Electron Probe Type Patents (Class 250/310)
  • Patent number: 11982701
    Abstract: Provided is a test method comprising: preparing a plurality of groups for setting, each of which has a plurality of semiconductor devices for setting, and assigning an inspection voltage to each of the respective plurality of groups for setting; performing first testing by applying the assigned inspection voltage to the semiconductor devices for setting, and testing, at a first temperature, the plurality of semiconductor devices for setting included in each of the plurality of groups for setting; performing second testing by testing, at a second temperature different from the first temperature, a semiconductor device for setting having been determined as being non-defective and by detecting a breakdown voltage at which the semiconductor device for setting is broken; acquiring a relationship between the inspection voltage and the breakdown voltage; and setting an applied voltage used when testing a semiconductor device under test at the first temperature, based on the acquired relationship.
    Type: Grant
    Filed: August 17, 2022
    Date of Patent: May 14, 2024
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Shuhei Tatemichi, Kenichi Ishii
  • Patent number: 11982634
    Abstract: Techniques for adapting an adaptive specimen image acquisition system using an artificial neural network (ANN) are disclosed. An adaptive specimen image acquisition system is configurable to scan a specimen to produce images of varying qualities. An adaptive specimen image acquisition system first scans a specimen to produce a low-quality image. An ANN identifies objects of interest within the specimen image. A scan mask indicates regions of the image corresponding to the objects of interest. The adaptive specimen image acquisition system scans only the regions of the image corresponding to the objects of interest, as indicated by the scan mask, to produce a high-quality image. The low-quality image and the high-quality image are merged in a final image. The final image shows the objects of interest at a higher quality, and the rest of the specimen at a lower quality.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: May 14, 2024
    Assignee: FEI Company
    Inventor: Pavel Potocek
  • Patent number: 11977039
    Abstract: There is provided systems and methods for determining variability of cryo-EM protein structures from a set of cryo-electron microscope images. The method includes: performing iterative optimization, each optimization iteration including: determining the updated variability coordinates for individual images from the set of images using a current value of the variability components; determining the updated variability components for multiple images of the set of images, using the updated value of the variability coordinates, by solving a set of linear equations, the linear equations comprising a sum of weighted compositions of projection and back-projection operators, the equations are solved by arranging the equations into a block-diagonal matrix form.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: May 7, 2024
    Inventor: Ali Punjani
  • Patent number: 11955327
    Abstract: The present invention implements an ion detector with which it is possible to avoid direct collisions of negative ions with a scintillator, prevent degradation of the scintillator, prolong life of the scintillator, reduce the need for maintenance, and perform highly sensitive detection of both positive and negative ions. With respect to a reference line 65 connecting a central point 63 of a positive ion CD 52 and a central point 64 of a counter electrode 54, a central point 66 of a negative ion CD 53 is provided in a region of a side opposite to a region of a side of a central point 67 of a scintillator 56. Positive ions entering from an ion entrance 62 receive a deflection force and collide with the positive ion CD 52 to generate secondary electrons. The generated secondary electrons collide with the scintillator 56 to generate light. The generated light passes through a light guide 59 and is detected by a photomultiplier tube 58. A negative potential barrier is generated along the reference line 65.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: April 9, 2024
    Assignee: Hitachi High-Tech Corporation
    Inventors: Kiyomi Yoshinari, Masuyuki Sugiyama, Yuichiro Hashimoto, Shin Imamura
  • Patent number: 11955310
    Abstract: The invention relates to a transmission charged particle microscope comprising a charged particle beam source for emitting a charged particle beam, a sample holder for holding a sample, an illuminator for directing the charged particle beam emitted from the charged particle beam source onto the sample, and a control unit for controlling operations of the transmission charged particle microscope. As defined herein, the transmission charged particle microscope is arranged for operating in at least two modes that substantially yield a first magnification whilst keeping said diffraction pattern substantially in focus. Said at least two modes comprise a first mode having first settings of a final projector lens of a projecting system; and a second mode having second settings of said final projector lens.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: April 9, 2024
    Assignee: FEI Company
    Inventor: Peter Christiaan Tiemeijer
  • Patent number: 11948772
    Abstract: Apparatus and methods for adjusting beam condition of charged particles are disclosed. According to certain embodiments, the apparatus includes one or more first multipole lenses displaced above an aperture, the one or more first multipole lenses being configured to adjust a beam current of a charged-particle beam passing through the aperture. The apparatus also includes one or more second multipole lenses displaced below the aperture, the one or more second multipole lenses being configured to adjust at least one of a spot size and a spot shape of the beam.
    Type: Grant
    Filed: January 30, 2023
    Date of Patent: April 2, 2024
    Assignee: ASML Netherlands B.V.
    Inventor: Xuedong Liu
  • Patent number: 11927625
    Abstract: A voltage contrast defect analysis method including the following steps is provided. A voltage contrast defect detection is performed on a die to be tested by using an electron beam inspection machine to find out a defect address of a voltage contrast defect. A first scanning electron microscope image at the defect address of the die to be tested is obtained by using a scanning electron microscope. A first critical dimension of the first scanning electron microscope image at the defect address of the die to be tested is measured. The first critical dimension on the die to be tested is compared with a corresponding second critical dimension on a reference die where no voltage contrast defect occurs at the defect address to determine whether the first critical dimension and the second critical dimension are the same.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: March 12, 2024
    Assignee: Powerchip Semiconductor Manufacturing Corporation
    Inventor: Yue-Ying Yen
  • Patent number: 11901155
    Abstract: The disclosure relates to a method of aligning a charged particle beam apparatus, comprising the steps of providing a charged particle beam apparatus in a first alignment state; using an alignment algorithm, by a processing unit, for effecting an alignment transition from said first alignment state towards a second alignment state of said charged particle beam apparatus; and providing data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: February 13, 2024
    Assignee: FEI Company
    Inventors: Mykola Kaplenko, Remco Schoenmakers, Oleksii Kaplenko, Ondrej Machek
  • Patent number: 11895931
    Abstract: The invention includes methods, and the structures formed, for multi-qubit chips. The methods may include annealing a Josephson junction of a qubit to either increase or decrease the frequency of the qubit. The conditions of the anneal may be based on historical conditions, and may be chosen to tune each qubit to a desired frequency.
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: February 6, 2024
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Jared B. Hertzberg, Jason S. Orcutt, Hanhee Paik, Sami Rosenblatt, Martin O. Sandberg
  • Patent number: 11821859
    Abstract: The embodiments of the present disclosure provide various techniques for detecting backscatter charged particles, including accelerating charged particle sub-beams along sub-beam paths to a sample, repelling secondary charged particles from detector arrays, and providing devices and detectors which can switch between modes for primarily detecting charged particles and modes for primarily detecting secondary particles.
    Type: Grant
    Filed: December 22, 2021
    Date of Patent: November 21, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Marco Jan-Jaco Wieland, Albertus Victor Gerardus Mangnus
  • Patent number: 11823861
    Abstract: The invention provides a charged particle beam device that prevents a leakage of an unnecessary magnetic field to a trajectory of a charged particle beam with which a sample is irradiated in a sample observation according to a boosting method. The charged particle beam device includes: a charged particle source configured to generate the charged particle beam with which the sample is irradiated; an object lens configured to generate the magnetic field for focusing the charged particle beam; and a boosting electrode that is provided inside the object lens and to which a voltage for accelerating the charged particle beam is applied. The boosting electrode is formed of a magnetic material.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: November 21, 2023
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Yuta Imai, Junichi Katane
  • Patent number: 11810752
    Abstract: The invention provides a power supply device and a charged particle beam device capable of reducing noise generated between a plurality of voltages. The charged particle beam device includes a charged particle gun configured to emit a charged particle beam, a stage on which a sample is to be placed, and a power supply circuit configured to generate a first voltage and a second voltage that determine energy of the charged particle beam and supply the first voltage to the charged particle gun. The power supply circuit includes a first booster circuit configured to generate the first voltage, a second booster circuit configured to generate the second voltage, and a switching control circuit configured to perform switching control of the first booster circuit and the second booster circuit using common switch signals.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: November 7, 2023
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Wen Li, Hiroyuki Takahashi, Makoto Suzuki, Yuzuru Mizuhara
  • Patent number: 11810774
    Abstract: A method for making field emission devices so that they have emitter tips in the form of a needle-like point with a width and length configured such that ratio of the width to the length ranges from about 0.001 to about 0.05, and associated methods for making the tips by 3-D printing.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: November 7, 2023
    Assignee: Government of the United States as represented by the Secretary of the Air Force
    Inventors: Joseph M. Connelly, John R. Harris, John W. Lewellen
  • Patent number: 11810753
    Abstract: A method of determining aberrations of a charged particle beam (11) focused by a focusing lens (120) toward a sample (10) in a charged particle beam system is described. The method includes: (a) taking one or more images of the sample at one or more defocus settings to provide one or more taken images (h1...N); (b) simulating one or more images of the sample taken at the one or more defocus settings based on a set of beam aberration coefficients (iC) and a focus image of the sample to provide one or more simulated images; (c) comparing the one or more taken images and the one or more simulated images for determining a magnitude (Ri) of a difference therebetween; and (d) varying the set of beam aberration coefficients (iC) to provide an updated set of beam aberration coefficients (i+1C) and repeating (b) and (c) using the updated set of beam aberration coefficients (i+1C) in an iterative process for minimizing said magnitude (Ri).
    Type: Grant
    Filed: October 13, 2021
    Date of Patent: November 7, 2023
    Assignee: ICT Integrated Circuit Testing Gesellschaft f├╝r Halbleiterpr├╝ftechnik mbH
    Inventors: Dominik Ehberger, John Breuer, Matthias Firnkes
  • Patent number: 11798783
    Abstract: A charged particle assessment tool includes: an objective lens configured to project a plurality of charged particle beams onto a sample, the objective lens having a sample-facing surface defining a plurality of beam apertures through which respective ones of the charged particle beams are emitted toward the sample; and a plurality of capture electrodes adjacent respective ones of the beam apertures and configured to capture charged particles emitted from the sample.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: October 24, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventor: Marco Jan-Jaco Wieland
  • Patent number: 11798778
    Abstract: Method for investigating samples by time-series emission of cathodoluminescence (CL) microscope having electron beam and light sensor. In discovery scan, changes caused by the electron beam are unknown, in an inspection scan changes have already been identified in similar sample. Discovery scan starts by setting parameters of the electron beam to irradiate at a first rate of dose; flushing the buffer of the light sensor; scanning the electron beam over an area of interest on the sample while collecting CL emission with the light sensor, while preventing any reading of the data from the buffer until the entire scanning has been completed; once the entire scanning has been completed, blanking the electron beam and interrogating the buffer to identify a first CL image; and then interrogating the buffer to fetch all remaining CL images and tagging all fetched CL images according to time sequence starting from the first CL image.
    Type: Grant
    Filed: July 19, 2021
    Date of Patent: October 24, 2023
    Assignee: ATTOLIGHT AG
    Inventors: Christian Monachon, Matthew John Davies, Fabrice Grondin
  • Patent number: 11786595
    Abstract: A method and system for treating a subject with a disorder which provides within the subject at least one photoactivatable drug for treatment of the subject, applies initiation energy from at least one source to generate inside the subject a preferential x-ray flux for generation of Cherenkov radiation (CR) light capable of activating at least one photoactivatable drug, and from the CR light, activating inside the subject the at least one photoactivatable drug to thereby treat the disorder.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: October 17, 2023
    Assignees: IMMUNOLIGHT, LLC, DUKE UNIVERSITY
    Inventors: Mark Oldham, Justus Adamson, Mark W. Dewhirst, Paul Yoon, Harold Walder, Frederic A. Bourke, Jr., Zakaryae Fathi, Wayne F. Beyer, Jr.
  • Patent number: 11784024
    Abstract: A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another, preferably by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: October 10, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Joe Wang, Yongxin Wang, Zhongwei Chen, Xuerang Hu
  • Patent number: 11782001
    Abstract: A cathodoluminescence microscope and method are used to identify and classify dislocations within a semiconductor sample. At least two CL polarized images are concurrently obtained from the sample. The images are added together to obtain a total intensity image. A normalized difference of the images is taken to obtain a degree of polarization (DOP) image. The total intensity and DOP images are compared to differentiate between edge dislocations and screw dislocations within the sample. Edge dislocation density and screw dislocation density may then be calculated.
    Type: Grant
    Filed: November 29, 2021
    Date of Patent: October 10, 2023
    Assignee: ATTOLIGHT AG
    Inventors: Marc Fouchier, Christian Monachon
  • Patent number: 11776110
    Abstract: In a setting mode, a processor stores in a memory a reference image for pattern search, measurement location information indicating a plurality of measurement locations, and imaging setting information indicating at which magnification imaging is performed. In a measurement mode, the processor controls an imaging section, acquires a target image for pattern search, executes a pattern search on the target image using the reference image, specifies a plurality of imaging positions for imaging each of the plurality of measurement locations based on the measurement location information and a result of the pattern search, causes the imaging section to perform imaging at a magnification set for each measurement location, and measures a dimension of the measurement location.
    Type: Grant
    Filed: February 6, 2020
    Date of Patent: October 3, 2023
    Assignee: KEYENCE CORPORATION
    Inventor: Koji Takahashi
  • Patent number: 11764036
    Abstract: A gas feed device is operated, including displaying a functional parameter of the gas feed device. A gas feed device may carry out the operation, and a particle beam apparatus may include the gas feed device. A method may include predetermining and/or measuring a current temperature of a precursor reservoir of the gas feed device using a temperature measuring unit, where the precursor reservoir contains a precursor to be fed onto an object, loading a flow rate of the precursor through an outlet of the precursor reservoir from a database into a control unit, said flow rate being associated with the current temperature of the precursor reservoir, and (i) displaying the flow rate on the display unit and/or (ii) determining the functional parameter of the precursor reservoir depending on the flow rate using the control unit and informing a user of the gas feed device about the determined functional parameter.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: September 19, 2023
    Assignee: Carl Zeiss Microscopy GmbH
    Inventor: Andreas Schmaunz
  • Patent number: 11764045
    Abstract: The disclosure features systems and methods that include: exposing a biological sample to an ion beam that is incident on the sample at a first angle to a plane of the sample by translating a position of the ion beam on the sample in a first direction relative to a projection of a direction of incidence of the ion beam on the sample; after each translation of the ion beam in the first direction, adjusting a focal length of an ion source that generates the ion beam; and measuring and analyzing secondary ions generated from the sample by the ion beam after adjustment of the focal length to determine mass spectral information for the sample, where the sample is labeled with one or more mass tags and the mass spectral information includes populations of the mass tags at locations of the sample.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: September 19, 2023
    Assignee: IONpath, Inc.
    Inventors: Harris Fienberg, David Stumbo, Michael Angelo, Rachel Finck
  • Patent number: 11747292
    Abstract: The charged particle beam apparatus includes a charged particle beam optical system that irradiates a sample mounted on a sample stage with a charged particle beam; a detector that detects a signal generated from the sample; a charged particle beam imaging device that acquires an observation image from the signal detected by the detector; an optical imaging device that captures an optical image of the sample; a stage that rotatably holds the sample stage; a stage control device that controls movement and rotation of the stage; and an image composition unit that combines the plurality of optical images to generate a composite image.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: September 5, 2023
    Assignee: Hitachi High-Tech Corporation
    Inventors: Wei Chean Tan, Hiroyuki Chiba
  • Patent number: 11749497
    Abstract: A charged particle beam apparatus covering a wide range of detection angles of charged particles emitted from a sample includes an objective lens for converging charged particle beams emitted from a charged particle source and a detector for detecting charged particles emitted from a sample. The objective lens includes inner and outer magnetic paths which are formed so as to enclose a coil. A first inner magnetic path is disposed at a position opposite to an optical axis of the charged particle beams. A second inner magnetic path, formed at a slant with respect to the optical axis of the charged particle beams, includes a leading end. A detection surface of the detector is disposed at the outer side from a virtual straight line that passes through the leading end and that is parallel to the optical axis of the charged particle beams.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: September 5, 2023
    Assignee: Hitachi High-Tech Corporation
    Inventors: Shunsuke Mizutani, Shahedul Hoque, Uki Ikeda, Makoto Suzuki
  • Patent number: 11703505
    Abstract: The present invention relates to a nano-dynamic biosensor and a fabrication method therefor. A biosensor according to the present invention comprises a substrate having a hollow structure and a graphene layer formed thereon wherein a probe material is bound to the surface of the graphene layer and the resonance vibration of the hollow structure formed in the substrate is modulated as the probe material increases in weight when a target material to be detected is coupled to the probe material without being labeled, whereby the biosensor is expected to take advantage of the modulation to measure the coupling of the target material including vaccinia virus with high sensitivity on a femtogram (10?15 g) level.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: July 18, 2023
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Seung Hoon Nahm, Nam Hee Lee, Kwon Sang Ryu, Un Bong Baek
  • Patent number: 11686681
    Abstract: Disclosed herein, inter alia, are methods and systems of image analysis useful for rapidly identifying and/or quantifying features.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: June 27, 2023
    Assignee: SINGULAR GENOMICS SYSTEMS, INC.
    Inventors: Fedor Trintchouk, Eli N. Glezer
  • Patent number: 11669953
    Abstract: The purpose of the present invention is to provide a pattern matching device and computer program that carry out highly accurate positioning even if edge positions and numbers change. The present invention proposes a computer program and a pattern matching device wherein a plurality of edges included in first pattern data to be matched and a plurality of edges included in second pattern data to be matched with the first pattern data are associated, a plurality of different association combinations are prepared, the plurality of association combinations are evaluated using index values for the plurality of edges, and matching processing is carried out using the association combinations selected through the evaluation.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: June 6, 2023
    Assignee: Hitachi High-Tech Corporation
    Inventors: Wataru Nagatomo, Yuichi Abe, Mitsuji Ikeda
  • Patent number: 11650495
    Abstract: The present application relates to an apparatus for determining a position of at least one element on a photolithographic mask, said apparatus comprising: (a) at least one scanning particle microscope comprising a first reference object, wherein the first reference object is disposed on the scanning particle microscope in such a way that the scanning particle microscope can be used to determine a relative position of the at least one element on the photolithographic mask relative to the first reference object; and (b) at least one distance measuring device, which is embodied to determine a distance between the first reference object and a second reference object, wherein there is a relationship between the second reference object and the photolithographic mask.
    Type: Grant
    Filed: June 23, 2022
    Date of Patent: May 16, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Budach, Nicole Auth
  • Patent number: 11645740
    Abstract: A method for detector equalization during the imaging of objects with a multi-beam particle microscope includes performing an equalization on the basis of individual images in or on the basis of overlap regions. For detector equalization, contrast values and/or brightness values are used and iterative methods can be employed.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: May 9, 2023
    Assignee: Carl Zeiss MultiSEM GmbH
    Inventors: Dirk Zeidler, Michael Behnke, Stefan Schubert, Christof Riedesel
  • Patent number: 11594396
    Abstract: A multi-beam inspection apparatus supporting a plurality of operation modes is disclosed. The charged particle beam apparatus for inspecting a sample supporting a plurality of operation modes comprises a charged particle beam source configured to emit a charged particle beam along a primary optical axis, a movable aperture plate, movable between a first position and a second position, and a controller having circuitry and configured to change the configuration of the apparatus to switch between a first mode and a second mode. In the first mode, the movable aperture plate is positioned in the first position and is configured to allow a first charged particle beamlet derived from the charged particle beam to pass through. In the second mode, the movable aperture plate is positioned in the second position and is configured to allow the first charged particle beamlet and a second charged particle beamlet to pass through.
    Type: Grant
    Filed: March 30, 2020
    Date of Patent: February 28, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Weiming Ren, Xuedong Liu, Xuerang Hu, Zhong-Wei Chen
  • Patent number: 11569060
    Abstract: Apparatus and methods for adjusting beam condition of charged particles are disclosed. According to certain embodiments, the apparatus includes one or more first multipole lenses displaced above an aperture, the one or more first multipole lenses being configured to adjust a beam current of a charged-particle beam passing through the aperture. The apparatus also includes one or more second multipole lenses displaced below the aperture, the one or more second multipole lenses being configured to adjust at least one of a spot size and a spot shape of the beam.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: January 31, 2023
    Assignee: ASML Netherlands B.V.
    Inventor: Xuedong Liu
  • Patent number: 11562880
    Abstract: A particle beam system includes: a particle source to generate a beam of charged particles; a first multi-lens array including a first multiplicity of individually adjustable and focusing particle lenses so that at least some of the particles pass through openings in the multi-lens array in the form of a plurality of individual particle beams; a second multi-aperture plate including a multiplicity of second openings downstream of the first multi-lens array so that some of the particles which pass the first multi-lens array impinge on the second multi-aperture plate and some of the particles which pass the first multi-lens array pass through the openings in the second multi-aperture plate; and a controller configured to supply an individually adjustable voltage to the particle lenses of the first multi-lens array and thus individually adjust the focusing of the associated particle lens for each individual particle beam.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: January 24, 2023
    Assignee: Carl Zeiss MultiSEM GmbH
    Inventors: Dirk Zeidler, Hans Fritz, Ingo Mueller, Georgo Metalidis
  • Patent number: 11555779
    Abstract: The present disclosure provides a sample analyzer and an analyzing method thereof. The sample analyzer includes a first beam source configured to provide a first energy beam to a sample, a second beam source configured to provide a second energy beam, which is different from the first energy beam, to the sample, a reflected beam sensor disposed between the second beam source and the sample to detect a reflected beam of the second energy beam, which is reflected by one side of the sample, and a transmitted beam sensor disposed adjacent to the other side of the sample to detect a transmitted beam of the second energy beam.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: January 17, 2023
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Moon Youn Jung, Won Bae Cho, Dong Hoon Song, Dong-Ho Shin, Sang Kyun Lee
  • Patent number: 11536675
    Abstract: There is provided an analytical method capable of generating a high resolution spectrum of X-rays with an intended energy. The analytical method is for use in an analytical apparatus having a diffraction grating for spectrally dispersing X-rays emanating from a sample, an image sensor for detecting the spectrally dispersed X-rays, and an incident angle control mechanism for controlling the incident angle of X-rays impinging on the diffraction grating. The image sensor has a plurality of photosensitive elements arranged in the direction of energy dispersion. The analytical method starts with specifying an energy of X-rays to be acquired. The incident angle is adjusted based on the specified energy to bring the focal plane of the diffraction grating into positional coincidence with those one or ones of the photosensitive elements which detect X-rays having the specified energy.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: December 27, 2022
    Assignee: JEOL Ltd.
    Inventor: Takanori Murano
  • Patent number: 11527379
    Abstract: An objective lens arrangement includes a first, second and third pole pieces, each being substantially rotationally symmetric. The first, second and third pole pieces are disposed on a same side of an object plane. An end of the first pole piece is separated from an end of the second pole piece to form a first gap, and an end of the third pole piece is separated from an end of the second pole piece to form a second gap. A first excitation coil generates a focusing magnetic field in the first gap, and a second excitation coil generates a compensating magnetic field in the second gap. First and second power supplies supply current to the first and second excitation coils, respectively. A magnetic flux generated in the second pole piece is oriented in a same direction as a magnetic flux generated in the second pole piece.
    Type: Grant
    Filed: April 10, 2020
    Date of Patent: December 13, 2022
    Assignees: CARL ZEISS MICROSCOPY GMBH, APPLIED MATERIALS ISRAEL LTD.
    Inventors: Rainer Knippelmeyer, Stefan Schubert
  • Patent number: 11521827
    Abstract: A fast method of imaging a 2D sample with a multi-beam particle microscope includes the following steps: providing a layer of the 2D sample; determining a feature size of features included in the layer; determining a pixel size based on the determined feature size in the layer; determining a beam pitch size between individual beams in the layer based on the determined pixel size; and imaging the layer of the 2D sample with a setting of the multi-beam particle microscope based on the determined pixel size and based on the determined beam pitch size.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: December 6, 2022
    Inventors: Dirk Zeidler, Anna Lena Eberle
  • Patent number: 11508551
    Abstract: A detection and correction method for an electron beam system are provided. The method includes emitting an electron beam towards a specimen; modulating a beam current of the electron beam to obtain a beam signal. The method further includes detecting, using an electron detector, secondary and/or backscattered electrons emitted by the specimen to obtain electron data, wherein the electron data defines a detection signal. The method further includes determining, using a processor, a phase shift between the beam signal and the detection signal. The method further includes filtering, using the processor, the detection signal based on the phase shift.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: November 22, 2022
    Assignee: KLA CORPORATION
    Inventors: Henning Stoschus, Stefan Eyring, Christopher Sears
  • Patent number: 11501950
    Abstract: Provided is a technique capable of achieving both throughput and robustness for a function of adjusting brightness (B) and contrast (C) of a captured image in a charged particle beam device. The charged particle beam device includes a computer system having a function (ABCC function) of adjusting the B and the C of an image obtained by imaging a sample. The computer system determines whether adjustment is necessary based on a result obtained by evaluating a first image obtained by imaging an imaging target of the sample (step S2), executes, when the adjustment is necessary based on a result of the determination, the adjustment on a second image of the imaging target to set an adjusted B value and an adjusted C value (step S4), and captures a third image of the imaging target based on the adjusted setting values to generate an image for observation (step S5).
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: November 15, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Yohei Minekawa, Kohei Chiba, Muneyuki Fukuda, Takanori Kishimoto
  • Patent number: 11474034
    Abstract: A lateral flow test system having an optical reader, a lateral flow cartridge and a computer system is provided. The lateral flow cartridge includes a porous test strip with a reading window into the porous test strip exposing an exposed zone of the porous strip. The optical reader has a reader housing and a slot for inserting the cartridge into the reader housing. The optical reader has an illumination arrangement adapted for illuminating the exposed zone of the porous strip when the cartridge is inserted into the slot. The optical reader further has a video camera configured for acquiring a series of digital images comprising the exposed zone of the porous strip. The computer system receives sets of pixel data representing the plurality of consecutive digital images and calculates wetting progress along the length of the exposed zone of the porous strip based on the sets of pixels data.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: October 18, 2022
    Assignee: Zoetis Services LLC
    Inventors: Carl Esben Poulsen, Johan Eriksen, Martin Heller, Niels Kristian Bau-Madsen
  • Patent number: 11469076
    Abstract: An improved system and method for inspection of a sample using a particle beam inspection apparatus, and more particularly, to systems and methods of scanning a sample with a plurality of charged particle beams. An improved method of scanning an area of a sample using N charged particle beams, wherein Nis an integer greater than or equal to two, and wherein the area of the sample comprises a plurality of scan sections of N consecutive scan lines, includes moving the sample in a first direction. The method also includes scanning, with a first charged particle beam of the N charged particle beams, first scan lines of at least some scan sections of the plurality of scan sections moving towards a probe spot of the first charged particle beam. The method further includes scanning, with a second charged particle beam of the N charged particle beams, second scan lines of at least some scan sections of the plurality of scan sections moving towards a probe spot of the second charged particle beam.
    Type: Grant
    Filed: June 7, 2019
    Date of Patent: October 11, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Martinus Gerardus Maria Johannes Massen, Joost Jeroen Ottens, Long Ma, Youfei Jiang, Weihua Yin, Wei-Te Li, Xuedong Liu
  • Patent number: 11462380
    Abstract: Systems, methods, and programming are described for inspecting a substrate having a pattern imaged thereon, including obtaining a plurality of selected target locations on the substrate, the selected target locations dependent on characteristics of the pattern, scanning the substrate with a plurality of electron beamlets, wherein the scanning includes individually addressing the beamlets to impinge on the selected target locations independently, detecting a reflected or a transmitted portion of the beamlets, and generating images of the selected target locations.
    Type: Grant
    Filed: July 3, 2019
    Date of Patent: October 4, 2022
    Assignee: ASML NETHERLANDS B.V.
    Inventor: Pieter Willem Herman De Jager
  • Patent number: 11443915
    Abstract: Disclosed herein an apparatus and a method for detecting buried features using backscattered particles. In an example, the apparatus comprises a source of charged particles; a stage; optics configured to direct a beam of the charged particles to a sample supported on the stage; a signal detector configured to detect backscattered particles of the charged particles in the beam from the sample; wherein the signal detector has angular resolution. In an example, the methods comprises obtaining an image of backscattered particles from a region of a sample; determining existence or location of a buried feature based on the image.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: September 13, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Joe Wang, Chia Wen Lin, Zhongwei Chen, Chang-Chun Yeh
  • Patent number: 11443914
    Abstract: The objective of the present invention is to use brightness images acquired under different energy conditions to estimate the size of a defect in the depth direction in a simple manner. A charged-particle beam device according to the present invention determines the brightness ratio for each irradiation position on a brightness image while changing parameters varying the signal amount, estimates the position of the defect in the depth direction on the basis of the parameters at which the brightness ratio is at a minimum, and estimates the size of the defect in the depth direction on the basis of the magnitude of the brightness ratio (see FIG. 5).
    Type: Grant
    Filed: December 18, 2018
    Date of Patent: September 13, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Toshiyuki Yokosuka, Hajime Kawano, Kouichi Kurosawa, Hideyuki Kazumi
  • Patent number: 11437217
    Abstract: A method for preparing a sample for transmission electron microscopy (TEM) comprises providing a substrate having a patterned area on its surface that is defined by a particular topography. A conformal layer of contrasting material is deposited on the topography by depositing a layer of the contrasting material on a local target area of the substrate, spaced apart from the patterned area via Electron Beam Induced Deposition (EBID). The deposition parameters, the thickness of the layer deposited in the target area, and the distance of the target area to the patterned area are selected so that a conformal layer of the contrasting material is formed on the topography of the patterned area. A protective layer is subsequently deposited. The protective layer does not damage the topography in the patterned area because the patterned area is protected by the conformal layer.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: September 6, 2022
    Assignee: IMEC VZW
    Inventors: Eric Vancoille, Niels Bosman, Patrick Carolan
  • Patent number: 11415515
    Abstract: Disclosed herein, inter alia, are methods and systems of image analysis useful for rapidly identifying and/or quantifying features.
    Type: Grant
    Filed: March 24, 2022
    Date of Patent: August 16, 2022
    Assignee: Singular Genomics Systems, Inc.
    Inventors: Fedor Trintchouk, Eli N. Glezer
  • Patent number: 11417499
    Abstract: An object of the invention is to accurately correct a deviation in position or angle between observation regions in an imaging device that acquires images of a plurality of sample sections. The imaging device according to the invention identifies a correspondence relationship between the observation regions between the sample sections using a feature point on a first image, corrects a deviation between the sample sections using a second image in a narrower range than the first image, and after reflecting a correction result, acquires a third image having a higher resolution than the second image (see FIG. 6B).
    Type: Grant
    Filed: December 18, 2018
    Date of Patent: August 16, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Maasa Yano, Hiroyuki Chiba
  • Patent number: 11404243
    Abstract: A charged-particle beam microscope is provided for imaging a sample. The microscope has a vacuum chamber to maintain a low-pressure environment. A motorized stage is provided to hold and move a sample in the vacuum chamber. A charged-particle beam source generates a charged-particle beam. Charged-particle beam optics converge the charged-particle beam onto the sample. A detector is provided to detect charged-particle radiation emanating from the sample. A controller analyzes the detected charged-particle radiation to generate an image of the sample. A power supply powers at least the charged-particle beam optics and the controller. The charged-particle beam microscope weighs less than about 50 kg.
    Type: Grant
    Filed: November 24, 2020
    Date of Patent: August 2, 2022
    Assignee: Mochii, Inc.
    Inventors: Christopher Su-Yan Own, Matthew Francis Murfitt
  • Patent number: 11393657
    Abstract: An electron beam device obtains contrast reflecting an electronic state of a sample with high sensitivity. The device includes an electron optical system which emits an electron beam to a sample and detects electrons emitted from the sample; a light pulse emission system that emits a light pulse to the sample; a synchronization processing unit that samples the emitted electrons; an image signal processing unit which forms an image by a detection signal output based upon the emitted electrons detected by the electron optical system; and a device control unit for setting a control condition of the electron optical system. The device control unit sets a sampling frequency for detection sampling of the emitted electrons to be greater than a value obtained by dividing the number of emissions of the light pulse per unit pixel time by the unit pixel time.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: July 19, 2022
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Minami Shouji, Natsuki Tsuno, Toshihide Agemura
  • Patent number: 11385193
    Abstract: An object of the invention is to easily acquire images of a position corresponding among a plurality of sample sections in an imaging device that acquires images of the plurality of sample sections. The imaging device according to the invention generates a cursor for specifying a first observation region and a contour portion of a first sample section, and superimposes the cursor on a contour portion of a second sample section so as to calculate coordinates of a second observation region of the second sample section.
    Type: Grant
    Filed: May 10, 2018
    Date of Patent: July 12, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Hiroyuki Chiba, Miku Maehara, Yoshinobu Hoshino, Shigeru Kawamata
  • Patent number: 11378531
    Abstract: A method, a non-transitory computer readable medium and a system for focusing an electron beam. The method may include focusing the electron beam on at least one evaluated area of a wafer, based on a height parameter of each one of the at least one evaluated area. The wafer includes a transparent substrate. The height parameter of each one of the at least one evaluated area is determined based on detection signals generated as a result of an illumination of one or more height-measured areas of the wafer with a beam of photons. The illumination occurs while one or more supported areas of the wafer contact one or more supporting elements of a chuck, and while each one of the one or more height-measured areas are spaced apart from the chuck by a distance that exceeds a depth of field of the optics related to the beam of photons.
    Type: Grant
    Filed: February 1, 2021
    Date of Patent: July 5, 2022
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Arie Bader, Tamir Nuna