With Imaging Patents (Class 250/559.07)
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Publication number: 20150090908Abstract: Examination of a microscopic specimen is described. Height information for a respective plurality of lateral regions of the specimen is obtained from each of multiple specimen recordings, in which the height information of each specimen recording is limited to a respective height measurement range and the height measurement ranges of different specimen recordings are different. An overall image is calculated from the specimen recordings, in which overall image height information of the different specimen recordings is combined.Type: ApplicationFiled: September 29, 2014Publication date: April 2, 2015Inventors: Helmut Lippert, Nils Langholz
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Patent number: 8933401Abstract: A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.Type: GrantFiled: October 25, 2013Date of Patent: January 13, 2015Assignee: Lawrence Livermore National Security, LLCInventor: Bryan W. Reed
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Patent number: 8884608Abstract: The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.Type: GrantFiled: October 10, 2012Date of Patent: November 11, 2014Assignee: Purdue Research FoundationInventors: Corey P. Neu, Babak Ziaie, Teimour Maleki-Jafarabadi, Charilaos Mousoulis
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Patent number: 8593709Abstract: Scanner, method or computer program product, arranged to sense media color information, store predetermined color values of preselected non-printed media and storing corresponding color profiles adapted for the respective preselected media, and process sensed color values, compare a sensed color value with the predetermined color values, and select one of said color profiles based on the comparison.Type: GrantFiled: July 22, 2010Date of Patent: November 26, 2013Assignee: Hewlett-Packard Development Company, L.P.Inventors: Johan Lammens, Miguel Angel Lopez, Michel Georges Encrenaz
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Patent number: 8575581Abstract: An apparatus includes: a body including a port into which a medium is insertable; a light source that is provided in the body and illuminates when an image is read for the medium that has been inserted into the port; a guide and output unit that is optically connected to the light source, guides light emitted from the light source, and outputs the guided light into the port; a receiver that detects the output light; and a determiner that determines whether the medium has been inserted into the port based on a result of the detection. The light source also illuminates when the determiner makes the determination. A region in the port through which the light output from the light guide and output unit passes exists from one end to the other end of the port in a width direction being a longitudinal direction of the port.Type: GrantFiled: September 24, 2010Date of Patent: November 5, 2013Assignee: PFU LimitedInventor: Mikio Murosaki
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Patent number: 8489237Abstract: Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot during transfer to an intermediate station. This measurement data is then used by a second robot to perform wafer pick moves from the intermediate station with corrections to center the wafer. Wafer position correction may be performed at only one location during the transfer process. Also provided are systems and apparatuses for transferring wafers using an intermediate station.Type: GrantFiled: September 23, 2011Date of Patent: July 16, 2013Assignee: Novellus Systems, Inc.Inventors: Chris Gage, Damon Genetti
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Patent number: 8461562Abstract: Provided is a web carrier which can prevent creasing of a web by detecting a sign of creasing of a web during carriage of the web. The web carrier (1) for carrying a sheetlike web (10) by means of a plurality of rollers (2) detects the linear pattern of a waveform generated on the web (10) from an image picked up by means of a camera (imaging means) (3) using an image analysis means (73) in a controller (7), recognizes a state becoming the sign of creasing with the aid of the image and simultaneously analyzes the entering direction of the linear pattern into a guide roller (2c), drives the shaft (20c) of the guide roller (angle adjusting roller) (2c) in the direction of canceling the waveform (so that the web is not creased), and controls an alignment adjusting means (5) such that the web is not creased.Type: GrantFiled: November 21, 2007Date of Patent: June 11, 2013Assignees: Toyota Jidosha Kabushiki Kaisha, Tokai University Educational SystemInventor: Hiromu Hashimoto
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Patent number: 8431917Abstract: In one embodiment, a system includes an optical monitoring system configured to optically communicate with an interior of a rotary machine. The optical monitoring system is configured to redirect a field of view toward different regions of a component within the interior of the rotary machine while the rotary machine is in operation, and to capture an image of each region.Type: GrantFiled: December 22, 2010Date of Patent: April 30, 2013Assignee: General Electric CompanyInventors: Guanghua Wang, Jeremy Clyde Bailey, Nirm Velumylum Nirmalan, Lucy Joelle Summerville, James Peter DeLancey
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Patent number: 8415648Abstract: A non-contact, opto-electronic method to determine glass surface shape involves pattern projection in reflection from a screen. The pattern is formed of black and white or coloured squares with a central reference pattern taken as origin of the x-y axes in the subsequent quantitative analysis of the optical distortion in formed glass sheets or panels.Type: GrantFiled: February 13, 2009Date of Patent: April 9, 2013Assignee: Pilkington Group LimitedInventor: Michael R. Ehrick
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Patent number: 8399838Abstract: A system for investigating a plurality of samples having varying positions or orientations moving with respect to the system, the system including an emitter of terahertz radiation for irradiating a sample provided in a sample space; a detector of terahertz radiation configured to detect radiation reflected from said sample space; and determining means to determine if radiation reflected from said sample space is from a sample with a predetermined orientation in the sample space.Type: GrantFiled: January 23, 2009Date of Patent: March 19, 2013Assignee: TeraView LimitedInventors: Michael John Evans, Ian Stephen Gregory, Hideaki Page
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Patent number: 8253948Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.Type: GrantFiled: February 27, 2012Date of Patent: August 28, 2012Assignee: Brooks Automation, Inc.Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Patent number: 8237138Abstract: Computer-implemented systems and methods for processing image data of a process-free plate are provided according to the present disclosure. The systems and methods may, generally, include a data acquisition step/means for receiving image data using one or more channels of a imaging system, each channel functioning to image the same target region of a process-free plate using a different wavelength of light, and a data processing step/means for filtering the image data using at least one of: (i) self-filtering, (ii) Fourier shrinkage and (iii) Wavelet shrinkage. When the image data is received using a plurality of channels, the received image data may advantageously be combined so as to optimize contrast-to-noise performance. The disclosed systems and methods may advantageously perform the operations of image de-noising, contrast enhancement, and thresholding, and may further involve compensation techniques, e.g., for minimizing distortion and blurring effects.Type: GrantFiled: April 13, 2009Date of Patent: August 7, 2012Assignee: X-Rite, Inc.Inventors: Jon Kenneth Nisper, Michael J. Weber, Thomas M. Richardson
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Patent number: 8125652Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.Type: GrantFiled: December 23, 2010Date of Patent: February 28, 2012Assignee: Brooks Automation, Inc.Inventors: Paul E. Fogel, Peter van der Meulen, Forrest T. Buzan, Christopher C. Kiley
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Publication number: 20110253916Abstract: An apparatus includes: a body including a port into which a medium is insertable; a light source that is provided in the body and illuminates when an image is read for the medium that has been inserted into the port; a guide and output unit that is optically connected to the light source, guides light emitted from the light source, and outputs the guided light into the port; a receiver that detects the output light; and a determiner that determines whether the medium has been inserted into the port based on a result of the detection. The light source also illuminates when the determiner makes the determination. A region in the port through which the light output from the light guide and output unit passes exists from one end to the other end of the port in a width direction being a longitudinal direction of the port.Type: ApplicationFiled: September 24, 2010Publication date: October 20, 2011Applicant: PFU LIMITEDInventor: Mikio MUROSAKI
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Patent number: 8009871Abstract: A method and system analyzes data acquired by image systems to more rapidly identify objects of interest in the data. In one embodiment, z-depth data are segmented such that neighboring image pixels having similar z-depths are given a common label. Blobs, or groups of pixels with a same label, may be defined to correspond to different objects. Blobs preferably are modeled as primitives to more rapidly identify objects in the acquired image. In some embodiments, a modified connected component analysis is carried out where image pixels are pre-grouped into regions of different depth values preferably using a depth value histogram. The histogram is divided into regions and image cluster centers are determined. A depth group value image containing blobs is obtained, with each pixel being assigned to one of the depth groups.Type: GrantFiled: February 6, 2006Date of Patent: August 30, 2011Assignee: Microsoft CorporationInventors: Abbas Rafii, Salih Burak Gokturk
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Patent number: 7920751Abstract: An imaging system includes a two-dimensional detector having a plurality of cells wherein each cell is configured to detect energy or signal passing through an object. The imaging system includes a computer programmed to acquire imaging data for the plurality of cells, identify a cell to be corrected, based on the imaging data, interpolate Ix and Iy for the identified cell based on neighbor cells, and calculate local gradients gx and gy between the identified cell and its neighbor cells based on the interpolation. The computer is further programmed to calculate weighting factors wx and wy based on the local gradients, calculate a corrected final value I(0,0) for the identified cell, and correct the identified cell with the corrected final value.Type: GrantFiled: March 16, 2007Date of Patent: April 5, 2011Assignee: General Electric CompanyInventors: Baojun Li, Jiang Hsieh
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Patent number: 7800089Abstract: A printing system includes a platen; a photosensor including an integrated lens; a light source configured to provide light, the light source including an integrated lens; and an aperture disposed to provide a field of view, the field of view being a portion of a plane parallel to the platen, wherein reflected light from the light source passes through the aperture to the photosensor without passing through an external lens.Type: GrantFiled: February 27, 2008Date of Patent: September 21, 2010Assignee: Eastman Kodak CompanyInventors: Greg M. Burke, Brian Sinofsky, Yang Shi
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Patent number: 7795604Abstract: The present invention provides a trolley wire wear measurement device by image processing in which a line sensor is arranged vertically and upward on a roof of an inspection car so that the line sensor looks up to a trolley wire and a lighting means that illuminates the trolley wire is formed by arranging a plurality of point light sources in a straight line in a direction perpendicular to a travelling direction of the inspection car on the inspection car.Type: GrantFiled: March 29, 2007Date of Patent: September 14, 2010Assignee: Meidensha CorporationInventors: Yusuke Watabe, Makoto Niwakawa
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Patent number: 7750329Abstract: An imaging device using an array of active pixels, with a readout control for outputting from selected regions of interest is disclosed. When used to detect the positions of optically trapped objects, the fast readout rate enables fine control of the optical traps to stabilize the objects. Multiple objects can be controlled while being moved relative to each other.Type: GrantFiled: July 25, 2005Date of Patent: July 6, 2010Assignee: The Science and Technology Facilities CouncilInventors: Stanley Walter Botchway, Andrew David Ward, Renato Andrea Danilo Turchetta, Mark Prydderch, Michael Towrie
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Patent number: 7692137Abstract: A photographing section photographs a photographing object, a light-projector projects a light spot parallel to or approximately parallel to an optical axis of the photographing section onto the photographing object, and a detector detects, from an image of the photographing object photographed by the photographing section, a light spot from the light-projector reflected by the photographing object on the basis of an arrangement position of the light-projector relative to the photographing section. A reflected light spot of light projected onto a detection object can be detected with certainty, and erroneous detection of the reflected light spot, in particular, erroneous detection due to disturbance light, can be prevented at a low cost, without an increase in size of the apparatus.Type: GrantFiled: August 22, 2008Date of Patent: April 6, 2010Assignee: Fujitsu LimitedInventors: Takahiro Aoki, Soichi Hama, Mitsuaki Fukuda
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Publication number: 20090304235Abstract: The invention relates to a method of analysing or observing an object (40) along an observation direction (?, ?), characterized in that:—a substantially monochromatic incident electromagnetic wave in the form of a polarized plane wave (E+) is directed towards the object,—an image of the object is captured, said image possibly being a point image, resulting from the electromagnetic wave (A(?, ?)) that may be specular, scattered or diffracted by at least one interface or a volume of the object illuminated by the incident wave, in the observation direction,—a retarder (43) with adjustable retardation and an analyser (44) whose orientation is adjustable are disposed in succession in the path of the wave (A(?, ?)), between an imaging sensor (45) and the object observed,—the retardation (??*(?, ?)) of the retarder and the orientation (?(?, ?)) of the analyser are adjusted so as to minimize—or even cancel—a part g(A) of the wave (A(?, ?)) filtered by the retarder and the analyser.Type: ApplicationFiled: December 19, 2006Publication date: December 10, 2009Inventors: Claude Amra, Carole Deumie, Frederic Chazallet
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Publication number: 20090294701Abstract: When reading the first document sheet, light intensity reference data is acquired by sampling a white reference plate while acquiring light intensity reference auxiliary data indicative of the light intensity of a light source lamp by sampling an auxiliary white reference plate. Then, just before reading the second or subsequent sheet, the auxiliary white reference plate is sampled to acquire the latest light intensity auxiliary data, followed by calculating the change amount from the light intensity reference auxiliary data. The change amount is used to correct the light intensity reference data separately for each picture element by referring to the profile data in which is stored the change amount of the sample value of each picture element corresponding to the change amount of the light intensity, followed by performing the shading compensation. By this configuration, it is possible to perform shading compensation in correspondence with the actual light intensity reduction.Type: ApplicationFiled: May 22, 2009Publication date: December 3, 2009Applicant: RISO KAGAKU CORPORATIONInventors: Takashi Ebisawa, Yukio Yoshikawa
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Publication number: 20090279095Abstract: Provided is an imaging optical unit used in an image reading apparatus for imaging image information on a photoelectric conversion element. The imaging optical unit includes a case and an imaging optical system having multiple reflecting members housed and disposed in the case. The reflecting member has a mirror surface for detecting assembly performance in the case on a side opposite to an optical surface for performing an imaging action. A light beam from a light source unit is projected to the mirror surface of the reflecting member and reflection light from the mirror surface is used for detecting one of a shift of posture and a distortion of the reflecting member.Type: ApplicationFiled: May 5, 2009Publication date: November 12, 2009Applicant: CANON KABUSHIKI KAISHAInventor: Seiichiro Mori
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Patent number: 7614716Abstract: A method of discriminating a type of recording medium and a discriminating apparatus in which the type of recording medium is discriminated based on a temperature change of the recording medium when the recording medium is heated. A type of recording medium is discriminated based on a phase difference between a pulse signal input to a heating device and a pulse signal output by a detecting device detecting a temperature of a recording medium.Type: GrantFiled: December 16, 2004Date of Patent: November 10, 2009Assignee: Canon Kabushiki KaishaInventor: Taku Higashiyama
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Patent number: 7601978Abstract: Fabric wrinkles are automatically evaluated using a reliable, accurate, affordable, and efficient system. Two algorithms are used, the facet model algorithm and the plane-cutting algorithm, to extract features for evaluating wrinkles in fabrics. These algorithms eliminate the need for independent evaluation of a fabric specimen by a technician.Type: GrantFiled: April 11, 2003Date of Patent: October 13, 2009Inventors: Hamed Sari-Sarraf, Eric Hequet, Christopher N. Turner, Aijun Zhu
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Publication number: 20090218525Abstract: A rod-shaped light guide which does not cause unevenness in color at the portion near an incident face is produced by injection-molding transparent resin such as acryl and its surfaces include a light-emitting surface, a bottom face, left and right sides and end faces. One end face opposes a light emitting unit, and light scattering patterns for scattering light incident from the end face are formed on the bottom face. The light scattering patterns are different in shape between a portion near the end face as the incident face and a portion away from the end face.Type: ApplicationFiled: April 28, 2006Publication date: September 3, 2009Applicant: Nippon Sheet Glass Company, LimitedInventors: Makoto Ikeda, Hiroyuki Nemoto, Takashi Kishimoto, Takeshi Ishimaru, Hirohiko Iwase, Hidemitsu Takeuchi, Tomihisa Saito
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Patent number: 7560718Abstract: In the case of a method for sensing a marking (2) of a running web of material (3), the web of material is optically scanned by an image recording device (6). This generates in successive measuring cycles image signals which are fed to an image processing device (7). This image processing device (7) determines the positional values of the marking (2) of the web of material (3). A validity signal is generated from these positional values by applying a position-dependent weighting function and is output. This validity signal indicates whether the currently determined positional value is valid.Type: GrantFiled: June 30, 2006Date of Patent: July 14, 2009Assignee: Texmag GmbH Vertriebsgesellschaft.Inventors: Andrea Wittmann, Juergen Eisen, Martin Zeh, Dominik Schild, Peter Sander
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Patent number: 7547884Abstract: In the present invention, the structure of an electrification control electrode is changed from a grid type to a slit type and thereby shadows are not formed when a wafer is irradiated with a beam. Further, a beam forming slit is disposed ahead of an electrification control slit, thus the electrification control slit is prevented from being irradiated with an electron beam for preliminary electrification, and thereby secondary electrons which disturb the control of the electrification are inhibited from being generated. The shape of the slit is designed so that the strength of an electron beam may gradually decrease toward both the ends of an electron beam irradiation region in the longitudinal direction thereof. Furthermore, a preliminary static eliminator to remove or reduce the unevenness in an electrification potential distribution which has undesirably been formed earlier is disposed.Type: GrantFiled: June 9, 2006Date of Patent: June 16, 2009Assignee: Hitachi High-Technologies CorporationInventors: Masaki Hasegawa, Hiroshi Makino, Hikaru Koyama, Zhaohui Cheng, Hisaya Murakoshi
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Patent number: 7538334Abstract: An apparatus, system and method for targeting an image formed on an imaging member. The imaging member includes an imaging sensitive layer formed thereon. The imaging member includes imaged and non-imaged areas. Light of a predetermined wavelength reflected from a target area of the imaging member is received. The light reflected from the target area is representative of an image formed on the imaging sensitive layer using energy at approximately the predetermined wavelength. The predetermined wavelength is suitable to initiate crosslinking of the imaging sensitive layer.Type: GrantFiled: September 8, 2006Date of Patent: May 26, 2009Assignee: X-Rite, Inc.Inventors: Bernard J. Berg, Peter G. Vander Jagt, Rob Kuschinsky, Chris Lafontaine, Jon K. Nisper, Michael J. Weber
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Publication number: 20090121163Abstract: An apparatus for detecting overlapping flat objects, wherein each object has flat sides and narrow sides, includes a doubles detector configured to derive at least one feature of an object, a first imaging unit configured to produce an electronic image of a first flat side of the object, and a second imaging unit configured to produce an electronic image of a second flat side of the object. A determination facility of the apparatus is coupled to the first imaging unit and the second imaging unit to receive the electronic images, and to derive at least one further feature of the object. Further, a decision facility of the apparatus is coupled to the doubles detector and the determination facility to receive the least one feature and the at least one further feature of the object, and to determine whether the object is a single object or a number of objects.Type: ApplicationFiled: April 8, 2008Publication date: May 14, 2009Applicant: Siemens AktiengesellschaftInventors: Georg Kinnemann, Svetlozar Delianski, Andre Rompe
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Patent number: 7516628Abstract: An on-line thickness gauge (OLTG) and method are described herein that are capable of measuring a thickness of a moving glass substrate. In the preferred embodiment, the OLTG includes a Y-guide and a stabilizing unit that respectively captures and stabilizes the moving glass substrate. The OLTG also includes a laser instrument which contains a laser source and a detector. The laser source emits a beam at the front surface of the moving glass substrate. And, the detector receives two beams one of which was reflected by the front surface of the moving glass substrate and the other beam which was reflected by the back surface of the moving glass substrate. The OLTG further includes a processor that analyzes the two beams received by the detector to determine a distance between the two beams which is then used to determine the thickness of the moving glass substrate.Type: GrantFiled: January 11, 2005Date of Patent: April 14, 2009Assignee: Corning IncorporatedInventors: Kenneth C. Chen, Edward J. Lenhardt, Daniel Y. K. Ma, Jeffrey C. McCreary, James P. Terrell, Jr.
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Patent number: 7505619Abstract: A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each inspection point is captured as image data by a photo detector array arranged at a fourier plane. The images captured are adaptively filtered to remove a portion of the bright pixels from the images to generate filtered images. The filtered images are then analyzed to detect defects in the inspection surface. Methods of the invention include using die-to-die comparison to identify bright portions of scattering patterns and generate unique image filters associated with those patterns. The associated images are then filtered to generate filtered images which are then used to detect defects. Also, data models of light scattering behavior can be used to generate filters.Type: GrantFiled: December 20, 2005Date of Patent: March 17, 2009Assignee: KLA-Tencor Technologies CorporationInventors: Evan R. Mapoles, Grace H. Chen, Christopher F. Bevis, David W. Shortt
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Patent number: 7427767Abstract: An apparatus for identifying the condition of a conveyor belt (6) has a capturing device (12) which can be used to capture two-dimensional images (B) of successive belt sections (15) of the conveyor belt (6) during operation of the conveyor belt (6). The capturing device (12) and the evaluation device (13) have a data-processing connection, so that the captured images (B) can be transmitted to the evaluation device (13). The evaluation device (13) compares the images (B) transmitted to it with two-dimensional reference images (R) which are associated with the belt sections (15), determines at least one statement about the condition of the belt on the basis of the comparison, and outputs the statement about the condition of the belt.Type: GrantFiled: November 22, 2006Date of Patent: September 23, 2008Assignee: Siemens AktiengesellschaftInventor: Jean-Claude Kemp
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Publication number: 20080169438Abstract: An identification device operable to identify a type of a recording medium includes an irradiation unit configured to irradiate the recording medium with light, a reading unit configured to read the light that is irradiated from the irradiation unit and that is reflected from the recording medium to obtain an image, a processing unit configured to process the image obtained by the reading unit to output a plurality of pixel data items each having a light intensity value, a calculation unit configured to calculate a value representing amounts of change by which the light intensity values of the plurality of pixel data items continuously increase and decrease, and an identification unit configured to identify the type of the recording medium on the basis of the value representing the amounts of change calculated by the calculation unit.Type: ApplicationFiled: January 11, 2008Publication date: July 17, 2008Applicant: CANON KABUSHIKI KAISHAInventor: Takuma Murata
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Publication number: 20080135788Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.Type: ApplicationFiled: February 15, 2008Publication date: June 12, 2008Inventor: Paul E. Fogel
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Publication number: 20080128644Abstract: A fault detection and classification method is disclosed that uses raw back-focal-plane image data of radiation from a substrate surface, detected by a scatterometer detector, to determine a variation in the raw data and correlate the variation in the raw data with a possible fault in a lithographic apparatus or a process that patterned the substrate surface. The correlation is carried out by comparing the variation in the raw data with known metrology data. Once a fault has been determined, a user may be notified of the fault.Type: ApplicationFiled: November 30, 2006Publication date: June 5, 2008Applicant: ASML NETHERLANDSInventors: Everhardus Cornelis Mos, Arie Jeffrey Den Boef, Maurits Van Der Schaar, Thomas Leo Maria Hoogenboom
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Patent number: 7321108Abstract: A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part of an optical train of an imaging mechanism, a sensor for measuring a distance to the target surface, and a mechanism for modifying the depth of focus of the objective, prism or other optical device. Data from the sensor may be used to create a predictive model of the target surface. Data from the sensor is also used to fit or correlate the generated model to an exemplary target. Data from the correlated model is used to drive the mechanism for modifying the depth of focus of the objective, prism, or other optical device to maintain the surface of the exemplary target in focus.Type: GrantFiled: January 22, 2007Date of Patent: January 22, 2008Assignee: Rudolph Technology, Inc.Inventors: Cory Watkins, Mark Harless, David Vaughnn, Pat Simpkins, Shaileshkumar Goyal, Gerald Brown, Brian Delsey
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Patent number: 7196300Abstract: A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part of an optical train of an imaging mechanism, a sensor for measuring a distance to the target surface, and a mechanism for modifying the depth of focus of the objective, prism or other optical device. Data from the sensor may be used to create a predictive model of the target surface. Data from the sensor is also used to fit or correlate the generated model to an exemplary target. Data from the correlated model is used to drive the mechanism for modifying the depth of focus of the objective, prism, or other optical device to maintain the surface of the exemplary target in focus.Type: GrantFiled: July 11, 2005Date of Patent: March 27, 2007Assignee: Rudolph Technologies, Inc.Inventors: Cory Watkins, Mark Harless, David Vaughnn, Pat Simpkins, Shaileshkumar Goyal, Gerald Brown, Brian Delsey
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Patent number: 7189984Abstract: An apparatus providing a light-emitting unit for emitting a first light beam to an object and an imaging unit for capturing a first image representing the profile of the first light beam on the surface of the object and a second image representing the spectrum of the reflected first light beam.Type: GrantFiled: June 13, 2005Date of Patent: March 13, 2007Assignee: Canon Kabushiki KaishaInventor: Yasuhiro Sawada
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Patent number: 7176433Abstract: A method and apparatus for improving system resolution for a defect line scanner while not increasing aliasing effects, or alternatively to maintain system resolution for a defect scanner while decreasing aliasing effects. This is accomplished by decreasing effective pixel size for a CCD array defect line scanner while not decreasing signal-to-noise ratio, with minimal changes to the current machine. The method utilizes a sampling phase shift between successive lines of a multi-line sensor array during scanning.Type: GrantFiled: November 17, 2004Date of Patent: February 13, 2007Assignee: KLA-Teacor Technologies CorporationInventor: Eliezer Rosengaus
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Patent number: 7166856Abstract: An apparatus and method to inspect a display panel that can correctly detect a defect of the display panel itself. In the method of inspecting the display panel, a first image is captured from the display panel in a state in which no pattern is applied to the display panel. Light is then irradiated on the display panel in a state in which a pattern is applied to the display panel, and a second image is captured from the display panel. The first image can be compared with the second image, and a determination can be made as to whether or not a defect of the display panel is present.Type: GrantFiled: September 13, 2004Date of Patent: January 23, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Sue Jin Cho, Hyung Sun You, Jang Hee Lee
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Patent number: 7164145Abstract: An image-based technique that measures the orientation of fibers in a moving web of nonwoven material. At least four light spots on one side of the web are illuminated essentially simultaneously with at least four plane-polarized incident substantially perpendicular light beams having different polarization characteristics. Dispersion of the excident light spots is measured on the opposite side of the web along at least one linear section which is at a known angle relative to the plane of polarization of the corresponding plane-polarized incident light beam, wherein at least one such linear section lies substantially across the center of the transmitted excident light spot and extends substantially across the width of the transmitted excident light spot. Variations in the dispersion of the transmitted excident light spot for the at least four plane-polarized light beams are calculated, and the fiber orientation is estimated from the variations.Type: GrantFiled: May 12, 2005Date of Patent: January 16, 2007Assignee: Honeywell International Inc.Inventor: John F. Shakespeare
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Patent number: 7164476Abstract: An apparatus and method are disclosed for scanning and detecting defects in sewer and similar pipelines that eliminate the need to stop and pan-and-tilt areas of concern. In the method of the invention, a pipeline (15) inspection probe (10) of the apparatus of the invention comprising a CCD camera (14) with fish-eye lens (12) travels through the pipeline (15) on a self-propelled tractor automatically collecting data and transmitting it to a computer to provide a real-time display of the pipeline (15) interior with quasi three-dimensional information for effective and quick data analysis and management. The data includes digitized forward views and unfolded 360 degree laid-flat side-san (22) views of the pipeline (15) interior. Additionally, the digitized data may be stored for further analysis, tabulation, and for use with pipeline infrastructure maintenance software.Type: GrantFiled: May 30, 2001Date of Patent: January 16, 2007Assignee: OYO Corporation U.S.A.Inventors: Hiromasa Shima, Kenzi Karasaki, David Thomas Iseley, Toru Goebuchi, Ko Sano, Hiroyuki Iinuma
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Patent number: 7145160Abstract: A method and an apparatus to determine a class of a medium on which an image is formed. The method includes emitting light to the medium; sensing the light affected by the medium; collecting a first predetermined number of features which are represented by a relationship between a parameter and an intensity of the light and determining the class of the medium using the collected features. One of a light emitting part and a light receiving part move to emit or sense the light, respectively, and the parameter varies with the movement of the light emitting part or the light receiving part.Type: GrantFiled: August 4, 2004Date of Patent: December 5, 2006Assignee: Samsung Electronics Co., Ltd.Inventor: Young-sun Chun
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Patent number: 6838687Abstract: The present invention is a method and device for identifying recording media in a printer. The invention utilizes fine structure of the media revealed by illumination from one or more directions to distinguish among different kinds of plain papers, coated papers, such as glossy papers, and transparency films. Multiple light sources at different incidence and/or orientation angles apply light on the test surface, and scattered light is converted into signals and then analyzed. Various metric and analysis techniques can be applied to the signals to determine the media type.Type: GrantFiled: April 11, 2002Date of Patent: January 4, 2005Assignee: Hewlett-Packard Development Company, L.P.Inventors: Barclay J. Tullis, Ross R. Allen, Carl Picciotto, Jun Gao
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Patent number: 6815701Abstract: A method and a device for measuring wear on the internal surfaces (12) of barrels (1), in particular weapon barrels. For a very precise determination of the wear on the internal surfaces (12) of barrels (1), a non-contacting scanning of the internal surface (12) of the respective barrel (1) to be checked is carried out with a light-spot triangulation sensor (6), to determine the respective distance between the internal surface (12) and the barrel axis (7) for selected sensor positions. The contour of the internal surface (12) of the respective barrel (1) is then determined from the detected distance changes. It has proven advantageous if the measured distance values are displayed on a monitor (23) in the form of a C-image, wherein different distance ranges are characterized with different colors, so that faulty surface areas can immediately be recognized optically.Type: GrantFiled: March 6, 2003Date of Patent: November 9, 2004Assignee: Rheinmetall W&M GmbHInventors: Gert Schlenkert, Horst Reckeweg, G{overscore (o)}ran Vogt
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Publication number: 20040129901Abstract: An optical object identification apparatus has a light emitting-side optical system (23), a light receiving-side optical system (26), and a signal processing section (29). The light emitting-side optical system (23) irradiates light from a light emitting device (21) via an objective lens (22) to a moving target object (27) such as printing paper sheets. The light receiving-side optical system (26) receives reflected light from the target object by means of the light receiving device (25) via an objective lens (24), and outputs an output signal with a waveform corresponding to the surface projections and depressions of the target object (27). The signal processing section (29) executes signal processing on the output signal by at least one signal processing method to identify the target object.Type: ApplicationFiled: December 3, 2003Publication date: July 8, 2004Applicant: Sharp Kabushiki KaishaInventors: Akifumi Yamaguchi, Hisakazu Sugiyama
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Patent number: 6747697Abstract: An adaptive median filter (40) provides dynamic detection and correction of digital image defects which are caused by defective or malfunctioning elements of a radiation detector array (20). The adaptive median filter receives (100) lines of pixel values of a digital image that may have defects and a user-defined defect threshold. The lines of pixel values are scanned on a pixel-by-pixel basis using a kernel of n×n pixels, where the kernel contains the candidate pixel being examined (120). Each kernel is numerically reordered (130) and a median value is calculated (140). A defect threshold value is calculated by multiplying the user-defined defect threshold criteria and the candidate pixel value (150). A reference value is calculated by subtracting the candidate pixel value and the median value (160). The reference value is compared to the defect threshold value (170).Type: GrantFiled: July 12, 2000Date of Patent: June 8, 2004Assignee: Koninklijke Philips Electronics, N.V.Inventors: Zhongmin Steve Lin, David Nicolay, Hung Yuet Wong
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Patent number: 6614533Abstract: A spectroscopic image input system has an image data capturing apparatus for capturing the image data of an object by using a two-dimensional image-sensing device, a spectrum data obtaining apparatus for obtaining the spectrum data of the object within a smaller area and with higher wavelength resolution than the image data capturing apparatus, and a determination section for determining a portion of the object in which to obtain the spectrum data on the basis of the image data captured. Thus, this spectroscopic image input system captures the image data and obtains the spectrum data automatically.Type: GrantFiled: March 17, 2000Date of Patent: September 2, 2003Assignee: Minolta Co., Ltd.Inventor: Yoshiaki Hata
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Patent number: 6590221Abstract: An on-line measuring system for measuring a thickness of a transferred substrate includes a first image detector, a second image detector, an elevator, and a display device. After the first image detector indicates a vertical variation of a bottom surface of the substrate, the second image detector captures an image of the bottom surface of the substrate. The elevator perpendicularly moves the second image detector with respect to the bottom surface of the glass substrate, depending on the vertical variation of the bottom surface, such that a vertical distance between the bottom surface and the second image detector remains constant. Then, a controller processes the image of the bottom surface to calculate a distance between opposite edges of the bottom surface, thereby obtaining a thickness of the substrate.Type: GrantFiled: December 5, 2001Date of Patent: July 8, 2003Assignee: Samsung Corning Co., Ltd.Inventors: Jong Eun Ha, Taek Cheon Kim, Ju Yeol Baek, Jae Seok Choi, Jang Soo Choi