Abstract: Size distribution of elongated objects is measured by forward scattering radiation from the objects at a range of scatter angles. The scattered radiation is refracted to locations on a scatter detector based on the scatter angles and independent of the location of the objects along the radiation axis. The intensity of radiation is sensed at each position on the scatter detector, and signals representative of the intensities at the positions are processed and compared to masks to identify a size distribution. The scatter detector may include individual radiation detectors arranged to receive refracted radiation representing respective ranges of scatter angles to thereby compensate for lower radiation intensities scattered from smaller objects.

Abstract: An inspection apparatus for inspecting a resist boundary on a substrate having an outer surrounding portion, includes: an illumination unit which illuminates the outer surrounding portion of the substrate; a detector which detects light reflected from the outer surrounding portion; and a judgment unit which judges, based on light intensity of the detected reflected light, whether a resist removal width is proper.

Abstract: An optical inspection system comprises an optical system for providing an image of an object being inspected. The optical system comprises a plurality of lenses arranged along a normal optical axis, one of the lenses including an objective lens. A collimated laser beam is directed to one edge portion of the objective lens toward the object to illuminate the object with a spot. A focus lens focuses the spot reflected from the object and transmitted through an opposite edge portion of said objective lens onto a linear detector, whereby the location of the spot on the linear detector provides the position of the object above or below a reference plane.

Abstract: In the automatic analyzer, the height of the test tubes is measured using the function of the optical information reader installed for discrimination of a sample. Various sensors installed so as to measure the height of the test tubes of the automatic analyzer can be omitted and decrease in cost, improvement of reliability, and improvement of maintenance capacity result.

Abstract: A system for measuring diameter (inner and/or outer) of a tubular, the system in at least certain aspects including at least one linear distance measuring device with respect to which a tubular to be measured is movable, the at least one linear distance measuring device including a detector for detecting a surface of the tubular, the detector movably mounted to mount apparatus, the detector movable longitudinally along the surface of the tubular and movable axially in response to variation in diameter of the tubular, a rotatable head rotatable with respect to the tubular either outside of it or within it, the mount apparatus secured to the rotatable head, at least one signal production apparatus secured to the mount apparatus or head, and in communication with the linear distance measuring device, the at least one signal production apparatus for producing a signal indicative of distance between said detector and a known point, and transmitting apparatus for transmitting said signals to processing equipment fo

Abstract: A method for estimating a property of a selected feature on a photolithographic mask includes providing a model of an image-acquisition system. The model includes information indicative of the characteristics of the image-acquisition system. The image-acquisition system is used to obtain a measured signal representative of the selected feature. On the basis of the measured signal, and the information provided by the model, a value of the property is estimated for the selected feature.

Abstract: A method and a device for measuring wear on the internal surfaces (12) of barrels (1), in particular weapon barrels. For a very precise determination of the wear on the internal surfaces (12) of barrels (1), a non-contacting scanning of the internal surface (12) of the respective barrel (1) to be checked is carried out with a light-spot triangulation sensor (6), to determine the respective distance between the internal surface (12) and the barrel axis (7) for selected sensor positions. The contour of the internal surface (12) of the respective barrel (1) is then determined from the detected distance changes. It has proven advantageous if the measured distance values are displayed on a monitor (23) in the form of a C-image, wherein different distance ranges are characterized with different colors, so that faulty surface areas can immediately be recognized optically.

Abstract: Methods of measuring widths of illumination spots and distances between two points, and predicting detected signal widths are provided. Systems, software, and kits for performing the methods of the invention are also provided.

Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, critical dimension and a presence of defects. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.

Abstract: An apparatus for determining measurements of an object moving along a conveyor path having a support surface is provided. The apparatus includes an object detector located along the conveyor path which is adapted to detect the leading edge of the object and generate a leading edge signal. An object speed detector is located along the conveyor path and is adapted to generate an object speed signal. A light source is located above the conveyor path and generates a light beam having a sharp edge which extends across the support surface in a direction transverse to a direction of movement of the object to define a light beam intersect path on the support surface. The light beam is arranged at a fixed angle of incidence of less than 90° relative to the support surface.

Abstract: The present invention provides a wheel measurement method and system to measure an attribute of a wheel. Light illumination devices and light sensing devices provide wheel data. A computer then performs a calculation on the wheel data to measure the attribute of the wheel.

Abstract: Apparatus for measuring an object (4) with at least one rectilinear edge or profile (4a, 4b) parallel to a given direction (y), comprising: a laser source (1) which emits radiation (2, 2a) which impinges on the said edge or profile; a first cylindrical converging lens (5) the directrices of which are parallel to the direction (y), disposed downstream of the object (4); a spatial filter (6) disposed in the focal plane (A) of the first converging lens (5); a second converging lens (7) disposed downstream of the spatial filter (6); and photosensors (8) disposed in the focal plant (F) of the second converging lens (7).

Abstract: An upper stem diameter measurement (“USDM”) and basal area determination device for timber cruising operations incorporates a viewing window in which are projected variable, visual brackets for manual alignment by the user, or automatic setting under processor section control, with the left and right sides of a target tree stem or trunk. The device further includes a built-in inclinometer such that computations of height and stem diameter can be automatically adjusted depending on the user's line of sight with respect to a horizontal plane. In a preferred embodiment, a user actuatable keypad is provided for inputting data, such as a desired operational mode, a specified basal area factor and the like, a user viewable display as well as control buttons for adjusting the visual brackets and indicating an acceptance of various of the device parameters and operational characteristics.

Abstract: The assessment of the effects of yarn faults is carried out by simulating the fabric image. In a first step, the yarn is examined by a measuring member for parameters associated with the volume and/or the surface. In a second step, these parameters are converted into grey values or color values, and these values are assigned to image spots. Finally, the image spots are reproduced on a video display unit and/or a printer. An image is generated thereby, representing a simulation of a woven or knitted fabric produced from the examined yarn.

Abstract: A method and a device for measuring wear on the internal surfaces (12) of barrels (1), in particular weapon barrels. For a very precise determination of the wear on the internal surfaces (12) of barrels (1), a non-contacting scanning of the internal surface (12) of the respective barrel (1) to be checked is carried out with a light-spot triangulation sensor (6), to determine the respective distance between the internal surface (12) and the barrel axis (7) for selected sensor positions. The contour of the internal surface (12) of the respective barrel (1) is then determined from the detected distance changes. It has proven advantageous if the measured distance values are displayed on a monitor (23) in the form of a C-image, wherein different distance ranges are characterized with different colors, so that faulty surface areas can immediately be recognized optically.

Abstract: The invention discloses a scanning method and apparatus for distinguishing size of image object automatically, which is applied in a procedure for pre-scanning an image object executed by an optical scanner. Wherein, after the pre-scanning procedure, the size of the image object may be obtained immediately, and the procedure of image picking-up may be automated by the method provided by the invention. Further, the invention provides a scaled pattern that is designed in the optical apparatus, thereby a quantified relationship of scale between the scaled pattern and the image object may be obtained. Furthermore, the quantified relationship of scale may be applied for calculating out the size of the image object by using the designation of several patterns relatively. Wherein, the quantified relationship and the relative size of image object may be calculated by predetermined design, and the variation of brilliance may also be calculated during the pre-scanning procedure.

Abstract: An apparatus for determining measurements of an object moving along a conveyor path having a support surface is provided. The apparatus includes an object detector located along the conveyor path which is adapted to detect the leading edge of the object and generate a leading edge signal. An object speed detector is located along the conveyor path and is adapted to generate an object speed signal. A light source is located above the conveyor path and generates a light beam having a sharp edge which extends across the support surface in a direction transverse to a direction of movement of the object to define a light beam intersect path on the support surface. The light beam is arranged at a fixed angle of incidence of less than 90° relative to the support surface.

Abstract: A method and an apparatus are provided for automatically determining an area-related cell density of a cell structure of a honeycomb body having a plurality of passages that are open-ended at an end of the honeycomb body at which the cell structure is visible. An image which has a known or ascertainable image scale of at least a portion of the cell structure is recorded with an optical instrument and the image is processed. In the image processing operation the number of cells is established by counting cells and the cell density is calculated by relating the number of cells to a reference area established through the use of the image scale. The cell density can be rapidly and accurately determined in such a way particularly when using computer-aided image processing. Therefore, production errors can be quickly detected and costs can be saved in that manner.

Abstract: An apparatus for determining a cross-sectional area of an object. The apparatus includes a plurality of radiant energy sources, a plurality of radiant energy detectors oriented to receive radiant energy emitted by the plurality of radiant energy sources, a strobing module in communication with the plurality of radiant energy sources for strobing the plurality of light sources, and a profile determination module in communication with the plurality of radiant energy sources and the strobing module for determining the cross-sectional area of an object disposed between the plurality of radiant energy sources and the plurality of radiant energy detectors.

Abstract: The method is disclosed for checking the accuracy of folding a parallelepiped box made from a cardboard blank (1) comprising four adjacent panels (Pa, Pb, Pc, Pd), at least some edges of the panels being associated with flaps (Ra1, Ra2, Rb1, Rb2, Rc1, Rc2, Rd1, Rd2) for closing the top and bottom surfaces of the box. Slots (5, 6) with parallel edges are formed between the adjacent flaps. In the method, the spacing between the edges of the slots (5, 6), produced between the flaps (Ra1, Rd1 Ra2, Rd2) when the outer panels are folded together, is compared with a predetermined standard spacing between the edges of the slots (5, 6) to determine whether the folded box is defective.

Abstract: An inspection system for evaluating rotationally asymmetric workpieces for conformance to configuration criteria having a track for causing the workpieces to translate through a test section, the test section including a plurality of electromagnetic energy sources, the plurality of electromagnetic energy sources oriented with respect to the track means such that the workpieces occlude the plurality of electromagnetic energy sources upon passing through the test section, the test section further having electromagnetic energy detectors for receiving the electromagnetic energy to provide output signals related to the intensity of the occluded electromagnetic energy incident on the electromagnetic energy detectors, and a signal processing means for receiving said output signals.

Abstract: A method for the contactless measuring of strand-like yarn material as well as to a device for carrying out the method. Textile material 4is irradiated within a measuring range of at least one ray source 1 and imaged on a sensor range of a receiving device 10 comprising sensor cells 8, 11, 12, 14. The signals generated by the individual sensor cells 8, 11, 12, 14 are converted into measured values for the dimensions of material to be measured 4. The signals of the sensor cells 12, 14 covered only partially by the image of the textile material 4 are taken into account in the measured result in a pro rata manner proportional to the amount of the covering.