Moving Tool Or Workpiece Patents (Class 205/651)
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Patent number: 12097567Abstract: A technique of removing material from metal parts referred to as OPECM and a corresponding OPECM processing machine are disclosed. A tool electrode is manufactured for removing material from a target workpiece, and the workpiece and tool electrode are fixed into a processing machine that imparts an oscillatory motion path or profile and applies a voltage through a flowing electrolyte solution. The disclosed technique and processing machine removes material from the surface of the target workpiece through proximal surface dissolution as the workpiece and tool electrode are brought within proximity of one another.Type: GrantFiled: December 30, 2021Date of Patent: September 24, 2024Assignee: Voxel Innovations, Inc.Inventors: Daniel Herrington, Eric Rountree
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Patent number: 10676992Abstract: Various downhole tools, such as drilling motors, drilling tools, reamer tools, casing reamer shoes, and related methods of installation, assembly and use. Casing reamer shoes and drilling reamers or motors may have internal impellers, progressive cavity pumps, hollow rotors and other parts, universal joints, and other features. A progressive cavity section may have a rotor and a stator. Rotor contacting surfaces of the stator, and stator contacting surfaces of the rotor, may be rigid during use. The stator contacting surfaces and the rotor contacting surfaces may be made of metal. After the casing is run, the casing is cemented and the reamer shoe drilled out.Type: GrantFiled: November 13, 2017Date of Patent: June 9, 2020Assignee: Infocus Energy Services Inc.Inventors: Allan Pearson, Mark Luchak, Oxana Scheming, Geoff Samuel, Matt Osatchuk, Erin Venables, Peter Kjellbotn
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Patent number: 9364910Abstract: A mechanism capable of decreasing wires which are not appropriately supplied with power and performing the electrical discharge machining high in uniformity between multiple wires. A wire electrical discharge machining system configured to slice a workpiece at an interval of wires arranged side by side at equally spaced intervals causes the wire to travel in the same direction and includes a power feed contact configured to collectively supply a machining power supply to a plurality of the traveling wires, in which two adjacent power feed contacts respectively come into contact with the plurality of the wires supplied with the machining power supply and arranged without being aligned in the direction vertical to the direction in which the wire travels.Type: GrantFiled: April 22, 2013Date of Patent: June 14, 2016Assignees: Canon Marketing Japan Kabushiki Kaisha, Kabushiki Kaisha Makino Huraisu SeisakushoInventors: Yasuhiro Okamoto, Akira Okada, Haruya Kurihara
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Patent number: 9312066Abstract: A method for efficiently machining magnets with curved surfaces is disclosed. The use of machining equipment capable of making curved cuts through magnetic material can allow significant cost and material savings, particularly when machining magnets with complementary surfaces. A process for using a series of cutting wires to simultaneously cut magnetic material into conformally shaped magnets is described.Type: GrantFiled: September 5, 2012Date of Patent: April 12, 2016Assignee: Apple Inc.Inventors: Simon Regis Louis Lancaster-Larocque, Ryan M. Satcher
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Patent number: 8999136Abstract: A Method and machine tool for compensating a wear of an electrode that machines a workpiece. The method includes selecting a current pocket from plural pockets of the workpiece; updating a wear compensation to be applied to the electrode for the current pocket based on wear compensation of a previous pocket, where the previous pocket is adjacent to the current pocket; and applying the updated wear compensation to the electrode for machining the current pocket.Type: GrantFiled: September 14, 2010Date of Patent: April 7, 2015Assignee: Nuovo Pignone S.p.A.Inventors: Ugo Cantelli, Garth M Nelson, Yuanfeng Luo, Yimin Zhan, Roberto Ciappi, Massimo Arcioni, Renwei Yuan
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Patent number: 8663449Abstract: A feed control method for wire cutting electrochemical discharge machining is disclosed. The method determines whether a contact event has occurred using a wire electrode, based on variations in wire tension when being cut. A wire is cut with an ideal feed speed when the wire electrode is not in contact with a workpiece.Type: GrantFiled: July 26, 2012Date of Patent: March 4, 2014Assignee: Industrial Technology Research InstituteInventors: Jui-Kuan Lin, Hsiang-Kuo Lee, Yang-Xin Lin, Hsin-Chuan Su
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Patent number: 8518223Abstract: When forming metallic components, in particular three-dimensionally curved blades, which constitute a single piece with the blading of turbomachine rotor wheels, the linear oscillation of the electrode acting as a tool is superimposed by a circular oscillation, enabling the electrode to turn into the workpiece conformally with its shape. Further forming is performed by circular oscillation with circular feed in the one and/or the other direction. An embodiment of the corresponding apparatus comprises an electrode holder (9) with linear feed (Zvor) and linear oscillation (Zosz) and a workpiece holder (5) with circular oscillation (Cosz) and circular feed (Cvor).Type: GrantFiled: October 23, 2008Date of Patent: August 27, 2013Assignee: Rolls-Royce Deutschland Ltd & Co KGInventor: Rainer Mielke
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Patent number: 8506792Abstract: The invention concerns a method for the machining of a metallic structural component, particularly a structural component of a gas turbine, by means of finishing with a pulsed electrochemical ablation process, whereby the structural component features a pre-contour, to be finished, with different over-measures. The method is characterized by the following processing steps: a) determination of the different over-measures of the pre-contour, and b) bilateral and simultaneous finishing by means of a simultaneous feed of respectively at least one electrode disposed on different sides of the structural component, whereby the feed velocity of the electrode in the area of the largest over-measure of the pre-contour is higher than the feed velocity in the area of the smaller over-measure of the pre-contour.Type: GrantFiled: December 5, 2008Date of Patent: August 13, 2013Assignee: MTU Aero Engines GmbHInventors: Erwin Bayer, Martin Bussmann, Albin Platz
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Patent number: 8470160Abstract: A method of electrochemical machining that includes the steps of: positioning a workpiece and a tooling piece in a first position; moving at least one of the workpiece and the tooling piece toward the other such that the workpiece and the tooling piece occupy a second position; moving at least one of the workpiece and the tooling piece away from the other such that the workpiece and the tooling piece occupy a third position; and during at least a portion of the moving of the workpiece and/or the tooling piece from the first position to the second position and from the second position to the third position, using a power supply to apply a voltage across a gap formed between the workpiece and the tooling piece.Type: GrantFiled: September 28, 2009Date of Patent: June 25, 2013Assignee: General Electric CompanyInventors: Yuefeng Luo, William E. Adis
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Publication number: 20130056365Abstract: A method for electrochemically processing a workpiece surface using an electrode, which has at least one effective surface for processing the workpiece surface, and using an electrolyte, wherein the electrolyte is suctioned away from the effective surface. The invention further relates to an electrode, which has at least one electrolyte feed for supplying the electrolyte to the effective area and an electrolyte suctioning system for suctioning the electrolyte away from the effective area.Type: ApplicationFiled: April 6, 2011Publication date: March 7, 2013Applicant: MTU Aero Engines GmbHInventors: Erwin Bayer, Roland Huttner
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Patent number: 8357268Abstract: By providing an enhanced drive system for electrochemical etch process tools, the operational range, as well as the reliability, may be enhanced. For this purpose, a high torque electric motor may be used in combination with an appropriate power transmission, which may be attached to a corresponding tool frame at a height level that is above a corresponding height level at which respective chemicals are provided to the substrate under process. Hence, the probability for contamination by chemicals may be significantly reduced, thereby also reducing maintenance efforts resulting in reduced production costs.Type: GrantFiled: September 26, 2007Date of Patent: January 22, 2013Assignee: Advanced Micro Devices, Inc.Inventors: Michael Pietzner, Mario Illgen, Kerstin Siury, Frank Kuechenmeister
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Patent number: 8268137Abstract: The present invention relates an electrochemical processing apparatus and a processing method thereof. A reciprocating swing unit is used to drive the processing electrode to process a workpiece, and thus simplifying fabrication of the processing electrode, and shortening processes and reducing costs. In addition, by using a high-frequency reciprocating twist and micro-vibrating unit to drive the processing electrode to perform high-frequency reciprocating twists and micro-vibrations, the processing electrode can perform twist without varying the processing gap. Thereby, the electrolyte in the gap can be perturbed and renewed continuously. Accordingly, bubbles and products produced during electrolysis can be removed sufficiently, enhancing processing precision and surface quality using the processing electrode on processing the workpiece.Type: GrantFiled: December 23, 2008Date of Patent: September 18, 2012Assignee: Metal Industries Research & Development CentreInventors: Jung-Chou Hung, Dayu Lin
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Patent number: 8236162Abstract: An electroerosion machining system comprises an electrode, a power supply, an electrolyte supply, an electroerosion controller connected to and monitoring the power supply, and a working apparatus configured to move the electrode relative to the workpiece. The electroerosion machining system further comprises a CNC controller configured to cooperate with the electroerosion controller to control the working apparatus, and to calculate a wear value of the electrode. Further, the CNC controller is configured to segment the toolpath of every layer into a plurality of segments, and to divide the compensation value for every layer to be machined into a plurality of value segments, and further to use the value segments to compensate for electrode wear along the respective toolpath segments during machining of the workpiece. An electroerosion machining method is also presented.Type: GrantFiled: September 30, 2008Date of Patent: August 7, 2012Assignee: General Electric CompanyInventors: Yimin Zhan, Bin Wei, Michael Scott Lamphere, Renwei Yuan, Yuanfeng Luo
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Patent number: 8070933Abstract: The invention is an electrolytic microfinishing process which utilizes a conductive tool as a cathode and a conductive workpiece as an anode both connected to a power supply. Electrolytic fluid is pumped between the tool and workpiece, creating a decomposition of the workpiece surface allowing the surface of the workpiece to be removed or wiped away by the interaction of the flowing electrolyte and rotation of the tool without generating any heat at a rate significantly faster than any other known machining process. The tool has no contact with the workpiece and accordingly, requires very low clamping loads to hold the workpiece in the spindle during the finishing operation. Due to the low clamping loads, the distortion of the workpiece is completely eliminated. Modulating the power supply during the work cycle allows the use of a single tool for both roughing and finishing as a continuous cycle to significantly provide surface finishes previously unobtainable.Type: GrantFiled: May 6, 2006Date of Patent: December 6, 2011Assignee: Thielenhaus Microfinishing Corp.Inventor: Manfred G. Becker
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Patent number: 8057645Abstract: A system and method for electrochemically machining a work-piece contains a fixture capable of receiving a work-piece and securing the work-piece to the fixture. An electrolyte source is also provided. In addition, the system contains a rotary drive subassembly capable of receiving a portion of the work-piece therein, motion of the rotary drive assembly being determined by a received control signal, wherein frequency and amplitude of the control signal increases and decreases motion of the rotary drive subassembly, and wherein the control signal is a trapezoidal waveform.Type: GrantFiled: July 6, 2007Date of Patent: November 15, 2011Assignee: Turbocam, Inc.Inventors: Thomas S. McGee, Marian B. Noronha, Hans Hendrik Wolters
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Patent number: 8052860Abstract: A method and system are provided for the shaping and polishing of the surface of a material selected from the group consisting of electrically semi-conductive materials and conductive materials. An electrically non-conductive polishing lap incorporates a conductive electrode such that, when the polishing lap is placed on the material's surface, the electrode is placed in spaced-apart juxtaposition with respect to the material's surface. A liquid electrolyte is disposed between the material's surface and the electrode. The electrolyte has an electrochemical stability constant such that cathodic material deposition on the electrode is not supported when a current flows through the electrode, the electrolyte and the material. As the polishing lap and the material surface experience relative movement, current flows through the electrode based on (i) adherence to Faraday's Law, and (ii) a pre-processing profile of the surface and a desired post-processing profile of the surface.Type: GrantFiled: December 14, 2007Date of Patent: November 8, 2011Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventors: Darell E. Engelhaupt, Mikhail V. Gubarev, William David Jones, Brian D. Ramsey, Carl M. Benson
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Patent number: 8034228Abstract: A method and device for the production of components having a three-dimensionally formed surface by a lowering operation with an electrochemical ablation process, namely a Precise Electro Chemical Machining (PECM) process, is disclosed. The method includes the steps of: a) providing a specially pre-formed workpiece featuring a specific dimensional allowance; b) providing at least one working electrode, in which case the contour of the working electrode, or of each working electrode, is adapted to the contour of the three-dimensionally formed surface to be produced; and c) lowering the three-dimensionally formed surface by placing the pre-formed workpiece and the working electrode, or each working electrode, in an electrolyte and by applying an electrical voltage or an electrical current, in which case the working electrode, or each working electrode, is moved in the sense of a circular advance motion in the direction toward the workpiece.Type: GrantFiled: March 31, 2006Date of Patent: October 11, 2011Assignee: MTU Aero Engines GmbHInventors: Erwin Bayer, Albin Platz
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Publication number: 20110073485Abstract: A method of electrochemical machining that includes the steps of: positioning a workpiece and a tooling piece in a first position; moving at least one of the workpiece and the tooling piece toward the other such that the workpiece and the tooling piece occupy a second position; moving at least one of the workpiece and the tooling piece away from the other such that the workpiece and the tooling piece occupy a third position; and during at least a portion of the moving of the workpiece and/or the tooling piece from the first position to the second position and from the second position to the third position, using a power supply to apply a voltage across a gap formed between the workpiece and the tooling piece.Type: ApplicationFiled: September 28, 2009Publication date: March 31, 2011Inventors: Yuefeng Luo, William E. Adis
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Patent number: 7807037Abstract: A method for removing a metal layer comprising the steps of providing a part having a slot, providing a porous metallic cathode comprising a recess bounded by a wall having an outer surface corresponding to the slot, inserting the porous metallic cathode into the slot, introducing an electrolyte into the recess of the porous metallic cathode, and removing a portion of an inner surface of the slot by flowing an electric current between the part and the porous metallic cathode.Type: GrantFiled: February 21, 2008Date of Patent: October 5, 2010Assignee: United Technologies CorporationInventor: Frederick R. Joslin
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Publication number: 20100163427Abstract: An electromachining system is described. The electromachining system includes a computer numerical controller (CNC) device and an electromachining controller device coupled to the CNC device and a power supply. The electromachining system also includes an electromachining tool coupled to the CNC device and the power supply. The electromachining controller device is configured to control operation of the electromachining tool and the CNC device is configured to position the electromachining tool relative to a workpiece.Type: ApplicationFiled: December 31, 2008Publication date: July 1, 2010Inventors: Yimin Zhan, Renwei Yuan, Yuangfeng Luo
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Publication number: 20100078333Abstract: An electroerosion machining system comprises an electrode, a power supply, an electrolyte supply, an electroerosion controller connected to and monitoring the power supply, and a working apparatus configured to move the electrode relative to the workpiece. The electroerosion machining system further comprises a CNC controller configured to cooperate with the electroerosion controller to control the working apparatus, and to calculate a wear value of the electrode. Further, the CNC controller is configured to segment the toolpath of every layer into a plurality of segments, and to divide the compensation value for every layer to be machined into a plurality of value segments, and further to use the value segments to compensate for electrode wear along the respective toolpath segments during machining of the workpiece. An electroerosion machining method is also presented.Type: ApplicationFiled: September 30, 2008Publication date: April 1, 2010Applicant: GENERAL ELECTRIC COMPANYInventors: Yimin Zhan, Bin Wei, Michael Scott Lamphere, Renwei Yuan, Yuanfeng Luo
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Patent number: 7527723Abstract: An electrolytic processing apparatus can increase the efficiency of the dissociation reaction of water and efficiently perform electrolytic processing, and can eliminate the need for an operation of a change of ion exchanger. The electrolytic processing apparatus includes: a processing electrode and a feeding electrode; a liquid supply section for supplying a liquid containing an ion-exchange material between the workpiece and at least one of the processing electrode and the feeding electrode; a power source for applying a voltage between the processing electrode and the feeding electrode; and a drive section for moving the workpiece and at least one of the processing electrode and the feeding electrode relative to each other; wherein electrolytic processing of the workpiece is carried out while keeping the workpiece not in contact with but close to the processing electrode at a distance of not more than 10 ?m.Type: GrantFiled: January 14, 2005Date of Patent: May 5, 2009Assignee: Ebara CorporationInventors: Itsuki Kobata, Yutaka Wada, Hirokuni Hiyama, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki, Akira Kodera
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Patent number: 7462273Abstract: When forming metallic components, in particular three-dimensionally curved blades, which constitute a single piece with the blading of turbomachine rotor wheels, the linear oscillation of the electrode acting as a tool is superimposed by a circular oscillation, enabling the electrode to turn into the workpiece conformally with its shape. Further forming is performed by circular oscillation with circular feed in the one and/or the other direction. An embodiment of the corresponding apparatus comprises an electrode holder (9) with linear feed (Zvor) and linear oscillation (Zosz) and a workpiece holder (5) with circular oscillation (Cosz) and circular feed (Cvor).Type: GrantFiled: December 12, 2003Date of Patent: December 9, 2008Assignee: Rolls-Royce Deutschland Ltd & Co KGInventor: Rainer Mielke
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Patent number: 7425250Abstract: A system for electrochemical mechanical polishing of a conductive surface of a wafer is provided. The system includes a wafer holder to hold the wafer and a belt pad disposed proximate to the wafer to polish the conductive surface. Application of a potential difference between conductive surface and an electrode and establishing relative motion between the belt pad and the conductive surface result in material removal from the conductive surface. Electrical contact to the surface is provided through either contacts embedded in the belt pad or contacts placed adjacent the belt pad.Type: GrantFiled: April 23, 2004Date of Patent: September 16, 2008Assignee: Novellus Systems, Inc.Inventors: Bulent M. Basol, Homayoun Talieh
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Patent number: 7329335Abstract: Substantially uniform deposition of conductive material on a surface of a substrate, which substrate includes a semiconductor wafer, from an electrolyte containing the conductive material can be provided by way of a particular device which includes first and second conductive elements. The first conductive element can have multiple electrical contacts, of identical or different configurations, or may be in the form of a conductive pad, and can contact or otherwise electrically interconnect with the substrate surface over substantially all of the substrate surface. Upon application of a potential between the first and second conductive elements while the electrolyte makes physical contact with the substrate surface and the second conductive element, the conductive material is deposited on the substrate surface. It is possible to reverse the polarity of the voltage applied between the anode and the cathode so that electro-etching of deposited conductive material can be performed.Type: GrantFiled: June 10, 2003Date of Patent: February 12, 2008Assignee: Novellus Systems, Inc.Inventors: Homayoun Talieh, Cyprian Uzoh, Bulent M. Basol
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Patent number: 7294244Abstract: An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with another independent aspect of the present invention, the workpiece processing station is adapted for adjusting the level of the processing fluid relative to a workpiece, wherein the portion of the workpiece to be processed and possibly the paddle is selectively immersed within the processing fluid. In accordance with a further independent aspect of the present invention, a paddle is provided for use proximate to a workpiece in a workpiece processing station. The paddle includes a one or more sets of delivery ports and one or more sets of fluid recovery ports. In at least one embodiment, the paddle provides for agitation of a processing fluid proximate to the surface of the workpiece. In at least another embodiment, the paddle provides for the delivery and/or recovery of one or more fluids to the portion of the workpiece to be processed.Type: GrantFiled: February 14, 2003Date of Patent: November 13, 2007Assignee: Semitool, Inc.Inventors: Thomas H. Oberlitner, Kyle M. Hanson
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Patent number: 7211178Abstract: On a fixture for electro-chemical machining for the production of long, curved cavities (11) in a component (12), the working electrode (3) of the electro-chemical machining tool (1) is connected to a guide body (1a) which moveably rests against the inner walls of the respective cavity by means of power-actuated guide elements (2), with the guide body being connected to a flexurally soft and torsionally stiff guide linkage (5) coupled to a feed and rotary drive. Control of the movement of the guide body is accomplished in dependence of at least one wall thickness measured with a measuring device (13, 14) during feed movement.Type: GrantFiled: August 18, 2004Date of Patent: May 1, 2007Assignee: Rolls-Royce Deutschland Ltd & Co KGInventor: Karl Schreiber
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Patent number: 7201829Abstract: The present invention includes a mask plate design that includes at least one or a plurality of channels portions on a surface of the mask plate, into which electrolyte solution will accumulate when the mask plate surface is disposed on a surface of wafer, and out of which the electrolyte solution will freely flow. There are also at least one or a plurality of polish portions on the mask plate surface that allow for polishing of the wafer when the mask plate surface is disposed on a surface of wafer.Type: GrantFiled: September 20, 2001Date of Patent: April 10, 2007Assignee: Novellus Systems, Inc.Inventors: Bulent M. Basol, Cyprian Uzoh, Jeff A. Bogart
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Patent number: 7192260Abstract: Electrochemical machining is used to generate the helical lobe profiles of the stator of a progressive cavity pump or motor. A thin, elastomeric liner, of uniform thickness is bonded either to the interior of the stator, or to the exterior of the rotor. Where the elastomeric liner is to be bonded to the interior of the stator, bonding is improved by electrically etching the interior of the stator during the electrochemical machining process to produce a roughened surface.Type: GrantFiled: July 8, 2004Date of Patent: March 20, 2007Assignee: Lehr Precision, Inc.Inventors: Terry Lievestro, John Reynolds, Tom Chamberlain
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Patent number: 7125477Abstract: Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact element is a rotating member. In one embodiment, the contact element comprises a noble metal.Type: GrantFiled: August 2, 2002Date of Patent: October 24, 2006Assignee: Applied Materials, Inc.Inventors: Paul Butterfield, Liang-Yuh Chen, Yongqi Hu, Antoine Manens, Rashid Mavliev, Stan Tsai
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Patent number: 7107676Abstract: Manufacturing equipment and manufacturing process steps that improve upon prior art processes for the manufacturing of filament tube and arc tube light sources, their components and subassemblies, and lamps employing said light sources. A double ended, tipless filament tube or arc tube light source incorporates a drawn-down tubular body, and one piece foliated leads with spurs for process handling and for spudding into a filament with stretched-out legs. Bugled ends on the body provide a novel cutoff means, facilitate a flush-fill finishing process, and enhance mounting and support of the light sources in lamps. The foliated leads are made from a continuous length of wire in a process including foil hammering and two-bath AC electrochemical etching. Cost-reduced light source and lamp production enables affordable household consumer lamps, even when containing two series-connected halogen filament tubes.Type: GrantFiled: November 5, 2003Date of Patent: September 19, 2006Inventor: Elmer G. Fridrich
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Patent number: 7029567Abstract: An edge cleaning system and method is disclosed in which a directed stream of a mild etching solution is supplied to an edge area of a rotating workpiece, including the front surface edge and bevel, while a potential difference between the workpiece and the directed stream is maintained. In one aspect, the present invention provides an edge cleaning system that is disposed in the same processing chamber that is used for deposition or removal processing of the workpiece. In another aspect, the mild etching solution used for edge removal is also used to clean the front surface of the wafer, either simultaneously with or sequentially with the edge removal process.Type: GrantFiled: December 20, 2002Date of Patent: April 18, 2006Assignee: Asm Nutool, Inc.Inventor: Bulent M. Basol
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Publication number: 20040195109Abstract: An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.Type: ApplicationFiled: April 21, 2004Publication date: October 7, 2004Inventors: Yuzo Mori, Mitsuhiko Shirakashi, Yasushi Toma, Itsuki Kobata, Takayuki Saito
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Patent number: 6592742Abstract: A method of chemically polishing a metal layer on a substrate is provided. The metal layer is chemically polished using an electrochemical polishing (ECP) process. In the ECP process, the substrate is immersed in a chemical polishing solution including a surfactant. The surfactant in the polishing solution covers the surface of the substrate such that only topographic portions of the substrate surface are exposed to the chemical polishing solution. Thereafter, an electrical potential applied to the substrate removes topographic portions of the substrate that are exposed to the polishing solution.Type: GrantFiled: July 13, 2001Date of Patent: July 15, 2003Assignee: Applied Materials Inc.Inventors: Lizhong Sun, Shijian Li
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Patent number: 6532662Abstract: According to this dynamic pressure groove processing method, dynamic pressure grooves are formed in specified regions by electrochemical machining with the electrode of an electrode tool put close to a workpiece in the initial stage. Through this electrochemical machining, corners of land portions adjacent to the dynamic pressure grooves can be curved and smoothed. Next, by subjecting the workpiece to electrochemical machining with the electrode of the electrode tool put away from the workpiece, the land portions are to undergo weak electrochemical machining. Surface roughness of surfaces of the land portions can be reduced, and the curved corners of the land portions can be made smoother at the same time. Therefore, the abrasion resistance characteristic of the dynamic pressure grooves can be improved further than that achieved by the conventional electrochemical machining, allowing the abrasion resistance characteristic and reliability to be sufficiently improved.Type: GrantFiled: March 12, 2001Date of Patent: March 18, 2003Assignee: Koyo Seiko Co., Ltd.Inventors: Yasuhiro Kobayashi, Yoshiki Fujii, Takeshi Takahashi
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Patent number: 6447668Abstract: An apparatus for detecting the end-point of an electropolishing process of a metal layer formed on a wafer includes an end-point detector. The end-point detector is disposed adjacent the nozzle used to electropolish the wafer. In one embodiment, the end-point detector is configured to measure the optical reflectivity of the portion of the wafer being electropolished.Type: GrantFiled: May 12, 2000Date of Patent: September 10, 2002Assignee: ACM Research, Inc.Inventor: Hui Wang
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Patent number: 6423206Abstract: To avoid or minimize the occurrence of cross streaks or current streaks on a substrate that is transported through an electrolytic bath and roughened electrochemically in it, the current density is regulated in the electrolyte between a first alternating or three-phase current electrode and the substrate in such a way that at the beginning of a roughening zone, the current density has a lesser value than within the roughening zone, in the transport direction of the substrate. Downstream of the first alternating or three-phase current electrode, either a further alternating current electrode or a further three-phase current electrode acts on the substrate. In a preferred embodiment, the first alternating or three-phase current electrode has a rounded outline, which is composed of a curved portion and adjoining it a straight portion.Type: GrantFiled: March 1, 2000Date of Patent: July 23, 2002Assignee: Agfa-Gevaert N.V.Inventors: Georg Haby, Raimund Haas, Uwe Gartmann, Günter Hultzsch, Klaus Joerg, Jörg Kaden, Hermann Idstein
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Patent number: 6413407Abstract: An ECM apparatus includes a fluted cathode tool for being driven through a tubular workpiece for electrochemically forming internal flutes therein. The cathode tool is sealed at one end for isolating electrolyte over the flutes thereof to seal against flow of the electrolyte past the tool and into the finished fluted bore.Type: GrantFiled: November 27, 2000Date of Patent: July 2, 2002Assignee: Lehr Precision, Inc.Inventors: Norbert Anthony Bruns, Edward Charles Bruns, Thomas Howard Chamberlain
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Patent number: 6344131Abstract: A support made of an aluminum plate for a planographic printing plate is electrochemically roughened in an acidic aqueous solution in an electrolytic apparatus with plural cathodes and anodes arranged alternately on one side of the plate by applying a DC voltage. A soft starting zone which comprises at least one electrode connected to an electric power supply, which is separate from a main electric source, is provided. A current density of 0.01 to 100 A/dm2, which is lower than the current density used in any subsequent main roughening, is provided in the soft starting zone.Type: GrantFiled: December 21, 1999Date of Patent: February 5, 2002Assignee: Fuji Photo Film Co., Ltd.Inventors: Atsuo Nishino, Akio Uesugi
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Patent number: 6299755Abstract: A method is provided for electropolishing a stent. A stent is mounted on a rack having electropolishing mounts. Each of the mounts has a base and an electrically conductive first member having a first end and a second end. The first end is connected to the base and the second end contacts the external surface of the stent. Each of the mounts also has a non-electrically conductive second member having a first end and a second end. The first end of the second member is attached to the base and the second end is placed in the bore of the stent. The second ends of the first and second members bias towards each other to secure the stent between them. The stent is immersed in an electropolishing bath and an electrical current is applied to the first member.Type: GrantFiled: July 2, 1998Date of Patent: October 9, 2001Assignee: Medinol Ltd.Inventor: Jacob Richter
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Patent number: 6221235Abstract: A sacrificial cores in castings of metallic or non-metallic materials is made from a metal that can be electrolytically dissolved, and is removed from the casting by electrochemical machining. The sacrificial core may be a hollow shell incorporating an integral electrode within the shell and electrically insulated from the shell.Type: GrantFiled: November 30, 1998Date of Patent: April 24, 2001Assignee: Faraday Technology Marketing Group LLCInventor: Lawrence E. Gebhart
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Patent number: 5667666Abstract: A process for roughening a surface of a support for a lithographic printing plate in which an electric current is supplied between a metal web and an electrode facing the metal web in an electrolyte containing metal ions so that the metal web is subjected to electrochemical processing continuously, 1-20 pause sections are provided in the electrochemical processing and the time taken for passage through once processing pause section in the electrochemical processing is set to 1-30 seconds. With the process, the grain shape can be controlled with no troublesome condition setting to improve a scumming resistance without deteriorating a printing durability and a fill-in reduction so that the plate has superior performance.Type: GrantFiled: July 30, 1996Date of Patent: September 16, 1997Assignee: Fuji Photo Film Co., Ltd.Inventors: Atsushi Matsuura, Akio Uesugi
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Patent number: 5501787Abstract: A system for making porous silicon on blank and patterned Si substrates by "immersion scanning", particularly suitable for fabricating light-emitting Si devices and utilizing an open electrolytic cell having a cathode and an opposing anode consisting of a Si substrate on which the porous silicon is to be formed, both disposed, with their opposing surfaces in parallel, in an aqueous HF solution electrolyte contained in the cell. The substrate anode is mounted to be movable relative to the electrolyte so as to be mechanically cycled or scanned in and out of the electrolyte at a programmable rate during anodization. The uniformity, thickness and porosity of the resulting anodized layer on the substrate are determined by the scanning speed, number of cycles, current density, and HF-based electrolyte parameters of the system, and the Si substrate resistivity, conductivity type, and crystal orientation.Type: GrantFiled: February 27, 1995Date of Patent: March 26, 1996Assignee: International Business Machines CorporationInventors: Ernest Bassous, Jean-Marc Halbout, Subramanian S. Iyer, Vijay P. Kesan