Abstract: A handheld blower has a body including a combustion engine and a blower section driven by the combustion engine, and a handle coupled to the body. The blower section has an air outlet directed forward with respect to an operator. The handle has a grip portion extending in a front-back direction with respect to the operator, a front arm extending from a front portion of the grip portion to the body, and a rear arm extending from a rear portion of the grip portion to the body. The front arm and the rear arm are more flexible in the front-back direction than in directions perpendicular to the front-back direction.

Abstract: There are provided a wafer holder cleaning apparatus and a film deposition system including the same, the wafer holder cleaning apparatus including a housing part including an entrance into and out of which a wafer holder is carried, a door part selectively opening and closing the entrance, a support part provided within the housing part and having the wafer holder disposed thereon, the wafer holder being carried into the housing part through the entrance, and a cleaning part cleaning a surface of the wafer holder.

Abstract: The gas-powered dual-hosed blower features two discharge tubes that are each outfitted with a valve that provides for independent adjustment of air speed therefrom. The two discharge tubes have full flexibility, which is associated with backpack blowers so that an end user may direct the air flow in a multitude of directions while simultaneously enabling the end user to adjust the air speed of each discharge tube independently. The valves for each discharge tube are positioned adjacent the blower, and are manipulated by a control stick located on the respective discharge tube. One of the control sticks includes a throttle, which enables adjustment of the engine speed therefrom.

Abstract: Disclosed is an air knife chamber constructed such that water flowing down along a partition wall is allowed to fall in front of a slit. Due to this construction, the water can be effectively removed by air knives, thus contributing to a reduction in the defective proportion of substrates.

Abstract: An apparatus for cleaning a surface, such as the surface of a rotating disk, the apparatus comprising an articulating arm associated via a linkage to a rotating member driven by a motor. Rotation of the rotating member causes linkage to move the articulating arm in an oscillating pattern. A nozzle associated with the distal end of the articulating arm can convey pressurized air or liquid from a source to a surface in an oscillating pattern based on the construction of the arm, linkage, the rotating member and the speed of rotation.

Abstract: A canister attachment for leaf blowers/vacuums is an apparatus that attaches to existing yard waste leaf blower/vacuum's to provide a user with a facilitated means to collect solid animal waste or other debris deposited on the ground. The apparatus comprises a suction nozzle assembly, a canister, a suction duct, a support assembly, and a leaf blower/vacuum. The suction nozzle assembly comprises a canister mount and a nozzle. The canister comprises a nozzle mount, a lateral surface, a filter plate, a duct opening, and a first and second chamber. The suction duct comprises a duct canister mount, a channel, and a leaf blower/vacuum mount. The configuration of these components provides the user with a mobile accessory that utilizes the suction from existing conventional leaf blowers/vacuums to siphon animal waste through the nozzle and into the canister. Furthermore, the apparatus provides an exhaust catch to prevent accidental discharge through the leaf blower/vacuum.

Abstract: An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.

Abstract: A vehicle wash system may have a drying station that may have a frame and a blower mounted on the frame. The blower may be used blowing liquid from the surface of a vehicle and may have a plenum with a cavity opening, an exit port, and an interior cavity. An impeller may be positioned inside the cavity, and when driven by a motor, may be operable to draw air into the cavity compress the air, and then emit an airflow from the plenum through the exit port. The blower may have an inlet region formed proximate the cavity opening and be in communication with the cavity. The inlet region may have a generally tubular inlet opening. A movement apparatus may be provided that is movable axially relative to the inlet opening to vary the size of the tubular inlet opening. The system may also include a sensor system operable to detect the presence and/or absence of a vehicle at drying station.

Abstract: A purge nozzle unit 1 includes a nozzle main body 2 including a trunk 41 and a collar section 8 protruding outward from the trunk 41 and a holder 3 including a side wall 31 that is in slidable contact with an outward face of the collar section 8 and a bottom wall 33 having a through hole 32 with which an outward face of the trunk 41 is in slidable contact and is configured such that a vent 30 in communication with the outside is formed in the holder 3 and the nozzle main body 2 is vertically moved relative to the holder 3 by regulating a pressure in a pressure-regulated space S formed between the nozzle main body 2 and the holder 3 and in communication with the vent 30.

Abstract: Systems and methods are described herein for cleaning objects, such as refrigeration coils and the like, by placing a first end of a bag over one side of the coils, and placing a second end of the bag over a suction hose of a vacuum. When the vacuum is activated and compressed air (or other gas or liquid) is blown into a second, opposite, side of the refrigeration coils, the dirt removed therefrom is directed toward the interior of the bag and into the vacuum and contained therein. Baffles within the bag direct the flow of dirt and debris toward the vacuum.

Abstract: This patent relates to devices that can be manipulated by a user to expel or draw in a material. In one example, a hand-operable vacuum device can include an interface portion configured to contact a material. The hand-operable vacuum device can also include a deformable portion that extends along an axis that passes through the interface portion and wherein the deformable portion includes at least one longitudinally-oriented resilient structure that extends generally parallel to the axis.

Abstract: An attachment for an air blower that enables a nozzle portion to be configured at various angles is provided. The attachment includes an elongated cylindrical portion, a connector portion, a nozzle portion, and an actuating sleeve. The cylindrical portion has a first end and a second end and has a longitudinal axis running therethrough. The connector portion is disposed at the first end of the cylindrical portion and configured to couple the cylindrical portion to an airflow outlet of an air blower. The nozzle portion is disposed at the second end of the cylindrical portion and is configured to direct airflow. The actuating sleeve is rotatably retained at the second end of the cylindrical portion and coupled to the nozzle portion. The actuating sleeve is configured to adjust the nozzle portion at various angles relative to the longitudinal axis of the cylindrical portion when the user rotates the actuating sleeve.

Abstract: A blowing assembly for a sealing unit of a packaging device is provided comprising a housing and at least one blowing element which is movable relative to said housing between a first position, in which it is lowered at least partially into said housing, and a second position in which it at least partially projects above a surface of said housing. Also provided is a method for removing excess packing material from a blowing assembly for a sealing unit being provided in a packaging device.

Abstract: A tool for removing particulate matter from a diesel particulate filter (DPF) includes a container defining a chamber that has an open end, and a support associated with the open end that supports a first axial end of the DPF and forms a seal around an outside surface of the can of the DPF and the container. An air nozzle mounted proximate to a second axial end of the DPF directs a narrow flow of air through the DPF that passes through a portion of the DPF element bundle and exits through the first axial end into the container.

Abstract: The invention relates to a container for a contact lens storage solution, in particular having contact lenses in said contact lens storage solution. The container has a vessel (14), which has a filling opening (20), and a first closing element (24), which can be attached to the vessel (14) and which closes the filling opening (20). The first closing element (24) has a gas supply channel (42) for a cleaning and/or sterilizing gas, which extends from at least one inlet (40) on an outer face of the first closing element (24) to at least one outlet (48) on an inner face of the first closing element (24) facing the interior of the vessel (14). On the outer face of the first closing element, said first closing element (24) has at least one venting opening (50) for the escape of gas from the vessel (14).

Abstract: A blower (1) with a blower housing (2), a blower wheel (4) positioned so as to rotate inside a blower housing (2), an electric motor (6) for the rotational drive of the blower wheel (4), as well as with a saucer-shaped attachment housing (8) positioned externally on the blower housing (2). The attachment housing (8) contains motor-control electronics (10) and exhibits in its connection area facing the blower housing (2) a metallic cover element (14) covering the motor control electronics (10) and protects against an electromagnetic radiation from the electric motor (6).

Abstract: An illuminated leaf blower having a light disposed upon a handle, the handle disposed upon a pipe section of a blower tube at an angle deviant from the perpendicular by means of a pivotally securable attachment member, the attachment member disposed upon a lockable collar, said lockable collar securably moveable along the pipe section to position the handle as desired for a particular person wielding the device, the handle having a switch disposed on a rearward haunch of a head piece, said head piece disposed atop the handle configured to be ergonomically accessed by means of a thumb of the person wielding the device, whereby the light selectively illuminates an area over which an airflow from the illuminated leaf blower is directed.

Abstract: An oral care implement with an air flossing system cleans debris from the teeth of a user. The oral care implement may include an oral care region having cleaning elements for engaging oral tissue. A body is provided for gripping the implement. An air source is disposed in the body for proving pressurized air to an air outlet. The air outlet is disposed in the oral care region for injecting the pressurized air to clean debris from the oral tissue.

Abstract: A hand-held electric blower includes an air-guiding pipe comprising a proximal portion or suction pipe provided with an air inlet, a distal air outlet portion or exhaust nozzle, and a fan. The blower is characterized in that the fan consists of an axial fan, and in that the suction pipe has, upstream from the axial fan, an elbow, the proximal end of which defines the air inlet and is directed downward in terms of a working position of the device, in which the operating handle of the blower is positioned above said elbow.

Abstract: The invention provides a spray centrifugal dedusting fan, including an air cylinder consisting of a spray cylinder, a centrifugal cylinder and a fan cylinder; the left end and the right end of the air cylinder are respectively provided with an air inlet and an air outlet communicated with each other; a spraying device is installed in the spray cylinder; a plurality of through holes are arranged on the wall of the centrifugal cylinder; a bracket is installed inside the centrifugal cylinder; at least one centrifugal impeller is installed on the bracket; a fan is installed inside the fan cylinder; an outer cylinder is installed on the external wall of the centrifugal cylinder 11; an empty chamber is arranged between the centrifugal cylinder and the outer cylinder; the lower end of the outer cylinder is connected with a water seal elbow; the water seal elbow is communicated with the empty chamber, the trumpet-shaped first water-blocking shield is connected to the right part inside the centrifugal cylinder; the le

Abstract: A portable air blower is selectively removably secured to the upper end of a length adjustable extension pole to blow twigs, leaves or other debris from a rain gutter or other elevated structures or surfaces.

Abstract: Electrical household appliance comprising a base (1) for the generation of steam, having a liquid tank (6) mounted removably on a receiving socket (10) and having a steam generator located outside of said tank (6), the steam generator being supplied by gravity by a supply line from the tank (6) and having a steam outlet through which the steam can escape towards a work tool, such as a crease-removing brush, said supply line comprising an inlet orifice located on the receiving socket (10), and said tank (6) comprising a closed enclosure (61) having only one outlet orifice (52) which connects the said inlet orifice when the tank is placed on the receiving socket (10), which appliance is characterized in that said tank (6) connects leaktightly onto said receiving socket (10) and in that said appliance has a vent line admitting air to the outlet orifice (52) of the tank, said vent line having one end connected to the exterior which is higher than the outlet orifice (52) of the tank.

Abstract: Pilot light gas line connector assemblies and methods for cleaning a pilot light orifice are disclosed herein. An exemplary connector assembly for coupling to a pilot light gas line and cleaning a pilot orifice has a first fitting end, a second fitting end, and a passageway therebetween. The first fitting end is adapted to receive a first end of the pilot light gas line and the second fitting end is adapted to receive a valve capable of directing forced air from a forced air source into the second fitting end. Methods of cleaning a pilot orifice of a pilot light system include removing the pilot light gas line from a gas port and coupling the pilot light gas line to a pilot light gas line connector assembly. Then forced air is directed into the connector assembly and through the pilot light gas line, thereby cleaning the pilot orifice.

Abstract: Disclosed is an air knife chamber constructed such that water flowing down along a partition wall is allowed to fall in front of a slit. Due to this construction, the water can be effectively removed by air knives, thus contributing to a reduction in the defective proportion of substrates.

Abstract: A system for drying structures including an enclosed housing with a plurality of outlet openings, a plurality of flexible outlet hoses each connected to a respective outlet opening, and a vacuum motor engaged with the housing such that an outlet of the vacuum motor is exhausted into an interior of the housing so as to pressurize the interior of the housing such that compressed air is directed through the plurality of outlet hoses. Also a method of drying an interior of a structure, including placing a pressurized drying system adjacent a region of a structure, forming a plurality of openings in surfaces of the structure where the surfaces define enclosed spaces, inserting distal ends of outlet hoses of the pressurized drying system into respective openings of the surfaces of the structure, and engaging the pressurized drying system so as to generate a flow of pressurized air and to direct the pressurized air into the enclosed spaces.

Abstract: An apparatus for cleaning the surface of a base, comprising: a base; a plurality of apertures flush with the surface of said base, said apertures being connected to a plurality of sub-channels and wherein said apertures are adapted to expel air; at least one air chamber operatively connected with said plurality of sub-channels; a main channel connected with said at least one air chamber; wherein said main channel is supplied from an air compressor; and a main valve located between said at least one air chamber and said main channel, wherein said main valve regulates the air flow from said main channel to said at least one air chamber, said valve being further adapted to close said main channel.

Abstract: A lens-cleaning device for cleaning dust deposited on a plurality of lenses, includes a tray, a front cover, and a plurality of air nozzles. The tray defines a plurality of grooves and a plurality of through holes alternately arranged in a first surface of the tray. Each of the lenses is received in one groove. The front cover defines a plurality of assembling holes in a second surface of the front cover corresponding to the through holes. The front cover covers the tray with each of the air nozzles received in one assembling hole, and the air nozzles are capable of blowing air against the lenses causing the dust deposited on the outer surface of the lenses to be blown away through the through holes.

Abstract: The invention is directed to a method for at least partially removing a contamination layer (15) from an optical surface (14a) of an EUV-reflective optical element (14) by bringing a cleaning gas into contact with the contamination layer. In the method, a jet (20) of cleaning gas is directed to the contamination layer (15) for removing material from the contamination layer (15). The contamination layer (15) is monitored for generating a signal indicative of the thickness of the contamination layer (15) and the jet (20) of cleaning gas is controlled by moving the jet (20) of cleaning gas relative to the optical surface (14a) using this signal as a feedback signal. A cleaning arrangement (19 to 24) for carrying out the method is also disclosed. The invention also relates to a method for generating a jet (20) of cleaning gas and to a corresponding cleaning gas generation arrangement.

Abstract: A roof debris removal apparatus comprising a generally rectangular platform with a plurality of omnidirectional rollers disposed at the bottom corners thereof, with a telescopic pole connected to the platform for manipulating the apparatus in multiple directions across a roof surface by an operator standing on the ground. A leaf blower, floor dryer or a water jet mechanism is secured to the platform, and a power source is connected to the leaf blower, floor dryer or a water jet mechanism. The apparatus is utilized to remove debris, such as leaves and twigs, from a roof surface.

Abstract: A cylindrical dedusting apparatus has an upper material infeed opening to introduce material into a frusto-conical infeed hopper centered over the tip of a conical wash deck supported over an air infeed conduit. Air is blown through slots and openings in the surface of the wash deck to separate dust and debris from the particulate material. The dust-laden air is discharged by passing between the infeed hopper and a cylindrical sleeve to enter into a circular collector for discharge from the apparatus. Flow rate of material over the wash deck is adjusted by vertically moving the infeed hopper within the sleeve relative to the wash deck to vary the dimension of the gap through which material flows onto the wash deck. A closed loop air system can be used with the cylindrical dedusting apparatus with a bleed air module that reduces air flow into the apparatus.

Abstract: An air cannon has a pressure vessel, a discharge valve, and a discharge tube assembly. The discharge tube assembly comprises a fluid passageway and a blast guard valve. The discharge valve is capable of opening and closing and allows pressurized gas to be discharged from the pressure vessel into the fluid passageway of the discharge tube assembly only when open. The blast guard valve is capable of opening and closing and obstructs the fluid passageway of the discharge tube assembly when closed. The blast guard valve allows gas to pass through the fluid passageway when open. The discharge valve and the blast guard valve are operatively connected to each other in a manner such that the discharge valve can open only when the blast guard valve is open.

Abstract: A screen intake system has a body with an open end and a chamber. A flat screen is disposed at the open end of the body. To keep the screen clear of debris, an airburst system has pipes disposed in the chamber. The pipes dispose parallel to one another adjacent the flat screen, and each of the pipes has orifices in a side facing the flat screen. Directors are disposed along the backs of the pipes in a lattice, and each of the directors has a channel in which the pipe disposes. Compressed air released by valves from a tank dispersed from the pipe's orifices. Each of the directors directs the resulting water/airburst from the orifices toward the adjacent flat screen to clear it of debris.

Abstract: A blower assembly is releasably attached to a lawnmower frame by quick-release mounting system comprising a down-facing blade and up-facing receiving pocket that frictionally stably vertically engage. The blower assembly includes a blower unit, a flexible hose with an outlet for emitting a directed air flow, adjustment structure for adjustably supporting the flexible hose in different vertical and horizontal positions and orientations, and powered actuators operably connected to the adjustment structure to selectively bend the flexible hose. A powered control automatically controls the actuators for automatically operating the actuators to move the outlet to a selected position and orientation. Related methods include removing and reconnecting the blower assembly to different lawnmowers and lawn care wheeled devices.

Abstract: There is provided an air blower assembly removing foreign objects, or the like, attached to an object to be cleaned by blowing high pressure air. The air blower assembly includes: a frame; and a nozzle fixed to the frame and having one end to be connected to the blower to remove foreign objects by air blowing to the other end, wherein the nozzle is an elastic body that moves freely by air blowing.

Abstract: A system for impingement air treatment of a thin film conveyor generally includes a thin film conveyor having a width, a first surface, and a second surface, and a first impingement air device configured to blow impingement air on at least one of the first and second surfaces across at least a portion of the width of the thin film conveyor. Other systems and methods for impingement air treatment of conveyors are also provided.

Abstract: An apparatus for efficiently removing the exuded substance and/or the attached substance on the surface of a catalyst (catalyst surface substance) from the catalyst is provided. The apparatus comprising a main body, the apparatus for removing a catalyst surface substance present on a surface of a catalyst from the catalyst by bringing a gas flow into contact with the catalyst housed in the main body, wherein a gas flow length in a flow direction of the gas flow is 55 mm or more, and an average flow velocity of the gas flow is 80 m/s or more and 500 m/s or less in terms of a linear velocity at 15° C. and 1 atm.

Abstract: An engine blower includes: an engine integrated with a volute for driving a fan; a ventilation tube communicated with the volute; and a handle mounted to the ventilation tube. In the engine blower, the handle has a pair of cases that are assembled with each other, and a conductive resin layer is formed on a surface of a grip of the handle. The resin layer is integrated with gates exposed within the handle. A conductive spring having a coil compressed in a direction in which the cases are assembled with each other and a cable that is electrically coupled with the engine are disposed within the handle. The gate of the resin layer is brought into contact with the coil of the spring and is electrically coupled with the cable via the spring.

Abstract: The invention is drawn to methods and apparatus comprising the use of attachment components comprising fluid-driven turbines to dusting, trimming, polishing, and claiming a locus, such as a surface.

Abstract: A local purging tool for purging a portion of a surface of a wafer with purging gas is disclosed. The purging tool includes a purging chamber configured to contain purging gas within a cavity of the purging chamber, a permeable portion of a surface of the purging chamber configured to diffuse purging gas from the cavity of the chamber to a portion of a surface of a wafer, and an aperture configured to transmit illumination received from an illumination source to a measurement location of the portion of the surface of the wafer and further configured to transmit illumination reflected from the measurement location to a detector.

Abstract: The invention relates to a tool for cleaning and/or drying a cavity in a workpiece, such as a hole, in particular a threaded bore. The workpiece has a workpiece adapter. The workpiece adapter includes a workpiece contact surface and has a connector for feeding cleaning medium and/or drying medium. There is an opening in the connection adapter for discharging cleaning medium and/or drying medium containing dirt particles. A nozzle having a nozzle chamber is formed in the workpiece adapter. The connector opens into the nozzle chamber such that a cyclonic flow of the fed cleaning medium and/or drying medium can form in the nozzle and exits the nozzle. The cyclonic flow transports dirt particles from the cavity in the workpiece to the opening for discharging dirt particles and cleaning medium and/or drying medium.

Abstract: A power tool includes a housing having an intake aperture, a fan disposed within the housing and operable to draw air through the intake aperture, and a fan intake shield positioned adjacent the intake aperture. The fan intake shield includes a first rib, a second rib adjacent the first rib and spaced from the first rib to define an air flow path into the intake aperture between the first rib and the second rib, and a third rib adjacent the first rib and spaced from the first rib to define an air flow path into the intake aperture between the first rib and the third rib. Each of the first, the second, and the third ribs has a respective height, and the height of the first rib is greater than the height of the second rib and the height of the third rib.

Abstract: An air filter reconditioning apparatus is provided for cleaning air filters. There is a vessel body with a lid and an arbor axle tube provides a source of incoming air. A two stage live arbor is provided having a first roller bearing fitted on the arbor axle tube, a spacer ring fitted on the first roller bearing, a second roller bearing fitted on the arbor axle tube, an impeller ring fitted on the second roller bearing and a housing fitted on the spacer ring and the impeller ring, with an air redirection plate disposed in the housing and fitted to the arbor axle tube. A V-grooved arbor nozzle adapter is threadably connected to the housing such that the housing and the V-grooved nozzle adapter rotate around the arbor axle tube. Nozzles defined in the V-grooved arbor nozzle adapter direct air into the air filter during rotation.

Abstract: An apparatus for directing airflow for moving debris across a surface is provided. The apparatus includes a shaft, and a golf club head coupled to the shaft at an end opposite the grip. The club head includes a blower assembly within the club head, the blower selectively operable to direct airflow through the club head along a central axis from the club head heel out the club head toe, to move debris to a desired location. Optional embodiments provide varied club head shapes and attachments, and a flashlight removably disposed within the grip, with automatic operation upon removal of the grip from the shaft.

Abstract: An apparatus and associated method are provided for treating a workpiece with a cryogenic impingement fluid. A fixture supports the workpiece in an upright position and operably connects an electrical component of the workpiece to a power source in the supported position. A cryogenic impingement fluid applicator sprays a stream of the cryogenic impingement fluid against the supported workpiece and laterally moves the stream in accordance with a predetermined path. A shield deflects the stream of cryogenic impingement fluid to prevent the stream from contacting at least a part of the workpiece as the stream is moved along the predetermined path.

Abstract: An apparatus includes a main body and an air knife module mounted in the main body. The air knife module includes a first air knife assembly comprising a number of first air knives and a second air knife assembly comprising a number of second air knives. Each second air knife is staggered relative to the first air knife.

Abstract: A hair dryer includes a housing, a fan unit, a heating element, a motor and a handle. The housing is the body of the hair dryer and has an inlet end and an outlet end. The motor rotates the housing relative to the handle in an oscillating manner. The fan unit is mounted in the housing so that air from vents at the inlet end pass through the fan unit to be blown out through the outlet end of the housing. As such, the housing moves without requiring any movement of the user's hand, wrist, or arm. The handle also has a controller for activating operation, adjusting speed, and setting temperature.

Abstract: A portable system for treating, for example, cleaning and/or drying, surfaces, including both indoor and outdoor surfaces, is provided. The system includes a pressurized air outlet assembly, or “air knife” assembly, coupled to a source of pressurized air, for example, a blower, a fan, or a turbine. The air knife assembly concentrates a high volume exhaust flow of air into a high velocity, high temperature, and/or high pressure air stream directed at a target surface. The air stream can be angularly varied to propel water, snow, debris, and other particulate from the target surface, for example, a path or roadway being cleaned or dried. The air knife blade assembly is substantially long enough to allow a single lane of roadway or runway to be dried and cleaned in one pass, but can also be shortened to allow treatment of narrower paths.

Abstract: A substrate cleaning apparatus includes a supporting unit, provided in a processing chamber having a gas exhaust port, for supporting a substrate; one or more nozzle units, each for ejecting gas clusters to a peripheral portion of the substrate supported by the supporting unit to remove unnecessary substances from the peripheral portion; and a moving mechanism for changing relative positions of the supporting unit and the nozzle unit during ejecting the gas clusters. Each nozzle unit discharges a cleaning gas having a pressure higher than that in the processing chamber so that the cleaning gas is adiabatically expanded to form aggregates of atoms and/or molecules.

Abstract: A blower is provided for removing debris from the ground where an air stream generator connect to a frame discharges a high velocity air stream downward and away from the blower, toward the working surface, through a nozzle rotatable three hundred sixty degrees continuously. The air stream has a generator axis substantially perpendicular to a frame center line, and is operably connected to a power source mounted to the frame. An actuator mechanically rotates the nozzle. The blower is connectable to a vehicle at the rear of the frame and has wheels at the front of the frame for movement across the ground.

Abstract: A substrate processing apparatus cleaning method that includes: containing a cleaning gas in a reaction tube without generating a gas flow of the cleaning gas in the reaction tube by supplying the cleaning gas into the reaction tube and by completely stopping exhaustion of the cleaning gas from the reaction tube or by exhausting the cleaning gas at an exhausting rate which substantially does not affect uniform diffusion of the cleaning gas in the reaction tube from at a point of time of a period from a predetermined point of time before the cleaning gas is supplied into the reaction tube to a point of time when several seconds are elapsed after starting of supply of the cleaning gas into the reaction tube; and thereafter exhausting the cleaning gas from the reaction tube.