With Closable Work-treating Chambers Patents (Class 134/200)
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Patent number: 6446646Abstract: Chambers each include an inlet port for supplying N2 gas and an outlet port for discharging an inner atmosphere, and therefore the chambers have different amounts of supply of N2 gas in a unit of time and different amounts of discharge of inner atmosphere in a unit of time. With this structure, the first to fourth processing chambers are controlled to have the lowest inner pressure(p3), a transfer module is controlled to have an inner pressure (p2) higher than the inner pressure (p3) and a loader and an unloader are controlled to have the highest inner pressure (p1). That eliminates the necessity for keeping the whole substrate processing apparatus at the highest inner pressure (p1) and supplying a large amount of N2 gas, and therefore it is possible to achieve processings of substrate at lower cost, with shorter purge time and less contamination of substrate.Type: GrantFiled: May 29, 1998Date of Patent: September 10, 2002Assignee: Dainippon Screen Mfg. Co., Ltd.Inventor: Akira Izumi
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Patent number: 6442867Abstract: A system (10) is disclosed for cleaning a vertical furnace (12) pedestal (34) and cap (36) including at least one inlet conduit (40) in fluid communication with a pressurized cleaning medium source (46). The system also includes at least one exhaust conduit (42) in fluid communication with a negative pressure source (48). A boat assembly (30) may be positioned such that the at least one conduit (40) is operable to direct cleaning medium at the boat assembly (30) to dislodge contaminate particles associated with the boat assembly. The exhaust outlet (42) then evacuates the cleaning medium and any dislodged contaminate particles. The system may operate automatically within a closed processing environment and after each process cycle.Type: GrantFiled: December 14, 2000Date of Patent: September 3, 2002Assignee: Texas Instruments IncorporatedInventors: William Pressnall, Frank D. Poag, Richard L. Guldi
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Patent number: 6408862Abstract: A centrifugal paint roller cleaner is provided wherein a used paint roller brush with fresh paint on it is rotatably secured within a cylindrical housing member and liquid is introduced into the housing member as a high energy single jet spray via an injector assembly that slides within an aperture that runs longitudinally along the length of the aforementioned housing member. The injector assembly swivels radially within the guiding passage to adjust the angle at which the high energy single jet single spray strikes the roller brush thus allowing the operator to regulate the axial rotation of the roller brush and the impact of the jet spray striking the paint absorbed to the nap of the roller brush. The axial rotation of the roller brush creates centrifugal force that serves to expel the loosened paint and water from the nap of the brush and into the fluid traveling within the area between the outer surface of the brush and the interior wall of the housing.Type: GrantFiled: April 28, 2000Date of Patent: June 25, 2002Inventor: Roland H van Rooyen
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Patent number: 6390104Abstract: A denture wash for more thoroughly and easily cleaning dentures. The denture wash includes a lower assembly comprising a bottom wall, four walls, a plurality of nozzles, a first central nozzle, and a pump, a upper unit assembly comprising a lid, four walls, a plurality of nozzles, and a second central nozzle, and a denture holding assembly.Type: GrantFiled: May 19, 2000Date of Patent: May 21, 2002Inventor: Steven P. Gagnon
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Patent number: 6378537Abstract: The invention provides a dining table including an integral dishwasher unit. A hinged access cover to the dishwasher is provided in the dining surface and adapted for being recessed below the dining surface while the user is dining. A tray that is stored in the dishwasher is moved upwardly and positioned flush with the dining surface for dining. A perforate chute extending from below the dining surface into the dishwasher is used for placing and retrieving dishes and for storing dishes during washing. A lower access door is used to place pots and other large utensils into a second compartment in the dishwasher. Each portion of the dishwasher has its own water distributor arm.Type: GrantFiled: June 9, 2000Date of Patent: April 30, 2002Inventor: Harold F. DeHart
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Patent number: 6375741Abstract: A semiconductor processor for spray coating wafers or other semiconductor articles. The processor has a compartment in which are mounted a wafer transfer, coating station and thermal treatment station. The coating station has a spray processing vessel in which a movable spray-head and rotatable wafer holder. The spray station has coating viscosity control features. An ultrasonic resonating spray-head is precisely supplied with coating from a metering pump. The heat treatment station heat cures the coating and then cools the wafer. The system allows coatings to be applied in relatively uniform conformational layers upon irregular surfaces.Type: GrantFiled: May 23, 2000Date of Patent: April 23, 2002Inventors: Timothy J. Reardon, Craig P. Meuchel, Thomas H. Oberlitner
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Patent number: 6371138Abstract: A nozzle structure for a dish washer for washing tableware with washing water and rinsing water jetted from nozzle arranged in a washing tank. The nozzle structure comprising a shaft arranged on the nozzle, a nozzle mount provided in the washing tank and formed with a mount hole, which permits removable insertion of the shaft, and a coming-off preventing means for detachably preventing the shaft inserted into the mount hole of the nozzle mount from coming off.Type: GrantFiled: June 1, 1999Date of Patent: April 16, 2002Assignee: Hoshizaki Denki Kabushiki KaishaInventors: Sadamu Kamoto, Koji Suyama, Hiroshi Omura, Keiichi Toga, Toshio Nanba, Masumi Notsu
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Patent number: 6349731Abstract: A water inlet assembly for mounting adjacent an opening provided in a tub of an automatic dishwasher wherein the tub defines a cavity having a volume for washing dishes. The water inlet assembly includes a housing forming a venting chamber and having an outlet opening mounted in sealed relationship about the opening provided in the tub. The venting chamber has a vent opening which may be located above the outlet opening. The housing further includes an inlet nozzle for receiving wash liquid and a conduit for guiding liquid from the inlet nozzle to the venting chamber from which wash liquid can flow through the outlet opening into the tub. A water trap is formed into the housing and is located along the conduit. The conduit has a siphon opening located upstream of the water trap.Type: GrantFiled: February 28, 2000Date of Patent: February 26, 2002Assignee: Whirlpool CorporationInventors: Demetrius J. Schaaf, Eric C. Erwin
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Publication number: 20020017315Abstract: A method for cleaning an object to be processed in which the atmosphere in a drying chamber is replaced by an inert gas prior to placing an object to be cleaned from an external environment into the chamber. The object is then transported by an elongated retaining member from the drying chamber through a lower opening in the chamber into a processing bath disposed below the chamber. The object is then cleaned in the processing bath. The object is then transported from the processing bath to the drying chamber where it is dried by filling the atmosphere of the drying chamber with organic solvent. The cleaning process in the cleaning bath is carried out while the bath is screened by a nitrogen-gas curtain. The method also includes opening a lid of the chamber prior to insertion of the object into the chamber and closing the lid after insertion of the object, as well as the opening and closing of the lower opening in the chamber.Type: ApplicationFiled: October 5, 2001Publication date: February 14, 2002Inventors: Yuji Kamikawa, Kinya Ueno, Satoshi Nakashima
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Patent number: 6342104Abstract: A cleaning apparatus and a cleaning method for cleaning an object are provided. In the cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down, respectively. Thus, a space in the drying chamber 42 can be insulated from a space of the cleaning bath 41 through rotary doors 59a and a slide door 72. In the cleaning method, a cleaning process in the cleaning bath 41 is carried out while sealing it by the rotary doors 59a. On the other hand, a drying process in the drying chamber 42 is accomplished while sealing and closing it by the slide door 72. Consequently, there is no possibility that, during the drying process, the object is subjected to a bad influence from a chemical treatment.Type: GrantFiled: March 8, 2000Date of Patent: January 29, 2002Assignee: Tokyo Electron LimitedInventors: Yuji Kamikawa, Satoshi Nakashima, Kinya Ueno
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Patent number: 6338352Abstract: A handle is provided on the interior side of a dishwasher door so as to facilitate the raising of the door from a low opened position. The handle is pivotally mounted within the door so as to move between an upstanding position when the door is open to a flush position when the door is closed. A counter weight is provided in the handle so the handle automatically rises to the upstanding position when the dishwasher door is moved from the closed position to the open position.Type: GrantFiled: August 12, 1999Date of Patent: January 15, 2002Assignee: Maytag CorporationInventors: Scott D. Raches, Robert A. Elick, Cory D Howe
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Patent number: 6321762Abstract: Side extension members and a front extension member, which extend inwardly horizontally to be bent downward at right angle are provided on side walls and a front wall in a washing tank to be positioned at a level lower by a predetermined distance than a top end of the washing tank. A rack rail is pivotally supported on the side extension members through shaft portions to be made turnable. The rack rail is formed with positioning portions. Restriction members are provided on the front extension member to extend inward corresponding to the positioning portions of the rack rail, and the positioning portions are adapted to be placed on the restriction members.Type: GrantFiled: September 28, 1999Date of Patent: November 27, 2001Assignee: Hoshizaki Denki Kabushiki KaishaInventors: Koji Suyama, Osamu Okui, Keiichi Toga, Hiroshi Omura, Sadamu Kamoto
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Patent number: 6293289Abstract: A vent for a dishwasher provides a valve with dual actuation, either to be electrically actuated according to a cycle of the dishwasher so as to close during periods of high noise generation, typically the wash cycle, and opened during the dry cycle, or to be actuated independently of the cycle under pressure differences such as may be caused by interruption of the dishwasher cycle and opening and closing of the dishwasher door such as may cause a pressure surge as the introduced cool air is rapidly heated in the interior of the dishwasher.Type: GrantFiled: November 8, 1999Date of Patent: September 25, 2001Assignee: Ark-Les CorporationInventors: Kenyon A. Hapke, Joel C. Bragg
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Patent number: 6289908Abstract: A double, front loading, dishwasher comprising two side-by-side dishwashing cabinets each provided with a washing arm and either a common pump and motor or an individual pump and motor is described. Preferably, the dishwasher is designed to fit into an existing kitchen cabinet and even more preferably into an eye level kitchen cabinet so that while one cabinet is used to store clean dishes and cutlery the other cabinet is available to load and wash another set of dirty dishes. Storage of a set of clean dishes in the dishwasher saves time as the step of unloading the dishwasher to a separate storage cabinet is eliminated, as the clean dishes may be unloaded directly to the table.Type: GrantFiled: December 1, 1999Date of Patent: September 18, 2001Inventor: Marjorie K. Kelsey
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Publication number: 20010013357Abstract: A dish washing machine according to the present invention has vertically divided upper and lower doors 16 and 17 for covering an opening of a washing chamber. The upper door 16 is opened through its upward pivotal movement about its shafts 20. The lower door 17 is opened through its downward pivotal movement about its shafts 22. The upper door 16 is fully opened through its pivotal movement substantially through 180 degrees. The lower door 17 is opened to a substantially horizontal position. And when the lower door 17 is in this opened state, a basket 4 contained in the washing chamber 3 can be pulled out onto the lower door 17.Type: ApplicationFiled: January 29, 2001Publication date: August 16, 2001Inventors: Tomohiko Matsuno, Tetsuo Harada, Yasuhisa Fukui
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Patent number: 6264753Abstract: A cleaning system and method utilizing sonic whistle and other agitation methods to enhance the soil removal and mass transport capacity of the liquid carbon dioxide at low process temperatures. Agitation devices disposed in or couple to a cleaning chamber, and cause the liquid carbon dioxide to ultrasonically emulsify and disperse non-miscible liquids or insoluble solids, such as remove low solubility oils and greases. Cleaning is accomplished at temperatures between −68° F. and 32° F., and the temperature of the liquid carbon dioxide is typically below 32° F.Type: GrantFiled: July 7, 2000Date of Patent: July 24, 2001Assignee: Raytheon CompanyInventors: Sidney C. Chao, Edna M. Purer, Nelson W. Sorbo
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Patent number: 6260565Abstract: A dishwasher cabinet has a front wall, a rear wall, and opposite sidewalls. The cabinet has an intermediate wall for forming the cabinet into a first compartment and a second compartment. The front wall has a first opening and a second opening providing access into the first and second compartments respectively. First and second doors are in covering relation over the first and second openings and are movable between open and closed positions.Type: GrantFiled: September 21, 1998Date of Patent: July 17, 2001Assignee: Maytag CorporationInventors: Rodney M. Welch, Stephen L. Birkenholtz, Douglas M. Ringger, Juda J. Cordle
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Patent number: 6260564Abstract: The purpose of the invention is a device for closing a tank (1) containing a corrosive product closed by at least two successive lids (5) whose two longitudinal sides (6) engage, upon closing, into two corresponding gutters (7) of the tank (1) which are filled with water in order to constitute a tight seal, so-called ‘water seal’. According to the invention, at least one additional medial, also U-section, transversal gutter (12) is interposed between both longitudinal gutters (7) of the tank (1) at a sealing plane (P) between two successive lids (5) whose opposite transversal sides (8) engage into the said transversal gutter (12) in order to form a water seal on at least three sides of each lid.Type: GrantFiled: July 2, 1999Date of Patent: July 17, 2001Assignee: Vai ClecimInventors: Daniel Sylvain, Henri Bonhomme
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Patent number: 6202657Abstract: A workbench including provisions for cleaning of an object. The workbench includes an enclosure and a shelf that is slidable into and out of the enclosure. The shelf can support an object within the enclosure. A manifold and nozzles within the enclosure direct cleaning liquid or compressed gas at the object so as to clean it and collect the material removed from the object within the enclosure. The workbench includes a top suitable for dimensional gaging and inspection of the object.Type: GrantFiled: July 16, 1998Date of Patent: March 20, 2001Assignee: Car-Tec CompanyInventor: Richard A. Cardemon
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Patent number: 6189551Abstract: A dishwasher having a cabinet and wash chambers in the form of drawers which slide in and out of the cabinet. Rigid and flexible closures are disclosed for sealing off the wash chambers when retracted into the cabinet. A detergent dispenser for the dishwasher is provided in one wall of a wash chamber in the wash water discharge path into the wash chamber so that detergent powder is flushed out of the dispenser and mixed with the wash water prior to the latter being discharged into the wash chamber. A wash programme for a dual wash chamber dishwasher is also disclosed which minimises total water consumption by transferring water from one chamber to the other.Type: GrantFiled: January 30, 1998Date of Patent: February 20, 2001Assignee: Fisher & Paykel LimitedInventors: Adrian Sargeant, Richard George Arthur Butler, John Wilks, Babis Kazianus, Steve Maunsell
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Patent number: 6164297Abstract: A cleaning and drying apparatus includes a cleaning bath 22 for collecting cleaning liquid for wafers, a drying chamber 23 arranged above the cleaning bath 22 to dry the wafers, a shutter 36 positioned between the cleaning bath 22 and the drying chamber 23 to define them communicably, a opening and closing mechanism 54 arranged outside a processing container to open and close the shutter 36, a connecting member 58 extending through an opening formed in an outer wall of the container to connect the shutter 36 with the mechanism 54, and a liquid sealing mechanism 60 for sealing the opening with sealing liquid. Another cleaning and drying apparatus is also provided with a wafer boat 24 for arranging the wafers at intervals horizontally and carrying the wafers, the drying chamber 23 which accommodate the wafers together with the wafer boat 24 for drying the wafers, dry-gas nozzles 37 for supplying dry gas to the wafers and a moving unit for moving the wafers in relation to the nozzles 37.Type: GrantFiled: June 12, 1998Date of Patent: December 26, 2000Assignee: Tokyo Electron LimitedInventor: Yuji Kamikawa
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Patent number: 6164301Abstract: An improved cleaning basin (including cover and stand) for commercial grill, oven and stove ventilation filters. The device allows convenient soaking and cleaning of the filters in cleaning solution, and provides for safe and efficient drainage of the solution. The device is specially sized to facilitate simultaneous cleaning and soaking of multiple filters in caustic cleaning solution, and it provides for safe and efficient filling and drainage of the solution from the basin. The device is rugged, durable, weather-proof, and it can be manufactured at nominal cost.Type: GrantFiled: April 21, 1998Date of Patent: December 26, 2000Inventors: Michael John McFadden, John Culp McFadden
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Patent number: 6158449Abstract: An enclosure 23A that defines a drying chamber 23 is configured of a pair of enclosing elements 23c and 23d and a base element 23b. When wafers enter or leave the drying chamber 23, the enclosing elements 23c and 23d are lifted upward by vertical air cylinders 42 to separate them from the base element 23b. The enclosing elements 23c and 23d are then moved in directions that mutually separate them. To dry wafers within the drying chamber 23, the enclosing elements and the base element 23b are mutually engaged to form a hermetic seal, in the opposite sequence.The present invention reduces the dimensions of the drying chamber without impeding the work of moving wafers into and out of the drying chamber. This makes it possible to reduce the internal volume of the drying chamber, achieving a reduction is the consumption of drying gas, an improvement in the drying efficiency, and a reduction in overall size of the apparatus.Type: GrantFiled: July 16, 1998Date of Patent: December 12, 2000Assignee: Tokyo Electron LimitedInventor: Yuji Kamikawa
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Patent number: 6149252Abstract: A glove box for cutting a hole in a ceiling collects dust and debris during the cutting operation. The glove box is a transparent container having a central aperture in the bottom. The aperture includes an inwardly extending ring having an outwardly extending flange for attaching a glove. A seal at the top of the container engages the ceiling, compressing to accommodate irregularities or minor slope in the ceiling. The glove box may be held by the user during use, or may be supported on top of a telescoping pole. A fork engages the telescoping pole at its lower end, and opposite sides of the cylinder on its upper end. A spring between the fork and telescoping pole biases the container towards the ceiling. The container may include openings for a vacuum hose or an electrical cord for a cutting tool.Type: GrantFiled: June 4, 1999Date of Patent: November 21, 2000Inventor: Thomas D. Browning
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Patent number: 6145521Abstract: A cleaning mechanism for mold devices includes one or more rails for slidably supporting a slide. An actuator is coupled to the slide for moving the slide along the rails. The slide may be releasably coupled to the actuator by a latch. A heating device is disposed on the slide for supporting and for heating the mold devices. One or more nozzles are disposed in the housing for supplying water or cleaning agent or pressurized air into the housing and for cleaning the mold devices. A rotating device may further be used for rotating the nozzles.Type: GrantFiled: December 3, 1998Date of Patent: November 14, 2000Inventor: Su Mei Wu
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Patent number: 6131588Abstract: The purpose of the present invention is to provide a cleaning apparatus and a cleaning method which can prevent the object to be processed being subjected to a bad influence caused by a chemical treatment, have a high degree of freedom in designing the apparatus, make the cleaning process rapid and be designed in smaller size. In this cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down, respectively. Thus, a space in the drying chamber 42 can be insulated from a space of the cleaning bath 41 by a nitrogen-gas curtain 59c and a slide door 72. In the cleaning method, a cleaning process in the cleaning bath 41 is carried out while screening it by the nitrogen-gas curtain 59c. On the other hand, a drying process in the drying chamber 42 is accomplished while sealing and closing it by the slide door 72.Type: GrantFiled: January 22, 1998Date of Patent: October 17, 2000Assignee: Tokyo Electron LimitedInventors: Yuji Kamikawa, Kinya Ueno, Satoshi Nakashima
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Patent number: 6105592Abstract: An apparatus for processing a semiconductor wafer is set forth. The apparatus comprises a processing bowl that defines a processing chamber. The bowl has an opening through which wafers may be placed in the apparatus. A wafer support structure adapted to support at least one wafer is mounted for rotation within the processing chamber. A motor drive assembly is connected to rotate the wafer support structure. At least one fluid nozzle accepts processing fluid and sprays the processing fluid on the one or more wafers carried by the wafer support structure. A door is used to seal the opening of the processing bowl. The door has an opening that is open to ambient atmosphere to facilitate passage of ambient gas into the processing chamber. An ambient gas intake assembly is disposed in the door.Type: GrantFiled: July 21, 1997Date of Patent: August 22, 2000Assignee: Semitool, Inc.Inventors: Raymon F. Thompson, Aleksander Owczarz, Daniel P. Bexten
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Patent number: 6102054Abstract: An apparatus is provided to efficiently clean a mat or a screen. The screen or mat is placed on or within a frame and within an enclosure; large volumes of pressurized water and/or cleaning solvent are simultaneously directed towards one or more sides of the screen or mat. Temperature sensors in combination with a heating element and ph detectors are controlled by a pre-programmed system controller to insure that the temperature of the water is maintained within a specified range and that the water recycled within the apparatus is within an acceptable limit of contamination. A preferred design of the apparatus includes a mobile frame that is moved to the initial location of the mat and then returned to the enclosure while bearing the mat. The mobile frame reduces a risk of injury to cleaning personnel. A truck may be configured to carry one or more apparatus from site to site to allow customer based site cleaning opportunities.Type: GrantFiled: October 5, 1998Date of Patent: August 15, 2000Inventor: Hector L. Diaz
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Patent number: 6095165Abstract: A table dishwasher combination including an access door slidably connected to the table top side members to allow a pair of dishwasher racks to rise upwardly from the central compartments wherein one of the dish racks pivots to the left and one pivots to the right to allow for loading by people seated at the table.Type: GrantFiled: February 8, 1999Date of Patent: August 1, 2000Inventor: William Mastronardi
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Patent number: 6063208Abstract: A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.Type: GrantFiled: May 12, 1999Date of Patent: May 16, 2000Assignee: Micron Technology, Inc.Inventor: Matthew E. Williams
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Patent number: 6053185Abstract: A dishwasher having a drying mode with jet-air injection comprising a washing chamber refined by a back wall, a top wall, a bottom floor, a first and second side walls and a dishwasher door; and, a jet-air injection system which injects during the drying mode to a plurality evenly distributed forceful streams of jet-air from an air manifold coupled to the top wall of the washing chamber. The air manifold comprises a plurality of parallelly spaced conduits, perpendicular to the back wall, each of which has formed therein a plurality of spaced air vents which expel downward therefrom the plurality of evenly distributed forceful streams of jet-air. The force of the plurality evenly distributed forceful streams of jet-air forces buildup of water collected in an indentation, cracks and crevices of upside down glasses, cups, and other dishes place in a top rack of the washing chamber out of she indentation, cracks and crevices and downward to the bottom floor of the washing chamber.Type: GrantFiled: December 22, 1997Date of Patent: April 25, 2000Inventor: Jerry P. Beevers
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Patent number: 6050275Abstract: A cleaning apparatus and a cleaning method for cleaning an object are provided. In the cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down, respectively. Thus, a space in the drying chamber 42 can be insulated from a space of the cleaning bath 41 through rotary doors 59a and a slide door 72. In the cleaning method, a cleaning process in the cleaning bath 41 is carried out while sealing it by the rotary doors 59a. On the other hand, a drying process in the drying chamber 42 is accomplished while sealing and closing it by the slide door 72. Consequently, there is no possibility that, during the drying process, the object is subjected to a bad influence from a chemical treatment.Type: GrantFiled: September 24, 1997Date of Patent: April 18, 2000Assignee: Tokyo Electron LimitedInventors: Yuji Kamikawa, Satoshi Nakashima, Kinya Ueno
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Patent number: 6041797Abstract: The present invention is an apparatus for cleaning a vacuum drum used for transferring gummed labels. The apparatus operates by sealing the drum and backwashing a cleaning fluid through the vacuum ports to unplug the perimeter holes. The apparatus comprises a cylindrical housing closed on one end by a plate and, on the opposing end, by a detachable lid. A drum seat, the size of which corresponds to the size of the vacuum drum to be washed, is locked to the bottom of the housing. The drum seat has an inlet for receiving the cleaning fluid and means for dispensing the received fluid to the vacuum ports of the vacuum drum under pressure. Initially, the cleaning fluid is heated to dissolve the adhesive. Subsequently, a cooler liquid is flushed through the vacuum drum to cool it for handling.Type: GrantFiled: December 9, 1997Date of Patent: March 28, 2000Inventor: David S Casselman
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Patent number: 6032683Abstract: A cleaning method and related apparatus for cleaning semiconductor screening masks using an aqueous alkali detergent solution applied under high pressure simultaneously from both sides of the mask, followed by a drying step that uses air knives to blow off the mask surface any residual cleaner solution.Type: GrantFiled: February 26, 1999Date of Patent: March 7, 2000Assignee: International Business Machines CorporationInventors: Jon A. Casey, Michael E. Cropp, Donald W. DiAngelo, John F. Harmuth, John U. Knickerbocker, David C. Long, Daniel S. Mackin, Glenn A. Pomerantz, Krishna G. Sachdev, David E. Speed, Candace A. Sullivan, Robert J. Sullivan, Bruce E. Tripp, James C. Utter
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Patent number: 6019843Abstract: An apparatus coats a semiconductor wafer with photoresist that is to be etched in the manufacture of the semiconductor. The apparatus includes a body having an open top, a spin chuck for revolving a wafer fixed thereon at a uniform rate, a bowl for preventing photoresist from spattering on the body and which is installed inside the body, a photoresist dispensing nozzle for spraying photoresist on the wafer, a side rinse nozzle for removing photoresist adhered to the peripheral edge of the wafer, a cover for opening/closing the top of the body, and a cleaning device associated with the cover for cleaning the bowl. The apparatus allows the bowl to be cleaned while the cover is closed and the bowl is still disposed inside the body. The cleaning device includes a sprinkler and a pump.Type: GrantFiled: February 5, 1998Date of Patent: February 1, 2000Assignee: Samsung Electronics Co., Ltd.Inventors: Sung-hyeon Park, Sung-il Kim
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Patent number: 6006767Abstract: A joint for forming a seal between a warewasher and the bottom of a generally rectangular, vertically movable door housed in the warewasher to inhibit release of moisture into the ambient atmosphere. The door has an outer face and is shaped to cover a generally rectangular opening in the warewasher. The joint includes a sill located along the bottom edge of the opening having a downwardly angled surface to retain moisture in the warewasher and an upper assembly located along the lower edge of the outer face including a handle shaped to mate with the sill. The upper assembly further includes a downwardly extending saddle shaped to cover the interface between the handle and the sill to facilitate the retention of moisture in the warewasher.Type: GrantFiled: September 3, 1998Date of Patent: December 28, 1999Assignee: Premark FEG L.L.C.Inventors: Dean A. Hecker, Walter L. DeBrosse
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Patent number: 6006768Abstract: A device for cleaning an optical fiber includes a body having a surface. A cleaning substance is deposited on the surface of the body. The body is selectively positionable for selectively contacting the cleaning substance with the optical fiber.Type: GrantFiled: March 10, 1997Date of Patent: December 28, 1999Assignee: 3M Innovative Properties CompanyInventor: Larry R. Cox
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Patent number: 5967160Abstract: Retractable doors 22 to a washing chamber 20 of a washer 10 open automatically to allow a load to be processed to be wheeled into the chamber. The doors are fitted with blowout panels 42, 44. In an emergency, a worker trapped in the washing chamber can escape by pushing the blowout panels outward. A tilting floor assembly 70 includes a floor 76 supported on a frame 74 and a lifting mechanism 90 for selectively raising and lowering a side of the frame to tilt the floor. The floor is tilted automatically during a cleaning cycle to allow cleaning fluids to drain from the load, then leveled before opening of the doors for ease of removal of the load.Type: GrantFiled: November 14, 1997Date of Patent: October 19, 1999Assignee: Steris CorporationInventors: Daniel Rochette, Michel Lemay, Yves-Andre Theriault, Michel Emond, Mario Duchaine, Ghislain Parent, Nathalie Thibault
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Patent number: 5954911Abstract: Processing methods and systems using vapor phase processing streams made from a liquid phase source and feed gas. Some versions use multiple liquid sources and multiple vapor generators which each produce vapors which are mixed. Some of the vapor generators use metering pumps to inject a controlled flow of liquid into a controlled flow of feed gas. In some embodiments the vapors are exsiccated to reduce saturation before being introduced as a processing chamber vapor mixture into a processing chamber. The semiconductor pieces are preferably rotated within the processing chamber and can be processed in batches.Type: GrantFiled: February 26, 1996Date of Patent: September 21, 1999Assignee: Semitool, Inc.Inventors: Eric J. Bergman, Robert W. Berner, David Oberlitner
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Patent number: 5950642Abstract: A clean connection and sampling apparatus (10) and method for creating a controlled environment for the transfer of chemicals has an isolation means for providing an isolated area (14) capable of being cleaned. A first connection means (16) for connection to a supply of chemicals to be transferred is provided and a second connection means (18) for transferring the chemicals from the isolation means to a receiver for said chemicals is also provided. A sampling means is located within the isolation means for sampling the chemical prior to transfer to the receiver. A pass-through means (22) is provided for receiving a sample from within the isolation means and isolating the sample from the isolation means prior to transfer of the sample outside of the isolation means for analysis.Type: GrantFiled: November 12, 1997Date of Patent: September 14, 1999Assignee: Porter Company/Mechanical ContractorsInventors: Rodney D. Auck, Kenneth Kisamore
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Patent number: 5937875Abstract: An apparatus for cleaning a sprayer, the sprayer having a material inlet, comprising a housing, a rack within the housing for supporting the sprayer, an adapter having one end adapted to connect to the material inlet of the sprayer, a tube within the housing having one end connected to the other end of the adapter, a solvent supply, and means for circulating solvent connecting the solvent supply to the tube, for circulating solvent from said solvent supply, through the tube and the adapter, and into the sprayer. The apparatus includes a sprayer trigger holder, comprising a unitary, resilient, spring wire clip, having at one end a C-shaped portion for holding the trigger in a retracted position, and the other end of the wire clip having a hook-shaped portion for hanging the sprayer.Type: GrantFiled: September 30, 1996Date of Patent: August 17, 1999Inventor: Richard Nygren
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Patent number: 5938860Abstract: A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.Type: GrantFiled: August 28, 1997Date of Patent: August 17, 1999Assignee: Micron Technology, Inc.Inventor: Matthew E. Williams
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Patent number: 5934869Abstract: A fan cleaning system includes a fan having a motor mounted to a support structure. A fan blade is mounted to a shaft of the motor and enclosed by a fan guard. In one aspect of the invention, the fan guard comprises a front guard and a rear guard having an upper rear guard and a lower rear guard. The upper rear guard and lower rear guard are mounted to the motor on opposite sides of the motor and shaft thereby permitting removal of the upper and lower rear guards from the motor without removing the fan blade. In a second aspect of the invention, fan cleaning system includes a cleaning shroud which completely encloses the fan guard, blade and part of the motor. The cleaning shroud preferably comprises an upper shroud and a lower shroud and an upper shroud bracket and a lower shroud bracket sealingly mounted against the motor.Type: GrantFiled: February 7, 1997Date of Patent: August 10, 1999Assignee: Dwight C. Janisse & AssociatesInventor: Mark T. Janisse
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Patent number: 5934298Abstract: The present invention provides a combination sink and dishwashing apparatus having a sink sharing a common side wall with a cabinet which defines a closed space. The cabinet has a wire basket for holding and washing a plurality of dishes within the cabinet. The common side wall is a part of the cabinet that defines the closed space and is positioned to form one side of the sink. The common side wall can be opened to allow the wire basket to slide from within the cabinet and into the sink, for loading and unloading the dishes. Within the cabinet, the invention contains a pump powered by a motor, the pump spraying water through a rotatably mounted spray arm onto the dishes to wash them, as with traditional dishwashing machines. The invention preferably includes a garbage disposal which is also powered by the motor. In an alternative embodiment, this invention can include two cabinets as described above, each located on opposing sides of the sink.Type: GrantFiled: November 14, 1997Date of Patent: August 10, 1999Inventor: Baljit Singh
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Patent number: 5927303Abstract: In a substrate processing apparatus wherein a substrate is held horizontally and rotated about a center axis which extends in a vertical direction to thereby supply processing liquid to the substrate, vortical grooves which are twisted in a direction of rotation of the substrate are formed in a cover surface which is a bottom surface of a cover plate which covers a top surface of the substrate across a gap. Although the processing liquid which is supplied to the substrate is scattered at the substrate and adhere as drops to the cover surface, subjected to force of an air stream which is created as a substrate rotates, the drops move along the grooves on the cover surface. This permits the drops on the cover surface to be smoothly discharged outside the cover surface without allowing the drops to fall off onto the substrate, which in turn improves the quality of the substrate.Type: GrantFiled: December 22, 1997Date of Patent: July 27, 1999Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Katsuhiko Miya, Akira Izumi
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Patent number: 5924433Abstract: A dishwasher construction having a molded one piece tub with integrally molded reinforcing ribs on an outside surface of the tub, the reinforcing ribs being hollow members formed by gas injection molding. At least one of the reinforcing ribs can be fashioned as a hollow conduit for transferring water from a bottom mounted pump to a top mounted wash arm of the dishwasher, or from a drain pump to a drain outlet. By using hollow reinforcing members molded integrally with the tub, an external upper wash arm conduit is avoided which can have external leakage, and an internal upper wash arm conduit is avoided which tends to restrict the working space within the dishwasher and can trap food and be otherwise functional and unappealing to the consumer.Type: GrantFiled: March 19, 1997Date of Patent: July 20, 1999Assignee: Whirlpool CorporationInventors: Edward L. Thies, Roger J. Bertsch, John P. Vance, Roger D. Jewell
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Patent number: 5904163Abstract: A dishwasher includes a cabinet having an opening, a door provided to open/close the cabinet opening, a washing chamber member provided in the cabinet and forming a washing chamber facing the opening, a washing nozzle provided facing in a certain direction of the washing chamber, a circulation pump coupled to the washing nozzle, the bottom portion of washing chamber and an external drain outlet, a driving source provided outside the washing chamber, a power transmission mechanism provided at a corner on one side in cabinet behind and outside the washing chamber, and a control circuit controlling the circulation pump and driving source. By the power transmitting mechanism, a dish washing basket placed in the washing chamber is rotated. Since the power transmitting mechanism is placed in a corner behind the washing chamber, the dishwasher can be made smaller.Type: GrantFiled: July 25, 1997Date of Patent: May 18, 1999Assignee: Sharp Kabushiki KaishaInventors: Yoshifumi Inoue, Yasuhiro Sakoda, Hirokazu Nishio, Kenji Kimura, Eijirou Iguchi, Takeshi Tanabe, Tetsuichi Arita, Mituo Oouchi
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Patent number: 5862822Abstract: A device for cleaning a buffing pad comprising: a housing; a turbine wheel means, in the housing for supporting the pad and for rotating the pad in fluid to remove debris therefrom and in air to dry same.Type: GrantFiled: February 8, 1997Date of Patent: January 26, 1999Assignee: Herkules Equipment CorporationInventors: Phillip Borders, Craig A. Achenbach, Richard A. Robb
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Patent number: 5860436Abstract: A washer having a pair of offset legs. In addition to the offset legs, the washer includes a tub, a front frame and a rear frame. The tub defines a wash chamber with a front opening and includes a bottom wall and opposing side walls. The front frame has a pair of legs respectively disposed adjacent to the opposing side walls of the tub toward the front opening. The rear frame has a pair of horizontal legs with outer ends and a pair of vertical supports. The vertical supports are disposed rearward from the legs of the front frame. The horizontal legs are secured to the vertical supports and extend forward therefrom to the outer ends. The offset legs each have a neck and an upright member. The necks are offset forward of the upright members and are respectively secured to the legs of the front frame. The upright members are respectively secured to the horizontal legs toward the outer ends.Type: GrantFiled: July 31, 1996Date of Patent: January 19, 1999Assignee: White Consolidated Industries, Inc.Inventor: Bradley B. Hobday
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Patent number: 5860437Abstract: A hand washing apparatus and having a hand washing bowl mounted at a suitable height for washing the hands, the bowl being moveable between open and closed positions, controls for moving the bowl between a hand washing position and an inactive position, a dispenser for dispensing warm water over the hands in the bowl, a dispenser for dispensing soap over the hands in the bowl, and, a dispenser for dispensing rinse water over the hands in the bowl. Also disclosed is a method of cleansing the hands using such apparatus.Type: GrantFiled: August 7, 1996Date of Patent: January 19, 1999Assignee: CSIA Research FoundationInventor: Geoffrey Roy Fernie