Concentrically Arranged Electrodes Patents (Class 204/272)
  • Patent number: 7569304
    Abstract: A solid electrolyte fuel cell component is formed by tape casting an electrolyte layer and electrode layers to form a green tape which can be manipulated. The green tape is coiled into a form having an S-shaped central portion having oppositely-directed loops, so as to provide a first longitudinal channel presenting an anode surface and a second longitudinal channel presenting a cathode surface. After coiling, the assembly is fired to produce a solid, sintered product.
    Type: Grant
    Filed: October 18, 2002
    Date of Patent: August 4, 2009
    Assignee: The University Court of The University of St. Andrews
    Inventors: John Thomas Sirr Irvine, Frances Gwyneth Elaine Jones, Paul Alexander Connor
  • Patent number: 7563418
    Abstract: A hydrogen gas generator for jet engines includes a device that utilizes photons and a catalyst to disassociate hydrogen gas from water. The generated hydrogen gas is directed to the combustion chamber of a jet engine and combined with air therein for burning and powering the jet engine. The device is connected to a source of electric energy and pressurized water. The electric energy is supplied to an anode and a surrounding cathode. The cathode is designed to glow white-hot and emit photons and heat when an electric current is supplied thereto. The anode is fabricated from a catalytic material and is designed to become red-hot when supplied with electric energy. Water is supplied through a conduit and is converted to superheated steam, which is thermolytically decomposed to form hydrogen and oxygen.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: July 21, 2009
    Inventor: Thomas H. Sharpe
  • Publication number: 20090139856
    Abstract: A cell assembly and a vertically disposed electrode stack within the cell chamber for the electrolysis of water to produce hydrogen and oxygen upon the application of electric current to the electrodes. The cell assembly is arranged to contain an electrode stack immersed in water, the stack consisting of at least two electrodes in the form of or having the shape of quadric surfaces such as cones or cylinders. The electrodes are mounted in close concentric proximity to one another and are positioned by support posts which may also serve as electrical connections and are mounted at the base of the cell chamber and extend upwardly through the base of each electrode. A lip structure to assist in gas dispersement disposed about the upper edge of the upper electrode is also disclosed.
    Type: Application
    Filed: November 17, 2008
    Publication date: June 4, 2009
    Inventor: Edward Louis Chiarini, JR.
  • Patent number: 7520973
    Abstract: A method for the regeneration of etching solutions containing iron for the use in etching or pickling copper or copper alloys and an apparatus for carrying out the method is described. The method involves feeding the etching solution to be regenerated from the etching system into an electrolysis cell being hermetically sealed or having an anode hood (8), the electrolysis cell comprising a cathode (1), an inert anode (2), means (3) for removing the electrolytically deposited copper from the cathode and means (4) for collecting the removed copper and applying a potential to the removed copper, wherein the electrolysis cell does not have an ion exchange membrane or a diaphragm.
    Type: Grant
    Filed: June 7, 2004
    Date of Patent: April 21, 2009
    Assignee: Atotech Deutschland GmbH
    Inventors: Kai-Jens Matejat, Sven Lamprecht
  • Patent number: 7491453
    Abstract: Systems and processes for producing hydrogen using bacteria are described. One detailed process for producing hydrogen uses a system for producing hydrogen as described herein, the system including a reactor. Anodophilic bacteria are disposed within the interior of the reactor and an organic material oxidizable by an oxidizing activity of the anodophilic bacteria is introduced and incubated under oxidizing reactions conditions such that electrons are produced and transferred to the anode. A power source is activated to increase a potential between the anode and the cathode, such that electrons and protons combine to produce hydrogen gas. One system for producing hydrogen includes a reaction chamber having a wall defining an interior of the reactor and an exterior of the reaction chamber. An anode is provided which is at least partially contained within the interior of the reaction chamber and a cathode is also provided which is at least partially contained within the interior of the reaction chamber.
    Type: Grant
    Filed: July 13, 2005
    Date of Patent: February 17, 2009
    Assignees: The Penn State Research Foundation, Ion Power, Inc.
    Inventors: Bruce Logan, Stephen Grot, Thomas E. Mallouk, Hong Liu
  • Publication number: 20080257719
    Abstract: An electrolyzer includes a first electrode in the form of an inner tank formed of a material capable of being magnetized and a second electrode in the form of an outer tank formed of a material capable of being magnetized. The inner tank is nested within the outer tank. A spacer basket formed of a plastic material is disposed between the inner tank and the outer tank. The inner tank includes a positive terminal in electrical communication with a DC power source and the outer tank includes a negative terminal in electrical communication with the DC power source. A magnet for magnetizing the outer tank has a field sufficient to affect the inner tank. Electrolysis within the tank produces a flammable gas having a first hydrogen atom bonded to an oxygen atom and a second hydrogen atom bonded to the first hydrogen atom.
    Type: Application
    Filed: April 21, 2007
    Publication date: October 23, 2008
    Inventor: Ted Suratt
  • Patent number: 7396439
    Abstract: A method and apparatus for anodizing a component. The component is placed in a container having first and second seal members that seal an annular surface of the component to be anodized. The first and second seal members, the annular surface of the component, and an inner surface of the container form a reaction chamber that holds a reaction medium therein. The reaction medium is supplied to the reaction chamber through a supply passage formed in the container. The reaction medium is drained from the reaction chamber through a drain passage formed in the container.
    Type: Grant
    Filed: June 4, 2004
    Date of Patent: July 8, 2008
    Assignee: Hitachi, Ltd.
    Inventors: Masato Sasaki, Yuzuru Morioka, Sachiko Sugita, Masazumi Ishikawa
  • Patent number: 7393439
    Abstract: Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that moves workpieces to and from the processing chamber. The relative positions between positioning elements of the module are fixed so that the transport system does not need to be recalibrated when the processing chamber is removed and replaced with another processing chamber. The processing chamber includes a paddle device for agitating processing liquid at a process surface of the workpiece. The paddle device, the processing chamber, and electrodes within the processing chamber are configured to reduce the likelihood for electrical shadowing created by the paddles at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the paddles reciprocate relative to the workpiece.
    Type: Grant
    Filed: December 11, 2003
    Date of Patent: July 1, 2008
    Assignee: Semitool, Inc.
    Inventors: Paul R. McHugh, Gregory J. Wilson, Daniel J. Woodruff, Nolan Zimmerman, James J. Erickson
  • Patent number: 7393440
    Abstract: The present invention provides a system for generating hydrogen gas in an aqueous solution based electrolytic or galvanic cell wherein the cathode is made from aluminum or an aluminum alloy. In a preferred arrangement the cell is a galvanic cell and cathode is made from aluminum or aluminum alloy and the anode is made from magnesium or magnesium alloy.
    Type: Grant
    Filed: June 21, 2005
    Date of Patent: July 1, 2008
    Assignee: National Research Council of Canada
    Inventors: Debabrata Ghosh, Asoke Chandra Das Chaklader, Zhaolin Tang, Zhong Xie
  • Patent number: 7390382
    Abstract: Reactors having multiple electrodes and/or enclosed reciprocating paddles are disclosed. The reactor can include multiple electrodes spaced apart from a process location to provide virtual electrodes proximate to the process location for transferring material to or from the workpiece. A magnet may be positioned proximate to the process plane to orient magnetically sensitive material deposited on the workpiece. The electrodes may be removable from the reactor without passing them through the magnet to reduce interference between the electrodes and the magnet. The workpiece may be carried by a rotatable workpiece support to orient the workpiece for processing. At least one of the electrodes can operate as a current thief to reduce terminal effects at the periphery of the workpiece.
    Type: Grant
    Filed: December 11, 2003
    Date of Patent: June 24, 2008
    Assignee: Semitool, Inc.
    Inventors: Paul R. McHugh, Gregory J. Wilson, Daniel J. Woodruff, Nolan Zimmerman, James J. Erickson
  • Publication number: 20080121526
    Abstract: An adjustable anode assembly for a wet processing apparatus to allow selective tuning of the electrical field density distribution within a wet process chemical of the apparatus, which in turn allows the process specification or specifications to be selectively varied across the process surface of a wafer when processed by the apparatus. The adjustable anode assembly includes an anode which may be divided into several plates, at least one of which is capable of being moved from a first plane to at least a second plane.
    Type: Application
    Filed: November 27, 2006
    Publication date: May 29, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Li Hsiao, Chen-Hua Yu, Jean Wang, Lawrance Sheu
  • Patent number: 7374655
    Abstract: An electrolytic water purification system and method use provides a water filtration device with a plurality of electrolytic cells having anodes and cathodes specifically selected to remove contaminants from water. The device is capable of efficiently removing nearly all contaminants from water and is also capable of purifying the water by destroying micro-organisms which are in the water. Many minerals are removed from the purified water, and it is not necessary to add chemicals to the water during or after the purification process.
    Type: Grant
    Filed: January 10, 2005
    Date of Patent: May 20, 2008
    Assignee: Novastron
    Inventors: Gary D. Roberts, David W. Roberts
  • Patent number: 7374656
    Abstract: A combined electrochemical system for scale treatment and eradicating bacteria in water supply systems having: (a) a first electro-chemical cell including: (i) a first metallic tank for receiving a water supply and forming a cathode of the first electro-chemical cell, and (ii) a first anode, disposed within the first tank; (b) a second electro-chemical cell including: (i) a second metallic tank for receiving an effluent from the first tank and forming a cathode of the second electro-chemical cell, and (ii) a second anode, disposed within the second tank; and (c) a DC electrical supply source operatively connected to the first and the second cells, wherein the first electro-chemical cell is operative for trapping bacteria in a colloid-like structure, and the second electro-chemical cell is operative for producing a pH above 12 near the walls of the second tank, so as to form a bacteria-containing precipitate on the walls of the second tank, thereby removing the bacteria from the water supply.
    Type: Grant
    Filed: August 10, 2003
    Date of Patent: May 20, 2008
    Inventor: Gabby Elgressy
  • Patent number: 7357850
    Abstract: An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The anode array includes a plurality of ring-like anode segments which are preferably positioned in concentric, coplanar relationship with each other. The anode segments can be independently operated to create varying electrical potentials with the associated workpiece to promote uniform deposition of electroplated metal on the surface of the workpiece.
    Type: Grant
    Filed: September 3, 2002
    Date of Patent: April 15, 2008
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, Kyle M. Hanson
  • Publication number: 20080078679
    Abstract: A method for production of metal by molten-salt electrolysis of the present invention is a method for production of metal by molten-salt electrolysis which is performed by filling a molten salt of calcium chloride in an electrolysis vessel having a anode and a cathode, one of the anode or cathode is arranged surrounding the other electrode, the cathode has at least one hole communicating the inner area surrounded by the cathode with the outer area, and the molten salt flows through the communicating holes from one area including the anode (the inner area or outer area) to the other area.
    Type: Application
    Filed: October 5, 2005
    Publication date: April 3, 2008
    Applicants: TOHO TITANIUM CO., LTD., SUMITOMO TITANIUM CORPORATION
    Inventors: Masanori Yamaguchi, Yuichi Ono, Susumu Kosemura, Eiji Nishimura, Tadashi Ogasawara, Makoto Yamaguchi, Masahiko Hori, Toru Uenishi
  • Patent number: 7351314
    Abstract: Chambers, systems, and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, an electrochemical deposition chamber includes a processing unit having a first flow system configured to convey a flow of a first processing fluid to a microfeature workpiece. The chamber further includes an electrode unit having an electrode and a second flow system configured to convey a flow of a second processing fluid at least proximate to the electrode. The chamber further includes a nonporous barrier between the processing unit and the electrode unit to separate the first and second processing fluids. The nonporous barrier is configured to allow cations or anions to flow through the barrier between the first and second processing fluids.
    Type: Grant
    Filed: December 5, 2003
    Date of Patent: April 1, 2008
    Assignee: Semitool, Inc.
    Inventors: John Klocke, Kyle M Hanson
  • Patent number: 7351315
    Abstract: Chambers, systems, and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, an electrochemical deposition chamber includes a processing unit having a first flow system configured to convey a flow of a first processing fluid to a microfeature workpiece. The chamber further includes an electrode unit having a plurality of electrodes and a second flow system configured to convey a flow of a second processing fluid at least proximate to the electrodes. The chamber further includes a barrier between the processing unit and the electrode unit to separate the first and second processing fluids. The barrier can be a porous, permeable barrier or a nonporous, semipermeable barrier.
    Type: Grant
    Filed: December 5, 2003
    Date of Patent: April 1, 2008
    Assignee: Semitool, Inc.
    Inventors: John Klocke, Kyle M Hanson
  • Patent number: 7332062
    Abstract: An electroplating tool for providing a metal or metal film on a semiconductor wafer during processing thereof has a wafer chucking mechanism with a conductor or conductors associated therewith. The conductor(s) are electrically connected to a controller that applies a voltage or current applied thereto for altering the position of and/or varying the intensity of electromagnetic field lines originating from a source anode of the electroplating tool. The electromagnetic field lines originating from the source anode direct the deposition of metal from the electroplating solution to the semiconductor wafer. The conductor(s) of the wafer chucking mechanism improve and/or modulate the electromagnetic field lines of the electroplating process. This provides greater control of metal deposition during the electroplating process such that uniformity of the metal (e.g. copper) is provided across the semiconductor wafer.
    Type: Grant
    Filed: June 2, 2003
    Date of Patent: February 19, 2008
    Assignee: LSI Logic Corporation
    Inventors: Steven E. Reder, Michael J. Berman
  • Patent number: 7273535
    Abstract: A method and apparatus for plating a metal onto a substrate. The apparatus includes a fluid basin configured to contain a plating solution, an anode fluid volume positioned in a lower portion of the fluid basin, a cathode fluid volume positioned in an upper portion of the fluid basin, an ionic membrane positioned to separate the anode fluid volume from the cathode fluid volume, a plating electrode centrally positioned in the anode fluid volume, and a deplating electrode positioned adjacent the plating electrode in the anode fluid volume.
    Type: Grant
    Filed: September 17, 2003
    Date of Patent: September 25, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Nicolay Y. Kovarsky, Dmitry Lubomirsky, Yevgeniy (Eugene) Rabinovich
  • Patent number: 7252746
    Abstract: An electropolishing apparatus and method are provided for polishing stents and other medical implants. The apparatus includes a motor that rotates a roller. The roller continuously rotates the medical implant to be electropolished. One of the advantages of the apparatus and method is that marks generated around the electrical contact between the anode and the medical implant are minimized. In addition, the medical implant is polished more evenly than conventional electropolishing systems.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: August 7, 2007
    Assignee: Cook Incorporated
    Inventor: Darin G. Schaeffer
  • Patent number: 7160421
    Abstract: A facility for selecting and refining electrical parameters for processing a microelectronic workpiece in a processing chamber is described. The facility initially configures the electrical parameters in accordance with either a mathematical model of the processing chamber or experimental data derived from operating the actual processing chamber. After a workpiece is processed with the initial parameter configuration, the results are measured and a sensitivity matrix based upon the mathematical model of the processing chamber is used to select new parameters that correct for any deficiencies measured in the processing of the first workpiece. These parameters are then used in processing a second workpiece, which may be similarly measured, and the results used to further refine the parameters.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: January 9, 2007
    Assignee: Semitool, Inc.
    Inventors: Gregory J. Wilson, Paul R. McHugh, Robert A. Weaver, Thomas L. Ritzdorf
  • Patent number: 7147760
    Abstract: An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The anode array includes a plurality of ring-like anode segments which are preferably positioned in concentric, coplanar relationship with each other. The anode segments can be independently operated to create varying electrical potentials with the associated workpiece to promote uniform deposition of electroplated metal on the surface of the workpiece.
    Type: Grant
    Filed: October 27, 2004
    Date of Patent: December 12, 2006
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, Kyle M. Hanson
  • Patent number: 7056424
    Abstract: In order to regenerate permanganate solutions being utilized for the etching and roughening of plastics surfaces electrolytic methods are known. Though relatively small quantaties of by-products are produced with these methods as compared to chemical regeneration methods, large quantaties of manganese dioxide are produced when printed circuit boards are treated. In order to avoid formation of manganese dioxide during the regeneration method a novel cathode 2 has been found which is provided with a porous, electrically nonconducting layer 7 on the cathode body 3. The layer 7 preferably consists of a plastics material being resistant to acid and/or alkali.
    Type: Grant
    Filed: May 15, 2001
    Date of Patent: June 6, 2006
    Assignee: Atotech Deutschland GmbH
    Inventors: Reinhard De Boer, Sebastian Dünnebeil
  • Patent number: 7052586
    Abstract: We make particulates, especially magnetic Fe—Co alloys having high magnetic permeability, of controlled dimensions, especially those having a narrow thickness size distribution centered around a median or target thickness in the range of about 0.1–1.0 ?m, using electrodeposition typically on a smooth (polished) titanium cathode. Our preferred continuous process uses a rotating drum cathode inside a fixed anode to grow flakes and to produce them automatically by inherent instability in the deposited film. The drum preferably rotates about a substantially vertical axis. The particulates shed (slough off) into the electrolyte (because of mismatch between the cathode surface and the plated metal or alloy at the molecular level) where they are separated in a magnetic separator or other suitable device. If the flakes are soft iron or iron-cobalt alloys, the drum generally is titanium or titanium alloy.
    Type: Grant
    Filed: February 11, 2003
    Date of Patent: May 30, 2006
    Assignee: The Boeing Company
    Inventors: Glen L. Rasmussen, Micheal E. Dickson, Robert J. Miller, Mary J. Nelson, Jonathan C. Hughes, Diane C. Rawlings
  • Patent number: 6929740
    Abstract: A water purification apparatus used to prevent the formation of scale around electrodes which form part of the apparatus. The apparatus comprises at least one electrode containing a proportion of an ion-emitting electrode such as copper, silver or a copper and silver alloy and at least one electrode containing a proportion of a non-emissive metal such as titanium. The electrodes are connected to a DC power supply which has switching means to reverse the polarity of the electrodes at predetermined intervals. The apparatus ensures accurate control of disinfection and minimal equipment maintenance.
    Type: Grant
    Filed: January 14, 2003
    Date of Patent: August 16, 2005
    Assignee: T.P. Technology plc
    Inventor: John Hayes
  • Patent number: 6926819
    Abstract: In a method and an apparatus for generating a portable sterilizing water that can be easily used at, for example, hospitals, cafeterias of nursing facilities, restaurants, hair salons or homes, an electrolyzer is structured such that a tubular-shaped ferrite anode and a cathode are arranged alternately in a concentric manner with an inter-electrode distance, and integrated with a pressurizable solution container containing halogen ions and a power control apparatus so that it can be carried and operated by one hand.
    Type: Grant
    Filed: May 24, 2002
    Date of Patent: August 9, 2005
    Assignee: Omega Co. Ltd.
    Inventors: Shinichi Nakamura, Kunihiko Fukuzuka, Masaki Miyashita
  • Patent number: 6913683
    Abstract: A method for the production of pipe segments from a pipe (10) in which the pipe (10) is rotated about its longitudinal axis, while an electrode (20) is positioned in the vicinity of the outer surface (11) of the pipe (10) and electrolyte (30) is fed to the space between the pipe (10) and the electrode (20). The electrode (20) and the pipe (10) are connected to a voltage source (40), with the result that an electric current is brought about via the electrolyte (30). Thus, the pipe (10) is divided into pipe segments in an electrochemical way.
    Type: Grant
    Filed: February 13, 2001
    Date of Patent: July 5, 2005
    Assignee: Van Doorne's Transmissie B.V.
    Inventors: Cornelus Hendricus Maria Van Oirschot, Roland Theo Anton Kals, Hendrikus Van Den Boomen
  • Patent number: 6896789
    Abstract: A system for producing one or more gases for enhancing combustion in an internal combustion engine, the engine having an intake, the system comprising: an electrolysis cell, for generating one or more combustion enhancing gases under pressure; a gas conduit, for connecting the electrolysis cell to the internal combustion engine; and a flow regulator, operatively connected between the electrolysis cell and the intake of the engine, for regulating a flow of the combustion enhancing gases to the engine.
    Type: Grant
    Filed: June 3, 2002
    Date of Patent: May 24, 2005
    Assignee: Canadian Hydrogen Energy Company Limited
    Inventor: Bill Ross
  • Patent number: 6887368
    Abstract: The basic principles of the method for heavy metals electroextraction from technological solutions and wastewater includes pretreating to remove Chromium-6 and high concentrations of heavy metals and periodically treating in a six-electrode bipolar cylindrical electroreactor made of non-conducting material to achieve lower accepted levels of impurities. Six cylindrical steel electrodes form two triode stacks and are fed with three-phase alternating current of commercial frequency (50-60 Hz), which can be pulsed. Each phase of the three-phase current is connected to three electrodes of one triode stack or in parallel to two triode stacks. The parallel connection of three-phase current to two triode stacks is performed so that the same phase of the three phase current is connected in parallel with each two opposite electrodes of six electrodes located along the periphery, or with two adjacent electrodes. A bipolar stationary aluminum electrode is situated in the inter-electrode space.
    Type: Grant
    Filed: September 25, 2002
    Date of Patent: May 3, 2005
    Assignee: Ural Process Engineering Company, Ltd.
    Inventors: Aron Mikhailovich Khalemsky, Sergei Abramovich Payusov, Leonid Kelner, Jae Jo
  • Patent number: 6790324
    Abstract: An apparatus for producing orthohydrogen and/or parahydrogen. The apparatus includes a container holding water and at least one pair of closely-spaced electrodes arranged within the container and submerged in the water. A first power supply provides a particular first pulsed signal to the electrodes. A coil may also be arranged within the container and submerged in the water if the production of parahydrogen is also required. A second power supply provides a second pulsed signal to the coil through a switch to apply energy to the water. When the second power supply is disconnected from the coil by the switch and only the electrodes receive a pulsed signal, then orthohydrogen can be produced. When the second power supply is connected to the coil and both the electrodes and coil receive pulsed signals, then the first and second pulsed signals can be controlled to produce parahydrogen.
    Type: Grant
    Filed: June 25, 2002
    Date of Patent: September 14, 2004
    Assignee: Xogen Power Inc.
    Inventor: Stephen Barrie Chambers
  • Patent number: 6780293
    Abstract: A floatable sanitizer employs a plurality of electrodes to contact a body of water in order to achieve a near maintenance-free sanitizing chemical generator. In one embodiment, the sanitizing chemical is chlorine and the chlorine is generated by an electrolytic process. The electrolytic reaction may be powered by photovoltaic cells, making the apparatus self-contained and able to float freely within a body of water. In one embodiment, the energy source is channeled through a polarity-reversing module. The polarity-reversing module alternates the direction of the current generated by the photovoltaic cells at a predetermined time interval. The reversing of the polarity reduces scale build-up and prevents corrosion of the metal electrodes.
    Type: Grant
    Filed: December 21, 2001
    Date of Patent: August 24, 2004
    Inventors: Dell R. Munk, Stanley S. Munk
  • Patent number: 6776884
    Abstract: An electropolishing device having: an electrode device, which includes a positive electrode guide, a negative electrode guide, a positive electrode plate, a negative electrode plate and a negative working electrode; a clamping apparatus, which includes at least an insulated screw, an upper insulated piece and a lower insulated piece; and an insulated structure, which includes an upper insulated cover and a lower insulated cover.
    Type: Grant
    Filed: February 19, 2002
    Date of Patent: August 17, 2004
    Assignee: Industrial Technology Research Institute
    Inventors: Chun-Hung Lin, Chin-Ching Wu, Yun-Sheng Chung, Chin-Jyi Wu, Yung-Chen Peng, Yu-Chuan Tu
  • Patent number: 6773571
    Abstract: The present invention pertains to methods and apparatus for electroplating a substantially uniform layer of a metal onto a work piece having a seed layer thereon. The total current of a plating cell is distributed among a plurality of anodes in the plating cell in order to tailor the current distribution in the plating electrolyte to compensate for resistance and voltage variation across a work piece due to the seed layer. Focusing elements are used to create “virtual anodes” in proximity to the plating surface of the work piece to further control the current distribution in the electrolyte during plating.
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: August 10, 2004
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, Evan E. Patton, Brian Paul Blackman, Jonathan D. Reid, Thomas Anand Ponnuswamy, Harold D. Perry
  • Patent number: 6773570
    Abstract: A method and apparatus are described for performing both electroplating of a metal layer and planarization of the layer on a substrate. Electroplating and electroetching of metal (such as copper) are performed in a repeated sequence, followed by chemical-mechanical polishing. An electroplating solution, electroetching solution, and a non-abrasive slurry are dispensed on a polishing pad in the respective process steps. The substrate is held against the pad with a variable force in accordance with the process, so that the spacing between substrate and pad may be less during electroplating than during electroetching.
    Type: Grant
    Filed: November 14, 2002
    Date of Patent: August 10, 2004
    Assignee: International Business Machines Corporation
    Inventors: Laertis Economikos, Hariklia Deligianni, John M. Cotte, Henry J. Grabarz, Bomy Chen
  • Patent number: 6716325
    Abstract: An electrolytic cell including a plurality of electrodes arranged to define a plurality of channels between adjacent electrodes is disclosed. Each channel is in fluid communication adjacent a first end with a first adjacent channel and is in fluid communication adjacent a second end with a second adjacent channel.
    Type: Grant
    Filed: November 14, 2001
    Date of Patent: April 6, 2004
    Inventor: Malcolm Barrie Bentley
  • Patent number: 6712668
    Abstract: A pipe electropolishing system (10, 10a) for in place polishing of a pipe (28) has provision for detecting the instant position of a cathode (14) within the pipe (28) such as cable marks (52) and cable mark sensor (50), an infrared camera (60), heat sensing crayon marks (64), thermisters (66), and capacitance sensors (68), used individually or in combination. According to the inventive in place electropolishing method (80) when it is determined that the cathode is in a nonuniform portion (70) of the pipe (28), then increased polishing action is provided as by increasing the voltage using a variable power supply (30a) and/or by slowing down the progress of the cathode (14) using a variable speed cable puller (18).
    Type: Grant
    Filed: December 6, 2000
    Date of Patent: March 30, 2004
    Assignee: Therma Corporation, Inc.
    Inventor: Thomas A. Lorincz
  • Patent number: 6706168
    Abstract: Wastewater treatment operations, i.e. the coagulation, decomposition, sterilization and separation of impurities such as the sludge, organisms, etc. in a liquid to be treated are carried out by applying an AC voltage of a specific frequency between first and second electrodes provided in the liquid to be treated, and thereby making an AC field work on the same liquid. An AC voltage of a high frequency suited to the quality of the water in a frequency band in which metal ions, hydrogen, and oxygen are dissolved into and are taken take out in large quantities, occurring in the AC electrolysis of the object liquid elute, and an AC voltage of a low frequency are switched from one to the other in a contactless manner in a predetermined cycle, and the resultant voltage is applied to the first and second electrodes. This causes crystals and bubbles in the water, and sludge, organisms, etc.
    Type: Grant
    Filed: September 26, 2001
    Date of Patent: March 16, 2004
    Inventor: Takeshi Igarashi
  • Patent number: 6699381
    Abstract: It is a compact water purification/sterilization method and its device with a high electrolytic efficiency in which even though it is used continuously for a long period of time in order to purify and sterilize water with low electrical conductivity such as the water from a swimming pool, bathtub, pond, 24-hour bath, farming tank or AC, there is no deterioration or breakage of the electrodes or deformation of the plastic case for the electrolyzing device due to heat, and even if the electrical flow per electrode surface area is increased, it provides superior long-term endurance performance. Barrel-shaped (cylindrical-shaped) anodes and cathodes are arranged alternately in a concentric manner in layers at given inter-electrode intervals. The anode is a ferrite rod with a long hole along the center axis direction or a ferrite pipe, and in the hole, heating so that it has fluidity, or mercury, which is liquid at ordinary temperature, is filled, in advance, fills a low-melting point metal.
    Type: Grant
    Filed: October 26, 2001
    Date of Patent: March 2, 2004
    Assignee: Omega Co., Ltd.
    Inventors: Shinichi Nakamura, Kunihiko Fukuzuka, Kenji Nagayoshi, Masaki Miyashita
  • Patent number: 6691927
    Abstract: An apparatus and method for fluid emission control of a conductive fluid utilizes a passive electrolytic reaction to ionize the conductive fluid. The apparatus includes a fluid emission system having a reaction chamber that includes an anode and cathode to initiate an electrolytic reaction within the conductive fluid and reaction chamber. An ion-generating member is disposed within the reaction chamber and enhances the electrical bias in the conductive fluid. An oxidation-controlling member disposed within the reaction chamber retards oxidation of the anode and cathode. The metallic component parts and amount of such component parts used in the reaction chamber are chosen to achieve a target voltage, which that amount of voltage created, by the electrolytic reaction necessary to charge a fluid droplet of any density to achieve a maximum acceleration of fluid droplets as the fluid droplets enter and leave a spray cone.
    Type: Grant
    Filed: August 29, 2001
    Date of Patent: February 17, 2004
    Inventor: Robert J. Malloy
  • Publication number: 20040026238
    Abstract: A water treatment device, having a housing with duct areas which are used to conduct the water to be treated. At least a first and a second electrode are accommodated in the housing. The first and second electrodes are alternately positive-poled and negative-poled. Electro-conductive material is introduced into the housing. In order to provide a water treatment device which can be operated on a permanent basis with a high degree of efficiency, the first and second electrodes are arranged in separate first and second electrode chambers which are insulated from each other by one or several insulating bodies, the electrode chambers are respectively filled with a bulk material of a uniform granulated material, and the insulating bodies are pervious to water to be treated but are impervious to the granulates forming the bulk material.
    Type: Application
    Filed: June 9, 2003
    Publication date: February 12, 2004
    Inventors: Dietmar Ende, Michael Sautter, Hans Sautter
  • Patent number: 6689262
    Abstract: An oxygen emitter which is an electrolytic cell is disclosed. When the anode and cathode are separated by a critical distance, very small microbubbles and nanobubbles of oxygen are generated. The hydrogen forms bubbles at the cathode, which bubbles rise to the surface. The very small oxygen bubbles remain in suspension, forming a solution supersaturated in oxygen. The electrodes may be a metal or oxide of at least one metal selected from the group consisting of ruthenium, iridium, nickel, iron, rhodium, rhenium, cobalt, tungsten, manganese, tantalum, molybdenum, lead, titanium, platinum, palladium and osmium or oxides thereof. The electrodes may be formed into open grids or may be closed surfaces. The most preferred cathode is a stainless steel mesh. The most preferred mesh is a {fraction (1/16)} inch grid. The most preferred anode is platinum and iridium oxide on a support. A preferred support is titanium. Models suitable for different uses are disclosed.
    Type: Grant
    Filed: February 21, 2003
    Date of Patent: February 10, 2004
    Assignee: Aqua Innovation, Inc.
    Inventor: James Andrew Senkiw
  • Patent number: 6679980
    Abstract: The invention is directed to an apparatus and a process for electropolishing a product or metallic device made from a metal alloy. The electropolishing apparatus includes a cathode formed of a tubular member and an anode formed by the metallic device to be electropolished. Both the tubular member and the metallic device are positioned within an electrolytic solution and current is passed through the anode to effect the electropolishing process. The invention is useful for electropolishing metal stents formed of metallic alloys, such as cobalt-chromium-tungsten, in which the stent is positioned within the tubular member and immersed in an electrolytic solution for a predetermined time. The electropolishing process using the apparatus of the invention provides an ultrasmooth and shiny metallic surface on the metallic device for metal stents.
    Type: Grant
    Filed: June 13, 2001
    Date of Patent: January 20, 2004
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventor: Anthony Andreacchi
  • Patent number: 6660137
    Abstract: A reactor for electrochemically processing at least one surface of a microelectronic workpiece is set forth. The reactor comprises a reactor head including a workpiece support that has one or more electrical contacts positioned to make electrical contact with the microelectronic workpiece. The reactor also includes a processing container having a plurality of nozzles angularly disposed in a sidewall of a principal fluid flow chamber at a level within the principal fluid flow chamber below a surface of a bath of processing fluid normally contained therein during electrochemical processing. A plurality of anodes are disposed at different elevations in the principal fluid flow chamber so as to place them at difference distances from a microelectronic workpiece under process without an intermediate diffuser between the plurality of anodes and the microelectronic workpiece under process. One or more of the plurality of anodes may be in close proximity to the workpiece under process.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: December 9, 2003
    Assignee: Semitool, Inc.
    Inventors: Gregory J. Wilson, Paul R. McHugh, Kyle M. Hanson
  • Patent number: 6652721
    Abstract: A sensor (1) for measuring O2 concentrations in liquids (2) has a working electrode (3), with a counterelectrode (4) and with a reference electrode (5), wherein the working electrode (3) and the counterelectrode (4) are in contact with the liquid (2). The reference electrode (5) is separated from the liquid (2) by a diaphragm (6). The reference electrode (5) measures a polarization voltage effectively acting at the working electrode (3) and is connected to a potentiostat regulating the potential between the working electrode (3) and the counterelectrode (4). The reference electrode (5), the working electrode (3) and the counterelectrode (4) are arranged coaxially to one another, wherein the working electrode (3) and the counterelectrode (4) are arranged around the reference electrode (5).
    Type: Grant
    Filed: September 24, 2001
    Date of Patent: November 25, 2003
    Assignee: Biotechnologie Kempe GmbH
    Inventor: Eberhard Kempe
  • Patent number: 6599416
    Abstract: An electrochemical stripping method for selectively removing at least one coating from the surface of a substrate is described. The substrate is immersed in an aqueous composition through which electrical current flows. The composition includes an acid having the formula HxAF6, in which “A” is Si, Ge, Ti, Zr, Al, or Ga; and x is 1-6. Various coatings can be removed, such as diffusion or overlay coatings. The method can be used to fully-strip a coating (e.g., from a turbine component), or to partially strip one sublayer of the coating. Related processes and an apparatus are also described.
    Type: Grant
    Filed: September 28, 2001
    Date of Patent: July 29, 2003
    Assignee: General Electric Company
    Inventors: Lawrence Bernard Kool, Ralph James Carl, Jr., Bin Wei, James Anthony Ruud, Mark Alan Rosenzweig, Stephen Joseph Ferrigno
  • Publication number: 20030111338
    Abstract: The present invention is an electropolishing/grinding means for an inner surface of a long tube, which comprises at least one long tube, one electrode, at least two partitions, one fixed magnet mechanism, one driving apparatus and an axial driven mechanism; wherein, cooperation of the partitions, the fixed magnet mechanism and the driving apparatus is to form a magnetic levitation effect, which means using magnetic repulsiveness and magnetic attraction to keep away from the partitions and inner surface and avoid the eccentric situation; further, one of the two partitions has plural springs, plural protruding objects and plural abrasives to cooperate each other for firmly the abrasives touching onto the inner surface.
    Type: Application
    Filed: March 1, 2002
    Publication date: June 19, 2003
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chun-Hung Lin, Chen-Der Tsai, Hann-Tsong Wang, Jiun-Hung Chen, De-Chang Lin
  • Patent number: 6562217
    Abstract: A method for making conductive particles that efficiently permit a plated layer of uniform thickness to be formed over each of the particles without aggregating the particles in a plating liquid.
    Type: Grant
    Filed: December 27, 1999
    Date of Patent: May 13, 2003
    Assignee: Sekisui Chemical Co., Ltd.
    Inventors: Yoshiaki Tanaka, Yoshiaki Kodera, Manabu Matsubara, Kazuhiko Kanki, Tatsuo Suzuki, Kazuo Ukai
  • Patent number: 6562223
    Abstract: A method and apparatus of anodizing a component, preferably aluminum, is disclosed. The component is placed in an electrolyte solution. A number of pulses are applied to the solution and component. Each pulse is formed by a pattern including having three magnitudes. The third magnitude is less, preferably substantially less, than the first and second magnitudes, and all three magnitudes are of the same polarity. The pulse pattern may include alternations between the first and second magnitudes, and following the alternations, the third magnitude. Other patterns may be provided. The solution is in a reaction chamber, along with at least a portion of the component. The fluid enters the reaction chamber from a transport chamber through a plurality of inlets directed toward the component, preferably at an angle of between 60 and 70 degrees. The inlet is preferably the cathode, and the component is the anode, whereby current flows between the cathode and the anode in another embodiment.
    Type: Grant
    Filed: April 23, 2001
    Date of Patent: May 13, 2003
    Assignee: Pioneer Metal Finishing
    Inventor: Jean Rasmussen
  • Patent number: 6562202
    Abstract: Proposed is a drum 1 for electropolishing bulk metal parts, in particular stainless steel parts, comprising a drum jacket 12 made of metal and equipped with a filling opening 13 located on the side of the jacket, and a concentrically arranged cathode 3, whereby provision is made in the drum 1 for a space 2, 10 for receiving the metal parts, said space being closed on all sides and forming the anode and being arranged concentrically with a spacing 8, 9 in relation to the drum jacket 11 and the concentric cathode 3.
    Type: Grant
    Filed: July 12, 2001
    Date of Patent: May 13, 2003
    Assignee: Linnhoff & Pasternak GmbH
    Inventors: Ottmar Beier, Hagen Hans Wolff
  • Patent number: RE40218
    Abstract: The invention provides an apparatus and a method for achieving reliable, consistent metal electroplating or electrochemical deposition onto semiconductor substrates. More particularly, the invention provides uniform and void-free deposition of metal onto metal seeded semiconductor substrates having sub-micron, high aspect ratio features. The invention provides an electrochemical deposition cell comprising a substrate holder, a cathode electrically contacting a substrate plating surface, an electrolyte container having an electrolyte inlet, an electrolyte outlet and an opening adapted to receive a substrate plating surface and an anode electrically connect to an electrolyte. Preferably, a vibrator is attached to the substrate holder to vibrate the substrate in at least one direction, and an auxiliary electrode is disposed adjacent the electrolyte outlet to provide uniform deposition across the substrate surface.
    Type: Grant
    Filed: July 17, 2003
    Date of Patent: April 8, 2008
    Inventor: Uziel Landau