Measuring Dimensions Patents (Class 250/559.19)
  • Patent number: 10309438
    Abstract: An Internet of Thing (IoT) device includes a head portion; an elongated stress sensor coupled to the head portion, the stress sensor coupled to a surface; a processor coupled to the stress sensor; and a wireless transceiver coupled to the processor.
    Type: Grant
    Filed: April 7, 2018
    Date of Patent: June 4, 2019
    Inventors: Bao Tran, Ha Tran
  • Patent number: 10310388
    Abstract: Disclosed is a process monitoring method, and an associated metrology apparatus. The method comprises: comparing measured target response spectral sequence data relating to the measurement response of actual targets to equivalent reference target response sequence data relating to a measurement response of the targets as designed; and performing a process monitoring action based on the comparison of said measured target response sequence data and reference target response sequence data. The method may also comprise determining stack parameters from the measured target response spectral sequence data and reference target response spectral sequence data.
    Type: Grant
    Filed: January 19, 2018
    Date of Patent: June 4, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Adam Urbanczyk, Hans Van Der Laan, Grzegorz Grzela, Alberto Da Costa Assafrao, Chien-Hung Tseng, Jay Jianhui Chen
  • Patent number: 10277832
    Abstract: An image processing method for processing a plurality of images is provided. The image processing method includes: acquiring a plurality of first images, each of the plurality of first images taken with each of a plurality of imaging devices; acquiring first imaging clock times, each of the first imaging clock times corresponding to each of the plurality of first images; selecting a plurality of second images from the plurality of first images; and generating an image set constructed with the plurality of second images. Each of second imaging clock times correspond to each of the plurality of second images. The second imaging clock times are (i) substantially matched with each other and (ii) included in the first imaging clock times.
    Type: Grant
    Filed: November 22, 2016
    Date of Patent: April 30, 2019
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Toru Matsunobu, Toshiyasu Sugio, Youji Shibahara, Yuki Maruyama
  • Patent number: 10228467
    Abstract: A device and method for inspecting the deposition of hot melt onto an object to be assembled. A comparison is made between sensed images of the object after application of the hot melt and a predetermined standard to determine if the construction integrity of the object made with the hot melt is within the range established by the standard. Composite images from a sensor operating in the infrared band and another sensor reveal physical features of the object, as well as provide registration information about the placement of the hot melt on the assembled object. Composite images also present a way to visually ascertain ongoing or past production operations in order to trace problems with the raw material used for the object, as well as for the construction process of the object with the hot melt.
    Type: Grant
    Filed: April 4, 2017
    Date of Patent: March 12, 2019
    Assignee: Valco Cincinnati, Inc.
    Inventors: Kevin J. Lowe, Graham T. Manders, Stelian N. Vasiu, James Brashear, Aiqiu Zuo, Denis Tran, Mehdi Bahrami
  • Patent number: 10161568
    Abstract: An LED-based light has an elongate housing having a longitudinal axis and a vertical axis, the housing defined by a base and two canted outer walls meeting opposite the base, the housing defining a cavity. An LED circuit board on which a plurality of LEDs are located is positioned within the cavity. End caps are positioned at opposite ends of the housing.
    Type: Grant
    Filed: August 14, 2015
    Date of Patent: December 25, 2018
    Assignee: iLumisys, Inc.
    Inventors: James M. Amrine, Jr., John Ivey
  • Patent number: 9964134
    Abstract: An Internet of Thing (IoT) device includes a head portion; an elongated stress sensor coupled to the head portion, the stress sensor coupled to a surface; a processor coupled to the stress sensor; and a wireless transceiver coupled to the processor.
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: May 8, 2018
    Inventor: Bao Tran
  • Patent number: 9621780
    Abstract: An efficient method and system for estimating an optimal focus position for capturing an image are presented. Embodiments of the present invention initially determine an initial lens position dataset. Then, scores are calculated for each value of the initial lens position dataset producing a plurality of scores. Embodiments of the present invention then determine an optimum focus position through interpolation and extrapolation by relating the initial lens position dataset to the score dataset, in which the score dataset comprises of the plurality of scores.
    Type: Grant
    Filed: October 4, 2012
    Date of Patent: April 11, 2017
    Assignee: NVIDIA CORPORATION
    Inventor: Hugh Phu Nguyen
  • Patent number: 9594230
    Abstract: A focus height sensor in an optical system for inspection of semiconductor devices includes a sensor beam source that emits a beam of electromagnetic radiation. A reflector receives the beam of electromagnetic radiation from the sensor beam source and directs the beam toward a surface of a semiconductor device positioned within a field of view of the optical system. The reflector is positioned to receive at least a portion of the beam back from the surface of the semiconductor device to direct the returned beam to a sensor. The sensor receives the returned beam and outputs a signal correlating to a position of the surface within the field of view along an optical axis of the optical system.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: March 14, 2017
    Assignee: Rudolph Technologies, Inc.
    Inventors: Dennis L. Ohren, Christopher J. Voges, Andrew E. Rotering
  • Patent number: 9582116
    Abstract: Several systems for tracking one or more radiation blocking objects on a surface are disclosed. At least three radiation sensors are provided adjacent the surface and a plurality of radiation sensers are provided adjacent the surface. Radiation from at least some of the radiation sources can reach each of the radiation sensors. One or more radiation blocking objects on the surface attenuate radiation from one or more radiation sources from reaching each of the sensors. One or more polygons is calculated based on the attenuated radiation sources and the positions of the sensors. The position of the one or more radiation blocking objects is estimated and may be tracked based on the polygons.
    Type: Grant
    Filed: March 3, 2013
    Date of Patent: February 28, 2017
    Assignee: Baanto International Ltd.
    Inventors: Avanindra Utukuri, Jonathan Clarke, Allen Rego, Bhupinder Randhawa
  • Patent number: 9453726
    Abstract: Various system and methods for estimating the position of one or more radiation blocking objects on a surface are disclosed. A plurality of radiation sources and radiation sensors are positioned about the surface. A plurality of sectors corresponding to the position of at least some of the radiation blocking objects relative to each of the radiation sensors is determined based on a radiation intensity signal for each radiation sensor. The position of the radiation blocking objects is estimated by analyzing various combinations of the sectors. In some embodiments, the size of a radiation blocking object may be estimated based on characteristics of a polygon corresponding to a combination of sectors.
    Type: Grant
    Filed: August 27, 2013
    Date of Patent: September 27, 2016
    Assignee: Baanto International Ltd.
    Inventors: Avanindra Utukuri, Jonathan Clarke
  • Patent number: 9410895
    Abstract: A method of sequentially performing a plurality of jointing operations includes positioning an automated device to form a mechanical joint into a workpiece and forming a mechanical joint into the workpiece. Once the mechanical joint is formed, the workpiece is scanned to generate data indicating the surface geometry of the workpiece at a location including the mechanical joint. One or more geometric features of the surface geometry are identified, and if the identified geometric features are within respective predetermined specification thresholds, the automated device is repositioned to form a subsequent mechanical joint into the workpiece.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: August 9, 2016
    Assignee: Comau LLC
    Inventors: Velibor Kilibarda, He Wang, Martin Kinsella
  • Patent number: 9223306
    Abstract: A method is provided for defining and utilizing an editing initialization block for a part program. The part program comprises a plurality of steps for taking measurements of a part and is displayed in an editing interface. An option is provided in the editing interface for selecting which steps are in an editing initialization block. After the part program has been saved, at a later time when the part program is recalled for editing, the editing initialization block may be run before additional steps are added to the part program. At least some of the data that would have been obtained by one or more of the initial part program steps that are not in the editing initialization block may be based on estimated data that is related to (e.g., modified based on) data determined from running the editing initialization block.
    Type: Grant
    Filed: November 15, 2011
    Date of Patent: December 29, 2015
    Assignee: Mitutoyo Corporation
    Inventors: Ryan Northrup, Dahai Yu
  • Patent number: 9182217
    Abstract: A method for measuring displacement of a large-range moving platform, comprising: arranging multiple beams of first measuring light parallel to one another and generated by an optical path distribution device and a position sensitive detector array in a certain manner, to ensure that at least one beam of first measuring light is detected by the position sensitive detector array when a moving platform is at any position of a moving area; a detection head array capable of determining whether a light beam is shaded being used for auxiliary measurement of a position of the moving platform; and determining a position of the moving platform that corresponds to the first measuring light measured by the position sensitive detector array, to calculate displacement of the moving platform. The method effectively enlarges a measurement range of the position sensitive detector array, and implements measurement of long range displacement of the moving platform.
    Type: Grant
    Filed: April 10, 2013
    Date of Patent: November 10, 2015
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Ming Zhang, Yu Zhu, Hao Liu, Yi Jiang, Zhao Liu, Kaiming Yang, Jinchun Hu, Dengfeng Xu, Haihua Mu, Wensheng Yin
  • Patent number: 9113019
    Abstract: In image reading apparatus, reading control portion causes image reading portion to read at least line of image data when pivoting angle of cover member with respect to document sheet table has changed from angle exceeding predetermined detection angle to angle equal to or less than detection angle. Photoelectric conversion portion is disposed in area that is out of predetermined maximum readable size area in image reading portion, and is covered by cover member when cover member is closed. Data correcting portion corrects image data read by reading control portion, based on output of photoelectric conversion portion output when pivoting angle has changed from angle exceeding detection angle to angle that is equal to or less than detection angle. Document sheet width detecting portion detects width, in main scanning direction, of document sheet placed on document sheet mounting surface, based on image data corrected by data correcting portion.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: August 18, 2015
    Assignee: KYOCERA Document Solutions Inc.
    Inventor: Hayato Hirayama
  • Patent number: 9046497
    Abstract: A system including a positioning system with a component manipulator structured to position a component in response to a positioning algorithm; a scanning system capable of producing a set of light waves directed at a surface of the component, detecting a set of reflected light waves from the surface of the component, and producing a reflectivity data set in response to the set of reflected light waves; and a microprocessor structured to apply a fuzzy logic algorithm to the reflectivity signal to determine a solution set and produce a grain structure characterization in response to the solution set.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: June 2, 2015
    Assignee: Rolls-Royce Corporation
    Inventors: Matthew T. Kush, Kong Ma, Robert Moriarty
  • Patent number: 8766155
    Abstract: According to one embodiment, a coordinate recognizing apparatus includes plural light emitting elements, plural light receiving elements, a memory, and a controller. The memory stores, concerning plural pairs of the light emitting elements and the light receiving elements set in advance, reference values used for determination of blocking of a light path. The controller performs, concerning the respective pairs, actions for collecting, plural times, a difference between first intensity indicated by a detection signal output from the light receiving element, which is a pair of the light emitting element, in a state in which the light emitting element is caused to emit light and second intensity indicated by a detection signal output from the light receiving element during non-light emission of the light emitting element and updating the reference value of the pair stored in the memory using a minimum of differences collected plural times.
    Type: Grant
    Filed: November 1, 2011
    Date of Patent: July 1, 2014
    Assignee: Toshiba TEC Kabushiki Kaisha
    Inventors: Yuishi Takeno, Shinji Saegusa, Takuya Ogishima, Sadatoshi Oishi
  • Patent number: 8743346
    Abstract: The present invention provides an inexpensive range image sensor and etc. A range image sensor comprises diffractive optical elements and on which are formed diffractive gratings that change a traveling direction of incident parallel light so that in a coordinate space defined by a xyz-axis, the incident parallel light is split into split beams, and angles formed by the x-axis and line segments determined by projected light spots formed by the split beams on a predetermined projection plane intersecting the z-axis become predetermined angles. Furthermore, the range image sensor is provided with a distance determining unit for determining distances to the projected light spots on the basis of the tilting with respect to the x-axis of the line segments determined by the projected light spots formed on the object by the split beams.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: June 3, 2014
    Assignee: Casio Computer Co., Ltd.
    Inventor: Hideaki Inoue
  • Patent number: 8679260
    Abstract: A method of cleaning an area using an automatic cleaning device may include receiving, from a video camera, information associated with an edge located on a surface, determining, by an automatic cleaning device, a position of the automatic cleaning device on the surface relative to the edge and using the received information to move the automatic cleaning device from the determined position along a path so that the automatic cleaning device cleans the surface along the path. The path may be substantially parallel to the edge, and the edge may be located a distance from a reference point on the automatic cleaning device during movement of the automatic cleaning device.
    Type: Grant
    Filed: November 11, 2009
    Date of Patent: March 25, 2014
    Assignee: Intellibot Robotics LLC
    Inventors: Henry L. Hillman, Jr., David M. Knuth, Jr., Daniel M. Daly, Vinton Coffman, Ralph McCann, Stephen D. Herr, Kevin L. Thomas
  • Patent number: 8593649
    Abstract: A defect detector for corrugated cardboard flutes comprises an optical projector for projecting to traveling flutes an inspection light having an effective line of which the length is about one pitch of flutes inclined slightly so that a tip of a normal flute is positioned on or slightly under the posterior end of the effective line and simultaneously a slope of an adjacent normal flute is positioned on the anterior end side of the effective line, an optical receiver equipped with a light-receiving element for receiving the inspection light reflected by a flute to output information according to the light-receiving position, and normal or abnormal determining means which determines that the flute height is normal if the light-receiving position detected is within an allowable range Wp.
    Type: Grant
    Filed: December 11, 2007
    Date of Patent: November 26, 2013
    Assignee: Phonic Co., Ltd.
    Inventor: Shinichi Mouri
  • Patent number: 8462355
    Abstract: A scanning microscope includes an acousto-optic scanner that produces a scanned beam. A beam separator based on total internal reflection or angle tuning of a dielectric filter separates an unscanned portion of an excitation light flux from a scanned portion. The scanned beam is directed to a specimen, and optical radiation generated in response to the scanned beam is directed to a detector that produces a detected signal that can be used to determine an image. The scanned beam can be directed to the specimen without formation of any intermediate focusing.
    Type: Grant
    Filed: January 15, 2009
    Date of Patent: June 11, 2013
    Assignee: The Salk Institute for Biological Studies
    Inventors: Dejan Vucinic, Terrence J. Sejnowski
  • Patent number: 8243284
    Abstract: A method for measuring the roundness profiles moved forward in longitudinal direction inside a rolling mill, using two laser scanners, respectively provided with a light-sensitive sensor and a laser. At least three shadow edges that fit against the round profile to be measured and enclose the round profile to form a polygon are generated and measured and the corresponding tangents are computed.
    Type: Grant
    Filed: April 1, 2008
    Date of Patent: August 14, 2012
    Assignee: Zumbach Electronic AG
    Inventor: Urs-Peter Studer
  • Publication number: 20120148322
    Abstract: A method and system for accurately measuring a lead edge and a trail edge media curl utilizing an angled array sensor. One or more curled media sheets can be propelled in a process direction via a set of rollers/nips associated with a curler from a leading edge and/or trailing edge towards the angled array sensor. The angled array sensor having a rotation vector in the cross-process direction can be placed upstream or downstream of a media-propelling device and at an angle relative to the media sheet exiting the curler in order to calculate a function of sheet curl. The function of sheet curl can be obtained by measuring a point at which the propelled media sheet touches an array associated with the angled array sensor. Such a curl measurement approach enhances accuracy and robustness to environmental induced errors.
    Type: Application
    Filed: December 8, 2010
    Publication date: June 14, 2012
    Applicant: Xerox Corporation
    Inventor: Joannes N. M. de Jong
  • Patent number: 8132802
    Abstract: An apparatus for quickly retaining and releasing parts having a wide range of sizes and designs at an optical measurement station is provided. The apparatus includes a rod having proximal and distal ends. The apparatus further includes a part-engaging first tip attached to the distal end of the rod to move therewith. The apparatus still further includes a part-engaging second tip. The apparatus includes a support structure for supporting the second tip and the rod. The apparatus further includes a quick-release, clamping mechanism for adjustably and releasably clamping the rod to the support structure so that the rod can move the first tip between a part-release position in which a part held between the tips is released for removal from the station and a part-retaining position in which a part is firmly held between the tips. Held parts having a wide range of sizes and designs can be optically measured at the station.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: March 13, 2012
    Assignee: GII Acquisition, LLC
    Inventors: Kenneth S. Kolodge, Michael G. Nygaard, Gregory M. Nygaard
  • Patent number: 8040497
    Abstract: By encoding process-related non-uniformities, such as different height levels, which may be caused by CMP or other processes during the fabrication of complex device levels, such as metallization structures, respective focus parameter settings may be efficiently evaluated on the basis of well-established CD measurement techniques.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: October 18, 2011
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Thomas Werner, Frank Feustel, Kai Frohberg
  • Patent number: 7999243
    Abstract: A tool determines a characteristic of an installed weld fastener using a dimensional measurement device, and includes a threaded portion engageable with the weld fastener and a cylindrical portion. A controller is in communication with the measurement device, and calculates the characteristic using raw dimensional data provided by the measurement device. The measurement device determines an approximate centerline of the cylindrical portion to thereby determine the raw dimensional data. A method determines the approximate centerline using the measurement device by connecting a threaded surface of a tool to the installed weld fastener, measuring dimensions of the cylindrical portion via the measurement device to determine the set of raw dimensional data, and determining the characteristic using the raw dimensional data. A control action can be executed when the characteristic is outside of a calibrated range.
    Type: Grant
    Filed: September 22, 2008
    Date of Patent: August 16, 2011
    Assignee: GM Global Technology Operations LLC
    Inventor: Robert J. Rosinski
  • Patent number: 7932485
    Abstract: An object geometry measurement apparatus (10, 20) for the dynamic generation and transmission of geometrical data of objects (14) moved on a conveying device (12) is set forth, wherein the apparatus has a first optoelectronic sensor (10) which is made for the detection of the object geometry in a section of the object (14) with reference to intervals and/or of the remission behavior, as well as a first control (20) which can calculate geometrical data from the object geometry of each section and can output them via a first interface. In this respect, the first control (20) is made to adapt the information density of the output geometrical data to a measure for changes of the object geometry from section to section.
    Type: Grant
    Filed: July 21, 2008
    Date of Patent: April 26, 2011
    Assignee: Sick AG
    Inventors: Achim Nübling, Thomas Schopp
  • Publication number: 20100284024
    Abstract: A scanning microscope includes an acousto-optic scanner that produces a scanned beam. A beam separator based on total internal reflection or angle tuning of a dielectric filter separates an unscanned portion of an excitation light flux from a scanned portion. The scanned beam is directed to a specimen, and optical radiation generated in response to the scanned beam is directed to a detector that produces a detected signal that can be used to determine an image. The scanned beam can be directed to the specimen without formation of any intermediate focusing.
    Type: Application
    Filed: January 15, 2009
    Publication date: November 11, 2010
    Inventors: Dejan Vucinic, Terrence J. Sejnowski
  • Patent number: 7784975
    Abstract: An apparatus (1) serves for linear illumination of a moving product web (6), the apparatus (1) having at least one light source (4) emitting light. In order to achieve high luminance in a linear subregion of the product web (6), at least a portion of the light emitted by the light source (4) is reflected towards the product web (6) by at least one tubular reflector (5). The tubular reflector (5) in this case has at least one light exit slit (7) which is assigned to the product web (6). Moreover, the tubular reflector has at least one observation slit (8) which lies opposite the light exit slit (7). The illuminated product web (6) can be observed through this observation slit (8) by means of a line camera (2).
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: August 31, 2010
    Assignee: Texmag GmbH Vertriebsgesellschaft
    Inventors: Stephan Krebs, Alfred Eder, Juergen Eisen, Lars Zwerger
  • Patent number: 7759624
    Abstract: An image data generating device has a photoelectric sensor including an array of pixel generating units, each of which has one photoelectric conversion element and one floating diffusion. The photoelectric sensor includes a matrix of pixel sets, each of which includes a matrix of pixel generating units on two rows and two columns. To generate plane image data, the image data generating device finds a pixel value on a pixel basis from an output value for each pixel generating unit. To generate distance image data, the image data generating device finds a distance to a subject for each pixel set from an output value for each pixel generating unit belonging to the pixel set and calculates a pixel value per pixel set.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: July 20, 2010
    Assignee: DENSO CORPORATION
    Inventors: Yoshihide Tachino, Ryouichi Sugawara
  • Patent number: 7663129
    Abstract: The present invention provides an equipment for measuring the vertical distance or pitch between a plurality of thin substrates inside a container body, including an optical component to transmit a light beam to a thin substrate in the container body and receive light beam reflected from the thin substrate, a scanning device to drive the optical component to move along vertical direction of the thin substrates for measuring the vertical distance or pitch between the plurality of thin substrates in the container body, and a rotation base to carry and rotate the container body to a plurality of angles for the plurality of thin substrates inside the container body to be measured from different angular positions.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: February 16, 2010
    Assignee: Gudeng Precision Industrial Co, Ltd
    Inventor: Pao-Yi Lu
  • Patent number: 7652275
    Abstract: A probe control interface is provided for a structured light non-contact coordinate measuring machine probe. Portions of a video control signal for controlling the grey level of selected rows of pixels of a spatial light modulator of the probe can be decoded into control signals for additional probe components or functions that have been added to increase the measuring capabilities or versatility of the non-contact probe. By providing the additional probe component control signals in this manner, a versatile structured light non-contact probe system can be made compatible with a standard probe head autojoint system (e.g. a Renishaw™ type system), thus allowing the probe to be automatically exchanged with other standard probes and allowing existing systems to use the non-contact probe more easily. Various aspects of the probe control interface allow for relatively simple, compact, lightweight and robust implementation.
    Type: Grant
    Filed: July 28, 2006
    Date of Patent: January 26, 2010
    Assignee: Mitutoyo Corporation
    Inventor: Paul Gladnick
  • Patent number: 7649636
    Abstract: An optical metrology system is disclosed that has a measuring system configured to irradiate a metrology mark and record a portion of a reflected, a transmitted, or both, electromagnetic field and a characterization device configured to determine from the recorded field a mark shape parameter indicative of the structure of the metrology mark, the characterization device comprising: a field calculation unit configured to calculate an expected field for reflection, transmission, or both, from a theoretical reference mark based on an algebraic eigenvalue-eigenvector representation of the expected field, a field derivative calculation unit configured to calculate a first order derivative, a higher order derivative, or both, of the expected field with respect to the mark shape parameter by first deriving analytical forms for corresponding derivatives of eigenvalues and eigenvectors of the eigenvalue-eigenvector representation, and an optimization unit configured to use the outputs from the field and field derivati
    Type: Grant
    Filed: December 19, 2006
    Date of Patent: January 19, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Nicolaas Petrus Van Der Aa, Arie Jeffrey Den Boef, Robert Martinus Maria Mattheij, Henricus Gerhardus Ter Morsche
  • Patent number: 7612896
    Abstract: A method of measuring the three-dimensional volume or perimeter shape of an interior cavity includes the steps of collecting a first optical slice of data that represents a partial volume or perimeter shape of the interior cavity, collecting additional optical slices of data that represents a partial volume or perimeter shape of the interior cavity, and combining the first optical slice of data and the additional optical slices of data to calculate of the three-dimensional volume or perimeter shape of the interior cavity.
    Type: Grant
    Filed: September 2, 2008
    Date of Patent: November 3, 2009
    Assignee: Lawrence Livermore National Security, LLC
    Inventor: Gary Franklin Stone
  • Patent number: 7578068
    Abstract: A detecting apparatus includes a detecting plate, a controlling box, and an indicator installed on the detecting plate. A region is defined on one face of the detecting plate, for supporting a workpiece thereon, with an edge of the workpiece abutting against one side of the region. A first slot and a second slot are defined in the detecting plate on an opposite side of the region. The controlling box having a circuit board with a processor is installed on an opposite face of the detecting plate. Two light sensors are installed on the circuit board aligning with the first and second slots of the detecting plate respectively. The indicator is electrically connected with the light sensors and controlled by the processor, for showing whether the dimension of the workpiece is eligible, according to detection by the light sensors.
    Type: Grant
    Filed: July 27, 2007
    Date of Patent: August 25, 2009
    Assignees: Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd., Hon Hai Precision Industry Co., Ltd.
    Inventors: Bing-Jun Zhang, Lian-Zhong Gong
  • Patent number: 7564557
    Abstract: Disclosed is a combined scatterometry mark comprising a scatterometry critical dimension (CD) or profile target capable of being measured to determine CD or profile information and a scatterometry overlay target disposed over the scatterometry CD or profile target, the scatterometry overlay target cooperating with the scatterometry CD or profile target to form a scatterometry mark capable of being measured to determine overlay.
    Type: Grant
    Filed: October 29, 2007
    Date of Patent: July 21, 2009
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith, Michael E. Adel, Anatoly Fabrikant
  • Patent number: 7525673
    Abstract: A system for examining a patterned structure formed on a semiconductor wafer using an optical metrology model includes a first fabrication cluster, a metrology cluster, an optical metrology model optimizer, and a real time profile estimator. The first fabrication cluster processes a wafer, the wafer having a first patterned and a first unpatterned structure. The metrology cluster measures diffraction signals off the first patterned and first unpatterned structure. The metrology model optimizer optimizes an optical metrology model of the first patterned structure. The real time profile estimator creates an output comprising underlying film thickness, critical dimension, and profile of the first patterned structure.
    Type: Grant
    Filed: July 10, 2006
    Date of Patent: April 28, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Vi Vuong, Junwei Bao
  • Patent number: 7525668
    Abstract: Rotating polygon mirrors are configured such that angles formed by a rotation axis and mirror surfaces differs from one another in the mirror surfaces in order to shift a collecting point of a scanning light flux in a sub-scanning direction in association with rotation at constant angular speed. A collecting point position forming optical system is configured such that the collecting point is moved in an inspection range Zr in a height direction Z. The XYZ scanning is performed by moving the inspection object in the sub-scanning direction such that the collecting point shifted in the sub-scanning direction and the height direction is linearly scanned in the height direction of the inspection object in synchronization with the rotation of the rotating polygon mirror at the constant angular speed, and the an appearance positional coordinate of the inspection object is determined by a confocal method to perform the appearance inspection.
    Type: Grant
    Filed: April 12, 2006
    Date of Patent: April 28, 2009
    Assignee: Panasonic Corporation
    Inventor: Yuji Ono
  • Patent number: 7516628
    Abstract: An on-line thickness gauge (OLTG) and method are described herein that are capable of measuring a thickness of a moving glass substrate. In the preferred embodiment, the OLTG includes a Y-guide and a stabilizing unit that respectively captures and stabilizes the moving glass substrate. The OLTG also includes a laser instrument which contains a laser source and a detector. The laser source emits a beam at the front surface of the moving glass substrate. And, the detector receives two beams one of which was reflected by the front surface of the moving glass substrate and the other beam which was reflected by the back surface of the moving glass substrate. The OLTG further includes a processor that analyzes the two beams received by the detector to determine a distance between the two beams which is then used to determine the thickness of the moving glass substrate.
    Type: Grant
    Filed: January 11, 2005
    Date of Patent: April 14, 2009
    Assignee: Corning Incorporated
    Inventors: Kenneth C. Chen, Edward J. Lenhardt, Daniel Y. K. Ma, Jeffrey C. McCreary, James P. Terrell, Jr.
  • Patent number: 7507948
    Abstract: A method of detecting an object using a structured light and a robot using the same are disclosed. The method of detecting a floor object using a structured light includes measuring a height difference of a position onto which a specified structured light is projected with a reference position, and detecting the floor object using the measured height difference.
    Type: Grant
    Filed: November 1, 2006
    Date of Patent: March 24, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-ryeol Park, Hyoung-ki Lee, Dong-jo Kim, Seok-won Bang
  • Patent number: 7489820
    Abstract: The invention relates to a device for producing a pattern on a surface for measuring, using a projector and a slide. The invention also relates to various advantageous embodiments of the measuring system.
    Type: Grant
    Filed: September 7, 1999
    Date of Patent: February 10, 2009
    Assignee: VDEh-Betriebsforschungsinstitut GmbH
    Inventors: Ulrich Muller, Detlef Winter, Detlef Sonnenschein, Rudolf Stockmeyer, Gustav Peuker
  • Patent number: 7450232
    Abstract: An optical metrology system includes a photometric device with a source configured to generate and direct light onto a structure, and a detector configured to detect light diffracted from the structure and to convert the detected light into a measured diffraction signal. A processing module of the optical metrology system is configured to receive the measured diffraction signal from the detector to analyze the structure. The optical metrology system also includes a generic interface disposed between the photometric device and the processing module. The generic interface is configured to provide the measured diffraction signal to the processing module using a standard set of signal parameters. The standard set of signal parameters includes a reflectance parameter, a first polarization parameter, a second polarization parameter, and a third polarization parameter.
    Type: Grant
    Filed: September 17, 2007
    Date of Patent: November 11, 2008
    Assignee: Timbre Technologies, Inc.
    Inventors: Shifang Li, Junwei Bao, Nickhil Jakatdar, Xinhui Niu
  • Patent number: 7440121
    Abstract: A method of measuring the three-dimensional volume or perimeter shape of an interior cavity includes the steps of collecting a first optical slice of data that represents a partial volume or perimeter shape of the interior cavity, collecting additional optical slices of data that represents a partial volume or perimeter shape of the interior cavity, and combining the first optical slice of data and the additional optical slices of data to calculate of the three-dimensional volume or perimeter shape of the interior cavity.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: October 21, 2008
    Assignee: Lawrence Livermore National Security, LLC
    Inventor: Gary Franklin Stone
  • Patent number: 7428061
    Abstract: An optical probe for measuring features of an object comprises two or more viewing directions and two or more projection directions. A method of measuring the features of an object comprises configuring an optical probe into two or more optical groups, wherein an optical group comprises one or more viewing directions and one or more projection directions, wherein at least one viewing direction and at least one projection direction is different between the optical groups, and wherein data obtained by the viewing directions is generated only from patterns projected by the projection directions of the same optical group. The method further comprises collecting data from each optical group while scanning the object.
    Type: Grant
    Filed: January 6, 2006
    Date of Patent: September 23, 2008
    Assignee: Metris IPR N.V.
    Inventors: Bart Van Coppenolle, Lieven De Jonge, Kris Vallons, Frank Thys
  • Patent number: 7396414
    Abstract: A method and apparatus for simultaneously coating and measuring a part. The apparatus includes a part support, a sprayer and a part measurer positioned adjacent to the part support and a display device positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures a dimension of the section of the part being coated. In one embodiment, an initial amount of coating and a final amount of coating are applied to the section of the part based on the dimension measurements and desired dimension of the part. In another embodiment, the amount of coating applied to the part is based on the desired coating thickness. As a result, the apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts.
    Type: Grant
    Filed: December 13, 2005
    Date of Patent: July 8, 2008
    Inventor: Bruce Nesbitt
  • Patent number: 7385215
    Abstract: Sensing elements that quickly and accurately determine if a liquid or gas is present around the sensing elements are disclosed. These sensing elements find particular application in identifying the location of the cavity wall in which a supercavitating vehicle is operating, relative to the vehicle. In certain embodiments signal emitting elements carried on the vehicle emit signals towards the presumed position of the cavity wall, and sensing elements carried on the vehicle receive the emitted signals after they are reflected off of the cavity wall. The sensing elements identify the location where the reflected signal is received, and based on this identified location, the location of the cavity wall is determined. In alternative embodiments, sensing elements are positioned along fins extending outward with respect to the hull of the vehicle, and the sensors sense the presence of liquid or gas.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: June 10, 2008
    Assignee: The Johns Hopkins University
    Inventors: Kim R. Fowler, Leo R. Gauthier, Jr.
  • Patent number: 7379194
    Abstract: A method of measuring a mailpiece includes deflecting a laser beam through an arc, determining an angle at which the laser beam is currently directed, and calculating a dimension of the mailpiece based at least in part on the determined angle.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: May 27, 2008
    Assignee: Pitney Bowes Inc.
    Inventors: Frederick W Ryan, Jr., Ronald P Sansone
  • Patent number: 7369254
    Abstract: A system for measuring dimension of photomasks comprises a light source emitting measuring light having a wavelength, a transmission detector for receiving the measuring light, a stage on which a photomask having circuit patterns is placed, the stage being disposed between the light source and the transmission detector, and a controller having a dimension-deciding algorithm to determine a dimension of the circuit patterns from a spectroscopic characteristic of the received measuring light, the controller being connected to the transmission detector.
    Type: Grant
    Filed: June 13, 2005
    Date of Patent: May 6, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Gun Lee, Seong-Woon Choi, Sang-Yong Yu, Seong-Yong Moon, Byung-Gook Kim
  • Patent number: 7368697
    Abstract: In a size determining system, a number of pixels in a dimension of a sensor array of photoelectric devices is determined. A readout register is arranged to receive charge accumulated in the dimension of the sensor array. A clock is connected to apply clock cycle pulses to the readout register to read out the charge from the readout register for a predetermined number of clock cycles known to exceed a supposed maximum number of pixels in the dimension of the sensor array. A discontinuity detector is operative to determine a first discontinuity in the readout charge, representing a last active pixel in the dimension of the sensor array. A counter is arranged to count clock cycles between a first active pixel and the first discontinuity to determine a number of active pixels in the dimension of the sensor array.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: May 6, 2008
    Assignee: EV2 Technologies (UK) Limited
    Inventors: Ian Moody, Kevin Hadfield
  • Patent number: 7345293
    Abstract: A piston-ring inspecting device includes a sensor unit (27) including a light emitting system (27a) that emits slit-like detection light toward an outer peripheral surface (Ps) of a piston (P) and an outer peripheral surface (2c) of a piston ring (2) and a light receiving image system (27b) that receives light reflected from the outer peripheral surfaces so as to form an image; an image calculating means that subjects image information obtained by the sensor unit to numerical processing and that calculates a tilt angle of the outer peripheral surface of the piston ring with respect to the outer peripheral surface of the piston; and a controller (30) including a judgment means that, based on arithmetical information obtained by the image calculating means and preset standard information, judges whether or not the piston ring has been fitted in a predetermined direction. Accordingly, an inspection can be performed without scanning, through a simple analysis process, in a short time, and with high accuracy.
    Type: Grant
    Filed: June 23, 2003
    Date of Patent: March 18, 2008
    Assignee: Hirata Corporation
    Inventors: Yasuhiko Wakatsuki, Haruo Tsutsumi
  • Patent number: 7342608
    Abstract: Focus detecting methods and focus detecting mechanisms of an image measuring device able to execute focus detection at high speed with high accuracy, and image measuring device having the focus detecting mechanisms are provided. A rotation driving device rotates and operates a grating filter for projecting a grating pattern to a measured object. A distance driving device adjusts the interval distance between an image pickup device and the measured object. The image of the measured object projecting the grating pattern thereto every predetermined rotating angle is picked up by the image pickup device via multiple exposure by operating the rotation driving device and the distance driving device in association with each other. A focus position is determined from a contrast value of the grating pattern within the picked-up image information. Accordingly, it is not necessary to pick-up plural images in plural distance positions and process the plural images.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: March 11, 2008
    Assignee: Mitutoyo Corporation
    Inventor: Hiroyuki Yoshida