Moving Tool Or Workpiece Patents (Class 205/651)
  • Patent number: 10676992
    Abstract: Various downhole tools, such as drilling motors, drilling tools, reamer tools, casing reamer shoes, and related methods of installation, assembly and use. Casing reamer shoes and drilling reamers or motors may have internal impellers, progressive cavity pumps, hollow rotors and other parts, universal joints, and other features. A progressive cavity section may have a rotor and a stator. Rotor contacting surfaces of the stator, and stator contacting surfaces of the rotor, may be rigid during use. The stator contacting surfaces and the rotor contacting surfaces may be made of metal. After the casing is run, the casing is cemented and the reamer shoe drilled out.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: June 9, 2020
    Assignee: Infocus Energy Services Inc.
    Inventors: Allan Pearson, Mark Luchak, Oxana Scheming, Geoff Samuel, Matt Osatchuk, Erin Venables, Peter Kjellbotn
  • Patent number: 9364910
    Abstract: A mechanism capable of decreasing wires which are not appropriately supplied with power and performing the electrical discharge machining high in uniformity between multiple wires. A wire electrical discharge machining system configured to slice a workpiece at an interval of wires arranged side by side at equally spaced intervals causes the wire to travel in the same direction and includes a power feed contact configured to collectively supply a machining power supply to a plurality of the traveling wires, in which two adjacent power feed contacts respectively come into contact with the plurality of the wires supplied with the machining power supply and arranged without being aligned in the direction vertical to the direction in which the wire travels.
    Type: Grant
    Filed: April 22, 2013
    Date of Patent: June 14, 2016
    Assignees: Canon Marketing Japan Kabushiki Kaisha, Kabushiki Kaisha Makino Huraisu Seisakusho
    Inventors: Yasuhiro Okamoto, Akira Okada, Haruya Kurihara
  • Patent number: 9312066
    Abstract: A method for efficiently machining magnets with curved surfaces is disclosed. The use of machining equipment capable of making curved cuts through magnetic material can allow significant cost and material savings, particularly when machining magnets with complementary surfaces. A process for using a series of cutting wires to simultaneously cut magnetic material into conformally shaped magnets is described.
    Type: Grant
    Filed: September 5, 2012
    Date of Patent: April 12, 2016
    Assignee: Apple Inc.
    Inventors: Simon Regis Louis Lancaster-Larocque, Ryan M. Satcher
  • Patent number: 8999136
    Abstract: A Method and machine tool for compensating a wear of an electrode that machines a workpiece. The method includes selecting a current pocket from plural pockets of the workpiece; updating a wear compensation to be applied to the electrode for the current pocket based on wear compensation of a previous pocket, where the previous pocket is adjacent to the current pocket; and applying the updated wear compensation to the electrode for machining the current pocket.
    Type: Grant
    Filed: September 14, 2010
    Date of Patent: April 7, 2015
    Assignee: Nuovo Pignone S.p.A.
    Inventors: Ugo Cantelli, Garth M Nelson, Yuanfeng Luo, Yimin Zhan, Roberto Ciappi, Massimo Arcioni, Renwei Yuan
  • Patent number: 8663449
    Abstract: A feed control method for wire cutting electrochemical discharge machining is disclosed. The method determines whether a contact event has occurred using a wire electrode, based on variations in wire tension when being cut. A wire is cut with an ideal feed speed when the wire electrode is not in contact with a workpiece.
    Type: Grant
    Filed: July 26, 2012
    Date of Patent: March 4, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Jui-Kuan Lin, Hsiang-Kuo Lee, Yang-Xin Lin, Hsin-Chuan Su
  • Patent number: 8518223
    Abstract: When forming metallic components, in particular three-dimensionally curved blades, which constitute a single piece with the blading of turbomachine rotor wheels, the linear oscillation of the electrode acting as a tool is superimposed by a circular oscillation, enabling the electrode to turn into the workpiece conformally with its shape. Further forming is performed by circular oscillation with circular feed in the one and/or the other direction. An embodiment of the corresponding apparatus comprises an electrode holder (9) with linear feed (Zvor) and linear oscillation (Zosz) and a workpiece holder (5) with circular oscillation (Cosz) and circular feed (Cvor).
    Type: Grant
    Filed: October 23, 2008
    Date of Patent: August 27, 2013
    Assignee: Rolls-Royce Deutschland Ltd & Co KG
    Inventor: Rainer Mielke
  • Patent number: 8506792
    Abstract: The invention concerns a method for the machining of a metallic structural component, particularly a structural component of a gas turbine, by means of finishing with a pulsed electrochemical ablation process, whereby the structural component features a pre-contour, to be finished, with different over-measures. The method is characterized by the following processing steps: a) determination of the different over-measures of the pre-contour, and b) bilateral and simultaneous finishing by means of a simultaneous feed of respectively at least one electrode disposed on different sides of the structural component, whereby the feed velocity of the electrode in the area of the largest over-measure of the pre-contour is higher than the feed velocity in the area of the smaller over-measure of the pre-contour.
    Type: Grant
    Filed: December 5, 2008
    Date of Patent: August 13, 2013
    Assignee: MTU Aero Engines GmbH
    Inventors: Erwin Bayer, Martin Bussmann, Albin Platz
  • Patent number: 8470160
    Abstract: A method of electrochemical machining that includes the steps of: positioning a workpiece and a tooling piece in a first position; moving at least one of the workpiece and the tooling piece toward the other such that the workpiece and the tooling piece occupy a second position; moving at least one of the workpiece and the tooling piece away from the other such that the workpiece and the tooling piece occupy a third position; and during at least a portion of the moving of the workpiece and/or the tooling piece from the first position to the second position and from the second position to the third position, using a power supply to apply a voltage across a gap formed between the workpiece and the tooling piece.
    Type: Grant
    Filed: September 28, 2009
    Date of Patent: June 25, 2013
    Assignee: General Electric Company
    Inventors: Yuefeng Luo, William E. Adis
  • Publication number: 20130056365
    Abstract: A method for electrochemically processing a workpiece surface using an electrode, which has at least one effective surface for processing the workpiece surface, and using an electrolyte, wherein the electrolyte is suctioned away from the effective surface. The invention further relates to an electrode, which has at least one electrolyte feed for supplying the electrolyte to the effective area and an electrolyte suctioning system for suctioning the electrolyte away from the effective area.
    Type: Application
    Filed: April 6, 2011
    Publication date: March 7, 2013
    Applicant: MTU Aero Engines GmbH
    Inventors: Erwin Bayer, Roland Huttner
  • Patent number: 8357268
    Abstract: By providing an enhanced drive system for electrochemical etch process tools, the operational range, as well as the reliability, may be enhanced. For this purpose, a high torque electric motor may be used in combination with an appropriate power transmission, which may be attached to a corresponding tool frame at a height level that is above a corresponding height level at which respective chemicals are provided to the substrate under process. Hence, the probability for contamination by chemicals may be significantly reduced, thereby also reducing maintenance efforts resulting in reduced production costs.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: January 22, 2013
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Michael Pietzner, Mario Illgen, Kerstin Siury, Frank Kuechenmeister
  • Patent number: 8268137
    Abstract: The present invention relates an electrochemical processing apparatus and a processing method thereof. A reciprocating swing unit is used to drive the processing electrode to process a workpiece, and thus simplifying fabrication of the processing electrode, and shortening processes and reducing costs. In addition, by using a high-frequency reciprocating twist and micro-vibrating unit to drive the processing electrode to perform high-frequency reciprocating twists and micro-vibrations, the processing electrode can perform twist without varying the processing gap. Thereby, the electrolyte in the gap can be perturbed and renewed continuously. Accordingly, bubbles and products produced during electrolysis can be removed sufficiently, enhancing processing precision and surface quality using the processing electrode on processing the workpiece.
    Type: Grant
    Filed: December 23, 2008
    Date of Patent: September 18, 2012
    Assignee: Metal Industries Research & Development Centre
    Inventors: Jung-Chou Hung, Dayu Lin
  • Patent number: 8236162
    Abstract: An electroerosion machining system comprises an electrode, a power supply, an electrolyte supply, an electroerosion controller connected to and monitoring the power supply, and a working apparatus configured to move the electrode relative to the workpiece. The electroerosion machining system further comprises a CNC controller configured to cooperate with the electroerosion controller to control the working apparatus, and to calculate a wear value of the electrode. Further, the CNC controller is configured to segment the toolpath of every layer into a plurality of segments, and to divide the compensation value for every layer to be machined into a plurality of value segments, and further to use the value segments to compensate for electrode wear along the respective toolpath segments during machining of the workpiece. An electroerosion machining method is also presented.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: August 7, 2012
    Assignee: General Electric Company
    Inventors: Yimin Zhan, Bin Wei, Michael Scott Lamphere, Renwei Yuan, Yuanfeng Luo
  • Patent number: 8070933
    Abstract: The invention is an electrolytic microfinishing process which utilizes a conductive tool as a cathode and a conductive workpiece as an anode both connected to a power supply. Electrolytic fluid is pumped between the tool and workpiece, creating a decomposition of the workpiece surface allowing the surface of the workpiece to be removed or wiped away by the interaction of the flowing electrolyte and rotation of the tool without generating any heat at a rate significantly faster than any other known machining process. The tool has no contact with the workpiece and accordingly, requires very low clamping loads to hold the workpiece in the spindle during the finishing operation. Due to the low clamping loads, the distortion of the workpiece is completely eliminated. Modulating the power supply during the work cycle allows the use of a single tool for both roughing and finishing as a continuous cycle to significantly provide surface finishes previously unobtainable.
    Type: Grant
    Filed: May 6, 2006
    Date of Patent: December 6, 2011
    Assignee: Thielenhaus Microfinishing Corp.
    Inventor: Manfred G. Becker
  • Patent number: 8057645
    Abstract: A system and method for electrochemically machining a work-piece contains a fixture capable of receiving a work-piece and securing the work-piece to the fixture. An electrolyte source is also provided. In addition, the system contains a rotary drive subassembly capable of receiving a portion of the work-piece therein, motion of the rotary drive assembly being determined by a received control signal, wherein frequency and amplitude of the control signal increases and decreases motion of the rotary drive subassembly, and wherein the control signal is a trapezoidal waveform.
    Type: Grant
    Filed: July 6, 2007
    Date of Patent: November 15, 2011
    Assignee: Turbocam, Inc.
    Inventors: Thomas S. McGee, Marian B. Noronha, Hans Hendrik Wolters
  • Patent number: 8052860
    Abstract: A method and system are provided for the shaping and polishing of the surface of a material selected from the group consisting of electrically semi-conductive materials and conductive materials. An electrically non-conductive polishing lap incorporates a conductive electrode such that, when the polishing lap is placed on the material's surface, the electrode is placed in spaced-apart juxtaposition with respect to the material's surface. A liquid electrolyte is disposed between the material's surface and the electrode. The electrolyte has an electrochemical stability constant such that cathodic material deposition on the electrode is not supported when a current flows through the electrode, the electrolyte and the material. As the polishing lap and the material surface experience relative movement, current flows through the electrode based on (i) adherence to Faraday's Law, and (ii) a pre-processing profile of the surface and a desired post-processing profile of the surface.
    Type: Grant
    Filed: December 14, 2007
    Date of Patent: November 8, 2011
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Darell E. Engelhaupt, Mikhail V. Gubarev, William David Jones, Brian D. Ramsey, Carl M. Benson
  • Patent number: 8034228
    Abstract: A method and device for the production of components having a three-dimensionally formed surface by a lowering operation with an electrochemical ablation process, namely a Precise Electro Chemical Machining (PECM) process, is disclosed. The method includes the steps of: a) providing a specially pre-formed workpiece featuring a specific dimensional allowance; b) providing at least one working electrode, in which case the contour of the working electrode, or of each working electrode, is adapted to the contour of the three-dimensionally formed surface to be produced; and c) lowering the three-dimensionally formed surface by placing the pre-formed workpiece and the working electrode, or each working electrode, in an electrolyte and by applying an electrical voltage or an electrical current, in which case the working electrode, or each working electrode, is moved in the sense of a circular advance motion in the direction toward the workpiece.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: October 11, 2011
    Assignee: MTU Aero Engines GmbH
    Inventors: Erwin Bayer, Albin Platz
  • Publication number: 20110073485
    Abstract: A method of electrochemical machining that includes the steps of: positioning a workpiece and a tooling piece in a first position; moving at least one of the workpiece and the tooling piece toward the other such that the workpiece and the tooling piece occupy a second position; moving at least one of the workpiece and the tooling piece away from the other such that the workpiece and the tooling piece occupy a third position; and during at least a portion of the moving of the workpiece and/or the tooling piece from the first position to the second position and from the second position to the third position, using a power supply to apply a voltage across a gap formed between the workpiece and the tooling piece.
    Type: Application
    Filed: September 28, 2009
    Publication date: March 31, 2011
    Inventors: Yuefeng Luo, William E. Adis
  • Patent number: 7807037
    Abstract: A method for removing a metal layer comprising the steps of providing a part having a slot, providing a porous metallic cathode comprising a recess bounded by a wall having an outer surface corresponding to the slot, inserting the porous metallic cathode into the slot, introducing an electrolyte into the recess of the porous metallic cathode, and removing a portion of an inner surface of the slot by flowing an electric current between the part and the porous metallic cathode.
    Type: Grant
    Filed: February 21, 2008
    Date of Patent: October 5, 2010
    Assignee: United Technologies Corporation
    Inventor: Frederick R. Joslin
  • Publication number: 20100163427
    Abstract: An electromachining system is described. The electromachining system includes a computer numerical controller (CNC) device and an electromachining controller device coupled to the CNC device and a power supply. The electromachining system also includes an electromachining tool coupled to the CNC device and the power supply. The electromachining controller device is configured to control operation of the electromachining tool and the CNC device is configured to position the electromachining tool relative to a workpiece.
    Type: Application
    Filed: December 31, 2008
    Publication date: July 1, 2010
    Inventors: Yimin Zhan, Renwei Yuan, Yuangfeng Luo
  • Publication number: 20100078333
    Abstract: An electroerosion machining system comprises an electrode, a power supply, an electrolyte supply, an electroerosion controller connected to and monitoring the power supply, and a working apparatus configured to move the electrode relative to the workpiece. The electroerosion machining system further comprises a CNC controller configured to cooperate with the electroerosion controller to control the working apparatus, and to calculate a wear value of the electrode. Further, the CNC controller is configured to segment the toolpath of every layer into a plurality of segments, and to divide the compensation value for every layer to be machined into a plurality of value segments, and further to use the value segments to compensate for electrode wear along the respective toolpath segments during machining of the workpiece. An electroerosion machining method is also presented.
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Yimin Zhan, Bin Wei, Michael Scott Lamphere, Renwei Yuan, Yuanfeng Luo
  • Patent number: 7527723
    Abstract: An electrolytic processing apparatus can increase the efficiency of the dissociation reaction of water and efficiently perform electrolytic processing, and can eliminate the need for an operation of a change of ion exchanger. The electrolytic processing apparatus includes: a processing electrode and a feeding electrode; a liquid supply section for supplying a liquid containing an ion-exchange material between the workpiece and at least one of the processing electrode and the feeding electrode; a power source for applying a voltage between the processing electrode and the feeding electrode; and a drive section for moving the workpiece and at least one of the processing electrode and the feeding electrode relative to each other; wherein electrolytic processing of the workpiece is carried out while keeping the workpiece not in contact with but close to the processing electrode at a distance of not more than 10 ?m.
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: May 5, 2009
    Assignee: Ebara Corporation
    Inventors: Itsuki Kobata, Yutaka Wada, Hirokuni Hiyama, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki, Akira Kodera
  • Patent number: 7462273
    Abstract: When forming metallic components, in particular three-dimensionally curved blades, which constitute a single piece with the blading of turbomachine rotor wheels, the linear oscillation of the electrode acting as a tool is superimposed by a circular oscillation, enabling the electrode to turn into the workpiece conformally with its shape. Further forming is performed by circular oscillation with circular feed in the one and/or the other direction. An embodiment of the corresponding apparatus comprises an electrode holder (9) with linear feed (Zvor) and linear oscillation (Zosz) and a workpiece holder (5) with circular oscillation (Cosz) and circular feed (Cvor).
    Type: Grant
    Filed: December 12, 2003
    Date of Patent: December 9, 2008
    Assignee: Rolls-Royce Deutschland Ltd & Co KG
    Inventor: Rainer Mielke
  • Patent number: 7425250
    Abstract: A system for electrochemical mechanical polishing of a conductive surface of a wafer is provided. The system includes a wafer holder to hold the wafer and a belt pad disposed proximate to the wafer to polish the conductive surface. Application of a potential difference between conductive surface and an electrode and establishing relative motion between the belt pad and the conductive surface result in material removal from the conductive surface. Electrical contact to the surface is provided through either contacts embedded in the belt pad or contacts placed adjacent the belt pad.
    Type: Grant
    Filed: April 23, 2004
    Date of Patent: September 16, 2008
    Assignee: Novellus Systems, Inc.
    Inventors: Bulent M. Basol, Homayoun Talieh
  • Patent number: 7329335
    Abstract: Substantially uniform deposition of conductive material on a surface of a substrate, which substrate includes a semiconductor wafer, from an electrolyte containing the conductive material can be provided by way of a particular device which includes first and second conductive elements. The first conductive element can have multiple electrical contacts, of identical or different configurations, or may be in the form of a conductive pad, and can contact or otherwise electrically interconnect with the substrate surface over substantially all of the substrate surface. Upon application of a potential between the first and second conductive elements while the electrolyte makes physical contact with the substrate surface and the second conductive element, the conductive material is deposited on the substrate surface. It is possible to reverse the polarity of the voltage applied between the anode and the cathode so that electro-etching of deposited conductive material can be performed.
    Type: Grant
    Filed: June 10, 2003
    Date of Patent: February 12, 2008
    Assignee: Novellus Systems, Inc.
    Inventors: Homayoun Talieh, Cyprian Uzoh, Bulent M. Basol
  • Patent number: 7294244
    Abstract: An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with another independent aspect of the present invention, the workpiece processing station is adapted for adjusting the level of the processing fluid relative to a workpiece, wherein the portion of the workpiece to be processed and possibly the paddle is selectively immersed within the processing fluid. In accordance with a further independent aspect of the present invention, a paddle is provided for use proximate to a workpiece in a workpiece processing station. The paddle includes a one or more sets of delivery ports and one or more sets of fluid recovery ports. In at least one embodiment, the paddle provides for agitation of a processing fluid proximate to the surface of the workpiece. In at least another embodiment, the paddle provides for the delivery and/or recovery of one or more fluids to the portion of the workpiece to be processed.
    Type: Grant
    Filed: February 14, 2003
    Date of Patent: November 13, 2007
    Assignee: Semitool, Inc.
    Inventors: Thomas H. Oberlitner, Kyle M. Hanson
  • Patent number: 7211178
    Abstract: On a fixture for electro-chemical machining for the production of long, curved cavities (11) in a component (12), the working electrode (3) of the electro-chemical machining tool (1) is connected to a guide body (1a) which moveably rests against the inner walls of the respective cavity by means of power-actuated guide elements (2), with the guide body being connected to a flexurally soft and torsionally stiff guide linkage (5) coupled to a feed and rotary drive. Control of the movement of the guide body is accomplished in dependence of at least one wall thickness measured with a measuring device (13, 14) during feed movement.
    Type: Grant
    Filed: August 18, 2004
    Date of Patent: May 1, 2007
    Assignee: Rolls-Royce Deutschland Ltd & Co KG
    Inventor: Karl Schreiber
  • Patent number: 7201829
    Abstract: The present invention includes a mask plate design that includes at least one or a plurality of channels portions on a surface of the mask plate, into which electrolyte solution will accumulate when the mask plate surface is disposed on a surface of wafer, and out of which the electrolyte solution will freely flow. There are also at least one or a plurality of polish portions on the mask plate surface that allow for polishing of the wafer when the mask plate surface is disposed on a surface of wafer.
    Type: Grant
    Filed: September 20, 2001
    Date of Patent: April 10, 2007
    Assignee: Novellus Systems, Inc.
    Inventors: Bulent M. Basol, Cyprian Uzoh, Jeff A. Bogart
  • Patent number: 7192260
    Abstract: Electrochemical machining is used to generate the helical lobe profiles of the stator of a progressive cavity pump or motor. A thin, elastomeric liner, of uniform thickness is bonded either to the interior of the stator, or to the exterior of the rotor. Where the elastomeric liner is to be bonded to the interior of the stator, bonding is improved by electrically etching the interior of the stator during the electrochemical machining process to produce a roughened surface.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: March 20, 2007
    Assignee: Lehr Precision, Inc.
    Inventors: Terry Lievestro, John Reynolds, Tom Chamberlain
  • Patent number: 7125477
    Abstract: Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact element is a rotating member. In one embodiment, the contact element comprises a noble metal.
    Type: Grant
    Filed: August 2, 2002
    Date of Patent: October 24, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Paul Butterfield, Liang-Yuh Chen, Yongqi Hu, Antoine Manens, Rashid Mavliev, Stan Tsai
  • Patent number: 7107676
    Abstract: Manufacturing equipment and manufacturing process steps that improve upon prior art processes for the manufacturing of filament tube and arc tube light sources, their components and subassemblies, and lamps employing said light sources. A double ended, tipless filament tube or arc tube light source incorporates a drawn-down tubular body, and one piece foliated leads with spurs for process handling and for spudding into a filament with stretched-out legs. Bugled ends on the body provide a novel cutoff means, facilitate a flush-fill finishing process, and enhance mounting and support of the light sources in lamps. The foliated leads are made from a continuous length of wire in a process including foil hammering and two-bath AC electrochemical etching. Cost-reduced light source and lamp production enables affordable household consumer lamps, even when containing two series-connected halogen filament tubes.
    Type: Grant
    Filed: November 5, 2003
    Date of Patent: September 19, 2006
    Inventor: Elmer G. Fridrich
  • Patent number: 7029567
    Abstract: An edge cleaning system and method is disclosed in which a directed stream of a mild etching solution is supplied to an edge area of a rotating workpiece, including the front surface edge and bevel, while a potential difference between the workpiece and the directed stream is maintained. In one aspect, the present invention provides an edge cleaning system that is disposed in the same processing chamber that is used for deposition or removal processing of the workpiece. In another aspect, the mild etching solution used for edge removal is also used to clean the front surface of the wafer, either simultaneously with or sequentially with the edge removal process.
    Type: Grant
    Filed: December 20, 2002
    Date of Patent: April 18, 2006
    Assignee: Asm Nutool, Inc.
    Inventor: Bulent M. Basol
  • Publication number: 20040195109
    Abstract: An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.
    Type: Application
    Filed: April 21, 2004
    Publication date: October 7, 2004
    Inventors: Yuzo Mori, Mitsuhiko Shirakashi, Yasushi Toma, Itsuki Kobata, Takayuki Saito
  • Patent number: 6592742
    Abstract: A method of chemically polishing a metal layer on a substrate is provided. The metal layer is chemically polished using an electrochemical polishing (ECP) process. In the ECP process, the substrate is immersed in a chemical polishing solution including a surfactant. The surfactant in the polishing solution covers the surface of the substrate such that only topographic portions of the substrate surface are exposed to the chemical polishing solution. Thereafter, an electrical potential applied to the substrate removes topographic portions of the substrate that are exposed to the polishing solution.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: July 15, 2003
    Assignee: Applied Materials Inc.
    Inventors: Lizhong Sun, Shijian Li
  • Patent number: 6532662
    Abstract: According to this dynamic pressure groove processing method, dynamic pressure grooves are formed in specified regions by electrochemical machining with the electrode of an electrode tool put close to a workpiece in the initial stage. Through this electrochemical machining, corners of land portions adjacent to the dynamic pressure grooves can be curved and smoothed. Next, by subjecting the workpiece to electrochemical machining with the electrode of the electrode tool put away from the workpiece, the land portions are to undergo weak electrochemical machining. Surface roughness of surfaces of the land portions can be reduced, and the curved corners of the land portions can be made smoother at the same time. Therefore, the abrasion resistance characteristic of the dynamic pressure grooves can be improved further than that achieved by the conventional electrochemical machining, allowing the abrasion resistance characteristic and reliability to be sufficiently improved.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: March 18, 2003
    Assignee: Koyo Seiko Co., Ltd.
    Inventors: Yasuhiro Kobayashi, Yoshiki Fujii, Takeshi Takahashi
  • Patent number: 6447668
    Abstract: An apparatus for detecting the end-point of an electropolishing process of a metal layer formed on a wafer includes an end-point detector. The end-point detector is disposed adjacent the nozzle used to electropolish the wafer. In one embodiment, the end-point detector is configured to measure the optical reflectivity of the portion of the wafer being electropolished.
    Type: Grant
    Filed: May 12, 2000
    Date of Patent: September 10, 2002
    Assignee: ACM Research, Inc.
    Inventor: Hui Wang
  • Patent number: 6423206
    Abstract: To avoid or minimize the occurrence of cross streaks or current streaks on a substrate that is transported through an electrolytic bath and roughened electrochemically in it, the current density is regulated in the electrolyte between a first alternating or three-phase current electrode and the substrate in such a way that at the beginning of a roughening zone, the current density has a lesser value than within the roughening zone, in the transport direction of the substrate. Downstream of the first alternating or three-phase current electrode, either a further alternating current electrode or a further three-phase current electrode acts on the substrate. In a preferred embodiment, the first alternating or three-phase current electrode has a rounded outline, which is composed of a curved portion and adjoining it a straight portion.
    Type: Grant
    Filed: March 1, 2000
    Date of Patent: July 23, 2002
    Assignee: Agfa-Gevaert N.V.
    Inventors: Georg Haby, Raimund Haas, Uwe Gartmann, Günter Hultzsch, Klaus Joerg, Jörg Kaden, Hermann Idstein
  • Patent number: 6413407
    Abstract: An ECM apparatus includes a fluted cathode tool for being driven through a tubular workpiece for electrochemically forming internal flutes therein. The cathode tool is sealed at one end for isolating electrolyte over the flutes thereof to seal against flow of the electrolyte past the tool and into the finished fluted bore.
    Type: Grant
    Filed: November 27, 2000
    Date of Patent: July 2, 2002
    Assignee: Lehr Precision, Inc.
    Inventors: Norbert Anthony Bruns, Edward Charles Bruns, Thomas Howard Chamberlain
  • Patent number: 6344131
    Abstract: A support made of an aluminum plate for a planographic printing plate is electrochemically roughened in an acidic aqueous solution in an electrolytic apparatus with plural cathodes and anodes arranged alternately on one side of the plate by applying a DC voltage. A soft starting zone which comprises at least one electrode connected to an electric power supply, which is separate from a main electric source, is provided. A current density of 0.01 to 100 A/dm2, which is lower than the current density used in any subsequent main roughening, is provided in the soft starting zone.
    Type: Grant
    Filed: December 21, 1999
    Date of Patent: February 5, 2002
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Atsuo Nishino, Akio Uesugi
  • Patent number: 6299755
    Abstract: A method is provided for electropolishing a stent. A stent is mounted on a rack having electropolishing mounts. Each of the mounts has a base and an electrically conductive first member having a first end and a second end. The first end is connected to the base and the second end contacts the external surface of the stent. Each of the mounts also has a non-electrically conductive second member having a first end and a second end. The first end of the second member is attached to the base and the second end is placed in the bore of the stent. The second ends of the first and second members bias towards each other to secure the stent between them. The stent is immersed in an electropolishing bath and an electrical current is applied to the first member.
    Type: Grant
    Filed: July 2, 1998
    Date of Patent: October 9, 2001
    Assignee: Medinol Ltd.
    Inventor: Jacob Richter
  • Patent number: 6221235
    Abstract: A sacrificial cores in castings of metallic or non-metallic materials is made from a metal that can be electrolytically dissolved, and is removed from the casting by electrochemical machining. The sacrificial core may be a hollow shell incorporating an integral electrode within the shell and electrically insulated from the shell.
    Type: Grant
    Filed: November 30, 1998
    Date of Patent: April 24, 2001
    Assignee: Faraday Technology Marketing Group LLC
    Inventor: Lawrence E. Gebhart
  • Patent number: 5667666
    Abstract: A process for roughening a surface of a support for a lithographic printing plate in which an electric current is supplied between a metal web and an electrode facing the metal web in an electrolyte containing metal ions so that the metal web is subjected to electrochemical processing continuously, 1-20 pause sections are provided in the electrochemical processing and the time taken for passage through once processing pause section in the electrochemical processing is set to 1-30 seconds. With the process, the grain shape can be controlled with no troublesome condition setting to improve a scumming resistance without deteriorating a printing durability and a fill-in reduction so that the plate has superior performance.
    Type: Grant
    Filed: July 30, 1996
    Date of Patent: September 16, 1997
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Atsushi Matsuura, Akio Uesugi
  • Patent number: 5501787
    Abstract: A system for making porous silicon on blank and patterned Si substrates by "immersion scanning", particularly suitable for fabricating light-emitting Si devices and utilizing an open electrolytic cell having a cathode and an opposing anode consisting of a Si substrate on which the porous silicon is to be formed, both disposed, with their opposing surfaces in parallel, in an aqueous HF solution electrolyte contained in the cell. The substrate anode is mounted to be movable relative to the electrolyte so as to be mechanically cycled or scanned in and out of the electrolyte at a programmable rate during anodization. The uniformity, thickness and porosity of the resulting anodized layer on the substrate are determined by the scanning speed, number of cycles, current density, and HF-based electrolyte parameters of the system, and the Si substrate resistivity, conductivity type, and crystal orientation.
    Type: Grant
    Filed: February 27, 1995
    Date of Patent: March 26, 1996
    Assignee: International Business Machines Corporation
    Inventors: Ernest Bassous, Jean-Marc Halbout, Subramanian S. Iyer, Vijay P. Kesan