Abstract: Proposed is a novel casing for frame-supported pellicle used for dustproof protection of a photomask in the photolithographic patterning process for the manufacture of fine electronic devices. Different from conventional casings made from a plastic resin, the casing of the invention is characterized by the use of a unique permanently antistatic resin composition which is a resin blend consisting of 80-95% by weight of an ABS or acrylic resin and 20-5% by weight of a specific hydrophilic polymer. By virtue of the excellent antistatic behavior of the resin composition, the frame-supported pellicle encased in the casing is safe from the troubles due to deposition of dust particles during transportation and from contamination by the vaporized matter from the casing.

Abstract: Various two-part articles, such as metal trading cards, which safely and advantageously combine a metal substrate having front and rear sides, and an insert sheet made of metal, glass or plastic. In some embodiments, both the metal substrate and a metal insert sheet are embossed. The metal substrate includes a central main portion, four edge marginal portions terminating in respective substrate edges, and four corner marginal portions. The marginal portions surround the central main portion, sharing respective boundaries therewith, and are rolled towards the substrate rear side and around such that the substrate edges contact the insert sheet so as to hold the insert sheet in position. The rolled marginal portions together define a continuous bead around the periphery of the card without any exposed sharp edges. In some embodiments the rolled edges are replaced by hinge sleeves.

Abstract: A plastic container for storing and shipping semiconductor wafers comprising a wafer carrier of substantially rigid and transparent material supporting the wafers and maintaining the wafers in spaced relation to each other, top and bottom covers for the wafer carrier formed of stiff but resiliently flexibly yieldable material, the wafer carrier having upper and lower enlarged rim portions extending around the peripheries of the top and bottom of the wafer carrier and being embraced by enlarged peripherally extending rim portions of the top and bottom covers, the top and bottom covers having partially cylindrical panels with elongate beads or ridges formed thereon to engage and maintain the edges of the wafers spaced from the partially cylindrical surfaces, offset tabs on the wafer carrier and top and bottom covers facilitating of flexibly lifting small portions of the covers off the wafer carriers and then progressively disengaging the covers from the wafer carriers; a package comprising a multiplicity of cov

Abstract: Quartz glass component having a coating with a silicon carbide surface includes a gradient layer of silicon carbide and at least one additional constituent which is less hard and has a lower modulus of elasticity than silicon carbide and whose concentration decreases across the thickness of the layer from inside to outside. The coated component has good thermal-shock resistance and long-term stability in terms of its chemical resistance to hydrofluoric acid and nitric acid as well as to a mixture of these two acids.

Abstract: A shipping container for hanging parts, such as glass run channels, has a frame and separator assembly that hangs the parts slidably with a minimal thickness hanging and slidable separator between each adjacent part pair. Therefore, the shipping density can be made very high without mutual part damage, and the parts slide to their own shipping position. Packing and unpacking of parts is easier, since there are not precut slots or grooves into which the parts must be seated. In addition, since the frame and separator assembly are completely reusable, the surrounding sleeve can be economically made robust.

Abstract: A ridged, transparent, thermoplastic package for transporting disk products such as wafers, semi-conductor wafers or computer memory disks is disclosed. Elastomeric or flexible thermoplastic cushions hold the disk products in a manner which precludes them from becoming damaged during normal shipping and handling. The cushions have a plurality of disk engaging members which individually engage a disk. The disk engaging member conforms to the edge profile of the substrate wafer to securely hold the wafer. Wafer rotation is eliminated, particle generation is reduced and the cushions securely hold the disk products.

Abstract: A wafer container having an enclosure member and a body member. The body member having a base, a plurality of spaced arcuate members on the base adapted to encircle wafers stacked on the base. A layer of resilient material on the insides of the arcuate members. A retainer member with flaps positioned between the arcuate members on the top of a stack of wafers.

Abstract: A box for carrying and protecting a painting includes a primary panel and side and end panels connected to the primary panel and disposed orthogonally with respect to the primary panel. The panels are locked together to define a box interior for holding a painting. Pairs of engagement members located at the corners of the box project into the box interior and maintain the painting spaced from the primary panel and out of engagement with the primary panel. The box is formed from a unitary blank.

Abstract: A vertical boat comprises a plurality of rods extending vertically in parallel from a base. Each rod has a plurality of slots cut along the length of the respective rod. The slots of each rod are vertically aligned with the slots of the other rods and have top and bottom surfaces that are peaked. The rods are arranged so that a wafer can be jointly received by a corresponding slot from each rod, thereby allowing the boat to hold the wafers in a stack with both sides of the wafers exposed.

Abstract: The present invention is a container for containing a PCMCIA card, or an electronic card similar thereto. The container comprises a box that has a bottom portion for holding the card, and a cover portion that is rotatably connected with the bottom portion in order to fit over the bottom portion in the closed position. In the closed position, the cover and bottom portions form a box compartment. The bottom portion comprises opposite side walls that have flexible arms, wherein each arm has a clasp and a cam member, as a single unit and integral with each arm's distal end. A PCMCIA card fits within the area defined by the bottom portion's side walls. The area within which the PCMCIA card fits is slightly smaller than the area of the compartment in order to allow flex spaces for the arms to flex when a PCMCIA card has been fitted between the arms.

Abstract: A transporting holding device for picture frames (4) or the like, preferably for installation in a transport crate (1), with several, preferably four, frame securing elements (3), further with two lengthwise adjustable guide devices (5) and two crosswise adjustable guide devices (6). The crosswise adjustable guide devices (6) are guided to be adjustable and able to be immobilized on the lengthwise adjustable guide devices (5), and the frame securing elements (3) are guided to be adjustable on the crosswise adjustable guide devices (6). A greater flexibility is created with such a transporting holding device because the frame securing elements (3) are embodied as a corner bracket for supporting a respective corner of the picture frame (4) and/or as a flat side bracket for supporting a respective part of the edge of the picture frame (4).

Abstract: A two-piece plastic dunnage is disclosed for use within containers for shipping or storing items in a preselected arrangement within a container. The preferred embodiment of the two-piece dunnage designed in accordance with this invention includes an essentially flat base member and a generally U-shaped support member that is slidably and removably coupled with the base member in a supporting position. The support member may be provided with a plurality of transverse slots which are adapted to nestingly receive at least a portion of the items that are to be maintained within the container in the preselected arrangement.

Abstract: A wafer cleaning tank including a tank body containing therein a cleaning solution, and wafer supporting device for substantially vertically supporting at least one wafer in the tank body, wherein the wafer supporting device includes a pair of confronting fixed wafer support members disposed in the tank body with a predetermined space therebetween and each having at least one side wafer-supporting portion, and a movable wafer support member vertically movably disposed centrally between the fixed wafer support members at a level below the fixed wafer support members and having at least one central wafer-supporting portion corresponding in position to the position of the side wafer-supporting portion of each of the fixed wafer support members, and wherein the side wafer-supporting portions and the central wafer-supporting portion jointly form a three-point support structure which supports the wafer at three points on the outer edge thereof.

Abstract: A vertical boat for holding a plurality of semiconductor wafers comprising two end members (2) positioned at the top and the bottom of the vertical boat, and a plurality of support members (3,4,5,6,104) vertically mounted on the end members (2) for supporting the wafers, wherein each support member (3,4,5,6,104) is formed by a plate-like member having a series of slits (9,10,7,8,108) formed thereon in such a manner that a plurality of support arms are defined by the slits (9,10,7,8,108) at a predetermined interval, each support arm having a support projection (11,12,13,14,112) formed at the end thereof, and wherein the inner portions (P) of the wafer (1) is to be supported by the support projections (11,12,13,14,112) whereas the periphery of the wafer (1) does not contact the arms of the support members (3,4,5,6,104).

Abstract: A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor wafers or the like, between locations such as SMIF processing stations. The pod includes a box having an open end and a box door which sealably engages and closes the open end. The box contains a removable carrier which seats on the box door and which has an open side for insertion and removal of the articles. The pod features a latching mechanism in the box door utilizing a star wheel with tips that rotate and extend out of slots in the box door into slots in the interior sidewalls of the box. The tips then move vertically downward to sealingly engage the box door to the box. The star wheel embraces a concentric cammed hub having angled cam surfaces engaged by cam follower pins extending radially inward from the star wheel.

Abstract: An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The device includes a cover with a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. It also includes a purging means attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder. The holder has contoured recess-forming pairs that do not effect semiconductor wafer transfer when the recess forming pairs are warped. The recess-forming pairs also have integrally corresponding ribs that help prevent warpage of the contoured recess-forming pairs during the plastic injection molding process.

Abstract: A container for a silicon wafer chip includes a body having a bed for the chip, a plurality of posts defining a lateral perimeter for the chip, and a cap having fingers for maintaining the vertical position of the chip in the container. The bed is sloped from the outer wall to an inner line so that an edge of the chip only is supported on a shoulder. The container includes a sealing arrangement to keep moisture and particle contaminants from the interior.

Abstract: An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. The holder also includes a purging arrangement attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder.

Abstract: A wafer cassette is provided which has a multiplicity of shelves provided in one side thereof with a notch and placed at intervals to give rise to open spaces therebetween for insertion of a wafer, provides the open spaces in the recesses thereof with buffer members severally adapted to meet in collision with part of the outer periphery of a wafer, and allows the notches in the multiplicity of shelves jointly to form an empty space for extractably admitting the leading end part of a wafer conveyor. The wafer cassette of this invention permits wafers carried on the wafer conveyor to be sent out past the leading end part of the conveyor and inserted automatically into the empty spaces formed in the cassette for insertion of wafers and stowed in the cassette after collision against the buffer members when the leading end part of the wafer conveyor (the end part on the wafer discharging side) is inserted into the empty space mentioned above and then set operating.

Abstract: A transportable, sealable container, which has an improved pod liner. The container includes a box, a box door, and a gasket which forms a seal between the box and the box door. The box door has a conductive liner and a conductive path from the conductive liner to ground potential for electrostatic discharge protection. A membrane for isolating the gasket from the interior region of the container is bonded to the gasket and the conductive liner. The membrane may be impervious to gasses to prevent outgassing of the gasket or impervious to particles but not gasses to prevent particulate matter generated by the gasket from entering the interior region of the container.

Abstract: A boat, for vertically holding semiconductor wafers, includes a cradle in the shape of a hollow half cylinder with a horizontal axis; two grooved plates, disposed against the interior lateral walls of the cradle accommodating the semiconductor wafers to be treated, the two plates being independent and abutting against the cradle without being fastened thereto; and a horizontal plate maintaining a distance between the two lateral grooved plates and serving as a removable guide during the loading operation of the semiconductor wafers.

Abstract: A set of sheets for producing a packaging assembly for products of small thickness, such as LCD panels, which comprises a first sheet (101) to fold into a product holding element (201), a second sheet (102) to fold into a base structure (202), and a third sheet (103) to fold into a cover member (203). Corrugated paper can be conveniently used for the sheets. No styrene foam is necessary.

Abstract: A lens box for safe storage and transportation of optical lens blanks having vertically spaced apart top and bottom panels; two side walls, opposite closure panels and a plurality of gussets therebetween, all connected to the top and bottom panels and defining an enclosure space therebetween. The gussets are inclined upwardly and inwardly from the bottom panel, tangentially contacting the lens blank restricting the vertical and horizontal movement of the lens blank.The invention also includes a method of packaging an optical lens blank for secure and safe storage, including, providing a lens box having at least inclined side gussets; inserting the lens blank in the box causing the lens blank side wall to contact and frictionally engage the gussets thereby restricting vertical and horizontal movement of the lens blank in the box; and closing the box.

Abstract: A cassette (2) or storage box for integrated circuit wafers or memory disks arranged and constructed for directly being placed onto the driven rollers (6) of contaminant free conveyors. The cassettes have a flat canted surface (10) for riding on the rollers. The cant is enough such that the loaded wafers lean against the sides of their individual pockets as the cassette travels. The leaning reduces damaged to the wafers by the vibrations involved with physically moving the cassette.

Abstract: A semi-conductor transport container is described, which includes a box, a door and an actuated rotary retainer attached to the sidewall of the box to thereby prevent movement of the wafers within a wafer cassette during transportation and storage. The rotary retainer includes flexible fingers that apply a slight force against the wafers when the box is engaged with the box. The rotary retainer is simple, requires less moving parts, and rotates automatically, completely away from the wafers when the box is disengaged from the door. Also, the box seals with the door, when engaged with a door, thereby creating a particle free storage area.

Abstract: A reclosable light-tight container for storing a plurality of sheets of light-sensitive material includes a lower wall, an upper wall, and a plurality of side walls. A door is formed as part of the upper wall, and a door hinge permits the container to be opened and closed. A reclosable light-tight closure is created by an unbroken wall formed on the inner surface of the lower wall and extending around and enclosing the portion of the inner surface corresponding to the door location when the door is closed. A raised platform on the inner surface of the upper wall door has a top surface which abuts the inner surface of the lower wall outside of the unbroken wall when the door is closed. The raised platform blocks light from entering the container by covering the parting line between the unbroken wall on the lower wall and the upper wall. A tab on the unbroken wall blocks light at the door hinge.

Abstract: The present invention is an apparatus for packaging, storage and transportation of flat panel displays. The apparatus has a base which receives a removable base cushion and two removable side cushions. Each cushion has a plurality of ribs defining a flat panel display receiving members. The side cushions are designed to accommodate a variety of flat panel display sizes. A cover mates with the base and further secures the flat panel displays within the flat panel display receiving members of the removable base and side cushions.

Abstract: A wafer carrier which supports at least one wafer, during a process in which material is deposited on the wafer from chemical vapor in a reactor, includes a base having an inner curved surface extending from a first lateral edge of the base to a second lateral edge of the base. Slots in the inner surface of the base extending generally continuously from the first lateral edge to the second lateral edge are defined by a bottom wall and opposing side walls. The slots may each receive at least a portion of a thin, outwardly facing edge of the wafer for holding the wafer in an upright position. The bottom wall of the slot closely conforms to the predetermined shape of the portion of the outwardly facing peripheral edge of the wafer to inhibit the entry of vapor between the base and the outwardly facing edge of the wafer and the formation of material bridges between the wafer and the carrier by deposition of the material from the chemical vapor.

Abstract: A sleeving device includes two side brackets. These brackets are secured to the side edges of a flap of a shipping box that contains a roll of sleeving material. The side brackets each engage a respective side edge of the flap in a respective channel. One of the side brackets further includes a guide that forms a funnel-shaped opening that facilitates the loading of film into the pockets of the sleeving material.

Abstract: The improved photomask container which is molded and fabricated from a thermoplastic resin is characterized in that the thermoplastic resin comprises a cellulose ester and that the surface of the molded and fabricated article is saponified with an alkali. The container does not give off malodor, has electric conductivity and is free from the problem of sodium release.

Abstract: A storage holder for computer disks, CDs, records, tape cassettes and the like is formed of a single unitary piece of molded plastic. The holder itself has a rectangular main body. A projecting shelf is located adjacent the bottom of the main body, with a pair of spaced-apart resilient fingers biased inwardly toward the main body member. First and second guides, in the form of raised ribs, pins or flanges, extend along at least a portion of each of the sides of the storage holder; so that when a relatively thin flat object, such as a computer disk, CD or the like, is placed in the storage holder, the resilient fingers bias it against the main body. The shelf at the bottom supports the bottom of the object being stored, and the ribs along the sides provide lateral support. An object, such as a computer disk, CD or the like, readily may be inserted into the storage holder and removed therefrom.

Abstract: A disposable packing for flat glass plates can stack the plates for transportation in standard containers. This disposable packing has lateral wooden upstanding posts which rest against the internal walls of the standard container. By using wedges, the upstanding posts are inclined with respect to the internal walls of the container. The angle of inclination between the post and the floor of the container is obtuse. The posts are attached at their base to supporting boards affixed to the floor of the container. The boards have the post affixed to one face while the other face of the boards has a flexible cover. The glass plates are visible at their periphery. The posts have cushioning strips of styropor or plush, for example. A central V-shape space is formed between the packages resting on the post.

Abstract: A substrates-cleaning apparatus comprising process vessels in which washing solutions are contained, a chuck mechanism having a first substrate holder section for carrying silicon wafers to the process vessels while holding them in it, and a boat mechanism having a second substrate holder section for receiving the wafers from the chuck mechanism and for supporting the wafers in the washing solutions, wherein said second substrate holder section comprises base members made of erosion and heat resistant material, and receiver members attached to the base members, having a plurality of substrate holding grooves thereon, and made of erosion and heat resistant synthetic resin substantially same in softness as or softer than the wafers.

Abstract: A collectible trading card made of embossed metal, and a boxed set of such cards. The card advantageously combines two mediums, metal for appearance and durability, and cardboard which affords high quality printing. In particular, the card includes a generally rectangular metal substrate having front and rear sides, and a cardboard insert sheet adjacent the rear side. The metal substrate includes a central main portion, four edge marginal portions terminating in respective substrate edges, and four corner marginal portions. The marginal portions surround the central main portion, sharing respective boundaries therewith, and are rolled towards the substrate rear side and around such that the substrate edges contact the insert sheet so as to hold the insert sheet in position. The rolled marginal portions together define a continuous bead around the periphery of the card without any exposed sharp edges.

Abstract: Embodiments of the present invention include a cassette transporting apparatus having 1) a first fork member 31 and a second fork member 31, wherein each fork member 31 has a shaft 62 and a tab 63; 2) a first member 31 and a second fork member 31, wherein each fork member 31 includes a shaft 62 having a distal section 42 that is beveled; or 3) a curved handle 33. In one embodiment, the cassette transporting apparatus is a cassette fork 20 for manually transporting a cassette and includes a locking tab 63, the beveled distal section 42, and the curved handle 33. In another embodiment, the cassette transporting apparatus is a mechanical cassette transporting system 100 including an elevator 101 and the fork members 31. The design of the fork members 31 is cassette specific rather than both cassette and apparatus specific.

Abstract: In a case for holding and carrying a substrate such as a photomask, a case body comprises a top cover and a bottom cover, whose inner surfaces include inwardly extending protrusions integrally formed therewith. The protrusions are crowned with silicone caps to hold a substrate. The substrate within the case is at its four corners fixedly held from both sides by the silicone caps. The top and bottom covers also include at their inner surfaces a plurality of positioning projections designed to come into contact with the edges of the substrate to place the substrate in position in its surface direction. Then the top cover and the bottom cover are brought into engagement with each other and fastened together, thereby providing a case low in dust generating characteristics arising from vibration and capable of holding various sizes and thicknesses of the substrate.

Abstract: A plate-like object container includes a container body having an object-insertion/withdrawal opening formed in a side face thereof for allowing insertion and withdrawal of a plate-like object and a plurality of positioning recesses arranged inside the container body in a direction of the thickness of the object, with an outer periphery of each object being introduced and held in position at each recess. A hook section is provided on an upper face of the container body, the hook section including at least one pair of hook members and support members for supporting the hook members. Each hook member is formed like a plate extending in substantially parallel with an upper face of the container body, the hook members being disposed apart from each other inwardly of an outer periphery of the upper face of the container body.

Abstract: A rack device which holds electrophoresis glass plates, clamps, spacers and the like for cleaning and subsequent storage and a method of automated washing and cleaning these components in the rack device.

Abstract: A low profile carrier for holding a plurality of memory disks during processing of the disks is described. The carrier is capable of securely holding disks of different thicknesses and is designed so that the disks are not damaged during insertion or removal of the disks from the carrier.

Abstract: The present invention relates to a case for a photomask to prevent generation of dust which might attach to and stain a photomask or the photomask pellicle. In a case for a photomask comprising a case main unit with an upper opening for accommodating the photomask and a lid for the opening of the case main unit, cushion materials are provided on the inner bottom of the case main unit and on the inner ceiling of the lid. The photomask is elastically squeezed between the cushion materials when accommodated. Thus, shaking and rattling during transportation are prevented to minimize the generation of dust. As the cushion material, a rubber material having a smooth surface on one side and a coarse surface on the other side is used.

Abstract: A container or carrier for securely carrying a substrate such as a reticle, mask, wafer, or the like during a semiconductor manufacturing process or during the transport of the substrate. The container includes a housing having an opening through which the substrate may be inserted and removed. The housing includes an open box and a lid, the lid securely held in place by a unique latching mechanism. A door that is hinged upon the lid and held in place by biasing springs substantially seals the housing opening. Within the housing are a plurality of suction cups upon which the substrate rests and which apply suction to firmly engage the substrate on only one side when the substrate is in a contained position. The suction cups hold the substrate in the contained position thereby preventing relative motion between the container and the substrate.

Abstract: A wafer storing, closed container for use in a clean room of a semiconductor manufacturing system is provided with an attached inert gas tank so as to eliminate the need to convey the container to an inert gas purge station to supplement the inert gas supply in the container due to leakage. A gas passageway is formed in a body of the container in such a manner that one end thereof is open inside the container. The other end is open outside the container. The portable inert gas tank is detachably connected to the other end of the gas passageway so as to automatically supplement the container with the inert gas.

Abstract: A container for containing therein a plate-like article, such as a reticle, includes a bottom member having a holding portion for holding the article in a substantially laid-down state; an upper member to be mated with the bottom member to define a space above the upper surface of the article; a pressing member for resiliently pressing in the space the article against the holding portion; and a fixing portion having an engaging member being supported by the upper member and being engageable with an end portion of the bottom member. The engaging member is effective to prevent upward opening motion of the upper member due to a reaction force of the pressing member. In addition, a releasing portion is partially projectable into the fixing portion to press the same in the same direction as the direction of the opening motion of the upper member to thereby release the engaging member.

Abstract: A printed circuit board support frame for protecting and transporting a printed circuit board. The support frame is molded from moldable materials and comprises a base wall section having elevated support ribs on a top face thereof for supporting the printed circuit board elevated from the base wall section. The base wall section has a hinged retention side wall member formed along a pair of opposed parallel edges thereof. The retention side wall members, when hinged outwardly of the base wall, permit the circuit board to be positioned on the support ribs over the base wall section. The retention side wall members have one or more clamping shoulders projecting forwardly over opposed top side edge portions of the circuit board when the side wall members are maintained in a vertical position to clamp the circuit board over the support ribs. Abutment wall members are formed at predetermined locations on the base wall section to prevent the circuit board from displacement.

Abstract: A ridged, transparent, thermoplastic package for transporting substrate wafers is disclosed. The package includes elastomeric cushions which hold the substrate wafers in a manner which precludes them from becoming damaged during normal shipping and handling.

Abstract: A windshield divider and support assembly for supporting two or more motor vehicles windshields spaced apart in a container, as disclosed. The divider support assembly consists of two pairs of support spacer members which are formed of cardboard material, and each member comprised of a reinforced hollow honeycomb paperboard membrane and opposed paperboard sheets. A plurality of spaced apart slots extend from an elongated edge of each of the spacer members and define shock absorbing ribs which are capable of flexing sideways in a lateral plane and twisting in torsion to receive straight or angled portions of motor vehicle windshields thereacross to support a plurality of windshields in a container and spaced from opposed side walls, bottom wall and top wall thereof. The entire support assembly is of light weight, low cost, very flexible and repulpable.

Abstract: A multiple-media storage container and system for the organization and storage of cassettes, video cartridges and other informational media. The storage container includes an upper and a lower section adapted to be hinged together and have the upper section move between an open and a closed position. The sections are nestable within each other and secured together in pairs, prior to use by break-away tab elements. The nested, secured sections are arranged for shipping and displaying in a plurality of vertically stacked, nested pairs.

Abstract: A reusable, expandable art work carrier assembled from modular components, wherein the carrier can change in volume by the addition or subtraction of modules to accommodate and protect a wide range of works of art of various size and number during their storage or transport, yet remain completely enclosed for protective handling and transporting of framed works of art from external and internal forces. Included therein is a plurality of elongate planar sidewall modules connected end to end in series to form a closed loop therein defining a continuous sidewall unit of the carrier, and two opposing planar cover modules employed as a top cover and a bottom cover for the continuous sidewall thereby enclosing and covering the carrier. The art work carrier can expand to accommodate additional art works by adding one or more layers of similarly assembled continuous sidewall units, one atop the other, sandwiched between the opposing cover modules.

Abstract: A container and a method of storing semiconductor wafers, wherein a closed container has sealed top and bottom portions of molded plastic material and uniquely adapted for storing semiconductor wafers, the container having, in one of its parts, a gas receiving stem and valve for removing a portion of the gaseous atmosphere within the container as to store the semiconductor wafers in a partial vacuum, one portion of the container may incorporate a thin wall of the molded container comprising a flexible membrane adjacent edges of the semiconductor wafers to be drawn against the wafers and hold them in place within the container; the walls of the closed container being covered with a diamond-like coating; and a method of storing semiconductor wafers by confining the wafers in a multipart container, sealing the container, and modifying the atmosphere within the container as by reducing the gas pressure within the container, changing the gaseous atmosphere in the container by, in some cases, substituting an inert

Abstract: A wafer carrier for circular semiconductor wafers and having slotted sidewalls; cushioning fingers protruding upwardly and obliquely inwardly through the slots in the sidewalls and engaging the wafers and directing pressure against the wafers in a slightly downwardly direction, toward the center of the wafer and toward the lower portion of the sidewall across from the finger applying pressure; the fingers located immediately adjacent above the horizontal centerline of the wafer; and a latch is provided for retaining the fingers against the wafers, but permitting the fingers to be swung outwardly through the slotted sidewalls for releasing the wafers during removal and insertion of the wafers.