Fragile Or Sensitive (e.g., Glass Mirror) Patents (Class 206/454)
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Patent number: 6338409Abstract: A reticle SMIF pod for in situ orientation comprises a pod door. A pod cover is removably receivable on the door to define an interior space. A nest assembly has a plate resting on the pod door in the interior space and a core extending downwardly from the plate through an opening in the pod door. The plate is rotatably mounted on the pod door to selectively orient a reticle supported on the plate, in use. Alignment legs or tabs align the plate relative to the pod door in one of plural orthogonal positions.Type: GrantFiled: April 13, 2000Date of Patent: January 15, 2002Assignee: International Business Machines CorporationInventor: Timothy E. Neary
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Patent number: 6328341Abstract: A data package assembly includes at least one data card having a first substrate with opposite faces, and indicia correlated with a prepaid account. A package has a second substrate separate from the first substrate, the data card being detachably connected to the second substrate. Personal identifying indicia correlated with the account are concealed by the package. In addition, first account verification indicia on the card, and second account verification indicia on the package, both different from the personal identifying indicia and both correlated with the same account, are visibly exposed, the package including an aperture visibly exposing the first account verification indicia.Type: GrantFiled: April 19, 2001Date of Patent: December 11, 2001Assignee: Western Graphics and Data, Inc.Inventor: Brian Klure
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Publication number: 20010049065Abstract: A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.Type: ApplicationFiled: August 8, 2001Publication date: December 6, 2001Inventor: Matthew E. Williams
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Publication number: 20010042726Abstract: An improvement of a cassette carrier is provided to improve wafer cleaning processes. The carrier includes a support and two opposed suspensions positioned at both sides of the support and each provided with a fixing mechanism for suspending edges of cassettes. According to the present invention, the structure of the carrier for carrying the cassettes is simplified to reduce amount of chemicals adhered to and remained on the surface of the carrier during wafer cleaning, thereby shortening wafer cleaning time and enhancing wafer cleaning efficiency.Type: ApplicationFiled: January 25, 2001Publication date: November 22, 2001Applicant: Mosel Vitelic Inc.Inventors: John Chiu, Koni Lin
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Publication number: 20010042697Abstract: A support device for a wafer shipping container, to constrain the flexure of a multiple number of backgrind-processed wafers when the wafers are stored in alignment in the wafer shipping container. For this support device, stoppers are projected inwards from the front and rear sides of a container body as a part of the wafer shipping container. The support device is comprised of: a pair of opposing walls, which are positioned on the bottom side of the container body and inserted into, and fixed by, the stoppers; a pair of connecting bars across the spacing between the paired opposing walls; a multiple number of partitioning supporters arranged with a predetermined pitch in the longitudinal direction of the paired connecting bars. The wafers are inserted and held between adjoining partitioning supporters, whereby they are prevented from flexing.Type: ApplicationFiled: March 28, 2001Publication date: November 22, 2001Applicant: Shin-Etsu Polymer Co., Ltd.Inventors: Toshitsugu Yajima, Hiroyuki Funami
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Publication number: 20010040116Abstract: The present invention relates to a thin-plate supporting container 1 having a container body 2, and a thin-plate supporting unit 3 for supporting the semiconductor wafers from both sides thereof in the container body. There are provided a lid 4, and an easy attach/detach mechanism for attaching and detaching the lid 4. The easy attach/detach mechanism 31 is composed of a lid engaging claw 32 provided on the circumference of the lid 4, and object engagement part 28, provided on the container body 2, for engaging with the lid engagement claw 32 so as to secure the lid 4 to the container body 2, an arm 34 for releasing the lid engagement claw 32 from the object engagement part 28; and an elevating mechanism for slightly elevating the lid 4 from the container body 2 when the lid engagement claw 32 is released by means of the arm 34. The thin-plate supporting unit 3, the top flange 5, the carrying handle 6 are detachably mounted. The thin-plate supporting unit 3 is formed with a V-shaped groove 38.Type: ApplicationFiled: September 21, 1999Publication date: November 15, 2001Inventors: YUKIHIRO HYOBU, YASUNORI OKA
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Patent number: 6315124Abstract: There is disclosed a container for transporting precision substrates comprising a container body having an upper open periphery, a cassette accommodated in the container body for holding a plurality of the precision substrates in parallel, a top covering which is fitted to the open periphery of the container body via a gasket, and a substrate presser attached inside the top covering, wherein the container body has a skirt flange extending from a flange portion provided around the open periphery to the vicinity of a locking means for locking the top covering, and the flange portion is provided with a through hole or slit, or wherein the container body has the skirt flange, partition ribs are provided perpendicularly to the skirt flange in a space between the skirt flange and side wall of the container body, and each portion of the flange portion corresponding to each space partitioned by the partition ribs is provided with a through hole or slit.Type: GrantFiled: October 5, 2000Date of Patent: November 13, 2001Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Tatsuaki Hirohata, Takashi Betsuyaku
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Publication number: 20010037986Abstract: The present invention includes electronic device workpiece carriers, methods of processing electronic device workpieces, and methods of positioning electronic device workpieces within a workpiece carrier. One aspect of the present invention provides an electronic device workpiece carrier including a body; and a plurality of workpiece receivers defined by the body, individual workpiece receivers being configured to hold an electronic device workpiece and at least some of the workpiece receivers being spaced from immediately adjacent workpiece receivers at different distances.Type: ApplicationFiled: October 18, 1999Publication date: November 8, 2001Applicant: James D. SauretteInventor: JEFF MENDIOLA
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Publication number: 20010035361Abstract: A container for accommodating an optical article made of synthetic quartz glass includes synthetic resin as a base material, and a coating film provided on a substantially entire area of at least an inner surface thereof, the coating film being substantially impermeable to a gas evolved from the synthetic resin as the basic material of the container.Type: ApplicationFiled: March 1, 2001Publication date: November 1, 2001Applicant: Asahi Glass Company, LimitedInventors: Hitoshi Mishiro, Shinya Kikugawa, Yoshiaki Ikuta
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Patent number: 6302272Abstract: The present invention provides the first package (10) for brittle sheets, which comprises the brittle sheets (12) which are placed in a state of multiple layers and the end cushioning materials (20) (20) which are larger than the outer shape of the brittle sheets (12) and whose elasticity range from 2 to 100 mm and which are placed at both ends of the brittle sheets of lamination. The present invention also provides the second package for brittle sheets, which comprises the brittle sheets which are placed in a state of multiple layers, and the side cushioning material whose proof compressive load is not less than 1960 N in vertical direction and not less than 98 N in lateral direction and which is placed at the side of the said brittle sheets of lamination.Type: GrantFiled: November 24, 1999Date of Patent: October 16, 2001Assignee: Nippon Shokubai Co., LTDInventors: Kazuo Hata, Norikazu Aikawa, Keijirou Takasaki, Masatoshi Shimomura
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Publication number: 20010027934Abstract: A support structure for packaging is provided for containing, storing and transporting electronic components like liquid crystal modules. The structure includes a bottom plate and first and second side plates provided at respective sides of the bottom plate. Side surfaces of the bottom plate constitute first inclined planes slanted at a first degree. End surfaces of the first and second side plates on the bottom plate side constitute second inclined planes slanted at a second degree. The first and second degrees are selected such that, when the first and second side plates are erected to cause the first and second inclined planes to closely contact with each other, the first and second side plates are prevented from being bent inwards more than 90 degrees.Type: ApplicationFiled: March 23, 2001Publication date: October 11, 2001Inventors: Yoki Yoneda, Hisashi Fujikawa
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Publication number: 20010027930Abstract: A two piece packing system usable for packing artifacts, including plate glass, which utilizes a two part trapezoidal body construction, with removable holders, which holder can be rectangular or trapezoidal pyramids, in shape, to protect the artifact and/or restraint an artifact against damage, even in the face of vibration, jarring, and careless handling of the artifact.Type: ApplicationFiled: June 1, 2001Publication date: October 11, 2001Inventors: David G. Key, Kim R. Mumby
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Patent number: 6290064Abstract: The invention relates to a collapsible container for shipping articles such as automotive transparencies, more particularly automotive windshields and in particular, to a base having a cut out portion. The cut out portion allows a person loading and/or unloading the container to walk on the floor supporting the base for ease of loading/unloading articles on the base at the rear of the container.Type: GrantFiled: September 22, 1999Date of Patent: September 18, 2001Assignee: PPG Industries Ohio, Inc.Inventors: Dean C. Kuhn, James C. Abinanti
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Patent number: 6286684Abstract: A container for integrated circuit wafers provides protection for the wafers from mechanical shock and electrical charges. The wafers are mechanically protected by top and bottom cushions and side cushions. The top and bottom cushions each have foam within a membrane or film enclosure. The enclosure has openings so as to allow gas to pass in and out. The side cushions have resilient projections that protect the edges of the wafers. The side cushions are interposed between flanges of the top and bottom cushions. The individual wafers are separated from each other by leaf separators made of film. The film for the separators and the top and bottom cushions can be the same type. The film has a first layer made of a polymer with dissipative material therein and a second layer made of a polymer without the dissipative material. The first and second layers are coupled together. The insulating layer is placed into contact with a circuit side of the wafer. The dissipative material can be carbon.Type: GrantFiled: July 21, 2000Date of Patent: September 11, 2001Inventors: Ray G. Brooks, Timothy Brooks, Steve L. Fowler, Robert A. Neal
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Patent number: 6286688Abstract: A compliant wafer comb assembly for use in transferring semiconductor wafers between wafer cassettes, wafer carriers, or other wafer holding devices. The compliant wafer comb includes a plurality of slots in which wafer(s) can be held while being transported. The slots are parallel to each other and downward sloping from one end of the comb to the other. The sloped arrangement causes a single wafer at a time to become engaged with the comb when a batch of wafers is transferred from a cassette or wafer holding device to the comb, allowing the compliant features of the comb to compensate for the misalignment of each wafer individually. The comb is coupled to a static base structure by a set of independent column springs which permit motion of the comb slots in any direction necessary to compensate for a wafer's misalignment. This permits transfer of a misaligned wafer or wafers from a cassette or other carrier to the comb without damaging the wafer(s).Type: GrantFiled: April 2, 1997Date of Patent: September 11, 2001Assignee: SCP Global Technologies, Inc.Inventors: Victor B. Mimken, Tom Krawzak
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Patent number: 6273275Abstract: A cassette for housing glass which includes edge supporting members provided at the side supports for supporting glass substrates in a stacked relationship; horizontal substrate supporting members alternately disposed between the edge supporting members and extending across the cassette between the side supports, and substrate-fixing members disposed on the horizontal substrate-supporting members and intermediate the side supports for supporting glass substrates to be suspended from the edge supporting members within the cassette.Type: GrantFiled: May 11, 1998Date of Patent: August 14, 2001Assignee: LG Electronics Inc.Inventors: Moo Gap Kim, Eun Chan Yoo
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Publication number: 20010010292Abstract: The invention provides an improvement in a pellicle container for containing a framed pellicle conventionally made from a plastic resin, which is mounted on a photolithographic photomask for dust-proof protection thereof. A serious problem in the plastic resin-made container is adsorption or deposition of organic matters emitted from the container body by or on the pellicle membrane during storage or transportation resulting in a decrease in the light transmission as well as accelerated degradation of the pellicle membrane to the light of an extremely short wavelength for patternwise exposure in the photolithography while this problem can be solved by the improvement of the invention according to which at least the surface layer of the container surfaces facing the space for containing the framed pellicle is formed from an inorganic material, e.g., metals, glass materials and ceramics, free from emission of any organic matters.Type: ApplicationFiled: January 3, 2001Publication date: August 2, 2001Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventor: Toru Shirasaki
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Patent number: 6267245Abstract: A wafer container comprising a receptacle and door provides for horizontal minimal contact support of wafers and provides for vertical support without one surface support intermediate the front edge support and rear edge support. The wafer carrier has for each wafer two distinct levels of support axially offset from one another. The first level of support is by wafer shelves contacting the bottom surface at the left side and right side of each wafer. The second level of support is provided by cushions securing the wafer at the front edge and back edge without one surface support at the left and right edges. The cushions on the door and at the rear of the receptacle are preferably removable such as by folding or compressing the cushion unit.Type: GrantFiled: July 8, 1999Date of Patent: July 31, 2001Assignee: Fluoroware, Inc.Inventors: Gregory W. Bores, Michael C. Zabka
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Publication number: 20010009230Abstract: This disclosure relates to the manufacture of lites (glass sheets) which have at least a pair of thin spacers applied thereto which maintain the lites in spaced relationship when stacked upon pallets, wrapped and shipped. The spacers are preferably only partially adhered to the lites, either by weak bonding adhesive or electrostatically, and can be readily removed during end-use applications. The spacers are applied automatically during production runs of the lites, and the spacers are applied from above or from below relative to the path of travel of the lites.Type: ApplicationFiled: March 5, 2001Publication date: July 26, 2001Inventors: Donald Lee Knoy, Aaron M. Bauer, Robert A. Moss
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Publication number: 20010009229Abstract: This disclosure relates to the manufacture of lites (glass sheets) which have at least a pair of thin spacers applied thereto which maintain the lites in spaced relationship when stacked upon pallets, wrapped and shipped. The spacers are preferably only partially adhered to the lites, either by weak bonding adhesive or electrostatically, and can be readily removed during end-use applications. The spacers are applied automatically during production runs of the lites, and the spacers are applied from above or from below relative to the path of travel of the lites.Type: ApplicationFiled: March 5, 2001Publication date: July 26, 2001Inventors: Donald Lee Knoy, Aaron M. Bauer, Robert A. Moss
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Publication number: 20010009228Abstract: This disclosure relates to the manufacture of lites (glass sheets) which have at least a pair of thin spacers applied thereto which maintain the lites in spaced relationship when stacked upon pallets, wrapped and shipped. The spacers are preferably only partially adhered to the lites, either by weak bonding adhesive or electrostatically, and can be readily removed during end-use applications. The spacers are applied automatically during production runs of the lites, and the spacers are applied from above or from below relative to the path of travel of the lites.Type: ApplicationFiled: March 5, 2001Publication date: July 26, 2001Inventors: Donald Lee Knoy, Aaron M. Bauer, Robert A. Moss
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Patent number: 6264036Abstract: A cassette for carrying substantially planar objects. The cassette is formed of only two substantially parallel rods, each rod having spaced apart notches for receiving objects to be carried, together with a pair of end members extending between the rods. The rods and end members are joined to form a substantially rectangular loop.Type: GrantFiled: March 5, 1999Date of Patent: July 24, 2001Assignee: SCP Global Technologies, Inc.Inventors: Victor B. Mimken, Thomas Krawzak
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Publication number: 20010008216Abstract: An assembly for storing semiconductor wafers includes a container, a wafer carrier and a plate. The container may be a box having a substantially rectangular bottom surface. The wafer carrier fits in the container. The wafer carrier has a plurality of slots. Each slot is capable of receiving a semiconductor wafer. The plate has a size and shape so as to snugly fit in a predetermined position in the container. The plate substantially prevents motion of the wafer carrier relative to the container. The plate may be an insert formed of a separate piece of material from the wafer carrier. The insert has a substantially rectangular shape so as to fit snugly on the bottom surface of the box. The insert has at least one mounting feature to snugly hold the wafer carrier. For example, the insert may have at least one groove shaped to receive a tab extending from a bottom of the wafer carrier. The insert may be formed of an acetyl homopolymer, polypropylene, polyethylene, or other soft plastic.Type: ApplicationFiled: January 12, 2000Publication date: July 19, 2001Inventors: Joseph C Rauchut, Gary J Reichl, Noel L Rodolfo, James V Roth
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Patent number: 6247599Abstract: An electrostatic discharge-free container equipped with a metal shield for holding an insulating article therein is described. In the container, an electrically conductive layer substantially covers a bottom lid made of a non-conductive material so as to sufficiently shield the insulating article from electrostatic discharge damages. The present invention novel ESD-free container may further be provided with a metal knob situated in a top lid of the container, or be provided with a metal enclosure positioned inside the container between the top lid and the insulating article. The metal layer that substantially overlaps the bottom lid may be injection molded as an insert in the bottom lid, or may be coated or plated on the bottom lid. The present invention novel ESD-free container eliminates any electrostatic discharge from occurring on a reticle plate and thus avoiding any potential damages.Type: GrantFiled: January 14, 2000Date of Patent: June 19, 2001Assignee: Taiwan Semiconductor Manufacturing Company, LtdInventors: Dong-Hsu Cheng, Yung Haw Liaw, Deng-Guey Juang
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Publication number: 20010002004Abstract: A protective wrap is disclosed that includes a single solution to protecting rigid angled products that require vertical and horizontal strength of interior forms or posts as well as a resilient cushioning property of a foam based product to prevent damage upon impact from mechanical or manual handling. Many applications will benefit from the opportunity to reduce costs through a reduction in packing materials and in downgrading the corrugated construction or eliminate the exterior protection of corrugated boxes. The protective wrap includes at least one layer of a closed or open cell foam secured between laminated layers of paper or, alternatively, laminated to one layer of laminated paper with the foam exposed. The protective wrap is formed to a rigid right angle, a C-channel, or any angled shape.Type: ApplicationFiled: August 10, 1999Publication date: May 31, 2001Inventor: ALBERT MOREYRA
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Patent number: 6237771Abstract: A wafer shipping container includes two sections, an upper section and a lower section. The container sections will both typically be formed from molded plastic. One of the container sections includes projections that are received in apertures in the other container section. The projections have tabs on their ends to secure the projections in the apertures. The top section of the container is secured to the bottom section of the container by inserting the projections into the apertures, then rotating one section with respect to the other section so as to actuate a locking mechanism. The locking mechanism ensures that the two sections of the container will not accidentally become separated during shipping, or at any time before the user wishes to open the container.Type: GrantFiled: December 28, 1999Date of Patent: May 29, 2001Inventor: Noor Ul Haq
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Publication number: 20010001446Abstract: A protective wrap is disclosed that includes a single solution to protecting rigid angled products that require vertical and horizontal strength of interior forms or posts as well as a resilient cushioning property of a foam based product to prevent damage upon impact from mechanical or manual handling. Many applications will benefit from the opportunity to reduce costs through a reduction in packing materials and in downgrading the corrugated construction or eliminate the exterior protection of corrugated boxes. The protective wrap includes at least one layer of a closed or open cell foam secured between laminated layers of paper or, alternatively, laminated to one layer of laminated paper with the foam exposed. The protective wrap is formed to a rigid right angle, a C-channel, or any angled shape.Type: ApplicationFiled: August 10, 1999Publication date: May 24, 2001Inventor: ALBERT MOREYRA
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Patent number: 6230895Abstract: A pressurized container for transporting cleaned semiconductor processing equipment wherein a shell of static-free material is provided with a central pedestal covered by a deformable pad and a number of vertical stops and shoulders spaced therefrom. The equipment is clamped in place on the stops and pedestal and a cover positioned on the shell. The shell contains input and output ports to permit a gaseous purge followed by a closing of the output port to build pressure in the container followed by closure of the input port to provide a positive pressure in the container.Type: GrantFiled: August 16, 2000Date of Patent: May 15, 2001Inventor: David P. Laube
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Patent number: 6230891Abstract: A container for memory disks comprising an upper case; a bottom case; and a supporting member which is adapted to be held between the upper case and the bottom case and to be inserted into each central hole of the memory disks so as to retain the memory disks, thus rendering the outer peripheral portions of the memory disks to become free in the container.Type: GrantFiled: June 15, 1999Date of Patent: May 15, 2001Assignee: Sakurai Co., Ltd.Inventors: Kazuo Usui, Shigeru Sekihara, Mitsuhiro Kikuchi, Takahide Abiko
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Patent number: 6230885Abstract: The invention is a memory card protective carrier for carrying memory cards and for protecting data transfer ports of the cards. The carrier includes a back frame secured adjacent a front frame having at least one memory card sleeve between the back and front frames. The card sleeve includes a top strut opposed to a bottom strut, an inside strut positioned between the top and bottom struts, wherein the top, bottom and inside struts cooperate to define a card slot dimensioned to house a memory card so that top and bottom edges of the card are adjacent the top and bottom struts. The front frame includes a window perimeter that defines a card window and includes a positioning guide adjacent the top strut in the shape of an asymmetrical corner dimensioned to correspond to an asymmetrical corner of the memory card. The back frame defines a compression tap aperture opposed to the card window, and includes at least one compression tab projecting into the card slot.Type: GrantFiled: April 11, 2000Date of Patent: May 15, 2001Inventors: Donald R. Rochelo, Robert W. Jones
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Patent number: 6227372Abstract: A component carrier tray for holding electrical components includes a support frame and a pocket insert supported by the support frame. The frame has at least one opening or concavity therein. The pocket insert is located in the opening or concavity and is formed of a high temperature semi-crystalline polymer. Each pocket insert is adapted to receive and hold at least one electrical component.Type: GrantFiled: April 30, 1998Date of Patent: May 8, 2001Assignee: Peak International, Inc.Inventors: James R. Thomas, Clifton C. Haggard
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Patent number: 6224108Abstract: A packaged data card assembly includes at least one data card having a first substrate with opposite faces and personal identifying indicia on one face correlated with a selectively activatable account. The assembly also includes a package comprising at least one panel having a second substrate separate from the first substrate, the data card being detachably connected to the panel so that the personal identifying indicia on the card are concealed by the panel. Account activation indicia are on the package in an exposed location, such activation indicia also being correlated with the account. Preferably, first account verification indicia are provided on the data card and second account verification indicia are provided on the package, both different from the personal identifying indicia on the card and both correlated with the same account.Type: GrantFiled: March 7, 2000Date of Patent: May 1, 2001Assignee: Western Graphics and Data, Inc.Inventor: Brian Klure
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Patent number: 6220437Abstract: This disclosure relates to the manufacture of lites (glass sheets) which have at least a pair of thin spacers applied thereto which maintain the lites in spaced relationship when stacked upon pallets, wrapped and shipped. The spacers are preferably only partially adhered to the lites, either by weak bonding adhesive or electrostatically, and can be readily removed during end-use applications. The spacers are applied automatically during production runs of the lites, and the spacers are applied from above or from below relative to the path of travel of the lites.Type: GrantFiled: August 24, 1998Date of Patent: April 24, 2001Assignee: Gemtron CorporationInventors: Donald Lee Knoy, Jr., Aaron M. Bauer, Robert A. Moss
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Patent number: 6221163Abstract: The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a check valve and filter assembly for supplying a clean, dry gaseous working fluid to maintain low levels of moisture, oxygen, and particulate content around materials contained in the SMIF pod. The SMIF pod outlet port, which also includes a check valve and filter assembly, is connected with an evacuation system. Flow of purge gas inside the SMIF pod can be directed with one or more nozzle towers to encourage laminar flow inside the pod, and one or more outlet towers,, having a function similar to that of the inlet tower, may also be provided. The purge gas can be dried by exposure to a desiccant, heated to temperatures between about 100° C. and about 120° C., and can be tested for baseline constituent levels prior to or after introduction into a SMIF pod.Type: GrantFiled: December 14, 1999Date of Patent: April 24, 2001Assignee: Semifab IncorporatedInventors: Glenn A. Roberson, Jr., Robert M. Genco, Robert B. Eglinton, Wayland Comer, Gregory K. Mundt
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Patent number: 6220438Abstract: There is disclosed a container for transporting precision substrates comprising a container body having an upper open periphery, a cassette accommodated in the container body for holding a plurality of the precision substrates in parallel, a top covering which is fitted to the open periphery of the container body via a gasket, and a substrate presser attached inside the top covering, wherein the container body has a skirt flange extending from a flange portion provided around the open periphery to the vicinity of a locking means for locking the top covering, and the flange portion is provided with a through hole or slit, or wherein the container body has the skirt flange, partition ribs are provided perpendicularly to the skirt flange in a space between the skirt flange and side wall of the container body, and each portion of the flange portion corresponding to each space partitioned by the partition ribs is provided with a through hole or slit.Type: GrantFiled: April 7, 1999Date of Patent: April 24, 2001Assignees: Shin-Etsu Handotai Co., Ltd., Shin-Etsu Polymer, Co., Ltd.Inventors: Tatsuaki Hirohata, Takashi Betsuyaku
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Patent number: 6216874Abstract: A low tolerance build-up wafer carrier and method for assembling the same for supporting semiconductor wafer disks and for interfacing with processing equipment. Press-fit fasteners are used to assemble composite carriers and attach equipment interface portions to the carrier. Each press-fit fastener comprising a first fastener portion integral with a first element and a second fastener portion integral with a second element. The first and second fastener portions interferingly engaging each other when pressed together thereby connecting first and second elements without significant tolerance build-up. A further embodiment of the invention is to provide a wafer carrier having interface contact portions positioned to accept carrier contact portions, from processing equipment, through a guide plate or kinematic coupling. The interface contact portions acting to align the carrier and prevent tolerance build-up due to the flexing of the guide plate.Type: GrantFiled: July 8, 1999Date of Patent: April 17, 2001Assignee: Fluoroware, Inc.Inventors: Gregory W. Bores, Michael C. Zabka
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Patent number: 6216870Abstract: The invention concerns packaging for a dental x-ray film, comprising a light protective envelope to receive the dental x-ray film, said envelope having two tearaway strips and an envelope which protects against x-rays designed to hold a lead sheet that offers protection against x-rays. The light protective envelope is made from a moisture resistant material. The envelope which protects against x-rays is formed by a pocket on one of the lateral faces of the light protective envelope which is created by an additional side panel and is open on one side.Type: GrantFiled: May 21, 1999Date of Patent: April 17, 2001Inventor: Ulrich Welp
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Patent number: 6216883Abstract: A wafer holding hand of the present invention is constituted so that two fixed clamps (2) and one movable clamp (6) are provided on a finger (1). The movable clamp (6) is supported by a plate spring (8) via a clamp holder (7), and the plate spring (8) is fixed to the slider (9). The slider (9) is driven by an air cylinder (10). The fixed clamp (2) is hook shaped, and the movable clamp (6) is drum shaped. A wafer W is held at three points by the movable clamp (6) and the two fixed clamps (2), and a force is applied to the movable clamp (6) by the plate spring (8) so as to hold the wafer W.Type: GrantFiled: January 6, 2000Date of Patent: April 17, 2001Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Tomoyuki Kobayashi, Junji Takehara
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Patent number: 6216873Abstract: A reticle support mechanism is disclosed in which a reticle may be quickly and easily located and removed, and which is capable of securely supporting a reticle for storage and/or transport. A preferred embodiment of the present invention includes a pair of reticle supports mounted to a door of a container, and a pair of reticle retainers mounted to a shell of the container. When the container shell is coupled with the container door, sections of the reticle support and reticle retainer engage chamfered edges of the reticle and sandwich the reticle in a secure position within the container. As a result of engaging the reticle at its chamfered edges, potentially harmful contact with the upper and lower surfaces and vertical edges of the reticle is avoided.Type: GrantFiled: March 19, 1999Date of Patent: April 17, 2001Assignee: Asyst Technologies, Inc.Inventors: William J. Fosnight, Raymond S. Martin, Joshua W. Shenk, Robert P. Wartenbergh
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Patent number: 6206197Abstract: A carrier of semiconductor wafer transportation. The carrier comprising: a base; two or more walls mounted to the base, with a plurality of grooves for receiving wafers by lateral insertion thereinto through a mouth, the mouth defined by an upper wall and a substantially horizontal lower wall, wherein the groove comprises a closed end defined by a back wall joined to the upper wall and the lower wall so that the groove narrows from the mouth towards the closed end, the upper wall being slanted upward towards the mouth and the back wall being slanted towards the mouth in the region close to the horizontal wall.Type: GrantFiled: October 28, 1999Date of Patent: March 27, 2001Assignee: STMicroelectronics S.A.Inventors: Pascal Decamps, André Rochet, Daniel Gardellin
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Patent number: 6206196Abstract: A semiconductor wafer carrier has an enclosure with a door frame defining an opening for insertion and removal of wafers, a door for closing and sealing said opening, and separately formed door guides for controlling the interface between said door and the enclosure. In a preferred embodiment, the door guides each comprise a first body and a second body connected to each other by a web. Each body includes a door contacting portion and a door frame contacting portion. The door frame contacting portion has a sloped segment configured to slidingly, progressively, and cooperatively engage the door frame to properly position the door within door frame during closure with minimal particle generation by such contact. In this preferred embodiment, the guide is configured to be attached onto a corner edge of a door. In this arrangement, as the door is inserted into the door frame in the z-direction, the first and second bodies exert centering forces as needed in the x and y directions on corner portions of the door.Type: GrantFiled: January 6, 1999Date of Patent: March 27, 2001Assignee: Fluoroware, Inc.Inventors: Dennis J. Krampotich, David L. Nyseth
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Patent number: 6196391Abstract: An electrostatic discharge-free container for storing electrically insulating articles is provided. The container consists of a container body formed of a top lid, a bottom lid and four sidewall panels defining a cavity therein, the lids and the sidewall panels are formed of an electrically insulating material, such as a polymeric material. Inside the container, at least four support means are mounted on the bottom lid in a spaced-apart relationship. Each of the at least four support means has a base portion for engaging the bottom lid and a roller portion for rollingly engaging and supporting an electrically insulating article thereon. The base portion and the roller portion of the at least four support means are formed of an electrically conductive material such as a metal particle loaded plastic for electrical communication between the two portions and with a grounding wire.Type: GrantFiled: January 20, 2000Date of Patent: March 6, 2001Assignee: Taiwan Semiconductor Manufacturing Company, LtdInventor: Meng Chun Li
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Patent number: 6186331Abstract: A container for receiving a detesting dust article and transporting thereof, which is mounted on a loader disposed in a border portion between a high cleanliness room and a low cleanliness room, including means by the use of which a cover thereof is opened and closed by an opener mechanism to communicate and shut the opening portion thereof and the high cleanliness room.Type: GrantFiled: February 24, 2000Date of Patent: February 13, 2001Assignees: Dainichi Shoji K.K., Rorze CorporationInventors: Mineo Kinpara, Toshio Ishikawa
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Patent number: 6170690Abstract: Provided by the invention is an air-tightly sealable bell jar container comprising a base plate and a bell jar covering mountable on the base plate. An air-tight sealing mechanism is obtained by forming a laterally and downwardly opening annular groove in the base plate to support an O-ring gasket of rubber and providing, below the base plate, a presser plate which presses up the O-ring gasket against the base plate by a means of cams or screw means in such a fashion that the O-ring gasket is elastically deformed and laterally bulged out to be brought into air-tight contacting with the inner wall of the bell jar covering surrounding the base plate.Type: GrantFiled: May 14, 1999Date of Patent: January 9, 2001Assignees: Shin-Etsu Polymer Co., Ltd., Shin-Etsu Handotai Co., Ltd.Inventor: Masato Hosoi
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Patent number: 6158596Abstract: In a wafer transport chuck 10 for holding wafers W by means of a pair of holding members 11, each of the holding members 11 has an upper holding portion 12 and a lower holding portion 13 which project from the upper and lower portions of a surface facing another holding member 11, respectively. Each of the upper holding portion 12 and the lower holding portion 13 has a circular arc surface facing the held portions of the wafers W. The upper holding portion 12 has a plurality of upper holding grooves 12a, and the lower holding portion 13 has a plurality of lower holding grooves 13a. Thus, it is possible to make the substrate holder smaller without reducing the strength thereof, and it is possible to improve the cleaning and drying efficiency, so that it is possible to reduce cleaning and drying time and to improve throughput.Type: GrantFiled: February 18, 1999Date of Patent: December 12, 2000Assignee: Tokyo Electron LimitedInventors: Hiromi Ohtsuka, Kazuhisa Matsumoto
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Patent number: 6155436Abstract: A wafer holder assembly includes first and second main structural members from which first and second wafer-holding arms extend. The first arm is secured to the main structural members by a graphite distal retaining member. The second arm is pivotally biased to a wafer-hold position by a graphite bias member. This arrangement provides a conductive path from the wafer to the assembly for inhibiting electrical discharges from the wafer during the ion implantation process. The assembly can further include additional graphite retaining members for maintaining the structural integrity of the assembly during the extreme conditions associated with SIMOX wafer processing without the need for potentially wafer-contaminating adhesives and conventional fasteners. The wafer-contacting pins at the distal end of the arms can be formed from silicon. The silicon pins can be coated with titanium nitride to enhance electrical contact with the wafer and to provide an abrasion resistant surface.Type: GrantFiled: August 18, 1999Date of Patent: December 5, 2000Assignee: Ibis Technology CorporationInventors: Theodore H. Smick, Robert S. Andrews, Bernhard F. Cordts, III
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Patent number: 6145663Abstract: A packing apparatus for liquid crystal display modules simplifies a packaging process for packaging liquid crystal display modules and is easily incorporated into an automated manufacturing and packaging line. The packing apparatus includes a body including a receiving space for separately receiving liquid crystal display modules. The body has a structure including a lower plate, a plurality of side walls extending from each side edge of the lower plate and upper plates extending from each upper edge of the side walls. Projection members are provided on the outer surfaces of the body to relieve and absorb an external impact.Type: GrantFiled: January 28, 1998Date of Patent: November 14, 2000Assignee: LG. Philips LCD Co., Ltd.Inventors: Young Su Kim, Sun Im Park
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Patent number: 6142304Abstract: A unitary fragility packaging article for packaging at least one shock sensitive item within a container having multiple panels, includes in a preferred embodiment a platform portion defining a floor for supporting at least a portion of the item and having a peripheral edge including generally parallel front and rear edges and generally parallel side edges; a plurality of ribs disposed on the platform portion to project from the floor and to divide the floor into a plurality of item-supporting cells; and at least one of the cells being provided with at least a portion of a crush depression for forming a cushion distance between the floor and an adjacent panel of the container.Type: GrantFiled: November 5, 1999Date of Patent: November 7, 2000Assignees: Plastofilm Industries, Robert, Stephens, Van Amburg PackagingInventors: Michael S. Moren, Fred Schindler
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Patent number: 6138824Abstract: A hard disk carrier includes a core rod for collectively holding hard disks in a state of piercing center holes of the hard disks arranged in the axial direction with predetermined separations, a release means for collectively disengaging the holding state of the hard disks by the core rod, a container body for accommodating the hard disks held by the core rod and a cover body for sealing the opening of the container body accommodated with the hard disks.Type: GrantFiled: December 23, 1999Date of Patent: October 31, 2000Assignee: Mediken, Inc.Inventors: Yuichi Hyakusoku, Mitsugi Maekawa
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Patent number: 6135285Abstract: A container is provided for the storing of light sensitive exposed storage layer radiation screens. The container includes walls defining an interior volume, an aperture in one of the walls sized to allow entry of a storage layer radiation screen, a screen receiving surface adjacent to the aperture which is shaped to direct a dropped screen into and through the aperture into the interior volume, an interior dark section of the container within which light exterior to the container cannot reach, and an interior guiding section that is shaped to direct a screen dropped through the aperture to come to rest in the interior dark section. A method is provided for storing light sensitive exposed storage layer radiation screens.Type: GrantFiled: December 1, 1997Date of Patent: October 24, 2000Assignee: Dentsply InternationalInventors: Louis Hlousek, Iain H. Hueton, John Lewis