Abstract: A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.

Abstract: Silicon granules are conveyed in an encapsulated conveying channel by swaying movement of the channel produced by a permanent magnet excited by an external alternating electromagnetic field.

Abstract: An apparatus and method are utilized to transiently implement diamagnetic behavior in both permanently and transiently magnetized particles.

Abstract: The intent of this invention is to provide an apparatus for substrate transportation that is to carry the substrate without any mechanical contact when the substrate is required to be transported in various manufacturing processes including semiconductor, display and the like.

Abstract: A conveying device for moving a carrying plate includes a pulling mechanism in the form of a belt. To pull the carrying plate, the belt is contacted against the carrying plate via a magnetic force of at least one permanent magnet. The carrying plate is then entrained by the belt as a result of static friction or sliding friction.

Abstract: The invention relates to a transporting apparatus for conveying a product, comprising a movable conveying element (2) for conveying the product, also comprising a fixed-location running rail (3), which is arranged all the way round and defines a running track for the conveying element (2), and further comprising a linear-motor-drive means (4) for driving the conveying element (2), wherein the conveying element (2) has a permanent magnet (5) which is in operative connection with coils (6) of the linear-motor-drive means (4), and wherein the conveying element (2) has at least a first sub-element (22) and a second sub-element (23), which are connected to one another in an articulated manner by means of an articulation (7).

Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract: A laboratory sample distribution system is presented. The system comprises a plurality of container carriers. The container carriers each comprise at least one magnetically active device such as, for example, at least one permanent magnet, and carry a sample container containing a sample. The system also comprises a transport device. The transport device comprises a transport plane to carry the plurality of container carriers and a plurality of electro-magnetic actuators stationary arranged below the transport plane. The electro-magnetic actuators move a container carrier placed on top of the transport plane by applying a magnetic force to the container carrier. The transport device also comprises a control device to control the movement of the container carriers on top of the transport plane by driving the electro-magnetic actuators. The control device controls the movement such that more than two container carriers are movable simultaneously and independently from one another.

Abstract: A transfer apparatus includes a primary part, and at least one first and one second secondary part, which are each magnetically coupled to the primary part for drive purposes. A regulation device is provided for regulation of a drive of the secondary parts. The regulation device can regulate the drive of the first secondary part in a first zone of the primary part in accordance with a first regulation rule, and can regulate the drive of the second secondary part in a second zone of the primary part in accordance with a second regulation rule. The first and second regulation rules differ hereby from one another. The first zone is separated from the second zone by a boundary which can be varied dynamically by the regulation device.

Abstract: An improved system and method for moving an object includes a first correlated magnetic structure associated with a first object and a second correlated magnetic structure associated with a second object. The first and second correlated magnetic structures are complementary coded to achieve a peak attractive tensile force and a peak shear force when their code modulos are aligned thereby enabling magnetic attachment of the two objects whereby movement of one object causes movement of the other object as if the two objects were one object. Applying an amount of torque to one correlated magnetic structures greater than a torque threshold causes misalignment and decorrelation of the code modulos enabling detachment of the two objects. The number, location, and coding of the correlated magnetic structures can be selected to achieve specific torque characteristics, tensile force characteristics, and shear force characteristics.

Abstract: A conveyor system that includes a track section including a control system, a drive system that is controlled by the control system and that is configured to provide power through a first electromagnetic field and through an alternating second electromagnetic field, a plurality of moving elements that are driven by the drive system and that are configured to receive power through the first electromagnetic field, where at least one of the plurality of moving elements includes a pick-up unit configured to receive power through the alternating second electromagnetic field, a pallet support apparatus, and a plurality of pallets that are configured to engage with the plurality of moving elements and move on the pallet support apparatus.

Abstract: A conveyor comprising a conveyor belt having rollers with metallic or magnetic rotors. A magnet or metallic element next to the conveyor belt is positioned to rotate the rotor. A magnetic field produced by the magnet or by the magnetic rotor rotates the rollers as they pass the magnetic field or as the magnetic field is changed.

Abstract: The invention relates to a transport apparatus for conveying a product, comprising a moveable conveying element (2) for conveying a product, a stationary sliding rail (3) that is arranged around the circumference for guiding the conveying element (2), and a drive device (5) for a linear motor for driving the conveying element (2), wherein the conveying element (2) comprises a main body (2a), a pusher finger (15) that can be brought into contact with the product, and a permanent magnet (6) that is operatively connected to the drive device (5) for the linear motor, wherein the conveying element (2) comprises a first running device (10), which is arranged on a side of the conveying element (2) in the running direction (A) of the conveying element (2), and a second running device (11) which is arranged on the other side of the conveying element (2) in the running direction (A) of the conveying element (2), and wherein the conveying element (2) comprises a guiding device (12, 22) that is arranged such that a resul

Abstract: Provided is an electric actuator capable of preventing the release of particles from the body thereof. The electric actuator includes a body made of an elongated enclosure; a slider configured to move in a reciprocating manner along a lengthwise direction of the body; an opening formed in a side surface of the body to correspond to a moving path of the slider; a dust seal band provided to cover the opening; and a pair of electrodes protruding from the body at opposite sides of the opening toward the outside of the body and extending in the lengthwise direction of the body with the opening being interposed between the pair of electrodes. Positive potential is generated in the upper electrode of the pair of electrodes and negative potential is generated in the lower electrode of the pair of electrodes.

Abstract: A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.

Abstract: An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section (2) of which inside is held in vacuum, a placing section (3) that is disposed inside the vacuum section (2) and is capable of placing a workpiece thereon, a linear motor 4) that includes coils (415) and makes the placing section (3) travel within the vacuum section, wherein air is placed inside the placing section (3) while being isolated from the vacuum section (2), and the coils (415) of the linear motor (4) are disposed inside the placing section (3).

Abstract: A modular conveyor belt and method provides a conveyor belt having rollers with metallic or magnetic rotors. A magnet or metallic element next to the conveyor belt is positioned to rotate the rotor. A magnetic field produced by the magnet or by the magnetic rotor rotates the rollers as they pass the magnetic field or as the magnetic field is changed. In one embodiment, the magnetic field is in the form of one or more switched reluctance motors.

Abstract: A mover assembly (46) for moving a stage (14) includes an actuator (30) that is coupled to the stage (14). The actuator (30) includes (i) a C-Core (52) having a generally “C” shape and including a first transverse leg (260), a second transverse leg (262) that is spaced apart from the first transverse leg (260), and a connector region (264) that connects the transverse legs (260), (262); (ii) a coil (270) that is wrapped around the first transverse leg (260); and (ii) an I core (250) that is spaced apart a gap (254) from the C-Core (252).

Abstract: A system for channeling and unloading hot-rolled materials downstream of a unit for cutting to size and upstream of a cooling bed, includes feeding a rolled material at high speed inside at least one channeling unit and unloading the rolled material with the channeling unit onto the cooling bed. The channeling unit has a supporting structure with at least one travel channel which is open downwards and with which at least one electromagnet element is associated. Preferably, the at least one travel channel is shaped in the manner of an inverted U. Preferably, the system has at least one pair of adjacent and parallel travel channels.

Abstract: A conveying device for moving a carrying plate includes a pulling mechanism in the form of a belt. To pull the carrying plate, the belt is contacted against the carrying plate via a magnetic force of at least one permanent magnet. The carrying plate is then entrained by the belt as a result of static friction or sliding friction.

Abstract: A container conveying system for transporting baggage items in containers has at least one unloading station and/or a loading station for loading or unloading the container. The baggage item lies on an endless supporting belt which is guided transversely to the transporting direction of the container so as to be drivable about a deflection roller arranged on both sides of the container, wherein, for driving in the region of the loading and/or unloading station, a stationary drive is provided which is in operative connection during the loading and/or unloading operation with a drive element for the supporting belt that is provided on the container.

Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract: A transport system for conveying sheet material along a feed path. The transport system includes an electro-dynamic propulsion system for moving sheet material, or a stacked collation of sheet material, along a support deck which defines the feed path. More specifically, the electro-dynamic propulsion system includes at least one guideway and a ferromagnetic element disposed internally of the guideway. The guideway includes a magnetic coil to produce a variable magnetic field. By varying the flux density and polarity of the magnetic field the ferromagnetic element may be propelled within the guideway. An abutment member is coupled to the ferromagnetic element, extends through the elongate opening of the support deck and engages an edge of sheet material. A processor is operative to control the electro-dynamic propulsion system and, accordingly, the rate of travel and position of the sheet material along the feed path.

Abstract: A conveyor system that includes a track section including a control system, a drive system that is controlled by the control system and that is configured to provide power through a first electromagnetic field and through an alternating second electromagnetic field, a plurality of moving elements that are driven by the drive system and that are configured to receive power through the first electromagnetic field, where at least one of the plurality of moving elements includes a pick-up unit configured to receive power through the alternating second electromagnetic field, a pallet support apparatus, and a plurality of pallets that are configured to engage with the plurality of moving elements and move on the pallet support apparatus.

Abstract: A drive rail includes a sealed interior cavity and an exterior drive surface that extends along a length of the drive rail. A first magnetic member is disposed within the interior cavity and adjacent to a surface of the interior cavity that is immediately opposite the exterior drive surface. A drive mechanism is disposed within the interior cavity and in connection with the first magnetic member, and is configured to move the first magnetic member within the interior cavity along the length of the drive rail, such that the first magnetic member remains immediately opposite the exterior drive surface. The first magnetic member is configured to magnetically couple through the exterior drive surface to a wafer carrier disposed adjacent to the exterior drive surface. Movement of the first magnetic member within the interior cavity along the drive rail causes corresponding movement of the wafer carrier along the exterior drive surface.

Abstract: A method of transporting a magnetic fluid (104) or at least one magnetic particle (509, 510). The method comprises the steps of: providing a magnetic layer (102) with an asymmetric re-magnetization property; placing the magnetic fluid (104) or the magnetic particle(s) (509, 510) in the vicinity of the magnetic layer (102) so that they can magnetically interact with the magnetic layer (102); and applying an external magnetic field.

Abstract: A vehicle motion control system comprising: a sliding surface; a vehicle adapted to slide on said sliding surface; and a linear motor associated with the vehicle and the sliding surface for affecting sliding motion of the vehicle on the sliding surface.

Abstract: A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power supply mechanism including a primary side mechanism disposed outside the vacuum chamber for supplying electric power to the driving source and a secondary side mechanism disposed in the vacuum chamber for receiving the electric power from the primary side mechanism in a contactless relationship, and a vessel capable of accommodating airtightly the secondary side mechanism under a second pressure higher than the first pressure.

Abstract: A linear axle for contactless energy transmission has a belt with an electrical conductor, a movable carriage and a circuit that is movable with the carriage and which is electrically connected with the conductor. In addition, a locationally fixed circuit and an inductive coupling device are provided to inductively couple electrical energy from the locationally fixed circuit into the conductor of the belt.

Abstract: An acoustic wave device applicable to a wider scope and field and used for transporting a substance of any of wide variety of types to be transported with an improved efficiency without needing to clean a piezoelectric substrate and simultaneously transporting two or more physically separated substances along the propagation direction of a surface acoustic wave. An acoustic wave device has an exciting electrode for exciting a surface acoustic wave formed on a piezoelectric substrate generating a surface acoustic wave by a piezoelectric effect. A transport path plate is disposed adjacently to the exciting electrode over the piezoelectric substrate with a water layer (W) interposed therebetween. When current is supplied to the exciting electrode, a surface acoustic wave is generated on the piezoelectric substrate. The surface acoustic wave causes a longitudinal wave to be emitted into the water layer (W) and attenuates.

Abstract: A replacement roller support assembly allows repairing of a conveyor roller support system begins with removing at lease one system roller support from the system base. Next a replacement roller support assembly includes an assembly base with an opening and assembly roller support above each opening for each system roller support removed. The replacement roller support assembly is positioned with the opening and the assembly roller support aligned with the location of the removed roller supports of the system. The support assembly is secured to the system base and the roller is attached to the assembly roller support.

Abstract: Substrate processing apparatus having a chamber, a generally linear array of process modules, a substrate transport, and a drive system. The chamber is capable of being isolated from the outside atmosphere. Each process module of the array is communicably connected to the chamber to allow a substrate to be transferred between the chamber and process module. The substrate transport is located in and is movably supported from the chamber. The transport is capable of moving along a linear path defined by the chamber for transporting the substrate between process modules. The drive system is connected to the chamber for driving and moving the transport along the linear path. The chamber comprises a selectable number of chamber modules serially abutted to defined the chamber. Each module has an integral portion of the drive system.

Abstract: Provided is a low-cost electrostatic attraction transfer apparatus which can perform high-speed transfer, stabilizes a contact status of an electrostatic attraction board with a film and the like and does not generate fine defects on an object to be transferred.

Abstract: An electrostatic chuck is provided for a substrate stage that can be used in plasma treatment of various substrates such as a large-sized glass substrate for a flat panel display (FPD), a semiconductor wafer or the like. The electrostatic chuck is divided into a plurality of electrodes formed into nearly bar-like shapes. In accordance with an exemplary embodiment, each of the divided bar-like electrodes includes an inner electrode and a single layer thermally sprayed film formed on the surface of the inner electrode, with the bar-like electrodes disposed in parallel so as to form a plane electrode.

Abstract: A transport system for conveying sheet material along a feed path. The transport system includes an electro-dynamic propulsion system for moving sheet material, or a stacked collation of sheet material, along a support deck which defines the feed path. More specifically, the electro-dynamic propulsion system includes at least one guideway and a ferromagnetic element disposed internally of the guideway. The guideway includes a magnetic coil to produce a variable magnetic field. By varying the flux density and polarity of the magnetic field the ferromagnetic element may be propelled within the guideway. An abutment member is coupled to the ferromagnetic element, extends through the elongate opening of the support deck and engages an edge of sheet material. A processor is operative to control the electro-dynamic propulsion system and, accordingly, the rate of travel and position of the sheet material along the feed path.

Abstract: A transport system for conveying sheet material along a feed path. The transport system includes an electro-dynamic propulsion system for moving sheet material, or a stacked collation of sheet material, along a support deck which defines the feed path. More specifically, the electro-dynamic propulsion system includes at least one guideway and a ferromagnetic element disposed internally of the guideway. The guideway includes a magnetic coil to produce a variable magnetic field. By varying the flux density and polarity of the magnetic field the ferromagnetic element may be propelled within the guideway. An abutment member is coupled to the ferromagnetic element, extends through the elongate opening of the support deck and engages an edge of sheet material. A processor is operative to control the electro-dynamic propulsion system and, accordingly, the rate of travel and position of the sheet material along the feed path.

Abstract: A specimen-transport module adapted for use with each of a plurality of specimen-processing instruments of a multi-instrument clinical workcell. Such module is adapted to transport individual racks of specimen-containers relative to a specimen-aspiration probe of an associated instrument in a workcell, as well as to transfer selected racks of specimen-containers to an adjacent and identical specimen-transport module associated with another clinical instrument of the workcell. Since the same transport system is used to both present specimens for aspiration and to transfer specimens between instruments, there is no need for two independent conveyances as is characteristic of the prior art. Preferably, the specimen-transport module includes a magnetic X/Y transport system that operates beneath a rack-supporting surface to advance racks in mutually perpendicular directions across a supporting surface via magnetic forces.

Abstract: The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.

Abstract: A drive rail includes a sealed interior cavity and an exterior drive surface that extends along a length of the drive rail. A first magnetic member is disposed within the interior cavity and adjacent to a surface of the interior cavity that is immediately opposite the exterior drive surface. A drive mechanism is disposed within the interior cavity and in connection with the first magnetic member, and is configured to move the first magnetic member within the interior cavity along the length of the drive rail, such that the first magnetic member remains immediately opposite the exterior drive surface. The first magnetic member is configured to magnetically couple through the exterior drive surface to a wafer carrier disposed adjacent to the exterior drive surface. Movement of the first magnetic member within the interior cavity along the drive rail causes corresponding movement of the wafer carrier along the exterior drive surface.

Abstract: A transfer apparatus includes a first magnetic member placed in a carrier, and a second magnetic member placed in a carrier supporting unit to oppose the first magnetic member from a position below the first magnetic member in the vertical direction, and having the same polarity as that of the first magnetic member. The repulsive force generated between the first and second magnetic members vertically pushes up the carrier, thereby reducing the weight of the carrier supported by the carrier supporting unit.

Abstract: The present invention relates to a sorting system including a conveyor comprising a plurality of carts for carrying articles, in particular for sorting articles such as parcels and baggage. The conveyor has a linear synchronous motor drive system with stators arranged along a track which the carts follow. It is an object of the present invention to provide an improved sorting system as well as to provide a sorting system with improved energy utilisation and efficiency. Reaction elements are mounted on each of the carts. The reaction elements each comprise an uneven number of permanent magnets arranged on a plate-like carrier. The magnets on reaction elements of adjacent carts are arranged to form arrow of magnets with constant pitch and alternating polarity said row having an interruption situated at a transition between adjacent carts. A maximum number of coils in the stator may thereby be active at the same time, when driving the conveyor.

Abstract: A mechanical arrangement for moving workpieces and/or processing remnants from processing of a workpiece comprises a load carrier and a load carrier drive. Part of the load carrier drive is formed by a rigid chain which is acted upon by a chain driving wheel supported on the load carrier. Owing to that action, the chain driving wheel takes the load carrier with it to a target position. In the process, the chain driving wheel moves together with the load carrier relative to a chain abutment against which the rigid chain is braced. Systems for processing workpieces are provided, which make use of a mechanical arrangement of the above-mentioned kind.

Abstract: A moving device comprises at least a first element which is movable in a direction of movement by means of a drive unit, which first element at least comprises at least one first magnetic part. The moving device further comprises a second element, with respect to which the first element is movable at least from at least one operative position spaced from the second element to a rest position near the second element. The second element comprises at least one second magnetic part, which is polarized in a polarization direction opposed to the polarization direction of the first magnetic part. The polarization directions extend transversely to the direction of movement and also transversely to surfaces of the first and second elements that are positioned opposite each other in the rest position.

Abstract: A transfer apparatus includes a primary part, and at least one first and one second secondary part, which are each magnetically coupled to the primary part for drive purposes. A regulation device is provided for regulation of a drive of the secondary parts. The regulation device can regulate the drive of the first secondary part in a first zone of the primary part in accordance with a first regulation rule, and can regulate the drive of the second secondary part in a second zone of the primary part in accordance with a second regulation rule. The first and second regulation rules differ hereby from one another. The first zone is separated from the second zone by a boundary which can be varied dynamically by the regulation device.

Abstract: A substrate transport device includes a chamber, a rotary wheel, a first magnet, a carrier, and a second magnet. The rotary wheel is disposed outside the chamber. The first magnet is disposed on the rotary wheel. The carrier is disposed in the chamber. The second magnet is disposed on the carrier.

Abstract: A conveyor system has an elongated guide defining a closed transport path extending through a plurality of treatment stations and a plurality of carriers movable on the guide along the path and each capable of holding a respective workpiece. At least one magnet is provided on each carrier, and an annular row of individually energizeable electromagnets extends along the path and is capable of exerting force on the magnets of the carriers so as to displace the respective carriers along the path. A plurality of sensors spaced along the path detect the carriers and generate outputs indicating positions and movement of the carriers along the path. At least some of the electromagnets at least intermittently form some of the sensors.

Abstract: A sheet conveyor includes a conveyor belt that conveys a sheet material while holding the sheet material by attraction with an electric force, and a platen that slidably supports a bottom surface of the conveyor belt so as to maintain flatness of a predetermined region of the conveyor belt. In response to the electric force, an attractive force for attracting the conveyor belt to the platen is generated. The platen is shaped such that a surface of the platen that is in contact with the conveyor belt has a width that increases gradually from an upstream side of the platen towards a downstream side thereof in a conveying direction of the conveyor belt.

Abstract: A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.

Abstract: A transport system for conveying sheet material along a feed path. The transport system includes an electro-dynamic propulsion system for moving sheet material, or a stacked collation of sheet material, along a support deck which defines the feed path. More specifically, the electro-dynamic propulsion system includes at least one guideway and a ferromagnetic element disposed internally of the guideway. The guideway includes a magnetic coil to produce a variable magnetic field. By varying the flux density and polarity of the magnetic field the ferromagnetic element may be propelled within the guideway. An abutment member is coupled to the ferromagnetic element, extends through the elongate opening of the support deck and engages an edge of sheet material. A processor is operative to control the electro-dynamic propulsion system and, accordingly, the rate of travel and position of the sheet material along the feed path.

Abstract: A magnetic sample rack adapted to support liquid containers is urged along a surface by means of a magnetic conveyor system located beneath the surface. The magnetic conveyor system comprises a plurality of magnetic housings driven by a belt, the magnetic housings including a magnet slideably contained in a closed upper cavity. Magnetic forces emanating from the magnet overcome frictional resistive forces between the sample racks and the operating surface and move the sample racks along input and output lanes defined in the operating surface. Abrupt movements of the sample racks are eliminated because the housing magnet slides smoothly towards the sample rack, secures the sample rack, and pulls the rack along the operating surface as the housings are moved at a steady rate by the belt.