Miscellaneous Patents (Class 134/201)
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Patent number: 7891366Abstract: A liquid processing apparatus includes a substrate holding member configured to rotate along with a substrate held thereon in a horizontal state; a rotary cup configured to surround the substrate held on the substrate holding member, to rotate along with the substrate, and to receive the process liquid thrown off from the substrate; a rotation mechanism configured to integrally rotate the rotary cup and the substrate holding member; and a liquid supply mechanism configured to supply a process liquid onto the substrate. The apparatus further includes an annular drain cup and an annular exhaust cup with an exhaust port connected thereto to discharge a collected gas component. A gas-flow adjusting mechanism is disposed between the exhaust cup and the exhaust port and configured to adjust a gas flow of the gas component to flow toward the exhaust port from essentially all around within the exhaust cup.Type: GrantFiled: June 13, 2007Date of Patent: February 22, 2011Assignee: Tokyo Electron LimitedInventor: Norihiro Ito
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Patent number: 7886753Abstract: The invention relates to a disinfection apparatus (1) for disinfecting liquid cleaning of health care objects and the like, which disinfection equipment comprises a washing system (2) for supplying liquid to a chamber (3) which is adapted to hold said objects in cleaning, a pump (4) for pumping liquid in said washing system (2), and at least one collection space (5) connected to the inlet (6) of the pump for collecting liquid from said chamber (3) to the pump (4). Said collection space (5) is defined by at least one partition (7) which has an extent horizontally from the inlet (6) of the pump and which screens the inlet (6) of the pump from liquid descending into the chamber (3) at least nearest the inlet (6) of the pump.Type: GrantFiled: April 26, 2005Date of Patent: February 15, 2011Assignee: Getinge Disinfection ABInventor: Christer Jönsson
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Patent number: 7871521Abstract: A system for regulating a reverse osmosis system to obtain zero wastewater includes a fresh water supply, a reverse osmosis apparatus, a concentrate storage tank and a permeate storage tank, a concentrate solenoid valve and a permeate solenoid valve, a permeate heater, an institutional dishmachine and a control system. The reverse osmosis apparatus filters water from the fresh water supply into a concentrate rinse stream and a permeate rinse stream. The concentrate storage tank and the permeate storage tank are downstream of the reverse osmosis apparatus and receiving the concentrate rinse stream and the permeate rinse stream, respectively. The concentrate solenoid valve and the permeate solenoid valve control the flow of the concentrate rinse stream and the permeate rinse stream, respectively, from their respective storage tank. The permeate heater heats the permeate rinse stream to a predetermined temperature.Type: GrantFiled: October 7, 2008Date of Patent: January 18, 2011Assignee: Ecolab Inc.Inventors: Lee J. Monsrud, Adrian E. Hartz
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Patent number: 7867340Abstract: A dishwasher is provided which can reduce the discharge of noise produced by the dishwasher, thereby preventing a user from being upset due to the noise and achieving not only a comfortable use environment but also an improvement in productivity. With the dishwasher, it is possible to prevent the noise, caused during operation of the dishwasher, from being discharged from a lower side of a door, by use of a sound-insulation member with a simplified configuration. In the manufacture of the dishwasher, improved assembly productivity can be accomplished.Type: GrantFiled: September 27, 2007Date of Patent: January 11, 2011Assignee: LG Electronics Inc.Inventors: Joon Ho Pyo, Tae Hee Lee
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Patent number: 7862664Abstract: A dishwasher is disclosed which includes a washing cabinet, a frame disposed within the washing cabinet, and a basket, which is placed on the frame, and whose height is adjustable by a back and forth movement. With this construction, there is no need to lift the basket, rotate it 90°, and reposition the basket to adjust a height of the basket. Rather, it is possible to adjust the height of the basket by a simple operation of pulling the basket forward or pushing it rearward.Type: GrantFiled: August 29, 2007Date of Patent: January 4, 2011Assignee: LG Electronics Inc.Inventors: Yong Jin Choi, Nung Seo Park, Young Hwan Park, Gap Su Shin
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Patent number: 7854033Abstract: A mobile machine for removing dry particulate matter from a mop, cloth or duster by agitation. A drum with flexible, resilient fingers rotates and agitates the mop, cloth or duster to loosen the particulate matter. An electric fan sucks ambient air and the particulate matter to a chamber wherein it is wetted by a liquid mist introduced by spray nozzles. The mist combines with the particulate matter to form larger particulates. The particulate matter and larger particulates are passed through a filter to remove the particulate matter and larger particulates, which drop onto a removable tray.Type: GrantFiled: December 21, 2007Date of Patent: December 21, 2010Inventor: Jack G. Kinder
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Patent number: 7841352Abstract: A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The cleaning tool includes a sonic transducer, a reservoir configured to hold liquid between the sonic transducer and the surface to be cleaned, and a barrier positioned in the reservoir under the aperture to form, in use, a shield to sonic waves.Type: GrantFiled: June 29, 2007Date of Patent: November 30, 2010Assignee: ASML Netherlands B.V.Inventors: Bauke Jansen, Raymond Gerardus Marius Beeren, Anthonius Martinus Cornelis Petrus De Jong, Kornelis Tijmen Hoekerd
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Patent number: 7814919Abstract: An ultrasonic cleaning apparatus which cleans a material at a surface by supplying an ultrasonic wave from an ultrasonic wave application head to a cleaning liquid on the surface, and cleans the surface, wherein the ultrasonic wave application head has an ultrasonic wave transmission member which is provided opposite the surface, and has a curved portion on a first plane placed close to the surface, an ultrasonic transducer which is provided on a second plane placed opposite the first plane of the ultrasonic wave transmission member, and generates and applies an ultrasonic wave to a cleaning liquid on the surface through the ultrasonic wave transmission member, and a preventive portion which is provided in the ultrasonic wave transmission member, and prevents the ultrasonic wave applied to the cleaning liquid and reflected on the surface from entering the ultrasonic transducer through the ultrasonic wave transmission member.Type: GrantFiled: October 9, 2008Date of Patent: October 19, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Naoaki Sakurai, Hiroshi Fujita
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Patent number: 7814768Abstract: The invention relates to a textile product treating apparatus, in particular washing machine (1), drying apparatus or refreshing apparatus, comprising a main body (2) of the apparatus including a washing, drying and/or refreshment device; and a handheld ultrasonic cleaning device (10) comprising an ultrasonic transducer and an ultrasonic wave emitting surface, wherein the ultrasonic cleaning device is connected by a flexible hose (11) to the main body (2). According to the invention a treatment area (6) is provided covering at least a portion of the top unit (3) of the main body (2) and adapted to place a textile product (15) to be treated thereon.Type: GrantFiled: December 19, 2005Date of Patent: October 19, 2010Assignee: Electrolux Home Products Corporation N.V.Inventors: Alexandre Vecchi, Nicola Reid
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Patent number: 7798158Abstract: Disclosed is a cleaning system for removing coatings from a hard surface by high pressure liquid. The system employs a combination liquid and vacuum reservoir connected to a high pressure pump for directing ultra high pressure water through a blast head mounted on a front portion of the vehicle. The cleaning system is preferably mounted on a single truck with a single prime mover. The drive-line of the vehicle is constructed and arranged to operate in two distinct modes, e.g. a transport mode and a work mode. In the transport mode, a first transmission coupled to the rear portion of the prime mover delivers torque from the engine to the rear wheels of the vehicle. In the work mode, the prime mover is utilized to mechanically drive the bed mounted equipment as well as provide motive force in the form of mechanical-hydrostatic transmission to propel the system at a speed suitable for marking removal.Type: GrantFiled: January 26, 2006Date of Patent: September 21, 2010Inventor: James P. Crocker
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Patent number: 7784756Abstract: A vehicle wash system having a plurality of vehicle treatment components includes with at least one support member. The support member is constructed of a base material and has an outer surface. An elongated cover includes an interior surface and an exterior surface. The interior surface of the elongated cover has a first color and a size and shape that substantially matches the outer surface of the support member. The elongated cover is readably engageable with the support member to protect it from contact with fluid and debris. The elongated cover is formed of a readably cleanable material such that fluid and debris can be easily wiped off of its exterior surface.Type: GrantFiled: May 5, 2010Date of Patent: August 31, 2010Assignee: Motor City Wash Works, Inc.Inventor: Robert J. Wentworth
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Patent number: 7776157Abstract: A cleaning device comprising an enclosure, a cover allowing it to be opened in order to place an object to be cleaned within the enclosure, a supply of cleaning fluid, the enclosure comprising a piston that can move thanks to a motor, a geometry allowing a contact with an external fluid reservoir when the piston occupies a certain position within the enclosure in order to generate a sudden release of pressure, the device comprising an outlet valve remaining closed when the piston increases the volume of the enclosure so as to cause the pressure reduction within the enclosures.Type: GrantFiled: June 9, 2005Date of Patent: August 17, 2010Inventors: David Weill, Claude Schindler
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Publication number: 20100180914Abstract: A conductor cleaning system for cleaning aluminum strands of all aluminum and steel reinforced conductors, such as ACSS, ACSR, ACAR, and AAA. The conductor cleaning system having a container adapted to receive a portion of a conductor to be cleaned, a housing adapted to receive and support the container, and a cleaning solution contained in the container for cleaning the portion of the conductor. The cleaning solution being adapted to clean the conductor without reacting with or damaging the conductor.Type: ApplicationFiled: October 29, 2009Publication date: July 22, 2010Applicant: ELECTRIC POWER RESEARCH INSTITUTE, INC.Inventors: Andrew J. Phillips, Andrew H. Stewart, Shridas Ningileri, Neil J. Hurst, J. Finley Bush, Sike Xia, Chenghe Xiao, Yansheng Liu
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Patent number: 7758704Abstract: An endoscope cleaning/disinfecting apparatus of the present invention includes a cleaning tub, a chemical solution tank for storing a germicide, a chemical solution collection pipe, a chemical solution pipe, a feed pipe, a germicide bottle tray which can be drawn from the body of the cleaning/disinfecting apparatus, and a control unit for performing control to prepare the germicide by mixing a basis, a buffering agent, and a diluent. The germicide bottle tray includes a storage part which stores at least a first bottle body out of the first bottle body for storing the basis or a second bottle body for storing the buffering agent, and a detection portion for outputting a detection signal in a state in which the bottle body is stored in the storage part. The control unit performs control based on the detection signal outputted from the detection portion to prepare the germicide.Type: GrantFiled: March 9, 2007Date of Patent: July 20, 2010Assignee: Olympus Medical Systems Corp.Inventors: Hitoshi Hasegawa, Kojiro Kotani
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Patent number: 7753326Abstract: A vehicle wash system having a plurality of vehicle treatment components includes with at least one support member. The support member is constructed of a base material and has an outer surface. An elongated cover includes an interior surface and an exterior surface. The interior surface of the elongated cover has a first color and a size and shape that substantially matches the outer surface of the support member. The elongated cover is readably engageable with the support member to protect it from contact with fluid and debris. The elongated cover is formed of a readably cleanable material such that fluid and debris can be easily wiped off of its exterior surface.Type: GrantFiled: February 19, 2008Date of Patent: July 13, 2010Assignee: Motor City Wash Works, Inc.Inventor: Robert J. Wentworth
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Patent number: 7748524Abstract: An apparatus for cleaning a paint brush and preventing a discharge of harmful and flammable vapors. In a first embodiment, a housing has vertical front, side and rear walls that have upper edge portions in a common horizontal plane for providing a seat for a seal. The common upper of the housing are sealed by a soft resilient cellular seal and a cover that engages the housing. The cover and resilient cellular seal have aligned apertures for receiving in a pass through sealing relationship a handle of a paint brush. In a second embodiment, a cylindrical housing has an open top portion which is sealed by threadably engaging a cover with a resilient cellular seal therebetween. The cover and resilient cellular seal cover have aligned apertures for receiving in a pass through sealing relationship a handle of a paint brush.Type: GrantFiled: December 3, 2007Date of Patent: July 6, 2010Inventor: Edward Ruzumna
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Patent number: 7748395Abstract: An object is to improve the cleanness achieved by washing through effectively suppressing the residual of solvent remained on a wash-target after washing. The present invention is a wash-target holder soaked in a wash tank by holding a wash-target, which comprises a tray for placing the wash-target, a surrounding member, which is provided standing up on a wash-target placing face of the tray, for surrounding the periphery, and a defluxion-restricting member for restricting the defluxion of the wash-target from the tray. In the periphery of the wash-target surrounded by the surrounding member, an opening for letting in and out the solvent used for washing the wash-target is formed.Type: GrantFiled: February 25, 2005Date of Patent: July 6, 2010Assignee: SAE Magnetics (H.K.) Ltd.Inventors: Tatsuya Satoyoshi, Morihiro Ohno, Osamu Fukuroi
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Publication number: 20100139710Abstract: An apparatus for cleaning a surface of wafer or substrate includes a plate being positioned with a gap to surface of the wafer or substrate, and the plate being rotated around an axis vertical to surface of wafer or substrate. The rotating plate surface facing surface of the wafer or substrate has grooves, regular patterns, and irregular patterns to enhance the cleaning efficiency. Another embodiment further includes an ultra sonic or mega sonic transducer vibrating the rotating plate during cleaning process.Type: ApplicationFiled: July 5, 2007Publication date: June 10, 2010Inventors: Hui Wang, Jian Wang, Yue Ma, Chuan He
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Patent number: 7730899Abstract: An embodiment of an apparatus for removing deposits from a petroleum flow line may include a pipe capable of being attached to a petroleum flow line. The pipe may have a pipe axis that defines a direction for fluid flow in the petroleum flow line. The apparatus may also include a first and a second field winding circumferentially disposed around the pipe, and an electric wave generator adapted to electrically communicate an electric wave to the first field winding and the second field winding. In response to the electric wave, the first field winding is adapted to produce a first magnetic field having a first magnetic axis and the second field winding is adapted to produce a second magnetic field having a second magnetic axis. The first magnetic axis may be noncollinear with respect to the second magnetic axis, and at least the first magnetic axis may be noncollinear with respect to the pipe axis.Type: GrantFiled: August 4, 2008Date of Patent: June 8, 2010Inventor: Qi Ning Mai
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Patent number: 7725971Abstract: A cleaning device for cleaning sidewalls of a liquid container. The cleaning device includes a cover that can be removably disposed over a flotation device. The cover has a lower cleaning portion that cleans the sidewalls of the container upon contact with the sidewalls. The cover also has an upper noncleaning portion.Type: GrantFiled: July 7, 2006Date of Patent: June 1, 2010Inventor: Russell L. Harmer
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Publication number: 20100108093Abstract: A method for cleaning a substrate is provided that includes applying a liquid medium to a surface of the substrate such that the liquid medium substantially covers a portion of the substrate that is being cleaned. One or more transducers are used to generate acoustic energy. The generated acoustic energy is applied to the substrate and the liquid medium meniscus such that the applied acoustic energy to the liquid medium prevents cavitation within the liquid medium. The acoustic energy applied to the substrate provides maximum acoustic wave displacement to acoustic waves introduced into the liquid medium. The acoustic energy introduced into the substrate and the liquid medium enables dislodging of the particle contaminant from the surface of the substrate. The dislodged particle contaminants become entrapped within the liquid medium and are carried away from the surface of the substrate by the liquid medium.Type: ApplicationFiled: October 30, 2008Publication date: May 6, 2010Applicant: Lam Research Corp.Inventors: Grant Peng, David Mui, Shih-Chung Kon
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Patent number: 7708836Abstract: A device and method that enables the reliable and reproducible testing of the cleaning efficiency of an ultrasonic cleaning device is disclosed.Type: GrantFiled: June 26, 2002Date of Patent: May 4, 2010Assignee: PEREG GmbHInventor: Martin Pfeifer
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Publication number: 20100077958Abstract: A cleaning apparatus suitable for cleaning a roll coating machine is described, the cleaning apparatus having one or more rolls and including: a cleaning means; and a support chassis for supporting the cleaning means adjacent the one or more rolls. A roll coating machine is also described, which includes a cleaning apparatus, comprising a cleaning means; and a support chassis for supporting the cleaning means adjacent the one or more rolls.Type: ApplicationFiled: March 4, 2008Publication date: April 1, 2010Inventor: Michael Arthur Fitch
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Publication number: 20100051053Abstract: This invention provides a washing storage solution (22), which can substantially completely remove contaminants such as transition metals and alkali metals deposited on the surface of a glass electrode that comprises a glass comprising lithium and can restore performances as an electrode such as responsiveness and reproducibility in the measurement to an initial state or a state better than the initial state. The washing storage solution (22) is characterized by comprising at least one reducing reagent having a reduction behavior. Examples of reducing reagents include hydroxylammonium chloride, sodium hyposulfite, sodium hydrogen sulfite, sodium thiosulfate, sodium hypophosphite, ascorbic acid, and titanium oxide.Type: ApplicationFiled: November 7, 2007Publication date: March 4, 2010Inventors: Yuji Nishio, Yasukazu Iwamoto
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Publication number: 20100028813Abstract: A pellicle cover, system, and method for cleaning a photomask are disclosed. A pellicle cover is disposed over a photomask and pellicle without damaging the markings surrounding the mask pattern area. The pellicle cover can be practicably implemented in an improved photomask cleaning system and process in which the backside of the photomask may be cleaned without removing the pellicle from the patterned surface.Type: ApplicationFiled: August 4, 2008Publication date: February 4, 2010Inventors: Banqiu Wu, Ajay Kumar, Amitabh Sabharwal, Roman Gouk, James S. Papanu
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Publication number: 20090320886Abstract: A protective arrangement for protecting a control device associated with a dishwashing appliance is provided. A door assembly is pivotably engaged with a tub portion of the dishwashing appliance and cooperates therewith to cover a forward access opening defined by the tub portion. The control device is mounted to the door assembly and is adapted to selectively direct operation of at least one operational component of the dishwashing appliance. The protective arrangement is configured to wrap about the control device so as to be at least partially disposed between the control device and door assembly. The protective member is further disposed between a detergent dispensing device and the control device to at least partially prevent contact between dishwashing fluid from the detergent dispensing device and the control device. An associated apparatus and method are also provided.Type: ApplicationFiled: June 30, 2008Publication date: December 31, 2009Inventors: Dennis A. Poyner, David Sumner
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Publication number: 20090288690Abstract: A sealing device for a dishwasher is provided, comprising at least one flange member. Each flange member is adapted to interact with at least one of a gasket member, a tub portion, and a door member. Each flange member is configured to extend along at least one opposing side of a front opening of the tub portion. Each flange member is cantilevered so as to extend between each opposing side of the front opening of the tub portion and the door member, upon closing thereof, so as to deflect washing fluid within the tub portion away from the gasket member forming a seal between the door member and the tub portion. An associated apparatus and method are also provided.Type: ApplicationFiled: May 20, 2008Publication date: November 26, 2009Inventor: Robert Haeberle
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Patent number: 7621287Abstract: An arrangement for improving a drying performance of an automatic dishwasher including at least one dish basket is provided. The automatic dishwasher is adapted to be operated with cleaning programs including at least one rinsing subprogram and one drying subprogram. An insert for the dish basket adapted to be loaded with at least one of a plurality of silverware pieces and small dishes or other objects includes structure for providing autonomous run-off of dish washing liquid in contact with liquid problem retention areas of the insert. The structure includes a plurality of openings for the penetration of a dish washing liquid, the openings being limited by a plurality of ridges crossing in-plane at a plurality of crossing points forming the openings, and the ridges are formed in a sloped structure having a substantially rhomb shaped cross-section.Type: GrantFiled: May 13, 2003Date of Patent: November 24, 2009Assignee: BSH Bosch und Siemens Hausgeraete GmbHInventors: Michael Rosenbauer, Heinz Heissler, Ulrich Deiss, Gerhard Fetzer
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Patent number: 7617832Abstract: An automatic car wash system is provided for processing multiple vehicles simultaneously. The system according to one embodiment includes an elongate path, a plurality of stations for processing the vehicle, at least two detectors for indicating the presence of the vehicles. The system provides instructions to the drivers of the vehicles so that the vehicles travel through the system under their own power, and thus conveyor systems can be avoided, yet throughput remains high. In one embodiment, the system includes a radio transmitter that is operable to direct specific information to each of the vehicles via radio signals.Type: GrantFiled: November 21, 2007Date of Patent: November 17, 2009Inventor: Michael MacDowell
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Publication number: 20090277471Abstract: A substrate cleaning apparatus includes a supporting plate supporting a substrate and a shielding unit that is disposed above the substrate to protect the substrate. A portion of the shielding unit, which is adjacent to a focal point where light for generating shock waves is focused, is switched. Therefore, the substrate cleaning apparatus prevents the concentration of plumes and residence beams, which are generated together with the shock waves, on a specific region of the shielding unit and further prevents the recontamination of the substrate by the damage of the shielding unit.Type: ApplicationFiled: November 18, 2008Publication date: November 12, 2009Applicant: SEMES CO., LTDInventors: Se-Won Lee, Jae-Jeong Jeong, Jung-Gun Cho
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Publication number: 20090269506Abstract: The present invention provides a process and an apparatus for remote plasma cleaning of a process chamber of a chemical vapor deposition (CVD) reactor. The reactive species are generated in a remote plasma unit and are introduced into the process chamber through a plurality of inlet holes. The reactive species are free radicals such as oxygen radicals, fluorine radicals, and the like. These reactive species react with the unwanted residues in the process chamber and generate volatile products. The invention also provides a method for controlling the flow rate of the reactive species.Type: ApplicationFiled: April 24, 2008Publication date: October 29, 2009Inventor: Seiji Okura
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Patent number: 7596974Abstract: A device for applying stain formulation to a garment or article of clothing while it is being worn is disclosed. The device includes a reservoir with a valve assembly for dispensing an effective stain removal formulation directly to the stain, spot or mark. The device also includes a shell accommodating absorbent pads. After the stain removal formulation is applied, an absorbent pad is pressed and/or rubbed on the stain to lift and remove the stain and to absorb or wick excess fluid thereby reducing the amount of time the resulting wet spot takes to dry. Effective stain removing formulations for on-the-go use are also disclosed.Type: GrantFiled: November 29, 2006Date of Patent: October 6, 2009Assignee: S.C. Johnson & Son, Inc.Inventors: Leland J. Smith, Michael J. Banco, Douglas A. Soller, Roberta A. Wick, Jeanne A. O'Brien, Christopher R. Sheridan
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Patent number: 7588039Abstract: A cleaning system for cleaning an operator head of a hair removing apparatus such as a dry shaver. The system includes a cleaning device having a housing configured to hold the shaver upside down to place the operator head in a basin for cleaning the same with a liquid supplied from a tank. The apparatus incorporates an externally controllable electric circuit for driving the operator head in accordance with an external electric signal generated by a controller within the device. The device's housing has a signal transmitting means for transmitting the electric signal, while the apparatus has a signal receiving means which comes into electrical interconnection with the signal transmitting means. The signal receiving means is disposed intermediate the height of the apparatus such that the electrical interconnection can be made within the height of the apparatus, requiring no extra height dimension to the system for the electrical interconnection.Type: GrantFiled: January 19, 2004Date of Patent: September 15, 2009Assignee: Panasonic Electric Works Co., Ltd.Inventors: Atsuhiro Saito, Jyuzaemon Iwasaki, Hiroyuki Kameoka, Yasuo Ibuki, Fumio Taniguchi, Kotaro Yanagi, Hiroshi Shigeta
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Patent number: 7556049Abstract: A modular exhaust vent for use in venting a wash chamber of a dishwasher, such as during a dry cycle, comprises a housing that forms an exhaust flow path from the wash chamber to the exterior of the dishwasher and a valve operable for pivotal movement about a pivot axis between an opened and closed position for selectively closing the exhaust flow path. An actuator for moving the valve is connected to the valve by a link such that activation of the actuator effects movement of the link to pivot the valve to either the opened or closed position. Further, the valve selectively closes the exhaust flow path at an inlet to impede introduction of sound into the exhaust flow path.Type: GrantFiled: November 1, 2004Date of Patent: July 7, 2009Assignee: Whirlpool CorporationInventors: Michelle L Oakes, Marc R Pendergrass, Angela J Robbins, Andrew J Retsema
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Publication number: 20090162995Abstract: By hydrogen-terminating a semiconductor surface using a solution containing HF2? ions and an oxidant, the hydrogen termination can be quickly carried out. In this case, the semiconductor surface is silicon having a (111) surface, a (110) surface, or a (551) surface.Type: ApplicationFiled: September 20, 2005Publication date: June 25, 2009Inventors: Tadahiro Ohmi, Akinobu Teramoto, Hiroshi Akahori
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Publication number: 20090151758Abstract: A lower rack for a dishwasher is provided, comprising a rack member movable into and out of the dishwasher along first and second tracks extending from the tub to an interior portion of the dishwasher door. The lower rack includes at least one rack roller mechanism on each laterally-opposed side portion of the rack member, for facilitating movement of the rack member with respect to the lower end of the tub and the interior portion of the open door. One of the rack roller mechanisms includes a leadingly-disposed stop portion, as the rack member is moved out of the lower end of the tub and along the interior portion of the open door for interacting with a stop feature of the corresponding one of the first and second tracks to limit egress of the rack member from the tub along the first and second tracks. Associated apparatuses are also provided.Type: ApplicationFiled: December 12, 2007Publication date: June 18, 2009Inventors: Torkel Kristensson, Michael Bryan Pike
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Publication number: 20090145463Abstract: Provided are an ozonated water mixture supply apparatus and method, and a substrate treating facility that receives an ozonated water mixture from the apparatus to treat a substrate. The ozonated water mixture supply apparatus includes a mixing line and distribution lines. The mixing line respectively receives a treating liquid and an ozonated water from a treating liquid supply line and an ozonated water supply line and mixes the treating liquid and the ozonated water to generate the ozonated water mixture satisfying a previously set concentration. Each of the distribution lines distributes the ozonated water mixture generated from the mixing line into a process unit. The mixing line includes a mixing valve and a static mixer. Therefore, the ozonated water mixture having the previously set concentration is generated and supplied using an in-line mixing method without requiring a mixing vessel such as a mixing tank.Type: ApplicationFiled: November 3, 2008Publication date: June 11, 2009Inventors: Rae-Taek Oh, Choon-Sik Kim, Jeong-Yong Bae
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Publication number: 20090133721Abstract: A chandelier cleaning apparatus includes a tent-like enclosure made of a transparent plastic. In a first embodiment, the enclosure includes a main body having a flat top panel and a flat, imperforate bottom panel. A central aperture is formed in the top panel and a zipper extends from the central aperture to an outer periphery of the top panel so that the central opening is enlarged when the zipper is open. The chandelier passes through the central aperture when the zipper is open and is enclosed within the enclosure when the zipper is closed. A mist of hot water is sprayed onto the chandelier with a wand that extends though a small opening in the enclosure. The time required to clean a typical chandelier drops from hours to minutes, no chemicals are used, and the chandelier is touched only by the hot mist.Type: ApplicationFiled: November 26, 2007Publication date: May 28, 2009Inventor: Keith S. Campbell
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Publication number: 20090120456Abstract: To provide a technique which cleans an attracting face of a mechanism for electrostatically attracting an object to be processed inside a vacuum processing apparatus and keeps its attracting force constant. The method of the present invention is for cleaning an attracting face of a hot plate which holds the object to be processed inside a vacuum processing chamber through electrostatic attraction. The invention method includes a step of cleaning the attracting face of the hot plate by applying a high-frequency electric power of 13.56 MHz to a metallic base arranged under and near the hot plate in a state in which a cleaning gas is introduced into the vacuum processing chamber.Type: ApplicationFiled: November 12, 2008Publication date: May 14, 2009Applicant: ULVAC, INC.Inventors: Kouji SOGABE, Naoki MORIMOTO, Masahiko ISHIDA
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Publication number: 20090120471Abstract: A system and a retrofit kit for removing debris from a surface of a material. At least one vibration subunit is provided which is either embedded within or operatively connected to a back surface of the material. The vibration subunits are capable of converting a driving energy to a vibrating mechanical output energy which is coupled to the material. At least one external energy source is provided which is operatively connected to the vibration subunits. The external energy source is capable of providing the driving energy to the vibration subunits. The vibrating mechanical energy is capable of causing debris to be removed from the surface of the material.Type: ApplicationFiled: December 17, 2008Publication date: May 14, 2009Inventor: Damian R. Ludwiczak
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Patent number: 7527921Abstract: Example embodiments of the present invention relate to methods of treating and removing a photoresist pattern and a method of manufacturing a semiconductor device using the same. Other example embodiments of the present invention relate to a method of treating a photoresist pattern and a method of removing a photoresist pattern formed using a photoresist composition suitable for argon fluoride (ArF). In a method of removing a photoresist pattern, an ozone vapor including a water vapor and an ozone gas may be provided onto the photoresist pattern to remove a hydrophobic group from a photoresist resin included in the photoresist pattern. A cleaning solution may be provided to make the photoresist pattern water-soluble. A cleaning process may be performed on the photoresist pattern to remove the photoresist pattern. The photoresist pattern may be effectively removed without an increased processing time and/or damage to a substrate.Type: GrantFiled: June 27, 2006Date of Patent: May 5, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Dae-Hyuk Chung, Dae-Keun Kang, Se-Ho Cha
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Publication number: 20090084399Abstract: In a method and an apparatus for cleaning a substrate using a laser beam, an inner chamber is disposed in a process chamber to define a space in which a laser-induced shock wave is generated. The laser beam is focused on a laser focus positioned in the inner chamber, and thus the laser-induced plasma shock wave is generated around the laser focus. The plasma shock wave is reflected from inner surfaces of the inner chamber and is irradiated on the substrate through a lower portion of the inner chamber. As a result, the intensity of the plasma shock wave irradiated on the substrate is increased, and thus the contaminants on the substrate may be effectively removed.Type: ApplicationFiled: October 1, 2008Publication date: April 2, 2009Inventor: Se-Won Lee
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Publication number: 20090084413Abstract: Embodiments of the present invention generally relate to an apparatus and methods for rinsing and drying substrates. One embodiment provides an end effector comprising a body having a contact tip for contacting an edge area of a substrate, wherein the end effector is configured to support the substrate while the substrate is in a rinsing bath and while the substrate is being dried from the rinsing bath, and the contact tip comprises a hydrophilic material.Type: ApplicationFiled: October 21, 2008Publication date: April 2, 2009Inventors: JOHN S. LEWIS, Michael Biese, Garrett H. Sin, Chidambara A. Ramalingam, Balaji Chandrasekaran, Tak Fan (Kerry) Ling
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Patent number: 7500488Abstract: An apparatus for removing soil from a shoe, boot or other article of footwear. The apparatus employs a jet of water or other fluid to dislodge and break up the soil. The spray nozzle is housed within a tubular plunger having a discharge opening in its upper end. The plunger is operatively connected to the nozzle, so that stepping on the plunger actuates a flow of water therethrough. The nozzle includes a return spring that biases the valve back to the closed position when the plunger is released. The stream of water is directed through the opening against the surface of the shoe or other article of footwear. The upper end of the plunger is surrounded by a layer of flow-disbursing material that prevents the escape of spray from beneath the article of footwear. The layer of flow-disbursing material may be formed by a layer of coarse, open-cell foam material or by a multiplicity of small, resiliently flexible fingers.Type: GrantFiled: February 14, 2006Date of Patent: March 10, 2009Inventor: Michie R. Long
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Patent number: 7493781Abstract: An ultrasonic washing apparatus, comprising a body part, an ultrasonic vibrating horn exposed to the outside of the body part, a liquid feeding means for feeding liquid to the ultrasonic vibrating horn, and a mounting means for mounting the body part at any position, the mounting means further comprising a support arm to be installed on an installed object such as a full automatic washing machine, wherein the support arm is extendable, energized in a retracting direction by a helical tension spring, and can stop an extension at any length with a fixing screw, and the body part can change an attitude or a position relative to the mounting means.Type: GrantFiled: October 2, 2003Date of Patent: February 24, 2009Assignee: Sharp Kabushiki KaishaInventor: Hirokazu Ooe
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Publication number: 20090044844Abstract: An ultrasonic cleaning apparatus which cleans a material at a surface by supplying an ultrasonic wave from an ultrasonic wave application head to a cleaning liquid on the surface, and cleans the surface, wherein the ultrasonic wave application head has an ultrasonic wave transmission member which is provided opposite the surface, and has a curved portion on a first plane placed close to the surface, an ultrasonic transducer which is provided on a second plane placed opposite the first plane of the ultrasonic wave transmission member, and generates and applies an ultrasonic wave to a cleaning liquid on the surface through the ultrasonic wave transmission member, and a preventive portion which is provided in the ultrasonic wave transmission member, and prevents the ultrasonic wave applied to the cleaning liquid and reflected on the surface from entering the ultrasonic transducer through the ultrasonic wave transmission member.Type: ApplicationFiled: October 9, 2008Publication date: February 19, 2009Inventors: Naoaki SAKURAI, Hiroshi Fujita
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Publication number: 20090044843Abstract: In a first aspect, an apparatus for cleaning a substrate is provide. The apparatus comprises a first megasonic cleaner adapted to clean a substrate using a first frequency; and a second megasonic cleaner adapted to clean a substrate using a second frequency. Numerous other aspects are provided.Type: ApplicationFiled: October 11, 2008Publication date: February 19, 2009Inventor: Guy E. Shirazi
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Publication number: 20090044845Abstract: The endoscope reprocessor includes a basin for receiving an endoscope to be reprocessed, a rack which secures thereto a portion of the endoscope and moves vertically within the basin, a drive unit for vertically moving the rack, a positioning member for adjusting a rack stopping position when the endoscope is to be set on the rack and a drive control unit for controlling the drive unit based on computed results from the positioning member.Type: ApplicationFiled: August 15, 2008Publication date: February 19, 2009Applicant: FUJIFILM CorporationInventors: Shengfu Cui, Mitsuhiko Serizawa
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Publication number: 20090038636Abstract: A method of cleaning an imprint template is disclosed. The method includes exposing the imprint template to a reductive fluid.Type: ApplicationFiled: August 9, 2007Publication date: February 12, 2009Applicant: ASML NETHERLANDS B.V.Inventors: Sander Frederik Wuister, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Van Herpen
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Publication number: 20090038656Abstract: A hollow integrally molded article cleansing container of monolithic one-piece construction which is formed of a soft, pliable and resilient plastic material throughout, such as silicone rubber, and is suitable for use within a dishwasher for storing and retaining one or more small articles, such as certain dental appliances or items commonly used by infants and toddlers. The outer wall of the container includes a plurality of openings to permit a flow of water within the dishwasher to pass through the container while performing the cleansing function and an elongated narrow slit that is resiliently deformable into an enlarged opening upon application of pressure adjacent its ends to facilitate the introduction and removal of the article to be cleaned into and from the container. An integral eyelet is provided for securing the container to a rack pin within the dishwasher.Type: ApplicationFiled: August 8, 2007Publication date: February 12, 2009Inventors: Ted Eric Ahrenholtz, Justin Paul Boortz