For Causing Complex Ion Path Patents (Class 250/297)
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Patent number: 11495449Abstract: An orbitrap may include elongated inner and outer electrodes, wherein the inner and outer electrodes each define two axially spaced apart electrode halves with a central transverse plane extending through the electrodes also passing between both sets of electrode halves, a cavity defined radially about and axially along the inner electrode between the two inner electrode halves and the two outer electrode halves, means for establishing an electric field configured to trap an ion in the cavity and to cause the trapped ion to rotate about, and oscillate axially along, the inner electrode, wherein the rotating and oscillating ion induces charges on the inner and outer electrode halves, and charge detection circuitry configured to detect the charges induced on the inner and on outer electrode halves, and to combine the detected charges for each oscillation to produce a measured ion charge signal.Type: GrantFiled: January 11, 2019Date of Patent: November 8, 2022Assignee: The Trustees Of Indiana UniversityInventors: Martin F. Jarrold, Aaron R. Todd
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Patent number: 10184790Abstract: The presently disclosed subject matter provides a pattern measurement method and device for achieving highly accurate measurement in the depth direction of a pattern. The method involves a focused ion beam irradiated to form an inclined surface in a sample area; a field of view of a SEM set to include the boundary between the inclined surface and a sample surface; and an image of the field of view obtained on the basis of a detection signal. Such an acquired image is used to specify a first position, the boundary between inclined surface and non-inclined surface, and a second position, the position of a desired deep hole or deep groove positioned within the inclined surface. The pattern dimension in a height direction is determined on the basis of the distance in the sample surface direction between the first position and second position and the angle of the inclined surface.Type: GrantFiled: May 11, 2015Date of Patent: January 22, 2019Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroki Kawada, Hideo Sakai, Katsuhiro Sasada
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Patent number: 9018596Abstract: A device for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis in a charged particle beam generating apparatus is described. The device comprises a support element having a target region adapted for transmitting a charged particle wave propagating along a beam axis and an induction means for inducing a magnetic flux along an elongated profile having a free end portion located in the target region and the induction means is adapted for providing a magnetic flux in the elongated profile in order to induce an angular gradient, relative to the beam axis, of the phase of the charged particle wave when transmitted through the target region. A corresponding method is also disclosed, as well as the use thereof in electron microscopy.Type: GrantFiled: December 19, 2012Date of Patent: April 28, 2015Assignee: Universiteit AntwerpenInventors: Johan Verbeeck, Gustaaf Van Tendeloo
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Patent number: 8952326Abstract: An atmospheric pressure (AP) interface for a spectrometer includes wall for separating an ionization chamber from a reduced-pressure region of the spectrometer, an ion inlet defining an ion path from the ionization chamber to the reduced-pressure region, and a passage defining a gas path from the ionization chamber to a gas outlet external to the reduced-pressure region. The passage may have a greater gas conductance than the ion inlet such that most gas into the passage and not the ion inlet. The interface device is configured for applying a static electric field effective for focusing ions in the ionization chamber preferentially into the ion inlet.Type: GrantFiled: November 4, 2013Date of Patent: February 10, 2015Assignee: Agilent Technologies, Inc.Inventor: Michael Ugarov
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Patent number: 8933397Abstract: In one aspect of the invention, an ion trap mass analyzer includes a variable- or multi-potential type ion guide (MPIG) assembly which has been pre-configured to produce a parabolic-type potential field. Each MPIG electrode has a resistive coating of designed characteristics. In one example the coating varies in thickness long the length of an underlying uniform substrate. The MPIG assembly can be a single MPIG electrode or an array of a plurality of MPIG electrodes. An array can facilitate delocalization for improved performance. This chemical modification of a uniform underlying substrate promotes cheaper and flexible instruments. The modified MPIG electrodes also allow miniaturization (e.g. micro and perhaps even nano-scale), which allows miniaturization of the instrument in which the single or plural modified MPIG electrode(s) are placed. This promotes portability and field use instead of limitation to laboratory settings.Type: GrantFiled: February 4, 2013Date of Patent: January 13, 2015Assignee: University of Northern Iowa Research FoundatiInventor: Curtiss Dwight Hanson
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Patent number: 8921780Abstract: The invention relates to devices for measuring the mobility of ions in gases at pressures of a few hectopascal. To make the device more compact, drift regions are bent into curved shapes, which extend into the third dimension. Parts of the drift region may lie above others. Alternating directions of curvature in the curved shapes balance out different path lengths by passing through approximately equal drift distances on outer and inner trajectories. Ions are held near the axis of the curved drift region by sectional or permanent focusing. One possible shape is a double loop in the shape of a figure eight. The shape extends perpendicular to its plane of projection so that several double loops lie on top of each other. RF ion funnels or ion tunnels can keep the ions near the axis. Axial focusing may use a pseudopotential radial to the axis of the curved shape.Type: GrantFiled: August 12, 2013Date of Patent: December 30, 2014Inventor: Gokhan Baykut
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Patent number: 8890086Abstract: An ion detection system for detecting ions whose velocity varies during an operating cycle. The ion detection system includes a dynode electron multiplier (e.g., a microchannel plate (MCP)) having a bias voltage input, and a bias voltage source to apply a bias voltage to the bias voltage input of the dynode electron multiplier. With a fixed bias voltage applied to its bias voltage input, the dynode electron multiplier has a gain dependent on the velocity of ions incident thereon. The bias voltage applied by the bias voltage source to the bias voltage input of the dynode electron multiplier varies during the operating cycle to reduce the dependence of the gain of the dynode electron multiplier on the velocity of the ions incident thereon.Type: GrantFiled: June 18, 2013Date of Patent: November 18, 2014Assignee: Agilent Technologies, Inc.Inventors: Noah Goldberg, James L. Bertsch, David Deford
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Patent number: 8822917Abstract: In order to provide an analysis method that is capable of determining a glycan structure with high detection sensitivity, a method of the present invention includes the steps of: carrying out triple quadrupole mass spectrometry at various values of CID energy; creating an energy-resolved profile including yield curves representing relationships between (i) a value of the CID energy and (ii) measured amounts of specific types of product ions; preparing a reference profile, and identifying a glycan structure of a test material by comparing the energy-resolved profile with the reference profile.Type: GrantFiled: January 6, 2014Date of Patent: September 2, 2014Assignees: Riken, Shimadzu CorporationInventors: Koji Ueda, Atsuhiko Toyama
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Patent number: 8759751Abstract: Methods and analyzers useful for time of flight mass spectrometry are provided.Type: GrantFiled: May 24, 2011Date of Patent: June 24, 2014Assignee: Thermo Fisher Scientific (Brmen) GmbHInventors: Alexander Makarov, Anastassios Giannakopulos
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Patent number: 8642949Abstract: An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening towards a relatively high pressure chamber 40 and an outlet 70 opening towards a relatively low pressure chamber. The conduit 60 also has at least one side wall surrounding an ion transfer channel 115. The side wall includes a plurality of apertures 140 formed in the longitudinal direction of the side wall so as to permit a flow of gas from within the ion transfer channel 115 to a lower pressure region outside of the side wall of the conduit 60.Type: GrantFiled: March 6, 2012Date of Patent: February 4, 2014Assignee: Thermo Fisher Scientific (Bremen) GmbHInventors: Alexander A. Makarov, Reinhold Pesch, Robert Malek, Viacheslav Kozlovskiy
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Patent number: 8598516Abstract: The present invention relates to the analytical electronics used to identify compositions and structures of substances, in particular, to the analyzers comprising at least one mass-spectrometer (MS) and may be applied in such fields as medicine, biology, gas and oil industry, metallurgy, energy, geochemistry, hydrology, ecology. Technical result provides the increase in MS resolution, gain in sensitivity, precision and measurement rates of substances compositions and structures concurrently with enhancement of analyzer functional capabilities, downsizing and mass reduction. In claimed invention the ion flux generation and its guiding are performed in off-axis single-flow mode; parallel multi-stage mode; through use of three-dimensional field with mean meridian surface including without limitation three-dimensional reflecting and dual-zoned reflecting modes or by method of multi-reflection arrays. Devices to implement the claimed method are embodied.Type: GrantFiled: January 9, 2013Date of Patent: December 3, 2013Inventors: Yerbol Aldanovich Sapargaliyev, Aldan Asanovich Sapargaliyev
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Patent number: 8514398Abstract: Techniques, apparatus, material and systems are described for implementing a three-dimensional composite mushroom-like metallodielectric nanostructure. In one aspect, a surface plasmon based sensing device includes a substrate and a layer of an anti-reflective coating over the substrate. The surface Plasmon based sensing device includes a dielectric material on the anti-reflective coating shaped to form a 2-dimensional array of nanoholes spaced from one another. Also, the surface Plasmon based sensing device includes a layer of a metallic film formed on the 2-dimensional array of nanoholes to include openings over the nanoholes, respectively, wherein the sensing device is structured to support both propagating surface plasmon polariton (SPP) waves and localized surface plasmon resonant (LSPR) modes.Type: GrantFiled: November 10, 2010Date of Patent: August 20, 2013Assignee: The Regents of the University of CaliforniaInventors: Lin Pang, Haiping Matthew Chen, Yeshaiahu Fainman
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Patent number: 8278622Abstract: A method for fast and accurate recognition of species contained in trace amounts in complex mixtures such as ambient air or biological fluids is taught based on the use in tandem of one or several differential mobility analyzers (DMAs) and possibly also a mass spectrometer (MS), all arranged in series. The two DMAs operate in different regions of the ion drag versus drift velocity curve (for instance, linear versus nonlinear regions), hence separating according to more than one independently discriminating parameters of the ion. Very high discrimination can be achieved even with a single stage of mass spectrometric separation by selecting a narrow range of ions with the DMA, and analyzing them in the MS, first without fragmentation, and then with fragmentation. This process does not require necessarily a tandem MS when fragmentation takes place in the inlet region of the MS.Type: GrantFiled: November 15, 2010Date of Patent: October 2, 2012Assignee: Sociedad Europea de Analisis Diferencial de MovilidadInventors: Juan Fernandez de la Mora, Alejandro Casado, Gonzalo Fernandez de la Mora
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Patent number: 8148680Abstract: A method of transporting gas and entrained ions between higher and lower pressure regions of a mass spectrometer comprises providing an ion transfer conduit 60 between the higher and lower pressure regions. The ion transfer conduit 60 includes an electrode assembly 300 which defines an ion transfer channel. The electrode assembly 300 has a first set of ring electrodes 305 of a first width D1, and a second set of ring electrodes of a second width D2 (?D1) and interleaved with the first ring electrodes 305. A DC voltage of magnitude V1 and a first polarity is supplied to the first ring electrodes 205 and a DC voltage of magnitude V2 which may be less than or equal to the magnitude of V1 but with an opposed polarity is applied to the second ring electrodes 310. The pressure of the ion transfer conduit 60 is controlled so as to maintain viscous flow of gas and ions within the ion transfer channel.Type: GrantFiled: November 7, 2007Date of Patent: April 3, 2012Assignee: Thermo Fisher Scientific (Bremen) GmbHInventors: Alexander Makarov, Reinhold Pesch, Robert Malek, Viacheslav Kozlovskiy
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Patent number: 8148679Abstract: An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening towards a relatively high pressure chamber 40 and an outlet 70 opening towards a relatively low pressure chamber. The conduit 60 also has at least one side wall surrounding an ion transfer channel 115. The side wall includes a plurality of apertures 140 formed in the longitudinal direction of the side wall so as to permit a flow of gas from within the ion transfer channel 115 to a lower pressure region outside of the side wall of the conduit 60.Type: GrantFiled: November 7, 2007Date of Patent: April 3, 2012Assignee: Thermo Fisher Scientific (Bremen) GmbHInventors: Alexander Makarov, Reinhold Pesch, Robert Malek, Viacheslav Kozlovskiy
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Patent number: 8013297Abstract: Disclosed is an ion gate for a dual IMS and method. The ion gate includes an ion source, a first gate electrode placed on one side of the ion source, a second gate electrode placed on the other side of the ion source, a third gate electrode placed on the side of the first gate electrode away from the ion source, a fourth gate electrode placed on the side of the second gate electrode away from the ion source, wherein during the ion storage, the potential at the position on the tube axis of the ion gate corresponding to the first gate electrode is different from the potentials at the positions on the tube axis corresponding to the ion source and the third gate electrode, and the potential at the position on the tube axis corresponding to the second gate electrode is different from the potentials at the positions on the tube axis corresponding to the ion source and the fourth gate electrode.Type: GrantFiled: October 15, 2009Date of Patent: September 6, 2011Assignees: Nuctech Company Limited, Tsinghua UniversityInventors: Hua Peng, Qingjun Zhang, Jin Lin, Yuanjing Li, Zhiqiang Chen, Shaoji Mao, Zhude Dai, Dai Hua, legal representative, Shiping Cao, Zhongxia Zhang, Yangtian Zhang, Dexu Lin, Qinghua Wang
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Patent number: 7999222Abstract: A time-of-flight mass spectrometer includes a detector and is adapted to measure the time it takes for an accelerated ion to reach the detector and thereby measure the mass of the ion. The time-of-flight mass spectrometer scans a voltage applied to an ion incident side surface of the detector in accordance with a mass to be measured. An electrode is provided between the detector and a space in which an ion flies. The time-of-flight mass spectrometer is capable of measuring ions of a wide range of masses with high detection efficiency by scanning a voltage applied to the electrode.Type: GrantFiled: May 29, 2009Date of Patent: August 16, 2011Assignee: Hitachi High-Technologies CorporationInventors: Tsukasa Shishika, Yasushi Terui
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Patent number: 7928367Abstract: A simple and efficient method of preparing a sample in the measurement according to matrix-assisted laser desorption/ionization mass spectrometry (MALDI-MS) capable of inhibiting any ion suppression by impurities, such as inorganic salts and surfactants, contained in the sample. An analyte and matrix molecules are co-crystallized in the presence of porous microparticles. Preferably, this co-crystallization is carried out by bringing the analyte, matrix molecules and porous microparticles into contact with each other on a target plate and thereafter drying the mixture. The porous microparticles consist of an ion exchanger having an average particle diameter of not more than 50 ?m, preferably a strongly basic anion exchanger.Type: GrantFiled: July 2, 2007Date of Patent: April 19, 2011Assignee: RikenInventors: Hiroshi Hirota, Miwako Asanuma, Seketsu Fukuzawa, Shigeyuki Yokoyama
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Patent number: 7858930Abstract: Disclosed are ion cyclotron resonance (ICR) cells and other ion-trapping cells with plural groups of multiple trapping electrodes for shaping (e.g., flattening) the radial electric field within the ICR cell. Also disclosed are methods for controlling the electric field to diminish effects of de-phasing. The diminished effects are achieved by decreasing space-charge contributions by increasing the length of the ion-oscillation path along the z-axis of the ICR cell. The methods and devices enhance the time-domain signal of a Fourier-transform ion-cyclotron resonance mass spectrometer (FTICR-MS) and provide enhanced resolution and accuracy of mass measurements.Type: GrantFiled: December 12, 2008Date of Patent: December 28, 2010Assignee: Washington State UniversityInventors: Nathan K. Kaiser, James E. Bruce
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Patent number: 7755036Abstract: A novel instrument and method for TOF/TOF mass spectrometry is offered. A spiral trajectory time-of-flight mass spectrometer satisfies the spatial focusing conditions for the direction of flight and a direction orthogonal to the direction of flight whenever ions make a turn in the spiral trajectory. An ion gate for selecting precursor ions is placed in the spiral trajectory of the spiral trajectory time-of-flight mass spectrometer. Electric sectors are placed downstream of the ion gate.Type: GrantFiled: January 10, 2008Date of Patent: July 13, 2010Assignee: Jeol Ltd.Inventor: Takaya Satoh
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Patent number: 7755040Abstract: An electric field source for a mass spectrometer and a mass spectrometer are described.Type: GrantFiled: September 24, 2007Date of Patent: July 13, 2010Assignee: Agilent Technologies, Inc.Inventors: Gangqiang Li, Alexander Mordehai
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Patent number: 7728290Abstract: A method of obtaining a mass spectrum of elements in a sample is disclosed. Sample precursor ions having a mass to charge ratio M/Z are generated, and fragmented at a dissociation site, so as to produce fragment ions of mass to charge ratio m/z. The fragment ions are guided into an ion trap of the electrostatic or “Orbitrap” type, the fragment ions entering the trap in groups dependent upon the precursor ions M/Z. The mass to charge ratio of each group is determined from the axial movement of ions in the trap. The electric field in the trap is distorted. Ions of the same m/z, that are derived from different pre-cursor ions, are then separated, because the electric field distortion causes the axial movement to become dependent upon factors other than m/z alone.Type: GrantFiled: July 1, 2008Date of Patent: June 1, 2010Assignee: Thermo Finnigan LLCInventor: Alexander Makarov
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Publication number: 20090078866Abstract: An electric field source for a mass spectrometer and a mass spectrometer are described.Type: ApplicationFiled: September 24, 2007Publication date: March 26, 2009Inventors: Gangqiang LI, Alexander Mordehai
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Patent number: 7482581Abstract: A method of generating a mass spectrum from an FTMS is disclosed. A first quantity of ions from a source, having a first m/z range, is captured and detected in the FTMS measurement cell to produce a first output. A second quantity of ions, having a second m/z range which at least partially does not overlap with the first m/z range, is then captured and detected so as to produce a second output. The two outputs are then combined using a processor so as to “stitch” together the outputs, which may be FTMS transients or may first be Fourier Transformed into the frequency mass domain, into a composite output from which a composite mass spectrum covering the full range of m/z ratios included by the first and second ranges can be produced.Type: GrantFiled: March 24, 2005Date of Patent: January 27, 2009Assignee: Thermo Finnigan LLCInventors: Oliver Lange, Andreas Wieghaus
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Patent number: 7482583Abstract: In a time of flight mass spectrometer (TOFMS) having a flight space in which ions fly in a loop orbit formed by a plurality of electric sector fields, the present invention provides a simple structure that creates a spiral path by deflecting the ions in the axial direction of the electric fields at every turn of the ions. In a mode of the present invention, the TOFMS has cylindrical electrodes 11 and 12 for creating electric sector fields E1 and E2, between which a parallel pair of planer magnetic poles 15a and 15b are provided. The planer magnetic poles 15a and 15b create a deflecting magnetic field B1 for shifting the ions in the axial direction (Y-direction) of the electric sector fields. The ions experience a Lorenz force once every turn when they pass through the deflecting magnetic field B1. This construction uses only one pair of magnetic poles facing each other across the ion path P to deflect every ion irrespective of its number of turns.Type: GrantFiled: November 22, 2006Date of Patent: January 27, 2009Assignee: Shimadzu CorporationInventor: Yoshihiro Ueno
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Patent number: 7476854Abstract: A detector system for detecting trace molecules. The detector includes an ion trap that is coupled to an ionizer and a detector. The system also includes a controller that can generate voltage potentials within the ion trap. The controller can generate a voltage waveform to isolate one or more ions within the ion trap. The controller can then generate a voltage to dissociate the isolated ion(s). The controller can vary the dissociating voltage to dissociate and detect different ions. For example, the controller may vary the amplitude of the voltage to dissociate a target ion. Other techniques are described which generally improve the speed of detecting different target ions.Type: GrantFiled: February 3, 2005Date of Patent: January 13, 2009Assignee: Syagen TechnologyInventors: Jack A. Syage, Karl A. Hanold
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Publication number: 20080272293Abstract: The TOF mass spectrometer disclosed places an even number of ion mirrors in close proximity to a MALDI ion source and a field-free drift space between the exit from the mirrors and an ion detector. This “reversed geometry” configuration may be distinguished from a conventional reflecting TOF analyzer employing a single ion mirror where a large fraction of the total drift space is located between the ion source and the mirror.Type: ApplicationFiled: May 1, 2007Publication date: November 6, 2008Inventor: Marvin L. Vestal
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Patent number: 7429730Abstract: A SIFT or SIFDT apparatus in which the upstream quadrupole and the downstream quadrupole are housed within a single evacuated chamber with the upstream quadrupole being connected to the downstream quadrupole by a curved flow tube. In a preferred form the interior of the chamber is divided into sections by an electrostatic shield which shields the upstream quadrupole and source connection from the downstream quadrupole and detector.Type: GrantFiled: November 24, 2004Date of Patent: September 30, 2008Assignee: Syft Technologies LimitedInventor: Geoffrey Charles Peck
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Patent number: 7378651Abstract: Disclosed is an apparatus for separating ions including a plurality of first electrode portions, each first electrode portion of the plurality of first electrode portions having a first length and an outer surface that is at least partially curved in a direction transverse to the first length. The apparatus also includes a plurality of second electrode portions arranged in an alternating sequence with the plurality of first electrode portions, each second electrode portion of the plurality of second electrode portions having a second length and an outer surface that is curved in a direction transverse to the second length, a space between the outer surface of a first electrode portion and the outer surface of an adjacent second electrode portion defining a portion of an analytical gap for separating ions.Type: GrantFiled: September 5, 2003Date of Patent: May 27, 2008Assignee: Thermo Finnigan LLCInventor: Roger Guevremont
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Patent number: 7378649Abstract: In some embodiments, a method of optimizing operating parameters of an analytical instrument (e.g. lens voltages of a mass spectrometer) includes steps taken to minimize the method duration in the presence of substantial instrument noise and/or drift. Some methods include selecting a best point between a default instrument parameter set (vector) and a most-recent optimum parameter set; building a starting simplex at the selected best point location in parameter-space; and advancing the simplex to find an optimal parameter vector. The best simplex points are periodically re-measured, and the resulting readings are used to replace and/or average previous readings. The algorithm convergence speed may be adjusted by reducing simplex contractions gradually. The method may operate using all-integer parameter values, recognize parameter values that are out of an instrument range, and operate under the control of the instrument itself rather than an associated control computer.Type: GrantFiled: October 17, 2005Date of Patent: May 27, 2008Assignee: Varian, Inc.Inventors: Kenneth R. Newton, August Specht
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Publication number: 20080111071Abstract: A mass filter is disclosed comprising an orthogonal acceleration electrode 9. Ions entering the mass filter are orthogonally accelerated by the orthogonal acceleration electrode 9 in a primary acceleration region 2 and enter a flight region 3. The ions 6,7,8 are then reflected by a reflectron 4 and are directed towards an exit region of the mass filter. Ions having a desired mass to charge ratio are arranged to arrive in the primary acceleration region 2 at a time when a voltage pulse applied to the orthogonal acceleration electrode 9 falls from a maximum to zero. Ions having a desired mass to charge ratio are orthogonally decelerated such that they have a zero component of velocity in the orthogonal direction. Accordingly, ions having a desired mass to charge ratio exit the mass filter in an axial direction.Type: ApplicationFiled: October 22, 2007Publication date: May 15, 2008Applicant: WATERS INVESTMENTS LIMITEDInventors: Jeffery Mark Brown, Daniel James Kenny
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Patent number: 7351961Abstract: This invention relates to a measuring cell for an Ion Cyclotron Resonance (ICR) spectrometer. The present invention provides a measurement cell for an FTMS spectrometer, comprising an excitation electrode arrangement positioned about a longitudinal axis which extends in a direction generally parallel to the field direction of an applied homogeneous magnetic field; and a trapping electrode arrangement, also positioned about the said longitudinal axis, for trapping ions longitudinally in the cell within a trapping region defined by the trapping electrode arrangement; wherein at least a part of the excitation electrode arrangement extends axially outwardly of the trapping region defined by the trapping electrode arrangement.Type: GrantFiled: September 24, 2004Date of Patent: April 1, 2008Assignee: Thermo Finnigan LLCInventors: Robert Malek, Frank Czemper
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Patent number: 7351958Abstract: In various embodiments, provided are ion optics systems comprising an even number of ion mirrors arranged in pairs such that a trajectory of an ion exiting the ion optics system can be provided that intersects a surface substantially parallel to an image focal surface of the ion optics system at a position that is substantially independent of the kinetic energy the ion had on entering the ion optics system. In various embodiments, provided are ion optics systems comprising an even number of ion mirrors arranged in pairs where the first member and second member of each pair are disposed on opposite sides of a first plane such that the first member of the pair has a position that is substantially mirror-symmetric about the first plane relative to the position of the second member of the pair.Type: GrantFiled: January 24, 2005Date of Patent: April 1, 2008Assignees: Applera Corporation, MDS Inc.Inventor: Marvin L. Vestal
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Patent number: 7282708Abstract: The method of the present invention is to select ions having a predetermined mass to charge ratio by applying an ion selecting electric field in an ion storage space of an ion storage device. The method is characterized in that the ion selecting electric field is generated to be proportional to a product of a) a base wave composed of a repetition of a unit wave of a constant amplitude and a predetermined pattern, and b) an amplitude pattern which changes continuously. The amplitude pattern is preferred to increase as time passes in order to gradually increase the intensity of the ion selecting electric field applied to the ion storage space until ions of a desired mass to charge ratio are selected. The unit wave may be generated by the FNF method or by the SWIFT method. Further, it is effective to increase the intensity of the frequency components of the unit wave as the frequency is further from the characteristic frequency of the object ion having a desired mass to charge ratio.Type: GrantFiled: April 20, 2005Date of Patent: October 16, 2007Assignee: Shimadzu CorporationInventor: Eizo Kawato
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Patent number: 7034293Abstract: A linear ion trap includes four electrodes and operates with an asymmetrical trapping field in which the center of the trapping field is displaced from a geometrical center of the trap structure. The asymmetrical trapping field can include a main AC potential providing a quadrupole component and an additional AC potential. The main AC potential is applied between opposing pairs of electrodes and the additional AC potential is applied across one pair of electrodes. The additional AC potential can add a dipole component for rendering the trapping field asymmetrical. The additional AC potential can also add a hexapole component used for nonlinear resonance. A supplementary AC potential can be applied across the same pair of electrodes as the additional AC potential to enhance resonant excitation. The operating point for ejection can be set such that a pure resonance condition can be used to increase the amplitude of ion oscillation preferentially in one direction.Type: GrantFiled: May 26, 2004Date of Patent: April 25, 2006Assignee: Varian, Inc.Inventor: Gregory J. Wells
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Patent number: 7019314Abstract: Systems and methods are provided for focusing a scanned ion beam in an ion implanter. A beam focusing system is provided, comprising first and second magnets providing corresponding magnetic fields that cooperatively provide a magnetic focusing field having a time-varying focusing field center generally corresponding to a time-varying beam position of a scanned ion beam along a scan direction. Methods are presented, comprising providing a focusing field having a focusing field center in the scan plane, and dynamically adjusting the focusing field such that the focusing field center is generally coincident with a time-varying beam position of the scanned ion beam along the scan direction.Type: GrantFiled: October 18, 2004Date of Patent: March 28, 2006Assignee: Axcelis Technologies, Inc.Inventors: Victor M. Benveniste, Peter L. Kellerman
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Patent number: 6958476Abstract: Methods for creating a cross section of at least one feature located on a substrate are disclosed. The methods include coating the feature with a layer of contrast enhancing material, recoating the feature with a second material that is different from the contrast enhancing material, and milling the feature. The second material has substantially similar milling characteristics as the feature. The methods may further include creating an image of the feature and saving the image of the feature.Type: GrantFiled: October 10, 2003Date of Patent: October 25, 2005Assignee: ASML Netherlands B.V.Inventors: Todd J. Davis, Theodore Allen Paxton
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Patent number: 6903331Abstract: An ion tunnel ion trap comprises a plurality of electrodes having apertures. The ion tunnel ion trap is preferably coupled to a time of flight mass analyser.Type: GrantFiled: June 25, 2002Date of Patent: June 7, 2005Assignee: Micromass UK LimitedInventors: Robert Harold Bateman, Kevin Giles, Steve Pringle
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Patent number: 6878933Abstract: The subject invention provides improved methods for injecting ions into a quadrupole ion trap mass spectrometer (QIT-MS). The methods of the subject invention are applicable to procedures involving atmospheric pressure laser desorption (AP-LD) of a sample to be investigated. Specifically, the subject invention involves controlling the pulse frequency of the laser such that the laser pulses are synchronized with changes in radiofrequency (RF) amplitude levels of the QIT-MS. Advantageously, by utilizing the methods of the subject invention it is possible to improve the accuracy and reproducibility of the results while improving duty cycle and reducing sample consumption.Type: GrantFiled: December 10, 2003Date of Patent: April 12, 2005Assignee: University of FloridaInventor: Joshua J. Coon
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Patent number: 6833545Abstract: The present invention relates to analysis devices having means (3, 5, 7) for producing a plurality of ion beams of samples substantially simultaneously; mass separating means for individually mass separating each ion beam in parallel and detecting means (131-13n) for detecting said mass separated ion beams substantially simultaneously, and to methods for using such devices.Type: GrantFiled: March 17, 2003Date of Patent: December 21, 2004Assignee: Amersham Biosciences ABInventor: Jan Axelsson
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Patent number: 6822224Abstract: A tandem mass spectrometer is disclosed. A first mass analyzer within a low-pressure region is provided for passing ions therethrough. A collision cell is at an ion outlet of the mass analyzer to provide a location for ions to collide therein with a collision gas to form resultant ions. The resultant ions are then provided to a FAIMS analyzer for separation thereof and the separate resultant ions are provided to a mass analyzer for analysis.Type: GrantFiled: September 3, 2002Date of Patent: November 23, 2004Assignee: National Research Council CanadaInventor: Roger Guevremont
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Patent number: 6815674Abstract: In one embodiment, a miniaturized structure and associated method function as a mass spectrometer or analyzer and may, with modification, function as an ion generator. The miniaturized structure has a pair of generally planar parallel spaced electrodes which have projecting walls cooperating to define an ion generating chamber and an exit aperture. By controlling the electric field which is oriented perpendicular to an applied magnetic field, the ion beam may be separated into a plurality beams based upon mass to charge ratio with a predetermined mass to charge ratio emerging from the exit of the apparatus and when the apparatus is functioning as a mass spectrometer or analyzer impinges on an ion collector which responsively transmits information to a cooperating processor. Where it is desired to have it function as an ionizer the ion collector disposed adjacent the ion exit is eliminated.Type: GrantFiled: June 3, 2003Date of Patent: November 9, 2004Assignee: Monitor Instruments Company, LLCInventor: Guenter F. Voss
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Patent number: 6670606Abstract: The use of a segmented-ion trap with collisional damping is disclosed to improve performance (resolution and mass accuracy of single stage and tandem time-of-flight mass spectrometers. In the case of single stage spectrometers ions are directly injected from a pulsed ion source into the trap supplied with RF field and filled with gas at millitorr pressure. Subsequently, the ions are dynamically trapped by an RF-field, cooled in gas collisions and ejected out of the trap by a homogeneous electric field into a time-of-flight mass spectrometer. In the case of tandem mass spectrometric analysis the pulsed ion beam is injected into a time-of-flight analyzer to select ions-of-interest prior to injection into the trap at medium energy to achieve fragmentation in the trap.Type: GrantFiled: February 3, 2003Date of Patent: December 30, 2003Assignee: PerSeptive Biosystems, Inc.Inventors: Anatoli Verentchikov, Jennifer M. Campbell
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Patent number: 6649911Abstract: The present invention describes a method of selecting ions in an ion storage device with high resolution in a short time period while suppressing amplitude of ion oscillation immediately after the selection. In a method of selecting ions within a specific range of mass-to-charge ratio by applying an ion-selecting electric field in an ion storage space of an ion storage device, the method according to the present invention is characterized in that the ion-selecting electric field is produced from a waveform whose frequency is substantially scanned, and the waveform is made anti-symmetric by multiplying a weight function whose polarity reverses, or by shifting a phase of the waveform by odd multiple of &pgr;, at around a secular frequency of the ions to be left in the ion storage space. It is preferable that the frequency of the waveforms is scanned in a direction where the frequency decreases.Type: GrantFiled: July 22, 2002Date of Patent: November 18, 2003Assignee: Shimadzu CorporationInventor: Eizo Kawato
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Patent number: 6646252Abstract: A new detection scheme for time-of-flight mass spectrometers is disclosed. This detection scheme allows extending the dynamic range of spectrometers operating with a counting, technique (TDC). The extended dynamic range is achieved by constructing a multiple anode detector wherein the individual anodes detect different fractions of the incoming particles. Different anode fractions are achieved by varying the size, physical location, and electrical/magnetic fields of the various anodes. An anode with a small anode fraction avoids saturation and allows an ion detector to render an accurate count of ions even for abundant species.Type: GrantFiled: February 22, 2001Date of Patent: November 11, 2003Inventor: Marc Gonin
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Patent number: 6633034Abstract: A charged particle beam method and apparatus use a primary electron beam to irradiate a specimen so as to induce the specimen to emit secondary and backscattered electrons carrying information about topographic and material structure of the specimen, respectively. The specimen may be an article to be inspected. The electrons emitted by the specimen are deflected in the electric field of an electron mirror and detected using an electron detector of the apparatus. The electron mirror permits the detection of the secondary electrons traveling close to the optical axis of the apparatus and corrects the aberrations of the secondary electrons. In addition, the electron mirror accelerates the electrons improving the detection efficiency of the electron detector and enhancing the time-of-flight dispersion characteristics of the secondary electron collection. A second electron mirror can be provided to further control the direction of the electron's landing on the surface of the electron detector.Type: GrantFiled: May 4, 2000Date of Patent: October 14, 2003Assignee: Applied Materials, Inc.Inventor: David A. Crewe
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Patent number: 6580072Abstract: Described are methods of adapting FIB techniques to copper metallization, and to structures that result from the application of such techniques. A method in accordance with the invention can be used to sever copper traces without damaging adjacent material or creating conductive bridges to adjacent traces. Semiconductor devices that employ copper traces typically include a protective passivation layer that protects the copper. This passivation layer is removed to render the copper traces visible to an FIB operator. The copper surface is then oxidized, as by heating the device in air, to form a copper-oxide layer on the exposed copper. With the copper-oxide layer in place, an FIB is used to mill through the copper-oxide and copper layers of a selected copper trace to sever the trace. The copper-oxide layer protects copper surfaces away from the mill site from reactive chemicals used during the milling process. In one embodiment, a copper-oxide layer of at least 40 nanometers thick affords adequate protection.Type: GrantFiled: May 3, 2000Date of Patent: June 17, 2003Assignee: Xilinx, Inc.Inventors: Jonathan Cheang-Whang Chang, Brian J. Wollard
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Patent number: 6573110Abstract: A combinatorial chemistry system allows for the dual processing of different molecules coated on a library of beads. The system includes beads coated with different molecules on each bead, a bead holder, screening equipment and characterization equipment. Molecules on the beads are both screened and characterized simultaneously.Type: GrantFiled: December 15, 1999Date of Patent: June 3, 2003Assignee: The Penn State Research FoundationInventors: Robert J. Hessler, Robert Braun, Nicholas Winograd
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Patent number: 6525314Abstract: A compact high-performance mass spectrometer includes an ion source, an ion filter, a collision cell, a fragment filter, and an ion detector, along with one or more ion deflectors and one or more gas removal rings. An ion deflector allows a straight ion filter and a straight collision cell to be coupled in a folded configuration to make a compact design without the loss of performance associated with the use of curved quadrupole components. A gas removal ring, located proximate to an ion path aperture of the collision cell, allows an ion path aperture to be large for high sensitivity while minimizing performance degradation associated with the tendency of collision cell gas to escape via the collision cell ion path apertures to enter the high vacuum region and the detector.Type: GrantFiled: September 15, 1999Date of Patent: February 25, 2003Assignee: Waters Investments LimitedInventors: Joseph A. Jarrell, Guo-Zhong Li
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Patent number: 6329654Abstract: A miniature multipole rod assembly, an apparatus and a technique for constructing such an assembly used for ion guide and mass spectrometers.Type: GrantFiled: December 22, 1998Date of Patent: December 11, 2001Assignee: Analytica of Branford, Inc.Inventors: Erol C. Gulcicek, Craig M. Whitehouse, Allan Burt, Michael Sansone, Clement Catalano