Abstract: In one embodiment, a compound semiconductor vertical FET device (11) includes a first trench (29) formed in a body of semiconductor material (13), and a second trench (34) formed within the first trench (29) to define a channel region (61). A doped gate region (59) is then formed on the sidewalls and the bottom surface of the second trench (34). Source regions (26) are formed on opposite sides of the double trench structure (28). Localized gate contact regions (79) couple individual doped gate regions (59) together. Contacts (84,85,87) are then formed to the localized gate contact regions (79), the source regions (26), and an opposing surface (21) of the body of semiconductor material (13). The structure provides a compound semiconductor vertical FET device (11, 41, 711, 712, 811, 812) having enhanced blocking capability and improved switching performance.

Abstract: Photodetection cell and laser pulse detector furnished with such a cell, as well as laser pulse detection device comprising a matrix of such detectors. The photodetection cell (1) is embodied in the form of an integrated circuit and comprises a photosensor (3) which is able to transform luminous energy received into an electric current and a means (4) for processing the electric current generated by said photosensor (3). Said processing means (4) comprises a cascoded inverting amplifier (5), looped back through a feedback (6) of slow follower type, which is supplied by the electric current generated by said photosensor (3).

Abstract: A substrate contact and semiconductor chip, and methods of forming the same. The substrate contact is employable with a semiconductor chip formed from a semiconductor substrate and includes a seal ring region about a periphery of an integrated circuit region. In one embodiment, the substrate contact includes a contact trench extending through a shallow trench isolation region and an insulator overlying the semiconductor substrate and outside the integrated circuit region. The contact trench is substantially filled with a conductive material thereby allowing the semiconductor substrate to be electrically connected with a metal interconnect within the seal ring region.

Abstract: A method to protect a low-K IMD layer underlying a fuse link during a fuse blowing process including a guarded fuse and method for forming the same including forming a fuse portion comprising two metal fuse interconnect structures and a guard ring comprising a metal interconnect structure surrounding the fuse portion in an uppermost IMD layer comprising a dielectric constant of less than about 3.2; forming a protective metal portion electrically isolated in the uppermost IMD layer to cover at least a portion of an area extending between the fuse portions; forming at least one overlying dielectric insulating layer over the uppermost layer to include extended portions of the fuse portion and the guard ring; and, forming a metal fuse link portion to electrically interconnect the fuse portion wherein the fuse portion overlies at least a portion of the protective metal portion.

Abstract: An integrated Schottky diode and method of manufacture of such a diode is disclosed. In a first aspect, a Schottky diode comprises a semiconductor substrate. The semiconductor substrate includes an epitaxial layer (EPI) on the substrate region. The diode includes a plurality of guard rings in the EPI layer and a plurality of oxidized slots. Finally, the diode includes metal within the plurality of slots to form a Buried Power Buss. A portion of the metal is completely oxide isolated from the other elements of the diode. In a second aspect, a method for manufacturing a Schottky diode comprises providing a substrate region, A buried N+ region providing an epitaxial (EPI) layer. The method also includes providing a plurality of guard rings in the EPI layer and providing a plurality of slots in the semiconductor substrate that is in contact with the EPI layer and the substrate region.

Abstract: A method for making an integrated circuit includes forming spaced-apart trenches on a surface of a single crystal silicon substrate, lining the trenches with a silicon oxide layer, forming a first polysilicon layer over the silicon oxide layer, forming a second polysilicon layer over the first polysilicon layer, and removing a thickness of the single crystal silicon substrate to expose tubs of single crystal silicon in the second polysilicon layer.

Abstract: A semiconductor device including a semiconductive body having formed therein an active region and a termination feature which includes spaced field rings disposed around the active region and diffusion rings of the same conductivity type as, but different conductivity than the semiconductive body formed between each pair of field rings.

Abstract: A semiconductor device has a guard ring in a multilayer interconnection structure, wherein the guard ring includes a conductive wall extending zigzag in a plane parallel with a principal surface of a substrate.

Abstract: The present invention includes a MOS device (100) that has a P-type substrate (102) and an N-type drain region (104) formed within the substrate (102). An annular N-type source region (106) generally surrounds the drain region (104). The source region (106) serves as both the source for the MOS device (100) and a sacrificial collector guard ring for an electrostatic discharge protection circuit. An annular gate region (110) generally surrounds the drain region (104) and is electrically insulated from the drain region (104) and electrically connected to the source region (106). An annular P-type bulk region (108) generally surrounds the source region (106) and is electrically connected to the source region (106).

Abstract: A semiconductor device includes a semiconductor substrate, an insulating layer, an inductor, a guard ring and a potential-applying line. The insulating layer is formed on the semiconductor substrate. The inductor is formed on the insulating layer. The guard ring is formed in the semiconductor substrate, surrounding the inductor and being a closed ring composed of waving segments connected, end to end. The potential-applying line applies a predetermined potential to the guard ring.

Abstract: The invention concerns a bidirectional electronic switch of the pulse-controlled bistable type comprising a monolithic semiconductor circuit including a vertical bidirectional switch structure (TR; ACS) provided with a gate terminal (G1), first (Th1) and second (Th2) thyristor structures whereof the anodes are formed on the front face side, the first thyristor anode region containing a supplementary P-type region (6), and a metallization (A1, A2) connected to the main surface of the front face of the vertical bidirectional component and to the second thyristor anode; a capacitor (C) connected to the first thyristor anode and to the second thyristor supplementary N-type region; and a switch (SW) for short-circuiting the capacitor.

Abstract: A semiconductor device having guard grooves uniformly filled with a semiconductor filler is provided. The four corners of a rectangular ring-shaped guard groove meet at right angles, and outer and inner auxiliary diffusion regions both rounded are connected to the four corners. Since the guard grooves do not have to be rounded, the plane orientation of a silicon single crystal exposed inside the guard grooves can be all {100}. Therefore, epitaxial growth in the guard grooves is uniformly carried out, and the grooves are filled with guard regions without defects.

Abstract: A semiconductor device having grooves uniformly filled with semiconductor fillers is provided. Both ends of each of narrow active grooves are connected to an inner circumferential groove surrounding the active grooves. The growth speed of semiconductor fillers on both ends of the active grooves becomes equal to that at their central portions. As a result, a semiconductor device having the active grooves filled with the semiconductor fillers at a uniform height is obtained.

Abstract: As etch-stop films or Cu-diffusion barrier films used in insulation films constituting conductor layers of a stacked structure, films having smaller dielectric constant than silicon nitride films are used, and an insulation film at a lower-layer part of the stacked structure is made to have smaller dielectric constant than that at an upper-layer part thereof, and further this insulation film is a silicon oxide (SiO) film and has in the interior thereof, nano-pores of from 0.05 nm or more to 4 nm or less in diameter as chief construction. This makes it possible to dramatically reduce effective dielectric constant while keeping the mechanical strength of the conductore layers themselves, and can materialize a highly reliable and high-performance semiconductor device having mitigated the wiring delay of signals which pass through wirings.

Abstract: A thyristor-based semiconductor device includes a thyristor body that has at least one region in the substrate and a thyristor control port in a trenched region of the device substrate. According to an example embodiment of the present invention, the trench is at least partially filled with a dielectric material and a control port adapted to capacitively couple to the at least one thyristor body region in the substrate. In a more specific implementation, the dielectric material includes deposited dielectric material that is adapted to exhibit resistance to voltage-induced stress that thermally-grown dielectric materials generally exhibit. In another implementation, the dielectric material includes thermally-grown dielectric material, and when used in connection with highly-doped material in the trench, grows faster on the highly-doped material than on a sidewall of the trench that faces the at least on thyristor body region in the substrate.

Abstract: A semiconductor device has a first guard ring surrounding a circuit region, a second ring disposed between the circuit region and the first guard ring, and first connections connecting the first guard ring and the second guard ring to each other. An area sandwiched between the first guard ring and the second guard ring is divided by the first connections into a plurality of subareas. Even if the first guard ring is partly defective, water enters from outside into only the subarea which is contiguous to the defective part of the first guard ring.

Abstract: The invention relates to technology improving the withstand voltage of a Schottky diode. With a diode of the present invention, the distance a between the long sides of the narrow groove withstand voltage portions and the inner ring circumference of the intermediate withstand voltage portion is set to twice the distance b between the short sides of the narrow groove withstand voltage portions and the inner ring circumference of the intermediate withstand voltage portion. Furthermore, the distance c between the inner ring circumference of the innermost outer withstand voltage portions and the outer ring circumference of the intermediate withstand voltage portion, the distance u between the adjacent outer withstand voltage portions, and the distance d between the adjacent narrow groove withstand voltage portions are all equal to the distance a.

Abstract: A sealing apparatus for sealing by resin a semiconductor wafer having semiconductor elements on its surface. The apparatus includes an upper mold and a lower mold having an area where the semiconductor wafer is mounted, the lower mold having an uneven surface in the area and a shock absorber under the lower mold.

Abstract: It is intended to prevent a crack from occurring in a circuit region during dicing, while preventing oxidation and corrosion of a seal ring including a layer of copper as the uppermost layer thereof. A passivation film (120) has an opening (123) formed therein, The opening (123) is formed so as to reach an interlayer insulating film (109) and disposed so as to surround a periphery of a seal ring (110). As a result, a top face of a second interconnect layer (114) is completely covered by the passivation film (120), and is not exposed to an ambient air. Hence, it is possible to prevent an effect of protecting a semiconductor device achieved by the seal ring (110) from being reduced due to oxidation and corrosion of the second interconnect layer (114). Further, provision of the opening (123) does not allow a stress generated at a time of cutting a dicing region during dicing to easily propagate to a portion of the passivation film (120) present on the circuit region.

Abstract: A phase change memory may be made using an isolation diode in the form of a Shottky diode between a memory cell and a word line. To reduce the leakage currents associated with the Shottky diode, a guard ring may be utilized.

Abstract: An integrated circuit having very low parasitic current gain includes a guard ring that is used to completely surround a device, such as a power device, that induces parasitic current. The guard ring is formed in a semiconductor body layer such as an epitaxial layer and has a central guard ring of the same type conductivity as that of the body layer and additional flanking rings of the opposite type conductivity. An unbiased configuration of the guard ring based on the above structure is particularly effective in reducing the parasitic gain. The effectiveness of the guard ring, such as the high current performance, is further improved by reducing the resistance between neighboring rings using various methods.

Abstract: In one embodiment there is provided a method comprising performing a sawing operation on a wafer; and treating the wafer to at least reduce a propagation of micro-cracks formed in the wafer during the sawing. In another embodiment there is provided a semi-conductor die comprising a substrate having a central first portion, and a peripheral second portion around the central first portion; an integrated circuit formed on the central first portion; and a guard ring disposed between the first and second portions of the substrate to prevent a propagation of cracks found in that second portion to the first portion, wherein the second portion includes micro-cracks filled with a crack-healing material to arrest propagation of the micro-cracks beyond the guard ring and into the central first portion.

Abstract: A semiconductor device having guard grooves uniformly filled with a semiconductor filler is provided. The four corners of a rectangular ring-shaped guard groove meet at right angles, and outer and inner auxiliary diffusion regions both rounded are connected to the four corners. Since the guard grooves do not have to be rounded, the plane orientation of a silicon single crystal exposed inside the guard grooves can be all {100}. Therefore, epitaxial growth in the guard grooves is uniformly carried out, and the grooves are filled with guard regions without defects.

Abstract: A semiconductor device comprises a first semiconductor layer of a first conductivity type provided on a semiconductor substrate of the first conductivity type, a base layer of a second conductivity type provided in the first semiconductor layer, for defining a vertical MISFET including source regions and a gate electrode on a gate insulation film, a Schottky barrier diode (SBD)-forming region provided in the first semiconductor layer around the base layer, a guard ring region of the second conductivity type provided around SBD-forming region, a first main electrode disposed above the first semiconductor layer and provided in common as both a source electrode of the MISFET and an anode of the SBD, a surface gate electrode disposed above the first semiconductor layer, and a second main electrode provided in common as a drain electrode of the MISFET and a cathode of the SBD.

Abstract: A semiconductor device includes an electronic circuit, a metal guard ring surrounding the electronic circuit, and a passivation layer covering the electronic circuit and guard ring. The passivation layer has a slot extending from the surface of the device down to the guard ring. The slot prevents cracks that may form in the passivation layer at the edges of the device from propagating to the area inside the guard ring. Locating the slot over the guard ring enables the size of the device to be reduced, and enables the guard ring to keep moisture and contaminants that enter the slot from reaching lower layers of the device.

Abstract: A high voltage semiconductor device includes a drain region disposed within a semiconductor substrate. The semiconductor device further includes a field oxide layer disposed outwardly from the drain region of the semiconductor substrate. The semiconductor device also includes a floating ring structure disposed inwardly from at least a portion of the field oxide layer. In one particular embodiment, a device parameter degradation associated with the semiconductor device comprises one (1) percent or less after approximately five hundred (500) seconds of accelerated lifetime operation.

Abstract: A power integrated circuit device with multiple guard rings and field plates overlying regions between each of the guard rings. Each of the field plates form overlying a dielectric layer also between each of the guard rings. Multiple field plates can exist between each of such guard rings. At least one field plate couples to a main junction region, and another field plate couples to a peripheral region, typically a scribe line. The present power device structure with multiple guard rings and field plates provides a resulting guard ring structure which allows for such device to achieve higher voltage applications.

Abstract: A semiconductor device includes an electronic circuit, a metal guard ring surrounding the electronic circuit, and a passivation layer covering the electronic circuit and guard ring. The passivation layer has a slot extending from the surface of the device down to the guard ring. The slot prevents cracks that may form in the passivation layer at the edges of the device from propagating to the area inside the guard ring. Locating the slot over the guard ring enables the size of the device to be reduced, and enables the guard ring to keep moisture and contaminants that enter the slot from reaching lower layers of the device.

Abstract: A semiconductor device having improved breakdown voltage is provided. A diode device of the present invention includes relay diffusion layers provided between guard ring portions. Therefore, a depletion layer expanded outward from the guard ring portions except the outermost one reaches these relay diffusion layers, and then the outer guard ring portions. The width of the distance between the guard ring portions is shorter where the relay diffusion layers are provided. For the width of the relay diffusion layers, the depletion layer reaches the outer guard ring portions with a lower voltage than the conventional structure.

Abstract: In a semiconductor device, a p-type base region is provided in an n−-type substrate to extend from a principal surface of the substrate in a perpendicular direction to the principal surface. An n+-type source region extends in the p-type base region from the principal surface in the perpendicular direction, and an n+-type drain region extends in the substrate separately from the p-type base region with a drift region interposed therebetween. A trench is formed to penetrate the p-type base region from the n+-type source region in a direction parallel to the principal surface. A gate electrode is formed in the trench through a gate insulating film. Accordingly, a channel region can be formed with a channel width in a depth direction of the trench when a voltage is applied to the gate electrode.

Abstract: A semiconductor memory device comprises a semiconductor substrate having a memory cell region and a periphery circuit region. The memory cell region includes first and second conductivity type wells and an array of memory cell formed on the first and second conductivity type wells. The periphery circuit region comprises a guard ring that is formed at a location next to a second conductivity type well and to surround a side portion of the array of memory cells. The guard ring is formed with a depth different from that of the second conductivity type well.

Abstract: A thermal management system for a semiconductor chip including at least one region of thermally conductive material included internally within the semiconductor chip.

Abstract: A semiconductor device (20) includes an isolated p-well (22) formed in a substrate (21) by a buried n-well (25) and an n-well ring (24). The n-well ring (24) extends from a surface of the semiconductor device (20) to the buried n-well (25). The isolated p-well (22) includes a plurality of n-well plugs (27) extending from the surface of the semiconductor device (20) into the isolated p-well (22) and contacting the buried n-well (25). The plurality of n-well plugs (27) reduces an n-well resistance to provide better noise isolation for high frequency signals.

Abstract: The forward and reverse blocking voltage capability of a thyristor in accordance with the invention is substantially independent of the active thyristor area (Aa), thereby facilitating its design and its manufacture. This is achieved by means of a concentric arrangement of a deep inner lower-doped perimeter zone (42) of the forward base region (2) with a deep outer perimeter zone (43) of the same conductivity type, doping profile and depth (A4xj=Axj). The outer perimeter zone (43) brings the reverse blocking p-n junction (34) to the front surface (11) at a lateral distance (D3) around the forward blocking p-n junction (32). The outer perimeter zone (43) extends in depth to a lower perimeter zone (44) of the underlying region (4) that forms the reverse blocking junction with the high-resistivity base region (3) of opposite conductivity type. All these perimeter zones (42-44) together provide the thyristor with a deep peripheral termination which surrounds the active thyristor area (Aa).

Abstract: A termination structure and reduced mask process for its manufacture for either a FRED device or any power semiconductor device comprises at least two concentric diffusion guard rings and two spaced silicon dioxide rings used in the definition of the two guard rings. A first metal ring overlies and contacts the outermost diffusion. A second metal ring which acts as a field plate contacts the second diffusion and overlaps the outermost oxide ring. A third metal ring, which acts as a field plate, is a continuous portion of the active area top contact and overlaps the second oxide ring. The termination is useful for high voltage (of the order of 1200 volt) devices. The rings are segments of a common aluminum or Palladium contact layer.

Abstract: A first semiconductor mesa structure having a photoactive region and a second semiconductor mesa structure are formed side by side on a semi-insulating substrate and surrounded with a photoresist layer. The mesa structures and the surrounding photoresist layer are covered with a metal layer, on which is placed a photoresist mask. Conductive material is deposited through the photoresist mask to form a number of metallized regions on the metal layer. After removing the photoreist mask, the metallized regions are used as a mask for patterning the underlying metal layer into metal regions corresponding to the metallized regions. The metallized regions and the underlying patterned metal regions form two laminated metal structures for positive and negative electrodes. One of the laminated metal structures forms an interconnect metal line along the sidewalls of a valley between the two mesa structures or across the valley to form a bridge.

Abstract: A semiconductor device comprises a first semiconductor layer of a first conductivity type provided on a semiconductor substrate of the first conductivity type, a base layer of a second conductivity type provided in the first semiconductor layer, for defining a vertical MISFET including source regions and a gate electrode on a gate insulation film, a Schottky barrier diode (SBD)-forming region provided in the first semiconductor layer around the base layer, a guard ring region of the second conductivity type provided around SBD-forming region, a first main electrode disposed above the first semiconductor layer and provided in common as both a source electrode of the MISFET and an anode of the SBD, a surface gate electrode disposed above the first semiconductor layer, and a second main electrode provided in common as a drain electrode of the MISFET and a cathode of the SBD.

Abstract: A silicon-based semiconductor component includes a high-efficiency barrier junction termination. In the semiconductor component, a silicon semiconductor region takes on the depletion region of an active area of the semiconductor component. The junction termination for the active area is formed with silicon with a doping that is opposite to that of the semiconductor region, and the junction termination surrounds the active area on or in a surface of the semiconductor region. The junction termination is doped with a dopant that has a low impurity energy level of at least 0.1 eV in silicon. Preferably Be, Zn, Ni, Co, Mg, Sn or In are used as acceptors and S, Se or Ti are provided as donors.

Abstract: A first cathode flange (14) provided with branch-like protrusions (14d) extending towards substantially its outer periphery and a gate flange (15) provided with branch-like protrusions (15c) extending towards substantially its outer periphery are connected to a cathode electrode (7a) and a gate electrode (7b), respectively, formed on one surface of a gate drive substrate (7). With this structure, a gate commutated turn-off semiconductor device which eliminates the necessity of a gate spacer and a cathode spacer and allows reduction in time and cost required for manufacture can be achieved.

Abstract: A semiconductor device comprises an active area with a voltage termination structure located adjacent to the active area at an edge portion of the device. The edge portion comprises a substrate region (23, 24) of a first semiconductor type, and the voltage termination structure comprises first and second layers (21 and 22) formed within the substrate region. The first and second layers (21 and 22) define regions each of a second semiconductor type.

Abstract: A semiconductor device 100 has a substrate 11 including a high breakdown voltage transistor region where transistors with high breakdown voltage and high dielectric strength Qn and Qp are formed and a low breakdown voltage transistor region where transistors with low breakdown voltage and low dielectric strength are formed. The transistors with high voltage breakdown and high dielectric strength Qn and Qp and the transistors with low voltage breakdown and low dielectric strength operate at different voltages. In the high breakdown voltage transistor region, the semiconductor device has metal wiring layers 19a and 19b that are fed with a high potential. The metal wiring layers 19a and 19b are provided over the transistors with high voltage breakdown and high dielectric strength Qn and Qp through a first interlayer dielectric film 16 and a second interlayer dielectric film 17. An element isolation dielectric region 14 is provided over the substrate 11.

Abstract: A semiconductor rectifier includes a substrate of a first conductivity type; a current path layer of the first conductivity type formed near the surface of the substrate; a current block layer of a second conductivity type laterally enclosing the current path layer and extending to a depth deeper than the current path layer; and first and second metal layers formed respectively contacting upper and lower surfaces of the substrate. The current path layer has an impurity concentration higher than that of the substrate, and the current block layer has an impurity concentration higher than that of the current path layer. The current path layer is small enough for the portion below the current path layer to be completely blocked by the depletion region formed around the current block layer when a reverse bias or no is applied to the rectifier.

Abstract: Providing a reverse conducting thyristor, wherein a diode and a GTO thyristor are reverse parallel-connected, with which it is possible to reduce a surface area size of a separation portion and avoid variations in insulation characteristics. A separation portion between a diode and a GTO thyristor includes a semiconductor substrate of a first conductivity type, a thin film region of a second conductivity type formed in a major surface of the semiconductor substrate, and a guard ring region of the second conductivity type.

Abstract: A photodetector circuit incorporates an avalanche photodiode (APD) 300 produced by epitaxy on a CMOS substrate 302 with implanted n-well 304 and p-well 306. The n-well 304 has an implanted p+ guard ring 310 delimiting the APD 300. Within the guard ring 310 is an implanted n+ APD layer 312 upon which is deposited an epitaxial p+ APD layer 314, these layers forming the APD 300. The APD may be incorporated in an amplifier circuit 50 providing feedback to maintain constant bias voltage, and may include an SiGe absorption region to provide extended long wavelength response or lower avalanche voltage. Non-avalanche photodiodes may also be used.

Abstract: A semiconductor device which comprises a semiconductor chip packaged in a resin package and having an electrode terminal wire-bonded to a conductor cap having one end defining an exposed top of an external connection terminal protruding from the resin package and the other end defining an orifice embedded in the resin package, wherein the orifice of the conductor cap has a radially outward extending flange which anchors the conductor cap to the resin package. The process of producing the semiconductor device is also disclosed.

Abstract: A first semiconductor mesa structure having a photoactive region and a second semiconductor mesa structure are formed side by side on a semi-insulating substrate and surrounded with a photoresist layer. The mesa structures and the surrounding photoresist layer are covered with a metal layer, on which is placed a photoresist mask. Conductive material is deposited through the photoresist mask to form a number of metallized regions on the metal layer. After removing the photoresist mask, the metallized regions are used as a mask for patterning the underlying metal layer into metal regions corresponding to the metallized regions. The metallized regions and the underlying patterned metal regions form two laminated metal structures for positive and negative electrodes. One of the laminated metal structures forms an interconnect metal line along the sidewalls of a valley between the two mesa structures or across the valley to form a bridge.

Abstract: A trench DMOS device has a gate insulating layer on the bottom and sidewalls of the trench. The upper edges of the trench have an impurity injection region and are rounded. In addition, a first conductive layer is formed on the gate insulating layer, and a second conductive layer is formed on the first conductive layer and filled in the trench. The second conductive layer has different crystallization from the first conductive layer. As such the first conductive layer acts as a buffer between the gate insulating layer and the filled in second conductive layer. A method for fabricating a trench DMOS device includes the steps of forming an epitaxial layer on a semiconductor substrate. Then an impurity is injected into the epitaxial layer to form an impurity injection region. Then a trench is formed in the semiconductor substrate passing through the impurity injection region. Then a dry etching process is used to round the upper edges of the trench.

Abstract: An electrostatic discharge protection device for protecting a mixed voltage integrated circuit against damage is provided which includes at least on pair of NMOS transistors connected in a cascode configuration. Each NMOS transistor pair includes a first transistor, having a drain region coupled to and I/O stage of the mixed voltage integrated circuit, and a gate region coupled to the mixed voltage integrated circuit's low power supply. The second NMOS transistor of the pair is merged into the same active area as the first transistor and has a gate region and a source region coupled to the ground plane of the mixed voltage integrated circuit. The source region of the first transistor and the drain region of the second transistor are constructed of a shared NMOS diffusion region.

Abstract: A method of forming a power integrated circuit device (100) including a semiconductor layer of first conductivity type. The semiconductor layer includes a front-side surface (103), a backside surface (116), and a scribe region (117). The semiconductor layer further including a plurality of active cells on the front-side surface (103). The present method includes forming a backside layer (116) of second conductivity type overlying the backside surface, and forming a continuous diffusion region (117) of the second conductivity type through the semiconductor layer to connect the scribe region to the backside layer (116).

Abstract: A specification is given of a bidirectionally controllable thyristor which is distinguished by improved decoupling between the two thyristor structures. In particular, the intention is that the switched-off structure cannot be triggered in an uncontrolled manner by undesirable migration of charge carriers. This is achieved by virtue of the fact that the degree of shorting of the cathode region increases toward the isolation region. In particular, this can be achieved by virtue of the fact that the density per unit area of the short-circuit regions tends to a maximum value toward the isolation region. The use of a linear, continuous short-circuit region running along the isolation region is particularly favorable. (FIG. 1).