Abstract: This is an electrolytic apparatus and process for the production of Hypochlorous Acid (HClO) and Sodium Hydroxide (NaOH) in a closed-loop arrangement. A brine solution in an electrolyzer cell is subjected to an electric current, causing HClO and/or NaOH to be produced in water circulated through the cell. The produced solution is recirculated through the cell as its chemical properties are monitored by a sensor, connected by a controller which controls a recirculating pump and the electric current, until the sensor indicates that the concentration of the solution has reached a desired value, and the controller stops the process.

Abstract: The method for obtaining copper powders and nanopowders from industrial electrolytes including waste industrial electrolytes through electrochemical deposition of metallic copper on a cathode consists in using potentiostatic pulse electrolysis without the current direction change or with the current direction change, using the cathode potential value close to the plateau or on the plateau of the current voltage curve on which the plateau of the current potential range is from ?0.2 V÷?1 V, and a moveable or static ultramicroelectrode or an array of ultramicroelectrodes made of gold, platinum or stainless steel wire or foil is used as a cathode, whereas metallic copper is used as an anode and the process is carried out at temperature from 18-60° C., and the electrolysis lasts from 0.005 to 60 s. Said method can be used to obtain nanopowders and powders characterised by particle structure and dimension repeatability and purity from 99%+ to 99.

Abstract: There is described a method for ensuring and monitoring electrolyzer safety and performances in a manufacturing process which uses at least one electrolyzing cell containing at least one cathode and at least one anode separated by a membrane, comprising the step of: determining a safe single voltage operation range depending of the current and corresponding to the normally working electrolyzing cell; determining a reference voltage deviation depending on the time derivation of the current; measuring the voltage over time at the terminals of the electrolyzing cell; determining the measured voltage deviation by calculating the time derivative of the measured voltage; comparing the measured voltage to the safe single voltage operation range and the measured voltage deviation to the reference voltage deviation over time; stopping the manufacturing process when the measured voltage is outside the safe single voltage operation range or the difference between the measured voltage deviation and the reference voltage

Abstract: A plating apparatus includes a plating bath configured to perform plating processing of a substrate with a plating solution including an inorganic constituent and an organic constituent introduced into the plating bath, a chemical supplying unit configured to supply each chemical of the inorganic constituent and the organic constituent, an electrode configured to dispose in the plating solution and the electrode configured to selectively adsorb a by-product produced from the organic constituent, and an electric current applying unit configured to apply a predetermined electric current to the electrode.

Abstract: A system is submitted here that permits superimposing an alternating current in the process of electrolytic refining of metals based on the use of power semiconductors without requiring an external source and which minimizes the utilization of passive elements, achieving a high efficiency solution applicable to high power industrial processes. The invention consists of the division of the cells involved in the metals electrolysis process in two groups of cells (3a) and 3b, both comprising a similar number of anode-cathode pairings, and with both groups linked by a common point for electrical connection (6), and interconnected by means of a bidirectional power converter (7). Said power converter (7) is connected to the common point for electrical connection 6 of the groups of cells (3a, 3b) and to the other two connection points of each group of cells, so that its operation permits transferring power from one group to the other.

Abstract: A non-cylindrical electrolytic cell structure for hydrolyzing water from a saline solution into a plurality of mixed oxidant solutions is disclosed.

Abstract: Methods, systems, and apparatus for plating a metal onto a work piece with a plating solution having a low oxygen concentration are described. In one aspect, a method includes reducing an oxygen concentration of a plating solution. The plating solution includes about 10 parts per million or less of an accelerator and about 300 parts per million or less of a suppressor. After reducing the oxygen concentration of the plating solution, a wafer substrate is contacted with the plating solution in a plating cell. The oxygen concentration of the plating solution in the plating cell is about 1 part per million or less. A metal is then electroplated onto the wafer substrate in the plating cell.

Abstract: An apparatus and method for simultaneously electroplating at least two parts in a series electrical configuration in an electroplating system using a shared electrolyte with excellent consistency in thickness profiles, coating weights and coating microstructure. Parts in high volume and at low capital and operating cost are produced as coatings or in free-standing form.

Abstract: An integrated water treatment system for sanitizing the water in a water system and reducing scaling includes an electrolytic cell through which water is passed. An electronic control system is coupled to the electrolytic cell, to provide a drive current to the cell to generate a sanitizer by electrolysis. The control system applies a variable frequency alternating voltage drive to said cell to reduce scaling build-up in the system.

Abstract: A cleaning device includes a cleaning solution tank filled to a predetermined height with an electrolyte solution, a negative electrode provided inside the cleaning solution tank, a metal jig mounted with a metal mask used to manufacture an organic light emitting diode (OLED) display to one side for guiding the metal mask to be connected to the negative electrode, positive electrodes installed at predetermined intervals inside the cleaning solution tank with along with a metal mask, and a rectifying device electrically connected to the negative electrode and the positive electrodes.

Abstract: The invention provides a process for producing chlorine, alkaline metal hydroxide, and hydrogen which comprises the following steps: (a) preparing a brine by dissolving an alkaline metal chloride source in water; (b) removing alkaline precipitates from the brine prepared in step (a) in the presence of hydrogen peroxide by means of a filter of active carbon, and recovering the resulting brine; (c) subjecting at least part of the resulting brine as obtained in step (b) to an ion-exchange step; (d) subjecting at least part of the brine as obtained in step (c) to a membrane electrolysis step; (e) recovering at least part of the chlorine, alkaline metal hydroxide, hydrogen, and brine as obtained in step (d); (f) subjecting at least part of the brine as recovered in step (e) to a dechlorination step; and (g) recycling at least part of the dechlorinated brine obtained in step (f) to step (a).

Abstract: An automated self-propelled pool cleaner having a housing, a water pump for moving water through the housing, drive means for moving the pool cleaner over the surface of the salt water pool to be cleaned, and an integral electrochemical chlorine generator mounted in the housing, includes a processor/controller that is programmed to activate the chlorine generator, the pump and drive means in predetermined operational sequences that minimize wear and tear on the water pump and drive means, while at the same time distribute and maintain a safe level of sanitizing chlorine in the pool, to thereby obviate the need for an in-line chlorinator or other chemical additive treatments; an optional automated sensor device can be provided to activate a secondary maintenance program which enables the pool cleaner to operate over prolonged periods of time as the sole means for filtering and sanitizing the pool water.

Abstract: A process for forming a porous metal oxide or metalloid oxide material, the process including: providing an anodic substrate including a metal or metalloid substrate; providing a cathodic substrate; contacting the anodic substrate and the cathodic substrate with an acid electrolyte to form an electrochemical cell; applying an electrical signal to the electrochemical cell; and forming shaped pores in the metal or metalloid substrate by: (c) time varying the applied voltage of the electrical signal to provide a voltage cycle having a minimum voltage period during which a minimum voltage is applied, a maximum voltage period during which a maximum voltage is applied, and a transition period between the minimum voltage period and the maximum voltage period, wherein the voltage is progressively increased from the minimum voltage to the maximum voltage during the transition period, or (d) time varying the current of the electrical signal to provide a current cycle having a minimum current period during which a mi

Abstract: Device and method suitable for the electrochemical processing of an object. The device is provided at least with a chamber for accommodating an electrolyte, means for supporting the object to be processed in this chamber, electrodes arranged in this chamber, and control means for applying an electric current between the object to be processed and the electrodes.

Abstract: A hydrogen generator system (1) for a hydrogen powered unit or user (3), such as for example a catalytic hydrogen burner or a fuel cell, includes an electrolyzer (2) for the electrolysis of distilled water, producing hydrogen and oxygen, provided with a demineralizer device (5) and an A/C transformer/converter unit (7) for supplying electrical power for the electrolysis process and, on the outlet side, a device for purifying the hydrogen produced, such system (1) further includes: a device (10) for recovering the heat generated by the electrolysis process and/or a device (17) for storing the hydrogen produced, such hydrogen generator system (1) is accommodated in a casing (20) which has—externally—inlet and outlet connection fittings.

Abstract: A chlorine-generating apparatus is herein disclosed which uses softened household water and salt. The apparatus includes a freestanding brine tank to hold salt and softened household water. The brine tank includes a submerged chlorine-generating cell, an improved chlorine-generating cell container, and a cell-cleaning reservoir. The brine tank also includes a precipitation tank to help remove minerals from the incoming household water. The chlorine-generating apparatus generates sodium hypochlorite, sodium hydroxide, as well as other sanitizing chemicals. The chlorine-generating apparatus also incorporates an improved method for controlling pH. A water-cooled power supply independently delivers power to the chlorine-generating cell.

Abstract: A system for producing rugate tags comprises a processor and an etcher. The processor is configured to determine an identifying data value. The etcher is for producing an identifier. The identifier comprises a rugate phase tag.

Abstract: Disclosed is a system and method for generating time variant and invariant electric fields (E-fields) for various applications. Generating the E-field utilizes high impedance dielectric materials having a collection of three imperative material properties: high permittivity (?), high volume resistivity (?) and high maximum allowable E-field stress (?) and physical geometries that take advantage of the manner in which E-fields are divided or distributed in series capacitance networks. The generated E-field can act upon a subject material, including a gas, liquid or solid, wherein the material is stationary or in motion. The method allows an E-field of given intensity to be set up in the subject material with a significantly lower applied voltage ?a, or conversely, a significantly higher E-field intensity with a given applied voltage ?a.

Abstract: An electrophoretic dip coating plant comprises at least one dip tank, which is filled with a coating fluid. The objects which are to be coated are carried by means of a conveyor system through the coating fluid located in the dip tank and are then in electrical contact with a bus bar arrangement comprising an input and/or output region and a main region. The main region of the bus bar arrangement is connected to one terminal of a d.c. voltage supply unit. The other terminal of this d.c. voltage supply unit is electrically connected to at least one electrode which is immersed in the coating fluid in the dip tank. In order to enable the voltages which are applied to the adjacent regions of the bus bar arrangement to be regulated independently of one another, yet still to manage with a single d.c.

Abstract: In order to provide an electrocoating plant for coating workpieces, in particular vehicle bodies, comprising at least one immersion bath, in which at least one electrode is disposed, a conveying device, which brings the workpieces into the immersion bath and out of the immersion bath again, and a power supply device, which generates from an a.c. input voltage an output voltage, in particular a d.c.

Abstract: Metal recovery apparatus (20) being a diaphragm-less electrolytic cell arrangement where oxidizing reactions are achieved in a cathode cell (32) in an anode mode and reducing reactions in the anode cell (43) in a cathode mode by changing the direction of current flow. Better performance is achieved by pulsing (27b) the DC power (27b) to the electrodes and in some applications, installing plastic mesh (165) over the surface of the solution electrodes (24, 31) to reduce unwanted side reaction.

Abstract: A two-in-one copper chloride/copper bromide disinfector and a method of controlling the same. In operation, when copper is released, the positive and negative electrodes of a copper billet are periodically reversed, while the positive and negative electrodes of a titanium plate/graphite polar plate are in an uncharged state. When chlorine/bromine is released, the positive and negative electrodes of a titanium plate/graphite polar plate are periodically reversed, while the positive and negative electrodes of the copper billet are short-connected, then connected to the negative electrode of the titanium plate/graphite polar plate, or applied thereon with an electric voltage that is lower than the electric voltage of the negative electrode of the titanium plate/graphite polar plate. With this method, the copper billet out of operation is shorted-connected to the negative electrode of the titanium plate/graphite polar plate or connected to an electric voltage that is lower than that of the negative electrode.

Abstract: The present disclosure generally relates to techniques for magnetic electroplating or electro-deposition. Example methods may include utilizing a magnet during electro-deposition to modify kinetics of deposition of plating material on a substrate.

Abstract: This disclosure enables high-productivity fabrication of semiconductor-based separation layers (made of single layer or multi-layer porous semiconductors such as porous silicon, comprising single porosity or multi-porosity layers), optical reflectors (made of multi-layer/multi-porosity porous semiconductors such as porous silicon), formation of porous semiconductor (such as porous silicon) for anti-reflection coatings, passivation layers, and multi-junction, multi-band-gap solar cells (for instance, by forming a variable band gap porous silicon emitter on a crystalline silicon thin film or wafer-based solar cell). Other applications include fabrication of MEMS separation and sacrificial layers for die detachment and MEMS device fabrication, membrane formation and shallow trench isolation (STI) porous silicon (using porous silicon formation with an optimal porosity and its subsequent oxidation).

Abstract: An anode and cathode for an electrolytic cell configured as a low inductance transmission line to enable control of an interphase at an electrode surface. The anode and cathode are coupled to a switched current source by a low inductance path that includes a parallel plate transmission line, a coaxial transmission line, or both. The switched current source provides fast switching between current sources to provide fast charging and discharging of the double-layer capacitance associated with the electrode surface so that an isotope may be selectively transported to the electrode surface for oxidation or reduction. A photon source may be used to create a population of isotope containing species within the electrolyte. An additional static magnetic field and/or an alternating current magnetic excitation source may be used to modify the composition of the population of species containing the isotope to be separated.

Abstract: A power control device (1) of a power network (2), which has a number of anodes (5) and a number of cathodes (3), of an electrochemical coating facility is disclosed, having a plurality of control modules (6), each control module (6) being configured to calculate and control a local current flow having a predetermined quantity as a function of the location and as a function of the time between an anode (5) and a cathode (3) of the power network (2).

Abstract: A plating protocol is employed to control plating of metal onto a wafer comprising a conductive seed layer. Initially, the protocol employs cathodic protection as the wafer is immersed in the plating solution. In certain embodiments, the current density of the wafer is constant during immersion. In a specific example, potentiostatic control is employed to produce a current density in the range of about 1.5 to 20 mA/cm2. The immersion step is followed by a high current pulse step. During bottom up fill inside the features of the wafer, a constant current or a current with a micropulse may be used. This protocol may protect the seed from corrosion while enhancing nucleation during the initial stages of plating.

Abstract: An atomizing apparatus (10) includes a housing (12), and a tank (40) accumulates tap water inside the housing. By electrolyzing the tap water by the electrolysis electrodes (120p, 120m), the water in the tank becomes electrolyzed water. At the first operation after a shortage of water state in the tank is detected, an initial electrolysis operating time is set to 20 minutes (step S210). In a case of not an operation after the shortage of water state but a restart of a normal operation, the initial electrolysis operating time is set to 5 minutes (step S224).

Abstract: The invention relates to an electrolysis installation for decomposing water into hydrogen and oxygen, comprising: an electrolysis stack (5); a water recirculation system supplying water to the stack, the recirculation system comprising a circuit (11, 13) and a recirculation pump (15), a first and a second separator (7, 9) for separating from the water the hydrogen and the oxygen respectively produced in the stack (5); a hydraulic supply means which supply the recirculation circuit (11, 13) with deionised water so as to compensate for the water consumed by the production of gaseous hydrogen and oxygen, and an extinguishing means for inertising the first and second separators (7, 9) when the installation is shut down, characterised by extinguishing means which comprise a first and a second relief valve (36, 23) provided on the first and second separators (7, 9) respectively, the valves being provided to relieve the pressure in the two separators simultaneously while keeping the water level inside the two separa

Abstract: A method and technical execution, for the chemical and residue-free cleaning, hygienization, disinfection and odor neutralization of surfaces, materials, and objects by means of a high-pressure cleaning device and an electrolysis generators using electrolyzed cold or warm water, with the aid of oxidative groups, characterized in that the method, in combination with high pressure and oxidative radicals produced by electrolysis from salt ion-containing water, in total group concentrations of at least 35 ppm and higher, is able to not only clean surfaces, materials, and objects, but also to disinfect them, and is able to, by means of cold oxidation, in the form of ultrafast superoxidation, to eliminate 99.9% of microorganisms such as viruses, gram-positive and gram-negative bacteria, yeasts, fungi, algae and protozoa organisms and the like, without forming resistances in the microorganisms or pathogens.

Abstract: We describe an ultra-small structure and a method of producing the same. The structures produce visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries are formed by either etching or plating from a single metal layer such that the charged particle beam will yield different visible light frequencies (i.e., different colors) using different ones of the rows.

Abstract: The present invention provides a signal generator device for generating an electrical signal for use in an electrolysis device. The signal comprises a waveform with a voltage, a duty cycle, and a frequency. These waveform parameters may be varied based on data received from a plurality of sensors. The signal generator may generate a second electrical signal superimposed with the first electrical signal.

Abstract: An electromachining system is described. The electromachining system includes a computer numerical controller (CNC) device and an electromachining controller device coupled to the CNC device and a power supply. The electromachining system also includes an electromachining tool coupled to the CNC device and the power supply. The electromachining controller device is configured to control operation of the electromachining tool and the CNC device is configured to position the electromachining tool relative to a workpiece.

Abstract: Multilayer structures are electrochemically fabricated via depositions of one or more materials in a plurality of overlaying and adhered layers. Selectivity of deposition is obtained via a multi-cell controllable mask. Alternatively, net selective deposition is obtained via a blanket deposition and a selective removal of material via a multi-cell mask. Individual cells of the mask may contain electrodes comprising depositable material or electrodes capable of receiving etched material from a substrate. Alternatively, individual cells may include passages that allow or inhibit ion flow between a substrate and an external electrode and that include electrodes or other control elements that can be used to selectively allow or inhibit ion flow and thus inhibit significant deposition or etching. Single cell masks having a cell size that is smaller or equal to the desired deposition resolution may also be used to form structures.

Abstract: An electrochemical device comprises an electrochemical cell. The electrochemical cell comprises a composite cation-exchange member including a conductive base and a cation-exchange material in physical contact with the conductive base, a composite anion-exchange member including a conductive base and an anion-exchange material in physical contact with the conductive base; and a compartment between the composite cation-exchange and anion-exchange members. The compartment comprises an inlet for introducing a feed stream, and an outlet for exiting of an output stream out of the compartment. The electrochemical device comprises a control device configured to transmit an electrical current to the composite cation-exchange and anion-exchange members at a regeneration stage in a manner that the conductive base on the composite cation-exchange member loses electrons and the conductive base on the composite anion-exchange member gains electrons.

Abstract: An apparatus for electroplating a layer of metal onto the surface of a wafer includes an ionically resistive ionically permeable element located in close proximity of the wafer and an auxiliary cathode located between the anode and the ionically resistive ionically permeable element. The ionically resistive ionically permeable element serves to modulate ionic current at the wafer surface. The auxiliary cathode is configured to shape the current distribution from the anode. The provided configuration effectively redistributes ionic current in the plating system allowing plating of uniform metal layers and mitigating the terminal effect.

Abstract: An electrocoagulation device for removal of contaminants from a treatment stream including an elongated fluid treatment path in contact with a plurality of electrode plates, and a power supply electrically connected to the plates, wherein the device is configured so that it can provide a variety of electric field regimes to the treatment stream as it passes along the treatment path, and so that it can provide a variety of flow regimes along the fluid treatment path.

Abstract: An apparatus and method is disclosed for simultaneously electroplating at least two parts in a series electrical configuration in an electroplating system using a shared electrolyte with excellent consistency in thickness profiles, coating weights and coating microstructure. Parts in high volume and at low capital and operating cost are produced as coatings or in free-standing form.

Abstract: A method of purifying cooling water which requires the lowest maintenance and management cost without the need for a cumbersome cleaning operation for removing scale in an electrolytic purifying vessel by taking out the electrodes from the electrolytic purifying vessel, and an apparatus therefor are provided.

Abstract: It is an object of the present invention to derive the optimum operating condition parameters for plating operation accurately and efficiently. At first, a preliminary test operation is carried out under the energized condition (S12), then in light of such result, a sequential operations such as a first test operation (step S14) in which no energization is carried out for plurality of operating pattern candidates and a second test operation (step S16) under the energized condition are carried out, and then the optimum operating conditions are registered (step S18).

Abstract: An automated self-propelled pool cleaner having a housing, a water pump for moving water through the housing, drive means for moving the pool cleaner over the surface of the salt water pool to be cleaned, and an integral electrochemical chlorine generator mounted in the housing, includes a processor/controller that is programmed to activate the chlorine generator, the pump and drive means in predetermined operational sequences that minimize wear and tear on the water pump and drive means, while at the same time distribute and maintain a safe level of sanitizing chlorine in the pool, to thereby obviate the need for an in-line chlorinator or other chemical additive treatments; an optional automated sensor device can be provided to activate a secondary maintenance program which enables the pool cleaner to operate over prolonged periods of time as the sole means for filtering and sanitizing the pool water.

Abstract: An electrolytic cell generates hydrogen peroxide and includes a reservoir for storing hydrogen peroxide generated by the cell. A controller is arranged to activate the cell and introduce stored hydrogen peroxide from the reservoir to the cell. This permits the concentration of a store of hydrogen peroxide to be refreshed as required, by introducing the stored hydrogen peroxide as the electrolyte in the cell. This counteracts the natural decay of the stored hydrogen peroxide. The pH of the hydrogen peroxide is controlled so that it is below a predetermined value. It has been found that hydrogen peroxide having a low pH, close to neutral, decays much more slowly than hydrogen peroxide having a more strongly alkaline pH.

Abstract: A method and device to produce chlorine gas on demand utilizing an electrolytic process for water treatment. The electrolytic components are mounted in a substantially rectangle shaped assemblage. This design of the rectangle shape assemblage ensures that the device consistently operates at peak efficiency. The device monitors and adjusts chlorine generation for changing demands and conditions for the production of disinfected water.

Abstract: The present invention discloses an apparatus having a platen; a polishing pad disposed over the platen; a slurry dispenser disposed over the polishing pad; a cathode connected electrically to the polishing pad; a wafer carrier disposed over the polishing pad; an anode connected electrically to the wafer carrier; and a power supply connected to the anode and the cathode. The present invention further discloses a method to remove a surface layer from a wafer using a polishing pad, a slurry, and an electrical current.

Abstract: An electrolysis system (100) and method of using same is provided. In addition to an electrolysis tank (101) and a membrane (105) separating the tank into two regions, the system includes a plurality of metal members comprised of at least a first and a second metal member (121/123) contained within the first tank region and at least a third and a fourth metal member (125/127) contained within the second tank region. The system also includes a plurality of high voltage electrodes comprised of at least an anode (117) interposed between the first and second metal members and at least a cathode (115) interposed between the third and fourth metal members. The high voltage applied to the plurality of high voltage electrodes is pulsed.

Abstract: A method and apparatus for achieving high output efficiency from an electrolysis system (100) using a plurality of electrolysis cells all located within a single electrolysis tank (101) is provided. Each individual electrolysis cell includes a membrane (105-107), a plurality of low voltage electrodes comprised of at least a first and second anode (117/118; 125/126) and at least a first and second cathode (121/122; 129/130), and a plurality of high voltage electrodes comprised of at least an anode (119; 127) and a cathode (123; 131). Within each cell, the high voltage anode is interposed between the first and second low voltage anodes and the high voltage cathode is interposed between the first and second low voltage cathodes. The low voltage applied to the low voltage electrodes and the high voltage applied to the high voltage electrodes is pulsed with the pulses occurring simultaneously.

Abstract: A method and apparatus are provided for electrolyzing water for enhanced production of oxygen, hydrogen and heat by the steps of (i) providing an electrochemical cell comprising an isotopic hydrogen storage cathode, an electrically conductive anode and an ionically conducting electrolyte comprising water, and (ii) impressing a repeating sequence of voltages across the cathode and anode comprised of at least two cell voltage regimes, a first cell voltage regime consisting of a voltage sufficient to enhance cathodic absorption of hydrogen, and a second cell voltage regime consisting of at least one voltage pulse which is at least two times the voltage of the first cell voltage regime for a total duration no greater than 0.10 seconds.

Abstract: A water treatment system includes a circulation pump and a chlorine-generating electrolytic cell in fluid communication with a main body of water. When mineral deposits foul the generator, water is stagnated within the electrolytic cell and a minimal amount of a pH-reducing agent is added to remove the mineral deposits. The pH-reducing agent is admitted on a periodic timed basis or when the pH of the main body of water exceeds a predetermined threshold. Cleaning is accomplished by adding the pH-reducing agent when water in the electrolytic cell is not circulating so that the acid dwells within the electrolytic cell for a sufficient amount of time. Re-activation of circulation through the electrolytic cell causes the pH-reducing agent to enter the main body of water.

Abstract: A capacitively coupled plasma reactor comprising a processing chamber, a first electrode, a second electrode and a thermoelectric unit. The processing chamber has an upper portion with a gas inlet and a lower portion, and the upper portion is in fluid communication with the lower portion. The first electrode has a front side and a backside and is positioned at the upper portion of the processing chamber. The second electrode is positioned in the lower portion of the processing chamber and is spaced apart from the front side of the first electrode. The thermoelectric unit is positioned proximate to the backside of the first electrode and is capable of heating and cooling the first electrode.

Abstract: A method of manufacturing a semiconductor device includes measuring the reflectance at the surface of a semiconductor substrate provided with concave portions and deciding a deposition parameter that represents a deposition condition corresponding to the measured reflectance. Then, a metal film is formed on the semiconductor substrate under a condition corresponding to the deposition parameter.