Abstract: An auto-focus device includes: a light projection lens unit that projects light emitted from a light source unit, on a projection target surface; a light receiving unit that receives a diffusely-reflected light from the projection target surface; a light receiving lens unit that guides the diffusely-reflected light to the light receiving unit; a calculating unit that calculates a focal distance to the projection target surface from the diffusely-reflected light; a first holding unit that holds the light source unit, the light projection lens unit, and the light receiving lens unit; a second holding unit that holds the light receiving unit, and is mounted on the first holding unit; and a pressing unit that presses the second holding unit against the first holding unit. The second holding unit is configured to be displaceable on a surface of the first holding unit along a groove portion formed thereon.

Abstract: A primary beam splitter (310) of an optical apparatus (300) can be used to split an incident light beam (305) into a primary plurality of light beams and to direct a first beam therefrom in a first direction and a second beam therefrom in a second direction orthogonal to the first direction. Secondary beam splitters (315a,b) positioned in beam paths of the first and second beams can be used to split the first and second beams of the primary plurality of light beams into a secondary plurality of light beams (320a,b) and to split the same into a tertiary plurality of light beams (325a,b). A primary plurality of beam reflectors (335a,b/340a,b/345a,b) can be positioned and used to redirect the secondary and tertiary plurality of light beams toward a common detector (355).

Abstract: An reference light emitted from an LED for auto focus enters a glass cover, on which a sample is adhered to, via a half mirror to an objective lens. The reference light that entered the glass cover is reflected by the boundary surface to be reflected light, and this reflected light enters a dichroic mirror via an objective lens. A part transmits the reflected light and allows the light to enter the camera via the dichroic mirror to the lens. A user rotates a motor-operated mirror while viewing the image of the reference light captured by a camera, so as to shift the reference light image position on the boundary surface.

Abstract: An auto-focusing apparatus and method, the apparatus including an emission unit, the emission unit being configured to irradiate light on the organic light-emitting display apparatus; an optical system between the organic light-emitting display apparatus and the emission unit, the optical system being configured to adjust a position of the optical system on an optical axis and focus the irradiated light on the pixel unit; a light-receiving unit, the light-receiving unit being configured to receive light reflected by the organic light-emitting display apparatus and measure an intensity and a wavelength of the reflected light; and a controller, the controller being configured to receive the intensity of light measured by the light-receiving unit, control the position of the optical system, determine that the auto-focusing apparatus is focusing light onto the pixel unit when the intensity of light received by the light-receiving unit is a maximum value, and determine the position of the optical system as an opti

Abstract: A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.

Abstract: A motionless focus evaluation test station is provided for measuring detector position error of EO sensors that do not possess dynamic focus capability. A positionally-fixed source emits EM radiation that diverges along an optical axis of the test station. Collimating optics collimate the EM radiation and direct it along the optical axis to the EO sensor. A positionally-fixed target is placed in the path of the diverging EM radiation nominally at the focal plane of the collimating optics. The target comprises a limiting aperture that exhibits an induced shift in optical focus at different positions along the aperture such that different positions on the target are imaged to different focal planes at the detector. The detector captures an image of the target that is blurred to either side of the spatial position that is optically conjugate to the actual detector position.

Abstract: A machine vision inspection system acquires a plurality of images of a workpiece region of interest at various focus heights, and determines a Z-height (e.g., the best focus height) for the region of interest based on a focus peak determining data set for the region of interest. The focus peak determining data set is derived from the plurality of images. The machine vision inspection system also determines Z-height quality meta-data based on data derived from the plurality of images (e.g., based on the focus peak determining data set), and associates the Z-height quality meta-data with the corresponding Z-heights. The Z-height quality meta-data are usable to establish weighting factors that are used in association with the corresponding best focus Z-heights in subsequent operations that fit a workpiece surface representation to a plurality of the best focus Z-heights.

Abstract: An autofocus control apparatus includes a beam splitter, a condenser lens and a detector. The beam splitter directs light beams from a light source toward a sample and passes light beams reflected from the sample to the condenser lens. The condenser lens condenses the light beams, and the detector detects a focal point deviation of the sample relative to a focal point of the condenser lens. The focal point deviation is detected based on an intersection of a focal line passing through different focal points of the condenser lens and a light receiving plane configured to receive the light beams passing through the condenser lens.

Abstract: The light receiving device includes a pixel array, such as a two-dimensional pixel array, of pixels each having a light-receiving element for receiving input signal light, an output selecting unit for selecting the outputs of pixels within the pixel array, a selected output adding unit for adding and outputting the selected outputs of the pixels, and an amplifying unit for amplifying the output of the selected output adding unit.

Abstract: A system and method of autofocusing an optical system uses transforms of images or portions of images formed by the optical system. A detector is used to capture images at different positions relative to the optical system. Transforms and blur spread parameters are calculated for the images for use in determining a position to which the detector should be moved to autofocus the system.

Abstract: A spatial frequency optical measurement instrument is provided according to the invention. The instrument includes a spatial frequency mask positioned in a light path and configured to encode light with spatial frequency information, a light receiver positioned to receive the light encoded with the spatial frequency information, wherein the light encoded with the spatial frequency information has been interacted with a sample material, and a processing system coupled to the light receiver and configured to determine a change in the spatial frequency information due to the interaction of the light with the sample material.

Abstract: An auto-focusing method of creating a focus value when a point light source image and an image having a low contrast are focused, a recording medium recording the method, and an auto-focusing apparatus for performing the method are provided. In an embodiment, point light source reference graphs and non-point light source graphs are previously stored in a database, a reference graph having the most similar pattern to a focus graph is created by comparing the focus graph of input images to the point light source and non-point light source reference graphs, and a focus value is created when an image is focused using a different method according to the type of corresponding reference graph.

Abstract: The invention relates to a grinding machine for grinding a workpiece, which has been set on a chuck top surface, by moving a rotating grinding wheel in relation to the workpiece. The grinding machine includes: a microscope configured to be vertically movable; a CCD camera configured to take an image viewed through the microscope; and an image processor configured to process the image taken by the CCD camera to measure a vertical distance between a reference plane of the microscope and an object of the microscope. The image processor is adapted to measure the vertical distance between the reference plane of the microscope and the object of the microscope based on sharpness of the image, which corresponds to how clear the microscope is focused.

Abstract: There is provided an apparatus that includes a receiving unit configured to receive instructions for focus adjustment; an image-pickup unit configured to perform image-pickup of an object image input through a focus lens; a setting unit configured to set a focus detecting area to be used at a time of detection of a focus state of the focus lens; a light control unit configured to control an amount of light incident on the image-pickup unit; and a focus adjusting unit configured to detect a focus signal representing the focus state in the focus detecting area to move the focus lens based on the focus signal and a position of the focus lens corresponding to the focus signal.

Abstract: A method and apparatus for recalibrating a liquid lens. In one embodiment, a lens holder is provided to adjust the focal length of the lens as a function of temperature. In another embodiment, a recalibration circuit including a second lens of similar characteristics to the imaging lens is used to determine an appropriate focus. In other embodiments, an open loop calibration process is used.

Abstract: An optical system configured to detect optical signals during imaging sessions. The optical system includes an objective lens that has a collecting end that is positioned proximate to a sample and configured to receive optical signals therefrom. The optical system also includes a removable path compensator that is configured to be located at an imaging position between the collecting end of the objective lens and the sample. The path compensator adjusts an optical path of the light emissions when in the imaging position. Also, the optical system includes a transfer device that is configured to move the path compensator. The transfer device locates the path compensator at the imaging position for a first imaging session and removes the path compensator from the imaging position for a second imaging session.

Abstract: An optical apparatus comprising a first mirror (12), a second mirror (14), and at least one support (30) for holding the second mirror in substantially a predetermined position relative to said first mirror (12), wherein said at least one support (30) comprises at least one actuator (32) arranged to adjust the position of the second mirror (14), and said optical apparatus further comprises at least one light source (40a-40-c) rigidly fixed to the first mirror (12) in a predetermined orientation for providing a beam of light (42a-42c) directed at said second mirror (14), at least one corresponding alignment sensor (46a-46c) for detecting the beam of light (44a-44c) reflected from said second mirror (14), and arranged to provide an output signal indicative of the position of the incident reflected beam, and a controller (50) arranged to receive said output signal, and to thereby control said actuator (32) to adjust the position of the second mirror (14).

Abstract: An imager apparatus and methods are described. An embodiment of an imager module includes a plurality of groups of optical lenses, a lens frame, and at least one associated lens barrel configured to position and hold the plurality of groups of optical lenses. At least one of the groups of optical lenses is movable with respect to at least one other group of optical lenses for achieving optical focus. The imager module includes an integrated circuit (IC) imager die in proximity to the plurality of lenses, the imager die containing at least one image capture microelectronic device.

Abstract: In microscopes, particularly laser scanning microscopes, for detecting light coming from a sample, it is known to protect detectors from excessively high light outputs by means of shutters in the detection beam path. Further, in order to measure the light output impinging on the detector when the detection beam path is closed, a portion of the light is coupled out of the detection beam path and directed to a monitor diode. Constructions of this kind are complicated and costly. In the microscope according to the invention, a monitor diode is arranged on the shutter in such a way that the monitor diode is situated in the detection beam path when the shutter is closed. This makes it possible in a simple manner to measure the light output in a microscope when the detection beam path is closed even without additionally coupling light out of the detection beam path.

Abstract: The present invention relates to a device for measuring defects of an imaging instrument with a sensor that is accurate, simple to produce and implement and inexpensive. According to the invention, this device comprising at least one second sensor, similar to the first, inclined relative thereto and imaging the same region as the first sensor, and a device for calculating the defocusing of each element of this other sensor.

Abstract: There is provided an autofocus device for an imaging device which has an imaging lens system with a first focal plane, an object stage for holding an object, and a first movement module for the relative movement of object stage and imaging lens system. The autofocus device comprises an image-recording module with a second focal plane, a second movement module for the relative movement of object stage and image-recording module, and a control module which controls the image-recording module for focusing the imaging device. The control module controls the first movement module such that evaluated change in distance between the object stage and the imaging lens system is carried out, and controls the second movement module such that, during the first exposure time for recording the first two-dimensional image, the object stage is moved relative to the image-recording module in a plane parallel to the second focal plane.

Abstract: A semiconductor device includes a pair of sensor units each of which includes a photoelectric conversion unit, a signal holding unit and a transfer unit, and outputs a signal held by the signal holding unit, comprising a control unit including a detector unit, wherein when one of the pair of sensor units operates in a first mode, the other operates in a second mode, the detector unit detects that the output has reached a predetermined value after the one starting a signal transfer, the one ends the signal transfer in response to the detection and determines the held signal, the control unit generates a control signal after that, and the other in the second mode accumulates generated charges and starts a signal transfer in accordance with the control signal, then ends the signal transfer and determines the held signal.

Abstract: The invention pertains to methods, components, and operations of multi-focal intraocular lens systems, including range finding for driving same and for discriminating between multiple objects and varying brightness conditions. The invention also pertains to intraocular photosensors and range-finding methods to be used with intra-ocular lens systems, and components, that provide multi-focal IOL capabilities in dynamic visual environments.

Abstract: An optical system used with a laser apparatus may include a focusing optical system, a beam splitter, and an optical sensor. The focusing optical system has one or more focus, for focusing a laser beam outputted from the laser apparatus. The beam splitter is disposed between the focusing optical system and the one or more focus of the focusing optical system. The optical sensor is disposed on a beam path of a laser beam split by the beam splitter.

Abstract: A light scanning apparatus includes a scanner 104 which scans a coherent light beam from a light source 101 , a light beam component generator 110 which divides the coherent light beam outgoing from the scanner 104 into a plurality of light beam components, and an optical system 105 which collects the plurality of light beam components so that they are incident on a scan surface 106 at an incident angle different from each other, and superposes the light beam components at an identical position on the scan surface.

Abstract: A method for adjusting and testing an image sensor module is provided. The method of the present invention includes steps of: (1) calculating longitudinal and transverse deviation values of a center point of a lens relative to a standard reference position specified on a lens barrel, and an angle deviation value of the lens according to position signals of the lens on the image sensor module; (2) compensating the longitudinal and transverse deviation values of the center point of the lens, and the angle deviation value of the lens for exactly positioning the lens; and (3) adjusting focus of the image sensor module. The method of the present invention can compensate the mechanism errors produced in the mounting process of the image sensor module for conveniently and exactly adjusting the focus of the image sensor module. An apparatus for adjusting and testing an image sensor module is also provided.

Abstract: An apparatus for removing motion blur of an image is disclosed. The apparatus includes a motion-blur-function-estimation unit that estimates the motion-blur function of an input image, an image-restoration unit that restores the input image using the estimated motion-blur function, a cost-calculation unit that calculates the blur cost of the restored image, and a control unit that determines the re-estimation of the motion-blur function depending on the calculated blur cost.

Abstract: Systems and techniques for an optical scanning microscope and/or other appropriate imaging system includes components for scanning and collecting focused images of a tissue sample and/or other object disposed on a slide. The focusing system described herein provides for determining best focus for each snapshot as a snapshot is captured, which may be referred to as “on-the-fly focusing.” The devices and techniques provided herein lead to significant reductions in the time required for forming a digital image of an area in a pathology slide and provide for the creation of high quality digital images of a specimen at high throughput.

Abstract: An auto-focusing apparatus and method, the apparatus including an emission unit, the emission unit being configured to irradiate light on the organic light-emitting display apparatus; an optical system between the organic light-emitting display apparatus and the emission unit, the optical system being configured to adjust a position of the optical system on an optical axis and focus the irradiated light on the pixel unit; a light-receiving unit, the light-receiving unit being configured to receive light reflected by the organic light-emitting display apparatus and measure an intensity and a wavelength of the reflected light; and a controller, the controller being configured to receive the intensity of light measured by the light-receiving unit, control the position of the optical system, determine that the auto-focusing apparatus is focusing light onto the pixel unit when the intensity of light received by the light-receiving unit is a maximum value, and determine the position of the optical system as an opti

Abstract: An installation for marking, at the exit of a forming machine (3), transparent or translucent objects running horizontally, in succession, in front of a marking station (7) comprises a device (9) for producing a laser beam to ensure marking of the objects. The installation includes a camera for determining the position of each of the objects along at least one direction transverse to the running direction (D) of the objects, the camera upstream of the marking station relative to the running direction. The focusing plane of the laser beam is displaced along a transverse direction relative to the running direction (D) with a guide driving the displacement means and connected to the camera to make it possible to adjust the focusing plane of the laser beam in order to optimize the marking of the objects by the laser beam.

Abstract: The invention relates to image focus. In particular, it relates to a focus assist system that conveys focus level data to a user. There are a wide variety of different display methods, including, but not limited to, graphs, highlights, symbols, and varied levels of brightness or color.

Abstract: An autofocus device includes an objective lens, an observation optical system, a driving mechanism that displaces the objective lens in an optical axis direction thereof, an illumination-optical-system optical path used to illuminate a measurement surface of a measurement object through the objective lens with light, and a pattern-projection-optical-system optical path. An electronic control shutter, a pattern projection plate having a predetermined pattern formed thereon, and a projection lens are provided in the pattern-projection-optical-system optical path.

Abstract: A vision measuring device includes: a camera which images a workpiece and transfers image information of the workpiece; a position control unit which controls an in-focus position of the camera and outputs the in-focus position as position information representing a position in a Z-axis direction; and a vision measuring machine which performs vision measurement on the workpiece based on image information and position information. The position control unit acquires and retains position information in response to a trigger signal output from the camera or the position control unit to the other at a certain timing of an imaging period during which the camera images the workpiece. The vision measuring machine calculates position information representing a position of image information in the Z-axis direction based on image information transferred from the camera and position information output from the position control unit, and performs auto-focusing control.

Abstract: A focus detecting apparatus includes: a micro lens array having plural micro lenses; a photo-detector having detecting elements corresponding with the micro lenses and receiving light flux from an optical system via the micro lenses; a center detector detecting a center position of each micro lens; an image generator generating an image from the center position of each micro lens and photo-detector output; a contrast detector detecting contrast values of an image signal of the image; a calculator calculating an integrated value by accumulating contrast values for each of plural partial images from the image; and a focus detector detecting focus adjustment status by calculating an image shift amount caused from light fluxes passed through different pupil areas of the optical system based on output of the detecting elements corresponding to the partial images from which a maximum value is obtained among the integrated values calculated by the calculator.

Abstract: Provided is an autofocus device comprising: an optical source; an optical unit that allows emitted light from the optical source and object light from a measurement target to pass through the same optical path, the optical unit being arranged between the optical source and the measurement target; and a detection unit that performs focus detection by using the object light passed through the optical unit, wherein the optical unit comprises: a tube lens that forms the emitted light into parallel light; a line-like image forming unit that forms a line-like image on a surface of the measurement target by the parallel light from the tube lens; and a rotation unit that rotates the line-like image.

Abstract: There is provided an apparatus that includes a receiving unit configured to receive instructions for focus adjustment; an image-pickup unit configured to perform image-pickup of an object image input through a focus lens; a setting unit configured to set a focus detecting area to be used at a time of detection of a focus state of the focus lens; a light control unit configured to control an amount of light incident on the image-pickup unit; and a focus adjusting unit configured to detect a focus signal representing the focus state in the focus detecting area to move the focus lens based on the focus signal and a position of the focus lens corresponding to the focus signal.

Abstract: A spatial frequency optical measurement instrument (100) is provided according to the invention. The instrument (100) includes a spatial frequency mask (120) positioned in a light path and configured to encode light with spatial frequency information, a light receiver (140) positioned to receive the light encoded with the spatial frequency information, wherein the light encoded with the spatial frequency information has been interacted with a sample material, and a processing system (180) coupled to the light receiver (140) and configured to determine a change in the spatial frequency information due to the interaction of the light with the sample material.

Abstract: The present invention further improves operability related to setting the position and size of a focus detection region. An image capturing apparatus of the invention is provided with an image sensor that photo-electrically converts an object image formed by an optical lens, a focus detection unit that detects the focus state of the object image using an image signal from a focus detection region that is a region that is a portion within a frame of the image sensor, a setting unit that sets one focus detection mode from among a plurality of focus detection modes in which the size and position of the focus detection region within the frame differ, and a storage unit that stores a focus detection region size and position for each of the plurality of focus detection modes.

Abstract: A method of autofocusing includes capturing first, second and third images of a sample, at respective first, second and third sample distances and respective first, second and third lateral positions determined with respect to an objective; determining a quantitative characteristic for the first, second and third images; determining a primary sample distance based upon at least the quantitative characteristics for the first, second, and third images; and capturing a primary image of the sample at the primary sample distance and at a primary lateral position that is offset from the first, second and third lateral positions.

Abstract: A focal position determining method determines a focal position of an objective lens focused on an observed target region in a specimen. The focal position determining method includes measuring any one of the focal position of the objective lens at a near point and the focal position of the objective lens at a far point or both so as to determine the focal position of the objective lens focused on the observed target region based on the measured focal position.

Abstract: An optical wavefront sensor comprising a light manipulation device; a detector for detecting light signals having been subjected to the light manipulation device; and a controller coupled to the manipulation device, the controller controlling the manipulation device to function as a lenslet array, each lenslet of the array focussing an incident portion of a wavefront onto the detector. The controller may also control the distance between the detector and the manipulation device. The spatial resolution of Shack-Hartmann sensors can be increased by digital scanning the wavefront with the manipulation device. The wavefront sensing can be dynamic adaptive by setting of parameters of the manipulation device.

Abstract: An apparatus for processing material with focused electromagnetic radiation, comprises: a source emitting electromagnetic radiation, means for directing the radiation onto the material, means for focusing the radiation on or in the material, a unit for generating a pattern in the optical path of the electromagnetic radiation, an at least partially reflective surface in the optical path before the focus of the focused radiation, said pattern being imaged onto said at least partially reflective surface through at least part of said directing means and said focusing means, at least one detector onto which an image of the pattern is reflected by said surface and which generates electrical signals corresponding to said image, said image containing information on the position of the focus, a computer receiving said electrical signals and programmed to process said image so as to generate an electrical signal depending on the focal position, and a divergence adjustment element arranged in said optical path and adapt

Abstract: An autofocus device, comprises: a stage for mounting a sample; an objective lens; a focusing unit driving stage or the objective lens in an optical axis direction in order to control the position relative to each other of the stage and the objective lens; a lighting unit onto the sample; a detection unit detecting an optical image; a projection state changing unit being provided in an optical path, changing a state of the optical image projected onto the detection unit; a first in-focus state determination unit determining an in-focus state of the sample on the basis of a detection result; and a first in-focus state adjustment unit controlling a position of the projection state changing unit such that a state in which the stage and the objective lens are held at prescribed positions under control of the driving unit is determined to be an in-focus state.

Abstract: A method for adjusting and testing an image sensor module is provided. The method of the present invention includes steps of: (1) calculating longitudinal and transverse deviation values of a center point of a lens relative to a standard reference position specified on a lens barrel, and an angle deviation value of the lens according to position signals of the lens on the image sensor module; (2) compensating the longitudinal and transverse deviation values of the center point of the lens, and the angle deviation value of the lens for exactly positioning the lens; and (3) adjusting focus of the image sensor module. The method of the present invention can compensate the mechanism errors produced in the mounting process of the image sensor module for conveniently and exactly adjusting the focus of the image sensor module. An apparatus for adjusting and testing an image sensor module is also provided.

Abstract: An image pickup device in which reflectance in a central portion of the splitting optical system is configured large and that in a peripheral portion is configured small, to thereby selectively reflect only a light beam for focus detection in focus detection means and transmit the other portions of the light beam to the image pickup means so that a decrease in an amount of light for the image pickup means can be reduced while securing an amount of light for focus detection.

Abstract: The irradiation unevenness caused by drift occurring in a beam short-axis direction is reduced without adding a new beam shaping unit and affecting the propagation characteristic of a beam in an optical resonator. A position deviation detector for detecting a position deviation of a laser beam before passing through a beam shaping optical system, an angle deviation detector for detecting an angle deviation of the laser beam before passing through the beam shaping optical system, a deflection mirror for deflecting the laser beam, which is disposed in an optical path between a laser and an object (substrate), and a mirror controller for controlling orientation of the deflection mirror, based on detection data obtained using the position deviation detector and the angle deviation detector so as to eliminate the position deviation from a reference irradiation position in the short-axis direction of a linear beam on a surface to be irradiated.

Abstract: A focus adjustment apparatus includes an imaging unit configured to capture an object image input via a focus lens to output image data, a focus adjustment unit configured to perform focus adjustment by controlling a position of the focus lens based on the image data, a motion detection unit configured to detect a motion of the object image based on the image data, and a control unit configured to control the focus adjustment unit to perform a first focus adjustment operation if motion of the object image is not detected by the motion detection unit, and to control the focus adjustment unit to perform a second focus adjustment operation different from the first focus adjustment operation if motion of the object image is detected by the motion detection unit.

Abstract: A method of focus and a focusing apparatus and a detecting module are provided. The detecting module includes an ellipse curved-surface reflection device and a light detector. The ellipse curved-surface reflection device has a beam gate, a first focus and a second focus. A light beam is focused by a light focusing device, and is projected on a surface of an object to be detected through the beam gate. The ellipse curved-surface reflection device reflects the light beams reflected or scattered by the object. The light detector is disposed on the second focus for receiving the light beam reflected by the ellipse curved-surface reflection device to generate a detecting result, by which a distance between the light focusing device and the surface of the object to be detected is adjusted, so that the light beam is correctly focused on the surface of the object.

Abstract: The current application is directed to autofocus subsystems within optical instruments that continuously monitor the focus of the optical instruments and adjust distances within the optical instrument along the optical axis in order to maintain a precise and stable optical-instrument focus at a particular point or surface on, within, or near a sample. Certain autofocus implementations operate asynchronously with respect to operation of other components and subsystems of the optical instrument in which they are embedded. The described autofocus subsystems employ multiple calibration curves to precisely adjust the z-position of an optical instrument.

Abstract: The present invention is to provide a laser irradiation method for performing homogeneous laser irradiation to the irradiation object even when the thickness of the irradiation object is not even. In the case of irradiating the irradiation object having uneven thickness, the laser irradiation is performed while keeping the distance between the irradiation object and the lens for condensing the laser beam on the surface of the irradiation object constant by using an autofocusing mechanism. In particular, when the irradiation object is irradiated with the laser beam by moving the irradiation object relative to the laser beam in the first direction and the second direction of the beam spot formed on the irradiation surface, the distance between the irradiation object and the lens is controlled by the autofocusing mechanism before the irradiation object is moved in the first and second directions.