Abstract: Systems, methods, and other embodiments described herein relate to determining driving behaviors for controlling a vehicle. In one embodiment, a method includes generating, using textual descriptions in combination with driving log snippets, a joint feature space that represents a coordinated mapping between the textual descriptions and the driving log snippets. The method includes training a policy network to generate identified behaviors from the driving behaviors according to a correspondence between an observed context that is mapped onto the joint feature space and the driving behaviors defined in the joint feature space resulting from at least the textual descriptions. The method includes providing a behavior cloning model including at least an encoder, the joint feature space, and the policy network to generate control behaviors from the driving behaviors defined in the joint feature space according to acquired observations of a surrounding environment of the vehicle.

Abstract: A circuit board assembly is applied to the field of electronic communications technologies to resolve a prior-art heat dissipation problem of a circuit board. The circuit board assembly combines, on a second circuit board, low-speed signals transmitted between a plurality of I/O modules and an IC chip, and then transmits the combined low-speed signals to the IC chip by using a low-speed cable. A low-speed signal sent by the IC chip to the plurality of I/O modules is extended to a plurality of low-speed signals on the second circuit board, and then the plurality of low-speed signals are separately sent to the plurality of I/O modules. This may be applied to a scenario in which a relatively large quantity of electronic components need to be disposed on a circuit board.

Abstract: In one example, an apparatus comprises a plurality of sub-pixels arranged sideway, a shared optical element positioned over the plurality of sub-pixels, the shared optical element being configured to direct light originating from a same location in a scene to each sub-pixel in the plurality of sub-pixels; one or more polarizers positioned between the shared optical element and one or more first sub-pixels of the plurality of sub-pixels and configured to selectively pass one or more components of the light having one or more pre-determined polarization states, to enable the photodiodes of each of the one or more first sub-pixels to generate signals based on intensities of the one or more components; and one or more processors configured to generate polarimetric measurements of the received light based on signals obtained from the photodiodes of the one or more first sub-pixels and polarization properties of the one or more polarizers.

Abstract: A system and method to determine angular movement of an arbor integral with a crown of a watch, the arbor being rotatable on itself in a longitudinal direction. The system includes a rotating reflector mounted on the arbor, and two emitter/detector pairs disposed on either side of the reflector, each including a light source for illuminating the reflector, and a light detector for receiving the light reflected on the reflector and for generating an electrical signal representative of the reflected light. A processor processes the electrical signals, and determines a parameter relating to the angular movement of the arbor. The rotating reflector is a cylinder of revolution and light absorption points are made on the circumference of an external cylindrical surface. When the reflector rotates in a regular manner and in the same direction of rotation, the representative electrical signal generated by each detector has a sinusoidal shape.

Abstract: An imaging apparatus includes a light source configured to generate and output light, a stage having a measurement target thereon, a line-scan spectral imaging (SI) optical system configured to measure the measurement target using a first scale and to slopingly irradiate the light from the light source onto the measurement target in a line beam shape, divide light reflected by the measurement target, and perform imaging of the divided light, and an angle-resolved SI optical system configured to measure the measurement target at a second scale that is smaller than the first scale and configured to divide the light from the light source into monochromatic light, slopingly irradiate the monochromatic light onto the measurement target by using a reflective objective lens, and perform imaging of light reflected by the measurement target.

Abstract: A holographic interferometer, comprising: an imaging device capturing an interference pattern created by at least two polarized light beams; a structured phase retardation element located in an optical path of at least one polarized light beam of the at least two polarized light beams; and a polarizer located between the imaging device and the structured phase retardation element, the polarizer projects each polarization of each of the at least two polarized light beams on a single axis to create the interference pattern on the imaging device.

Abstract: According to one embodiment of the present disclosure, an imaging system includes: an image sensor including a plurality of subpixels grouped into a plurality of pixels; a polarization system including: a rotatable linear polarizer; and a polarizer mask including a plurality of polarizer filters, the polarizer filters being aligned with corresponding ones of the subpixels, the subpixels of a pixel of the plurality of pixels being located behind polarizer filters at different angles of linear polarization; and imaging optics configured to focus light from a scene onto the image sensor.

Abstract: An image sensor configured to resolve intensity and polarization has multiple pixels each having a single microlens adapted to focus light on a central photodiode surrounded by at least a first, a second, a third, and a fourth peripheral photodiodes, where a first polarizer at a first angle is disposed upon the first peripheral photodiode, a third polarizer at a third angle is disposed upon the third peripheral photodiode, a second polarizer at a second angle is disposed upon the second peripheral photodiode, and a fourth polarizer at a fourth angle is disposed upon the fourth peripheral photodiode, the first, second, third, and fourth angles being different. In embodiments, 4 or 8 peripheral photodiodes are provided, and in an embodiment the polarizers are parts of an octagonal polarizer.

Abstract: An expanded Bell state generator can generate a Bell state on four output modes of a set of m output modes, where m is greater than four. Some expanded Bell state generators can receive inputs on any four of a set of 2m input modes. Subsets of the m output modes can be multiplexed to reduce the number of modes to four. According to some embodiments, a set of 2×2 muxes can be used to rearrange the output modes prior to reducing the number of modes.

Abstract: Various embodiments of an apparatus, methods, systems and computer program products described herein are directed to an agricultural observation and treatment system and method of operation. The agricultural treatment system uses a treatment unit for emitting a laser at agricultural objects. The treatment unit is configured with a treatment head assembly that includes a moveable treatment head with one or more laser emitting tips. A first and second motor assembly are operated by the treatment unit to control the movement of the treatment head. The first motor assembly includes a first motor rotatable in a first rotational axis. A first linkage assembly is connected to the first motor and the treatment head assembly. The first linkage assembly is rotatable by the first motor. The second linkage assembly is rotatable by the second motor.

Abstract: A microscope apparatus includes light source configured to generate an illuminating beam. The microscope apparatus further includes a first beam splitter configured to split the illuminating beam into a first component along a first path and a second component along a second path. The microscope apparatus further includes a movable reflector module along the second path. The microscope apparatus further includes a moving mechanism connected to the movable reflector module, wherein the moving mechanism is configured to move the movable reflector in a first direction for adjusting a length of the second path. The microscope apparatus further includes a second beam splitter configured to recombine the first component and the second component. The microscope apparatus further includes an observing device configured to receive the recombined first component and second component.

Abstract: An optical path test system includes a return light test unit for emitting laser light to an optical path monitoring unit to simulate return light received by the optical path monitoring unit in a normal operation; a light path monitoring unit arranged on a light path of the return light testing unit for receiving the return light and normally emitting laser light; and a power detector for receiving the laser light emitted by the light path monitoring unit so as to monitor stability of output power of the chip when the light path monitoring unit receives the return light emitted by the return light testing unit. The technical solution in the present invention emits laser light to a tested laser chip to simulate return light received by the tested laser chip in a normal operation, and a return light resistance threshold of the laser chip can be accurately evaluated.

Abstract: A system including a first micro-retarder array, wherein the first micro-retarder array is configured to convert a purely polarized light of an incident light into two components. The system additionally includes an optical device, wherein the optical device is configured to collimate the two components to two foci planes. Moreover, the system includes a second micro-retarder array, wherein the second micro-retarder array is configured to combine a set of two components of the incident light, thereby producing a second purely polarized light. Further the system includes a detector, wherein the detector is configured to receive the second purely polarized light.

Abstract: A magneto-optical sensor for sensing a current flowing through a conductor includes a light source capable of providing a linearly-polarised optical beam, and a polarisation analyser configured to perform a differential measurement of two polarisation components of the linearly-polarised optical beam having travelled along an optical path arranged between the light source and the polarisation analyser. The optical path forms a closed trajectory around the conductor. The sensor comprises a cell containing an atomic gas arranged along the optical path.

Abstract: Provide are a reticle transfer device and an exposure system. The reticle transfer device includes a bearing member, a light source, a light detector and a controller. The bearing member is configured to bear the reticle, and the light source is configured to emit irradiation light to the reticle and form reflected light. The light detector is configured to obtain the reflected light and generate a light detection signal. The controller is configured to determine whether particulate matter exists on a surface of the reticle based on the light detection signal. The reticle transfer device can determine whether particulate matter exists on the surface of the reticle in real time based on the light detection signal.

Abstract: Improved resolution of a time-varying optical image is provided with a wide field optical intensity modulator having a bandwidth greater than that of the detector array(s). The modulator configuration can have high photon collection efficiency, e.g. by using polarization modulation to split the incident light into several timegated channels.

Abstract: A target of a geodetic system based on global and local identification references. The target comprises a light emitter (LE) for emitting n predetermined modulated light patterns (MLPs) permanently assigned to one of m (m>n) global identification reference (GIR). The target transmits or receives data based on the assigned GIR. The geodetic system further comprises a geodetic surveying instrument comprising an optical sensor (OS) receives the MLPs and digitizes them using a fast sampling analogue-to-digital converter (ADC). A computing system selects one of the targets or receives a selection of the at least one target assigned to a selected GIR. One of n local identification references (LIRs) is temporarily assigned to the selected GIR. The light emitter of the selected target is directed to emit an MLP corresponding with the assigned LIR. Thus, by detection of the assigned LIR, the selected target is identified.

Abstract: An object of the present invention is to provide a radiation temperature measuring device capable of preventing reduction in the accuracy of temperature measurement due to an electromagnetic wave reflected by a measurement target. A radiation temperature measuring device includes a reflective polarizing plate configured to reflect a polarized wave of one direction in an electromagnetic wave radiated from an object to be measured and transmit or absorb a polarized wave of a direction perpendicular to the one direction and an infrared sensor configured to detect the polarized electromagnetic wave of the one direction reflected by the reflective polarizing plate.

Abstract: A current-measuring transducer device has a current transducer for measuring an electric current along a conduction path. The current transducer has a magnetic field-sensitive element for converting the magnetic field resulting from the current flow along the conduction path into at least one physical variable and a measuring device for measuring the physical variable. The current transducer device has a coil arrangement with at least one coil for simulating the magnetic field resulting from the current flow along the conduction path. There is also described a method for calibrating a corresponding current transducer and a computer program product for performing the calibration method.

Abstract: A glass ring for current measurements includes a glass body, which can be disposed around an electrical conductor and has a light entry surface and a light exit surface. The glass ring allows light which enters the glass body through the light entry surface to circulate completely around the conductor in the glass body by reflection on external sides or outer faces of the glass body, the light exiting from the glass body on the light exit surface. The glass ring is formed of a monolithic glass body. A method for optical current measurement includes using a current flow in an electrical conductor to generate an electromagnetic field around the conductor, by which a polarization of a light beam in the glass ring around the conductor, in particular with a plane perpendicular to the longitudinal axis of the conductor, is changed as the light beam circulates around the conductor.

Abstract: The present application relates to a polarization conversion element and an optical isolation device. The present application provides a polarization conversion element capable of converting unpolarized incident light into one polarized light and an optical isolation device with an excellent optical isolation ratio comprising the polarization conversion element. Such an optical isolation device can be applied to various applications such as the field of optical communication or laser optics, the field of security or privacy protection, brightness enhancement of displays, or a use for hiding and covering.

Abstract: Embodiments of the invention describe polarization insensitive optical devices utilizing polarization sensitive components. Light comprising at least one polarization state is received, and embodiments of the invention select a first optical path for light comprising a first polarization state or a second optical path for light comprising a second polarization state orthogonal to the first polarization state. The optical paths include components to at least amplify and/or modulate light comprising the first polarization state; the second optical path includes a polarization rotator to rotate light comprising the second polarization state to the first polarization state.

Abstract: A nonlinear transmission system comprising a polarization maintaining (PM) fiber and a polarizer, based on the extreme sensitivity of the state of polarization of transmitted light on various parameters, such as the temperature, the optical power input to the fiber. Passive stabilization is achieved by simply terminating the PM fiber by a polarizer at a selected angle. Active stabilization of the optical length of the PM fiber is achieved by feeding back the transmitted into the control of optical power sent through the fiber.

Abstract: A system for high-resolution high-contrast x-ray ghost diffraction comprises: A) a laboratory x-ray source configured to provide an input beam; B) a diffuser configured to induce intensity fluctuations in the input beam; C) a beam splitter configured to split the input beam into: i) a test arm comprising an object and a single-pixel detector; and ii) a reference arm comprising one of: (a) a multi-pixel detector and (b) a single-pixel detector and an aperture or a scanning slit configured to simulate a one or two dimensional multi-pixel detector; and D) a processor configured to receive output intensity measurements of the detectors in the test arm and the reference arm, to record the output intensity measurements at different rotational positions of the rotating diffuser, to correlate the output intensity measurements, and to use the correlated output measurements to reconstruct a diffraction pattern of the object; wherein the object is placed as close as possible to the beam splitter and the detectors in the

Abstract: A polarization sensor is described. It includes a quarter-wave plate to convert circularly polarized light into linearly polarized light. The quarter-wave plate is realized as a metasurface. The sensor also includes a linear polarizer to analyze the light generated by the quarter-wave plate, and a photodetector to receive the analyzed light. The sensor may be combined with other linear polarization sensors to form a sensor capable of complete measurement of the polarization state of incident light. An array of these sensors can be integrated directly onto image sensors to form a polarimetric imager.

Abstract: Systems, assemblies, and methods for detecting changes in polarization states are described. Example systems may include a light receiving unit including a sensor and a receiving polarizer. The sensor is configured to sense light from a polarized light source deflected through the receiving polarizer by a light directing article. The sensor is configured to generate a signal indicative a received polarization state of light deflected by the light directing articles. Such systems may be coupled to vehicles and may be useful for sensor-detectable signs, indicia, and markings to facilitate automated or assisted vehicular transport.

Abstract: From a stage of preheating by a halogen lamp to irradiation with a flash by a flash lamp, a radiation thermometer is used for measuring the temperature of a back surface of a semiconductor wafer. A increased temperature ?T is determined by which the back surface of the semiconductor wafer is increased in temperature from the preheating temperature by irradiation with a flash. The specific heat of the semiconductor wafer has a known value. Further, the increased temperature ?T is proportionate to the magnitude of energy applied to a front surface of the semiconductor wafer by irradiation with a flash. Thus, a front surface attained temperature of the semiconductor wafer can be determined using the increased temperature ?T of the back surface of the semiconductor wafer during irradiation with a flash.

Abstract: The present invention discloses an encoding apparatus, including: a polarization splitter-rotator PSR, a polarization rotation structure, and a modulator, where the PSR is configured to receive an input signal light, split the input signal light into two parts whose polarization modes are the same, and send the two parts to the polarization rotation structure and the modulator respectively; the polarization rotation structure has functions of rotating, by 180 degrees, a polarization direction of an optical signal entering the polarization rotation structure from one end, and keeping a polarization direction of an optical signal entering the polarization rotation structure from the other end unchanged; the modulator is configured to modulate a light input to the modulator; and the PSR is further configured to receive signal lights sent by the polarization rotation structure and the modulator, combine the two signal lights to send the output signal light.

Abstract: The present invention provides a recording method and a recording device in which information can be easily recorded even in a magnetic recording medium using epsilon iron oxide particles having a high coercive force as a magnetic recording material. A recording device of the invention applies an external magnetic field H0 that inclines magnetization of epsilon iron oxide particles to a particle dispersion element containing epsilon iron oxide particles, and irradiates the particle dispersion element with light that excites the magnetization. Accordingly, the recording device is capable of inverting magnetization that is not capable of being inverted only by the external magnetic field, in accordance with a synergetic effect between the inclination of the magnetization and the light excitation of the magnetization.

Abstract: A system for sensing concentration is provided. A light source emits at least a light ray which passes through a first polarization state changing module and is directed to a biological tissue to generate a response light ray. The response light ray is received by a sensor after passing through a second polarization state changing module. A calculation circuit calculates a Muller matrix corresponding to the biological tissue according to the response light ray, and calculates a depolarization index of the biological tissue according to the Muller matrix, and calculates an optical path length according to the depolarization index, and calculates the concentration of matter of the biological tissue according to the optical path length.

Abstract: A method includes: receiving a first wafer; defining a first zone and a second zone on the first wafer and a plurality of first areas; defining a plurality of first areas and second areas for the first and second zones, respectively; projecting first ion beams onto the first areas and receiving first thermal waves in response to the first ion beams; rotating the first wafer by a twist angle; projecting second ion beams onto the second areas and receiving second thermal waves in response to the second ion beams; and estimating a first crystalline orientation angle of the first wafer based on the first and second ion beams and the first and second thermal waves.

Abstract: A wavelength sensor for wavelength stabilization of a laser beam includes an etalon placed in the laser beam and tilted with respect to the laser beam. Reflected beams from the etalon form an interference pattern on a segmented photodetector having two detector segments. Output signals from the two detector segments are used to derive an error signal for a closed control loop to effect the wavelength stabilization.

Abstract: A spectroscopic analysis apparatus includes: a light projecting device; a light receiving device; and an output device, wherein the light receiving device includes: a separator configured to separate reflected light into s-polarized light and p-polarized light; a detector for s-polarized light configured to output an electric signal indicating an intensity of the s-polarized light; and a detector for p-polarized light configured to output an electric signal indicating an intensity of the p-polarized light; and the output device is configured to: calculate an absorbance based on a ratio between the intensities of the s-polarized light and the p-polarized light using the electric signals output from the detector for s-polarized light and the detector for p-polarized light; and calculate either or both of the composition and the composition ratio of the surface of the measurement target object using an intensity of the absorbance at any desired wavenumber.

Abstract: A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermal conditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner.

Abstract: A device for measuring an electric field includes a micromechanical structure made of a material that is electrically conductive at an operating temperature. The micromechanical structure has a frame portion and a movable portion; the movable portion is electrically conductively and mechanically elastically connected to the frame portion and can be moved relative to the frame portion; the micromechanical structure is designed so that, when the micromechanical structure is arranged in the electric field, an electrical polarization of the micromechanical structure occurs by a first field intensity component not equal to zero and is parallel to a first direction, the electrical polarization causing a first force component acting on the movable portion parallel to the first direction and a change in the spatial arrangement of the movable portion relative to the frame portion dependent on the first force component. A detector determines the change.

Abstract: An optical turbulence measurement system may include a camera assembly, a first optics assembly, a second optics assembly, and processing circuitry. The first optics assembly and the second optics assembly may be configured to magnify and direct a portion of a source beam received by a respective aperture to the camera assembly to be received as a two portions of a received beam. The processing circuitry may be configured to receive, from the camera assembly, a data representation of a first received beam from the first optics assembly and a second received beam from the second optics assembly, determine a focal spot displacement variance based on motion of a first focal spot corresponding to the first received beam relative to a second focal spot corresponding to the second received beam, and measure optical turbulence along a path of the source beam based on the focal spot displacement variance.

Abstract: An optical distance measuring apparatus is provided. The optical distance measuring apparatus includes a housing and multiple light projection and light reception portions. The housing includes an opening face. The multiple light projection and light reception portions emit light, and receive the light after the light is reflected. The multiple light projection and light reception portions are accommodated in the housing. The light is provided by laser light. By combining optical paths of the multiple light projection and light reception portions, a view angle of the optical distance measuring apparatus is widened compared with a view angle of one of the multiple light projection and light reception portions. The optical paths of the multiple light projection and light reception portions overlap with one another in the opening face when seen from a direction perpendicular to a direction along which the view angle of the optical distance measuring apparatus is widened.

Abstract: The present invention relates to methods for calibrating and controlling a polarization modulator, for example a photoelastic modulator (PEM) device on a CD measurement instrument, the method comprising scanning the control input voltage (Vin) at a fixed wavelength (?meas); and recording the CD scan, wherein the control input voltage (Vin) determines the peak retardation (?) at the fixed wavelength (?meas), and wherein the method is repeated for one or more fixed wavelengths. An augmented drive function allows the PEM to be operated with greater accuracy over the full wavelength range, and measurement of resonant frequency provides a means to continually correct for temperature related drift of retardation.

Abstract: Disclosed is an ellipsometer or scatterometer including a light source, a polarizer, an optical illumination system suitable for directing an incident polarized light beam towards a sample, a wavefront-division optical beam splitter arranged to receive a secondary light beam produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter being oriented to form three collimated split beams, an optical polarization modification device and an optical polarization splitting device to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.

Abstract: Apparatuses and methods for measuring substrate temperature are provided. In one or more embodiments, an apparatus for estimating a temperature is provided and includes a plurality of electromagnetic radiation sources positioned to emit electromagnetic radiation toward a reflection plane, and a plurality of electromagnetic radiation detectors. Each electromagnetic radiation detector is positioned to sample the electromagnetic radiation emitted by a corresponding electromagnetic radiation source of the plurality of electromagnetic radiation sources. The apparatus also includes a pyrometer positioned to receive electromagnetic radiation emitted by plurality of electromagnetic radiation sources and reflected from a substrate disposed at a reflection plane and electromagnetic radiation emitted by the substrate. The apparatus includes a processor configured to estimate a temperature of the substrate based on the electromagnetic radiation emitted by the substrate.

Abstract: A method of analysing a component formed from a metal alloy to identify a possible defect, wherein the metal alloy comprises a first crystal grain region and the possible defect comprises a second crystal grain region aligned to a different axis to the first crystal grain region, the method comprising the steps of: obtaining a first image of the component illuminated using a first polarisation state of light, the first image comprising first polarisation data; obtaining a second image of the component illuminated using a second polarisation state of light different to the first polarisation state, the second image comprising second polarisation data; determining a difference in polarisation data for plural pixels of the first image between each pixel of the first image and a corresponding pixel of the second image; and identifying pixels corresponding to the second crystal grain region based on the difference in polarisation data.

Abstract: Conventional systems use a polarization-maintaining fiber (PMF) in order to maintain the light in the same polarization between a laser light source and an optical waveguide on a photonic integrated circuit (PIC). A polarization controller may be provided at an input port of the PIC configured for the manipulation of one or both of the TE0 and TM0 polarized light modes. The polarization controller may include a polarization beam splitter/rotator (PBSR), including a plurality of phase tuners and a plurality of couplers which are coupled together by waveguides, all of which are integrated in a device layer on the PIC.

Abstract: Systems, computer-implemented methods, and computer program products to facilitate rotated polarization detection and adjustment are provided. According to an embodiment, a system can comprise a memory that stores computer executable components and a processor that executes the computer executable components stored in the memory. The computer executable components can comprise an optical component that can comprise a polarization monitor component that can detect a rotated polarization state of an optical signal. The computer executable components can further comprise a second optical component that can comprise a polarization controller component that can control a rotation polarization state of the second optical component. The computer executable components can further comprise a feedback loop component that can couple the polarization monitor component to the polarization controller component.

Abstract: A device and method are described having/using at least a first radiation source and a second source of radiation, at least one measurement or detection device as well as at least one evaluation system with the first radiation source and second radiation source either oriented towards a top or bottom side of the optically effective object, or together oriented towards the top or bottom of the optically effective object, whereby at least the first radiation source emits reflective radiation towards the optically effective object and/or excitation radiation emitted for the stimulation of luminescence radiation in the material of the optically effective object and/or in the coating material of the optically effective object, and whereby the second radiation source at least emits radiation that penetrates through the optically effective object.

Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.

Abstract: The invention relates to a sensor comprising: a radiation source to emit radiation having a coherence length towards a sensor target; and a polarizing beam splitter to split radiation diffracted by the sensor target into radiation with a first polarization state and radiation with a second polarization state, wherein the first polarization state is orthogonal to the second polarization state, and wherein the sensor is configured such that after passing the polarizing beam splitter radiation with the first polarization state has an optical path difference relative to radiation with the second polarization state that is larger than the coherence length.

Abstract: An optical element configured to allow an image beam passing through is provided. The optical element includes a first and a second birefringent layer and a gas layer between the first and the second birefringent layer. An extension direction of the gas layer is inclined with respect to an extension direction of the optical element, wherein the image beam passes through the first birefringent layer, the gas layer and the second birefringent layer in sequence. A first and a second sub image beam having different deflection angles are generated from the image beam when the image beam enters the gas layer. After the first and the second sub image beam are emitted from the second birefringent layer, a transmission path of the first and the second sub image beam are offset from each other by an offset distance, thereby improving resolution of an image to be viewed.

Abstract: The present disclosure concerns a sensor for the acquisition of an optical signal modulated at an acoustic frequency, including a plurality of pixels, each including: a photodiode; an integration circuit configured to, at each period of the modulated optical signal, integrate a photocurrent delivered by the photodiode successively into K capacitors, K being an integer greater than or equal to 2; and a phase detection circuit configured to detect an order in the crossing of a predetermined voltage threshold by the K capacitors and to generate, according to the detected order, a signal representative of the phase of the modulated optical signal.

Abstract: An overlay metrology tool and diffraction-based overlay measurements are described herein. The tool includes a light source for generating an incident light that illuminates stacked overlay targets formed within material layers of a wafer and a light sensing system for measuring characteristics of a diffracted light beam reflected from the surface of the wafer. During a single illumination of the wafer and without rotating a polarization of the incident light beam, the light sensing system generates three components of the diffracted light beam having one or more polarizations and intensities, according to an overlay recipe associated with the stacked overlay targets.

Abstract: Systems and methods related to a structured illumination (SI)-based inspection apparatus are described. The SI-based inspection apparatus may be capable of accurately inspecting an inspection object in real time with high resolution, while reducing the loss of light. Also described are an inspection method, and a semiconductor device fabrication method including the SI-based inspection method. The inspection apparatus may include a light source configured to generate and output a light beam, a phase shifting grating (PSG) configured to convert the light beam from the light source into the SI, a beam splitter configured to cause the SI to be incident on an inspection object and output a reflected beam from the inspection object, a stage capable of moving the inspection object and on which the inspection object is arranged, and a time-delayed integration (TDI) camera configured to capture images of the inspection object by detecting the reflected beam.