Of A Microscope Patents (Class 250/201.3)
  • Patent number: 10955655
    Abstract: There are provided an information processing apparatus, an information processing method, a program, and a microscope system which can compose a microscopically observed image having a wide field of view and a high resolution by highly accurately stitching a plurality of digital images together. An image acquisition unit provided in the information processing apparatus acquires a first partial image and a second partial image each formed by imaging a part of an observation target area, and a stitching position adjustment unit adjusts a stitching position of the second partial image with respect to the first partial image. The image acquisition unit controls drive of the microscope such that a partial image including a specimen is acquired as the second partial image when the first partial image includes a foreign matter.
    Type: Grant
    Filed: April 26, 2013
    Date of Patent: March 23, 2021
    Assignee: Sony Corporation
    Inventor: Masahiro Takahashi
  • Patent number: 10922789
    Abstract: A super-resolution lattice light field microscopic imaging system includes: a microscope configured to magnify a sample and image the sample onto a first image plane of the microscope; a first relay lens configured to match a numerical aperture of an objective with that of a microlens array; a 2D scanning galvo configured to rotate an angle of a light path in the frequency domain plane; an illuminating system configured to provide uniform illumination on the microlens array to generate SIM pattern illumination; the microlens array, configured to modulate a light beam with a preset angle to a target spatial position at a back focal plane of the microlens array to obtain a modulated image; an image sensor configured to record the modulated image; and a reconstruction module configured to reconstruct a 3D structure of the sample based on the modulated image.
    Type: Grant
    Filed: March 19, 2019
    Date of Patent: February 16, 2021
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Qionghai Dai, Zhi Lu, Jiamin Wu
  • Patent number: 10895726
    Abstract: Apparatus and methods for scanning a 2D or 3D image of a specimen without relative Z-axis motion between the specimen and the objective lens. In an embodiment, the apparatus includes a tilted camera having individual lines of pixels. Each line of pixels can be separately processed and is at a different image plane with respect to the stage. The depth of field of each line of pixels abuts, slightly overlaps, or is slightly spaced apart from the adjacent lines of pixels in the tilted camera. The angle of the tilt determines the relationship (abut, overlapping, or spaced) of the adjacent lines of pixels. The individual image lines produced by each line of pixels can be combined into a 3D volume image of a sample. Also, the highest-contrast line at each X-Y location can be combined into an in-focus 2D image of the sample.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: January 19, 2021
    Assignee: LEICA BIOSYSTEMS IMAGING, INC.
    Inventors: Yunlu Zou, Peyman Najmabadi
  • Patent number: 10881291
    Abstract: An eye surgery system 1 comprises microscopy optics 3 and an OCT device 5 to generate a light-optical image and an OCT image of an eye fundus 11, a controller 29 and a visualization system 13, 41, 83. The controller comprises a data interface 97 for receiving a preoperative OCT image and may control the visualization system to display a representation of the received preoperative OCT image. The controller may control the OCT device 5 to record an intraoperative OCT image and may control the visualization system to display a representation of the recorded intraoperative OCT image. The controller may adjust a magnification of the representation of the intraoperative OCT image and/or a magnification of the representation of the preoperative OCT image so that the magnifications of the representation of the intraoperative OCT image and the magnification of the representation of the preoperative OCT image are equal.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: January 5, 2021
    Assignee: CARL ZEISS MEDITEC AG
    Inventors: Konstantinos Filippatos, Artur Högele, Thorsten Tritschler, Christoph Hauger
  • Patent number: 10876975
    Abstract: An inspection system for inspecting a semiconductor wafer. The inspection system comprises an illumination setup for supplying broadband illumination. The broadband illumination can be of different contrasts, for example brightfield and darkfield broadband illumination. The inspection system further comprises a first image capture device and a second image capture device, each configured for receiving broadband illumination to capture images of the semiconductor wafer while the semiconductor wafer is in motion. The system comprises a number of tube lenses for enabling collimation of the broadband illumination. The system also comprises a stabilizing mechanism and an objective lens assembly. The system further comprises a thin line illumination emitter and a third image capture device for receiving thin line illumination to thereby capture three-dimensional images of the semiconductor wafer.
    Type: Grant
    Filed: August 31, 2018
    Date of Patent: December 29, 2020
    Inventors: Ajharali Amanullah, Jing Lin, Han Cheng Ge, Kok Weng Wong
  • Patent number: 10831032
    Abstract: Techniques are provided to re-arrange the placement of a photodiode within an illumination system to achieve improved characteristics and reduced form factor. An illumination system includes a laser assembly, a MEMS mirror system, a beam combiner, and a photodiode. The laser assembly includes RGB lasers, and the MEMS mirror system redirects laser light produced by the RGB lasers to illuminate pixels in an image frame. The beam combiner combines the laser light. The photodiode is provided to determine a power output of the laser assembly by receiving and measuring some of the laser light. The photodiode may be beneficially positioned before or after collimating optics and/or the beam combiner.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: November 10, 2020
    Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
    Inventors: Raymond Kirk Price, Rachel N. Ulanch, Joshua Owen Miller
  • Patent number: 10831013
    Abstract: Methods, systems and computer program products relating to digital microscopy are disclosed. A digital microscopy method may comprise capturing a plurality of overlapping images of a sample, wherein the capturing of at least one of the plurality of images is performed while the sample and a focal plane are in relative motion along an optical axis at a speed greater than zero; and processing the plurality of images using a reference criterion to determine a reference relative arrangement of the focal plane and the sample along the optical axis.
    Type: Grant
    Filed: August 26, 2014
    Date of Patent: November 10, 2020
    Assignee: S.D. Sight Diagnostics Ltd.
    Inventors: Noam Yorav Raphael, Yuval Greenfield, Joseph Joel Pollak, Yonatan Bilu
  • Patent number: 10816785
    Abstract: The present invention relates to a coded zoom knob (3) for detecting the rotation of the zoom drive shaft (4) of a zoom system (10) of a microscope (1), comprising a stator (40) and a rotor (30) rotatable in relation to the stator (40), the rotor (30) being adapted to be mounted to the zoom drive shaft (4), and the stator (40) comprising a rotation sensor (43) for sensing a rotation of the rotor (30), and to a method of retrofitting a microscope with such a coded zoom knob (3).
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: October 27, 2020
    Assignee: Leica Instruments (Singapore) Pte. Ltd.
    Inventors: Chee-Keong Chew, Peng Liu, Andreas Bosch
  • Patent number: 10773339
    Abstract: A scanner head for laser material processing with a laser beam includes focusing optics, and a beam position system that influences a position of the laser beam and is upstream of the focusing optics in a direction of propagation of the laser beam. The beam position system includes at least two controllable movable optical elements by means of which an angle of incidence of the laser beam on a processing surface of a workpiece is adjustable. A processing location of the laser beam on the processing surface is also movable in two dimensions. A beam position sensor is downstream of the beam position system and is configured to detect an actual position of the laser beam or at least four independent position parameters of the laser beam.
    Type: Grant
    Filed: June 3, 2016
    Date of Patent: September 15, 2020
    Assignee: Scantab GmbH
    Inventors: Christian Sonner, Matthias Rabe
  • Patent number: 10739893
    Abstract: A display device includes a display panel and an infrared sensing module. The display panel includes an active region in which a pixel that emits light based on a data signal is disposed. The infrared sensing module transmits a first infrared light that passes through the active region and receives a second infrared light that passes through the active region to recognize an object. The wavelength of the first infrared light may have a wavelength greater than a predetermined value so that a luminance of light emitted by the pixel is not affected by operation of the infrared sensing module.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: August 11, 2020
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jinwoo Park, Hyunduck Cho, Wonkyu Kwak
  • Patent number: 10724961
    Abstract: An inspection apparatus includes an inspection optical system configured to a direct an inspection beam onto a surface of a substrate, the inspection optical system having an objective, a focus measurement optical system configured to receive a focus measurement beam, redirected by the substrate, from the objective, the focus measurement optical system having a movable reflective element configured to receive the focus measurement beam, and a control system configured to cause movement of the reflective element with a direction component along a beam path of the focus measurement beam and configured to determine whether the substrate surface is in the focus of the objective based on the focus measurement beam.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: July 28, 2020
    Assignee: ASML Holding N.V.
    Inventors: Yevgeniy Konstantinovich Shmarev, Stanislav Smirnov
  • Patent number: 10726554
    Abstract: According to some aspects, an image processing apparatus is provided. The image processing apparatus includes circuitry configured to receive at least two images of at least one cell. The at least two images are captured at different times. The circuitry is further configured to determine a motion amount of at least one intracellular structure identified within the at least one cell by comparing the at least two images and generate an indication of cell metabolism information associated with the at least one cell by relating at least one parameter of the motion amount to a degree of cell metabolism for the at least one cell based on reference information.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: July 28, 2020
    Assignee: Sony Corporation
    Inventors: Kazuhiro Nakagawa, Ikuko Tsurui, Hatsume Uno
  • Patent number: 10705341
    Abstract: A waveguide display includes a source assembly, an output waveguide, and a controller. The source assembly includes a light source and an optics system. The light source includes source elements arranged in a 1D or 2D array that emit image light that is temporally incoherent and spatially coherent. In some embodiments, the light source includes an array of superluminous LEDs, an array of laser diodes, an array of resonant cavity LEDs, or some combination thereof. The optics system includes a scanning assembly that scans the image light to particular locations based on scanning instructions. The output waveguide receives the scanned image light from the scanning assembly and outputs an expanded image light. The controller generates the scanning instructions and provides the scanning instructions to the light source.
    Type: Grant
    Filed: July 14, 2017
    Date of Patent: July 7, 2020
    Assignee: FACEBOOK TECHNOLOGIES, LLC
    Inventors: Maxwell Parsons, Wanli Chi, Yijing Fu, Hee Yoon Lee, James Ronald Bonar, Pasi Saarikko, Scott Charles McEldowney
  • Patent number: 10704898
    Abstract: A shape measuring apparatus includes: a light source; a two-beam interference objective lens; an imaging device; an observation optical system; a positioning device; and a control device. The control device calculates, for each unit region in the plurality of images obtained by the imaging device, as a focus position of the unit region, a position of the two-beam interference objective lens at which a luminance-based evaluation value is maximized over the plurality of images, and the control device measures a shape of a target object based on the focus position of each unit region in the plurality of images. The control device uses, as the evaluation value, a luminance of each unit region in the plurality of images as well as a value correlated with a difference between the luminance of the unit region and luminances of a plurality of unit regions adjacent to the unit region.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: July 7, 2020
    Assignee: NTN CORPORATION
    Inventor: Hiroaki Ohba
  • Patent number: 10678038
    Abstract: A scanning confocal microscope apparatus includes: a scanning confocal microscope that includes an objective lens; a computing device that divides a range in a direction of an optical axis of the objective lens of a preliminary scanning area on which preliminary scanning has been performed into a plurality of groups, in accordance with data obtained by performing the preliminary scanning using the scanning confocal microscope; and a controller that controls the scanning confocal microscope so as to perform principal scanning in which at least a portion of the preliminary scanning area is scanned under a measurement condition determined for each of the plurality of groups.
    Type: Grant
    Filed: November 21, 2017
    Date of Patent: June 9, 2020
    Assignee: OLYMPUS CORPORATION
    Inventors: Akihiro Fujii, Yosuke Tani
  • Patent number: 10634895
    Abstract: A microscope apparatus includes an objective and an automatic focusing device. The automatic focusing device is an automatic focusing device of an active type that irradiates a specimen with automatic focusing light via the objective, and the automatic focusing device is configured in such away that an illumination light axis of the automatic focusing light passes through a position distant from an optical axis of the objective.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: April 28, 2020
    Assignee: OLYMPUS CORPORATION
    Inventor: Masaru Kobayashi
  • Patent number: 10613312
    Abstract: Scanned illumination allows for capturing 3-dimensional information about an object. A conventional reflection (or transmission) bright field (or fluorescence, darkfield, polarizing, phase contrast or interference) microscope is configured to use laterally scanned illumination (for example by moving an array in front of the light source) to scan an extended object. A pixelated detector may capture a series of images at the exit pupil of a microscope objective, and this series of images may be processed to form a Light Field image of the object. Or, a microscope is configured to provide scanned illumination to an extended object, while applying extended depth of field and 3D depth localization encoding to the resulting set of images. Thus multiple encoded images are generated. These images are decoded and combined, with custom digital signal processing algorithms, to form a 3D volume rendering or animation.
    Type: Grant
    Filed: October 11, 2016
    Date of Patent: April 7, 2020
    Assignee: The Regents of the University of Colorado, a body
    Inventors: Carol J. Cogswell, Robert H. Cormack
  • Patent number: 10598915
    Abstract: A method for autofocusing a microscope at a correct autofocus position in a sample includes the steps: generating a reference pattern by an autofocus light device, projecting the reference pattern towards a sample, whereby the reference pattern is backscattered by at least two interfaces being located at or close to the sample, projecting the backscattered reference pattern towards a detector which provides spatial resolution, obtaining a superposition of a number of detection patterns, each detection pattern related to one of the interfaces, on the detector, analyzing the superposition of detection patterns to identify at least one autofocus detection pattern related to at least one of the interfaces, and analyzing the at least one autofocus detection pattern to determine the direction and/or magnitude of deviation of the microscope's current focus position from the correct focus position.
    Type: Grant
    Filed: June 23, 2015
    Date of Patent: March 24, 2020
    Assignee: PerkinElmer Cellular Technologies Germany GmbH
    Inventor: Jürgen Rolf Müller
  • Patent number: 10578422
    Abstract: One or more devices, systems, methods and storage mediums for performing continuously, full range optical coherence tomography (OCT) without losing A-lines are provided. Examples of such applications include imaging, evaluating and diagnosing biological objects, such as, but not limited to, for cardio and/or ophthalmic applications, and being obtained via one or more optical instruments, such as, but not limited to, optical probes (e.g., common path probes), catheters, endoscopes, phase shift units (e.g., galvanometer scanner) and bench top systems. Preferably, the OCT devices, systems methods and storage mediums include or involve a phase shift device including at least a galvanometer scanner. The galvanometer scanner is preferably applied with or to a voltage with a triangle shape, the voltage having continuity or absolute constant frequency to obtain continuous images without losing any A-lines.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: March 3, 2020
    Assignees: Canon U.S.A., Inc., The General Hospital Corporation
    Inventors: Daisuke Yamada, Guillermo J Tearney
  • Patent number: 10545169
    Abstract: The invention relates to a top-cover for a controlled environmental system (CES) for use with a measurement technique that requires introducing a probe to a sample placed on a sample holder, a CES and a procedure to control the environment for a sample in a system in particular a CES during a measurement with a probe based technique.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: January 28, 2020
    Assignees: ETH ZURICH, UNIVERSITÄT BASEL
    Inventors: David Martinez-Martin, Daniel J. Mueller, Sascha Martin, David Alsteens, Gotthold Flaschner
  • Patent number: 10542209
    Abstract: Methods and systems for acquiring and/or projecting images from and/or to a target area are provided. Such a method or system can includes an optical fiber assembly which may be driven to scan the target area in a scan pattern. The optical fiber assembly may provide multiple effective light sources (e.g., via a plurality of optical fibers) that are axially staggered with respect to an optical system located between the optical fiber and the target area. The optical system may be operable to focus and/or redirect the light from the multiple light sources onto separate focal planes. A composite image may be generated based on light reflected from and/or projected onto the separate focal planes. The composite image may have an extended depth of focus or field spanning over a distance between the separate focal planes while maintaining or improving image resolution.
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: January 21, 2020
    Assignee: University of Washington through its Center for Commercialization
    Inventors: Eric J. Seibel, Brian T. Schowengerdt
  • Patent number: 10539771
    Abstract: An imaging system is provided, which includes: a microscope; a field diaphragm; a one-dimensional beam-splitting grating, configured to duplicate a beam after passing through the first 4f system into beams with different angles; a phase modulation component, configured to perform different phase modulations to the beams with different angles respectively; a blazed grating, configured to perform dispersion to the beams with different angles passing through the phase modulation component at a dimension orthogonal to the beam-splitting grating; a micro lens array, configured to make the beams with different angles passing through the blazed grating to map to different locations on a back focal plane of the micro lens array; an image sensor, configured to image the back focal plane of the micro lens array. The system may recover three-dimensional information and multispectral information of the sample simultaneously from a single image.
    Type: Grant
    Filed: June 21, 2017
    Date of Patent: January 21, 2020
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Qionghai Dai, Jiamin Wu, Jijun He
  • Patent number: 10509199
    Abstract: An automatic focus system for an optical microscope that facilitates faster focusing by using at least two cameras. The first camera can be positioned in a first image forming conjugate plane and receives light from a first illumination source that transmits light in a first wavelength range. The second camera can be positioned at an offset distance from the first image forming conjugate plane and receives light from a second illumination source that transmits light in a second wavelength range.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: December 17, 2019
    Assignee: Nanotronics Imaging, Inc.
    Inventors: John B. Putman, Matthew C. Putman, Julie Orlando, Dylan Fashbaugh
  • Patent number: 10473455
    Abstract: To provide a confocal displacement sensor capable of reducing a measurement error. Light having a plurality of wavelengths is emitted by a light processing section 120. A chromatic aberration along an optical axis direction is caused by a lens unit 220 in the light emitted by the light projecting section 120. The light having the chromatic aberration converged and irradiated on a measurement object S by the lens unit 220. In the light irradiated on the measurement object S by the lens unit 220, light having a wavelength reflected while focusing on the surface of the measurement object S passes through a plurality of pinholes. Displacement of the measurement object S is calculated by an arithmetic processing section 150 on the basis of signal intensity for each wavelength of an average signal corresponding to an average of intensities for each wavelength concerning a plurality of lights passed through the plurality of pinholes.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: November 12, 2019
    Assignee: Keyence Corporation
    Inventor: Shoma Kuga
  • Patent number: 10433722
    Abstract: A diagnosis system and a diagnosis method are provided. More specifically, embodiments of the present disclosure relate to a diagnosis system for detection of corneal degeneration impacting the biomechanical stability of the human cornea and a diagnosis method for detection of corneal degeneration impacting the biomechanical stability of the human cornea. Still more specifically, embodiments of the present disclosure relate to a diagnosis system for early detection of corneal degeneration impacting the biomechanical stability of the human cornea and a diagnosis method for early detection of corneal degeneration impacting the biomechanical stability of the human cornea.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: October 8, 2019
    Assignee: WAVELIGHT GMBH
    Inventors: Klaus Vogler, Christof Donitzky
  • Patent number: 10410338
    Abstract: The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, identifying a location of a feature-of-interest present in the full optical image with an additional sources, acquiring an SEM image of a portion of the sample that includes the feature at the identified location with a SEM tool, acquiring an optical image portion at the location identified by the additional source, the image portions including a reference structure, correlating the image portion and the SEM image based on the presence of the feature-of-interest and the reference structure in both the image portions and the SEM image, and transferring a location of the feature-of-interest in the SEM image into the coordinate system of the image portion of the full optical image to form a corrected optical image.
    Type: Grant
    Filed: October 3, 2014
    Date of Patent: September 10, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Hucheng Lee, Lisheng Gao, Jan Lauber, Yong Zhang
  • Patent number: 10402963
    Abstract: Defect detection on transparent or translucent wafers can be performed on a die using references from the same die. A first calculated value based on a kernel size, such as a moving mean, is determined. A first difference is determined by subtracting the first calculated value from a pixel intensity. Candidate pixels with a first difference above a threshold are classified. A second calculated value based on a kernel size, such as a local median, is determined. A second difference is determined by subtracting the second calculated value from the pixel intensity. Pixels that include a defect are classified when the second difference is above the threshold.
    Type: Grant
    Filed: November 3, 2017
    Date of Patent: September 3, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Xuguang Jiang, Yong Zhang, Yiwu Ding
  • Patent number: 10371931
    Abstract: A digital microscope apparatus includes a first imaging unit including a first imaging device and a first optical system including an objective lens configured to enlarge first and second images of a preparation that holds a sample, the first image being formed on the first device through the first system, a second imaging unit including a second optical system that is branched from the first system and has a depth of field larger than the first system and a second imaging device on which the second image is formed through the second system, and a controller configured to calculate a provisional in-focus position of the lens based on the second image, determine an area of the first device, from which the first image is read, and search for, based on the read image, an in-focus position of the lens in a predetermined range based on the provisional in-focus position.
    Type: Grant
    Filed: April 12, 2016
    Date of Patent: August 6, 2019
    Assignee: Sony Corporation
    Inventors: Takashi Yamamoto, Takuya Oshima, Ryu Narusawa, Takamichi Yamakoshi, Norihiro Tanabe
  • Patent number: 10346980
    Abstract: Presented are techniques for processing medical images. The techniques can include accessing a stored medical image and electronically representing a plurality of overlapping tiles that cover the medical image, each overlapping tile including a non-overlapping inner portion and an overlapping marginal portion. The techniques can also include in parallel, and individually for each of a plurality of the overlapping tiles: applying a segmentation process to identify objects in the at least one medical image, identifying inner object data representing at least one inner object that is contained within an inner portion of at least one tile, and identifying marginal object data representing at least one marginal object that overlaps a marginal portion of at least one tile. The techniques can also include merging at least some of the marginal object data to produce merged data, and outputting object data including the inner object data and the merged data.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: July 9, 2019
    Assignee: PROSCIA INC.
    Inventors: Brian H. Jackson, Coleman C. Stavish, Yating Jing, John Kulp
  • Patent number: 10341551
    Abstract: A method for focusing may include receiving a first image stack of a first field of view, the first image stack including images captured with different focus from the first field of view; determining, from the first image stack, a first spatial distribution of focus depths in which different areas in the first field of view are in focus; determining a first local sample thickness and a first sample tilt in the first field of view based on the first spatial distribution of focus depths; and estimating, based on the first local sample thickness and the first sample tilt, a focus setting for capturing a second image stack from a second field of view.
    Type: Grant
    Filed: May 21, 2018
    Date of Patent: July 2, 2019
    Assignee: GRUNDIUM OY
    Inventors: Matti Pellikka, Markus Vartiainen
  • Patent number: 10317660
    Abstract: A microscope apparatus includes an objective and an automatic focusing device. The automatic focusing device is an automatic focusing device of an active type that irradiates a specimen with automatic focusing light via the objective, and the automatic focusing device is configured in such away that an illumination light axis of the automatic focusing light passes through a position distant from an optical axis of the objective.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: June 11, 2019
    Assignee: OLYMPUS CORPORATION
    Inventor: Masaru Kobayashi
  • Patent number: 10298833
    Abstract: In the image capturing apparatus, the optical path difference producing member is disposed on the second optical path. Thereby, the amount of light for imaging an optical image which is focused at the front of an optical image made incident into the first imaging device (front focus) and an optical image which is focused at the rear thereof (rear focus) by the second imaging device can be suppressed to secure the amount of light on image pickup by the first imaging device. Further, in the image capturing apparatus, at least one of a position of the first imaging region and a position of the second imaging region on the imaging area is changed, thus making it possible to easily adjust an interval between the front focus and the rear focus. It is, thereby, possible to detect a focus position of the sample at high accuracy.
    Type: Grant
    Filed: January 17, 2013
    Date of Patent: May 21, 2019
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventor: Hideshi Oishi
  • Patent number: 10247910
    Abstract: An automatic focus system for an optical microscope that facilitates faster focusing by using at least two cameras. The first camera can be positioned in a first image forming conjugate plane and receives light from a first illumination source that transmits light in a first wavelength range. The second camera can be positioned at an offset distance from the first image forming conjugate plane and receives light from a second illumination source that transmits light in a second wavelength range.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: April 2, 2019
    Assignee: Nanotronics Imaging, Inc.
    Inventors: John B. Putman, Matthew C. Putman, Julie Orlando, Dylan Fashbaugh
  • Patent number: 10241347
    Abstract: A spatial filter is made by forming a structure comprising a focusing element and an opaque surface, the opaque surface being disposed remotely from the focusing element in substantially the same plane as a focal plane of the focusing element; and by forming a pinhole in the opaque surface at or adjacent to a focal point of the focusing element by transmitting a substantially collimated laser beam through the focusing element so that a point optimally corresponding to the focal point is identified on the opaque surface and imperfection of the focusing element, if any, is reflected on the shape and position of the pinhole so formed.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: March 26, 2019
    Assignee: INTEGRATED PLASMONICS CORPORATION
    Inventors: Michael Yagoda Shagam, Robert Joseph Walters
  • Patent number: 10244155
    Abstract: An image capturing apparatus capable of interchanging a lens unit includes a processing unit configured to perform image correction processing based on data acquired by an acquisition unit. In the image capturing apparatus, the acquired data includes information of a first shooting condition, configured in a discrete manner, information of a plurality of second shooting conditions provided for each information of the first shooting condition, and correction information corresponding to a combination of the information of the first shooting condition and the information of the second shooting condition.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: March 26, 2019
    Assignee: Canon Kabushiki Kaisha
    Inventor: Akira Kano
  • Patent number: 10234673
    Abstract: A confocal microscope apparatus includes an image acquisition unit configured to obtain a first all-in-focus image of each of a plurality of measurement visual field areas constituting a measurement target area in a brightness setting in accordance with the corresponding measurement visual field area, and a stitched image constructor configured to construct a stitched image on the basis of a plurality of second all-in-focus images. The second all-in-focus images are obtained through conversion of the plurality of first all-in-focus images obtained by the image acquisition unit so that the images become closer to a plurality of reference all-in-focus images. The plurality of reference all-in-focus images are obtained when the plurality of measurement visual field area are captured in a brightness setting serving as a reference.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: March 19, 2019
    Assignee: OLYMPUS CORPORATION
    Inventor: Akihiro Fujii
  • Patent number: 10222597
    Abstract: A medical optical observation instrument including an illumination system, which provides an illumination beam path for illuminating an observation object with illumination light, an observation system, which provides an observation beam path for observing the observation object and at least one camera for recording a digital image of the observation object, and a device for contrasting polarization-rotating tissue in the observation object. The device for contrasting polarization-rotating tissue in the observation object includes at least one illumination apparatus, arranged in the illumination system, including a polarization portion, at least one linear analyzer, arranged in the observation system and rotatable about the optical axis of the observation beam path, an image processing apparatus connected to the at least one camera, and an optimization apparatus connected to the image processing apparatus and to the at least one rotatable linear analyzer and the polarization portion.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: March 5, 2019
    Assignee: CARL ZEISS MEDITEC AG
    Inventor: Christoph Hauger
  • Patent number: 10217605
    Abstract: One embodiment relates to a method of automated inspection of scattered hot spot areas on a manufactured substrate using an electron beam apparatus. A stage holding the substrate is moved along a swath path so as to move a field of view of the electron beam apparatus such that the moving field of view covers a target area on the substrate. Off-axis imaging of the hot spot areas within the moving field of view is performed. A number of hot spot areas within the moving field of view may be determined, and the speed of the stage movement may be adjusted based on the number of hot spot areas within the moving field of view. Another embodiment relates to an electron beam apparatus for inspecting scattered areas on a manufactured substrate. Other embodiments, aspects and features are also disclosed.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: February 26, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Sean X. Wu, Kini Vivekanand
  • Patent number: 10215954
    Abstract: A focus monitoring arrangement (1000) is provided for a scatterometer or other optical system. A first focus sensor (510) provides a first focus signal (S1-S2) indicating focus relative to a first reference distance (z1). A second focus sensor (1510) for providing a second focus signal (C1-C2) indicating focus relative to a second reference distance (z2). A processor (1530) calculates a third focus signal by combining the first focus signal and the second focus signal. By varying the proportions of the first and second focus signals in calculating the third focus signal, an effective focus offset can be varied electronically, without moving elements.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: February 26, 2019
    Assignee: ASML Netherlands B.V.
    Inventor: Gerbrand Van Der Zouw
  • Patent number: 10191268
    Abstract: The present invention concerns a method for generating a pattern of light, this method comprising the following steps: a) emitting an input laser pulse (P1), b) deflecting the input laser pulse (P1) by a first deflector (22) to obtain a first laser pulse, c) deflecting the first laser pulse (P3) by a second deflector (24) to obtain a second laser pulse (P4), and d) focusing the pulse (P4) by an optical element characterized in that: —the first deflector (22) shapes the first laser pulse (P3) according to a first function, —the second deflector (24) shapes the second laser pulse (P4) according to a second function, and—the first function f(x) and the second function g(y) are computed and/or optimized to obtain the desired pattern of light.
    Type: Grant
    Filed: October 15, 2015
    Date of Patent: January 29, 2019
    Assignees: INSERM (Institute National de la Sante et de la Recherche Medicale), Centre National de la Recherche Scientifique (CNRS), Ecole Normale Superieure
    Inventors: Jean-Francois Leger, Laurnet Bourdieu, Stephane Dieudonne
  • Patent number: 10169861
    Abstract: An image processing apparatus includes a number-of-target-cells estimating unit for estimating, on the basis of a feature of a target sample, the number of target cells included in the target sample, and a detection parameter setting unit for setting, on the basis of the estimated number of target cells, a detection parameter regarding a process of detecting target cells in a captured image of the target sample.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: January 1, 2019
    Assignee: FUJIFILM CORPORATION
    Inventors: Ryota Ozaki, Hideto Oda, Noriji Kato
  • Patent number: 10155926
    Abstract: An imaging section of a microscope apparatus captures a plurality of microscope images each having the focal position which differs in the field being same with a light flux having passed through a microscopic optical system. A region separating section separates a cellular region from a non-cellular region by using the plurality of the microscope images. A focusing position calculating section finds a focusing position in a target pixel included in the cellular region based on a brightness change in the position being same in the plurality of the microscope images. A three dimensional information generating section generates three dimensional information of a cultured cell based on a position of the cellular region and the focusing position in the target pixel.
    Type: Grant
    Filed: December 23, 2016
    Date of Patent: December 18, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yasujiro Kiyota
  • Patent number: 10116855
    Abstract: A microscope including an objective having a focal plane in a sample space, and an autofocus device comprising a light modulator for generating a luminous modulation object that is intensity-modulated periodically along one direction, an autofocus illumination optical unit that images the modulation object such that its image arises in the sample space, an autofocus camera, an autofocus imaging optical unit that images the image of the modulation object in the sample space onto the autofocus camera, a control device, which receives signals of the autofocus camera and determines an intensity distribution of the image of the modulation object and generates a focus control signal therefrom. The control device determines an intensity distribution of the image of a luminous comparison object imaged by the optical unit to correct the intensity distribution of the image of the modulation object with regard to reflectivity variations in the sample space.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: October 30, 2018
    Assignee: CARL ZEISS MICROSCOPY GMBH
    Inventors: Peter Westphal, Reiner Mitzkus
  • Patent number: 10110798
    Abstract: A cell observation apparatus includes an imaging device capable of imaging a vessel containing cells while varying a focal position, an illuminating device for irradiating the vessel with illuminating light; and a controller for controlling the imaging device. The controller includes: a z-stack imaging controller for causing the imaging device to take a plurality of z-stack images while varying the focal position; a variance value calculation part for calculating a variance value of pixels values for each of the z-stack images; an edge index value calculation part for calculating an edge index value indicative of edge strength for each of the z-stack images; a focus evaluation value calculation part for calculating a focus evaluation value having a minimum value in an in-focus position, based on the variance value and the edge index value; and an in-focus position estimation part for calculating the focal position where the focus evaluation value has a minimum value to estimate the in-focus position.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: October 23, 2018
    Assignee: Screen Holdings Co., Ltd.
    Inventor: Yuichiro Hikida
  • Patent number: 10107681
    Abstract: Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.
    Type: Grant
    Filed: August 10, 2016
    Date of Patent: October 23, 2018
    Assignees: Samsung Electronics Co., Ltd., Industry-Academic Cooperation Foundation, Yonsei University
    Inventors: In-joong Kim, Ilgu Yun
  • Patent number: 10107999
    Abstract: A scanning microscope includes: a varifocal lens that scans an object in an optical-axis direction of an objective; a scanner that scans the object in a direction orthogonal to the optical axis of the objective; and a controller configured to control the varifocal lens and the scanner.
    Type: Grant
    Filed: August 5, 2016
    Date of Patent: October 23, 2018
    Assignee: OLYMPUS CORPORATION
    Inventor: Shingo Tamano
  • Patent number: 10036880
    Abstract: A microscope apparatus according to the present invention includes a bright-field illumination optical system and a fluorescence illumination optical system that respectively radiate illumination light and excitation light onto a sample, an observation optical system that observes observation light from the sample, and a controller that controls the fluorescence illumination optical system so that the excitation light is radiated onto the sample when the irradiation of the illumination light on the sample is prevented by an irradiation preventing portion of the bright-field illumination optical system and so that the irradiation of the excitation light on the sample is prevented when the irradiation of the illumination light on the sample is not prevented by the irradiation preventing portion.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: July 31, 2018
    Assignee: OLYMPUS CORPORATION
    Inventor: Yoshihiro Kawano
  • Patent number: 10026024
    Abstract: At least first and second digital images of the sample are acquired having different focal heights relative to a platform on which the cells are disposed. A contrast matrix is produced having elements computed in dependence upon the difference between the values of the corresponding pixels in the first and second images. A phase matrix is produced by convolution of the contrast matrix with a predetermined distance matrix. The phase matrix is used to assess characteristics of the sample, such as the presence of cells in the sample or the heights of cells in the sample.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: July 17, 2018
    Assignee: SOLENTIM LIMITED
    Inventors: Aaron Figg, David Elverd
  • Patent number: 10024804
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: July 17, 2018
    Assignee: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • Patent number: 10025086
    Abstract: At least first and second digital images of the sample are acquired having different focal heights relative to a platform on which the cells are disposed. A contrast matrix is produced having elements computed in dependence upon the difference between the values of the corresponding pixels in the first and second images. A phase matrix is produced by convolution of the contrast matrix with a predetermined distance matrix. The phase matrix is used to assess characteristics of the sample, such as the presence of cells in the sample or the heights of cells in the sample.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: July 17, 2018
    Assignee: SOLENTIM LIMITED
    Inventors: Aaron Figg, David Elverd