Bifaced Patents (Class 251/167)
  • Patent number: 11808371
    Abstract: A gate valve is disposed between first and second chambers and allows a first opening leading to the first chamber and a second opening leading to the second chamber to be communicated and opens and closes. The gate valve includes a valve shaft, first and second valve plates that are attached to a leading end part of the valve shaft, an operation mechanism that moves these valve plates to an evacuation position at which the first opening and the second opening are communicated, a first closed position at which the first opening is closed by the first valve plate, and a second closed position at which the second opening is closed the second valve plate by operating the valve shaft, a fastening mechanism that attaches these valve plates to the valve shaft, and a support mechanism that fasten both end parts of these valve plates in a longitudinal direction.
    Type: Grant
    Filed: September 29, 2022
    Date of Patent: November 7, 2023
    Assignee: SMC CORPORATION
    Inventor: Takeshi Nishikawa
  • Patent number: 11674602
    Abstract: A low-weight, low material automated line blind valve with an actuator for moving the blind between an open and closed position, a sealing mechanism that can create a tight seal with the blind in either the open or closed position, and a biasing mechanism to improve the seal, wherein the biasing mechanism includes a ring with a sealing lip capable of creating a tight seal with a mating surface.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: June 13, 2023
    Inventor: Filiberto Jimenez
  • Patent number: 11248732
    Abstract: A gate valve includes a valve body for insertion through a through-hole formed in the fluid pipe, and a movement mechanism for moving the valve body along the diameter direction, and the valve body includes a valve main body and a seal member that is capable of undergoing elastic deformation and is provided on a holding portion of the valve main body. A core member formed from a material harder than the seal member is embedded between an outer face of the seal member, which is on the lower side in the movement direction, and a leading end face on the protruding side of the holding portion.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: February 15, 2022
    Assignee: WATERWORKS TECHNOLOGY DEVELOPMENT ORGANIZATION CO., LTD.
    Inventors: Gou Horikawa, Shuhei Azuma
  • Patent number: 11131395
    Abstract: A double-plate gate valve includes a valve body, a valve cover, a valve stem, a guide plate, a goggle plate assembly, a diversion hole assembly, a disc spring assembly and a valve plate and wedge assembly. The goggle plate assembly provides mounting support for the diversion hole assembly and the valve plate and wedge assembly in the valve chamber, the goggle plate assembly is movable along with the diversion hole assembly and the valve plate and wedge assembly in the valve chamber, and floating seals are formed at a contact surface between the diversion hole assembly and the guide plate, and at a contact surface between the valve plate and wedge assembly and the guide plate. A face-to-face distance and a sealing force between a sealing surface of the diversion hole assembly and a sealing surface of the valve body are adjustable.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: September 28, 2021
    Assignees: BEIJING AEROSPACE PROPULSION INSTITUTE, BEIJING AEROSPACE PETROCHEMICAL TECHNOLOGY & EQUIPMENT ENGINEERING CORPORATION LIMITED
    Inventors: Fan Yang, Jinxian Liu, Yingren Ding, Jin Guo, Xiang Su, Huan Yang, Jingbo Han, Pingyang Zheng
  • Patent number: 10636629
    Abstract: Embodiments disclosed herein generally relate to a substrate processing chamber component assembly with a split slit liner door assembly. In one embodiment, the split slit liner door assembly has a first door portion having a top surface, a rear face and a font face, a RF conductive gasket is disposed on the front face of the first door portion, a second door portion having sides, a bottom and a front surface, the bottom coupled to the actuator, and a linkage assembly coupling the first door portion to the second door portion wherein the linkage assembly is configured to translate a vertical motion of the second door portion relative to a first door portion and a horizontal motion spacing the first door portion from the second door portion.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: April 28, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Hamid Noorbakhsh, Reyn Wakabayashi
  • Patent number: 10539253
    Abstract: A vacuum valve has a valve opening (2, 3) that is surrounded by a valve seat (6, 7), a valve plate (10, 11) that releases the valve opening (2, 3) in an open state and rests against the valve seat (6, 7) in a closed state, and a carrier unit (9) that supports the valve plate (10, 11) and moves between a first position, in which the valve opening (2, 3) is in the open state, and a second position. The valve plate (10, 11) moves between a retracted position and an extended position. In the second position of the carrier unit (9) and in the extended position of the valve plate (10, 11), the valve opening (2, 3) is in the closed state. In the retracted position, the valve plate (10, 11) is supported against the carrier unit (9).
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: January 21, 2020
    Assignee: VAT Holding AG
    Inventors: Florian Ehrne, Christof Bachmann, Daniel Seitz
  • Patent number: 10316664
    Abstract: An exhaust gas turbocharger may include a turbine housing and a turbine arranged in the turbine housing. The turbine housing may include at least two exhaust gas channels and a partition separating the at least two exhaust gas channels from one another. A wastegate valve may be arranged such that the at least two exhaust gas channels are connectable to a bypass duct bypassing the turbine. The wastegate valve may include a valve body and a valve seat interacting with the valve body. The wastegate valve may be configured such that at least one of a ram supercharging operation and a pulse supercharging operation is activated depending on a degree of opening of the wastegate valve.
    Type: Grant
    Filed: May 17, 2016
    Date of Patent: June 11, 2019
    Assignee: BMTS Technology GmbH & Co. KG
    Inventors: Dirk Lummer, Martin Kropp
  • Patent number: 10234059
    Abstract: A vacuum valve including a valve body with first and second valve openings, first and second closure elements attached to a valve rod, a longitudinally adjustable transmission piece attached to the valve rod that is adjustable from an open position into an intermediate position, and in a transverse adjustment direction from the intermediate position into a first closing position, and counter thereto into a second closing position. The transmission piece is connected to the valve body via a longitudinal stroke linear guide and a transverse stroke linear guide having a transverse stroke guide part which extends parallel to an oblique adjustment direction and a transverse stroke carriage displaceably guided thereon. To adjust the transmission piece from the intermediate position into the first or second closing position, the transverse stroke carriage is linearly displaceable in or counter to the oblique adjustment direction from a central position into a first or second press-on position.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: March 19, 2019
    Assignee: VAT Holding AG
    Inventors: Florian Ehrne, Daniel Seitz, Andreas Hofer
  • Patent number: 9841110
    Abstract: A sprung gate for a valve having an endless elastic band sandwiched between first and second gate members that each define an opening therethrough in an open position portion thereof, which collectively form a passage through the sprung gate. The first gate member includes a fastener connected to a fastener receiving member of the second gate member thereby securing the first and second gate members together as a unit. This sprung gate unit is operatively connected to an actuator for linear translation within a pocket of a conduit to control fluid flow through the conduit. This assembled device may be manufactured using spin welding to sealingly mate the conduit to a housing enclosing the actuator.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: December 12, 2017
    Assignee: Dayco IP Holdings, LLC
    Inventors: David E. Fletcher, Brian M. Graichen, Matt Gilmer, James H. Miller
  • Patent number: 9803774
    Abstract: A motion conversion device is disclosed for converting motion in one direction into motion in another direction. The motion conversion device may include a single-acting cylinder hydraulically or pneumatically coupled to a double-acting cylinder such that movement of the single-acting cylinder along an axis causes movement of the double-acting cylinder along a non-parallel axis. The single-acting cylinder may be mechanically coupled to another single-acting cylinder such that movement of one of the single-acting cylinders in a direction causes movement of the other one of the single-acting cylinders in an opposite direction. In this way, the single-acting cylinders may cooperate to provide reciprocal motion of the double-acting cylinder. Also disclosed is a valve incorporating a motion conversion device for the purpose of moving a closure member between an open position and a closed position. Furthermore, a method for operating a valve closure member with a motion conversion device is disclosed.
    Type: Grant
    Filed: October 2, 2015
    Date of Patent: October 31, 2017
    Assignee: FISHER CONTROLS INTERNATIONAL LLC
    Inventors: Matthew Lawrence Gulleen, Elliot James Hoff
  • Patent number: 9066376
    Abstract: A locking gate device suitable for selectively blocking the flow of fluid and/or articles through a pair of openings defined by two spaced-apart members is provided. The spaced-apart members may be opposing walls or flanges of two adjacent processing chambers or vessels in a pressurized heating system. The locking gate device includes a gate assembly that is movable within a gate-receiving space defined between opposed sealing surfaces of the spaced-apart members. The gate assembly comprises a pair of sealing plates and a drive member shiftable relative to the sealing plates. As the drive member is shifted between a retracted position and an extended position, a pair of bearings disposed between the sealing plates and the drive member forces the sealing plates outwardly to contact the sealing surfaces of the spaced-apart members. This substantially blocks the flow-through openings defined by one or both sealing surfaces and restricts flow therethrough.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: June 23, 2015
    Assignee: Microwave Materials Technologies, Inc.
    Inventors: Harold Dail Kimrey, Jr., Gregory Eugene Cunningham
  • Patent number: 8888068
    Abstract: A system includes a split gate valve with first and second gate sections coupled together and configured to move together within a cavity of the split gate valve between an open position and a closed position. The split gate valve includes a rolling actuator to reduce friction and to convert a rotational input into a linear motion to move the first and second gate sections between the open and closed positions. The split gate valve also includes at least one expansion bar configured to bias the first and second gate sections from one another to seal against opposite seats of the split gate valve, wherein each expansion bar includes a spring mechanism configured to compress upon moving the first and second gate sections into and beyond the closed position to prevent buckling of the expansion bar.
    Type: Grant
    Filed: November 16, 2011
    Date of Patent: November 18, 2014
    Assignee: Cameron International Corporation
    Inventors: Loc Gia Hoang, S. Mark Svoboda
  • Patent number: 8807526
    Abstract: Disclosed is a butterfly valve capable of controlling fluid flow according to rotation of a disc. The butterfly valve includes a valve body having an inner space of which two end portions are open; first and second discs disposed to face each other at the inner space, installed to be rotatable between an open state and a closed state of the inner space, and configured to selectively open and close the inner space; first and second sealing members mounted to the valve body, and configured to contact the first and second discs, respectively in the closed state; and a disc controlling apparatus configured to move the first and second discs to a direction contacting to or spacing from the first and second sealing members in the closed state. Under this configuration, durability and a sealing function may be enhanced.
    Type: Grant
    Filed: January 17, 2012
    Date of Patent: August 19, 2014
    Assignee: Seokwang Mfg Co., Ltd.
    Inventor: Man Young Kim
  • Publication number: 20130263954
    Abstract: Embodiments of a gate valve equalization system comprise: a gate valve; a gate; a preloading valve arrangement; a floating coupler assembly; a relief valve arrangement; and a means for control. The preloading valve arrangement permits fluid to enter the valve body from the upstream side of the gate. The means for control serves as a control interface allowing engagement of the floating coupler assembly and opening/closing of the gate valve. Engagement of the floating coupler, engages the assembly relief valve arrangement and allows redistribution of fluid pressure and circulation of fluid from one side of the gate to opposing side of the gate within the gate valve.
    Type: Application
    Filed: April 5, 2012
    Publication date: October 10, 2013
    Inventor: James David McBride
  • Patent number: 8434511
    Abstract: A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring or barrier plate abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve or barrier plate is advantageously water cooled to allow use with a heated processing chamber.
    Type: Grant
    Filed: May 24, 2010
    Date of Patent: May 7, 2013
    Assignee: GT Advanced CZ LLC
    Inventors: Dick S. Williams, William L. Luter
  • Patent number: 7931251
    Abstract: An expanding gate valve having a valve body defining a valve chamber and flow passages and having spaced sealing surfaces. Gate members are moveable within the valve body between open and closed positions and at the closed position having sealing engagement with the spaced sealing surfaces. A wedge member is positioned between the gate members and has at least one tapered surface having reacting engagement with a tapered surface of one of the gate members so that relative linear movement of the gate member relative to the tapered surface of the wedge member develops a lateral gate expansion force causing expansion of the gate members for tight sealing engagement with the spaced sealing surfaces.
    Type: Grant
    Filed: July 8, 2009
    Date of Patent: April 26, 2011
    Assignee: Perdix Engineering LLC
    Inventor: Charles C. Partridge
  • Patent number: 7731156
    Abstract: A vacuum valve including a valve housing two valve openings, a closure member having two closure plates, a transverse drive unit for adjusting the closure member between an open position and an intermediate position where the closure plates cover the valve openings, a first longitudinal drive unit for adjusting the closure member between the intermediate position and a first closed position, and a second longitudinal drive unit for adjusting the closure member between the intermediate position and a second closed. Each longitudinal drive unit includes a plurality of actuating elements which are guided into the vacuum area of the valve housing. These actuating elements are adjustable by driving elements between a retracted, passive position where their actuating ends are raised from the closure member and an advanced, active position where their actuating ends are pressed against the closure member and press the respective closure plate against the respective valve seat.
    Type: Grant
    Filed: September 10, 2007
    Date of Patent: June 8, 2010
    Assignee: Vat Holding AG
    Inventor: Bernhard Duelli
  • Publication number: 20080210307
    Abstract: Apparatuses and methods are provided for sealing a slit valve passage between two substrate processing chambers. A body with two openings to register with openings in the walls of the process chambers, and a passageway between them, houses a sealing member configured to extend and retract to block or open the passageway. The sealing member comprises a seal on one face that covers one opening, and a moveable lateral extension on the other face that braces against the other opening. The extension is actuated to contact the wall of the body, providing a bracing or sealing force to the seal on the other face of the sealing member. The sealing force may be adjusted by varying the gas pressure to the sealing member based on pressure conditions in the process chambers.
    Type: Application
    Filed: February 28, 2008
    Publication date: September 4, 2008
    Inventors: Takayuki Matsumoto, Shinichi Kurita
  • Patent number: 7341237
    Abstract: A valve mechanism having at least one movable valve member for sealing of a valve opening in a housing. Movements of the individual movable valve members are accomplished essentially parallelly to, and perpendicularly to, the seat surface of the valve during the opening and closing of the valve. In order to achieve high forces and low wear in the movement carried out with aid of a slot guide which guide serves to transmit forces during, and in the direction of, the opening and closing, the slot guide comprises slots which are formed in a drive plate, which slots cooperate with and overlap complementary slots in the movable valve members.
    Type: Grant
    Filed: September 12, 2006
    Date of Patent: March 11, 2008
    Inventor: Hubert Bösch
  • Patent number: 7128305
    Abstract: A unitary slot valve actuator is in a vacuum body between process and transport modules. A separate valve is provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. Access to both open valves for servicing is by centering the unitary actuator to hold both valves open, but not vertically-spaced, relative to the slots. The open valves are easily reached by a service worker through an access port. A computer workstation operates a controller for the slot closure, and for moving the unitary actuator and the valves from the open and centered position, away from the slots to expose seal surfaces around the slots for cleaning.
    Type: Grant
    Filed: April 19, 2005
    Date of Patent: October 31, 2006
    Assignee: Lam Research Corporation
    Inventor: Gregory A. Tomasch
  • Patent number: 7059583
    Abstract: A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as process and transport modules. Separate valves are provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The unitary actuator allows access to an open valve for servicing the open valve by way of a centering mechanism that holds the valves in an open, but not vertically-spaced, position relative to the slots. The open valves are easily reached by a service worker. A separate motor moves the unitary actuator and the valves down from the open position and away from the slots to expose seal surfaces around the slots for cleaning.
    Type: Grant
    Filed: February 10, 2005
    Date of Patent: June 13, 2006
    Assignee: Lam Research Corporation
    Inventor: Gregory A. Tomasch
  • Patent number: 7004453
    Abstract: Embodiments of the present invention provide a pendulum valve with a full range of normal position control. The pendulum valve can include a valve housing having a flow channel, and a valve body that is movable within the valve housing between a fully open position and at least one closed position. The pendulum valve can also include an electrical control mechanism operable to position the valve body in any one of a range of partially open positions.
    Type: Grant
    Filed: September 12, 2001
    Date of Patent: February 28, 2006
    Assignee: Mykrolis Corporation
    Inventor: Shiyuan (Denny) Cheng
  • Patent number: 6913243
    Abstract: A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the unitary actuator for each of two valve body slots, each body slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The unitary actuator allows access to an open valve for servicing the open valve by way of a resilient bias assembly that releasably holds the valves in an open, but not vertically-spaced, position relative to the respective slots. The open valves are easily reached by a gloved hand of a service worker. A separate actuator motor moves the unitary actuator with the valves vertically down from the open position and away from the slots to expose seal surfaces around the slots for cleaning.
    Type: Grant
    Filed: March 30, 2000
    Date of Patent: July 5, 2005
    Assignee: Lam Research Corporation
    Inventor: Gregory A. Tomasch
  • Patent number: 6854708
    Abstract: A valve achieves a high-vacuum seal and opens and closes with no sliding or otherwise abrading contact between the sealing plate and the valve seat, while maintaining pressure of the plate against the valve seat in the event of a failure in the valve actuation mechanism. These results are attained by use of a composite valve plate that includes a sealing plate joined to a support block through a retractable resilient connector. During retraction, the sealing plate is drawing close to the block by a pneumatic actuator internal to the composite valve plate, the actuator arranged to oppose and overcome a mechanical resilient element also contained within the valve plate that urges the sealing plate outward from the support block to effect the seal when the actuator is not engaged.
    Type: Grant
    Filed: July 21, 2003
    Date of Patent: February 15, 2005
    Assignee: MDC Vacuum Products Corporation
    Inventors: Jose L. Contin, Neli Ulea
  • Publication number: 20040079915
    Abstract: A valve achieves a high-vacuum seal and opens and closes with no sliding or otherwise abrading contact between the sealing plate and the valve seat, while maintaining pressure of the plate against the valve seat in the event of a failure in the valve actuation mechanism. These results are attained by use of a composite valve plate that includes a sealing plate joined to a support block through a retractable resilient connector. During retraction, the sealing plate is drawing close to the block by a pneumatic actuator internal to the composite valve plate, the actuator arranged to oppose and overcome a mechanical resilient element also contained within the valve plate that urges the sealing plate outward from the support block to effect the seal when the actuator is not engaged.
    Type: Application
    Filed: July 21, 2003
    Publication date: April 29, 2004
    Applicant: MDC Vacuum Products Corporation
    Inventors: Jose L. Contin, Neli Ulea
  • Patent number: 6601824
    Abstract: A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or opened according to the position of the single shaft. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The single shaft allows access to an open valve for servicing the open valve by way of stops that limit drive travel and hold the valve in an open, but not vertically-spaced, position relative to a respective slot. The open valve is easily reached by a gloved hand of a service worker. The single shaft is mounted on a first cradle, and the first cradle is mounted on a second cradle. Two separate shaft drives move the two cradles to position the single shaft to locate the valves between the slots to open one slot and close the other slot.
    Type: Grant
    Filed: March 12, 2002
    Date of Patent: August 5, 2003
    Assignee: Lam Research Corporation
    Inventors: Tony R. Kroeker, Gregory A. Tomasch
  • Patent number: 6564818
    Abstract: A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or opened according to the position of the single shaft. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The single shaft allows access to an open valve for servicing the open valve by way of stops that limit drive travel and hold the valve in an open, but not vertically-spaced, position relative to a respective slot. The open valve is easily reached by a gloved hand of a service worker. The single shaft is mounted on a first cradle, and the first cradle is mounted on a second cradle. Two separate shaft drives move the two cradles to position the single shaft to locate the valves between the slots to open one slot and close the other slot.
    Type: Grant
    Filed: January 28, 2002
    Date of Patent: May 20, 2003
    Assignee: Lam Research Corporation
    Inventors: Tony R. Kroeker, Gregory A. Tomasch
  • Patent number: 6517048
    Abstract: Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a gate, located in the housing, and displaceable between a stowed position and a deployed position. When the gate is in the stowed position, communication is permitted between the first and second regions. When the gate is in the deployed position, the gate spans the channel and can be controlled to isolate the first and second regions. The valves can be used, for example, in connection with systems for processing large glass substrates. The valves are particularly useful for isolating long rectangular openings, such as the openings in substrate processing chambers. Isolating processing chambers or load lock chambers from one another, for example, in a linear system, is facilitated.
    Type: Grant
    Filed: August 24, 2001
    Date of Patent: February 11, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Gary C. Ettinger, John M. White
  • Patent number: 6390448
    Abstract: A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or opened according to the position of the single shaft. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The single shaft allows access to an open valve for servicing the open valve by way of stops that limit drive travel and hold the valve in an open, but not vertically-spaced, position relative to a respective slot. The open valve is easily reached by a gloved hand of a service worker. The single shaft is mounted on a first cradle, and the first cradle is mounted on a second cradle. Two separate shaft drives move the two cradles to position the single shaft to locate the valves between the slots to open one slot and close the other slot.
    Type: Grant
    Filed: March 30, 2000
    Date of Patent: May 21, 2002
    Assignee: Lam Research Corporation
    Inventors: Tony R. Kroeker, Gregory A. Tomasch
  • Publication number: 20020050582
    Abstract: Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a gate, located in the housing, and displaceable between a stowed position and a deployed position. When the gate is in the stowed position, communication is permitted between the first and second regions. When the gate is in the deployed position, the gate spans the channel and can be controlled to isolate the first and second regions. The valves can be used, for example, in connection with systems for processing large glass substrates. The valves are particularly useful for isolating long rectangular openings, such as the openings in substrate processing chambers. Isolating processing chambers or load lock chambers from one another, for example, in a linear system, is facilitated.
    Type: Application
    Filed: August 24, 2001
    Publication date: May 2, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Gary C. Ettinger, John M. White
  • Publication number: 20020050581
    Abstract: Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a gate, located in the housing, and displaceable between a stowed position and a deployed position. When the gate is in the stowed position, communication is permitted between the first and second regions. When the gate is in the deployed position, the gate spans the channel and can be controlled to isolate the first and second regions. The valves can be used, for example, in connection with systems for processing large glass substrates. The valves are particularly useful for isolating long rectangular openings, such as the openings in substrate processing chambers. Isolating processing chambers or load lock chambers from one another, for example, in a linear system, is facilitated.
    Type: Application
    Filed: August 24, 2001
    Publication date: May 2, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Gary C. Ettinger, John M. White
  • Patent number: 6347918
    Abstract: A sealable door assembly including a frontplate which faces an opening to be sealed, a backplate operatively coupled to the frontplate, and at least one inflatable member located between the frontplate and the backplate. When inflated, the inflatable member moves the frontplate into sealing engagement with the opening. In one embodiment the inflatable member includes one or more vacuum grade bellows. A movable mechanism moves the door assembly to selectively occlude the opening. Once the door assembly occludes the opening, the inflatable member is inflated and expands forcing the frontplate in a direction normal to the opening, thereby sealing the opening. The door assembly may be mounted within a pocket formed in an outer wall of a transfer chamber, and a sealing plate may be employed to form a gas tight region within the pocket. The gas tight region may be pressurized to enhance the door's seal of the opening.
    Type: Grant
    Filed: January 27, 1999
    Date of Patent: February 19, 2002
    Assignee: Applied Materials, Inc.
    Inventor: Jeff Blahnik
  • Patent number: 6308932
    Abstract: Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a gate, located in the housing, and displaceable between a stowed position and a deployed position. When the gate is in the stowed position, communication is permitted between the first and second regions. When the gate is in the deployed position, the gate spans the channel and can be controlled to isolate the first and second regions. The valves can be used, for example, in connection with systems for processing large glass substrates. The valves are particularly useful for isolating long rectangular openings, such as the openings in substrate processing chambers. Isolating processing chambers or load lock chambers from one another, for example, in a linear system, is facilitated.
    Type: Grant
    Filed: February 22, 2000
    Date of Patent: October 30, 2001
    Assignee: Applied Komatsu Technology, Inc.
    Inventors: Gary C. Ettinger, John M. White
  • Patent number: 6302372
    Abstract: A gate valve (1) is constructed for the simultaneous blocking or clearing of two rectangular passage openings (8,9) of two chamber walls (4,5) that are provided between two vacuum chambers (1,3) and aligned with one another. To this end, it has two valve plates (20, 21), which are a component of a slider (15), which is situated so that it can move with play from a position clearing the passage openings (8,9) to a position which closes the passage openings (8,9). To move the valve plates (20,21) to the closing setting against the passage openings (8,9) on the slider (15), at least one lifting element (24), which is acted on by pressure, is provided.
    Type: Grant
    Filed: December 6, 1999
    Date of Patent: October 16, 2001
    Assignee: Beybold Systems GmbH
    Inventors: Andreas Sauer, Manfred Schuhmacher, Johannes Kunz, Gerhard Joos
  • Patent number: 6164622
    Abstract: A compact expanding gate valve having a valve body defining a flowway and having spaced internal seat rings. Guide elements project internally from the valve body. A valve stem driven gate and segment assembly is movable within the valve body between open and closed positions relative to the seat rings and has control arms mounted by actuating pins to each side of gate and segment members of the gate and segment assembly. The control arms are movable linearly with the gate and segment assembly and are disposed in guided relation with the guide elements during opening and closing movement.
    Type: Grant
    Filed: October 22, 1999
    Date of Patent: December 26, 2000
    Assignee: Daniel Valve Company, Inc.
    Inventor: Charles C. Partridge
  • Patent number: 6158718
    Abstract: An improved gate valve having a body with horizontal inlet and outlet fluid flow passageways with first and a second seat surrounding the passageways, a stem supported in a vertical plane by the body, a gate positioned between the seats and being vertically displaceable by the stem between an upper valve open position and a downward valve closed position, the gate being formed by a first and a second segment, each segment having an internal face inclined at an angle to a vertical plane and an outer planar sealing face, the outer sealing faces being paralleled to each other, each segment having in a lower portion an opening therethrough, the openings in the segments being aligned with the body fluid flow passageways when the gate is in the upper, open position and out of alignment with the fluid flow passageways when the gate is in the lower, closed position.
    Type: Grant
    Filed: September 17, 1999
    Date of Patent: December 12, 2000
    Assignee: ERC Industries, Inc.
    Inventors: Heinrich H. Lang, F. Jeffery Lane
  • Patent number: 6095180
    Abstract: A high-vacuum valve arranged to prevent conduction of heat from a valve element to a low-temperature part through a valve shaft. After the valve element has been moved to a position facing opposite to a valve seat by rectilinear motion of the valve shaft, the valve element is pressed against the valve seat to close the valve by pivotal motion of the valve shaft. A heater is provided in the valve shaft in close contact with it. Wiring is connected to the heater to supply it with electric power from outside the high-vacuum valve.
    Type: Grant
    Filed: April 26, 1999
    Date of Patent: August 1, 2000
    Assignee: SMC Corporation
    Inventors: Tsuneo Ishigaki, Kenji Waragai
  • Patent number: 5722636
    Abstract: A valve gate for sealing the inlet from the outlet of a block and bleed type valve consists of two independent disk-like members which are interconnected by a slide mechanism allowing the disk-like members to be moved simultaneously forwardly in a first configuration, to be moved simultaneously rearwardly in a second configuration and to float and, in a specially preferred embodiment, to pivot with respect to each other between the first and second configurations so as to facilitate release of the disk-like members from the valve seat on withdrawal. An upper disk-like member to seal the inlet and a lower disk-like member to seal the outlet are connected by one or more members engaging mounting frames fixed thereto. One of the mounting frames is connected to the valve stem for horizontal movement of one of the disk-like members into and out of substantial registration with either the inlet or the outlet in response to operation of the valve stem.
    Type: Grant
    Filed: December 18, 1996
    Date of Patent: March 3, 1998
    Inventor: James L. Houston
  • Patent number: 5445359
    Abstract: A gate valve [10] is disclosed having a primary [300, 302] and secondary [316] seal on the upstream and downstream sides of the gate [15], wherein the gate [15] forms a seal with the seat [300] which is activated mechanically [320] and is fluid powered, and wherein a resilient seal [316a] is moved toward the gate [15] by mechanical actuation [31 ] to form a fluid powered secondary fluid-tight seal with the gate [15].
    Type: Grant
    Filed: January 3, 1994
    Date of Patent: August 29, 1995
    Inventor: John Beson
  • Patent number: 5379983
    Abstract: A shut-off slide valve for use in pipelines or for closing a container aperture includes a housing, a shut-off member formed of a sealing plate and a counter element spaced from the sealing plate and displaceable in the housing, and an actuation member for displacing the shut-off member in the housing, with the actuation member having a portion extending between the sealing plate and the counter element, and at least one of the sealing plate and the counter element having a collar substantially bridging the space between the sealing plate and the counter element, so that the shut-off member has a shape similar to that of a lid-covered can.
    Type: Grant
    Filed: December 21, 1993
    Date of Patent: January 10, 1995
    Assignee: VAT Holding AG
    Inventor: Friedrich Geiser
  • Patent number: 5356113
    Abstract: An isolation valve for a single crystal pulling apparatus providing a good sealing performance is disclosed. The apparatus comprises a casing having two opposite valve seats, a first valve seat having a first opening communicable with the main chamber of the apparatus, a second valve seat having a second opening communicable with the pull chamber of the apparatus. The body of the isolation valve includes a first plate movable in and out of contact with the first valve seat to open and shut the first opening, a second plate movable in and out of contact with the second valve seat to open and shut the second opening, and a bellows connecting the first and second plates.
    Type: Grant
    Filed: September 23, 1993
    Date of Patent: October 18, 1994
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Koji Mizuishi, Kouzou Yokota, Katsuhiko Ogino
  • Patent number: 5163478
    Abstract: A valve whose housing has valve spool receiving means arranged in it so that the spool is able to move between two switching positions reciprocatingly and is able to connect valve ducts in the housing with each other for the passage of fluid. For this purpose it has window-like transversely extending passages, through which the fluid may flow between two valve ducts. While offering a low resistance to flow the valve design leads to large orifices. Special means are provided for sealing and the control of frictional forces during operation.
    Type: Grant
    Filed: August 28, 1991
    Date of Patent: November 17, 1992
    Assignee: Festo KG
    Inventor: Jan R. de Fries
  • Patent number: 5101861
    Abstract: A slide valve comprising: a valve body having two axially aligned openings provided with means for connection in a duct; a drive rod; a valve member; and a backing member; wherein the valve member includes a hollow opening out to both faces of the valve member and fitted with a piston movable between a simple abutment at one end and a shoulder in the hollow at an opposite end, the piston bearing against said shoulder via sealing means, a return spring urging said piston towards said simple abutment, said piston including, at its simple abutment end, means for co-operating with a sloping ramp of said drive rod such that during closure of the valve, the piston is thrust against said shoulder of the hollow.
    Type: Grant
    Filed: July 12, 1991
    Date of Patent: April 7, 1992
    Assignee: Alcatel CIT
    Inventors: Patrice Deville, Luc Mathieu
  • Patent number: 5083748
    Abstract: A large diameter gate valve uses a radially directed fluid pressure loaded all metal seal formed by engaging and disengaging a fixed and a moveable seal element. The fixed element is formed of a circular flange which contains a pressure chamber with a deformable wall, and is mounted to the valve body. The moving seal element contains an annular recess which mates with the circular flange, and is carried on a moveable sub-frame which moves on a frame fixed in the valve body. The valve opening defines an axis in a first direction, and the sub-frame moves through the valve body in a second direction which is substantially perpendicular to the first direction. The sub-frame and moveable seal element move in the second direction until the moveable element reaches a stop mounted in the valve body at which position the moveable element is aligned with but spaced apart from the fixed element.
    Type: Grant
    Filed: January 7, 1991
    Date of Patent: January 28, 1992
    Assignee: Batzer Vacuum Technology Associates, Inc.
    Inventor: Thomas H. Batzer
  • Patent number: 5029809
    Abstract: Control device (1) for a valve (2) with a disc (3), comprising a body (4), two seals (5), two openings (7), spacer balls (8), cavities (9) in the inner faces (10) of the body (4) and of the seals (5), and an elastic return member (11) for the seals (5), the disc (3) being able to be moved as a whole and to be deformed in the axial direction, and being capable of assuming three characteristic positions of totally open, closed tight and intermediate, the said control device (1) comprising operation-control means (20), a control member (21), link means (23) comprising, firstly, support means (24) for the disc (3) which pivot about an axis (25) and are integral in rotation with the seals (5), displaceable by pivoting; and, secondly, separate means (26) for operating the disc (3) which are connected to the control member (21) and to the body (4).
    Type: Grant
    Filed: June 14, 1990
    Date of Patent: July 9, 1991
    Assignee: Ets J.C. Coureau
    Inventor: Jean C. Coureau
  • Patent number: 4923171
    Abstract: A gate valve is disclosed having a secondary seal, wherein the gate forms a metal to metal seal with the seat and wherein a resilient seal is moved toward the gate in a closed position to form a secondary fluid-tight seal with the gate. A device for deenergizing the secondary seal is provided in order to prevent wear of the secondary seal upon opening of the gate and also to reduce the gate drag caused by the energized secondary seal. Also disclosed is a pressure relief mechanism for the secondary seal adapted to prevent damage to the seal and a mechanism for evenly applying opposing secondary seals.
    Type: Grant
    Filed: December 1, 1987
    Date of Patent: May 8, 1990
    Assignee: Foster Oilfield Equipment Company
    Inventor: John Beson
  • Patent number: 4903937
    Abstract: An isolation valve includes a housing having a port and a seal plate for sealing the port. The seal plate is linked to a shaft which carries a guide frame. To close the port, a drive mechanism drives the shaft linearly in one direction. The seal plate first moves linearly with the shaft until the guide frame stops against the housing. The seal plate then moves linearly in a direction perpendicular to a surface of the housing containing the port until it seals the port. Motion of the drive shaft in the opposite direction causes the seal plate to retrace its path. In one embodiment, the valve includes a second seal plate for sealing a second port. A spring between the guide means and the shaft provides pre-load which maintains the seal plates in a retracted position until the frame stops against the housing. An extension spring between the first and second seal plates eliminates play in the link mechanism and extends valve life.
    Type: Grant
    Filed: March 21, 1989
    Date of Patent: February 27, 1990
    Assignee: Varian Associates, Inc.
    Inventors: Antoni F. Jakubiec, Thomas M. Daley
  • Patent number: 4817915
    Abstract: A slide valve includes a valve housing and a valve closure control device which is laterally movable within the valve housing, the valve housing including two parallel flange members which have openings therein and seating surfaces on the facing sides thereof and the valve closure control device including a frame, two parallel shut-off plates mounted on the frame, the shut-off plates having triangularly-arranged cam projections on the facing sides thereof, and two shafts mounted on the frame between the shut-off plates, each shaft mounting three roll bodies for cooperation with two associated cam projections on one shut-off plate and a cam projection on the other shut off plate to move the plates apart and against the seating surfaces on the flange members when the valve closure control device is fully inserted within the valve housing and thus at its closure position therewithin.
    Type: Grant
    Filed: December 16, 1987
    Date of Patent: April 4, 1989
    Assignee: Cetec AG
    Inventor: Friedrich Tinner
  • Patent number: 4706934
    Abstract: A gate valve includes a body which includes first and second valve seats. First and second gates are mounted for movement adjacent to the valve seats, and each of the gates has an outer face adapted to seal against the respective valve seat and an inner face which defines a thrust pad. A wedge is interposed between the first and second gates, and the wedge defines first and second converging wedge faces rigidly positioned with respect to one another to bear against the respective thrust pads. At least one of the thrust pads and the wedge faces defines a convex surface. A hand wheel axially moves the wedge with respect to the body and the wedge is coupled to the gates such that movement of the wedge away from the valve seats moves the gates away from the valve seats. The convex surface allows the respective gate to articulate with respect to the wedge as necessary to align with the valve seat.
    Type: Grant
    Filed: August 22, 1986
    Date of Patent: November 17, 1987
    Assignee: Mark Controls Corporation
    Inventor: George W. Brown
  • Patent number: 4679768
    Abstract: A valve for connection in a pipeline or duct for the conveyance of a fluent medium includes a valve plate which is movable laterally relative to the duct between respective open and closed positions, with resilient sealing means provided on or in association with the valve plate. The sealing means is provided on an axially movable member to engage one face of the valve plate, while the opposed sealing means is carried by a fixed end member so that the valve plate is clamped between them. Either of the sealing means may be omitted. A ram actuates the valve plate by rotation of a shaft while simultaneously rotating a control ring forming part of the control mechanism which moves the member axially to clamp and release the valve plate.
    Type: Grant
    Filed: July 18, 1985
    Date of Patent: July 14, 1987
    Assignee: Bercorit & Herweg Limited
    Inventor: Derrick Hardy