Polarizing Patents (Class 250/225)
  • Patent number: 10969697
    Abstract: An overlay metrology tool and diffraction-based overlay measurements are described herein. The tool includes a light source for generating an incident light that illuminates stacked overlay targets formed within material layers of a wafer and a light sensing system for measuring characteristics of a diffracted light beam reflected from the surface of the wafer. During a single illumination of the wafer and without rotating a polarization of the incident light beam, the light sensing system generates three components of the diffracted light beam having one or more polarizations and intensities, according to an overlay recipe associated with the stacked overlay targets.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: April 6, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Chih Hsieh, Chun-Liang Lung
  • Patent number: 10955360
    Abstract: Systems and methods related to a structured illumination (SI)-based inspection apparatus are described. The SI-based inspection apparatus may be capable of accurately inspecting an inspection object in real time with high resolution, while reducing the loss of light. Also described are an inspection method, and a semiconductor device fabrication method including the SI-based inspection method. The inspection apparatus may include a light source configured to generate and output a light beam, a phase shifting grating (PSG) configured to convert the light beam from the light source into the SI, a beam splitter configured to cause the SI to be incident on an inspection object and output a reflected beam from the inspection object, a stage capable of moving the inspection object and on which the inspection object is arranged, and a time-delayed integration (TDI) camera configured to capture images of the inspection object by detecting the reflected beam.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: March 23, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Myung-jun Lee, Ken Ozawa, Wook-rae Kim, Gwang-sik Park, Ji-hoon Kang, Kwang-soo Kim
  • Patent number: 10935503
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: March 2, 2021
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 10921213
    Abstract: A screening apparatus for an optical fiber includes a delivery unit that delivers an optical fiber; a screening unit that applies tension to the delivered optical fiber to perform screening of the optical fiber; a winding unit that winds the optical fiber after screening; and a static electricity removing unit that removes static electricity of the optical fiber traveling on the predetermined passage, the static electricity removing unit being disposed along a predetermined passage of a passage of the optical fiber from an exit side of the screening unit to an entry side of the winding unit.
    Type: Grant
    Filed: September 19, 2019
    Date of Patent: February 16, 2021
    Assignee: FURUKAWA ELECTRIC CO., LTD.
    Inventor: Takashi Suzuki
  • Patent number: 10921369
    Abstract: A precise optical technique for measuring electronic transport properties in semiconductors is disclosed. Using tightly focused laser beams in a photo-modulated reflectance system, the modulated reflectance signal is measured as a function of the longitudinal (Z) displacement of the sample from focus. The modulated component of the reflected probe beam is a Gaussian beam with its profile determined by the focal parameters and the complex diffusion length. The reflected probe beam is collected and input to the detector, thereby integrating over the radial profile of the beam. This results in a simple analytic expression for the Z dependence of the signal in terms of the complex diffusion length. Best fit values for the diffusion length and recombination lifetime are obtained via a nonlinear regression analysis. The output diffusion lengths and recombination lifetimes and their estimated uncertainties may then be used to evaluate various transport properties and their associated uncertainties.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: February 16, 2021
    Inventor: William W. Chism, II
  • Patent number: 10908088
    Abstract: A scanning element routes a sheet or beam of excitation light through a first set of optical components and into a sample at an oblique angle. The position of the excitation light within the sample varies depending on the orientation of the scanning element. Fluorophores within the sample emit fluorescent detection light. The first set of optical components route the detection light back to the scanning element, and the scanning element routes the detection light through a second set of optical components and into a camera. The second set of optical components includes a phase modulating element that induces a controlled aberration so as to homogenize point spread functions of points at, above, and below a focal plane when measured at the camera. In some embodiments, the images captured by the camera are processed to correct for aberration by performing deconvolution of a point spread function.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: February 2, 2021
    Assignee: The Trustees of Columbia University in the City of New York
    Inventors: Venkatakaushik Voleti, Elizabeth M. C. Hillman
  • Patent number: 10876896
    Abstract: A device for determining a polarization state of an electromagnetic wave includes a power splitter that splits an electromagnetic input wave into at least three partial waves; and at least three polarization converters for changing the polarization state of the partial waves. One of the polarization converters is associated with one of the three partial waves. The device includes an output coupler to which the partial waves are supplied after passing through the respective polarization converter and which includes at least three outputs. The output coupler is configured and the polarization converters are arranged and configured such that output waves exiting from the outputs of the output coupler have an intensity that each is dependent on one of the Stokes parameters of the input wave.
    Type: Grant
    Filed: September 14, 2018
    Date of Patent: December 29, 2020
    Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
    Inventor: Moritz Baier
  • Patent number: 10866397
    Abstract: A microscope apparatus including an electromagnetic wave source configured to generate an illuminating electromagnetic wave. The microscope apparatus includes a first beam splitter configured to split the illuminating electromagnetic wave into a first component along a first path and a second component along a second path. The microscope apparatus includes a movable reflector module configured to adjust the second path. The microscope apparatus includes a second beam splitter configured to recombine the first component and the second component. The microscope apparatus includes an observing device arranged along the first path and configured to receive the recombined first component and second component. The microscope apparatus is configured to acquire, from the observing device, a phase image based on positioning of the movable reflector module and representative of an electric field distribution near an object located along the first path between the first beam splitter and the second beam splitter.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fu-Sheng Chu, Chih-Shiang Chou, Yu-Po Tang, Yan-Ying He
  • Patent number: 10855047
    Abstract: Systems and methods for employing an electro-optic and photoconductive optical element operating in combination with a polarizer and 100% reflective mirrors to passively control dumping of power from a resonator. The optical element may be constructed of electro-optic material (e.g., Bismuth Silicon Oxide (BSO), Bismuth Germanium Oxide (BGO)), the refractive index of which may be altered by the application of an externally applied electric field. The presence of incident light changes the photoconductivity of the optical element and, therefore, also changes the polarization state of the light passing through the optical element. When combined with a conventional polarizer, the device acts as a self-triggering optical valve to suddenly divert the path of light within a laser to outside of the normal resonator path. Optical power that has been stored inside the laser resonator is then dumped out of the laser in a single, very-high power pulse.
    Type: Grant
    Filed: November 6, 2018
    Date of Patent: December 1, 2020
    Assignee: United States of America as represented by the Secretary of the Air Force
    Inventor: Gary Cook
  • Patent number: 10832028
    Abstract: An optical fingerprint module, comprising: a protective layer; an optical fingerprint sensor; a backlight source, said backlight source being located below the protective layer; the optical fingerprint sensor is stacked directly below the protective layer, or directly adhered to the bottom of the protective layer; the backlight source is located at a side of the optical fingerprint sensor. The present optical fingerprint module has a smaller size and better mechanical reliability.
    Type: Grant
    Filed: August 18, 2016
    Date of Patent: November 10, 2020
    Assignee: SHANGHAI OXI TECHNOLOGY CO., LTD
    Inventors: Yan Ling, Hong Zhu
  • Patent number: 10812735
    Abstract: An image processing device and a method that enable removal of reflection component light from images captured from various directions are provided.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: October 20, 2020
    Assignee: SONY CORPORATION
    Inventors: Yasutaka Hirasawa, Yuhi Kondo, Hideki Oyaizu, Shun Kaizu, Teppei Kurita, Tuo Zhuang, Ying Lu, Hajime Mihara
  • Patent number: 10788748
    Abstract: The invention relates to a method and an appliance for predicting the imaging result obtained with a mask when a lithography process is carried out, wherein the mask comprises mask structures to be imaged and the mask is destined to be illuminated in a lithography process in a projection exposure apparatus with a predetermined illumination setting for exposing a wafer comprising a photoresist.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: September 29, 2020
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Thomas Thaler, Holger Seitz, Ute Buttgereit, Thomas Trautzsch, Mame Kouna Top-Diallo, Christoph Husemann
  • Patent number: 10774680
    Abstract: An optical sensor for a rotating blade stage of a turbomachine is disclosed. The optical sensor includes a housing to be mounted relative to a circumferential interior surface of a casing of the turbomachine. Optical fiber(s) are operatively coupled to the housing for communicating: an optical signal for sending toward the rotating blade stage and a return optical signal reflected by the rotating blade stage, through the casing. An optical signal redirecting element is configured to redirect the optical signal from optical fiber(s) inwardly toward the rotating blade stage relative to the casing, and redirect the return optical signal reflected by the rotating blade stage into the at least one optical fiber. Optical fiber(s) have a longitudinal shape configured to follow the circumferential interior surface of the casing.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: September 15, 2020
    Assignee: General Electric Company
    Inventors: Kurt Kramer Schleif, Michael Allen Ball, Andrew David Ellis
  • Patent number: 10775298
    Abstract: Ellipsometers and polarimeters and the like having at least one rotating element which is driven by a motor that comprises air bearings.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: September 15, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Christopher D. Hassler, Galen L. Pfeiffer, Jeffrey S. Hale, Craig M. Herzinger, Brian D. Guenther, Brooks A. Hitt
  • Patent number: 10756516
    Abstract: Embodiments of the invention describe polarization insensitive optical devices utilizing polarization sensitive components. Light comprising at least one polarization state is received, and embodiments of the invention select a first optical path for light comprising a first polarization state or a second optical path for light comprising a second polarization state orthogonal to the first polarization state. The optical paths include components to at least amplify and/or modulate light comprising the first polarization state; the second optical path includes a polarization rotator to rotate light comprising the second polarization state to the first polarization state.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: August 25, 2020
    Assignee: Aurrion, Inc.
    Inventors: Gregory Alan Fish, Erik Johan Norberg, John M. Garcia, Robert Silvio Guzzon, Daniel Knight Sparacin
  • Patent number: 10746619
    Abstract: The present invention relates to a force measurement device that includes mechanical amplification of linear elastic deformation along the axis of loading by estimating the quasi-linear incremental displacement between two points on arcs inscribed due to angular movements of a pair of cantilever arms located on opposite quadrants on a closed contour load sensing element to improve the sensitivity, and hence the resolution, of the force measurement device.
    Type: Grant
    Filed: August 26, 2016
    Date of Patent: August 18, 2020
    Assignee: ILLINOIS TOOL WORKS INC.
    Inventors: Sunder Ramasubbu, Somayya Ammanagi, Vishal Raina, Shivakumar Cn, Murali Mohan
  • Patent number: 10747010
    Abstract: According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: August 18, 2020
    Assignee: ASML Holding N.V.
    Inventors: Douglas C. Cappelli, Stanislav Smirnov, Richard Carl Zimmerman, Joshua Adams, Alexander Kenneth Raub, Yevgeniy Konstantinovich Shmarev
  • Patent number: 10746603
    Abstract: An optical device, operating according to the time-of-flight principle, particularly for obtaining 3D spatial information and/or for detecting polarization-changing materials, comprising: a light-producing device comprising at least one light emitter for emitting light into a spatial area; a light-receiving device comprising at least one light detector that can be, or is, oriented towards the spatial area; a polarisation manipulator comprising at least one first optical modulator for influencing a polarisation of a light passing through the modulator and at least one polarization filter optically connected downstream of the modulator, where the first optical modulator is designed to generate at least three different polarisation states and/or where a superposition device is provided and designed such that at least three polarisation states can be generated, by time-division multiplexing; and an evaluation device for successive evaluation of the at least three polarisation states of the light passing through t
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: August 18, 2020
    Assignee: Scoobe3D GmbH
    Inventor: Julian Berlow
  • Patent number: 10693057
    Abstract: A component is provided comprising at least one substrate, at least one magnetic field sensor and at least one trench in the at least one substrate surrounds the at least one magnetic field sensor at least partially. At least one cap covers the at least one trench and the at least one magnetic field sensor, and at least one layer element arranged between the at least one cap and the at least one substrate.
    Type: Grant
    Filed: April 11, 2018
    Date of Patent: June 23, 2020
    Assignee: TDK-MICRONAS GMBH
    Inventors: Marc Baumann, Thilo Rubehn, Christian Joos, Jochen Stephan
  • Patent number: 10648928
    Abstract: An optical scanning system includes a radiating source capable of outputting a light beam, a time varying beam reflector that is configured to reflect the light beam through a scan lens towards a transparent sample at an incident angle that is not more than one degree greater or less than Brewster's angle of the transparent sample, and a focusing lens configured to be irradiated by light scattered from the transparent sample at an angle that is normal to the plane of incidence of the moving irradiated spot on the transparent sample. A first portion of the light beam is scattered from a first surface of the transparent sample and a second portion of the light beam is scattered from a second surface of the transparent sample. A spatial filter is configured to block the second portion of the light beam scattered from the second surface of the transparent sample.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: May 12, 2020
    Assignee: Lumina Instruments Inc.
    Inventors: Steven W. Meeks, Hung Phi Nguyen, Alireza Shahdoost Moghaddam
  • Patent number: 10636833
    Abstract: A quantum dot infrared detector includes a quantum dot-stacked structure in which quantum dot layers each containing quantum dots stacked on top of one another and intermediate layers. The quantum dots are sandwiched between the intermediate layers in the height direction of the quantum dots. The quantum dots have conduction band quantum confinement levels that include a conduction band ground level, a conduction band first excitation level at a higher energy position than the conduction band ground level, and a conduction band second excitation level at a higher energy position than the conduction band ground level. An energy gap between the conduction band first excitation level and the conduction band bottom of the intermediate layer and an energy gap between the conduction band second excitation level and the conduction band bottom of the intermediate layer are each smaller than twice thermal energy.
    Type: Grant
    Filed: September 4, 2018
    Date of Patent: April 28, 2020
    Assignees: SHARP KABUSHIKI KAISHA, The University of Tokyo
    Inventors: Hirofumi Yoshikawa, Yasuhiko Arakawa
  • Patent number: 10635049
    Abstract: The present invention provides an ellipsometry device and an ellipsometry method whereby measurement efficiency can be enhanced. In this method, an object is illuminated by spherical-wave-like illumination light Q linearly polarized at 45° (S1), and an object light O, being a reflected light, is acquired in a hologram IOR using a spherical-wave-like reference light R having a condensing point near the condensing point of the illumination light Q, and a hologram ILR of the reference light R is furthermore acquired using a spherical-wave reference light L having the same condensing point as that of the illumination light Q (S2). The holograms are separated into p- and s-polarized light holograms IKOR, IKLR, ?=p, s and processed to extract object light waves, and object light spatial frequency spectra GK(u, v), ?=p, s are generated (S3) (S4). Ellipsometric angles ?(?), ?(?) are obtained for each incident angle ? from the amplitude reflection coefficient ratio ?=Gp/Gs=tan ?·exp(i?).
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: April 28, 2020
    Assignee: University of Hyogo
    Inventor: Kunihiro Sato
  • Patent number: 10627341
    Abstract: An optical interrogator for illuminating an object comprising a laser, a splitter, an optical polarizing element, and an optical recombiner. The laser is configured to generate a laser pulse, which the splitter splits into first, second, third, fourth, fifth, and sixth laser segments such that each of the laser segments are separated by a time delay on the order of nanoseconds between each laser segment. The optical polarizing element is positioned so as to respectively polarize the first, second, third, fourth, fifth, and sixth laser segments with a 0° linear polarization, a 45° linear polarization, a 90° linear polarization, a 135° linear polarization, a right-handed, circular polarization (RHCP), and a left-handed, circular polarization (LHCP). The optical recombiner combines the polarized laser segments into a train of co-aligned pulses for illuminating the object.
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: April 21, 2020
    Assignee: United States of America as represented by Secretary of the Navy
    Inventors: David Thomas Wayne, Burton Hamilton Neuner, III, Peter Poirier, Michael Garrett Lovern
  • Patent number: 10622804
    Abstract: The present disclosure relates to a method for preventing a maloperation of differential protection of an optical fiber caused by saturation of a single Current Transformer (CT) of 3/2 connection. By applying a combination of the differential judgment and the sub-CT current judgment, reliable identification of internal and external faults is ensured, and the problem of misjudging of the internal fault as the external fault can be prevented as well.
    Type: Grant
    Filed: November 15, 2016
    Date of Patent: April 14, 2020
    Assignees: XJ GROUP CORPORATION, XJ ELECTRIC CO., LTD., XUCHANG XJ SOFTWARE TECHNOLOGY CO., LTD., STATE GRID CORPORATION OF CHINA
    Inventors: Baowei Li, Chuankun Ni, Wenzheng Li, Xu Li, Ziqiang Jiang, Yanmei Tang, Huizhen Hao, Xin Shi, Jiansong Zhao, Xintao Dong, Yingying Xi, Quanxia Ma, Yantao Qiao, Yu Tang, Liping Meng
  • Patent number: 10605722
    Abstract: Methods and systems for matching measurement spectra across one or more optical metrology systems are presented. The values of one or more system parameters used to determine the spectral response of a specimen to a measurement performed by a target metrology system are optimized. The system parameter values are optimized such that differences between measurement spectra generated by a reference system and the target system are minimized for measurements of the same metrology targets. Methods and systems for matching spectral errors across one or more optical metrology systems are also presented. A trusted metrology system measures the value of at least one specimen parameter to minimize model errors introduced by differing measurement conditions present at the time of measurement by the reference and target metrology systems. Methods and systems for parameter optimization based on low-order response surfaces are presented to reduce the compute time required to refine system calibration parameters.
    Type: Grant
    Filed: December 8, 2017
    Date of Patent: March 31, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Hidong Kwak, John Lesoine, Malik Sadiq, Lanhua Wei, Shankar Krishnan, Leonid Poslavsky, Mikhail M. Sushchik
  • Patent number: 10595583
    Abstract: An article of apparel, a system, and methods include a structural material configured to enable the article of footwear to the worn on a body. A wireless transmission circuit is included and a piezoelectric generator is positioned with respect to the structural material in a configuration to be flexed to induce a voltage signal output. A voltage sensor is configured to sense the voltage profile and output a sensor signal indicative of the voltage profile. An electronic data storage, coupled to the voltage sensor, is configured to store voltage profile information based on the sensor data. A comparator, coupled to the electronic data storage, is configured to identify a change in the voltage profile information over time. The wireless transmission circuit is configured to transmit data indicative of a physical status of the article of footwear based on the change in the voltage profile information over time.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: March 24, 2020
    Assignee: NIKE, Inc.
    Inventors: Keith A. Folske, Vikram Malhotra, Holli Pheil, Summer L. Schneider
  • Patent number: 10598965
    Abstract: According to an example, a polarization control system is to manipulate polarization manipulators to output light that achieves a trajectory on a Poincaré sphere that tracks a known trajectory of a polarizer on the Poincaré sphere, in which the trajectory of the output light enables definition of a reference polarization state of the output light. The polarization control system may also manipulate an output polarization manipulator to set the output light to a predefined polarization state based upon the reference polarization state.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: March 24, 2020
    Assignee: VIAVI SOLUTIONS INC.
    Inventors: Joshua Philipson, Chris Wagner, Grant Tessaro, Robert Matthew Adams
  • Patent number: 10594949
    Abstract: In aspects of digital image capture with a polarizer at different rotation angles, a device includes a polarizer that filters light at different polarizations and a first camera captures filtered digital images at different rotation angles of the polarizer. The device also includes a second camera to capture a full light digital image that is unfiltered. The device implements an imaging algorithm to determine a common region in each of the filtered digital images that has a variable brightness in each of the filtered digital images. The imaging algorithm can then determine pixel brightness values of the pixels in the common region of the filtered digital images, select one of the filtered digital images with a lowest pixel brightness value in the common region as an output filtered image, and combine the full light digital image with the output filtered image to generate a final image with modified image brightness.
    Type: Grant
    Filed: April 24, 2019
    Date of Patent: March 17, 2020
    Assignee: Motorola Mobility LLC
    Inventors: Yuta Asano, Lin Chen, John Christopher Pincenti
  • Patent number: 10551320
    Abstract: Methods and systems for detecting a particle defect on a wafer surface, transforming the particle to a spectroscopically active state, and identifying a material composition of the activated particle by a spectroscopic technique are described herein. Particle defects are transformed by chemical treatment, thermal treatment, photochemical treatment, or a combination thereof, such that an activated particle exhibits atomic vibrational bands that can be observed spectroscopically. In one embodiment, a surface inspection system detects the presence of a particle defect on a wafer surface, activates observable Raman bands in one or more of the detected particles, and identifies the material composition of the activated particle by a spectroscopic technique.
    Type: Grant
    Filed: January 30, 2017
    Date of Patent: February 4, 2020
    Assignee: KLA-Tencor Corporation
    Inventor: Kurt L. Haller
  • Patent number: 10547767
    Abstract: An electronic device and a method for providing information of a foreign substance adsorbed from the outside of a camera are provided. The electronic device includes a transparent member formed with a first medium, a light emitter disposed under the transparent member and configured to emit light, a camera disposed under the transparent member and configured to obtain an image of an external object, and a processor.
    Type: Grant
    Filed: June 20, 2018
    Date of Patent: January 28, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jaesung Lee, Intaek Oh, Jinhee Won, Jongmin Choi, Jeongmin Park, Seungeun Lee
  • Patent number: 10528788
    Abstract: An optical fingerprint module comprises: an optical fingerprint sensor, the optical fingerprint sensor having a non-opaque substrate and a device layer located on a surface of the non-opaque substrate, the device layer having a pixel area, the pixel area having a plurality of pixels, each pixel having a non-opaque area and a light blocking area, the light blocking area having a photosensitive element, the non-opaque area enabling lights to transmit through the pixel area of the device layer; a protection layer located above the optical fingerprint sensor; and a backlight source located under the pixel area, an included angle formed between a light emitted from the backlight source and an upper surface of the protection layer being an acute angle. The optical fingerprint module has an improved structure and enhanced performance.
    Type: Grant
    Filed: August 18, 2016
    Date of Patent: January 7, 2020
    Assignee: SHANGHAI OXI TECHNOLOGY CO., LTD
    Inventors: Yan Ling, Hong Zhu, Zhicheng Na
  • Patent number: 10511785
    Abstract: Apparatus and methods are provided to create high dynamic range images by passing an incoming image through a color-neutral separation prism having at least three channels to produce a corresponding number of full color fractionated images, each channel aligned with a corresponding image capturing device for which an ISO sensitivity is selected to simultaneously achieve a different exposure value for each fractionated image and image capturing device, referred to as exposure bracketing, and recombining the simultaneously collected fractionated images to create a high dynamic range image. The apparatus and methods may be used for still photography or motion pictures.
    Type: Grant
    Filed: October 14, 2014
    Date of Patent: December 17, 2019
    Inventor: Paul A Wagner
  • Patent number: 10483173
    Abstract: A semiconductor device inspection method according to an embodiment includes irradiating a semiconductor chip or a metal member with first inspection light having a plurality of linear beams parallel to each other from a first direction inclining with respect to a top surface of a substrate, the semiconductor chip being disposed on the substrate, and the metal member being disposed on the semiconductor chip; obtaining a first image of the semiconductor chip irradiated with the first inspection light or the metal member irradiated with the first inspection light; and calculating first three-dimensional information of the semiconductor chip or the metal member based on the first image by using an optical cutting method.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: November 19, 2019
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventor: Ikuo Motonaga
  • Patent number: 10479286
    Abstract: An apparatus for light intensity adjustment mountable on an automotive camera includes at least one first linear polarizing filter, at least one second linear polarizing filter, the first linear polarizing filter and the second polarizing filter are arrangeable in front of a lens unit of an automotive camera such that incident light passes through the at least one first linear polarizing filter and the at least one second linear polarizing filter before entering the lens unit of the automotive camera, and at least one actuator for moving the at least one first linear polarizing filter and/or the at least one second linear polarizing filter with respect to each other such that the intensity of the emergent light is adjustable. The apparatus is characterized in enabling adjustment of the emergent light intensity by moving the first linear polarizing filter and/or the second linear polarizing filter with respect to each other.
    Type: Grant
    Filed: July 27, 2015
    Date of Patent: November 19, 2019
    Assignee: SMR Patents S.à.r.l.
    Inventors: Oleg Konevsky, Philipp Hottmann
  • Patent number: 10474009
    Abstract: Method and apparatus are disclosed for filter adjustment of vehicle cameras. An example vehicle camera includes sensors, a lens to direct light to the sensors, a slide including a first filter and a second filter, and an electromagnet to actuate the slide between a first position and a second position. The first filter is between the sensors and the lens at the first position. The second filter is between the sensors and the lens at the first position.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: November 12, 2019
    Assignee: Ford Global Technologies, LLC
    Inventors: Eric L. Reed, Adil Nizam Siddiqui, Jonathan Diedrich
  • Patent number: 10458849
    Abstract: The invention relates to a sensor assembly (1) for capturing spatially resolved photometric data comprising a sensor unit (10), a controllable shutter assembly (20), which is arranged in front of the sensor unit (10) and by means of which an incidence of light on the sensor unit (10) can be controlled in dependence on direction, and an evaluating unit (30) for evaluating the information output by the sensor unit (10) and calculating spatially resolved brightness information, wherein the sensor unit (10) has at least two sensor segments (11), with which different combinations of color and polarization filters (12, 13) or spectrometers are associated, and wherein the evaluating unit (30) is designed to supplement the brightness information with additional photometric data on the basis of the signals output by the various sensor segments (11).
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: October 29, 2019
    Assignee: ZUMTOBEL LIGHTING GMBH
    Inventors: Martin Siegel, Gerd Zeidler
  • Patent number: 10451804
    Abstract: An integrated polarization splitter and rotator (PSR) employs the TE0 and TE1 modes of propagating light, rather than the TE0 and TM0 modes used in conventional prior art PSR. The integrated PSR exhibits appreciably flatter wavelength response because it does not require a directional coupler to de-multiplex incoming polarizations. The PSR allows tuning of the TM0 loss to reduce polarization dependent loss (PDL). This integrated polarization splitter and rotator is applicable to all integrated platforms including Silicon-on-Insulator (SOI) and III-V semiconductor compound systems. The PSR may be very compact (12×2 ?m2), and provides low loss (<0.3 dB across the C-band) and ultra-broadband operation. The PSR also affords better control of polarization dependent losses.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: October 22, 2019
    Assignee: Elenion Technologies, LLC
    Inventors: Yang Liu, Yangjin Ma, Michael J. Hochberg
  • Patent number: 10453715
    Abstract: From a stage of preheating by a halogen lamp to irradiation with a flash by a flash lamp, a radiation thermometer is used for measuring the temperature of a back surface of a semiconductor wafer. A increased temperature ?T is determined by which the back surface of the semiconductor wafer is increased in temperature from the preheating temperature by irradiation with a flash. The specific heat of the semiconductor wafer has a known value. Further, the increased temperature ?T is proportionate to the magnitude of energy applied to a front surface of the semiconductor wafer by irradiation with a flash. Thus, a front surface attained temperature of the semiconductor wafer can be determined using the increased temperature ?T of the back surface of the semiconductor wafer during irradiation with a flash.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: October 22, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventor: Takayuki Aoyama
  • Patent number: 10422721
    Abstract: The invention provides a measurement system to interrogate at least one birefringent optical sensor and a method to interrogate birefringent optical sensors at high speed and high resolution. The system and method detects, at least, a first and a second spectral feature that are polarization dependent, wherein the detected first and second spectral features correspond to different responses of at least one birefringent optical sensor.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: September 24, 2019
    Assignee: FAZ TECHNOLOGY LTD.
    Inventors: Selwan K. Ibrahim, John O'Dowd, Devrez Mehmet Karabacak
  • Patent number: 10422739
    Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: September 24, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Jeremy A. Van Derslice, Martin M. Liphardt
  • Patent number: 10397190
    Abstract: A system and method for obfuscating an optical signal is disclosed. Obfuscating the optical signal may make it more difficult for the optical signal to be detected by an interloper. In one embodiment, an optical signal is received at an optical transmitter, and an obfuscated optical signal is generated by performing a modification of the received optical signal. The obfuscated optical signal is then transmitted from the optical transmitter to an optical receiver. An at least partially deobfuscated optical signal is generated at the optical receiver by performing a modification of the obfuscated optical signal. The modification performed at the optical receiver corresponds to the modification performed at the optical transmitter.
    Type: Grant
    Filed: February 5, 2016
    Date of Patent: August 27, 2019
    Assignee: HUAWEI TECHNOLOGIES CO., LTD.
    Inventors: Mehdi Arashmid Akhavain Mohammadi, Hamid Mehrvar, Mohammad Mehdi Mansouri Rad
  • Patent number: 10386649
    Abstract: An optical apparatus includes a first phase plate which gives a fixed relative phase difference by ?/2 between a polarization component in a slow axis direction and a polarization component in a fast axis direction, a second phase plate which gives a relative phase difference between a polarization component in a slow axis direction and a polarization component in a fast axis direction, a polarizer which extracts a polarization component to be guided to the image pickup element, and a setter which sets the relative phase difference of the second phase plate, the slow axis direction of the second phase plate is inclined with respect to each of the slow and fast axes directions of the first phase plate, and the setter sets the relative phase difference of the second phase plate depending on the polarization component of light.
    Type: Grant
    Filed: February 2, 2016
    Date of Patent: August 20, 2019
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Yutaka Yamaguchi
  • Patent number: 10365089
    Abstract: Exemplary practice of the present invention provides an air vehicle and at least one interferometric double-path fiber optic sensor connected with the air vehicle. Each fiber optic sensor includes a pair of optical fibers, viz., an optical sensing fiber and an optical reference fiber, in a parallel and propinquus relationship. The paired optical fibers of each fiber optic sensor are attached to the air vehicle either (i) circumferentially around the fuselage or (ii) lengthwise along the fuselage or (iii) span-wise along the wings and across the fuselage, and are configured whereby the sensing fiber is exposed to the atmosphere and the reference fiber is not. Each fiber optic sensor senses atmospheric infrasound but does not sense atmospheric wind noise, which is negated by incoherency associated with design lengthiness of the optical fiber pair. Noise and strain due to temperature, vibration, and propulsion are neutralized via interferometric common mode rejection.
    Type: Grant
    Filed: August 4, 2017
    Date of Patent: July 30, 2019
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventor: Alexey Titovich
  • Patent number: 10352846
    Abstract: This invention relates to a device for calibrating circular or linear dichroism spectrometers, or other photoelastic modulator (PEM) based devices or instruments. In preferred embodiments, the present invention features a device for calibrating circular dichroism or linear dichroism spectrometers comprising at least one waveplate (Q) providing (n±¼) waves of retardation at a defined set of wavelengths, and at least one isotropic plate (P). The invention also features methods for using the device, for example, for calibrating circular dichroism spectrometers or linear dichroism spectrometers.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: July 16, 2019
    Assignee: APPLIED PHOTOPHYSICS LTD.
    Inventor: Nigel Thornton Hopley White
  • Patent number: 10338156
    Abstract: An ultra-sensitivity optical-fiber magneto-optic field sensor includes an input fiber passing optical power from an optical source into the sensor; a polarizer optically coupled to and downstream of the input fiber; an analyzer optically coupled to and downstream of the polarizer; an output fiber passing optical power out of the sensor to a photoreceiver; and a magneto-optic crystal element optically coupled between the polarizer and the analyzer. The ultra-sensitivity optical-fiber magneto-optic field sensor has an optical axis extending between the input and output fibers along which a beam of optical power is transmitted.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: July 2, 2019
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Dong Ho Wu, Anthony Garzarella
  • Patent number: 10334180
    Abstract: In aspects of digital image capture with a polarizer at different rotation angles, a device includes a polarizer that filters light at different polarizations and captures digital images using the polarizer. Each of the digital images are captured at one of different rotation angles of the polarizer. The device implements an imaging algorithm to determine a common region in each of the digital images, the common region having a variable brightness in each of the digital images and the common region in a respective digital image being determined based on a standard deviation of brightness for each pixel in the respective digital image. The imaging algorithm can then determine pixel brightness values of the pixels in the common region for each of the digital images, and select one of the captured digital images with a lowest pixel brightness value in the common region as an output image.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: June 25, 2019
    Assignee: Motorola Mobility LLC
    Inventors: Yuta Asano, Lin Chen, John Christopher Pincenti
  • Patent number: 10330590
    Abstract: Circular dichroism can be accurately measured even when a phase modulation element with a distortion component is used. A circular dichroism measuring method using a circular dichroism measuring device 2 includes a step of measuring Ip(t) (S101: phase amount change acquisition step), a step of measuring Is(t) (S102: sample data acquisition step), a step of converting Ip(t) to ?(t) (S103: phase amount change acquisition step), a step of converting Is(t) to Is(?) (S104: analysis step/Is(?) calculation step), and a step of performing curve fitting to calculate matrix elements S00, S02, and S03 (S105: analysis step/matrix element calculation step).
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: June 25, 2019
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventor: Hiroshi Satozono
  • Patent number: 10321732
    Abstract: An article of apparel, a system, and methods include a structural material configured to enable the article of footwear to the worn on a body. A wireless transmission circuit is included and a piezoelectric generator is positioned with respect to the structural material in a configuration to be flexed to induce a voltage signal output. A voltage sensor is configured to sense the voltage profile and output a sensor signal indicative of the voltage profile. An electronic data storage, coupled to the voltage sensor, is configured to store voltage profile information based on the sensor data. A comparator, coupled to the electronic data storage, is configured to identify a change in the voltage profile information over time. The wireless transmission circuit is configured to transmit data indicative of a physical status of the article of footwear based on the change in the voltage profile information over time.
    Type: Grant
    Filed: May 27, 2016
    Date of Patent: June 18, 2019
    Assignee: NIKE, Inc.
    Inventors: Keith A. Folske, Vikram Malhotra, Holli Pheil, Summer L. Schneider
  • Patent number: 10295813
    Abstract: A microscope apparatus includes an electromagnetic wave source configured to generate an illuminating electromagnetic wave, a first beam splitter configured to split the illuminating electromagnetic wave into a first component along a first path and a second component along a second path, a movable reflector module configured to adjust a portion of the second path, and a second beam splitter configured to recombine the first component and the second component. An observing device is configured to receive the recombined first component and second component and the microscope apparatus is configured acquire a phase image from the observing device based on positioning of the movable reflector module and representative of an electric field distribution near an object located along the first path between the first beam splitter and the second beam splitter.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: May 21, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fu-Sheng Chu, Chih-Shiang Chou, Yu-Po Tang, Yan-Ying He
  • Patent number: 10261006
    Abstract: Apparatus and associated methods relate to determining sizes of water particles in a cloud atmosphere based on a detected portion of signals generated from a single monochromatic source and backscattered by water particles in a cloud atmosphere. A backscatter coefficient and an optical extinction coefficient are calculated, based on the detected portion of signals generated from the monochromatic source and backscattered by water particles in the cloud atmosphere. A LIDAR ratio—a ratio of the optical extinction coefficient to the backscatter coefficient, is calculated. Sizes of water particles in the cloud atmosphere are estimated based on the LIDAR ratio. An output signal indicative of the estimated sizes of water particles in the cloud atmosphere is generated. Estimating sizes of water particles using signals from a single monochromatic source advantageously can alert a pilot of an aircraft of cloud conditions, without requiring multi-chromatic sources.
    Type: Grant
    Filed: July 21, 2016
    Date of Patent: April 16, 2019
    Assignee: Rosemount Aerospace, Inc.
    Inventors: Mark Ray, Kaare Josef Anderson