Abstract: Microfluidic devices provide substances to a mass spectrometer. The microfluidic devices include first and second surfaces, at least one microchannel formed by the surfaces, and an outlet at an edge of the surfaces which is recessed back from an adjacent portion of the edge. Hydrophilic surfaces and/or hydrophobic surfaces guide substances out of the outlet. A source of electrical potential can help move substances through the microchannel, separate substances and/or provide electrospray ionization.

Abstract: An apparatus for simultaneously aligning and interconnecting microfluidic ports is presented. Such interconnections are required to utilize microfluidic devices fabricated in Micro-Electromechanical-Systems (MEMS) technologies, that have multiple fluidic access ports (e.g. 100 micron diameter) within a small footprint, (e.g. 3 mm×6 mm). Fanout of the small ports of a microfluidic device to a larger diameter (e.g. 500 microns) facilitates packaging and interconnection of the microfluidic device to printed wiring boards, electronics packages, fluidic manifolds etc.

Abstract: Microfluidic devices having a plurality of functional features for performing one or more fluidic operations in parallel are provided. Reagents, samples or other fluids common to multiple functional features (“common fluids”) may be input into a microfluidic device or system through one or more distributing inputs that divide and distribute the common fluids as desired. The use of a multi-layer fabrication technique allows multiple distributing inputs to distribute to multiple functional features in a microfluidic device without undesirable fluid channel intersections.

Abstract: A fluidic oscillator is disclosed, wherein the fluidic oscillator includes a fluid source and a housing coupled to the fluid source. At least one recess is formed within the housing. An insert resides within each at least one recess; the insert provides at least one substantially flat surface. A fluid flowpath in the at least one substantially flat surface generates fluid pulses from fluid received from the fluid source.

Abstract: The present invention provides microfabricated fluidic systems and methods. Microfabricated fluidic devices of the present invention include switches that can be opened and closed to allow or block the flow of fluid through a channel in response to the pressure level in a gate of the switch. The microfabricated fluidic switches may be coupled together to perform logic functions and Boolean algebra, such as inverters, AND gates, NAND, gates, NOR gates, and OR gates. The logic gates may be coupled together to form flip-flops that latch signals. The present invention also includes microfabricated fluidic pressure multipliers that increase the pressure in a second chamber relative to a first chamber. Microfabricated fluidic devices of the present invention also include pressure sources. A pressure source of the present includes a pump coupled to a reservoir through unidirectional valves. The pressure source may be high pressure source or a low pressure source.

Abstract: Methods of molding fluidic oscillator device having at least a power nozzle for projecting a jet of liquid into an interaction region with an upstream end, opposing side walls, opposing top and bottom walls, and a pair of control ports at the upstream end. The side walls diverge from the power nozzle. A mold cavity is provided in which the power nozzle, interaction region (IR) and control ports can be molded as a core without any seam lines. For a crossover type IR in which the upstream ends diverge and the downstream ends converge to a common throat area and coupled to an outlet aperture, a further mold cavity is provided in which the converging portion of the crossover type interaction region is formed as a second core having a joinder line to the first the core which is transverse to the direction of liquid flow in the fluidic.

Abstract: An air-distribution system comprises a fluid device that enables deviation of a flow of air that traverses a main duct (6S; 6D) into a first secondary duct (7S, 7C) and a second secondary duct (7C, 7D), exploiting the Coanda effect. The system may be applied in vehicles in general, in particular motor vehicles, or for example in residential, commercial and industrial buildings.

Abstract: Microfluidic devices capable of efficiently mixing two or more fluid are provided. Two or more microfluidic inlet channels defined in different sheets of material meet at an overlap region in fluid communication with an outlet channel. The channels are defined through the entire thickness of stencil sheets. The overlap region may include an aperture-defining spacer layer, and/or an impedance element, such as a porous membrane, adapted to distribute at least one fluid across the entire width of the outlet channel to promote reliable fluid mixing.

Abstract: Provided is a micro fluidic device that can control a flow time of micro fluid by using a capillary phenomenon. The micro fluidic device includes: a flow channel for flowing fluid, the flow channel being formed between a top substrate and a bottom substrate or between a top substrate, a bottom substrate, and a middle substrate; a flow blocking surface for stopping a flow of the fluid in the flow channel temporarily; and a hump for delaying the flow formed in the line of continuity with the flow blocking surface. The micro fluidic device of the present research can control the flow time in a simple manner.

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Abstract: An inlet system for an inlet in a flow field includes an inlet recess housing having an interior with forward and rear end walls, a base wall, and an opening formed in an upper surface thereof. An intake duct is formed in a rear end wall of the inlet recess. An inlet door has a first end pivotally connected to a forward wall and a trailing edge directed to the rear end wall of the inlet housing such that the inlet door selectively closes the opening of the inlet housing. An overlap member can extend from the rear end wall of the inlet recess to a predetermined distance adjacent a trailing edge of the door. A deflector is provided having an end deflecting portion in contact with the trailing edge of the door over at least a portion of the inlet door's pivoting path. Side deflecting portions project from the end deflecting portion toward the front wall of the inlet housing.

Abstract: Robust microfluidic mixing devices mix multiple fluid streams passively, without the use of moving parts. In one embodiment, these devices contain microfluidic channels that are formed in various layers of a three-dimensional structure. Mixing may be accomplished with various manipulations of fluid flow paths and/or contacts between fluid streams. In various embodiments, structures such as channel overlaps, slits, converging/diverging regions, turns, and/or apertures may be designed into a mixing device. Mixing devices may be rapidly constructed and prototyped using a stencil construction method in which channels are cut through the entire thickness of a material layer, although other construction methods including surface micromachining techniques may be used.

Abstract: Microfluidic devices with multiple fluid process regions for subjecting similar samples to different process conditions in parallel are provided. One or more common fluid inputs may be provided to minimize the number of external fluid supply components. Solid materials such as chromatographic separation media or catalyst media is preferably provided in each fluid process region. Solid materials may be supplied to the devices in the form of slurry, with particles retained by porous elements or frits. Different fluid process regions may having different effective lengths, different solid material types or amounts, or may receive different ratios of common fluids supplied to the device. The flow resistances of dissimilar fluid process regions may be balanced passively with the addition of impedance elements in series with each fluid process region.

Abstract: A micro channel unit having a shape designed to reduce a pressure drop when fluid passes through a connecting channel portion is provided. The micro channel unit includes a micro channel with a width of micrometer dimensions through which liquid flows. The micro channel includes a plurality of straight channel portions and connecting channel portions that connect each pair of adjacent straight channel portions. The connecting channel portions are wider than the straight channel portions connected by the connecting channel portions. The use of the micro channel unit can reduce the pressure drop when fluid passes through the connecting channel portions, thereby reducing the amount of power required to drive the fluid flow and further enabling miniaturization of microfluidic devices such as pumps and peripheral devices.

Abstract: The present invention provides multi-layer microfluidic systems, by providing additional substrate layers, e.g., third, fourth, fifth and more substrate layers, mated with the typically described first and second layers. Microfabricated elements, e.g., grooves, wells and the like, are manufactured into the surfaces between the various substrate layers. These microfabricated elements define the various microfluidic aspects or structures of the overall device, e.g., channels, chambers and the like. In preferred aspects, a separate microscale channel network is provided between each of the substrate layers.

Abstract: A method for fabricating a microfluidic device where first and second substantially flat platens are provided. Multiple substantially planar, substantially metal-free, adhesiveless polymer device layers, the device layers including a first cover layer, second cover layer, and at least one stencil layer defining a microfluidic channel penetrating through the entire thickness of the stencil layer also are provided. Each stencil layer is disposed between other device layers such that the channel is bounded laterally by a stencil layer, and bounded from above and below by surrounding device layers to define an upper channel surface and a lower channel surface. The device layers are stacked between the first platen and the second platen. The stacked device layers are controllably heated according to a heating profile adapted to form a substantially sealed adhesiveless microfluidic device wherein each upper channel surface remains distinct from its corresponding lower channel surface.

Abstract: A splitter for multi-layer microfluidic devices is provided. The splitter includes multiple forked channels defined in two or more device layers. The forked channels communicate fluidically at overlap regions. The overlap regions, in combination with symmetrical channel geometries balance the fluidic impedance in the system and promote even splitting.

Abstract: This specification disclosed a partially closed microfluidic system and a fluid driving method. The microfluidic system is comprised of a substrate with microfluidic elements and a thin film. A feature of this structure is that the thin film is elastic and deformable. It has a single opening corresponding to a vent hole on the substrate, thus forming a partially closed microfluidic system. The substrate is designed to have several positions for micro fluid elements and deformable chambers and uses micro channels to form a complete network. Since the thin film is elastic and deformable, one is able to impose a pressure on the thin film above the deformable chambers in this partially closed microfluidic system to drive the fluid into motion. Once the pressure is released, the fluid flows back to its original configuration.

Abstract: The present invention relates to fluidic systems, including switches for fluidic systems. The switches of the present invention may be particularly applicable to microfluidic systems. The switches of the invention may include a switching region having more than one position corresponding to more than one aspect ratio. Alternatively, the switches of the invention may include multiple inlets and a system for the selective supply of carrier fluid. The present invention also relates to a method of controlling a fluid in a microfluidic system and may be performed using the switches of the present invention.

Abstract: These and other objects of the present invention are achieved by provision of a flow through ultrasonic system for facilitating the flow of flow-resistant materials. The system includes a supply of material and an ultrasonic horn having at least one passage extending therethrough. An isolating tube which is compatible with the material is provided passing through the at least one passage in the ultrasonic horn, the isolating tube in communication the supply of material and completely isolating the ultrasonic horn from the material. A converter imparts ultrasonic energy to the ultrasonic horn, and in turn to the isolating tube so as to inhibit the material from attaching to and clogging the isolating tube.

Abstract: A mixing apparatus is used to effect mixing between one or more fluid streams. The mixing apparatus generally functions by creating a transverse flow component in the fluid flowing within a channel without the use of moving mixing elements. The transverse or helical flow component of the flowing fluid or fluids can be created by weak modulations of the shape of the walls of the channel. Transverse or helical flow component can be created by grooves features defined on the channel wall. Specifically, the present invention can be used in laminarly flowing fluids. The mixing apparatus and methods thereof can effect mixing of a fluid or fluids flowing with a Reynolds number of less than about 100. Thus, the present invention can be used to mix a fluid flowing in the micro-regime. The mixing apparatus can be used to mix a fluid in a microfluidic system to significantly reduce the Taylor dispersion along the principal direction.

Abstract: Disclosed herewith is an extracting structure for incorporating a substance contained in a first liquid into a second liquid. The extracting structure comprises: a channel for allowing the first liquid and the second liquid to flow therein in a form of a layered flow in which first laminar flows of the first liquid and second laminar flows of the second liquid alternately come in contact with each other, wherein the substance in the first laminar flow of the first liquid moves to the second laminar flow of the second liquid through the boundaries between the first laminar flows and the second laminar flows; and a separating section, connected to a lower stream side of the channel, for separating the second liquid from the first liquid. Further, disclosed also herewith is a separating structure for separating a second liquid from the mixture of a first liquid and the second liquid.

Abstract: A modular microfluidic system includes a plurality of discrete microfluidic modules each capable of performing at least one operation and at least one microfluidic coupling device for fluidically coupling the modules to perform a sequence of operations. The microfluidic modules and coupling devices may be constructed according to various techniques. In one embodiment, coupling devices are fabricated from multiple layers and each include a fluidic inlet port, a fluidic outlet port, and at least one sandwiched stencil layer having a microfluidic channel formed therein. Also described are integrated microfluidic systems and methods capable of performing various sequences of operations.

Abstract: Provided is a micro fluidic device that can control a flow time of micro fluid by using a capillary phenomenon. The micro fluidic device includes: a flow channel for flowing fluid, the flow channel being formed between a top substrate and a bottom substrate or between a top substrate, a bottom substrate, and a middle substrate; a flow blocking surface for stopping a flow of the fluid in the flow channel temporarily; and a hump for delaying the flow formed in the line of continuity with the flow blocking surface. The micro fluidic device of the present research can control the flow time in a simple manner.

Abstract: Multi-layer microfluidic devices incorporating a filter element are provided. A filter element is compressively restrained between device layers, such that the compression promotes a tight seal between device layers and resists fluid leakage around the filter element.

Abstract: A microfluidic device having durable ultraphobic fluid contact surfaces in the fluid flow channels of the device. The ultraphobic surface generally includes a substrate portion with a multiplicity of projecting regularly shaped microscale or nanoscale asperities disposed in a regular array so that the surface has a predetermined contact line density equal to or greater than a critical contact line density, and so that the ratio of the cross-sectional dimension of the asperities to the spacing dimension of the asperities is less than or equal to 0.1.

Abstract: The present invention relates to microfluidic devices and to their method of manufacture. The microfluidic devices are original by their specific structure (of sandwich type) and by the materials from which they are made (mainly glasses, glass ceramics, ceramics), and also by their specific method of manufacture, which is based on a vacuum-forming operation. The microfluidic device includes a first assembly including a microstructure and a first substrate, wherein the microstructure is constructed and arranged on the substrate under vacuum. A second assembly includes a second substrate positioned on the microstructure after the first assembly is presintered and adhered thereto by heat treatment to form a one-piece microstructure defining at least one recess between the first and second substrates.

Abstract: Microfluidic apparatus including integrated porous substrate/sensors that may be used for detecting targeted biological and chemical molecules and compounds. In one aspect, upper and lower microfluidic channels are defined in respective halves of a substrate, which are sandwiched around a porous membrane upon assembly. In another aspect, the upper and lower channels are formed such that a portion of the lower channel passes beneath a portion of the upper channel to form a cross-channel area, wherein the membrane is disposed between the two channels. In various embodiments, one or more porous membranes are disposed proximate to corresponding cross-channel areas defined by one or more upper and lower channels. The porous membrane may also have sensing characteristics, such that it produces a change in an optical and/or electronic characteristic.

Abstract: A fluidic oscillator capable of generating free fluid jets having distinctive, controllable and industrially/commercially useful flow patterns has a switching chamber having an inlet port that allows a pressurized fluid to enter and flow through the oscillator, an exhaust passage having a sidewall that forms one boundary wall of the switching chamber, a container passage having a sidewall that forms the second boundary wall of the switching chamber, a compliance member connected to the distal end of the container passage, and an expansion chamber connected to the distal end of the exhaust passage, with the expansion chamber having an exhaust orifice that allows fluid to flow from the oscillator. In operation, such an oscillator yields a contained fluid jet that issues from the inlet port into the swishing chamber and alternately switches its flow direction between the container and exhaust passages.

Abstract: The present invention provides microfabricated fluidic systems and methods. Microfabricated fluidic devices of the present invention include switches that can be opened and closed to allow or block the flow of fluid through a channel in response to the pressure level in a gate of the switch. The microfabricated fluidic switches may be coupled together to perform logic functions and Boolean algebra, such as inverters, AND gates, NAND, gates, NOR gates, and OR gates. The logic gates may be coupled together to form flip-flops that latch signals. The present invention also includes microfabricated fluidic pressure multipliers that increase the pressure in a second chamber relative to a first chamber. Microfabricated fluidic devices of the present invention also include pressure sources. A pressure source of the present includes a pump coupled to a reservoir through unidirectional valves. The pressure source may be high pressure source or a low pressure source.

Abstract: Microfluidic devices are provided for the performance of chemical and biochemical analyzes, syntheses and detection. The devices of the invention combine precise fluidic control systems with microfabricated polymeric substrates to provide accurate, low cost miniaturized analytical devices that have broad applications in the fields of chemistry, biochemistry, biotechnology, molecular biology and numerous other fields.

Abstract: The present invention relates to microfluidic devices and to their method of manufacture. The microfluidic devices are original by their specific structure (of sandwich type) and by the materials from which they are made (mainly glasses, glass ceramics, ceramics), and also by their specific method of manufacture, which is based on a vacuum-forming operation. The microfluidic device includes a first assembly including a microstructure and a first substrate, wherein the microstructure is constructed and arranged on the substrate under vacuum. A second assembly includes a second substrate positioned on the microstructure after the first assembly is presintered and adhered thereto by heat treatment to form a one-piece microstructure defining at least one recess between the first and second substrates.

Abstract: A uniform fluid distribution system (2) for use with a liquid transfer system (100) for maintaining an interface between liquid phases within a large scale separator system including a cell into which liquid may be introduced as discrete phases at an inlet zone occupying a first approximately transverse cross-sectional region of said cell and outputted at an outlet zone occupying a second approximately transverse cross-sectional region of said cell. Said distribution system comprises at least one liquid inlet (24) and at least two distribution outlets (32), which are connected by an internal flow connection system (36).

Abstract: Microfluidic systems and devices having integrated fluidic impedances are provided. Such impedances hinder the passage of fluid at low differential pressures, but allow fluid flow at higher differential pressures. Impedances are formed at the overlap of two or more microfluidic channels contained in different layers of a device. Such devices can be rapidly prototyped and can be assembled to contain multiple fluidic impedances to perform complex fluid handling tasks, including the metering of small aliquots from a larger fluid volume. Various means may be used to overcome the fluidic impedances.

Abstract: Microfluidic devices having porous materials that restrict fluid flow rate for a given pressure are provided. Multiple porous regions can be constructed in a single device so that they have different valving capabilities or impedances, and in unison can control the overall direction of fluid flow. Porous regions can be constructed in various ways, such as, for example: by inserting porous materials into or between channels; by sandwiching one or more sheets or layers of porous materials between other layers of a device; or by inserting a liquid, solution, slurry, or suspension into a microfluidic channel and then permitting the formation of porous deposits by promoting at least partial evaporation. Adhesive tape may be used for one or more layers of such a microfluidic device.

Abstract: In a chemical reactor, a gas and a liquid which are in trace volumes are used to produce air bubbles and thus increase the interface area between the gas and liquid, substantially enhancing the efficiency of reaction between the gas and liquid. The chemical reactor comprises the following: a sheath flow forming block which forms a plurality of alternating sheath flows with two mutually unmixable fluids; a plurality of inlet ports through which said two fluids flow into the sheath flow forming block; a contraction zone which simultaneously contracts a plurality of sheath flows formed in the sheath flow forming block; and reaction flow channels each of which is connected with said contraction zone and is smaller in width than the sheath flow forming block.

Abstract: Microfluidic devices and methods for performing a microfluidic process are presented. A microfluidic device conforms with a standard well plate format. The device includes a well plate comprising a plate and an array of wells formed on or in the plate, and a microfluidic structure connecting at least two of the wells. The device can rely exclusively on gravitational and capillary forces that exist in channels within the microfluidic structure when receiving fluid streams. Also disclosed is a microfluidic device having an array of microfluidic structures, each connecting at least two wells of a well plate, and connecting three or more wells in alternative embodiments. With the present invention, a large number of microfluidic processes or reactions can be performed simultaneously.

Abstract: A microfluidic reactor for performing chemical and biological synthesis reactions, including chemical and biological syntheses of organic, polymer, inorganic, oligonucleotide, peptide, protein, bacteria, and enzymatic products is provided. Two fluids are input into the device, mixed in a mixing region and provided to a long, composite reaction channel. Fluids flowing through the reaction channel may be diverted at a diversion region into a sample channel. Fluids in the sample channel may be mixed at a second region, with additional reagents.

Abstract: Disclosed is a micro flowguide device comprising: a micro channel comprising at least one bubble trap to retard bubbles positioned in said bubble trap; an electrolytic bubble generating device to generate bubbles in said fluid by an electrolytic reaction; and a pressure source to supply a suited pressure to said fluid to pass through said micro channel; wherein said electrolytic bubble generating device causes bubbles to be generated at areas adjacent to said at least one bubble trap. Electrolytic bubbles are generated through a, localized electrolytic reaction enabled by the exposure of a set of DC-source-connected electrodes inside a conduit branch. Accumulated bubbles will be trapped and kept at several traps of the invented flowguide. When the backward pressure of trapped bubbles is rising to the level of forward pressure head, flow speed reduces to zero and channel branch is shut down.

Abstract: The present invention provides a matrix comprising an array of nanostructures that exhibit a variation (gradient) in physical properties (such as size or pitch) in at least one direction of the plane containing said array. A method for forming an array having a gradient property is also provided. In addition, a separation method is provided comprising the steps of: providing a matrix comprising an array of nanostructures arranged so that the array has the property of a gradient; and conducting at least one biomolecule separation process to separate biomolecules in a composition containing a plurality of biomolecules using the matrix.

Abstract: A fluidic valve (125, 300, 500, 900, 1000, 1100, 1200, 1300) switches a state of flow of a fluid in a fluid communication channel of a fluid guiding structure (505). Heating a bi-phase valve element (515, 1065, 1215) causes a change a state of the bi-phase valve element from a high viscosity state to a low viscosity state. A bi-phase valve element that clogs the fluid communication channel can be pushed into an expanded portion (135, 320, 520, 915, 1220) of the fluid communication channel by an application of pressure to the fluid while the bi-phase valve element is in the low viscosity state, unclogging the fluid communication channel. A bi-phase valve element can be pushed from a valve element source chamber (550, 1250) into the fluid communication channel by using a pumped fluid entering the source chamber at a pump inlet (551) while the bi-phase valve element is in the low viscosity state, clogging the fluid communication channel.

Abstract: Microfluidic separators for separating multiphase fluids are described. Two or more microfluidic outlet channels within the device meet at an overlap region. The overlap region may be in fluid communication with an inlet channel. The inlet channel and each outlet channel are disposed within different layers of a three-dimensional device. Each channel is defined through the entire thickness of a stencil layer. A multiphase fluid flows through an inlet channel into an overlap region from where the separated phases can be withdrawn through the outlet channels.

Abstract: The present invention provides multi-layer microfluidic systems, by providing additional substrate layers, e.g., third, fourth, fifth and more substrate layers, mated with the typically described first and second layers. Microfabricated elements, e.g., grooves, wells and the like, are manufactured into the surfaces between the various substrate layers. These microfabricated elements define the various microfluidic aspects or structures of the overall device, e.g., channels, chambers and the like. In preferred aspects, a separate microscale channel network is provided between each of the substrate layers.

Abstract: The present invention provides, in certain embodiments, improved microfluidic systems and methods for fabricating improved microfluidic systems, which contain one or more levels of microfluidic channels. The inventive methods can provide a convenient route to topologically complex and improved microfluidic systems. The microfluidic systems provided according to the invention can include three-dimensionally arrayed networks of fluid flow paths therein including channels that cross over or under other channels of the network without physical intersection at the points of cross over. The microfluidic networks of the invention can be fabricated via replica molding processes, also provided by the invention, utilizing mold masters including surfaces having topological features formed by photolithography.

Abstract: A capillary pump is provided for producing pressurized vapor emissions, having various layers that assist in creating optimal conditions to accomplish a high maximum fluid flow rate and pressurization. Heat and liquid/vapor flows in opposing directions in pathways within the layers. The pump includes a vaporization layer having small-sized pores and with a thickness and area to reduce viscous drag of flowing liquid and vapor. An ejection layer is also included having one or more openings and an integrated heat transfer portion for conveying heat and providing a low fluidic drag area. The pump may include an insulation layer to shield the liquid in a supply area from heat and/or a preheat layer to raise the temperature of the liquid prior to the liquid entering the vaporization layer. A coating at least partially surrounds the outer surfaces of the pump to allow vapor pressure to increase.

Abstract: The present invention relates to microfluidic devices and to their method of manufacture. The microfluidic devices are original by their specific structure (of sandwich type) and by the materials from which they are made (mainly glasses, glass ceramics, ceramics), and also by their specific method of manufacture, which is based on a vacuum-forming operation. The microfluidic device includes a first assembly including a microstructure and a first substrate, wherein the microstructure is constructed and arranged on the substrate under vacuum. A second assembly includes a second substrate positioned on the microstructure after the first assembly is presintered and adhered thereto by heat treatment to form a one-piece microstructure defining at least one recess between the first and second substrates.

Abstract: A method of controlling fluid flow in a channel in a microfluidic flow control device by introducing fluid to the channel, with the fluid flowing in a flow direction and controllably deforming material defining the channel in a direction perpendicular to the flow direction to control fluid flow in the channel. The channel is formed between a first plate and a second plate and controllably deforming material defining the channel comprises deforming at least one of the first and second plates. Material defining the channel extends continuously between an inlet port and an outlet port. Controllably deforming material defining the channel preferably comprises deforming the first plate into contact with a seat formed in the second plate to close the channel. The seat may be formed by a ridge having a smoothly changing profile in section across the channel. The method may be operated to generate a pumping, filtering, trapping or mixing function. Apparatus for carrying out the method is also disclosed.

Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material to etch a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10 nm can be fabricated in silicon with precision of 5 nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10 nm and 1000 nm in depth. The method is applied to create a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.

Abstract: Multilevel microfluidic structures and their use are provided for performing operations using electrokinetic or pneumatic force for moving sample components through and between levels. The devices have flow systems comprising microstructures including reservoirs, channels and vias, where each of the levels or lamina has a plurality of microstructures, and where the microstructures may communicate between levels.

Abstract: The present invention is a flow control actuator capable of exciting a fluid via the coupling of edge tones generated along a wedge and resonance generated within a cavity. The invention consists of a resonance cavity and ejector port separated by a wedge with fluid flow provided by a pressurized cavity and directed through a throat over the wedge. Several actuators may be arranged independently or in a coupled arrangement to generate a pulsed fluid field of desired shape.