Magnetic Field Path-bending Means Patents (Class 250/298)
  • Patent number: 11043353
    Abstract: An energy filter has a plurality of sector magnets which are configured symmetrically with respect to a symmetry plane, and forms a real image on the symmetry plane. The energy filter include: an entrance aperture provided with a slit having a longitudinal direction in a direction perpendicular to an energy dispersion direction; and a hexapole and a quadrupole disposed on the symmetry plane.
    Type: Grant
    Filed: March 23, 2020
    Date of Patent: June 22, 2021
    Assignee: JEOL Ltd.
    Inventor: Kazuya Omoto
  • Patent number: 10580635
    Abstract: An electromagnet assembly suitable for mass spectrometer comprising one yoke; and two pole pieces; the pole pieces being comprised in a vacuum chamber and being separated from each other by a pole piece gap defining a passage for the charged particles to be deflected; the yoke forming a bridge over the two pole pieces thus defining a magnetic circuit. The electromagnet assembly further comprises one electrical circuit for generating a magnetic flux in the magnetic circuit, the electrical circuit being included in the yoke. The electromagnet assembly is remarkable in that the pole pieces are electrically insulated from the electrical circuit and from the yoke by first electrical insulating means and are electrically insulated from the vacuum chamber.
    Type: Grant
    Filed: February 7, 2017
    Date of Patent: March 3, 2020
    Assignee: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
    Inventors: Roch Andrzejewski, Rachid Barrahma, David Dowsett, Tom Wirtz
  • Patent number: 10497540
    Abstract: An apparatus and method for processing a workpiece with a beam is described. The apparatus includes a vacuum chamber having a beam-line for forming a particle beam and treating a workpiece with the particle beam, and a scanner for translating the workpiece through the particle beam. The apparatus further includes a scanner control circuit coupled to the scanner, and configured to control a scan property of the scanner, and a beam control circuit coupled to at least one beam-line component, and configured to control the beam flux of the particle beam according to a duty cycle for switching between at least two different states during processing.
    Type: Grant
    Filed: January 5, 2018
    Date of Patent: December 3, 2019
    Assignee: TEL Epion Inc.
    Inventors: Matthew C. Gwinn, Martin D. Tabat, Kenneth Regan, Allen J. Leith, Michael Graf
  • Patent number: 10408951
    Abstract: A radiation detector is provided. In a further aspect, a detector employs a Parallel Plate Avalanche Counter (“OPPAC”) which includes an anode film, a parallel cathode film and multiple optical photo-detectors, such as photo-sensors and/or photo-multipliers. A method of using a radiation detector is also provided.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: September 10, 2019
    Assignee: Board of Trustees of Michigan State University
    Inventors: Marco Cortesi, John E. Yurkon
  • Patent number: 9723705
    Abstract: In an example, a synchrocyclotron includes a particle source to provide pulses of ionized plasma to a cavity; a voltage source to provide a radio frequency (RF) voltage to the cavity to accelerate particles from the plasma column outwardly; and an extraction channel to receive a beam of particles from the cavity for output from the particle accelerator. The particle source is configured to control pulse widths of the ionized plasma in order to control an intensity of the beam of particles. This example synchrocyclotron may include one or more of the following features, either alone or in combination.
    Type: Grant
    Filed: September 27, 2013
    Date of Patent: August 1, 2017
    Assignee: Mevion Medical Systems, Inc.
    Inventors: Kenneth P. Gall, Gerrit Townsend Zwart, Jan Van der Laan, Adam C. Molzahn, Charles D. O'Neal, III, Thomas C. Sobczynski, James Cooley
  • Patent number: 9685298
    Abstract: An apparatus may include an ion source generating an ion beam, the ion source coupled to a first voltage. The apparatus may further include a stopping element disposed between the ion source and a substrate position; a stopping voltage supply coupled to the stopping element; and a control component to direct the stopping voltage supply to apply a stopping voltage to the stopping element, the stopping voltage being equal to or more positive than the first voltage when the ion beam comprises positive ions, and being equal to or more negative than the first voltage when the ion beam comprises negative ions, wherein at least a portion of the ion beam is deflected backwardly from an initial trajectory as deflected ions when the stopping voltage is applied to the stopping element.
    Type: Grant
    Filed: February 1, 2016
    Date of Patent: June 20, 2017
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Alexandre Likhanskii, Jay T. Scheuer, William Davis Lee
  • Patent number: 9672965
    Abstract: A reactor includes a laminated core formed by laminating soft-magnetic ribbons in a lamination direction. The laminated core has a gap formed across a magnetic path direction in the laminated core. The laminated core also has a flat facing surface that faces the gap and a pair of flat side surfaces that are respectively on opposite sides of the facing surface in the lamination direction. The laminated core further has a pair of first corner curved surfaces that are formed between the facing surface and the pair of side surfaces. Each of the first corner curved surfaces has a width in the lamination direction greater than the thickness of each of the soft-magnetic ribbons. For each of the first corner curved surfaces, a length of the first corner curved surface in the magnetic path direction is greater than the width of the first corner curved surface in the lamination direction.
    Type: Grant
    Filed: May 14, 2015
    Date of Patent: June 6, 2017
    Assignees: DENSO CORPORATION, TOKYO METROPOLITAN UNIVERSITY
    Inventors: Takahiro Tera, Hiroshi Taki, Toshihisa Shimizu
  • Patent number: 9496117
    Abstract: An adjustable mass-resolving slit assembly includes an aperture portion and an actuation portion. The aperture portion includes first and second shield members that define an aperture therebetween for receiving an ion beam during semiconductor processing operations. The actuation portion is coupled to the aperture portion and selectively and independently adjusts the position of the first and second shield members along first and second non-parallel axes. Adjusting the position of the first and second shield members along the first axis adjusts a width of the aperture. Adjusting the position of the first and second shield members along the second axis adjusts a region of the first and second shield members impinged by the ion beam. Methods for using the adjustable mass-resolving slit assembly are also disclosed.
    Type: Grant
    Filed: January 20, 2014
    Date of Patent: November 15, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Jason M. Schaller, Robert B. Vopat
  • Patent number: 9409185
    Abstract: Systems and methods for recovery of rare-earth constituents from environmental barrier coatings (EBCs) are provided. One method includes for separating rare-earth (RE) containing constituents from a particulate feedstock containing a mixture of RE silicates and non-magnetic constituents includes disposing a collection member in a vicinity of the feedstock and magnetizing the collection member to generate a magnetic field sufficient to selectively attract the RE silicates to the collection member. The method further includes removing the RE silicates from the collection member.
    Type: Grant
    Filed: April 17, 2014
    Date of Patent: August 9, 2016
    Assignee: General Electric Company
    Inventors: Satya Kishore Manepalli, Theodore Robert Grossman, Don Mark Lipkin, Karthick Vilapakkam Gourishankar
  • Patent number: 9373474
    Abstract: An ion source is provided with a push-out electrode, a pull-out electrode, and a pull-in electrode all for ionizing a sample and accelerating generated ions in a pulsed manner, wherein the push-out electrode and/or the pull-in electrode has a curved surface shape having a depression curved in the direction opposite to the direction of travel of the ions. As a result, a compact ion source capable of temporally and spatially focusing ions and outputting the ions, and a compact time-of-flight mass spectroscope with good detection resolution and detection sensitivity which is provided with the compact ion source can be provided.
    Type: Grant
    Filed: March 26, 2010
    Date of Patent: June 21, 2016
    Assignees: Osaka University, MSI. Tokyo, Inc.
    Inventors: Michisato Toyoda, Jun Aoki, Shinichi Miki
  • Patent number: 9263230
    Abstract: A method for transmitting a broadband ion beam (100) and an ion implanter adopt an analyzing magnetic field (1), a calibration magnetic field (2) and an analyzing grating (6) to transmit a broadband ion beam. If the analyzing magnetic field (1) enables the broadband ion beam (100) emitted into the analyzing magnetic field from an incident face (101) thereof to be deflected anticlockwise in a horizontal direction, the calibration magnetic field (2) enables an ion beam diffusing again after passing through the analyzing grating (6) to be deflected clockwise in the horizontal direction; if the analyzing magnetic field (1) enables the broadband ion beam (100) emitted into the analyzing magnetic field from the incident face (101) thereof to be deflected clockwise in the horizontal direction, the calibration magnetic field (2) enables an ion beam diffusing again after passing through the analyzing grating (6) to be deflected anticlockwise in the horizontal direction.
    Type: Grant
    Filed: August 6, 2012
    Date of Patent: February 16, 2016
    Assignee: Beijing Zhongkexin Electronics Equipment Co., Ltd.
    Inventors: Libo Peng, Huiyue Long, Junyu Xie
  • Patent number: 9194786
    Abstract: A MEMS-based particle manipulation system which uses a particle manipulation stage and a plurality of laser interrogation regions. The laser interrogation regions may be used to assess the effectiveness or accuracy of the particle manipulation stage. In one exemplary embodiment, the particle manipulation stage is a microfabricated, flap-type fluid valve, which sorts a target particle from non-target particles in a fluid stream. The laser interrogation stages are disposed in the microfabricated fluid channels at the input and output of the flap-type sorting valve. The laser interrogation regions may be used to assess the effectiveness or accuracy of the sorting, and to control or adjust sort parameters during the sorting process.
    Type: Grant
    Filed: August 1, 2012
    Date of Patent: November 24, 2015
    Assignee: Owl biomedical, Inc.
    Inventors: John S. Foster, Daryl W. Grummitt
  • Publication number: 20140332680
    Abstract: An ion trap comprising: a first array of magnetic elements arranged to generate a first magnetic field with a degree of homogeneity; and an array of electrodes arranged to generate an electrostatic field including a turning point in electrical potential at a location where the magnetic field has a substantially maximum degree of homogeneity; wherein the array of electrodes is planar and parallel to the direction of the magnetic field at the location; and wherein a primary first magnetic element is arranged to generate a first component of the first magnetic field and other first magnetic elements are arranged to generate compensating components of the first magnetic field that reduce the gradient, the curvature and higher order derivatives of the first component of the first magnetic field at the location where the first magnetic field has the substantially maximum degree of homogeneity.
    Type: Application
    Filed: September 20, 2012
    Publication date: November 13, 2014
    Inventor: Jose Luis Verdu Galiana
  • Patent number: 8872126
    Abstract: A target supply device 4 may include a tank 51, formed of a metal, that holds a target material, an insulating member 62 that makes contact with at least part of the periphery of the tank 51, and a heater 58 that is separated from the tank 51 and heats the tank 51 via the insulating member 62.
    Type: Grant
    Filed: February 24, 2014
    Date of Patent: October 28, 2014
    Assignee: Gigaphoton Inc.
    Inventors: Hiroshi Umeda, Toshiyuki Hirashita
  • Publication number: 20140312223
    Abstract: A broadband ion beam analyzer, used for isolating required ions from a broadband ion beam, comprises an upper magnetic pole (1), a lower magnetic pole (2), an upper excitation coil (3), a lower excitation coil (4), an analysis grating (7), and a magnetic yoke (5 and 6). The upper magnetic pole (1) and the lower magnetic pole (2) are both provided with a camber-shaped incident-end boundary (101) and a camber-shaped emergence side boundary (102). The camber radii (Rb) of the incident-end boundary (101) and of the emergence-end boundary (102) are equal to the deflection radius (R) of the required ions in the magnetic field. The required ions in the broadband ion beam are allowed to focus ideally at the mid-section of the magnetic field, to acquire an ideal focal spot having a size that equals to zero.
    Type: Application
    Filed: November 2, 2012
    Publication date: October 23, 2014
    Inventors: Libo Peng, Huiyue Long, Junyu Xie
  • Publication number: 20140284470
    Abstract: A lens for electron capture dissociation may include: a first electrode and a second electrode spaced apart from each other and arranged along a first direction; and a third electrode and a fourth electrode spaced apart from each other and arranged along a second direction perpendicular to the first direction. The first electrode and the second electrode may be disposed in a space in which a magnetic field is formed in the first direction and trap electrons. The third electrode and the fourth electrode may be in the form of a flat plate and may apply an electric field to the trapped electrons in the second direction.
    Type: Application
    Filed: October 10, 2012
    Publication date: September 25, 2014
    Inventors: Myoung Choul Choi, Sang Hwan Choi, Se Gyu Lee, Jeong Min Lee
  • Publication number: 20140217282
    Abstract: Mass spectrometry cells include one or more interleaved magnetostatic and electrostatic lenses. In some examples, the electrostatic lenses are based on electrical potentials applied to magnetostatic lens pole pieces. In other alternatives, the electrostatic lenses can include conductive apertures. Applied voltages can be selected to trap or transport charged particles, and photon sources, gas sources, ion sources, and electron sources can be provided for various dissociation processes.
    Type: Application
    Filed: March 7, 2014
    Publication date: August 7, 2014
    Applicant: The State of Oregon Acting by and Through the State Board of Higher Education on behalf of Orego
    Inventors: Douglas F. Barofsky, Joseph S. Beckman, Max L. Deinzer, Valery G. Voinov
  • Patent number: 8723113
    Abstract: Mass spectrometry cells include one or more interleaved magnetostatic and electrostatic lenses. In some examples, the electrostatic lenses are based on electrical potentials applied to magnetostatic lens pole pieces. In other alternatives, the electrostatic lenses can include conductive apertures. Applied voltages can be selected to trap or transport charged particles, and photon sources, gas sources, ion sources, and electron sources can be provided for various dissociation processes.
    Type: Grant
    Filed: May 29, 2009
    Date of Patent: May 13, 2014
    Assignee: The State of Oregon Acting by and through the State Board of Higher Education of behalf of Oregon State University
    Inventors: Douglas F. Barofsky, Joseph S. Beckman, Max L. Deinzer, Valery G. Voinov
  • Patent number: 8674327
    Abstract: Systems and methods for uniformly implanting materials on substrates using directed magnetic fields are provided. One such system includes a chamber configured to receive a preselected material and to enclose a first substrate, first and second rotating assemblies configured to facilitate an implantation of the preselected material onto first and second surfaces of the first substrate and including first and second rotating magnet sub-assemblies configured to direct magnetic fields onto the first and second surfaces, and an RF energizer configured to apply RF energy to the first substrate, where the first magnetic field and the second magnetic field combine to form a resultant magnetic field that is substantially parallel along the first surface, and where the implantation of the preselected material onto the first substrate occurs based on a combination of the RF energy and the resultant magnetic field.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: March 18, 2014
    Assignee: WD Media, LLC
    Inventors: Chin Yim Poon, Yew Ming Chiong, Paul C. Dorsey, Tatsuru Tanaka
  • Patent number: 8637818
    Abstract: The invention comprises a charged particle beam acceleration, extraction, and/or targeting method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. Novel design features of a synchrotron are described. Particularly, turning magnets, edge focusing magnets, concentrating magnetic field magnets, winding and control coils, flat surface incident magnetic field surfaces, and extraction elements are described that minimize the overall size of the synchrotron, provide a tightly controlled proton beam, directly reduce the size of required magnetic fields, directly reduces required operating power, and allow continual acceleration of protons in a synchrotron even during a process of extracting protons from the synchrotron.
    Type: Grant
    Filed: April 26, 2012
    Date of Patent: January 28, 2014
    Inventor: Vladimir Balakin
  • Patent number: 8637838
    Abstract: A scanning system including a scanning element, a beam profiler, analysis system, and a ZFE-limiting element, is disclosed. The scanning element is configured to scan an ion beam over an ion beam scan path. The beam profiler measures beam current of the ion beam as it is scanned over the ion beam scan path, and the analysis system analyzes the measured beam current to detect a ZFE condition. The ZFE-limiting element, which is upstream of the beam profiler and is coupled to the analysis system via a feedback path, is configured to selectively apply an electric field to the scanned ion beam based on whether the ZFE condition is detected. The selectively applied electric field induces a change in the scanned beam to limit the ZFE condition.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: January 28, 2014
    Assignee: Axcelis Technologies, Inc.
    Inventors: Edward C. Eisner, Bo H. Vanderberg
  • Patent number: 8614554
    Abstract: The invention comprises a charged particle beam acceleration, extraction, and/or targeting method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. Novel design features of a synchrotron are described. Particularly, turning magnets, edge focusing magnets, concentrating magnetic field magnets, winding and control coils, flat surface incident magnetic field surfaces, and extraction elements are described that minimize the overall size of the synchrotron, provide a tightly controlled proton beam, directly reduce the size of required magnetic fields, directly reduces required operating power, and allow continual acceleration of protons in a synchrotron even during a process of extracting protons from the synchrotron.
    Type: Grant
    Filed: April 14, 2012
    Date of Patent: December 24, 2013
    Inventor: Vladimir Balakin
  • Patent number: 8592757
    Abstract: A mass spectrometer for analyzing isotopic signatures, with at least one magnetic analyzer and optionally with an electric analyzer as well, with a first arrangement of ion detectors and/or ion passages and, arranged downstream thereof in the direction of the ion beam, a second arrangement of ion detectors, with at least one deflector in the region of the two arrangements of ion detectors or between these arrangements. Additionally, a multi-collector arrangement, special uses and a method for analyzing isotopes in a sample. The mass spectrometer according to the invention has a control for the at least one deflector such that ion beams of different isotopes can be routed to at least one ion detector in the second arrangement.
    Type: Grant
    Filed: June 10, 2010
    Date of Patent: November 26, 2013
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: Johannes Schwieters, Silke Seedorf, Michael Deerberg
  • Patent number: 8460634
    Abstract: A system and process are provided for extracting a substance from a molecular combination. The process comprises heating the molecular combination to dissociate the molecular combination into cations and anions, moving the cations and anions through a magnetic field to separate cations and anions, and isolating cations from anions with a barrier. The system comprises a non-conductive conduit for guiding an ionized particle stream, a magnetic field source for creating a magnetic field through which the ionized particle stream moves, and a barrier located in the conduit. The ionized particle stream has a velocity relative to the conduit, and the magnetic field source is oriented relative to the velocity of the ionized particle stream so that cations are separated from anions as the ionized particle stream moves through the magnetic field. The barrier is oriented in the conduit so that cations are isolated from anions after separation.
    Type: Grant
    Filed: February 1, 2012
    Date of Patent: June 11, 2013
    Assignee: Elementary Energy, Inc.
    Inventor: Timothy O. Nichols
  • Patent number: 8410459
    Abstract: An ion implantation device and a method of manufacturing a semiconductor device is described, wherein ionized boron hydride molecular clusters are implanted to form P-type transistor structures. For example, in the fabrication of Complementary Metal-Oxide Semiconductor (CMOS) devices, the clusters are implanted to provide P-type doping for Source and Drain structures and for Polygates; these doping steps are critical to the formation of PMOS transistors. The molecular cluster ions have the chemical form BnHx+ and BnHx?, where 10?n?100 and 0?x?n+4.
    Type: Grant
    Filed: May 6, 2011
    Date of Patent: April 2, 2013
    Assignee: SemEquip, Inc.
    Inventors: Thomas N. Horsky, Dale C. Jacobson
  • Patent number: 8378312
    Abstract: A variety of systems, apparatus and methods for deflecting a particle beam are described. An apparatus comprises at least six electromagnetic portions disposed on a plane. Each of the at least six electromagnetic portions is aligned with a radius emanating from an axis normal to the plane and is distanced from the axis to form a volume about the axis. At least six coils are configured for affecting a dipole magnetic field in the volume in response to electrical currents applied to physically opposing coils where a particle beam entering the volume is deflected. Each of the at least six coils is disposed about a one of the at least six electromagnetic portions. A yoke structure is configured for returning a generated magnetic flux.
    Type: Grant
    Filed: August 19, 2011
    Date of Patent: February 19, 2013
    Assignee: Pyramid Technical Consultants, Inc.
    Inventors: John Gordon, Raymond Paul Boisseau, Andrew Dart
  • Patent number: 8373121
    Abstract: An achromatic magnetic mass spectrometer, for example of the SIMS type with double focusing, comprises means for canceling the four aberrations of the second order, and means for canceling the off-axis achromatism and for modulating the dispersion in mass.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: February 12, 2013
    Assignee: Cameca
    Inventor: Emmanuel De Chambost
  • Publication number: 20120292497
    Abstract: An ExB Wien mass filter providing a method and structure for mechanically adjusting the magnetic field distributions at the mass filter entrance and exit end caps. The reluctance of the flux return path may be modified by configuring pluralities of magnetic shims within slots at the outer diameters of the entrance and exit end caps, and also by configuring pluralities of magnetic plug shims within circular flux dams surrounding the entrance and exit apertures. Advantages of purely mechanical adjustment for the magnetic fields of the present invention, compared with prior art electromagnet adjustment methods include greater reliability, simplicity, lower cost, and lack of power dissipation. The invention may employ either permanent magnets or electromagnets for generation of the mass-separation magnetic field.
    Type: Application
    Filed: May 19, 2011
    Publication date: November 22, 2012
    Applicant: FEI Company
    Inventor: James B. McGinn
  • Publication number: 20120187290
    Abstract: Apparatus and method for adjusting an ion beam between a mass analyzer and a substrate holder. Herein, one or more bended, such as arch-shaped, curved or zigzag shaped, bar magnets are configured to apply one or more magnetic fields to adjust the shape or cross section of an ion beam passing through a space partially surrounded by the one or more bended bar magnets. At least one of the gap width between neighbor bended bar magnets, the curvature of each bended bar magnet and the current flowing through each bended bar magnet may be fixed or adjusted dependently or independently. Therefore, the Lorentz force applied on the ion beam along different directions may be changed in a desired manner, and then the ion beam may be flexibly elongated, compressed or shaped to meet the process requirement.
    Type: Application
    Filed: January 24, 2011
    Publication date: July 26, 2012
    Applicant: ADVANCED ION BEAM TECHNOLOGY, INC.
    Inventors: KO-CHUAN JEN, ZHIMIN WAN
  • Publication number: 20120168622
    Abstract: An implantation system includes an ion extraction plate having a set of apertures configured to extract ions from an ion source to form a plurality of beamlets. A magnetic analyzer is configured to provide a magnetic field to deflect ions in the beamlets in a first direction that is generally perpendicular to a principle axis of the beamlets. A mass analysis plate includes a set of apertures wherein first ion species having a first mass/charge ratio are transmitted through the mass analysis plate and second ion species having a second mass/charge ratio are blocked by the mass analysis plate. A workpiece holder is configured to move with respect to the mass analysis plate in a second direction perpendicular to the first direction, wherein a pattern of ions transmitted through the mass analysis plate forms a continuous ion beam current along the first direction at the substrate.
    Type: Application
    Filed: December 29, 2010
    Publication date: July 5, 2012
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Victor M. Benveniste, Frank Sinclair, Svetlana Radovanov, Bon-Woong Koo
  • Patent number: 8188688
    Abstract: The invention comprises a charged particle beam acceleration, extraction, and/or targeting method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. Novel design features of a synchrotron are described. Particularly, turning magnets, edge focusing magnets, concentrating magnetic field magnets, winding and control coils, flat surface incident magnetic field surfaces, and extraction elements are described that minimize the overall size of the synchrotron, provide a tightly controlled proton beam, directly reduce the size of required magnetic fields, directly reduces required operating power, and allow continual acceleration of protons in a synchrotron even during a process of extracting protons from the synchrotron.
    Type: Grant
    Filed: August 22, 2009
    Date of Patent: May 29, 2012
    Inventor: Vladimir Balakin
  • Patent number: 8183539
    Abstract: The present invention provides a mass analyzing magnet which can bend a very wide charged particle ribbon beams through angles between 90 to 200 degrees. The shorter dimension of the ribbon beam is aligned with the magnetic field. The magnet can focus the longer dimension of the ribbon beam through a resolving slot inside the magnet for mass or momentum analysis. The magnet pole is shaped to increase the mass resolving power and to provide the focusing force in the direction of the shorter dimension of the ribbon beam. This magnet can achieve high mass resolving power with very small system aberrations for very wide ribbon beam. This feature is of significant value, for example, in the ion implantation industry. The ribbon beam width can be 300 mm, 450 mm and even 1000 mm. Integrated with the present invention, the ion implanter systems can be built to provide mass analyzed ribbon beams for various applications.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: May 22, 2012
    Inventors: Yongzhang Huang, Xinping Hu
  • Patent number: 8129678
    Abstract: An ion cyclotron spectrometer may include a vacuum chamber that extends at least along a z-axis and means for producing a magnetic field within the vacuum chamber so that a magnetic field vector is generally parallel to the z-axis. The ion cyclotron spectrometer may also include means for producing a trapping electric field within the vacuum chamber. The trapping electric field may comprise a field potential that, when taken in cross-section along the z-axis, includes at least one section that is concave down and at least one section that is concave up so that ions traversing the field potential experience a net magnetron effect on a cyclotron frequency of the ions that is substantially equal to zero. Other apparatuses and a method for performing ion cyclotron spectrometry are also disclosed herein.
    Type: Grant
    Filed: June 17, 2010
    Date of Patent: March 6, 2012
    Assignee: Battelle Energy Alliance, LLC
    Inventors: David A. Dahl, Jill R. Scott, Timothy R. McJunkin
  • Publication number: 20120032075
    Abstract: An achromatic magnetic mass spectrometer, for example of the SIMS type with double focusing, comprises means for canceling the four aberrations of the second order, and means for canceling the off-axis achromatism and for modulating the dispersion in mass.
    Type: Application
    Filed: January 29, 2010
    Publication date: February 9, 2012
    Applicant: CAMECA
    Inventor: Emmanuel De Chambost
  • Patent number: 8110175
    Abstract: A system and process are provided for extracting a substance from a molecular combination. The process comprises heating the molecular combination to dissociate the molecular combination into cations and anions, moving the cations and anions through a magnetic field to separate cations and anions, and isolating cations from anions with a barrier. The system comprises a non-conductive conduit for guiding an ionized particle stream, a magnetic field source for creating a magnetic field through which the ionized particle stream moves, and a barrier located in the conduit. The ionized particle stream has a velocity relative to the conduit, and the magnetic field source is oriented relative to the velocity of the ionized particle stream so that cations are separated from anions as the ionized particle stream moves through the magnetic field. The barrier is oriented in the conduit so that cations are isolated from anions after separation.
    Type: Grant
    Filed: July 24, 2006
    Date of Patent: February 7, 2012
    Inventor: Timothy O. Nichols
  • Publication number: 20110315867
    Abstract: A closed plasma channel (“CPC”) superconductor which, in a first embodiment, is comprised of an elongated, close-ended vacuum conduit comprising a cylindrical wall having a longitudinal axis and defining a transmission space for containing an ionized gas of vapor plasma (hereinafter “plasma components”), the plasma components being substantially separated into regionalized channels parallel to the longitudinal axis in response to a static magnetic field produced within the transmission space. Each channel is established along the entire length of the transmission space. At least one channel is established comprised primarily of free-electrons which provide a path of least resistance for the transmission of energy therethrough. Ionization is established and maintained by the photoelectric effect of a light source of suitable wavelength to produce the most conductive electrical transmission medium.
    Type: Application
    Filed: March 29, 2011
    Publication date: December 29, 2011
    Inventor: GLENN LANE
  • Patent number: 8063390
    Abstract: An electron cooling system and method for increasing the phase space intensity and overall intensity of ion beams in multiple overlap regions, including a vacuum chamber to allow a single electron beam to be merged and separated with multiple ion beams, an electron supply device including a cathode to generate the electron beam, an electron collector device including a collection plate to collect the electron beam, multiple magnetic field generation devices to guide the electrons on their desired trajectories, and multiple electrodes to set the velocity of the electron beam independently in each overlap region. By overlapping the electron and ion beams, thermal energy is transferred from the ion beams to the electron beam, which allows an increase in the phase space density and overall density of the ion beams.
    Type: Grant
    Filed: March 3, 2010
    Date of Patent: November 22, 2011
    Inventor: Delbert J. Larson
  • Publication number: 20110215236
    Abstract: An electron cooling system and method for increasing the phase space intensity and overall intensity of ion beams in multiple overlap regions, including a vacuum chamber to allow a single electron beam to be merged and separated with multiple ion beams, an electron supply device including a cathode to generate the electron beam, an electron collector device including a collection plate to collect the electron beam, multiple magnetic field generation devices to guide the electrons on their desired trajectories, and multiple electrodes to set the velocity of the electron beam independently in each overlap region. By overlapping the electron and ion beams, thermal energy is transferred from the ion beams to the electron beam, which allows an increase in the phase space density and overall density of the ion beams.
    Type: Application
    Filed: March 3, 2010
    Publication date: September 8, 2011
    Inventor: Delbert J. Larson
  • Patent number: 7994739
    Abstract: A betatron magnet having at least one electron injector positioned approximate an inside of a radius of a betatron orbit, the betatron magnet further includes a first guide magnet having a first pole face and a second guide magnet having a second pole face. Both the first and the second guide magnet have a centrally disposed aperture and the first pole face is separated from the second pole face by a guide magnet gap. A core is disposed within the centrally disposed apertures in an abutting relationship with both guide magnets. The core has at least one core gap. A drive coil is wound around both guide magnet pole faces. An orbit control coil has a core portion wound around the core gap and a field portion wound around the guide magnet pole faces. The core portion and the field portion are connected but in opposite polarity.
    Type: Grant
    Filed: December 14, 2008
    Date of Patent: August 9, 2011
    Assignee: Schlumberger Technology Corporation
    Inventor: Felix K. Chen
  • Patent number: 7960691
    Abstract: The provision of a new method for analyzing organic molecules such as protein and endocrine disrupting chemicals with excellent sensitivity. A secondary ion mass spectrometry method using a heavy ion beam as a primary ion beam enables the detection of, for example, an organism-related material at the sub-amol level with high sensitivity. As a result, favorable imaging of an organism-related sample can be performed.
    Type: Grant
    Filed: June 13, 2007
    Date of Patent: June 14, 2011
    Assignee: Kyoto University
    Inventor: Jiro Matsuo
  • Patent number: 7960709
    Abstract: An ion implantation device and a method of manufacturing a semiconductor device is described, wherein ionized boron hydride molecular clusters are implanted to form P-type transistor structures. For example, in the fabrication of Complementary Metal-Oxide Semiconductor (CMOS) devices, the clusters are implanted to provide P-type doping for Source and Drain structures and for Polygates; these doping steps are critical to the formation of PMOS transistors. The molecular cluster ions have the chemical form BnHx+ and BnHx? where 10<n<100 and 0<x<n+4.
    Type: Grant
    Filed: June 26, 2003
    Date of Patent: June 14, 2011
    Assignee: SemEquip, Inc.
    Inventors: Thomas N. Horsky, Dale C. Jacobson
  • Publication number: 20110101214
    Abstract: A sample analysis apparatus and system including an ion inlet, an ion detector and an ion focusing assembly for converging a plurality of ion streams from the ion inlet into at least one focused ion stream.
    Type: Application
    Filed: August 13, 2010
    Publication date: May 5, 2011
    Inventors: Raanan A. Miller, Erkinjon G. Nazarov, C. James Morris, Stephen Coy, Evgeny Krylov, D. Westervelt Davis
  • Publication number: 20110089321
    Abstract: A multipurpose ion implanter beam line configuration comprising a mass analyzer magnet followed by a magnetic scanner and magnetic collimator combination that introduce bends to the beam path, the beam line constructed for enabling implantation of common monatomic dopant ion species cluster ions, the beam line configuration having a mass analyzer magnet defining a pole gap of substantial width between ferromagnetic poles of the magnet and a mass selection aperture, the analyzer magnet sized to accept an ion beam from a slot-form ion source extraction aperture of at least about 80 mm height and at least about 7 mm width, and to produce dispersion at the mass selection aperture in a plane corresponding to the width of the beam, the mass selection aperture capable of being set to a mass-selection width sized to select a beam of the cluster ions of the same dopant species but incrementally differing molecular weights, the mass selection aperture also capable of being set to a substantially narrower mass-selection
    Type: Application
    Filed: November 17, 2010
    Publication date: April 21, 2011
    Applicant: Semequip, Inc.
    Inventors: Hilton F. Glavish, Thomas N. Horsky, Dale C. Jacobson, Sami K. Hahto, Masao Naito, Nobuo Nagai, Nariaki Hamamoto
  • Publication number: 20110042564
    Abstract: A laser ablation mass analyzing apparatus includes a sample stage, a laser irradiation unit, a pneumatic transport unit, an ion source, and an analyzer. The sample stage holds a hair sample to be positioned accurately, and the laser irradiation unit irradiates an optional position on the hair such as a tip of the hair to generate ablation. The elements contained in the hair atomized by the ablation are extracted by the pneumatic transport system, and reach the ion source. Neutral atoms of the elements contained in the hair are ionized in the ion source by electron beam irradiation or light irradiation, to analyze mass of the ions obtained of the elements contained in the hair, by the analyzer.
    Type: Application
    Filed: August 20, 2009
    Publication date: February 24, 2011
    Inventors: Yasuhide Naito, Manabu Heya, Naohisa Miyazaki
  • Publication number: 20110006204
    Abstract: A detector array and method for making the detector array. The detector array includes a substrate including a plurality of trenches formed therein, and a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charged particles incident on respective ones of the collectors and to output from the collectors signals indicative of charged particle collection. In the detector array, adjacent ones of the plurality of trenches are disposed in a staggered configuration relative to one another. The method forms in a substrate a plurality of trenches across a surface of the substrate such that adjacent ones of the trenches are in a staggered sequence relative to one another, forms in the plurality of trenches a plurality of collectors, and connects a plurality of electrodes respectively to the collectors.
    Type: Application
    Filed: February 24, 2009
    Publication date: January 13, 2011
    Applicant: RESEARCH TRIANGLE INSTITUTE
    Inventors: Christopher A. Bower, Kristin Hedgepath Gilchrist, Brian R. Stoner
  • Patent number: 7855365
    Abstract: A method and apparatus, such as a spectrometer, are provided for facilitating the detection of an gamma signal in a manner that effectively discriminates the gamma signal from noise. A spectrometer may be provided which includes an gamma converter for converting gamma signals which impinge thereupon into corresponding pairs of electrons and positrons. The spectrometer also includes a deflector for separately deflecting the electrons and the positrons as well as electron and positron detectors for separately detecting the deflected electrons and positrons, respectively. As such, an gamma signal can be identified in instances in which the deflected electrons and positrons are detected in coincidence.
    Type: Grant
    Filed: January 7, 2008
    Date of Patent: December 21, 2010
    Assignee: The Boeing Company
    Inventor: John L. Adamski
  • Patent number: 7855361
    Abstract: An ion detector comprises an ion guide with electrodes arranged about a first axis; a positive ion detection device with an ion inlet at a first side of the ion output section offset from and at an angle to the first axis; and a negative ion detection device with an ion inlet at a second side opposite the first side, offset from and at an angle to the first axis. A negative voltage bias applied to the positive ion device accelerates positive ions toward the inlet along a path including a component along a second axis orthogonal to the first axis. A positive voltage bias applied to the negative ion detection device accelerates negative ions toward the inlet along a path that includes a component along the second axis orthogonal to the first axis in a direction generally opposite to the path of the positive ions.
    Type: Grant
    Filed: May 30, 2008
    Date of Patent: December 21, 2010
    Assignee: Varian, Inc.
    Inventor: Urs Steiner
  • Patent number: 7847271
    Abstract: An ion implanter for manufacturing a single crystal film by extracting a hydrogen ion or a rare-gas ion from an ion source, selects a desired ion with a first sector electromagnet, scanning the ion with a scanner, collimates the ion with a second sector electromagnet, and implants it into a substrate; the ion source is configured to be located close to the entrance side focal point of the first sector electromagnet. In this case, when an aperture of an extraction section of the ion source is circular and entrance side focal points in a deflection surface and a surface perpendicular thereto in the first sector electromagnet are coincident, the ion beam after passing the first sector electromagnet becomes completely parallel in the two surfaces and the spot shape becomes a circle.
    Type: Grant
    Filed: February 15, 2007
    Date of Patent: December 7, 2010
    Assignee: Ulvac Inc.
    Inventors: Seiji Ogata, Ryota Fukui, Hidekazu Yokoo, Tsutomu Nishihashi
  • Patent number: 7842252
    Abstract: The present disclosure provides a system and method to dissociate water molecules into H2 and O2 and includes a reaction vessel having at least one radiolysis apparatus, at least one photolysis apparatus, at least one catalyst apparatus, and at least one electromagnetic fielding apparatus. The reaction vessel has a body, a first end and a second end defining an interior reaction chamber, an inlet for receiving water vapor and at least two outlets. A plurality of windings of a contiguous electrical conductor are wound in a first direction adjacent the first outlet and plurality of windings of a contiguous electrical conductor wound in a second direction adjacent the second outlet such that the first direction is opposite the second direction. When a current is applied to the conductor, an electromagnetic field is generated to migrate the disassociated H2 and O2 molecules toward the respective first outlet or second outlet.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: November 30, 2010
    Assignee: Coastal Hydrogen Energy, Inc.
    Inventor: Gary N. Austin
  • Patent number: 7772547
    Abstract: The disclosed apparatus includes a multi-reflecting time-of-flight mass spectrometer (MR-TOF MS) and an orthogonal accelerator. To improve the duty cycle of the ion injection at a low repetition rate dictated by a long flight in the MR-TOF MS, multiple measures may be taken. The incoming ion beam and the accelerator may be oriented substantially transverse to the ion path in the MR-TOF, while the initial velocity of the ion beam is compensated by tilting the accelerator and steering the beam for the same angle. To further improve the duty cycle of any multi-reflecting or multi-turn mass spectrometer, the beam may be time-compressed by modulating the axial ion velocity with an ion guide. The residence time of the ions in the accelerator may be improved by trapping the beam within an electrostatic trap. Apparatuses with a prolonged residence time in the accelerator provide improvements in both sensitivity and resolution.
    Type: Grant
    Filed: October 11, 2006
    Date of Patent: August 10, 2010
    Assignee: Leco Corporation
    Inventor: Anatoli N. Verentchikov