Abstract: A vacuum valve including a housing, a closure unit with two valve plates, supported by a valve rod, and a carrier piece connected rigidly to the valve rod, a transmission unit, a drive unit with a base body and an actuator, a longitudinal linear guide, by which the transmission unit is guided parallel to a longitudinal adjusting direction relative to the base body, an oblique linear guide, by which the carrier piece is guided parallel to an oblique adjusting direction relative to the transmission unit, a spring acting between the transmission unit and the carrier piece, a stop device which blocks adjustment of the closure unit in the longitudinal adjusting direction in a middle position thereof, and a blocking unit, which in the locked state blocks an adjustment of the closure unit situated in the middle position counter to the longitudinal adjusting direction and, in the release state, allows adjustment.

Abstract: A fluid supply system for a machine such as an internal combustion engine includes a shutoff valve having an electrical actuator that includes a solenoid subassembly, and a stabilizer for the electrical valve actuator. The stabilizer includes a fitting structured to couple the shutoff valve to adjacent hardware in the fluid supply system, and a strongarm extending between the fitting and the solenoid assembly and clamped to the solenoid subassembly. A vibration-damping reinforced grommet may be clamped between the solenoid subassembly and the clamp.

Abstract: In a connection mechanism that connects a valve shaft to air cylinders, shake prevention mechanisms are disposed at facing portions at which outer side surfaces of side frames face inner side surfaces of housings of the air cylinders and/or facing portions at which inner side surfaces and of the side frames face left-hand and right-hand side surfaces of a center frame. The shake prevention mechanisms include a sliding member that is disposed on a sliding surface that is formed on one of two surfaces that face each other and on the other and a spring mechanism that presses the sliding member in a direction in which the sliding member comes into contact with the sliding surface.

Abstract: A gate valve includes a valve plate and a valve rod that are detachably connected along a rod axis by screwing a connecting screw in a screw hole formed at an end of a valve rod through a screw insertion hole formed in the valve plate. The valve plate includes a contact portion that is in contact with the connecting screw. When the connecting screw is loosened to detach the valve plate from the valve rod, the valve plate is displaced along the rod axis together with the connecting screw via the contact portion to move to a valve-plate detaching position at which the connecting screw comes completely out of the screw hole of the valve rod. Accordingly, the valve plate can be detached from the valve rod easily and reliably even if the valve rod is tightly inserted in the valve plate mounting hole.

Abstract: A compact vacuum gate valve capable of reducing a kink and sliding between a seal material and a seal surface, achieving a low occurrence of particles, stably and reliably performing valve-body open-close movements, restricting impulsive sound and vibrations, and also having high durability. The vacuum gate valve includes housing bodies, a valve-body open/close driving body, and a stem provided with a valve body. Each of the housing bodies has therein a piston rod and a cam member with a cam groove. On each side of the valve-body open/close driving body, a cam roller and a fulcrum roller are provided. On an inner side of the housing body, a vertical movement guiding part and a stopper part are provided. A spring for causing the valve-body open/close driving body to ascend is provided between the valve-body open/close driving body and a fixed base part on a fixed side.

Abstract: A constant density heat exchanger is provided. The constant density heat exchanger includes a housing extending between a first end and a second end and defining a chamber having an inlet and an outlet. A first flow control device is positioned at the inlet of the chamber and movable between an open position in which a working fluid is permitted into the chamber and a closed position in which the working fluid is prevented from entering the chamber. A second flow control device is positioned at the outlet of the chamber and movable between an open position in which the working fluid is permitted to exit the chamber and a closed position in which the working fluid is prevented from exiting the chamber. A heat exchange fluid imparts thermal energy to the volume of working fluid held at constant density within the chamber by the first and second control devices.

Abstract: A fluid supply system for a machine such as an internal combustion engine includes a shutoff valve having an electrical actuator that includes a solenoid subassembly, and a stabilizer for the electrical valve actuator. The stabilizer includes a fitting structured to couple the shutoff valve to adjacent hardware in the fluid supply system, and a strongarm extending between the fitting and the solenoid assembly and clamped to the solenoid subassembly. A vibration-damping reinforced grommet may be clamped between the solenoid subassembly and the clamp.

Abstract: An eccentric valve has a drive mechanism, a drive force receiving part, a bearing for supporting a rotary shaft, and a return spring for generating a return spring force. During non-operation of the drive mechanism, the eccentric valve generates a separating-direction urging force to cause the rotary shaft to incline about the bearing serving as a fulcrum and urge the valve element in a direction away from the valve seat, the separating-direction urging force being a force caused by the return spring force. Either the valve element or the valve seat is provided with a sealing member to seal between the valve element and the valve seat during non-operation of the drive mechanism.

Abstract: A film forming apparatus, including a base having a first chamber, an upper cover for at least covering an opening of the first chamber, and a first seal ring between the upper cover and the base, wherein the upper cover has an inclined slope, an orthographic projection of the slope in a plane where a bottom surface of the base is located overlaps with a region surrounded by an orthographic projection of the first seal ring in the plane where the bottom surface of the base is located, the orthographic projection of the slope is located is outside an orthogonal projection of the first chamber, and a portion of the slope close to the first chamber is away from the bottom surface of the base with respect to a portion of the slope away from the first chamber.

Abstract: A valve system includes: a valve device with a flow path and a valve body that opens and closes the flow path; and a drive mechanism that drives the valve body. The drive mechanism includes: a cylinder case; a cylinder chamber that extends in an axis direction and is formed inside the cylinder case; a piston that divides the cylinder chamber into a first chamber on a first side in the axis direction and a second chamber on a second side in the axis direction; an inflow port through which working fluid flows to the inside of the first chamber; an elastic member disposed inside the second chamber and that pushes the piston to the first side; a bypass passage that connects the first chamber and the second chamber; and an on-off valve that opens and closes the bypass passage.

Abstract: A waste gate assembly includes a waste gate conduit configured to receive exhaust gas. The waste gate conduit includes a first portion having a first inner diameter and a second portion having a second inner diameter and fluidly coupled to the upstream portion. The first inner diameter is less than the second inner diameter. Additionally, the waste gate assembly includes a waste gate valve operably coupled to the waste gate conduit and configured to move between an open position to permit a flow of the exhaust gas and a closed position to inhibit the flow of the exhaust gas.

Abstract: A vacuum gate valve includes a valve body open/close drive body provided between opposing housing bodies, a stem of the valve body open/close drive body, and a valve body provided to the stem. The housing bodies each has a piston rod vertically moving by a cylinder mechanism, a cam member of the piston rod, and a cam roller provided in a cam groove formed in the cam member. A spring receiving unit on both sides of the valve body open/close drive body and a spring which causes the spring receiving unit to be disposed in the cam member and resiliently supported between the spring receiving unit and the piston rod are provided. The housing body includes a vertical-movement guiding unit in which the valve body open/close driving body vertically moves between the housing bodies and a stopper by which the valve body open/close drive body is locked at ascending.

Abstract: A bidirectional gate valve including: a blade (200) installed in a valve housing (100) having first and second passage holes (110, 120) to open/close the first and second passage holes (110, 120); a shaft (300) coupled to a lower portion of the blade (200); a first driving block (400) including: a first cylinder (410) which is provided under the valve housing (100) and into which the shaft (300) is inserted; a first piston (420) installed inside the first cylinder (410) and coupled to a lower portion of the shaft(300) to vertically move the shaft (300) according to pressure change inside the first cylinder (410).

Abstract: An eccentric valve has a drive mechanism, a drive force receiving part, a bearing for supporting a rotary shaft, and a return spring for generating a return spring force. During non-operation of the drive mechanism, the eccentric valve generates a separating-direction urging force to cause the rotary shaft to incline about the bearing serving as a fulcrum and urge the valve element in a direction away from the valve seat, the separating-direction urging force being a force caused by the return spring force. Either the valve element or the valve seat is provided with a sealing member to seal between the valve element and the valve seat during non-operation of the drive mechanism.

Abstract: A double eccentric valve includes a first bearing and a second bearing spaced apart from each other along a center axis of a rotary shaft. When a motor is operated and the valve element is at a controlled folly-closed position corresponding to a fully-closed state, the rotary shaft is inclined about the first bearing serving as a fulcrum and is out of contact with the second bearing. When a valve opening degree is a predetermined opening degree corresponding to a valve open state of the valve element, the rotary shaft is restrained by the second bearing. In a small opening range between the valve opening degree at the controlled fully-closed position and the predetermined small opening degree, a variation amount in open area relative to a variation amount in valve opening degree is smaller than that in an opening range larger than the predetermined opening degree.

Abstract: A spacer for maintaining a gap between a slit valve door and a sealing surface of a slit valve body. The spacer may be located on an outer ambient side of the slit valve away from any corrosive gasses that may exist in the chamber. The spacer may be attached to the slit valve door partially in a depression therein, and may be integral with the seal.

Abstract: A slide structure includes a slide rail and a slide lid. The slide rail includes guide wall portions disposed in a first direction orthogonal to a rail longitudinal direction. A first abutting portion is provided in a guide wall face, and a second abutting portion is provided at a position separated in the rail longitudinal direction relative to the first abutting portion, and separated in a second direction orthogonal to the rail longitudinal direction and the first direction. The slide lid can slide along the rail longitudinal direction between the guide wall portions. A first projecting portion abutting against a top portion of the first abutting portion is provided on one side in a sliding direction, and a second projecting portion abutting against a top portion of the second abutting portion in a state wherein the first projecting portion abuts against the first abutting portion is provided.

Abstract: A double eccentric valve includes: a drive mechanism which produces drive force for rotating a rotary shaft in a direction to open the valve; a drive force receiving unit provided integrally with the rotary shaft to receive the drive force; a bearing located between a valve element and the drive force receiving unit along the center axis of the rotary shaft to support the rotary shaft; and a return spring which produces return spring force for rotating the rotary shaft in a valve closing direction. The double eccentric valve is configured to generate a separating-direction biasing force which inclines the rotary shaft with the bearing at a fulcrum to bias the valve assembly away from a valve seat, the force being caused by the return spring force when the drive mechanism is not operated and acting in a direction perpendicular to the center axis of the bearing.

Abstract: A gate valve with secure sealing mechanism includes a main body having a valve opening, a driver disposed on the main body, a sliding seat slidingly disposed in the main body, a swing arm, and a valve member. Two ends of the swing arm are connected to the driver and the sliding seat, respectively, whereby the driver drives the swing arm to move circularly between a first and second position, thereby triggering the sliding seat to slide. When the swing arm is at the first or second position, the swing arm is biased against the route direction of the sliding seat. The valve member is disposed on the sliding seat for moving in parallel or vertical to the valve opening, thereby preventing the sliding seat from swaying when the swing arm is at the first or second locking position.

Abstract: In an air conditioner casing of a vehicular air conditioner, an evaporator is arranged in a cold air passage, and a heater core is arranged in a warm air passage downstream from the cold air passage. A first air mixing damper is disposed in a warm air opening between the cold air passage and the warm air passage, and a second air mixing damper disposed in a cold air opening between the cold air passage and a bypass passage. Switching from a cooling mode to a heating mode, the first air mixing damper is opened at a constant speed proportional to the driving angle of a drive unit, and the second air mixing damper is initially rotated at a high speed by a predetermined angle immediately after the start of the closing operation, and thereafter is rotated at a low speed.

Abstract: A pressure control valve assembly includes a valve body including a valve opening that is characterized by an axis, a bonnet assembly removably attached to the valve body, wherein the bonnet assembly and the valve body collectively form a valve housing, and the valve housing defines a moving direction that is substantially perpendicular to the axis, a strongback assembly movably disposed in the valve housing and capable of moving in the moving direction defined by the valve housing, and a valve gate movably mounted on the strongback assembly and selectively sealing the valve opening, wherein the bonnet assembly, the strongback assembly and the valve gate are detachable from the valve body and from each other.

Abstract: A gate valve with linkage structure includes at least a power cylinder, a valve body having a valve opening; a gate assembly in the valve body, having a main gate board and an air-tight gate board neighborly disposed, and connected with one end of the air-tight gate board by at least one parallel linkage; and at least a press bar, with one end pivotally connected to the air-tight gate board and the other end extending to form a press end. A linkage bar is pivotally connected to the press bar and also pivotally connected to the main gate board. Therefore, the gate assembly is driven to seal the valve opening; the air-tight gate board moves away from the main gate board with the linkage function; a sealing force is generated to keep the air-tightness between the air-tight gate board and the valve opening.

Abstract: The present invention disclosed herein relates to a gate valve, in which only one driving unit is provided, thus obtaining a reliable structure, and although either a closing operation may be performed in such a way that the valve plate is moved from an opening position to an intermediate portion in a vertical direction, and then from its intermediate position to a closing position in a horizontal direction which is vertical with respect to the vertical direction, or an opening operation may be performed in the sequence reverse to the above mentioned sequence.

Abstract: A valve controller includes a housing, and a lever extending from the housing. The lever includes a protrusion rigidly attached to the lever, and the lever is biased to an initial position. A switch has an open and a closed position. A linkage is pivotally connected to the switch, and the linkage includes a centrally disposed slot configured to receive the protrusion such that movement of the switch controls movement of the linkage and the lever such that moving the switch to the closed position closes a valve controlled by the lever regardless of a position of the lever.

Abstract: A valve and valve cartridge assembly can provide an opening and closing operation with a low torque. The valve and valve cartridge assembly can be switched between a first transmission relationship and a second transmission relationship, and the first and second transmission relationships are formed between the top of the valve cartridge and a transmission device. The first transmission relationship is established so that the valve cartridge is driven to rotate axially. The second transmission relationship is established so that the transmission member drives the valve cartridge to carry out a squeeze sealing movement.

Abstract: A vacuum valve having a valve rod (11) which has a longitudinal axis (20) and which carries at least one closing member (9, 10) for closing at least one valve orifice (2, 3) and which can be displaced by a longitudinal drive (18), in a longitudinal direction (21) lying parallel to the longitudinal axis (20) of the valve rod (11), from an initial position, in which the vacuum valve is open, into an intermediate position and can be displaced by a transverse drive (19) from the intermediate position to at least one end position in which the vacuum valve is closed. A transmission piece (23) which is guided displaceably in the longitudinal direction (21) by at least one guide part (24) is secured to the valve rod (11).

Abstract: According to one embodiment, there is provided pressure controlling apparatus including a detecting unit, an exhaust pipe, a regulating valve, and a pressure controlling unit. The regulating valve includes a valve port, a changing unit, and a slide valve. The valve port is communicated with the exhaust pipe. The changing unit changes a shape of the valve port to a different shape whose center is located near the central axis of the exhaust pipe. The slide valve regulates an opening degree of the valve port changed by the changing unit. The pressure controlling unit controls changing of a shape of the valve port by the changing unit and regulation of an opening degree of the valve port by the slide valve.

Abstract: An up and down operating actuator unit which manages upward and downward motions of an opening and closing member, and a forward and backward actuator unit which manages forward and backward motions of the opening and closing member are configured so that the opening and closing member, which opens and closes a wafer movement path, can be accurately operated in an “L”-shaped motion.

Abstract: A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.

Abstract: A vacuum valve having a valve rod (11) which has a longitudinal axis (20) and which carries at least one closing member (9, 10) for closing at least one valve orifice (2, 3) and which can be displaced by a longitudinal drive (18), in a longitudinal direction (21) lying parallel to the longitudinal axis (20) of the valve rod (11), from an initial position, in which the vacuum valve is open, into an intermediate position and can be displaced by a transverse drive (19) from the intermediate position to at least one end position in which the vacuum valve is closed. A transmission piece (23) which is guided displaceably in the longitudinal direction (21) by at least one guide part (24) is secured to the valve rod (11).

Abstract: A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15?, 16, 16?) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5).

Abstract: A gate valve apparatus is disclosed. The gate valve apparatus is provided with a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed; and a closure element that includes a sealing member that contacts the first valve seat to seal the opening portion. In addition, the gate valve apparatus is provided with a shutoff member that contacts the second valve seat to thereby be deformed, so that a space between the opening portion and a sealing member is shut off by the shutoff member when the closure element closes the opening portion. The shutoff member is deformed and continues to contact the second valve seat under normal and high temperature environments when the closure element closes the opening portion.

Abstract: A valve for the gastight interruption of a flow path is disclosed. A valve housing includes a first opening and a valve seat. A valve disk includes an inner disk portion, which is linearly movable relative to an outer disk portion so that, in a closed setting, a pressure differential acts substantially upon the movable inner disk portion, which is supported on the valve housing. The valve seat has a radially inward pointing first inner face and the outer disk portion has a radially outward pointing first outer face, wherein in the closed setting there exists a radial sealing contact with the first inner face. The outer disk portion has a radially inward pointing second inner face and the inner disk portion has a radially outward pointing second outer face, having a radially sealing contact with the second inner face.

Abstract: An air bleed device for cooling components in a turbine engine, including an annular conduit having a substantially rectangular cross-section formed in a housing and having a radially internal wall swept by an airflow is disclosed. The device includes an air inlet orifice, and a flap valve for controlling the airflow entering through the orifice, formed by a plate borne by a maneuvering member mobile in translation parallel to the axis of the orifice between a position in which the plate closes off the orifice and a position in which the plate opens the orifice.

Abstract: Air bleed device for cooling components in a turbine engine, including an annular conduit (18) having a radially internal portion swept by an airflow (22) and which comprises at least one air inlet orifice (20) formed in an upstream radial wall (38) of the conduit (18), a flap valve (40) for controlling the airflow entering through the orifice (20) and of which the flapper (41) includes a plate (42) applied against the wall (38) and capable of being moved by sliding on said wall (38) by a maneuvering member (50) mobile in translation parallel to the wall (38) between a position in which the plate (42) closes off the orifice (20) and a position in which the plate (42) opens said orifice.

Abstract: Provided is a vacuum valve device which is capable of ensuring and maintaining smooth operation of a valve body, and in which an adequate space is ensured as a vacuuming gas flow path, and also provided is a vacuum die-casting device using the vacuum valve device. The vacuum valve device includes a piston rod and a rod seat. The piston rod includes: a rod; a piston formed at one end of the piston rod; and a guide part extending from the piston as far as the rod towards the other end of the piston rod. The rod seat has an insertion hole into which the piston rod is inserted from a first end of the insertion hole and through which the piston rod passes to a second end of the insertion hole. At least a portion of the insertion hole including the first end of the insertion hole forms the gas flow path.

Abstract: A door for sealing an opening (2) in a wall (3) of a vacuum chamber (4) relative to the atmosphere includes a sealing element (1), which is attached to at least one rod (9, 9?, 9?) and which can be moved between an open position, in which the sealing element releases the opening (2), an intermediate position, in which the sealing element covers the opening (2) but is raised from a seat (7) surrounding the opening (2), and a closed position, in which the sealing element is pressed against the seat (7), a door body (10), which carries the at least one rod (9, 9?, 9?) and the sealing element (1) and which can be tilted about a tilt axis (20) relative to the wall (3) in order to move the sealing element (1) between the intermediate position and the closed position, and at least one tilting actuator (25, 25?, 26, 26?), which has an inner cavity (27) into which a compressed gas can be introduced in order to tilt the door element (10) about the tilt axis (20).

Abstract: The presented valve (1) is based on two axially adjustable sleeve-shaped valve seat rings (14, 36) that are associated with locking arrangements in the form of annular armature plates (22, 35) and associate holding coils (24, 36). The valve closure member (39) can be variably adjusted via a position adjustment drive. Said valve closure member has a double function. On the one hand, it acts to move the valve seat rings (14, 26) into locking position and, on the other hand, it acts to control the gas flow.

Abstract: A vacuum valve including a valve body with a valve orifice, a closure member for closing the valve orifice, a first piston-cylinder unit, a second piston-cylinder unit, a first control element, and a second control element. When opening the vacuum valve, a pressure medium line, which applies pressure to the opening cylinder space of the second piston-cylinder unit, is blocked during the first part of the opening process, and is released at the end of the first part of the opening process by the first control element. When closing the vacuum valve, a pressure medium line, which applies pressure to the closing cylinder space of the first piston-cylinder unit, is blocked during the first part of the closing process, and is released by the second control element at the end of the first part of the closing process.

Abstract: A rectangular gate valve having an improved driving action is disclosed. The rectangular gate valve of the present invention includes a sealing member, which opens or closes a wafer moving passage, a main shaft, which is coupled to the sealing member and has a guide member, and a housing bracket, which has a first guide slot, into which the guide member is inserted. The gate valve further includes a valve drive unit, which is provided in the housing bracket and has an air cylinder, a piston, a piston shaft, a moving unit and a connection link. The gate valve further includes a guide bracket, which has a vertical bracket, a second guide slot and a horizontal bracket. The gate valve further includes a guide link, which is moved along the second guide slot to guide movement of the main shaft.

Abstract: A closure device for closing an opening in a wall in a vacuum-tight manner comprises a closure plate, a carrying unit which carries the closure plate and which has at least one longitudinal piston-cylinder unit, and a base unit which carries the carrying unit and has at least one transverse piston-cylinder unit. A closing cylinder space of the at least one longitudinal piston-cylinder unit is connected to a closing cylinder space of the transverse piston-cylinder unit, or of at least one of the transverse piston-cylinder units, by means of a closing pressure gas channel, and an opening cylinder space of the at least one longitudinal piston-cylinder unit is connected to an opening cylinder space of the transverse piston-cylinder unit, or of at least one of the transverse piston-cylinder units, by means of an opening pressure gas channel.

Abstract: A vacuum valve comprises a conical sealing surface arranged at a valve body, a valve disk at which a conical sealing surface is arranged, and a sealing ring having a first sealing surface and a second sealing surface. The valve disk, the valve body and the sealing ring are made of metal at least in the areas of the sealing surfaces. The valve disk is constructed so as to be curved or angled considered in axial section through the center and encloses an angle of less than 90° with the closing direction in the unloaded state at least in a radial outer portion adjoining the sealing surface. The valve disk has an elasticity such that a displacement of the radial outer edge of the valve disk relative to a point in the center of the valve disk of at least 0.1% of the diameter of the valve disk in direction of the center axis of the valve disk is bought about in the closed position of the valve disk relative to the open position of the valve disk by an elastic deformation of the valve disk.

Abstract: The invention relates to a vacuum gate valve comprising a closure disk for gas-tight closing of an opening by displacement over the opening and pressing of the closure disk onto the opening. A connecting rod with which the closure disk is coupled is linearly adjustable by means of a linear drive unit and the closure disk is thus displaceable between a position uncovering the opening and an intermediate position in which said disk is pushed over the opening. For pressing the closure disk with its closing side onto the valve seat into the closed position by means of an engagement element, at least two limbs are pivotably mounted at one limb end on the back of the closure disk via a first joint and at the other limb end on a support via a second joint. The limbs, the back and the support form an articulated parallelogram.

Abstract: A closure device for closing an opening in a wall in a vacuum-tight manner comprises a closure plate, a carrying unit which carries the closure plate and which has at least one longitudinal piston-cylinder unit, and a base unit which carries the carrying unit and has at least one transverse piston-cylinder unit. A closing cylinder space of the at least one longitudinal piston-cylinder unit is connected to a closing cylinder space of the transverse piston-cylinder unit, or of at least one of the transverse piston-cylinder units, by means of a closing pressure gas channel, and an opening cylinder space of the at least one longitudinal piston-cylinder unit is connected to an opening cylinder space of the transverse piston-cylinder unit, or of at least one of the transverse piston-cylinder units, by means of an opening pressure gas channel.

Abstract: A vacuum valve comprises a valve housing which has an inlet opening and an outlet opening, a valve disk which is located in the interior space of the valve housing and which is arranged at a carrying arm that is rigidly connected to a shaft which, for purposes of opening and closing the vacuum valve, is rotatable around its longitudinal axis and displaceable in axial direction, and a driving device for opening and closing the vacuum valve. The driving device comprises a rotary drive for rotating the shaft. The driving device further comprises a driving piston which is arranged in an inner cavity of the valve disk and which has, at least over portions of its circumference, a radial extension which is larger than the outlet opening with respect to the center longitudinal axis of the outlet opening and at which tappets are arranged on the side facing the outlet opening.

Abstract: The invention provides a vacuum gate valve for closing off an opening. The vacuum gate valve can have a valve plate that can be turned so that the alignment of the valve plate will adapt to a valve seat when the valve plate is pressed against the valve seat.

Abstract: A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space located inside the load-lock chamber, and at least one opening on the output side for connecting the interior space of the load-lock chamber to the interior space of a vacuum chamber with the intermediary of a valve; at least one vacuum door which is associated with a respective opening on the input side and which comprises a closure-element which communicates with a drive device via at least one carrier rod and is adjustable by the drive device between a position in which the input-side opening is open and a position in which the input-side opening is closed and in which the closure element contacts a contact surface of the load-lock chamber, wherein, considered from the atmosphere area located in front of the input-side opening, the drive device is

Abstract: A closure device for a vacuum closure of at least one opening in a wall having a valve place, at least one piston-cylinder unit, at least one carrier unit, at least one cylinder bore hole, at least two sealing rings, and a line. The valve plate is associated with an opening and is displaceable between an open position in which it releases the opening, a position in which it covers the opening but is raised from the wall and a closed position in which it covers the opening and contacts the wall. The at least one piston-cylinder unit serves to displace the valve to the different positions and includes a pneumatically actuated piston. At least one carrier unit is connected to a piston rod which serves to displace the valve to the different positions.

Abstract: Closure device for vacuum closure of at least one opening (2) in a wall (1), comprising a valve plate (3) which is associated with a respective opening and which is displaceable between an open position in which it releases the opening, a position in which it covers the opening but is raised from the wall, and a closed position in which it covers the opening and contacts the wall, at least one piston-cylinder unit (30) which serves to displace the valve plate (3) between its open position and its position in which it covers the opening (2) but is raised from the wall and which comprises a pneumatically actuated piston (36) which is arranged in a cylinder housing (35) and which is outfitted with a piston rod (29) leading out of the cylinder housing through a bore hole, at least one carrier unit (6) which is connected to the piston rod (29) of the at least one piston-cylinder unit (30) and which is associated with a respective valve plate (3), has at least one cylinder bore hole (7) in which is arranged a pneum

Abstract: A gate valve having a valve body, a valve rod, a regulation device, a cam mechanism and a drive for supplying a straight-move force to the cam mechanism is provided. The valve rod is held so that it can move in a straight-move direction of opening and closing the valve via a pair of linear guides provided on both sides of the valve rod.