Miscellaneous Patents (Class 134/201)
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Patent number: 7073522Abstract: Described are methods, systems, and chemistries for cleaning various components of semiconductor process equipment. A method in accordance with one embodiment cleans articles with differently contaminated interior and exterior surfaces by using those articles to separate a cleaning vessel into separate chambers, one chamber for the interior surface and one for the exterior surface. Different chemistries are then applied to the differently contaminated surfaces. This embodiment reduces the required volume of etchant, and consequently saves the cost, treatment, and disposal of toxic chemicals. One embodiment further reduces the requisite etchant volume using one or more volume-displacement elements that displace some of the etchant volume.Type: GrantFiled: February 9, 2005Date of Patent: July 11, 2006Assignee: Quantum Global Technologies, LLCInventor: David S. Zuck
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Patent number: 7059336Abstract: A cleaning device for a shaving head of a dry shaving apparatus includes a reservoir to store a cleaning fluid, a receptacle adapted to receive the shaving head and the cleaning fluid, the receptacle being configured to direct the cleaning fluid toward the shaving head, a return conduit extending from the receptacle to the reservoir to convey the cleaning fluid from the receptacle into reservoir; and a venting device attached to the reservoir to provide aeration and deaeration of the reservoir.Type: GrantFiled: September 8, 2004Date of Patent: June 13, 2006Assignee: Braun GmbHInventors: Jürgen Höser, Diana Kappes, Andreas Larscheid, Uwe Ludäscher, Svatopluk Krumnikl
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Patent number: 7055536Abstract: A cleaning system for a livestock feeding device which unclogs blockage without the need for a workman to enter the feed dispensing area. The system includes at least two swiping arms which are positioned at a lower area of the feed system. The system is environmentally advantageous since workman entry into a hazardous area is reduced. The swiping arms are activated by an external motor which is turned on upon sensing of a clogged or blocked condition of the feed. The system applies to the feeding of hogs, livestock or other dispensing mechanisms.Type: GrantFiled: May 14, 2003Date of Patent: June 6, 2006Inventor: Roger Smiley
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Patent number: 7040330Abstract: A system for cleaning a semiconductor substrate is provided. The system includes transducers for generating acoustic energy oriented in a substantially perpendicular direction to a surface of a semiconductor substrate and an acoustic energy oriented in a substantially parallel direction to the surface of the semiconductor substrate. Each orientation of the acoustic energy may be simultaneously or alternately generated.Type: GrantFiled: February 20, 2003Date of Patent: May 9, 2006Assignee: Lam Research CorporationInventors: John M. Boyd, Michael Ravkin, Fred C. Redeker
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Patent number: 7004440Abstract: A dishwasher tub is supported and retained on a frame. The rear legs of the frame include lower brackets which support the tub and upper brackets which retain and clamp the tub against movement during shipping. The lower brackets are interconnected by a brace to provide enhanced stability to the frame. The upper brackets and lower brackets are connected together by a male hook on one bracket received in a female slot in the other bracket.Type: GrantFiled: April 10, 2003Date of Patent: February 28, 2006Assignee: Maytag CorporationInventors: Jeffrey N. Williams, Daniel Hruby, Heather M. Hagans, J. Don Milam
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Patent number: 6966937Abstract: A patient isolation unit including a foldable frame body, a flexible envelope made of a flammable resin sheet which can be attached to the assembled frame body, and an exhauster to discharge or exhaust the air from the envelope. The exhauster includes a UV lamp, an HEPA filter, and a blower.Type: GrantFiled: June 13, 2003Date of Patent: November 22, 2005Assignee: Sanki Engineering Co., Ltd.Inventors: Takashi Yachi, Saburo Takagi, Kazuaki Iijima, Takeya Ide
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Patent number: 6915808Abstract: A dishwasher basket for storing at least one valve of toddler training cups in a dishwasher for cleaning. The dishwasher basket is assembled by a top shell and a bottom shell. The top shell and bottom shell are substantially symmetrical to each other. At one part of the peripheries, the top and bottom shells are hinged with each other. At the opposing part of the peripheries, a latching means is formed, such that the dishwasher basket can be open for loading or unloading the valves, and close to securely lodging the valves therein for cleaning in the dishwasher. The dishwasher basket is attached to a top rack of the dishwasher by a basket attachment right above the water jet source, such that cleaning effect is enhanced by the pressure generated by the water jet.Type: GrantFiled: May 1, 2002Date of Patent: July 12, 2005Assignee: Prince Lionheart, Inc.Inventors: Thomas E. McConnell, Francois Hacquard, Michael E. Henley
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Patent number: 6910488Abstract: A dishwasher basket for storing at least one valve of toddler training cups in a dishwasher for cleaning. The dishwasher basket is assembled by a top shell and a bottom shell. The dishwasher basket is attached to a top rack of the dishwasher by a basket attachment right above the water jet source, such that cleaning effect is enhanced by the pressure generated by the water jet. In another aspect, a soaking container is disclosed, suitable for soaking the dishwasher basket and its contents. The soaking container has a suction cup affixed to its bottom to thereby anchor the container to a counter top or similar surface. Also, the soaking container has a lid to prevent foreign material from falling into the soaking solution and to limit spillage of the soaking solution. The soaking container advantageously facilitates cleaning of the valves.Type: GrantFiled: September 19, 2002Date of Patent: June 28, 2005Assignee: Prince Lionheart, Inc.Inventors: Thomas E. McConnell, Francois Hacquard, Michael E. Henley
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Patent number: 6895980Abstract: A disc-shaped wheel cover, or shield, with an arm rotatable around the shield center includes a pressurized fluid container at the arm distal end filled with cleaning chemical, extending on the arm radially beyond the shield. A nozzle on the container directed axially disburses chemical toward a tire sidewall. Alternatively, the arm may comprise a grasping member on its distal end adapted to receive a commercially-available pressurized container. A wheel may also be mounted under the container to support the arm distal end a predetermined distance from the tire as the wheel rolls around the tire sidewall. The shield is removably attached to a wheel rim flange by an elastic skirt around the shield circumference at shield closed end with a skirt open end adapted to attach to the wheel. Thus, in operation the elastic skirt is stretched about the flange.Type: GrantFiled: July 16, 2002Date of Patent: May 24, 2005Inventor: Payton Rosborough
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Patent number: 6871657Abstract: An apparatus for transporting semiconductor wafers between processing steps that can also be used to support the wafers during various processing steps. The apparatus minimizes the obstruction of fluid flow in the process tank, reduces the amount of devices that will fail due to edge exclusion, and reduces processing times. In one embodiment, the apparatus is a wafer carrier comprising a wire frame having three load supporting members, the load supporting members having a plurality of wafer engaging elements adapted to support a plurality of wafers.Type: GrantFiled: January 17, 2002Date of Patent: March 29, 2005Assignee: Akrion, LLCInventors: Jim Bottos, Tom Mancuso, Ismail Kashkoush
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Publication number: 20040265594Abstract: A cleaning sheet which comprises a cleaning layer having a tensile stress at 10% strain of from 0.3 to 3,000 N/mm2 or a carrying member with a cleaning function wherein at least one side of the carrying member has a cleaning layer having a tensile stress at 10% strain of from 0.3 to 3,000 N/mm2, particularly, a cleaning sheet or a carrying member with a cleaning function of the aforementioned constructions, wherein the aforementioned cleaning layer comprises a resin layer having been hardened by an active energy source or a polymer resin having heat resistance.Type: ApplicationFiled: June 24, 2004Publication date: December 30, 2004Applicant: NITTO DENKO CORPORATIONInventors: Yoshio Terada, Eiji Toyoda, Makoto Namikawa
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Patent number: 6832618Abstract: The dining table comprises a table structure having one or more openings adapted to receive in a snug fit either a dining tray or a pair of operatively associated access covers, which in either case fill the opening. An inner one of the access covers is connected to the table structure by a hinge and an outer one of the access covers is suspended by a lever and latching arrangement. In a raised position, the covers abut each other and provide a substantially smooth dining surface. In a lower position, the covers are stored below the dining tray.Type: GrantFiled: March 3, 2003Date of Patent: December 21, 2004Inventor: Harold F. DeHart
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Publication number: 20040250843Abstract: The invention concerns an arrangement for ultrasound cleaning of several strandlike articles (4) traveling next to each other, such as, e.g., wires, profiles and pipes, by means of a liquid excited by ultrasound in a borehole (3), which is only slightly, i.e., around 5-50%, larger than the diameter of the article being cleaned, wherein the cleaning liquid is supplied to the boreholes (3) in such a way that it fills them completely.Type: ApplicationFiled: April 30, 2004Publication date: December 16, 2004Inventor: Holger Hielscher
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Publication number: 20040250841Abstract: Currently, there are no products available which allow a user to treat microbial and bacterial growth inside a HVAC condensate drain pan without first, gaining access to the drain pan by removal of the front cover of the HVAC unit. Our HVAC Enviro-Clean Condensate Drain Pan and Coil Cleaning System will accommodate the introduction of non-corrosive algaecides and/or biocides and cleaner fluids via an internal reservoir and plastic hosing system that can be easily used and maintained by the consumer. A reduction of microbial and bacterial growth will have a positive impact of Indoor Air Quality.Type: ApplicationFiled: June 10, 2003Publication date: December 16, 2004Inventors: Atwood M. Kimbrough, Carl Brian Kimbrough, Carla S. Cross
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Publication number: 20040250844Abstract: An ultrasonic cleaner includes a body section; a vibration generator mounted in the body section and having a vibration-transmitting portion formed at its front end for transmitting vibration to an object to be cleaned; and a cleaning-medium feed section for feeding a cleaning medium to the object to be cleaned. The vibration-transmitting portion is pressed against an object to be cleaned to thereby transmit vibration to the object to be cleaned, and a cleaning medium is fed to the object to be cleaned. Thus, vibration causes adhering dirt to be eluted into the cleaning medium from the object to be cleaned, thereby removing dirt from the object.Type: ApplicationFiled: November 3, 2003Publication date: December 16, 2004Applicant: KUMAZAKI AIM CORPORATIONInventor: Michio Kumazaki
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Publication number: 20040221881Abstract: A sprayer and a kit including a sprayer and accessories for use with the sprayer is disclosed. In one non-limiting embodiment, the kit may include a carrying case for the sprayer and accessories for the sprayer. The carrying case may have a number of features. Since the sprayer and accessories may be wet after use, the carrying case may have one or more openings therein that provide vents to facilitate drying of the sprayer and accessories after they are used and placed in the carrying case. The carrying case may include one or more of the following items in addition to the sprayer: a purifier for the sprayer; soap for use with the sprayer; quick-connect adaptors to facilitate connecting the sprayer to a water hose, such as a garden hose; and one or more devices for use in a washing process. If the kit is for car care, such one or more devices may include, but are not limited to: a washing implement such as a brush, a cloth, or a wash mitt.Type: ApplicationFiled: February 11, 2004Publication date: November 11, 2004Applicant: The Procter & Gamble CompanyInventors: John Allen Wooton, Kenneth Norman Kern
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Patent number: 6814932Abstract: A fluid delivery system (26) for an automated processor (A) delivers washing, microbial decontaminant, and rinse fluids to spray nozzles (102, 104, 106, 108, 110) in a chamber (12) for sequentially spraying the fluids over a lumened device (B), such as an endoscope. Sets of nozzles are operated in sequence to avoid the spray jets canceling each other out. The endoscope is supported on a rack (21) which is agitated by an activation system (330). This ensures ever changing points of contact between the device and the rack so that all external surfaces are contacted by the spray. A computer control system (80) controls cleaning, decontamination, rinsing, and drying stages of a cycle, and agitation of the rack at appropriate times, which are all carried out within the chamber, obviating the need for human contact with the device during processing.Type: GrantFiled: February 7, 2001Date of Patent: November 9, 2004Assignee: Steris Inc.Inventors: James C. Hlebovy, Alan J. Greszler, Nancy A. Robinson
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Patent number: 6814091Abstract: A dishwasher basket, having an upper compartment providing a common storage area for various types of accessories and a lower compartment particularly designed for storing baby bottle nipples. The lower compartment has two trays so structured that nipples rest therein with a specific angular orientation to achieve optimal cleaning effect. The dishwasher basket further has a spinning storage compartment insertable between the tray underneath the upper compartment. The spinning storage compartment has at least one rotor therein to rotate about the central axis thereof. The spinning storage compartment may be used to store small articles such as valves of toddler training cups. The angular orientation of the valves relative to the water jet is varied as the rotor rotates, such that the valves can be thoroughly cleaned.Type: GrantFiled: May 1, 2002Date of Patent: November 9, 2004Assignee: Prince Lionheart, Inc.Inventors: Thomas E. McConnell, Francois Hacquard, Michael E. Henley
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Publication number: 20040206377Abstract: Sound insulation core material is made by melt-blowing a polypropylene resin having a hydroxystearamide wax additive to produce a fibrous mass having improved loft. The core material is encased between outer layers of spun-bond polyethylene fibers by longitudinal seams and transverse seams to form a product suitable for use in dishwashers.Type: ApplicationFiled: April 16, 2003Publication date: October 21, 2004Applicant: Monadnock Non-wovens LLCInventors: Rowland Griffin, John P. Field
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Publication number: 20040200515Abstract: A probe pin cleaning device is generally composed of a cleaning container having a bottom-having box shape, which contains cleaning solution, a stay that is disposed on the inner bottom of this cleaning container and horizontally supports a pin board in the state where a probe pin is faced downward, an external box that has an upper opening fringe supporting the fringe of the upper opening of the above-mentioned cleaning container through a shock absorber, and an ultrasonic vibration generator.Type: ApplicationFiled: March 18, 2004Publication date: October 14, 2004Applicant: MITSUBISHI DENKI KABUSHIKI KAISHAInventors: Fumikazu Saito, Katsuhide Kubo
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Patent number: 6802908Abstract: In a procedure for cleaning floors by hand with the help of flat cleaning mops, mops provided with a certain quantity of cleaning solution are used. In this case, at least one mop is removed from a storage container (1), and saturated with solution before or during removal; the solution is applied onto the surface of the mop; the mops are stored as is after use in a holding container (2) up to their disposal for purposes of regeneration. A device for fitting and preparing a larger number of flat cleaning mops consists of a storage container, which has a removal opening (5) for removing mops, and is provided inside with a feeding device (11) for prior saturating the removed mops with cleaning solution.Type: GrantFiled: August 28, 2002Date of Patent: October 12, 2004Assignee: Amking TechnologiesInventor: Kurt Zachhuber
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Publication number: 20040182428Abstract: A Contact Lens Cleaning and Storage Device with left and right side cleaning reservoirs that, independent of each other, receives a quantity of clean solution and contact lenses, having agitating bosses, circular stops and drive system links on one quadrant, a drive system, a motor to operate the drive system, a bottom housing having holders to accommodate the cleaning reservoirs and motor, a top housing having circular cut outs to allow the top portion of the cleaning reservoirs to protrude, an on/off switch, a way to supply power to the motor, and caps for the cleaning reservoirs to prevent the cleaning solution from splashing out. A preferred embodiment includes the cleaning reservoir agitating bosses having the front side curved and the backside flat and a drive system comprising a drive arm and a drive cam.Type: ApplicationFiled: January 27, 2004Publication date: September 23, 2004Inventor: Mark Philip Chepurny
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Publication number: 20040163675Abstract: A device for use in a dishwashing machine to dispense a water-soluble glass or ceramic composition into the machine over a plurality of dishwashing cycles comprising: a) a shaped body made of the water-soluble glass or ceramic composition; and b) a container for holding said shaped body with at least part of its walls having perforations allowing a controlled circulation of the washing liquor into and out of the container.Type: ApplicationFiled: April 8, 2004Publication date: August 26, 2004Inventors: Karlheinz Hanh, Jurgen Schick, Tobias Schultheis
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Publication number: 20040163688Abstract: An improved tool for cleaning a jewelry article (e.g., ring) accurately grips and positions the article yet captures any device affixed thereto (e.g., gemstone, jewel) while exposing the tool to a jewelry cleaning liquid (e.g., pressurized steam, ultrasonic liquid, ammonia solution, etc.). For instance, a spring-handled basket tool generally used for jewelry cleaning is improved by introducing a grasping member, such as an alligator clip with resiliency treated contact edges. The clip is affixed, such as by riveting, to one of two interior rings that define the opening between the two hemispheric baskets. A jewelry article that is thus clipped may be positioned to a desired angle for inspection and cleaning without fear of an expensive gem being lost due to the cleaning process.Type: ApplicationFiled: January 8, 2004Publication date: August 26, 2004Inventor: David A. Young
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Publication number: 20040163672Abstract: A screen cleaning tool including a thin sheet of fiberous material made by a process that includes the steps forming fibers into a lacy pattern, compressing the pattern into a thin sheet, applying a curable adhesive to the fibers, and curing the adhesive and pre-moistening said thin sheet with an aqueous solution of materials selected from the group consisting of propylene glycol, polysorbate, aloe extract, 2-phenoxyethanol, methyl paraben, butyl paraben, ethyl paraben, propyl paraben, isobutyl paraben, and DL-alpha-tocopheryl acetate in order to make it available to be wiped over the surface of a screen.Type: ApplicationFiled: February 21, 2003Publication date: August 26, 2004Inventor: Mark A. Snaza
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Patent number: 6779535Abstract: A cleaning device for a paint brush comprises a hollow nozzle attached to a source of pressurized cleaning solution such as water, solvent, liquefied hot soap or alike. The distal tip of the nozzle is equipped with a poppet valve such that the body of the valve protrudes from the distal tip. The proximal section of the nozzle is adapted to be attached to a source of cleaning solution, that in the most basic configuration being a common tap water valve. When the water valve is opened, the brush is moved towards the nozzle. Upon engaging with the heel or bristles of the brush, the poppet valve moves inwards and opens the flow of water towards the center of the brush allowing washing out any remaining wet and dissolved paint. In another embodiment of the invention, the cleaning device includes a hollow handle attached to a source of pressurized cleaning solution and equipped with one or more nozzles each having a poppet valve.Type: GrantFiled: January 21, 2003Date of Patent: August 24, 2004Inventor: Henry Drukarov
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Patent number: 6776174Abstract: An apparatus for washing magnetic particles including a well plate for receiving an array tube holder having x rows of tubes, each tube containing magnetic particles, the well plate having (x+1) rows of wells for enabling the array tube holder to be shifted from a first position to a second position. The apparatus also includes ((x/2)+1) rows of magnets asymmetrically positioned within the well plate adjacent to the rows of wells. Placing the array tube holder in the first position causes magnetic fields produced by each magnet to attract the magnetic particles in the x rows of tubes to one side of each tube, and shifting the array tube holder to the second position reverses the magnetic fields, causing the magnetic particles to stream across to the other side of each tube. The array tube holder may be a 96 tube array tube holder (8 rows by 12 columns) in which case, the well plate includes 108 wells (9 rows by 12 columns) for simultaneously washing 96 tubes.Type: GrantFiled: May 10, 2002Date of Patent: August 17, 2004Inventors: Paul E. Nisson, Michael W. Schuette, Wu Bo Li
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Publication number: 20040154650Abstract: A cleaning device for a hair removing apparatus such as a dry shaver has a basin that receives a shaver head and is supplied with a cleaning liquid for cleaning the head. A single pump is utilized for supplying the liquid from a tank to the basin. The tank is hermetically sealed and is selectively open to the atmosphere by way of an air valve. The valve and the pump are actuated in a controlled manner to selectively give a supply mode for supplying the liquid to the basin from the tank and a recovery mode for recovering the liquid from the basin to the tank.Type: ApplicationFiled: January 15, 2004Publication date: August 12, 2004Inventors: Atsuhiro Saito, Jyuzaemon Iwasaki, Hiroyuki Kameoka, Yasuo Ibuki, Fumio Taniguchi, Kotaro Yanagi, Hiroshi Shigeta
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Publication number: 20040154638Abstract: A method for performing the edge clean operation on a semiconductor wafer. A laser beam is used to accurately clean the edge of the wafer. The wafer is clamped concentrically to a chuck and rotated at a selectable speed, preferably in the range of 10 rpm to 1,000 rpm. A laser beam of variable power is directed onto toward the edge of the wafer at an oblique angle through a nozzle through which an inert purge gas is simultaneously passed. The laser beam removes unwanted deposits at the edge of the wafer and the gas is used to blow away the residue and prevent slag buildup on other parts of the wafer. The process is preferably carried out in an exhausted chamber.Type: ApplicationFiled: February 7, 2003Publication date: August 12, 2004Inventors: Steven Reder, Michael J. Berman, Rennie Barber
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Publication number: 20040149323Abstract: A predicted value of acid consumption during pickling with a pickling solution in each of a third tank 11c and a final tank 11d of a continuous pickling apparatus 10 is calculated by a pickling line control unit 24, and based on the calculated predicted value, the amount of acid solution to be supplied to each of the third tank 11c and the final tank 11d is determined, and acid solution is supplied from an acid solution supply system 12. The acid concentration of the pickling solution in each of the third tank 11c and the final tank 11d to which acid solution is supplied is continuously measured by continuous acid concentration measuring devices 13c and 13d, and based on the continuously measured value of the measured acid concentration, acid solution is supplied from the pickling solution supply system 12 to the third tank 11c and the final tank 11d so that the concentration of the pickling solution in each of the third tank 11c and the final tank 11d matches a target value.Type: ApplicationFiled: October 24, 2003Publication date: August 5, 2004Inventors: Kouichi Takeuchi, Toshihiko Nonaka, Takeo Kataoka
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Patent number: 6764147Abstract: A single piece tub support and frame for a dishwasher has a unitary support member that includes a pair of laterally spaced U-shaped upright end portions and an intermediate inverted U-shaped upright portion. The intermediate portion fits over the top and sides of the dishwasher tub rearwardly adjacent the front flange portion thereof. When the U-shaped end portions clear the bottom wall of the tub, they resiliently spring inward into supporting positions under the bottom wall. The unitary support member greatly reduces the number of components required, reduces manufacturing time and cost, and maintains the tub in its designed shape.Type: GrantFiled: March 26, 2003Date of Patent: July 20, 2004Assignee: Maytag CorporationInventor: Christopher L. Flowers
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Publication number: 20040134514Abstract: A wafer cleaning method and system including a combined high frequency signal, a low frequency signal, and in one embodiment a biased voltage signal, allows cleaning particles and impurities off of fine-structured wafers, through application of an acoustic field to the wafer through a cleaning liquid which fosters micro-bubble formation for effective cleaning while buffering micro-bubble growth which would otherwise damage the wafer.Type: ApplicationFiled: January 10, 2003Publication date: July 15, 2004Inventors: Yi Wu, Cole S. Franklin, Brian Fraser, Thomas Nicolosi
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Publication number: 20040129297Abstract: A system for processing wafers is disclosed. In the invention, a tank contains a processing liquid. A movable submersion mechanism is positioned to move in and out of the tank. Wafer holders in the submersion mechanism have an unequal spacing within the submersion mechanism.Type: ApplicationFiled: January 3, 2003Publication date: July 8, 2004Inventor: Kenneth T. Settlemyer
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Publication number: 20040124230Abstract: A method and apparatus are disclosed for improving a screen printing process by applying vibrational energy to assist in the print release, cleaning, and drying processes. The vibrational energy or acoustic pressure waves may be created by a transducer where the waves are transferred to the stencil or printable material through air or a vibrational interface medium. The vibrational energy in turn assists with separating the printable material from the side walls of the apertures of the stencil. The vibrational energy can further assist in the process of cleaning the stencil. The acoustic pressure can also be used in the drying process by having the waves impinge on the water droplets to atomize the droplets on the surface of the stencil. The technology can be used for the assembly of Printed Circuit Assemblies, Ball Grid Array IC Packages, Flip Chip, etc.Type: ApplicationFiled: December 16, 2003Publication date: July 1, 2004Inventors: Allen David Hertz, Eric Lee Hertz, Dennis D. Epp
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Publication number: 20040118436Abstract: A plasma etching chamber is cleaned with a supply of pressurized nitrogen or argon that is electrically heated. The cleaning cycle is performed during the idle time following an etching cycle. Electrically heated cleaning gas flows into the etching chamber for a predetermined period during which the etching chamber rises. Flow of heated cleaning gas is then stopped, and the etching chamber is evacuated by existing equipment. The cycle can be started automatically using a pressure signal from a conventional purging gas line or from a signal at a SECS/GEM port.Type: ApplicationFiled: December 21, 2002Publication date: June 24, 2004Inventor: James M. Joyce
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Patent number: 6752161Abstract: The motion wheel washer automatically washes the front wheels of a vehicle while the wheel is in motion. In one embodiment, the position of the front wheels and the vehicle speed is sensed. When the wheels are turned to the right or left at low speed, a nozzle residing inside the lip of the fender, in front of the wheel, directs a spray of a washing fluid against the outer surface of the wheel. When the wheels are turned the opposite direction, a spray is directed against the outer surface of the opposite wheel. In a second embodiment, a telescoping arm residing within the wheel well above the wheel, deploys to position a nozzle to spray the washing fluid against either wheel.Type: GrantFiled: May 7, 2002Date of Patent: June 22, 2004Inventor: Frederic Martin Hernandez
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Publication number: 20040112402Abstract: A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.Type: ApplicationFiled: December 13, 2002Publication date: June 17, 2004Inventors: John P. Simons, Kenneth J. McCullough, Wayne M. Moreau, John M. Cotte, Keith R. Pope, Charles J. Taft, Dario Goldfarb
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Publication number: 20040112409Abstract: A method and system for removing a residue from a substrate material is disclosed. The method and system utilize a supercritical cleaning solution with an fluoride source to control the concentration of fluoride ions and/or hydrogen fluoride within the supercritical cleaning solution. Preferably, the method and the system utilize a supercritical cleaning solution with supercritical CO2 and an ammonium fluoride salt and/or an organo-ammonium fluoride and/or amine adduct. The supercritical cleaning solution, in accordance with further embodiments, includes one or more acids and one or more carrier solvents. The supercritical cleaning solution of the present invention is capable of removing a residue, such a post-etch photo polymer residue from a semiconductor substrate material by dissolution of the reside, etching a portion of the residue, etching a portion of the substrate material or any combination thereof.Type: ApplicationFiled: December 16, 2002Publication date: June 17, 2004Applicant: Supercritical Sysems, Inc.Inventor: Paul E. Schilling
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Publication number: 20040112406Abstract: A method and apparatus are provided for removing solid and/or liquid residues from electronic components such as semiconductor wafers utilizing liquid or supercritical carbon dioxide which is solidified on the surface of the wafer and then vaporized and removed from the system. In a preferred embodiment the solidification and vaporizing steps are repeated (cycled) before removal of the CO2 from the vessel. The residues are carried away with the vaporized carbon dioxide.Type: ApplicationFiled: December 16, 2002Publication date: June 17, 2004Applicant: International Business Machines CorporationInventors: John M. Cotte, Catherine Ivers, Kenneth J. McCullough, Wayne M. Moreau, Robert J. Purtell, John P. Simons, William A. Syverson, Charles J. Taft
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Publication number: 20040112405Abstract: A stripping solution is supplied onto the surface of a substrate and an alternating magnetic flux is applied to the substrate. The alternating magnetic flux induces a current in a conductive pattern of the substrate which heats the conductive pattern while the stripping solution is in contact with the substrate. The stripping solution, containing particles to be cleaned off the substrate, is then removed from the substrate.Type: ApplicationFiled: December 17, 2002Publication date: June 17, 2004Inventors: Kwang-wook Lee, In-Seak Hwang
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Publication number: 20040103916Abstract: In a method and apparatus for cleaning the front surface of a mounted lens a web is moved to a lowered position against the lens. A first segment of the web is then slackened. The first segment of web is then rubbed against the lens. Following the rubbing the web is pulled taut while the web is still in the lowered position. A second segment of web can be wiped against the lens while the web is held taut. The first segment can be wet and the second segment dry.Type: ApplicationFiled: December 3, 2002Publication date: June 3, 2004Applicant: Eastman Kodak CompanyInventors: Michael D. Davis, Mark S. Carducci, Stephen P. North
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Publication number: 20040103917Abstract: A lithographic mask is placed in a chamber which is then sealed. The gas pressure in the chamber is reduced to dislodge contaminant particles on the mask surface.Type: ApplicationFiled: September 10, 2003Publication date: June 3, 2004Applicant: ASMIL NETHERLANDS B.V.Inventor: Gert-Jan Heerens
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Patent number: 6742532Abstract: A cleaning container and method for using the same for chemically cleaning elongated members including quartz thermocouple sleeves including a first body member and a second body member said first body member and second body member respectively forming a first containing space and a second containing space including a first means for reversibly compressively sealing the first body member and the second body member to a form a combined containing space for sealably holding a cleaning solution level; a cap member disposed at a distal end of the first body member said cap member including a second means for reversibly compressively sealing a first opening in communication with the first containing space; and, a second opening centrally disposed in a distal end of the second containing space said second opening including a third means for reversibly compressively sealing around at least one elongated member penetrating through said second opening.Type: GrantFiled: January 9, 2002Date of Patent: June 1, 2004Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yung-Pin Lin, Chung-Ray Chen, Chen-Mei Fan, Chan-Chung Shu
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Publication number: 20040094183Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.Type: ApplicationFiled: November 18, 2002Publication date: May 20, 2004Applicants: Recif, Societe Anonyme, TechsonicInventors: Gil Ching, Vincent Perrut, Vincent Ruch, Gilles Fresquet
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Publication number: 20040089331Abstract: A rinsing lid for a wet bench cleaning chamber used in the rinsing of acids, chemicals and/or particles from semiconductor wafers. The rinsing lid includes a lid housing having an upper water reservoir for receiving a stream of deionized water or other cleaning liquid. A water distribution plate is provided in the lid housing beneath the water reservoir. Small water openings extend through the water distribution plate at the water inlet end, and large water openings extend through the water distribution plate at the opposite end, of the lid housing. A nozzle plate provides multiple nozzle openings in the lid housing beneath the water distribution plate. The large water openings at the end of the lid housing opposite the water inlet end compensate for diminishing water pressure along the length of the lid housing, providing water sprays of uniform force and volume.Type: ApplicationFiled: November 13, 2002Publication date: May 13, 2004Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Chia-Lin Yeh
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Patent number: 6722378Abstract: A retainer for supporting gun parts in an ultrasonic bath is provided with a plurality of supports that retain such gun parts in positions whereby cleaning of such parts by ultrasonic means is optimized. The retainer supports are specifically configured to maximize the removal of dirt and debris from gun parts, and certain supports are adjustable to accommodate a variety of gun makes and models. The retainer is also constructed to prevent direct contact between gun parts, which might otherwise result in unnecessary wearing at such contact locations.Type: GrantFiled: August 8, 2002Date of Patent: April 20, 2004Assignee: Coltene/Whaledent, Inc.Inventors: Eric Heiberg, Jerry Sullivan
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Publication number: 20040069321Abstract: A method and a device for producing an adhesive surface on a substrate which can be bonded to another substrate. In an implementation, the technique includes treating the surface of the substrate by wet chemical etching to remove an oxide layer and to provide a hydrophobic surface, and exposing the etched hydrophobic surface to a gaseous ozone atmosphere to provide a dry hydrophilic surface. A device for producing an adhesive surface on a substrate according to an implementation includes a bath with an etchant for removing an oxide layer from the surface of the substrate and to produce a hydrophobic surface, and a container having an inner volume that surrounds the bath. The inner volume also includes a gaseous ozone atmosphere to produce a dry hydrophilic surface.Type: ApplicationFiled: September 16, 2003Publication date: April 15, 2004Inventors: Christophe Maleville, Corinne Maunand-Tussot
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Patent number: 6718993Abstract: A household dishwasher that includes a drain pan designed to relocate leaking fluids to an observable location. The dishwasher is a standard dishwasher with a drain pan for collecting water that unintentionally falls from the interior of the dishwasher. The drain pan is angled for diverting the collected water to a predetermined location exterior to the household dishwasher where an occupant of the household may view the water.Type: GrantFiled: October 4, 2002Date of Patent: April 13, 2004Inventor: Karen L. DeMartini
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Publication number: 20040065343Abstract: The apparatus includes a sponge capable of having a fluid therein. The sponge has a first surface that can be placed in contact with the coating. High and low frequency transducers are positioned in contact with the second surface of the sponge. A method performing the invention includes the steps of providing a sponge having a first surface for contact with the substrate, providing ultrasonic transducers in contact with a second surface of the sponge opposite from the first surface, saturating the sponge with water to provide a path of water extending from the transducers to the substrate, and activating the transducers to generate (i) a low frequency acoustic field; and (ii) a high frequency acoustic field; and thereby (iii) micron-sized vapor or cavitation bubbles which impinge upon the paint on the substrate to remove the paint from the substrate.Type: ApplicationFiled: October 8, 2002Publication date: April 8, 2004Inventors: Anthony A. Ruffa, Sameer I. Madanshetty
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Publication number: 20040065347Abstract: A method and apparatus for connecting an engine flushing system for flushing the lubrication system of an engine having a detachable engine lubricant filter, with the detachable lubricant filter having an engine lubricant outlet portion and an engine lubricant inlet portion contained within a casing of the detachable engine lubricant filter is disclosed, which may comprise at least one flushing system connection unit adapted to connect the flushing system to at least one of the engine lubricant inlet portion and engine lubricant outlet portion of the detachable lubricant filter through the casing of the detachable engine lubricant filter.Type: ApplicationFiled: October 8, 2002Publication date: April 8, 2004Inventor: Adam A. Awad