents. Then, the chemical formulation is pumped into SCF by a high-pressure pump 45 such that the SCF and the chemical formulation are mixed together to form a process fluid. Thus, the number of components of a high-pressure portion can be reduced to achieve a cost reduction of an apparatus. Furthermore, a pipe line for pumping the chemical agents is simplified.

Abstract: A modular exhaust vent for use in venting a wash chamber of a dishwasher, such as during a dry cycle, comprises a housing that forms an exhaust flow path from the wash chamber to the exterior of the dishwasher and a valve operable for pivotal movement about a pivot axis between an opened and closed position for selectively closing the exhaust flow path. An actuator for moving the valve is connected to the valve by a link such that activation of the actuator effects movement of the link to pivot the valve to either the opened or closed position. Further, the valve selectively closes the exhaust flow path at an inlet to impede introduction of sound into the exhaust flow path.

Abstract: The support removal apparatus comprising in combination a retention tank having a manifold assembly comprising a plurality of nozzle heads in hydraulic communication with the discharge side of a pump, collectively configured for agitating an aqueous cleaning solution comprised of sodium or potassium hydroxide, sodium or potassium carbonate, and water; a heating element mounted within the retention tank for heating the aqueous cleaning solution to a predetermined temperature set point; a basket strainer mounted within the retention tank in hydraulic communication with the intake side of the pump to mitigate passage of small rapid prototype parts and residual support material therethrough and into the pump and manifold assembly; a work surface mounted atop the retention tank and having a movable lid fitted with a basket for containing small rapid prototype parts; a thermocouple for maintaining the temperature within a tolerable range for optimum removal of support material; a level indicator to ensure adequate

Abstract: A chandelier cleaning apparatus includes a tent-like enclosure made of a transparent plastic. In a first embodiment, the enclosure includes a main body having a flat top panel and a flat, imperforate bottom panel. A central aperture is formed in the top panel and a zipper extends from the central aperture to an outer periphery of the top panel so that the central opening is enlarged when the zipper is open. The chandelier passes through the central aperture when the zipper is open and is enclosed within the enclosure when the zipper is closed. A mist of hot water is sprayed onto the chandelier with a wand that extends though a small opening in the enclosure. The time required to clean a typical chandelier drops from hours to minutes, no chemicals are used, and the chandelier is touched only by the hot mist.

Abstract: A washing device (1) for spray guns (16) and their components (16?, 16?) equipped with separate automatic (6) and manual (7) washing zones, comprises a boxed casing (2) suitable for housing in its interior a washing zone (3) and a collection and feeding zone (4). According to the invention, said device is characterized in that the washing zone is subdivided into a first zone (6) for automatic washing, and at least a second zone (7) for manual washing, and in that a swinging separation door (29), hinged on top by hinges (30) to the structure of the boxed casing (2), separates said two washing zones (6, 7) from each other.

Abstract: A method of controlling a dishwasher having a water softening function performed by a water softener is disclosed. The method includes the steps of loading in the dishwasher an item to be washed, supplying washing water through the water softener, washing the loaded item using the supplied washing water, drying the washed item, and regenerating, during said drying step, the water softening function.

Abstract: A dishwasher has multiple wash zones which are each supplied by a wash liquid supply. An interior tub configured to provide an interior wash chamber for washing dishes is divisible into a plurality of wash zones supplied by separate wash liquid supplies. One of the wash zones is supplied by a spray manifold having rotating spray heads. The spray heads are provided with internal vanes which urge the spray heads to rotate and direct wash liquid to outlets in the spray heads.

Abstract: An industrial washing machine for manufactured parts includes a cabinet with a support mounted in it to hold parts to be washed at any desired height to facilitate loading and unloading, and to permit the machine to hold parts of different sizes and shapes to increase its utility. A manifold in the cabinet sprays hot washing liquid on the parts, and includes a centrally located port so washing liquid can be sprayed longitudinally along the axis of rotation, and radially outwardly from the center of the cabinet. The load of parts being washed is supported by the manifold. A door with an adjustable latch seals the washer during the washing operation. A filtration system removes contaminants from the washing liquid, which is recycled for additional cleaning of parts. A pressure relief valve and a vent permit gas to flow from the cabinet when the pressure in the cabinet is at one value, and impedes flow of gas from the cabinet when the pressure is at a lower value.

Abstract: Disclosed is a high pressure processing method for subjecting a processing object to a high pressure processing using a high pressure fluid. In this method, the high pressure fluid is brought into collision with the surface of the processing object placed in a high pressure processing chamber, and then distributed along the surface of the processing object in an outward direction beyond the processing object.

Abstract: An apparatus for removing soil from a shoe, boot or other article of footwear. The apparatus employs a jet of water or other fluid to dislodge and break up the soil. The spray nozzle is housed within a tubular plunger having a discharge opening in its upper end. The plunger is operatively connected to the nozzle, so that stepping on the plunger actuates a flow of water therethrough. The nozzle includes a return spring that biases the valve back to the closed position when the plunger is released. The stream of water is directed through the opening against the surface of the shoe or other article of footwear. The upper end of the plunger is surrounded by a layer of flow-disbursing material that prevents the escape of spray from beneath the article of footwear. The layer of flow-disbursing material may be formed by a layer of coarse, open-cell foam material or by a multiplicity of small, resiliently flexible fingers.

Abstract: The present invention relates to a liquid disinfection apparatus for cleaning of objects, such as health care objects, which disinfection apparatus comprises; a chamber (3) which is arranged to receive said objects for cleaning, a stand-by tank (5) adapted to receive liquid to be used in said chamber for cleaning, a spray system (17) comprising nozzles for distributing liquid in said chamber, wherein said stand-by tank (5) is liquid flow connected with said chamber (3) via a rapid transfer port (6) so as to constitute an immediate supply of a predetermined liquid volume from the stand-by tank (5) to said chamber (3) without passing said nozzles, wherein the spray system (17) is arranged to subsequently distribute said predetermined volume, being received in the chamber (3), for the cleaning of said objects. The present invention also relates to a method for liquid transfer at said disinfection apparatus.

Abstract: The endoscope reprocessor includes a basin for receiving an endoscope to be reprocessed, a rack which secures thereto a portion of the endoscope and moves vertically within the basin, a drive unit for vertically moving the rack, a positioning member for adjusting a rack stopping position when the endoscope is to be set on the rack and a drive control unit for controlling the drive unit based on computed results from the positioning member.

Abstract: A drum washing machine includes a cabinet with an opening formed at a front wall of the cabinet to allow laundry to be put into or taken out of the cabinet, a door to open or close the opening of the cabinet, an opening/closing guide mechanism connected between the cabinet and the door to guide the door downwardly when opening the door such that a front surface of the door is directed upwardly when the door is fully opened, and to guide the door upwardly when closing the door, and an automatic opening/closing mechanism to automatically move the door vertically, and thus, to automatically open/close the door.

Abstract: A drum washing machine has a cabinet including an opening formed at a front wall of the cabinet to allow laundry to be put into or taken out of the cabinet, a door to open or close the opening of the cabinet, and an opening/closing guide mechanism connected between the cabinet and the door to guide the door downwardly when opening the door such that a front surface of the door is upwardly directed, and to guide the door upwardly moved when closing the door such that the door is vertically openable and closable. The door of the drum washing machine can be easily opened even where the washing machine is installed in a limited space. The door can also be used as a laundry holder in an opened state.

Abstract: A detection/cleaning device for reticles employed in the production of electronic components, wherein the detection/cleaning device has a cleaning unit, in which a cleaning chamber is constructed. At least one gas feed for introducing a pressurized fluid cleaning medium opens into the cleaning chamber, and at least one suction means, by means of which the gas can be discharged from the cleaning chamber, leads from the cleaning chamber. The cleaning chamber has at least one first opening for introducing and removing a reticle. A detection unit for detecting contaminants on articles used in semiconductor production is provided. The detection unit has a detection means, into which a reticle can be introduced from one feed side of the detection unit. The first opening of the cleaning chamber and the feed side lie opposite each other. A feeding device is provided for exchanging a reticle between the cleaning unit and the detection unit.

Abstract: The plug is proposed for insertion into a hollow core of a roller cover to keep water from traveling through the hollow core, the plug comprising a body sized and configured to be received in the hollow core, and the body incorporating a peripheral lip thereon to keep the plug from being pushed into the hollow core by water pressure applied thereagainst.

Abstract: A portable food tray pre-wash and water recycling apparatus and method for pre-washing reusable food trays prior to placement in a separate cleaning and sanitizing unit that significantly reduces water wasted in kitchen and scullery areas. The apparatus includes a portable cabinet having a slot in a top end for inserting a food tray, laterally opposed spray nozzles beneath the slot that spray both sides of the tray, laterally opposed rotating brushes beneath the nozzles that scrub the tray, a tray support and brush comb member that supports the tray in a vertical position and removes particles from the brushes, a series of removable incrementally smaller gauge filters vertically spaced beneath the brushes that slide in from one side to filter the water, a water reservoir beneath the filters, a heating unit to heat and disinfect the filtered water, and a pump that recycles heated water back to the nozzles.

Abstract: The invention relates to a method for adding a multi-component solid detergent additive during a program sequence of a water leading household appliance, in particular a dishwasher, wherein the household appliance comprises a compartment for storing the detergent additive. According to the invention, the liquid supply to the detergent additive stored in the compartment is effected in dependency of the program sequence, wherein in particular the liquid supply to the compartment is repeated at different times. Similarly a household appliance is provided with a device for adding a multi-component detergent additive.

Abstract: A spray arm feed tube assembly for a dishwasher is provided, comprising an elongate tubular member adapted to extend from a sump of the dishwasher, through an interface, and along a tub wall of a tub portion disposed outwardly of the sump. A banding member is operably engaged with the tubular member about the interface, wherein the banding member is adapted to cooperate with the tub portion and at least one separator member, about the interface, to prevent particulate matter from passing into the sump from the tub portion about the tubular member. An associated apparatus and method are also provided.

Abstract: An etching gas control system is provided. The system includes a gas injector, a gas supply pipe, a Flow Ratio Controller (FRC), and a gas supply unit. The gas injector is installed in a chamber and supplies gas inside the chamber. The gas injector includes a top injector installed at a top of the chamber and a side injector installed at a side of the chamber. The gas supply pipe connects and supplies gas to the gas injector. The FRC connects to the gas supply pipe and controls supply of gas. The gas supply unit supplies gas to the FRC.

Abstract: A cluster tool includes a transfer chamber connected to a plurality of vacuum chambers. An additional process chamber connected to the transfer chamber includes a high pressure chamber assembly seated on a housing. The high pressure chamber assembly, which is adjustable between an open position and a closed position, includes an upper chamber portion and a lower chamber portion. Hydraulic cylinders mounted on the upper chamber portion and having chamber rods that attach to the lower chamber portion are configured to move the lower chamber relative to the upper chamber portion between the two positions. When the two portions are brought together into the closed, the high pressure chamber assembly forms a high pressure chamber suitable for processing wafers with supercritical CO2. Once the high pressure chamber is formed, a region between lower chamber portion and a housing may be evacuated to form a vacuum chamber outside a portion of the high pressure chamber.

Abstract: The present invention relates to a dishwasher, and more particularly to a dishwasher having multiple wash zones. The dishwasher has an interior tub configured to provide an interior wash chamber for washing dishes. It also has a spray arm assembly configured to rotate within the tub and to spray a first flow of wash liquid over a portion of the interior tub thereby providing a first wash zone. A spray manifold fixed adjacent a lower dish rack, the manifold configured to provide a second flow of wash liquid toward the lower dish rack thereby providing a second wash zone.

Abstract: A dishwasher and dryer has a washing vessel (2) accommodating a basket carrying tableware, a water feed path feeding water or hot water for washing and rinsing into the washing vessel (2) through an operation of a water feed valve, a circulating path for spraying feed water in the washing vessel from a nozzle to a dish, and a control circuit (12) controlling a washing step and a rinsing step. In such a dishwasher and dryer, a hard water generating vessel (23) is arranged to carry out a washing step using hard water as feed water in a washing step.

Abstract: A method for activating the surface of a base material and an apparatus thereof, which is suited to be utilized for pretreatment in electrochemical treatment such as, for example, electroplating or the like, in which the surface of a base material such as metal can be subjected to degreasing treatment and oxide film removing treatment simultaneously, efficiently and rationally, in which productivity can be enhanced and the equipment cost can be reduced, and in which a waste solution can be rationalized so that the solution can be reutilized and the environmental pollution can be prevented. A method for activating the surface of a base material in which the surface of a member to be treated is subjected to degreasing treatment or oxide film removing treatment. Pressurized carbon dioxide is dissolved in a predetermined quantity of water, thereby preparing an oxide film removing solution having a predetermined acidic concentration.

Abstract: An isolated semiconductor wafer platen is disclosed for use in high pressure processing. The use of vacuum chucking for holding a semiconductor wafer during processing is well known in the art and can be applied to high pressure systems as well, but some difficulties can arise under high pressure processes. Small deflections in even very thick metal support platens can lead to backside wafer wear, platen abrasion, and even breakage of semiconductor wafers. This invention discloses a method to eliminate the transfer of flexure inherent in high pressure vessel walls, yet still retain the vacuum chucking method.

Abstract: An improved water distribution system is provided for a dishwasher. The system includes one or more disks mounted in the dishwasher for rotation about a vertical axis, and one or more water nozzles in the dishwasher for directing a water jet onto the disks. The water jets are directed transverse to the axis of rotation of the disks so as to impart rotation to the disks, and thereby redirect the water jet to a radial direction for distribution in the washing chamber of the dishwasher. Thus, the linear kinetic energy of the water jet is transferred to radial kinetic energy by the rotating disk.

Abstract: An angular support element for a dish-washing machine comprises, in a position corresponding to the washing compartment of the machine, one or more tubular portions, each of which has a concave wall without sharp corners or edges set facing the inside of the dish-washing machine; each of the tubular portions is made up of the coupling of a longitudinal external rolled section and a longitudinal internal rolled section by means of overlapping of respective fixing walls.

Abstract: Disclosed herein is a dish washing machine that is capable of preventing the unintentional drainage of some wash water by the increase of the water pressure in a sump due to the excessive accumulation of filth in the sump. The dish washing machine includes a washing tub, at least one injection nozzle disposed in the washing tub, a sump disposed in the washing tub to forward wash water to the at least one injection nozzle, a guide pipe connected between the sump and the at least one injection nozzle, and a bypass pipe, diverging from a portion of the guide pipe, connected to the sump to bypass the wash water in the sump to the guide pipe.

Abstract: A plasma etch processing chamber configured to clean a bevel edge of a substrate is provided. The chamber includes a bottom edge electrode and a top edge electrode defined over the bottom edge electrode. The top edge electrode and the bottom edge electrode are configured to generate a cleaning plasma to clean the bevel edge of the substrate. The chamber includes a gas feed defined through a top surface of the processing chamber. The gas feed introduces a processing gas for striking the cleaning plasma at a location in the processing chamber that is between an axis of the substrate and the top edge electrode. A pump out port is defined through the top surface of the chamber and the pump out port located along a center axis of the substrate. A method for cleaning a bevel edge of a substrate is also provided.

Abstract: A dishwasher is disclosed which is suitable for mounting within a cavity under a bench. The dishwasher is chassis less and includes no outer wrapper or cabinet and as such is mounted directly to the cavity. Also disclosed are a number of embodiments relating to mechanisms for closing the lid on the retractable drawer wash system and various methods for sealing the lid onto the wash drawer.

Abstract: A cleaning container (1) for a cleaning device (4), which has a handle (6) and a cleaning head (5), in particular for a toilet brush, is described, wherein the cleaning container (1) comprises a main chamber (3) for the cleaning and storing of the cleaning device (4) and a secondary chamber (13), connected to the main chamber (3) via an access opening (16) and a device for the action of the cleaning fluid on the cleaning device (4) in the main chamber (3). In order to guarantee a clean and simple handling, in particular when the cleaning container (1) is emptied and cleaned, provision is made in accordance with the invention so that the main chamber (3) and the second chamber (13) are designed as separate container elements (2,12), which are connected to one another in a detachable manner.

Abstract: A substrate processing apparatus includes a container in which a heating plate, a discharge nozzle for discharging a vapor of organic solvent, and a discharge nozzle for supplying a process gas and a cooling gas are provided. A pump in communication with an exhaust outlet of the container exhausts an atmosphere from the container to reduce pressure in the container. Therefore, the substrate processing apparatus is capable of performing (1) the process of drying a substrate in a reduced-pressure atmosphere by the use of the vapor of organic solvent, and (2) the process of drying the substrate in the reduced-pressure atmosphere by heating, to thereby efficiently dry the substrate.

Abstract: A dishwasher, including a tub provided with a front lip, has a front door provided with alignment structure on an inner bottom portion which is designed to abut and deflect the front lip, when the front lip is bowed or otherwise deformed, to control the relative positioning between the door and the frontal lip in order to prevent the development of a leakage gap or undesirable engagement between the door and lip. The alignment feature preferably includes at least one cam rib located on the lower underside of the door, as well as adjacent abutment rib(s) adapted to extend toward the front lip of the tub when the door is opened. The cam rib functions to guide the lip along a smooth surface when the tub is bowed or otherwise significantly shifted from a design position to assure quiet shifting of the door, while the abutment rib functions to prevent the development of a potential leakage gap between the front lip and the door.

Abstract: A liquid processing apparatus includes containers 26, 27, 26a, 26b surrounding processing chambers 51, 52 for accommodating a plurality of wafers W and nozzles 54, 56 for supplying a processing liquid to the substrates W in order to perform a liquid process. The nozzles 54, 56 are respectively equipped with a plurality of ejecting orifices 53, 55 capable of ejecting the processing liquid in a plane manner, allowing the substrates W to be processed uniformly and effectively.

Abstract: A dishwasher includes a pump assembly for establishing a recirculated wash fluid flow within a washing chamber. The pump assembly includes a housing having a recirculation portion and a drain portion. The recirculation portion includes an inlet passage, a recirculation passage and a pump mount. The inlet and recirculation passages share a common wall and open into the pump mount. The pump assembly further includes a pump having a housing, a motor drivingly connected to an impeller and a conduit having inlet and outlet portions projecting from the housing. The inlet and outlet portions are concentrically arranged within the conduit and fluidly connected with the impeller. With this arrangement, the pump unit can be readily secured to the pump mount and, during operation, draws washing fluid in through the inlet and redirects the washing fluid to the recirculation passage of the housing at approximately 180° from the inlet.

Abstract: A dishwasher with a sound attenuator for attenuating the sound emanating from a motor cavity of the dishwasher. The sound attenuator comprising a sound absorber and a sound barrier. The sound absorber absorbing sound in the motor cavity with the sound barrier blocking the unabsorbed sound from escaping.

Abstract: A substrate processing apparatus that can reduce the number of parts. A first gas introduction hole through which the hydrogen fluoride gas is introduced into a GDP is formed in an upper lid. A second gas introduction hole through which hydrogen fluoride gas is introduced from a hydrogen fluoride gas source is formed in a processing vessel. When the upper lid engages the upper portion of the processing vessel, one end of the first gas introduction hole is joined with one end of the second gas introduction hole to form an introduction path through which the hydrogen fluoride gas is introduced into a chamber.

Abstract: The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chemical liquid, is accommodated in a housing. The processing fluid supply unit accommodated in the housing is advanced into the processing space through the opening of the enclosure structure to feed the processing fluid onto the substrate supported by the substrate support member.

Abstract: A vessel having an implement located in a fluid receiving space inside the vessel. The vessel includes an enclosure for enclosing a closed space around the implement. An actuator actuates the enclosure to and fro between an open position, in which the enclosure does not enclose a closed space around the implement, and a closed position, in which the enclosure forms a fluid tight or at least essentially fluid tight casing that encloses a closed space around the implement so as to prevent fluid in the fluid receiving space outside the closed space from flowing into the closed space. A method for cleaning and/or calibrating an implement located in a fluid receiving space inside such a vessel and a method for removing an implement from or inserting an implement into a fluid receiving space inside a vessel.

Abstract: The invention provides a dining table including integral dishwasher units. An access cover providing access to the dishwasher is provided in the dining surface and is adapted for being recessed within portions of the dining surface while the user is dining. A perforate chute extending from below the dining surface into the dishwasher is used for placing and retrieving dishes and for storing dishes during washing. A pot washer is used to wash pots and other large utensils in a separate washer. The pot washer includes a pot washer basket which is slidably mounted on a fixed support in such a way as to be accessible through doors from either side of the table. A switch arrangement prevents the potwasher from being used except when the doors are closed. The control panel as well as compartments for condiments and the like are mounted in such a way as to be accessible to the handicapped.

Abstract: A gasket and drum washing machine using the same. The washing machine includes a cabinet having a first opening through which a laundry is put in the cabinet, a tub installed in the cabinet to have a second opening corresponding to the first opening, a drum installed in the tub to have a third opening corresponding to the second opening, and a gasket for preventing leakage of water. The gasket includes a leakage preventing part having one end connected to a rim of the first opening and the other end connected to a rim of the second opening to prevent water leakage, a deformation preventing part connected to the leakage preventing part, and a laundry-stuck preventing part provided on an inner circumference of the leakage preventing part to prevent the laundry from being stuck between the second and third openings.

Abstract: A wafer processing chamber “chamber” is provided. Broadly speaking, the chamber allows a fluid flow and a fluid pressure within the chamber to be controlled in a variable manner. More specifically, the chamber utilizes removable plates that can be configured to control the fluid flow and the fluid pressure in an inner volume within the chamber. Also, the removable plates can be used to separate the inner volume within the chamber from an outer volume within the chamber. In this manner, the removable plates can be used to create a pressure differential between the inner volume within the chamber and the outer volume within the chamber. A lower pressure in the outer volume within the chamber requires less outer chamber strength to withstand the lower pressure. A lower outer chamber strength requirement translates into an overall decrease in chamber size.

Abstract: A dishwasher includes a casing arranged within the dishwasher, an odor eliminating material installed within the casing, a shutter which selectively opens a part of the casing to expose the odor eliminating material, and a shutter driving device which operates the shutter. A control unit of the dish washer counts an actual drying time in a drying operation of the dishwasher, and opens the shutter by operating the shutter driving device in response to the counted drying time being equal to or greater than a preset drying time. The odor eliminating material eliminates odors in the dishwasher.

Abstract: A substrate processing apparatus for processing a substrate With a processing fluid is provided. The apparatus includes holding members 60 for holding the substrate W, a chuck member 61 for supporting the holding members 60 and a top-face member 62 approaching the substrate W to cover its surface. In arrangement, since the top-face member 62 is supported by the chuck member 61, the holding members 60 can rotate together with the top-face member 62 in one body. With this structure, it is possible to reduce the influence of particles on the substrate W and also possible to provided a low-cost substrate processing apparatus occupied as little installation space as possible.

Abstract: A dishwasher equipped with a lamp assembly. The lamp assembly includes a lamp bracket, a lamp cover and a plurality of fastening projections. The lamp bracket is fitted into an opening to accommodate the lamp from an outside of the inner casing. The lamp cover is detachably fitted into the lamp bracket from an inside of the inner casing. The plurality of fastening projections fit the lamp bracket into the opening. The fastening projections are projected from a front rim of the lamp bracket to be elastically deformable, and have gaps each corresponding to a thickness of the inner casing. The inner casing includes movement prevention notches extended outward from the opening at locations where the fastening projections will be interlocked.

Abstract: A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing section; and a cell cover, capable of closing a top opening of the cell, having a plurality of spray nozzles for separately spraying at least two types of processing liquids, wherein the pan and the cell each have an individual liquid discharge line.