Treating Process Fluid By Means Other Than Agitation Or Heating Or Cooling Patents (Class 205/98)
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Patent number: 11725296Abstract: Provided is a plate that is arranged between a substrate and an anode in a plating tank. This plate has a plurality of circular pores on each one of at least three reference circles that are concentric with each other and that are different from each other in diameter. The plurality of circular pores include three circular pores that are arranged respectively on adjacent three of the at least three reference circles, and that have centers which are out of alignment with each other on an arbitrary radius on the plate.Type: GrantFiled: May 7, 2021Date of Patent: August 15, 2023Assignee: EBARA CORPORATIONInventors: Mitsuhiro Shamoto, Masashi Shimoyama, Shao Hua Chang
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Patent number: 11230781Abstract: It is an object of the present disclosure to provide a method that allows uniformly forming a silver film by a solid electrolyte deposition. One aspect of this embodiment is a method for forming a silver film. The method includes disposing an anode, a substrate as a cathode, and a separator such that the separator is positioned between the anode and the substrate and the separator is in contact with a surface of the substrate, the separator including an electrolytic solution that contains silver ions, and applying a voltage between the anode and the substrate to form a silver film on the substrate. The separator is a porous membrane without ion exchange functional group. The electrolytic solution contains organic sulfonic acid ions. The substrate contains a crystalline metal, and a silver film is formed on the crystalline metal.Type: GrantFiled: June 3, 2021Date of Patent: January 25, 2022Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventor: Hirofumi Iisaka
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Patent number: 10604861Abstract: Device for vertical galvanic metal deposition on a substrate comprising a first and a second device, arranged vertically parallel to each other; the first device comprising a first anode having a plurality of through-going conduits and a first carrier having a plurality of through-going conduits; wherein said first anode and said first carrier are connected to each other; wherein the second device comprises a first substrate holder adapted to receive a first substrate to be treated, wherein said first substrate holder at least partially surrounds the first substrate along its outer frame, wherein the first device further comprises a plurality of plugs, each plug comprising a through-going channel, each plug arranged such that it runs from the backside of the first carrier through a through-going conduit of the first carrier and further through the conduit of the first anode element, and the plugs are detachably connected to the first device.Type: GrantFiled: August 18, 2017Date of Patent: March 31, 2020Assignee: Atotech Deutschland GmbHInventor: Ray Weinhold
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Patent number: 10233556Abstract: The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. In many cases the material is a metal and the substrate is a semiconductor wafer, though the embodiments are no so limited. Typically, the embodiments herein utilize a channeled plate positioned near the substrate, creating a cross flow manifold defined on the bottom by the channeled plate, on the top by the substrate, and on the sides by a cross flow confinement ring. Also typically present is an edge flow element configured to direct electrolyte into a corner formed between the substrate and substrate holder. During plating, fluid enters the cross flow manifold both upward through the channels in the channeled plate, and laterally through a cross flow side inlet positioned on one side of the cross flow confinement ring. The flow paths combine in the cross flow manifold and exit at the cross flow exit, which is positioned opposite the cross flow inlet.Type: GrantFiled: May 20, 2016Date of Patent: March 19, 2019Assignee: Lam Research CorporationInventors: Gabriel Hay Graham, Jacob Lee Hiester, Lee Peng Chua, Bryan L. Buckalew
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Patent number: 10183292Abstract: A method, circuit and apparatus for detecting capacitance on a droplet actuator, inter alia, for determining the presence, partial presence or absence of a droplet at an electrode on a droplet actuator by: (a) providing a droplet actuator comprising: (i) a substrate comprising electrodes arranged on the substrate for conducting droplet operations on a surface of the substrate; (ii) a capacitance detection circuit for detecting capacitance at the droplet operations surface at one or more of the electrodes; (b) detecting capacitance at the droplet operations surface at one or more of the electrodes; and (c) determining from the capacitance the presence, partial presence or absence of a droplet at the droplet operations surface at the electrode.Type: GrantFiled: December 14, 2015Date of Patent: January 22, 2019Assignee: ADVANCED LIQUID LOGIC, INC.Inventors: Ryan A. Sturmer, Michael G. Pollack, Vamsee K. Pamula, Vijay Srinivasan, Philip Y. Paik
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Patent number: 10137435Abstract: The present invention concerns a method for the preparation of a catalyst onto a solid support of a (semi-)conductive material consisting in depositing said catalyst onto said support from a near-neutral aqueous solution containing at least one nickel or cobalt organic complex and at least one basic oxoanion, by a method selected in the group consisting of reductive electrodeposition, photochemical electrodeposition and photoelectrochemical deposition. The present invention also concerns said catalyst and uses thereof.Type: GrantFiled: April 4, 2013Date of Patent: November 27, 2018Assignees: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, UNIVERSITE JOSEPH FOURIERInventors: Vincent Artero, Marc Fontecave, Saioa Cobo, Pierre-Andre Jacques, Holger Dau, Jonathan Heidkamp
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Patent number: 9708723Abstract: An electroplating cell includes: (i) an anode chamber in which an anode chamber solution is stored; and (ii) a separator that includes a base material and an organic plating additive contained in the base material, separates the anode chamber and a cathode from each other, and selectively allows permeation of metal ions contained in the anode chamber solution.Type: GrantFiled: February 4, 2015Date of Patent: July 18, 2017Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Fusayoshi Miura, Atsushi Murase, Naoki Hasegawa, Motoki Hiraoka, Yuki Sato
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Patent number: 9662651Abstract: An active matrix electrowetting on dielectric (AM-EWOD) device includes a plurality of array elements configured to manipulate one or more droplets of fluid on an array, each of the array elements including a corresponding array element circuit. Each array element circuit includes a top substrate electrode and a drive electrode between which the one or more droplets may be positioned, with an insulator layer being interposed between the one or more droplets and the drive electrode; and write circuitry configured to write data to the array element. At least some of the array element circuits include measure circuitry configured to detect a pinhole defect in the insulator layer.Type: GrantFiled: February 12, 2015Date of Patent: May 30, 2017Assignee: Sharp Microfluidic Solutions LimitedInventor: Benjamin James Hadwen
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Patent number: 9511369Abstract: The invention provides a droplet actuator. The droplet actuator may include a base substrate and a top substrate separated to form a gap. The base substrate may include electrodes configured for conducting droplet operations in the gap; and the top substrate may include a glass substrate portion coupled to a non-glass portion, where the non-glass portion may include one or more openings establishing a fluid path extending from an exterior of the droplet actuator and into the gap. The invention also provides related methods of manufacturing the droplet actuator, methods of using the droplet actuator, and methods of loading the droplet actuator.Type: GrantFiled: April 9, 2014Date of Patent: December 6, 2016Assignee: Advanced Liquid Logic, Inc.Inventors: Vijay Srinivasan, Michael G. Pollack, Alexander Shenderov, Zhishan Hua, Arjun Sudarsan
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Patent number: 9464361Abstract: Described are apparatus and methods for electroplating one or more metals onto a substrate. Embodiments include electroplating apparatus configured for plating highly uniform metal layers. In specific embodiments, the apparatus includes a flow-shaping element made of an ionically resistive material and having a plurality of channels made through the flow shaping element. The channels allow for transport of the electrolyte through the flow shaping element during electroplating. The channel openings are arranged in a spiral-like pattern on the substrate-facing surface of the flow shaping element such that the center of the spiral-like pattern is offset from the center of the flow shaping element.Type: GrantFiled: June 19, 2014Date of Patent: October 11, 2016Assignee: Novellus Systems, Inc.Inventors: Steven T. Mayer, David W. Porter
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Patent number: 9453310Abstract: Road markers, highway delineators and other products are manufactured from a compounded mixture of polymers and pulverized or micronized rubber powder, using a multi-layer plastic extrusion process on industry standard plastic extrusion equipment. The compound retains shape and includes a mixture of natural and synthetic rubbers, carbon black, fillers and oils; a propylene-based elastomer; a mixture of light color aliphatic hydrocarbon resins, and linear low density polyethylene.Type: GrantFiled: September 30, 2013Date of Patent: September 27, 2016Assignee: K. Jabat Inc.Inventors: David Kulkaski, Thomas D. Simmering
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Patent number: 9151520Abstract: A heat pump including at least two devices for displacement of droplets of liquid by electro-wetting, where one includes a control unit such that it forms a compressor of the pneumatic fluid confined between the droplets of liquid, where the other includes a control unit such that it forms an expander to expand the pneumatic fluid confined between the droplets of liquid, where the high-pressure end of the compressor is connected to the high-pressure end of the expander through a thermal exchanger of a hot source, and where the low-pressure end of the expander is connected to the low-pressure end of the compressor through a thermal exchanger with a cold source, and where the unit formed by the compressor, the expander, and the thermal exchangers forms a single channel.Type: GrantFiled: July 21, 2009Date of Patent: October 6, 2015Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventor: Ghislain Despesse
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Publication number: 20150136609Abstract: An Sn alloy plating apparatus is disclosed which can relatively easily perform control of an Sn alloy plating solution, including control of the Sn ion concentration and the acid concentration of the plating solution.Type: ApplicationFiled: October 28, 2014Publication date: May 21, 2015Inventors: Masashi SHIMOYAMA, Masamichi TAMURA, Yuji ARAKI
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Patent number: 8961771Abstract: Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.Type: GrantFiled: July 26, 2012Date of Patent: February 24, 2015Assignee: APPLIED Materials, Inc.Inventors: Rajesh Baskaran, Robert W. Batz, Jr., Bioh Kim, Tom L. Ritzdorf, John L. Klocke, Kyle M. Hanson
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Patent number: 8852417Abstract: Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and a counter electrode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, a counter electrode, a second processing fluid, and an anion permeable barrier layer. The anion permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain anionic species to transfer between the two fluids. Some of the described processes produce deposits over repeated plating cycles that exhibit resistivity values within desired ranges.Type: GrantFiled: February 27, 2012Date of Patent: October 7, 2014Assignee: APPLIED Materials, Inc.Inventors: Rajesh Baskaran, Robert W. Batz, Jr., Bioh Kim, Tom L. Ritzdorf, John Lee Klocke, Kyle M. Hanson
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Patent number: 8808521Abstract: A method and system are disclosed for controlling plating bath compositions. Speciation analyzers including HPLC and mass spectrometry are employed to separate, detect, identify, and quantify additives and degradation products. A control unit is linked to a plating bath interface, analyzer interface, and valves to control the flow of plating bath to an analyzer sampler and back to plating bath. For each degradation product, a response output is determined for at least one performance factor in terms of an additive equivalent amount that produces the same effect. A data processing unit receives concentration data for additives and degradation products from speciation analyzers and calculates an amount of each additive needed to replenish a used bath. As a result, the bleed-and-feed ratio for maintaining plating baths can be substantially reduced with significant productivity improvement and cost savings in terms of chemicals, chemical disposal, less down time and improved product quality.Type: GrantFiled: January 7, 2010Date of Patent: August 19, 2014Inventor: Boli Zhou
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Publication number: 20140209472Abstract: Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.Type: ApplicationFiled: February 10, 2014Publication date: July 31, 2014Applicant: APPLIED MATERIALS, INC.Inventors: Rajesh Baskaran, Robert W. Batz, JR., Bioh Kim, Tom L. Ritzdorf, John L. Klocke, Kyle M. Hanson
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Publication number: 20140076798Abstract: The invention relates to a method for producing a noble metal/metal layer, which has particularly advantageous tribological properties, comprising the following steps: providing a bath for the currentless deposition of a metal layer, which additionally contains at least one type of noble metal ions; introducing a substrate into the bath; and applying a voltage.Type: ApplicationFiled: June 30, 2011Publication date: March 20, 2014Applicant: Schauenburg Ruhrkunststoff GmbHInventor: Stefan Koppe
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Patent number: 8609254Abstract: Methods of preparing metal and metal alloys with partially microcrystalline anodic coatings are disclosed. Associated article therefrom are correspondingly disclosed. The partially microcrystalline anodic coatings exhibit steam, superheated steam, alkaline and acidic resistance. Partially microcrystalline anodic coating can be prepared by impregnation of micropores of a metal or metal substrate with metal precursor species, conversion of the metal precursor species into metal hydroxides, thermal treatment to dry out moisture and to promote phase transformation of the metal hydroxide product into metal oxides solids and bonding with metastable metal oxide substance in the pore structure of the metal or metal alloy substrate, and hydrothermal sealing to create sealed partially microcrystalline anodic coating.Type: GrantFiled: May 19, 2010Date of Patent: December 17, 2013Assignee: Sanford Process CorporationInventors: Timothy P. Cabot, John J. Tetrault, Dong-Jin Sung
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Patent number: 8603305Abstract: An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.Type: GrantFiled: March 18, 2011Date of Patent: December 10, 2013Assignee: Novellus Systems, Inc.Inventors: Robert Rash, Richard Abraham, David W. Porter, Steven T. Mayer
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Publication number: 20130292255Abstract: The purpose of the present invention is to provide an electrical Al plating bath that poses little danger of exploding or igniting as a result of contacting air or water, and contains no benzene, toluene, xylene, naphthalene, or 1,3,5-trimethylbenzene, which have detrimental effects to humans. The present invention provides an electrical aluminum or aluminum alloy fused salt plating bath that is obtained by heat treatment of an electrical aluminum or aluminum alloy fused salt plating bath containing (A) a halogenated aluminum as the primary component and (B) at least one other type of halide after adding (C) one, two or more reducible compounds selected from the group consisting of hydrides of elements in Group 1 Periods 2 through 6 of the Periodic Table of Elements and/or hydrides of Group 13 Periods 2 through 6 of the Periodic Table of Elements and amine borane compounds.Type: ApplicationFiled: January 4, 2012Publication date: November 7, 2013Applicant: DIPSOL CHEMICALS CO., LTDInventors: Manabu Inoue, Akira Hashimoto, Tadahiro Onuma, Toshiki Inomata, Keisuke Nonomura, Naruaki Konno
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Publication number: 20130284602Abstract: A device for metalizing wafers, in particular microchip wafers, in an electrolyte, contains a plurality of holder arrangements. Each holder arrangement has a chamber for the electrolyte which is separate from the electrolyte-receiving chambers in other holder devices, a ring acting as cathode, and an anode system as the anode being associated with each wafer.Type: ApplicationFiled: December 12, 2011Publication date: October 31, 2013Inventor: Markus Hacksteiner
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Patent number: 8524065Abstract: Embodiments of systems and methods for electrocoating a part are presented herein. According to one embodiment, an electrocoating system comprises a tank, a pump in fluid communication with the tank, and an external anode positioned outside of the tank. The external anode is a substantially membrane-free metal pipe configured to provide an electric charge to a fluid for electrocoating a part. The system may further comprise one or more internal nozzles positioned inside of the tank to direct an electrically charged fluid from the pump into the tank for electrocoating a part. In addition, the system may further comprise one or more external nozzles positionable outside of the tank to direct an electrically charged fluid from the pump to one or more selected areas of a part positioned for electrocoating outside of the tank.Type: GrantFiled: September 19, 2008Date of Patent: September 3, 2013Assignee: Metokote CorporationInventors: Brent Allen Schwartz, Brian Todd Young
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Patent number: 8475643Abstract: To provide an anodic oxidation method, a titanium oxide film manufacturing method and a catalyst carrying method which is suitable, for example, for anodic oxidation of aluminum, titanium and catalyst carrying on the surface of alumite (registered trademark), capable of generating an oxide film at a low cost and rapidly by eliminating the use of a strongly acid or strongly basic electrolytic solution and using a carbonated water as an electrolytic solution, capable of controlling the sealing treatment of oxide film through a simple method, capable of effecting the oxide film dyeing and catalyst carrying rationally and easily, and capable of effecting the catalyst carrying safely and surely without eroding a base material. An object (3) to be treated is electrolyzed in an electrolytic solution received in a treatment vessel (1) serving the object (3) as an anodic electrode. It is an anodic oxidation method in which an oxide film is generated on the surface of the object (3).Type: GrantFiled: April 27, 2004Date of Patent: July 2, 2013Inventors: Hideo Yoshida, Kentaro Abe, Kiyohito Sakon
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Publication number: 20130153431Abstract: Methods and apparatus for forming devices using nanotubes. In one embodiment, an apparatus for depositing nanotubes onto a workpiece comprises a vessel configured to contain a deposition fluid having a plurality of nanotubes including first nanotubes having a first characteristic and second nanotubes having a second characteristic. The apparatus further includes a sorting unit in the vessel configured to selectively isolate or otherwise sort the first nanotubes from the second nanotubes, and a field unit in the vessel configured to attach the first nanotubes to the workpiece. For example, the field unit can attach the first nanotubes to the workpiece such that the first nanotubes are at least generally parallel to each other and in a desired orientation relative to the workpiece.Type: ApplicationFiled: February 19, 2013Publication date: June 20, 2013Applicant: MICRON TECHNOLOGY, INC.Inventor: Micron Technology, Inc.
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Patent number: 8372658Abstract: A chemical analytic apparatus of the present invention is the one which proposes that a miniaturization, a making low-cost and portability are possible and also the operation of each process of separation, concentration and dilution of specimen is possible, and, which includes: an introduction means (S1) that introduces a droplet to which magnetic ultrafine particles are mixed into another liquid that differs from the droplet while maintaining a single droplet; a conveyance means by which the droplet that includes the magnetic particles is conveyed in another liquid of the introduction means by applying magnetic field externally to the magnetic ultrafine particles; and processing means (S2 to S6) by which operations for processing of chemical analysis are performed one by one in the process in which the droplet to which the magnetic ultrafine particles are mixed is conveyed by the conveyance means.Type: GrantFiled: February 7, 2012Date of Patent: February 12, 2013Assignee: Japan Science and Technology AgencyInventors: Mitsuhiro Shikida, Kazuo Sato, Hiroyuki Honda, Kohta Inouchi
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Publication number: 20130032484Abstract: A system for electroplating a rotogravure cylinder out of a plating solution having a concentration of copper ions wherein the cylinder is connectable to a current source is provided. The system includes a plating apparatus configured to copper plate the cylinder comprising a non-dissolvable anode, a plating tank configured to receive the cylinder, a controller configured to control operation of the apparatus, and a tube for delivering a mixture of a hardener and the plating solution to the plating tank.Type: ApplicationFiled: October 12, 2012Publication date: February 7, 2013Applicant: Chema Technology, Inc.Inventor: Chema Technology, Inc.
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Publication number: 20120325668Abstract: Solutions and processes for electrodepositing gallium or gallium alloys includes a plating bath free of complexing agents including a gallium salt, an indium salt, a combination thereof, and a combination of any of the preceding salts with copper, an acid, and a solvent, wherein the pH of the solution is in a range selected from the group consisting of from about zero to about 2.6 and greater than about 12.6 to about 14. An optional metalloid may be included in the solution.Type: ApplicationFiled: September 5, 2012Publication date: December 27, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Shafaat Ahmed, Hariklia Deligianni
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Publication number: 20120298515Abstract: A device (1) for the wet-chemical treatment of material to be treated (10), in particular of flat material to be treated (10), comprises a treatment vessel (2) for treating the material to be treated (10) with a treatment liquid (9), a transport device (24) for transporting the material to be treated (10) through the treatment vessel (2), and a feed device (11) for feeding an inert gas (16) into the treatment vessel (2).Type: ApplicationFiled: December 28, 2010Publication date: November 29, 2012Applicant: ATOTECH DEUTSCHLAND GMBHInventors: Andreas Skupin, Helmut Bruckner, Christian Lowinski
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Patent number: 8298395Abstract: An apparatus for electroplating a rotogravure cylinder out of a plating solution is disclosed. The apparatus includes a plating tank adapted to support the cylinder and to contain a plating solution so that the cylinder is at least partially disposed into the plating solution. The apparatus also includes a non-dissolvable anode at least partially disposed within the plating solution. A current source is electrically connected to the non-dissolvable anode and to the cylinder. An ultrasonic system may be provided to introduce wave energy into the plating solution includes at least one transducer element mountable within the tank and a power generator adapted to provide electrical energy to the transducer element. A holding tank having a circulation pump, a mixing system and heating and cooling elements for the plating solution may be provided.Type: GrantFiled: July 2, 2009Date of Patent: October 30, 2012Assignee: Chema Technology, Inc.Inventor: Hubert F. Metzger
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Patent number: 8282806Abstract: The preceding invention concerns a galvanic bath as well as a method for depositing a zinc-bearing layer onto a substrate surface. According to the invention, it is provided that the galvanic bath be divided into at least two cell chambers, in which the division occurs by means of a cation-exchange membrane and one cell chamber includes an acidic deposition-electrolyte and the other cell chamber includes a neutral or acidic anolyte. The acidic anolyte here is at least partially removed from the cell chamber containing it and is stripped of the foreign metal ions contained in it by means of a cation-exchange arrangement.Type: GrantFiled: November 12, 2009Date of Patent: October 9, 2012Assignee: Enthone Inc.Inventor: Axel Fuhrmann
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Patent number: 8236159Abstract: Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.Type: GrantFiled: April 28, 2006Date of Patent: August 7, 2012Assignee: Applied Materials Inc.Inventors: Rajesh Baskaran, Robert W. Batz, Jr., Bioh Kim, Tom L. Ritzdorf, John L. Klocke, Kyle M. Hanson
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Publication number: 20120175263Abstract: Methods, systems, and apparatus for plating a metal onto a work piece with a plating solution having a low oxygen concentration are described. In one aspect, a method includes reducing an oxygen concentration of a plating solution. The plating solution includes about 100 parts per million or less of an accelerator. After reducing the oxygen concentration of the plating solution, a wafer substrate is contacted with the plating solution in a plating cell. The oxygen concentration of the plating solution in the plating cell is about 1 part per million or less. A metal is electroplated with the plating solution onto the wafer substrate in the plating cell. After electroplating the metal onto the wafer substrate, an oxidizing strength of the plating solution is increased.Type: ApplicationFiled: December 13, 2011Publication date: July 12, 2012Inventors: Kousik GANESAN, Tighe SPURLIN, Jonathan D. REID, Shantinath GHONGADI, Andrew McKERROW, James E. DUNCAN
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Publication number: 20120152751Abstract: Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and a counter electrode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, a counter electrode, a second processing fluid, and an anion permeable barrier layer. The anion permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain anionic species to transfer between the two fluids. Some of the described processes produce deposits over repeated plating cycles that exhibit resistivity values within desired ranges.Type: ApplicationFiled: February 27, 2012Publication date: June 21, 2012Applicant: APPLIED MATERIALS, INC.Inventors: Rajesh Baskaran, Robert W. Batz, JR., Bioh Kim, Tom L. Ritzdorf, John Lee Klocke, Kyle M. Hanson
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Publication number: 20120088118Abstract: Described herein are electrodeposited corrosion-resistant multilayer coating and claddings that comprises multiple nanoscale layers that periodically vary in electrodeposited species or electrodeposited microstructures. The coatings may comprise electrodeposited metals, ceramics, polymers or combinations thereof. Also described herein are methods for preparation of the coatings and claddings.Type: ApplicationFiled: December 8, 2011Publication date: April 12, 2012Applicant: Modumetal LLCInventor: Christina LOMASNEY
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Patent number: 8123926Abstract: Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and an anion permeable barrier layer. The anion permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain anionic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit resistivity values within desired ranges.Type: GrantFiled: May 3, 2006Date of Patent: February 28, 2012Assignee: Applied Materials, Inc.Inventors: Rajesh Baskaran, Robert W Batz, Jr., Bioh Kim, Tom L Ritzdorf, John L Klocke, Kyle M Hanson
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Publication number: 20110284381Abstract: Methods of preparing metal and metal alloys with partially microcrystalline anodic coatings are disclosed. Associated article therefrom are correspondingly disclosed. The partially microcrystalline anodic coatings exhibit steam, superheated steam, alkaline and acidic resistance. Partially microcrystalline anodic coating can be prepared by impregnation of micropores of a metal or metal substrate with metal precursor species, conversion of the metal precursor species into metal hydroxides, thermal treatment to dry out moisture and to promote phase transformation of the metal hydroxide product into metal oxides solids and bonding with metastable metal oxide substance in the pore structure of the metal or metal alloy substrate, and hydrothermal sealing to create sealed partially microcrystalline anodic coating.Type: ApplicationFiled: May 19, 2010Publication date: November 24, 2011Applicant: DURALECTRA-CHN, LLCInventors: Timothy P. Cabot, John J. Tetrault, Dong-Jin Sung
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Patent number: 7846316Abstract: Method and plating bath apparatus for setting the ionic strength of a plating composition using Donnan dialysis by flowing the plating composition along a first surface of a membrane while simultaneously flowing a deposition metal ion exchange composition along a second surface of the membrane such that the deposition metal ion crosses the membrane from the deposition metal ion exchange composition to the plating composition while an exchange cation different from the deposition metal ion crosses the membrane from the plating composition to the deposition metal ion exchange composition.Type: GrantFiled: May 25, 2006Date of Patent: December 7, 2010Assignee: Enthone Inc.Inventors: Axel Koenig, Andreas Möbius, Franz-Josef Stark
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Publication number: 20100294082Abstract: Proposed is a method for collecting valuable metal from an ITO scrap including a step of collecting tin by subjecting the ITO scrap to electrolysis. Further proposed is a method for collecting valuable metal from an ITO scrap including the steps of providing an ITO electrolytic bath and a tin collecting bath, dissolving the ITO scrap in the electrolytic bath, and thereafter collecting tin in the tin collecting bath. Additionally proposed is a method for collecting valuable metal from an ITO scrap including the steps of dissolving the ITO scrap by subjecting it to electrolysis as an anode in electrolyte, precipitating only tin contained in the solution as tin itself or a substance containing tin, extracting the precipitate, placing it in a collecting bath, re-dissolving this to obtain a solution of tin hydroxide, and performing electrolysis or neutralization thereto in order to collect tin.Type: ApplicationFiled: June 27, 2007Publication date: November 25, 2010Applicant: NIPPON MINING & METALS CO., LTD.Inventors: Yuichiro Shindo, Kouichi Takemoto
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Patent number: 7833404Abstract: A method of forming a film composed of a phosphate compound and a metal on the surface of an article to be treated by performing electrolytic treatment on a metal article to be treated in a phosphate chemical treatment bath. The method includes contacting the metal article having electrical conductivity with the phosphate chemical treatment bath containing phosphate ions and phosphoric acid, nitrate ions, metal ions that form a complex with phosphate ions in the phosphate chemical treatment bath, and metal ions for which the dissolution-precipitation equilibrium potential at which ions dissolved in the phosphate chemical treatment bath are reduced and precipitate as metal is equal to or greater than ?830 mV. The (oxidation-reduction potential) of the phosphate chemical treatment bath is maintained at equal to or greater than 700 mV.Type: GrantFiled: February 20, 2002Date of Patent: November 16, 2010Assignee: Denso CorporationInventors: Shigeki Matsuda, Shin Nishiya
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Publication number: 20100140099Abstract: A method of electroplating conductive material on semiconductor wafers controls undesirable surface defects by reducing the electroplating current as the wafer is being initially immersed in a plating bath. Further defect reduction and improved bottom up plating of vias is achieved by applying a static charge on the wafer before it is immersed in the bath, in order to enhance bath accelerators used to control the plating rate. The static charge is applied to the wafer using a supplemental electrode disposed outside the plating bath.Type: ApplicationFiled: February 15, 2010Publication date: June 10, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Liang Chang, Shau-Lin Shue
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Publication number: 20100122909Abstract: A chromium plating bath containing trivalent chromium ions and hexavalent chromium ions is prepared by a method including the steps of: (A) mixing chromic acid and an organic acid in an aqueous solution containing these acids and reducing chromic acid by the organic acid so as to prepare an aqueous solution not containing hexavalent chromium ions; (B) adding a pH adjustor to the aqueous solution not containing hexavalent chromium ions so as to adjust pH to a value of 1 to 4; and (C) further adding chromic acid to the aqueous solution not containing hexavalent chromium ions and having undergone the pH adjustment so as to prepare an aqueous solution containing trivalent chromium ions and hexavalent chromium ions. The chromium plating bath containing both trivalent chromium ions and hexavalent chromium ions can be prepared while easily and assuredly adjusting the contents (content ratio) of trivalent chromium ions and hexavalent chromium ions to predetermined values (a predetermined value).Type: ApplicationFiled: November 17, 2009Publication date: May 20, 2010Inventors: Toru Murakami, Suhaimi Hamid, Ryo Maeda
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Publication number: 20100116673Abstract: The present invention relates to a cationic electrodeposition coating composition, which provides an uncured electrodeposited film having storage elasticity modulus (G?) at 140° C. within a range of from 80 to 500 dyn/cm2 and loss elasticity modulus (G?) at 80° C. within a range of from 10 to 150 dyn/cm2, and which is superior in smoothness and edge coatability; and a method for establishing both of smoothness and edge coatability therewith; as well as; a cationic electrodeposition coating composition comprising crosslinked resin particles having an average particle size within a range of from 1.0 to 3.0 ?m and thermal softening temperature within a range of from 120 to 180° C.Type: ApplicationFiled: October 24, 2007Publication date: May 13, 2010Inventor: Teruzo Toi
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Publication number: 20100072071Abstract: Embodiments of systems and methods for electrocoating a part are presented herein. According to one embodiment, an electrocoating system comprises a tank, a pump in fluid communication with the tank, and an external anode positioned outside of the tank. The external anode is a substantially membrane-free metal pipe configured to provide an electric charge to a fluid for electrocoating a part. The system may further comprise one or more internal nozzles positioned inside of the tank to direct an electrically charged fluid from the pump into the tank for electrocoating a part. In addition, the system may further comprise one or more external nozzles positionable outside of the tank to direct an electrically charged fluid from the pump to one or more selected areas of a part positioned for electrocoating outside of the tank.Type: ApplicationFiled: September 19, 2008Publication date: March 25, 2010Applicant: METOKOTE CORPORATIONInventors: Brent Allen Schwartz, Brian Todd Young
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Publication number: 20100000872Abstract: The surface of a metal base is electroplated by utilizing an induction codeposition phenomenon using at least one of carbon dioxide and inert gas, an electroplating liquid containing a metal powder dispersed therein, and a surfactant in a supercritical state or a subcritical state. The concentration of the metal in the electroplating liquid is in a saturated or supersaturated state. Accordingly, the dissolution speed of the metal base can be suppressed, and, at the same time, a plating layer having a smooth surface can be formed in a short time by utilizing an induction codeposition phenomenon. The electroplating method can be applied even when the metal base is formed of a metallic thin film provided on a surface of an insulating film provided on the substrate, or even when the metal is copper, zinc, iron, nickel, or cobalt.Type: ApplicationFiled: April 2, 2007Publication date: January 7, 2010Applicants: S.E.S. CO., LTD.Inventors: Tetsuya Shimizu, Hisayoshi Tajima, Seizo Miyata, Masato Sone
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Publication number: 20090272466Abstract: Provided is ultrahigh purity copper having a hardness of 40 Hv or less, and a purity of 8N or higher (provided that this excludes the gas components of O, C, N, H, S and P). With this ultrahigh purity copper, the respective elements of O, S and P as gas components are 1 wtppm or less. Also provided is a manufacturing method of ultrahigh purity copper based on two-step electrolysis using an electrolytic solution comprised of copper nitrate solution, including the procedures of adding hydrochloric acid in an electrolytic solution comprised of copper nitrate solution; circulating the electrolytic solution; and performing two-step electrolysis while eliminating impurities with a filter upon temporarily setting the circulating electrolytic solution to a temperature of 10° C. or less. The present invention provides a copper material that is compatible with the thinning (wire drawing) of the above, and is capable of efficiently manufacturing ultrahigh purity copper having a purity of 8N (99.Type: ApplicationFiled: April 24, 2006Publication date: November 5, 2009Applicant: NIPPON MINING & METALS CO., LTD.Inventors: Yuichiro Shindo, Kouichi Takemoto
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Publication number: 20090205965Abstract: Disclosed are a method and an apparatus for forming an oxide coating film with excellent corrosion resistance and adhesiveness on a cathode made of a metal plate by a simple process at low cost. A direct current voltage is applied between an anode (12) and a cathode (13) in an electrolyte solution which cathode (13) is made of a metal plate to be coated with oxide and arranged opposite to the anode (12), while supplying oxygen or a gas containing oxygen into the electrolyte solution, so that the metal plate cathode (13) is coated with oxide, thereby being formed into a oxide-coated metal plate.Type: ApplicationFiled: November 9, 2004Publication date: August 20, 2009Applicants: Toyo Seikan Kaisha, LTD., Toyo Kohan CO., LTD.Inventors: Wataru Kurokawa, Hiroshi Matsubayashi, Mitsuhide Aihara, Masanobu Matsubara, Masatoki Ishida, Norimasa Maida
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Patent number: 7575664Abstract: A cathode potential is applied to a conductive layer formed on a substrate having a depression pattern. A plating solution in electrical contact with an anode is supplied to the conductive layer to form a plating film on the conductive layer. At this time, the plating solution is supplied by causing an impregnated member containing the plating solution to face the conductive layer. Since the plating solution stays in the depression, a larger amount of plating solution is supplied than on the upper surface of the substrate, and the plating rate of the plating film in the depression increases. Consequently, the plating film can be preferentially formed in the depression such as a groove or hole.Type: GrantFiled: May 24, 2005Date of Patent: August 18, 2009Assignee: Kabushiki Kaisha ToshibaInventors: Tetsuo Matsuda, Hisashi Kaneko, Katsuya Okumura
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Publication number: 20090192628Abstract: The object of the present invention is to provide a bone substitute material, medical material containing the bone substitute material and process for producing the bone substitute material wherein the bone material has excellent mechanical strength, biological affinity and biological activity. The present invention provides a bone substitute material comprising a titanium or a titanium alloy and an anodic oxide film of the titanium or titanium alloy, wherein the anodic oxide film is formed on a surface of the titanium or titanium alloy, wherein inorganic compound microparticles are firmly fixed to a surface and/or inside of the anodic oxide film, and wherein the inorganic compound contains at least phosphorus and calcium. The present invention further provides a medical material comprising the bone substitute material and a method for manufacturing the bone substitute material.Type: ApplicationFiled: August 31, 2006Publication date: July 30, 2009Inventors: Seishiro Ito, Mitsunobu Iwasaki
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Publication number: 20090173632Abstract: In a nonaqueous electrolyte cell-oriented electrode (10), an electrode active material layer (12) formed on a collector (1) has a density gradient developed with a gradient of a varied concentration of a solid along a thickness from a surface of the electrode active material layer (12) toward the collector (1), and in a gel electrolyte cell-oriented electrode (30), an electrode active material layer (32) formed on a collector (1) has a density gradient developed with (a) gradient(s) of (a) varied concentration(s) of one or both of an electrolyte salt and a film forming material along a thickness from a surface of the electrode active material layer (32) toward the collector (1).Type: ApplicationFiled: March 9, 2009Publication date: July 9, 2009Inventors: Mori Nagayama, Takamistu Saito, Osamu Shimamura