Abstract: A system for cosmetic inspection of a test object is disclosed that includes a movable platform for receiving a test object. The movable platform is capable of positioning the test object within a dome. A plurality of cameras arranged oriented to capture different views of a plurality of surfaces of the test object. A plurality lights arranged are outside the dome, the plurality of lights selectively enabled or disabled according to which of the plurality of surfaces of the test object is to be captured.

Abstract: A visual inspection device including a pinhole lens optically coupled to a sensor is provided. The pinhole lens has a pinhole placed at the distal end of the lens to capture the rays from an object to be inspected, a front optical group receiving the rays which cross the pinhole, and a rear optical group. The front optical group is configured to focus, on the rear optical group, the rays which cross the pinhole. The rear optical group is configured to focus, on the sensor, the rays received from the front optical group.

Abstract: A carriage of an image reading apparatus includes a first lamp and a second lamp. A moving mechanism moves the carriage in a sub-scanning direction from a first side to a second side. The first lamp and the second lamp are arranged in a row in the sub-scanning direction. A control unit turns on any one of the first lamp and the second lamp during reading of one line. The control unit recognizes the position of a first-side edge based on first image data obtained when the first lamp is turned on. The control unit recognizes the position of a second-side edge based on second image data obtained when the second lamp is turned on. The control unit synthesizes the first image data and the second image data to generate job read image data.

Abstract: A foreign substance inspection apparatus according to the present invention detects a foreign substance on a substrate, and includes a detection unit that includes a light projector configured to project light to a surface of the substrate and a light receiver configured to receive scattered light from the surface, an adjustment mechanism configured to adjust a light quantity of the scattered light received by the light receiver, and a control unit configured to perform foreign substance detection in a state where sensitivity of the detection unit is changed to low sensitivity, after performing foreign substance detection in a state where the sensitivity of the detection unit is set to high sensitivity by adjusting the light quantity of the scattered light received by the light receiver.

Abstract: A method of detecting porosity at and near a composite surface is disclosed, including projecting polarized light on a surface of a composite component and filtering out light reflected off of the surface. The method further includes imaging light scattered from inhomogeneities in the composite component, and generating a map of absence of composite material near the composite surface based on scatter intensity detected in the imaging step.

Abstract: The quality of objects and workpieces of a manufacturing process is often evaluated based on surface and/or form. An inspection apparatus for optically, in particular deflectometrically, inspecting an object includes a hollow body housing having an opening, the object being positionable in the opening for the inspection; a camera having a plane of focus and a camera direction extending toward the opening of the housing, and being configured to take a plurality of object images of the object situated in the plane of focus; a plurality of light sources arranged around the opening and designed for variably illuminating the plane of focus; and an evaluation unit configured to determine a topography of the object based on the object images.

Abstract: A conveyor condition monitor, for use with a conveyor comprising a plurality of trollies (12) running along a conveyor rail (14) and linked to one another by a chain link system, is disclosed. The monitor comprises a conveyor monitoring station (3) and a first deformation sensor (5a, 5b). The deformation sensor (5b) is in communication with the conveyor monitor, and is adapted to notify the conveyor monitor of the presence of a deformed (13b) trolley (12) in the conveyor.

Abstract: A system and method for inline detection of defects on a semiconductor wafer surface during a semiconductor device manufacturing process is disclosed herein. In one embodiment, a method includes: automatically transporting the wafer from a first processing station to an inspection station; scanning a wafer surface using a camera in the inspection station; generating at least one image of the wafer surface; analyzing the at least one image to detect defects on the wafer surface based on a set of predetermined criteria; if the wafer is determined to be defective, automatically transporting the wafer from the inspection station to a stocker; and if the wafer is determined to be not defective, automatically transporting the wafer to a second processing station for further processing in accordance with the semiconductor device manufacturing process.

Abstract: An apparatus for non-contact monitoring of travelling objects being produced in an unguided linear process comprising: a toroidal structure with an open aperture defining a measuring zone, a source of radiation configured by a plurality of radiation devices circumferentially disposed within the measuring zone whereby the radiation source emits rays that generate a planar screen of radiation across the object circumferentially to envelop the object, a plurality of circumferentially disposed recording devices for receiving radiation from the radiation devices following interception of the rays by the objects, and analysis means for analyzing imaging information of the emitted radiation recorded by the recording devices thereby to provide a measure of the physical characteristics of the object.

Abstract: Various methods of diagnosing defects and disbonds in devices and materials are disclosed. In some embodiments, the methods involve cooling a portion of a material or device, heating a portion of the material or device with a heating instrument, terminating the application of heat to the material or device, and imaging the material or device using a thermal imager after heat is removed. In certain variants, disbonds and/or defects can be visualized as hotter areas and spots on the material through the thermal image.

Abstract: A system for confocal observation of a sample, having a mask, which is arranged in both an illumination beam path and in an image beam path and which is rotatable around a central axis, openings arranged in a pinhole plane, an arrangement of focusing micro-optics aligned with the geometric arrangement of the openings of the mask to generate a focal pattern, and an optical assembly with an objective, and which is configured to image the focal pattern onto the sample for generating an illumination pattern moving across the sample and to collect light from the sample by the objective and to image it onto the openings of the mask for confocal filtering. The focal plane and pinhole plane are separated by a distance and the optical assembly has a path length difference compensation arrangement which is selective with regard to the illumination light and the light collected from the sample.

Abstract: An illumination apparatus for a vehicle is disclosed. The illumination apparatus comprises a wear component comprising a plurality of layers disposed in an engine compartment. The layers comprise a photoluminescent portion and a cover layer disposed over the photoluminescent portion. The apparatus further comprises a light source located in the engine compartment. The light source is configured to emit an excitation emission configured to illuminate the photoluminescent portion to emit an output emission having a color different than the excitation emission.

Abstract: The present disclosure relates to a system and method utilizing a light source coupled with a viewing device to detect contaminant(s) on an electronic circuit board. This fluorescence microscopy apparatus can be easily integrated into a bench top stereoscope or microscope and does not require the use of expensive and destructive analytical techniques. Typically, blue light is used in conjunction with a filter to detect contamination from cured epoxy resins and many other contaminants on gold bond pads, wires, pads, or other electrically conductive elements on the electronic circuit.

Abstract: A device for measuring the MTF or another imaging property of an optical system has a light pattern generating unit that generates a light pattern in a focal plane of the optical system. A reference axis of the device is oriented along an optical axis of the optical system. The device further comprises an arrangement of N, N=2, 3, 4, . . . , cameras that are separated from one another. Each camera has an objective and a light sensor that is arranged in a focal plane of the objective. The cameras are arranged on a side opposite the light pattern generating unit such that the light sensor of each camera detects an image of exactly one section of the light pattern. At least one beam deflecting element is arranged between the optical system and at least one of the cameras such that it deflects light away from the reference axis before the light impinges on the at least one camera.

Abstract: A technique for effectively detecting abnormal values in electromagnetic wave measurement is provided. An electromagnetic wave measuring device includes a measurement data receiving unit 308, an abnormal value detecting unit 309, and a GUI controlling unit 306. The measurement data receiving unit 308 receives measurement data of electromagnetic waves that are measured at multiple positions. The abnormal value detecting unit 309 detects an abnormal value in the measurement data. The GUI controlling unit 306 displays a position at which the abnormal value is measured, on a display.

Abstract: A differential filtering chromatic confocal microscopic system comprises a chromatic dispersion objective for receiving and axially dispersing a broadband light from a light source and projecting dispersed lights onto an object thereby forming an object light reflected therefrom; an optical modulation module for dividing the object light into a first and a second object lights; a pair of optical intensity sensing module, respectively having a spatial filter with a different pinhole diameter or a slit width from each other, for detecting the first and second object lights, thereby obtaining a plurality of first and second optical intensity signals; and a signal processor for respectively processing the plurality of first and second optical intensity signals thereby obtaining a plurality of differential rational values of optical intensity and determining a corresponding object depth associated with each differential rational value according to a relation between signal intensity ratio and object surface depth.

Abstract: The invention relates to a method and a device for the rapid and reliable measuring of distortion defects in a manufactured float glass strip, having the following features: a) a linear inset LED light source (5) sweeping the breadth of the glass strip (4) to be examined, said light source having LEDs that are tightly packed one next to the other below a glass strip (4) to be examined, b) a linear cylindrical lens 8) which is arranged in parallel to the entire length of the inset LED light source (5) and the distance of which to the inset LED light source (5) is continuously variable, c) a light source (2) arranged above the glass strip (4), d) an array of at least 4 CCD cameras arranged above the glass strip (4), and a two-stage parallel signal evaluation unit.

Abstract: A ground based wind turbine blade inspection system and method consists of a thermal imaging camera configured to detect propagating defects by acquiring thermal imaging data from a wind turbine blade when it is substantially at thermal equilibrium with respect to surrounding air and analyzing the thermal imaging data with a processor to identify thermal effects associated with latent defects caused by internal friction due to cyclic gravitational stresses and wind loads during normal turbine operation. The system permits latent defects to be identified using a ground-based in situ inspection before they become visually apparent, which allows repairs to be made economically while the blade is in place.

Abstract: In order to provide an inspection illumination device that makes it possible to greatly change a light amount within an observation solid angle of an imaging device even in a case where a change in reflection or scattering taking place at a feature point is subtle, and thus detect such a minute feature point, the inspection illumination device includes: a surface light source that emits inspection light; a lens that is arranged between the surface light source and an inspection object, and provides an image of the surface light source near the inspection object; and a first light shielding mask that is arranged between the surface light source and the inspection object, and forms a dark domain within an illumination solid angle of the inspection light applied to each point on the inspection object.

Abstract: A secure enclosure comprises: a body defining an access opening closed by a door, and a body media slot. A secure chamber is mounted outside the body and surrounds the body media slot, the secure chamber defining a chamber media slot. The secure enclosure may further comprise a media transport operable to convey media between the body media slot and the chamber media slot. The secure chamber body may also define a purge slot located on an underside of the chamber body so that media items that are not removed by a customer may be dropped through the purge slot.

Abstract: A method and an apparatus for detecting defects in the composite materials of a wind turbine blade or similar type of structure using an infrared (IR) camera. The temperature of the wind turbine blade is changed in such a way as to produce IR intensity changes in the region of the defect that can be visually detected or detected using a computer and signal processing algorithms. The same approach will work on other composite structures such as those found on aircraft.

Abstract: Apparatus for inspecting a semiconductor wafer (8) has a plurality of light sensors (2) arranged relative to a light source (1) and wafer inspection platform (4), so that images of different angle views of a surface of the wafer can be received and compared with corresponding images taken of a reference wafer to automatically detect defects based on image comparison. The light sensors (2) may receive superposed images of light (7) reflected directly from the light source (1) off the wafer surface and light (6) indirectly reflected off the wafer surface after first reflecting off a dome (3) with a diffusely reflecting inner surface (5) positioned over the platform (4).

Abstract: A sensing apparatus operable for sensing top of form indicators on media within a print station is provided. The sensing apparatus generally including a base and a cover hingedly attached to each other and being operable for manipulation between an open and closed position, a flexible circuit affixed to the interior surfaces of the base and cover, the flexible circuit comprising an array of optical sensing devices, and an interface connector integral the base for connection to a control unit of a print station. The optical sensing devices generally include any one of light emitting diodes and photo sensors and are operable for the detection of holes, notches, black marks and gaps located on a media passing through the sensing apparatus.

Abstract: A system and method for measuring the physical characteristics of a component where the system includes an electromagnetic radiation source defining a source optical path, the electromagnetic radiation source being operable to cause electromagnetic radiation to propagate along the source optical path, a sensing device defining a sensor optical path, a system support structure, a base structure, an electromagnetic radiation source mounting structure and a sensing device mounting structure, a positioning device including a positioning device stage, wherein the positioning device stage is movably disposed and a retention mount disposed on the positioning device stage, the retention mount being disposed within the sensor optical path such that when a component is retained within the retention mount, the component blocks at least a portion of the electromagnetic radiation to generate a silhouette, wherein the sensing device generates data responsive to the silhouette.

Abstract: Various embodiments related to monitoring for optical faults in an optical system are disclosed. For example, one disclosed embodiment provides, in an optical system comprising a light source, a light outlet, and an optical element disposed between the light source and the light outlet, a method of monitoring for optical system faults. The method includes detecting, via a light sensor directed toward an interface surface of the optical element closest to the light source, an intensity of light traveling from the interface surface of the optical element to the light sensor, and comparing an intensity of light detected to one or more threshold intensity values. The method further includes identifying an optical system fault condition based on comparing the intensity of light detected to one or more threshold values, and modifying operation of the optical system.

Abstract: In some embodiments, an inspection system for measuring at least a portion of the threaded surface of an internally threaded component includes at least one measuring probe, a component retention device that allows positioning of the internally threaded component relative to the measuring probe and a processing device in signal communication with the measuring probe to receive threaded surface data therefrom.

Abstract: An apparatus includes a reconfigurable spatial light modulator capable of spatially modulating an incident wavefront responsive to an image formed on the modulator. A light source is configured to direct a coherent illumination light beam towards the modulator such that the modulator produces a modulated outgoing light beam therefrom. A filter is configured to spatially filter a light pattern formed by the outgoing light beam on a plane to selectively transmit light from a plurality of diffraction peaks therein.

Abstract: In some embodiments, an inspection system includes a collimated light source defining a source optical path and useful to cause a collimated light beam to propagate along the source optical path and a sensing device defining a sensor optical path. A positioning device includes a positioning device stage movably disposed relative to the positioning device, sensing device and collimated light source. A retention mount is disposed on the positioning device stage and within the sensor optical path such that when an object is retained within the retention mount, the object blocks at least a portion of the collimated light beam.

Abstract: A method for measuring the physical characteristics of a component includes associating a component with the system such that the component is positioned within the retention mount and operating the system to cause the light source to emit a collimated light beam along a source optical path, where the collimated light beam is reflected to cause a reflected collimated light beam to propagate along a sensor optical path to be incident upon the component to produce a component silhouette where the sensing device generates data responsive to the silhouette. The image data is processed to generate resultant data responsive to the component, wherein the resultant data is further responsive to at least one of a smoothing algorithm, a functional size algorithm and a centering algorithm.

Abstract: An automated object inspection system is presented. The inspection system includes an imaging system to produce at least two images of said object having different optical properties and an analyzer coupled to the imaging system to receive the images and to perform a variety of inspection operations on said images. The imaging system may produce images of the object under inspection in the visible range having varying exposure values. A vision engine included in the analyzer may combine said images through an algorithmic process into one image having high light dynamic range. Alternatively, the imaging system may produce images of the object in the visible or non-visible electromagnetic range. The analyzer may perform inspection routines on said images. An imaging system capable of producing digital video is presented, wherein each frame of video produced by said camera is composed of multiple images having different optical properties.

Abstract: A method for estimating surface moisture content of wood chips for use in a pulp and paper production process comprises measuring chip surface moisture using an infrared surface moisture sensor, and adjusting a calibration of the surface moisture measured with a model using values of a set of optical parameters representing light reflection characteristics of the wood chips, to estimate their surface moisture content.

Abstract: A system and method for measuring the physical characteristics of an object is provided, wherein the method includes disposing the object within the sensor optical path of an inspection system, causing a source collimated light beam to propagate along the source optical path to be at least partially incident upon the reflecting device, reflecting the source collimated light beam to create a reflected collimated light beam that propagates along the sensor optical path such that the reflected collimated light beam is at least partially incident upon the object to produce a silhouette, wherein at least a portion of the silhouette is incident upon the sensing device to generate initial image data responsive to the silhouette and processing the initial image data responsive to at least one predetermined algorithm to generate resultant image data responsive to at least one of a plurality of physical characteristics of the object.

Abstract: Scratches, pits and particles which are smaller or larger than the beam size may be measured and identified by a single and dual multiple beam techniques. In one embodiment, this the invention uses a pair of orthogonally oriented white light beams, one in the radial and one in the circumferential direction. The scattered light from the radial and circumferential beams allows the detection and classification of particles, pits and scratches. In other embodiments, single beam techniques are used to classify radial and circumferential defects.

Abstract: A detection apparatus for detecting perforation holes of a cinematographic film comprises at least one light source, at least one scanning sensor, which is arranged so as to receive light emitted by the light source after interaction with a perforation zone of the film, and an evaluation circuit for detecting, by means of an output signal of the scanning sensor, when an edge of a perforation hole passes through between light source and scanning sensor. The light source emits light which is polarized with a first polarization and the scanning sensor is sensitive selectively to light with a second polarization.

Abstract: It is possible to detect with high precision a plurality of types of nonuniformity defects that occur in patterns formed on the surface of an examination object. A device (10) for examination of nonuniformity defects that has a light source (12) for emitting light to a photomask 50 whose surface is provided with a repeating pattern (51) in which unit patterns (53) are arrayed in a regular fashion, and a photodetector (13) for photodetecting and converting into photodetection data scattered light from the photomask, so that the photodetection data is observed to detect nonuniformity defects that have occurred in the repeating pattern, in the device further having a wavelength filter (14) for selecting and extracting one or a plurality of desired wavelength bands from the light of a plurality of wavelength bands, wherein nonuniformity defects of the repeating pattern are detected using the selected and extracted light of the wavelength band.

Abstract: A system and method for measuring the physical characteristics of a component where the system includes a light source, a sensing device, a reflecting device, and a retention mount. The method includes associating a component with the system such that the component is positioned within the retention mount and operating the system to cause the light source to emit a collimated light beam along a source optical path, where the collimated light beam is reflected to cause a reflected collimated light beam to propagate along a sensor optical path to be incident upon the component to produce a component silhouette where the sensing device generates data responsive to the silhouette. The image data is processed to generate resultant data responsive to the component, wherein the resultant data is further responsive to at least one of a smoothing algorithm, a functional size algorithm and a centering algorithm.

Abstract: Methods are provided for detecting compression wood, blue stain, or pitch in lumber. A light beam is projected towards the wood sample. Line or area cameras acquire images of light that is reflected from the wood sample. Based on the intensity of the reflected light at one or more locations on the wood sample, compression wood, blue stain, or pitch may be detected.

Abstract: A laser beam emitted from a laser diode of each of detectors is applied to a partly cut region of a photosensitive sheet film which is spread toward the detectors by a film bending roller. Part of the laser beam which is reflected from the partly cut region is detected by an amount-of-light sensor. The laser beam that is applied to a surface of the photosensitive sheet film other than the partly cut region is reflected outside of a light-detecting area of the amount-of light sensor, and is not detected by the amount-of-light sensor.

Abstract: Method and apparatus for estimating surface moisture content of wood chips employing a surface moisture measurement obtained from a non-contact surface moisture sensor, which measurement is calibrated with values of a set of optical parameters, such as HSL color camera signals, representing light reflection characteristics of the wood chips in order to estimate the surface moisture content thereof.

Abstract: A system and method of inspecting a semiconductor wafer that may be employed to detect and to characterize defects occurring on an edge of the wafer. The wafer inspection system includes an optical module for providing a light source to scan the wafer edge, a light channel detector for detecting light reflected from the wafer edge, and a processor and memory for converting detected signals to digital form, and for filtering and processing the digital data. The module includes a wafer edge scanning mechanism for projecting a collimated laser beam toward the wafer edge at a predetermined angle of incidence to scan the wafer edge for defects. The light channel detector detects light reflected from the wafer edge to obtain wafer edge data, which are applied to thresholds to determine the location of defects in the wafer edge.

Abstract: Laser lights having a plurality of wavelengths from DUV to VUV range are used to inspect defects of a pattern at high speeds and in a high sensitivity using high light-output lasers, while solving a temporal/spatial coherence problem caused by using lasers as light source. This reduces the laser light temporal/spatial coherence. Further, to correct chromatic aberration caused by illumination with VUV and DUD lights, the lights of the VUV and DUV wavelengths are arranged in a coaxial illumination relation. The chromatic aberration left uncorrected is detected such that a detection optical path is branched into two optical path systems corresponding to respective wavelengths and an image sensor is placed on an image plane of each wavelength.

Abstract: A method of controlling the quality and/or condition of a fibre web in a process for manufacturing and/or finishing the fibre web, which includes, monitoring the fibre web with at least one optical spectrum separating measurement device, determining a quality variable of the fibre web, measuring electromagnetic radiation reflected from the fibre web using an optical spectrum separating measurement device synchronously with a movement of the fibre web, and measurements in the form of spectral data, generating a continuous quality variable chart, dividing the continuous quality variable chart into successive matched partial charts having a cycle length, detecting deviations and/or discontinuities of the quality variable from the successive matched partial charts, and detecting malfunctioning of a rotating/moving means using the detected deviations and/or discontinuities of the quality variable.

Abstract: When a thickness sensor detects a corner fold in a front end part of the paper sheet being carried, a light sensor checks whether a break exists or not in the front end part. When there is no break, it means the thickness sensor does not detect a corner fold but a foreign matter such as a tape mending a break. When there is a break, it means the thickness sensor detects a corner fold in the front end part. When there is no corner fold, the light sensor checks the front end part. When there is a break, it means there is a corner break but no corner fold in the front end part. When there is no break, it is a normal state. Regarding the back end part, a corner fold is detected in similarly to the foregoing.

Abstract: Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result.

Abstract: A method of analyzing structural characteristics of sidewall spacers fabricated on a wafer is disclosed. A grating bar having a plurality of grating targets is provided. A theoretical optical scatterometry spectrum is generated by subjecting the grating targets to optical scatterometry. An experimental optical scatterometry spectrum is generated by subjecting the sidewall spacers on the wafer to optical scatterometry. The structural characteristics of the sidewall spacers are equated with the structural characteristics of the grating targets when the theoretical optical scatterometry spectrum substantially matches the experimental optical scatterometry spectrum.

Abstract: An object detection apparatus for a vehicle includes a light emitter covered with an emission window, a light receptor covered with a reception window, a defect detection light emitter, a defect detection light receptor and a fracture detection circuit. The light emitter emits a light in front of the vehicle. The light receptor receives the light reflected by an object. The defect detection light emitter emits a detection light into one side of at least one of the emission and reception windows. The defect detection light receptor receives the detection light transmitted through the at least on emission and reception windows at another side. The fracture detection circuit determines whether either of the emission and reception windows are fractured based on the detection light received by the defect detection light receptors.

Abstract: An inspection device for metal rings of a Continuously Variable Transmission (CVT) V-belt which does not perform excessive detection of gloss marks as a detrimental manufacturing flaw configured with a first low-pass cutting portion for cutting out a predetermined low-frequency component contained in an electrical signal outputted from a first light detector or an electrical signal correlated to its electrical signal and a second low-pass cutting portion for cutting out a predetermined low-frequency component contained in an electrical signal outputted from a second light detector or an electrical signal correlated to its electrical signal, which precede a difference value calculation portion. The difference value calculation portion calculates a difference value between an electrical signal which passes through the first low-pass cutting portion and an electrical signal which passes through the second low-pass cutting portion.

Abstract: A folding apparatus (30) having at least one conveyor belt (10) which is used to convey signatures (64) at least on a section of a path (66, 68) of the signatures (64) through the folding apparatus (30). The folding apparatus (30) features at least one monitoring device (12) with which the conveyor belt (10) is associated. The monitoring device (12) contains a detector (20) for radiation (22) scattered from at least a part (24) of the conveyor belt (10). The condition of the conveyor belt (10) can be determined and classified in an advantageous manner so that the machine operator can receive a signal for timely replacement so as to avoid an unexpected breakage of the conveyor belt (10).

Abstract: An image can be read during main scanning under an optimized image reading condition even if dust is attached to a document such as a photographic film or the like, or if there are scratches. A scanner irradiates visible light and infrared light from a light source, and an image of the document is separated into infrared and visible components. These components are detected for pixels of the image by an image sensor. A controller, e.g., of the scanner recognizes defective pixels based on the infrared component. Furthermore, the controller corrects a visible component level in the defective pixel based on the infrared component level of the defective pixel and a reference level obtained where there is no defect, in order to create a histogram. The controller determines image reading conditions such as, for example, an exposure amount (exposure time) for use during main scanning and an LUT gradation conversion characteristic based on this histogram.

Abstract: Disclosed is a multi-functioned wafer aligner comprising a multi-functioned unit performing a wafer centering operation, a wafer flat zone alignment, and a wafer damage detection, and a main processor deciding positions of the wafer centering operation and the wafer flat zone alignment, and discriminating wafer damage, such as wafer breakage and wafer crack, by calculating an accumulated digital signal inputted from the multi-functioned unit.