Abstract: A positioning control system is used to control the stoppage of a conveyed article stably and with good repeatability with a magnetic conveyor system element on the receiving side when a conveyed article is passed between magnetic conveyor device elements in a noncontacting magnetic conveyor system configured from at least two magnetic conveyor system elements. The system comprises two independently operating magnetic conveyor system elements, and is provided with drive shafts 18A-18C, each of which has helical magnetic poles at its surface, and a guide path 14 along which a carrier 13 travels, and the carrier is equipped with magnetic poles of equal pitch to the pitch of the helical magnetic poles. When the rotary shafts rotate, the carrier moves over the guide path by a magnetic coupling action and is passed between the magnetic conveyor system elements.

Abstract: An object levitating apparatus, an object transporting apparatus equipped with said object levitating apparatus, and an object levitating bearing as well as an object levitating process and object transporting process are described which, simultaneous to not placing restrictions on the material and so forth of the objects handled, are able to handle objects having relatively large weights and dimensions, while also being compact in size, inexpensive, preferable in terms of safety and so forth, and easy to control. The above effects are obtained by exciting a vibrator and levitating, transporting or bearing an object above the surface of the vibrator by the radiation pressure of the sound waves of the vibrator.

Abstract: To provide a magnetic transfer system capable of smoothly delivering a carrier between chambers by providing a independently-rotating carrier-feed driving shaft for each chamber without using a synchronous control mechanism and used for a semiconductor fabrication equipment or the like provided with a plurality of chambers. The magnetic transfer system is provided with a rotational driving member which is divided into two portions serving as a fixed driving shaft and a movable driving shaft in the axial direction and in which the fixed driving shaft is secured to a shaft core member and the movable driving shaft is set to the shaft core member so as to be limited in the rotational direction but so as to be freely movable in the axial direction at a certain width, and spiral magnetic coupling sections are formed on the surface of each driving shaft at the same pitch.

Abstract: A hollow guide rail 10 defining a pneumatic cylinder tube which is made up of multiple tubular members 16 connected in end to end fashion. Each tubular member 16 has a reinforcing rib 17 extending between its opposite ends, a rib-less part 24 formed on the tubular member 16 near each of its longitudinal ends by cutting away a part of the reinforcing rib 17, and a coupling rib 25 defined by the portion of the reinforcing rib 17 which remains between each rib-less portion 24 and the nearest longitudinal end of the tubular member 16 after the portions of the reinforcing rib 17 have been cut away. The tubular members 16 are connected to each other by fastening the coupling ribs 25 of adjacent tubular members 16 together with connecting plates 33 fitted over the coupling ribs and nuts and bolts 34.

Abstract: A magnetic conveyor system for transporting test samples in tubes disposed in a sample rack having a magnetic or magnetically attractive region is described. The magnetic conveyor system includes a drive system, a magnet coupled to the drive system and movable in response to the drive system and a tray having a first surface adapted to receive the sample rack. The magnet is spaced a predetermined distance from the first surface of the tray such that the magnet provides a magnetic force at the surface of the tray. The magnetic force engages the magnetically attractive region of the sample rack disposed on the tray to thereby move the sample rack along the first surface of the tray in response to movement of the drive system. When the tray reaches the end of the rack it is moved onto a processing queue tray where it is available for test purposes. A barcode reader reads a bar code on each test sample as it is placed on the process queue to identify one or more tests to perform.

Abstract: An article separating and drying system which receives container ends from an infeed station, separates and dries the container ends and the compound applied thereto in a separating and drying station, and passes the articles to an outfeed station. The article separating and drying system includes a magnetic separating assembly which imposes a magnetic field on the container ends passing thereby for similarly magnetizing the container ends causing neighboring ends to repel one another. The magnetic repulsion of neighboring ends produces gaps between the neighboring ends as they move through the separating and drying station. A conveying device is provided to controllably move the container ends through the separating and drying station. An air distribution assembly is provided to deliver air to said separating and drying station and drive the air through the gap between neighboring container ends thereby contacting the liner compound applied to the container ends and removing moisture therefrom.

Abstract: A ferromagnetic track positioning type magnetic levitation transport system which transports without contact a large variety of ferromagnetic objects without impairing the expandability of the track. The track is composed of support units 3, propulsion units 5 and guidance units 7. In the support units 3, multiple magnetic support units 15 are mounted so that they are vertically moveable. Attraction control device 19 performs levitation control which contributes to the vertical movement of the center of gravity of the part of steel plate X overlapping support unit 3 and levitation control which contributes to the rolling of the same part of steel plate X. The height of steel plate X is maintained at a specified position by controlling height adjustment mechanisms with height control system 53. Stabilization of the pitching of steel plate X accomplished using coil springs 47 and dampers 49 which are provided in support units 3.

Abstract: A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.

Abstract: A transferring device is provided for transferring an article between vacuum chambers. The transferring device comprises a cylindrical float member, and a transferring rod connected to and extending along an axial direction for supporting an article. At least one magnetic member is disposed on a peripheral surface of the float member. A cylindrical partition member having a thin, uniform circular cross-sectional thickness is disposed between the electromagnet and the float member. A support member is disposed within the partition member for reciprocating movement between opposite ends of the partition member. The support member supports at least one electromagnet and at least one sensor in spaced apart and facing relation with respect to the magnetic member for magnetically floating the float member and to drive the same in the axial direction.

Abstract: An article carrying apparatus for carrying an article by utilizing pressure of fluid such as compressed air, comprising a cylinder tube, a guide rail extending along the cylinder tube, a piston movable by an action of fluid pressure in the cylinder tube, a moving piece for carrying an article supported in such a manner that its movement is restricted in all directions except in an axial direction by the guide rail and movable in the axial direction along the guide rail and the cylinder tube, and a magnet coupling mounted on each of the moving piece and the piston, whereby the cylinder tube and the guide rail are arranged as independent members and are connected with each other by a connecting mechanism with a degree of freedom.

Abstract: An apparatus for receiving ferromagnetic container lids from a first processing unit and for advancing the lids to a second processing unit includes a storage track having first and second magnet assemblies extending parallel to the length dimension of the storage track. The magnet assemblies have a clearance from one another corresponding to an expected outer diameter of the lids for accommodating the lids in the clearance in an orientation in which the lid plane is perpendicular to the length dimension of the storage track. The lids are adapted to be suspended in the clearance by magnetic forces generated by the first and second magnet assemblies. First and second abutments are provided at opposite ends of the storage track and can be abutted by outermost lids suspended in the clearance. A supply conveyor extends to the storage track for introducing the lids in a vertical direction into the storage track; and a removal conveyor extends from the storage track for removing a lid therefrom.

Abstract: A magnetic conveyance system uses magnetic drivers within a tube having pressurized fluid moving therethrough. The magnetic drivers have magnets mounted at an angle other than 90 degrees to the central axis of the tube. Outside of the tube, a cart has a magnet thereon and is moved by magnetic force interaction when the driver is moved by pressure of the fluid, preferably a liquid such as water. A number of balls flow in the tube and keep the magnetic drivers spaced apart. The balls also serve to push the magnetic drivers as the balls are more directly pushed by the pressure of the fluid. A water wheel is connected by gears to an index wheel and serves to keep the balls, and thus the magnetic drivers and associated carts, moving in the proper direction. The carts may be configured as model cars, trucks, and other such vehicles which move on a board having a simulated road surface with the pressurized fluid tube mounted thereunder.

Abstract: An apparatus for transporting material, such as semiconductor wafers, between process modules coupled to a chamber. The transport apparatus includes a chamber; guide rails affixed to an outer surface of the chamber; one or more material transporters each including a motorized vehicle positioned outside the chamber and movable along the guide rails, a material carrier positioned inside the chamber, and magnetic levitation means for magnetically coupling the material carrier to the motorized vehicle through a nonmagnetic wall of the chamber; and a controller that controls the position of the motorized vehicle along the guide devices to move the material carrier to desired positions within the chamber.

Abstract: A sushi restaurant sushi counter having a magnetic conveying system for transporting sushi plates around the counter to different positions.

Abstract: A process and apparatus for transporting micro-mechanical parts, for example surgical needles, on a liquid surface by holding the parts on the liquid surface on account of the surface tension of the liquid, such that a predetermined path is formed and subjecting the parts to an external force thereby transporting the parts along the predetermined path.

Abstract: A magnetic propulsion system including a plurality of specifically arranged permanent magnets and a magnetic vehicle propelled thereby along a path defined by the permanent magnets. The magnetic vehicle which is to be propelled includes a rigidly attached armature comprising several curved magnets. The propulsion system further includes two parallel walls of permanent magnets arranged so as to define the lateral sides of a vehicle path. Preferably, the walls are identical to one another except that the polarities of the magnets which define one wall are opposite from the polarities of the corresponding magnets in the opposite wall. A first wall, for example, includes a series of generally rectangular magnets, each magnet arranged with a North-to-South axis pointing longitudinally down the wall in the intended direction of vehicle travel.

Abstract: A curved belt conveyor, to be used mostly above ground and operating with any desired length, can be operated advantageously without belt band rollers so that no tumbling action can take effect upon the belt band. This makes for long service life, as well as quieter, more uniform and safer operation. Drive is accomplished either via a linear motor drive system acting laterally upon the belt band, said system consisting of magnets arranged on the running wheel carriers and the stators that are firmly integrated into the guide ducts, or where, in the guide ducts, for example, a traction chain runs that is connected correspondingly with the running wheel carriers. The side edges of the belt band are grasped via the running wheel carriers and are so connected with them that one can achieve a swing-motion connection.

Abstract: A feeding system for strip material for transporting a strip over a conveying distance of limited length, particularly in treatment plants for metal strip. The feeding system includes a transfer carriage which is guided on a rail guide. The transfer carriage has a chamber for receiving the strip and is provided with a device for temporarily holding the beginning of the strip. The transfer carriage has at both sides thereof a reversible linear motor each for driving the transfer carriage over the conveying distance.

Abstract: In a conveyer system including a tubular guide way having a curved guide way section, a magnet-mounted inner slider slidably disposed in the tubular guide way, a pressure source connected to the tubular guide way to feed the interior thereof with a pressurized air thereby to move the inner slider in and along the tubular guide way, and a magnet-mounted outer slider movably disposed on said tubular guide way. The magnet of the outer slider establishes a magnetic connection with the magnet of the inner slider so that movement of said inner slider can induce movement of the outer slider in the same direction. In order to smooth the movement of the inner slider in the tubular guide way, the inner slider is so constructed as to be flexed along its longitudinal axis when an external force is applied thereto.

Abstract: A spiral magnetic linear translating mechanism for use with a wafer processing system which includes a plurality of evacuatable housings connected in a series to form a processing line comprises at least one wafer support structure which is mounted to move on a track through the housings along the processing line. The structure includes a base disposed proximate a wall of the housing and includes a plurality of magnetic thread segments extending thereon to face the wall. Outside of the housing, a cylindrical shaft is mounted proximate the wall. An elongated magnetic drive with successive sections is wound spirally around the shaft to rotate with the shaft so that the sections of the drive face the wall opposite the thread segments.

Abstract: An alternating current magnetic levitation transport system transporting a floating body made of conductive paramagnetic or nonmagnetic metallic material being levitated over alternating current electromagnets by making use of repulsion of an alternating electromagnetic field, comprises a tubular passage provided over the alternating current electromagnets which are spatially cut off from the outside wherein the floating body is levitated and transported. A cooling system made of a conjoined body of a thermoelectric cooling thermomodule and a liquid-cooled heat exchanger is provided in the transport system in contact with said tubular passage. This system can be favorably used in a clean environment where dust generation has to be avoided and the system can thereby provide more efficient transportation.

Abstract: A tube transport assembly is provided for individually transporting tubes of the type onto which yarn is wound on a textile machine. The tube transport assembly includes magnetic components for guiding and transporting the tube support members along a transport path by magnetic interaction with ferromagnetic portions of the tube support members. The magnetic components can be configured as electromagnets or as permanent magnets. The transport path includes a junction at which the tube support members can be individually branched onto a branch path and a magnetic component is positioned adjacent the junction for selectively magnetically engaging the tube support members to guide the tube support members along to selected branch paths. A vertical transport component includes magnetically active carrier members mounted on an endless belt and is operable to magnetically engage and carry the tube support members vertically.

Abstract: In a passenger conveyor, in order to reduce installation dimensions and, more particularly, a height of the passenger conveyor, the passenger conveyor is constructed to be driven by a linear motor, with stators and moving members of the linear motor being formed such that surfaces thereof facing each other are located in horizontal planes and generated magnetic flux of the stators is perpendicular to the facing surfaces. The moving members are mounted on the respective treadboards.

Abstract: A conveyor for conveying a workpiece in a vacuum chamber includes a floating body having a conveying rod, a pair of magnetic bearing portions disposed in a moving direction of the floating body and supporting the floating body solely by magnetic forces, and a non-contact driving motor portion for directly reciprocating the floating body. The floating body is directly reciprocated by a linear pulse motor. The linear pulse motor comprises a motor main body and a cog portion, and the motor main body is interposed between a pair of magnetic bearing portions. The cog portion is disposed in a longitudinal or axial direction of the outer peripheral surface of the floating body and coacts with the motor main body to reciprocate the floating body.

Abstract: A feeding system for strip material for transporting a strip over a conveying distance of limited length, particularly in treatment plants for metal strip. The feeding system includes a transfer carriage which is guided on a rail guide. The transfer carriage has a chamber for receiving the strip and is provided with a device for temporarily holding the beginning of the strip. The transfer carriage has at both sides thereof a reversible linear motor each for driving the transfer carriage over the conveying distance.

Abstract: A transfer system includes an air table, and a linear motor cooperating with the air table to float and move a pallet. The transfer system is designed to allow for a small radius of curvature for each turning section of the air table. Ball valves of the air table are openable upon contact with a pallet to apply air under pressure to a pallet. A linear motor is adapted to move the floating pallet, and guides are provided to guide the moving floating pallet. The pallet includes a pallet body made of a light material, and an external load part made of metal. The external load part has a lower surface projecting slightly from the lower surface of the pallet body. Guides are mounted to the outer periphery of the pallet body. A linear motor secondary conductor is mounted to the lower surface of the pallet body.

Abstract: A semiconductor wafer is provided with magnetic material about the periphery for magnetically clamping the wafer on a seating gasket at the processing station. The seating gasket is annular for peripherally supporting the wafer. An electro-magnet establishes a peripheral station magnetic field which attracts the wafer magnetic material to form the clamp. The station magnetic field may by reversed to levitate the wafer onto and off of the seating gasket.

Abstract: A control system in a goods assorting apparatus whereby the moving state of an assorting carrier by the linear motor driving system is detected by a group of photoelectric switches which are arranged at regular intervals in each section of a reaction plate for detection of the speed of the assorting carrier and issuance of synchronizing signals. This control device ensures accurate dividing of goods into the specified assorting destination.

Abstract: A tube transport assembly is provided for individually transporting tubes of the type onto which yarn is wound on a textile machine. The tube transport assembly includes magnetic components for guiding and transporting the tube support members along a transport path by magnetic interaction with ferromagnetic portions of the tube support members. The magnetic components can be configured as electromagnets or as permanent magnets. The transport path includes a junction at which the tube support members can be individually branched onto a branch path and a magnetic component is positioned adjacent the junction for selectively magnetically engaging the tube support members to guide the tube support members along to selected branch paths. A vertical transport component includes magnetically active carrier members mounted on an endless belt and is operable to magnetically engage and carry the tube support members vertically.

Abstract: A pallet changer includes at least one pallet (4, 14) for holding a workpiece (5, 15); a first guide (41) for guiding the pallet (4, 14); a first support (2) for supporting the first guide (41); a second guide (51) for guiding the pallet (4, 14); a second support (30) for supporting the second guide (51); a first linear motor (40) associated with the first guide (41); a second linear motor (50) associated with the second guide (51). The pallet (4, 14) is made of conductive material so as to serve as a secondary conductor for the first linear motor (40) and the second linear motor (50) for performing changing of the pallet (4, 14) between the first linear motor (40) and the second linear motor (50) along a desired direction (Y).

Abstract: The present invention relates to a magnetic levitating transport system for transporting a levitating body composed of conductive paramagnetic or non-magnetic metal above electromagnet arrays by generating an alternating magnetic field in a pair of parallel electromagnet arrays.The dimensions of the levitating body are expressed in relation to dimensions of the electromagnet arrays, as well as, other dimensions of the levitating body. The specific symmetrical shape, having a flat underside, allows the levitating body to manoeuvre a curve having a large curvature. In addition, perpendicular direction changes are effected using transportation passages.

Abstract: A conveyor has an endless belt spanned over upstream and downstream rollers and having upper and lower stretches. The belt has an outer surface adapted to carry a load in the upper stretch and a lower surface turned inward. Permanent magnets are fixed to the inner surface of the belt and a linear-motor stator is provided underneath the upper stretch and juxtaposed with the permanent magnets thereof. The stator and magnets together form a linear motor for advancing the upper stretch downstream. An array of such permanent magnets is imbedded in the lower surface of the belt spaced apart to permit the belt to flex.

Abstract: A vacuum processing apparatus comprises a carrying body for holding a glass plate thereon, a pair of elongated stationary members extended in a vacuum chamber in which processing stages for forming films on the glass plate by a vapor deposition method are provided, a linear motor transportation device provided at one of the stationary members, and a pair of movable members provided at both sides of the carrying body so that the movable members are moved along the stationary members in a non-contacting state by the action of the linear motor device.

Abstract: The improved self-cleaning magnetic separator includes a tube and a conveying flight spiralled about the tube. The separator has a magnetic material collecting portion, a magnetic material discharge portion and a bar-like magnet providing a lobe-like magnetic field. The field is of generally uniform strength along the material collecting portion and diminishes in strength along the discharge portion. In a highly preferred arrangement, the magnet is stationary and the tube and flight rotate with respect to it. Because the magnetic material is "trapped" by the stationary field, such rotation causes the magnetic material to be urged by the flight from the collecting portion to the discharge portion. The field, of diminished strength in the discharge portion, permits magnetic material to fall away from the discharge portion.

Abstract: An AC magnetic floating apparatus for floating and conveying a conductive floating body of paramagnetic or nonmagnetic metallic material above a line of AC electromagnets, includes a single-phase AC current source having a first frequency for floating the floating body, a three-phase AC current source having a second frequency for conveying the floating body, an adder for adding AC current from the two current source and a supply circuit for supplying the added Ac currents to the line of AC electromagnets. The floating body can be stopped at a desired position exactly with efficient conveyance.

Abstract: An electromagnetically driven conveyor apparatus has an endless enclosure which is made of a non-magnetic material and which has an interior surface which defines an enclosed channel. Within the channel are a plurality of channel partitioning elements which have a magnetic core and which extend to edges which are slidably fitted against the interior surface of the channel enclosure. A prolongation is positioned between each partitioning element for spacing apart each successive partitioning element. At least two electromagnetic drive units, which movably reciprocate between two positions, are positioned adjacent an outside surface of the enclosure to effect transport of the partitioning elements. Infeed and outfeed units are associated with the channel enclosure for, respectively, introducing product to be conveyed into the channel and removing conveyed product from the channel.

Abstract: A conveyor with linear motors provided for each working station of the transporting line having plural stations. A controller which controls working of two linear motors when two linear motors convey articles between adjoining stations is provided for every two adjoining stations. The controller is provided with a linear motor controller which controls linear motors for transportation and a sequence controller and a station controller which control the transporting line through the medium of the linear motor controller.

Abstract: A precision magnetic manipulator for use in positioning targets, and the like, within a vacuum chamber, employs separate mechanisms for linear and rotational motion and makes them substantially independent. Ball or roller style bearings support a square, linear shaft within a housing, at least one set of bearings being at the point at which the shaft exits the housing, and another set being within the housing along the route of travel of the linear shaft, so that the shaft is fully being supported over the entire travel length. A magnet carriage supporting high-strength magnets, one system being optimized for rotational motion and the other being optimized for linear motion, couples to magnet followers within the housing, thereby providing rotational motion and linear motion which can be used in combination or separately, giving great freedom of movement within the vacuum chamber.

Abstract: A conveyor has an endless belt spanned over upstream and downstream rollers and having upper and lower stretches. The belt has an outer surface adapted to carry a load in the upper stretch and a lower surface turned inward. Permanent magnets are fixed to the inner surface of the belt and a linear-motor stator is provided underneath the upper stretch and juxtaposed with the permanent magnets thereof. The stator and magnets together form a linear motor for advancing the upper stretch downstream. An array of such permanent magnets is imbedded in the lower surface of the belt spaced apart to permit the belt to flex.

Abstract: A vacuum processing apparatus comprises a carrying body for holding a glass plate thereon, a pair of elongated stationary members extended in a vacuum chamber in which processing stages for forming films on the glass plate by a vapor deposition method are provided, a linear motor transportation device provided at one of the stationary members, and a pair of movable members provided at both sides of the carrying body so that the movable members are moved along the stationary members in a non-contacting state by the action of the linear motor device.

Abstract: A part supply arrangement which includes a part transporting table device and a part feeding table device of an automatic part mounting unit which are respectively constituted by first and second stationary portions of a brushless DC linear motor, a carrier device on which a part unit to be transported is placed, and which is constituted by a movable portion of the brushless DC linear motor so as to be transported along a transport path, and a change-over device for changing-over connection of the stationary portions with respect to the transport path for the carrier device.

Abstract: This conveyor apparatus, when conveying articles between adjoining stations, under the control of the control device on the basis of conveying state conveyance is carried out by driving by both the linear motor unit and the servomotor unit in at least one of the low speed regions (acceleration region at the initial stage of conveyance and deceleration region at the last stage of conveyance) and by driving by the servomotor unit in the intermediate region at the intermediate stage of conveyance. Therefore, conveyance in the low speed region is assisted by the linear motor unit which generates large thrust, with the result that acceleration and deceleration in the low speed region are enhanced effectively and no deviation is caused at each speed change point by the servomotor unit of high positioning precision.

Abstract: Apparatus and method for producing a novel drawn film by propelling individual carriages along opposed loops from a first speed abutted in stacks in carriage collection sections to a second speed space apart in a drawing section of a tenter frame and to a third speed in stack forming sections where the carriages return to the first speed in the stacks. First primaries positioned adjacent one part of each loop develop electromagnetic waves for engaging synchronous secondaries attached to active carriages to provide controlled spacing of such carriages, and second primaries adjacent another part of the loop develop other electromagnetic waves for engaging hysteresis secondaries attached to active and to passive carriages to provide controlled abutting of the carriages.

Abstract: A system and method of transporting a sheet along a sheet path with electrostatic forces by applying corona charges to the sheet in pulses from high voltage corona generating electrodes in plural arrays extending along at least one side of the sheet path and subjecting the charged sheet to an electrical field pattern, defined by unevenly opposing electrodes spaced on the opposite side of the sheet path to provide an electrostatic force component acting on the charged sheet to move the sheet along the sheet path. The unevenly opposing electrodes may include grounded electrodes adjacent the downstream end of each array and commonly biased electrodes adjacent the upstream end of each array. Three different embodiments are illustrated.

Abstract: This invention provides a three-dimensional conveyance system for automatically conveying card, chit, medicine or the like from one position to other position in a general hospital or the like. Conveyance in each of stories is carried out in accordance with a linear induction motor system which is effective for conveying article accommodated in a container case while the latter is carried on a moving body. The adjacent stories are connected to one another with the use of suitable vertical conveyance device by which container cases can be conveyed therebetween. Further, this invention provides a container case usable for the conveyance system includes a pair of guide rails and a flexible lid and by sliding the lid along the side wall surfaces of the housing of the container case, the upper open end of the container case can be opened or closed. The container case is provided with a locking mechanism in order to assure that the lid is kept in the closed state.

Abstract: A conveyor for use in a room with a high degree of cleanness and which can convey wafers one by one stably, without generation of dust. The conveyor has vehicles having a slit in the surface on which a wafer can be placed, permanent magnets provided on the undersurface of the vehicle, and a magnetic fluid interposed between the permanent magnets and a transporting course for floating the vehicle. By moving the vehicle along the transporting course by linear motors or by driving devices of the rope trolley type, wafers are conveyed one by one on the vehicle.

Abstract: A wafer transporter comprising a plurality of plane electrodes which are horizontally coplanar with each other. The plane electrodes face the wafer to be transported. A plurality of air nozzles are provided through the electrodes, and air is blown from the nozzles perpendicularly toward the wafer surface. A voltage is applied between the electrodes facing the wafer. The applied voltage is divided by the capacitances between the wafer which is electrically conductive, and the electrodes, thus the wafer is attracted vertically toward the electrode, and is maintained without friction by the balance of the repulsive force of the air blowing and the attractive electrostatic force. The divided voltages become unequal due to the difference of the wafer area facing respective electrodes. This voltage difference produces a horizontal force which moves the wafer in a horizontal direction. The wafer is forced to stay at a balancing point where the induced voltages are equal.

Abstract: An improved runner for use with a sailrail hydrostatic bearing levitation system is disclosed. The runner uses a substantially solid core having a degree of flexibility in a vertical plane, a thin pad of flexible, compliant material covering at least the transversely convex lower surface of the core, and an outer flexible, compliant cover enclosing the pad and the core. In another embodiment there is pad material on the upper surface of the core as well. The runner can be secured to a pallet and provides specific advantages over prior art runners which had a larger profile, were more expensive and were not as efficient as the low profile runner of this invention.

Abstract: A system for propelling individual carriages along an endless path from a first speed abutted in a stack in a carriage collection section, to a second speed spaced apart in an operational section, and to a third speed in a stack-forming section where the carriages return to the first speed in the stack. Novel carriages are propelled by a linear motor wherein each carriage has attached a synchronous and a hysteresis secondary. A first primary positioned adjacent one part of the path develops electromagnetic waves for engaging the synchronous secondaries to provide controlled spacing of the carriages, and a second primary adjacent another part of the path develops other electromagnetic waves for engaging the hysteresis secondaries to provide controlled abutting of the carriages.

Abstract: In an electronic component mounting apparatus comprises a component feeding section including a feeding table unit loaded with several types of electronic components which feeding table unit is adapted to laterally reciprocate on a base, and stopping at a predetermined position thereby to feed the components continuously to a transfer mechanism, the transfer mechanism for absorbing the electronic components and mounting them on a board on an X-Y table on the other side, the X-Y table fixing and stopping the board to a predetermined position, and a board transport section for transporting the board onto the X-Y table for delivering the board having the electronic components mounted thereon, a component feeding apparatus wherein the component feeding table unit of the component feeding section is divided into a plurality of feeding tables each adapted to be moved individually on a straight line by a drive mechanism, the apparatus further comprising means for moving the table to a predetermined position in oppos