Abstract: A process chamber door for closing or opening an entrance of a process chamber through which a substrate to be process is loaded includes a seal plate including a front surface and a rear surface opposite to each other in a first direction, a connection block connected to the rear surface of the seal plate and including a central portion and two side portions connected to the rear surface of the seal plate, and a shaft connected to the central portion of the connection block. The connection block includes a first hinge groove and a second hinge groove. The first hinge groove is exposed at a bottom surface and a side surface of the connection block and the second hinge groove is exposed at an upper surface and the side surface of the connection block.

Abstract: Disclosed is a vacuum valve with a sensor arrangement having at least one inertial sensor, where the sensor arrangement is designed in such a way it detects a measuring signal with respect to an acceleration impacting on the valve.

Abstract: Provided is a valve assembly including: a valve housing inserted into, after removing a portion of an exhaust line of a vacuum chamber, the removed portion of the exhaust line to be open in a direction communicating with the exhaust line and to have a predetermined inner space in a direction perpendicular to the direction communicating with the exhaust line; a valve movable horizontally inside the valve housing to allow the valve housing to communicate with the exhaust line or to be blocked from the exhaust line; a valve driving part disposed on one side of the valve housing in such a manner as to be connected to the valve so as to horizontally move the valve in a direction perpendicular to the exhaust line; and valve movement guide parts disposed inside the valve housing so as to guide a moving path of the valve.

Abstract: A method and apparatus for injecting a saline solution into an open cavity of a patient's body, and, alternatively, vacuuming fluids from the open cavity during laparoscopic surgery that provides constant feed and amplified pressure to provide a steady fluid output, in a disposable, single use handheld surgical device.

Abstract: A non-ported expanding gate valve and method of use, including an expanding gate assembly and a slotted guide, is fixedly positioned on the valve body and slidably coupled with a gate assembly. The guide has slots of varying widths that are used with a pivoting rocker arm coupled with the gate assembly to adjust the thickness of the gate assembly at the proper timing. The guides perform multiple functions, including: centralizing a rocker arm during opening between seats; collapsing the gate assembly when opening; allowing and controlling expansion when closing; guiding lateral movement during operation of the gate assembly between opposing guides on the sides of a flow passageway; guiding axial movement during operation of the gate assembly between opposing guide side flanges; retaining seats in position when the valve is open; and/or stiffening the guide in a lateral direction to control movement of the gate assembly.

Abstract: The invention is a dual spreading link mechanism for application with gate valves. The invention also extends to gate valves employing the inventive dual spreading link. In one application to pendulum gate valves, a valve carriage assembly moves in a pendular manner within a gate valve housing and operates to seal off the flow channel of the housing. The valve carriage assembly is comprised of a valve plate having a valve seat face for engaging with the housing in a sealing manner, a tensioning member which along with a plurality of clip springs provides a contracting force to the valve carriage assembly, and an actuating member which moves laterally within the carriage assembly to alternately spread and contract the assembly. The actuating member is stacked between the valve plate and tensioning member and the actuating member is coupled to the valve plate and tensioning member by a plurality of oblong rotatable links which comprise the dual spreading link.

Abstract: Presented is a vacuum valve having a metallic housing that may be mounted in a vacuum system in any attitude. The valve includes a "knife" edge seal formed on the interior of the metallic housing on one wall thereof, surrounding a port therein, and adapted to sealingly impinge against a metallic sealing pad mounted within the housing on a carriage that is translatable longitudinally of the housing by manipulation of a spindle that cooperates with a bellows sealing the housing. The spindle extends out to the housing and includes means for suitable manipulation of the spindle. Means are provided within the housing operatively interposed between the carriage and sealing pad to effect lateral translation of the sealing pad in relation to the carriage on which it is mounted to engage and disengage the "knife" edge seal upon appropriate rotation of the spindle. Means are also provided within the housing to prevent seizing of metallic parts that move relative to one another within the vacuum valve.

Abstract: An isolation valve includes a housing having a port and a seal plate for sealing the port. The seal plate is linked to a shaft which carries a guide frame. To close the port, a drive mechanism drives the shaft linearly in one direction. The seal plate first moves linearly with the shaft until the guide frame stops against the housing. The seal plate then moves linearly in a direction perpendicular to a surface of the housing containing the port until it seals the port. Motion of the drive shaft in the opposite direction causes the seal plate to retrace its path. In one embodiment, the valve includes a second seal plate for sealing a second port. A spring between the guide means and the shaft provides pre-load which maintains the seal plates in a retracted position until the frame stops against the housing. An extension spring between the first and second seal plates eliminates play in the link mechanism and extends valve life.

Abstract: A vacuum gate valve includes a spreading mechanism with an actuating member extending between first and second valve plates and movable transversely of the axis of the valve, and parallelepiped spreading members disposed between the first valve plate and the actuating member and between the second valve plate and the actuating member. In the open position of the valve, the spreading members include an acute angle with the direction in which the actuating member is moved for closing the valve. When the actuating member is moved in order to spread apart the valve plates and to close the valve, the spreading members pivot about intersecting lines of contact surfaces formed in the valve plates and in the actuating member. In the closed position of the valve, the spreading members extend perpendicularly to the direction of the movement of the actuating member.

Abstract: A toggle gate valve having a double block and bleed retractable sealing configuration which utilizes accurately positioned steel inserts as trim assembly guide plates to permit a significant reduction in valve body machining. The valve body as well as removable upper and lower bonnets form a pressure boundary that houses a toggle link actuated seal plate to close the valve and a through-conduit that is coaxially aligned with the input and output ports when the valve is opened. A novel stem configuration and removable through-conduit permit field servicing of the trim assembly (plug and seal plate) by means of access through the lower bonnet/body interface.

Abstract: A gate valve is disclosed having a casing with inlet and outlet apertures one of which has a valve seat. An actuator reciprocal transversely of the apertures is provided having two oppositely disposed faces. At least one plate member which serves as a valve head flanks at least one of the faces for cooperation with said valve seat. And rectangular-shaped rotative means are positioned between the actuator member and the plate member for moving the plate member from an open to a closed/latched position as the actuator member is moved.

Abstract: A guillotine damper for a duct is provided with a thrust frame upstream of the path of a blade that is movable into and out of an operative position in sealing engagement with a seat downstream of the blade path when the flow path is not obstructed by the blade and in sealing engagement with and seating the blade against the seat when the blade is positioned to block the duct. Devices are provided with each utilizing resilient components to thrust the frame into its sealing positions and a hydraulic component to retract the frame when the blade is to be moved into or out of its duct blocking position. Each device exerts the force of either component to the frame through a series of mechanical elements spaced a substantial distance apart along the sides of the frames and connected thereto.

Abstract: A new and improved gate valve suitable for use with high pressure, high temperature corrosive fluids such as those developed in coal gasification processes, uranium enrichment and the like comprises a valve body having a flow passage with a pair of opposed annular valve seats and a gate assembly mounted for movement transversely of the flow passage between a valve seat confronting position and an open position displaced transversely outwardly of the passage. The gate assembly includes a pair of flat spring flexure elements which support a pair of valve discs for movement toward and away from the valve seats when the assembly is in the valve seat confronting position. These flexure elements normally bias the valve discs out of engagement with the valve seats. The discs are interconnected by an upwardly bowed flexure element which is retained between upper and lower holding members connected to the transversely extending stem of the gate valve.

Abstract: A new and improved gate valve suitable for use with high pressure, high temperature fluids such as those developed in coal gasification processes and the like which comprises a valve gate assembly including opposed outwardly facing valve discs is bodily movable from a valve open position to a valve seat confronting position in which the valve discs are aligned with but spaced from opposed valve seats in the flow passage. Upon further downward movement of the valve stem the valve discs are moved laterally outwardly into engagement with the valve seats. In order to accommodate situations where the opposed valve seats are spaced relatively close together, the valve discs are mounted on annular spring washers which normally bias said valve discs away from said valve seats. A pair of toggle elements are actuated by downward movement of the valve stem to force the valve discs laterally outwardly into engagement with the valve seats after the assembly has been moved to the valve seat confronting position.