Combined With Floating Pn Junction Guard Region Patents (Class 257/490)
  • Patent number: 8432013
    Abstract: A semiconductor device is provided with a peripheral region that has a narrow width and exhibits good electric field relaxation and high robustness against induced charges. The device has an active region for main current flow and a peripheral region surrounding the active region on a principal surface of a semiconductor substrate of a first conductivity type. The peripheral region has a guard ring of a second conductivity type composed of straight sections and curved sections connecting the straight sections formed in a region of the principal surface surrounding the active region, and a pair of polysilicon field plates in a ring shape formed separately on inner and outer circumferential sides of the guard ring. The surface of the guard ring and the pair of polysilicon field plates of the inner circumferential side and the outer circumferential side are electrically connected with a metal film in the curved section.
    Type: Grant
    Filed: February 2, 2011
    Date of Patent: April 30, 2013
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Yasuhiko Onishi
  • Patent number: 8373247
    Abstract: According to one embodiment, a semiconductor device includes a first semiconductor region of a first conductivity type, a second semiconductor region of the first conductivity type, a first main electrode, a third semiconductor region of a second conductivity type, a second main electrode, and a plurality of embedded semiconductor regions of the second conductivity type. The second semiconductor region is formed on a first major surface of the first semiconductor region. The first main electrode is formed on a face side opposite to the first major surface of the first semiconductor region. The third semiconductor region is formed on a second major surface of the second semiconductor region on a side opposite to the first semiconductor region. The second main electrode is formed to bond to the third semiconductor region. The embedded semiconductor regions are provided in a termination region.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: February 12, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Wataru Saito, Syotaro Uno, Munehisa Yabuzaki, Shunji Taniuchi, Miho Watanabe
  • Publication number: 20130020671
    Abstract: This invention discloses a semiconductor power device disposed in a semiconductor substrate comprising a heavily doped region formed on a lightly doped region and having an active cell area and an edge termination area. The edge termination area comprises a plurality of termination trenches formed in the heavily doped region with the termination trenches lined with a dielectric layer and filled with a conductive material therein. The edge termination further includes a plurality of buried guard rings formed as doped regions in the lightly doped region of the semiconductor substrate immediately adjacent to the termination trenches.
    Type: Application
    Filed: July 19, 2011
    Publication date: January 24, 2013
    Inventors: Yeehang Lee, Madhur Bobde, Yongping Ding, Jongoh Kim, Anup Bhalla
  • Patent number: 8357985
    Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.
    Type: Grant
    Filed: January 13, 2012
    Date of Patent: January 22, 2013
    Assignee: Analog Devices, Inc.
    Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
  • Patent number: 8274080
    Abstract: A semiconductor wafer includes semiconductor chip areas on a semiconductor substrate, the semiconductor chip areas having thereon semiconductor circuit patterns and inner guard ring patterns surrounding the semiconductor circuit patterns; and scribe lanes on the semiconductor substrate between the semiconductor chip areas, the scribe lanes having thereon outer guard ring patterns surrounding the inner guard ring patterns and a process monitoring pattern between the outer guard ring patterns, the outer guard ring patterns and the process monitoring pattern being merged with each other.
    Type: Grant
    Filed: October 15, 2009
    Date of Patent: September 25, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Dong-Hyun Han
  • Patent number: 8212323
    Abstract: A seal ring structure for an integrated circuit includes a seal ring being disposed along a periphery of the integrated circuit and being divided into at least a first portion and a second portion, wherein the second portion is positioned facing an analog and/or RF circuit block and is different from the first portion in structure. A P+ region is provided in a P substrate and positioned under the second portion. A shallow trench isolation (STI) structure surrounds the P+ region and laterally extends underneath a conductive rampart of the second portion.
    Type: Grant
    Filed: August 5, 2010
    Date of Patent: July 3, 2012
    Assignee: Mediatek Inc.
    Inventors: Tung-Hsing Lee, Tien-Chang Chang, Yuan-Hung Chung
  • Patent number: 8198651
    Abstract: A semiconductor device for protecting against an electro static discharge is disclosed. In one embodiment, the semiconductor device includes a first low doped region disposed in a substrate, a first heavily doped region disposed within the first low doped region, the first heavily doped region comprising a first conductivity type, and the first low doped region comprising a second conductivity type, the first and the second conductivity types being opposite, the first heavily doped region being coupled to a node to be protected. The semiconductor device further includes a second heavily doped region coupled to a first power supply potential node, the second heavily doped region being separated from the first heavily doped region by a portion of the first low doped region, and a second low doped region disposed adjacent the first low doped region, the second low doped region comprising the first conductivity type.
    Type: Grant
    Filed: October 13, 2008
    Date of Patent: June 12, 2012
    Assignee: Infineon Technologies AG
    Inventors: Gernot Langguth, Wolfgang Soldner, Cornelius Christian Russ
  • Patent number: 8188578
    Abstract: A seal ring structure disposed along a periphery of an integrated circuit. The seal ring is divided into at least a first portion and a second portion. The second portion is positioned facing and shielding an analog and/or RF circuit block from a noise. A deep N well is disposed in a P substrate and is positioned under the second portion. The deep N well reduces the substrate noise coupling.
    Type: Grant
    Filed: November 19, 2008
    Date of Patent: May 29, 2012
    Assignee: Mediatek Inc.
    Inventors: Tung-Hsing Lee, Tien-Chang Chang, Yuan-Hung Chung
  • Publication number: 20120112307
    Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.
    Type: Application
    Filed: January 13, 2012
    Publication date: May 10, 2012
    Applicant: ANALOG DEVICES, INC.
    Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
  • Patent number: 8080858
    Abstract: A Semiconductor component having a space saving edge structure is disclosed. One embodiment provides a first side, a second side, an inner region, an edge region adjoining the inner region in a lateral direction of the semiconductor body, and a first semiconductor layer extending across the inner region and the edge region and having a basic doping of a first conductivity type. At least one active component zone of a second conductivity type, which is complementary to the first conductivity type, is disposed in the inner region in the first semiconductor layer. An edge structure is disposed in the edge region and includes at least one trench extending from the first side into the semiconductor body. An edge electrode is disposed in the trench, a dielectric layer is disposed in the trench between the edge electrode and the semiconductor body, a first edge zone of the second conductivity type adjoin the trench and are at least partially disposed below the trench.
    Type: Grant
    Filed: August 3, 2007
    Date of Patent: December 20, 2011
    Assignee: Infineon Technologies Austria AG
    Inventors: Franz Hirler, Ralf Siemieniec, Christian Geissler
  • Patent number: 8008734
    Abstract: A power semiconductor device is provided having a field plate that employs a thick metal film in an edge termination structure and which permits edge termination structure width reduction even with large side etching or etching variation, which exhibits superior long-term forward blocking voltage capability reliability, and which allows minimal forward blocking voltage capability variation. The edge termination structure has multiple ring-like p-type guard rings, a first insulating film covering the guard rings, and ring-like field plates, provided via the first insulating film atop the guard rings. The field plates have a polysilicon film and a thicker metal film. The polysilicon film is provided on a first guard ring via first insulating film, and a dual field plate made of the polysilicon film and metal film is provided on a second guard ring. The dual field plate is stacked via a second insulating film. The first and second guard rings alternate.
    Type: Grant
    Filed: January 11, 2008
    Date of Patent: August 30, 2011
    Assignee: Fuji Electric Co., Ltd.
    Inventors: Hiroki Wakimoto, Masahito Otsuki, Takashi Shiigi
  • Publication number: 20110204469
    Abstract: A semiconductor device is provided with a peripheral region that has a narrow width and exhibits good electric field relaxation and high robustness against induced charges. The device has an active region for main current flow and a peripheral region surrounding the active region on a principal surface of a semiconductor substrate of a first conductivity type. The peripheral region has a guard ring of a second conductivity type composed of straight sections and curved sections connecting the straight sections formed in a region of the principal surface surrounding the active region, and a pair of polysilicon field plates in a ring shape formed separately on inner and outer circumferential sides of the guard ring. The surface of the guard ring and the pair of polysilicon field plates of the inner circumferential side and the outer circumferential side are electrically connected with a metal film in the curved section.
    Type: Application
    Filed: February 2, 2011
    Publication date: August 25, 2011
    Applicant: C/O FUJI ELECTRIC SYSTEMS CO., LTD.
    Inventor: Yasuhiko ONISHI
  • Patent number: 7977762
    Abstract: An integrated circuit (IC) is disclosed to include a central area of the IC that is partitioned into a first section containing at least one digital circuit and a second section containing at least one analog circuit; and a guard strip (or shield) that is within the central area and that is positioned within between the digital circuit and the analog circuit. The shield or guard strip comprises of n-well and p-tap regions that separate digital and analog circuits.
    Type: Grant
    Filed: December 9, 2008
    Date of Patent: July 12, 2011
    Assignee: Alvand Technologies, Inc.
    Inventors: Mansour Keramat, Mehrdad Heshami, Syed S. Islam
  • Patent number: 7880260
    Abstract: A semiconductor device includes an active region with a vertical drift path of a first conduction type and with a near-surface lateral well of a second, complementary conduction type. In addition, the semiconductor device has an edge region surrounding the active region. This edge region has a variable lateral doping material zone of the second conduction type, which adjoins the well. A transition region in which the concentration of doping material gradually decreases from the concentration of the well to the concentration at the start of the variable lateral doping material zone is located between the lateral well and the variable lateral doping material zone.
    Type: Grant
    Filed: April 22, 2008
    Date of Patent: February 1, 2011
    Assignee: Infineon Technology Austria AG
    Inventors: Elmar Falck, Josef Bauer, Gerhard Schmidt
  • Publication number: 20100289110
    Abstract: A semiconductor device using one or more guard rings includes a p-type guard ring region surrounding a pn junction region, an insulating film covering the p-type guard ring region, one or more conductive films electrically connected with the p-type guard ring region through one or more contact holes made in the insulating film, and a semi-insulating film covering the insulating film and the conductive films. Thus, a desired breakdown voltage characteristic can be ensured even if a foreign matter or the like adheres to a surface of the conductive films.
    Type: Application
    Filed: December 31, 2009
    Publication date: November 18, 2010
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Yoichiro TARUI, Atsushi Narazaki, Ryoichi Fujii
  • Patent number: 7804143
    Abstract: A “tabbed” MOS device provides radiation hardness while supporting reduced gate width requirements. The “tabbed” MOS device also utilizes a body tie ring, which reduces field threshold leakage. In one implementation the “tabbed” MOS device is designed such that a width of the tab is based on at least a channel length of the MOS device such that a radiation-induced parasitic conduction path between the source and drain region of the device has a resistance that is higher than the device channel resistance.
    Type: Grant
    Filed: February 18, 2009
    Date of Patent: September 28, 2010
    Assignee: Intersil Americas, Inc.
    Inventors: Stephen Joseph Gaul, Michael D. Church, Brent R. Doyle
  • Patent number: 7777292
    Abstract: A semiconductor device includes a semiconductor substrate of a first conductivity type having a top surface and a bottom surface, a semiconductor layer of a first conductivity type formed on the top surface of the semiconductor substrate, and having an active region and an edge termination region surrounding the active region, a first semiconductor region of a second conductivity type formed in the edge termination region adjacent to an edge of the active region, a second semiconductor region of a second conductivity type buried in the edge termination region in a sheet shape or a mesh shape substantially in parallel with a surface of the semiconductor layer, a first electrode formed on the active region of the semiconductor layer and a part of the first semiconductor region, and a second electrode formed on the bottom surface of the semiconductor substrate.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: August 17, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Chiharu Ota, Johji Nishio, Tetsuo Hatakeyama, Takashi Shinohe
  • Patent number: 7772669
    Abstract: Second diffusion layers to be guard rings of a second conductivity type are formed on the major surface of a semiconductor substrate of a first conductivity type in a guard ring region. An insulating film is formed on these second diffusion layers. The semiconductor device has a structure wherein a conductive film is formed on the insulating film between adjacent electrodes among a first surface electrode, second surface electrodes, and a third surface electrode.
    Type: Grant
    Filed: October 2, 2006
    Date of Patent: August 10, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventors: Shigeo Tooi, Tetsujiro Tsunoda
  • Publication number: 20100193894
    Abstract: A semiconductor device includes a semiconductor chip, and a guard ring made of an electrically conductive material and arranged between electrodes on the semiconductor chip and side edges of the semiconductor chip, the guard ring being divided by isolating sections on the semiconductor chip.
    Type: Application
    Filed: January 21, 2010
    Publication date: August 5, 2010
    Applicant: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
    Inventors: Takeshi Hishida, Tsutomu Igarashi
  • Patent number: 7709924
    Abstract: A semiconductor structure and a method for operating the same. The method includes providing a semiconductor structure. The semiconductor structure includes first, second, third, and fourth doped semiconductor regions. The second doped semiconductor region is in direct physical contact with the first and third doped semiconductor regions. The fourth doped semiconductor region is in direct physical contact with the third doped semiconductor region. The first and second doped semiconductor regions are doped with a first doping polarity. The third and fourth doped semiconductor regions are doped with a second doping polarity. The method further includes (i) electrically coupling the first and fourth doped semiconductor regions to a first node and a second node of the semiconductor structure, respectively, and (ii) electrically charging the first and second nodes to first and second electric potentials, respectively. The first electric potential is different from the second electric potential.
    Type: Grant
    Filed: July 16, 2007
    Date of Patent: May 4, 2010
    Assignee: International Business Machines Corporation
    Inventor: Steven Howard Voldman
  • Patent number: 7683453
    Abstract: All low-temperature processes are used to fabricate a variety of semiconductor devices in a substrate the does not include an epitaxial layer. The devices include a non-isolated lateral DMOS, a non-isolated extended drain or drifted MOS device, a lateral trench DMOS, an isolated lateral DMOS, JFET and depletion-mode devices, and P-N diode clamps and rectifiers and junction terminations. Since the processes eliminate the need for high temperature processing and employ “as-implanted” dopant profiles, they constitute a modular architecture which allows devices to be added or omitted to the IC without the necessity of altering the processes used to produce the remaining devices.
    Type: Grant
    Filed: November 5, 2007
    Date of Patent: March 23, 2010
    Assignee: Advanced Analogic Technologies, Inc.
    Inventors: Richard K. Williams, Donald Ray Disney
  • Patent number: 7675135
    Abstract: Instabilities and related drawbacks that arise when interruptions of a perimetral high voltage ring extension implanted regions (RHV) of a main junction (P_tub 1, (P_tub2, . . . ) of an integrated device must be realized may be effectively prevented. This important result is achieved by an extremely simple expedient: whenever an interruption (I) of the high voltage ring extension must be created, it is not realized straight across it along a common orthogonal direction to the perimetral implanted region, on the contrary, the narrow interruption is defined obliquely or slantingly across the width of the perimetral high voltage ring extension. In case of a straight interruption, the angle of slant (?) may be generally comprises between 30 and 60 degrees and more preferably is 45 degrees or close to it. Naturally, the narrow interruption is created by masking it from dopant implantation when realizing the perimetral high voltage ring extension region.
    Type: Grant
    Filed: September 12, 2005
    Date of Patent: March 9, 2010
    Assignee: STMicroelectronics S.R.L.
    Inventors: Davide Patti, Giuditta Settanni
  • Patent number: 7652307
    Abstract: In a semiconductor device of the present invention, a MOS transistor is disposed in an elliptical shape. Linear regions in the elliptical shape are respectively used as the active regions, and round regions in the elliptical shape is used respectively as the inactive regions. In each of the inactive regions, a P type diffusion layer is formed to coincide with a round shape. Another P type diffusion layer is formed in a part of one of the inactive regions. These P type diffusion layers are formed as floating diffusion layers, are capacitively coupled to a metal layer on an insulating layer, and assume a state where predetermined potentials are respectively applied thereto. This structure makes it possible to maintain current performance of the active regions, while improving the withstand voltage characteristics in the inactive regions.
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: January 26, 2010
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Shuichi Kikuchi, Kiyofumi Nakaya, Shigeaki Okawa
  • Patent number: 7649223
    Abstract: An n-type drift region includes an active element region and a peripheral region. A p-type base region is formed at least in the active element region. A trench-type gate electrode is formed in each of the active element region and the peripheral region. An n-type source region formed in the base region. A plurality of p-type column regions is selectively formed separately from one another in each of the active element region and the peripheral region. In a peripheral region, a p-type guard region is formed below the gate electrode. In the active element region, the p-type guard region is not formed below the gate electrode. As a result, it is possible to hold the breakdown voltage in the peripheral region at a higher level than in the active element region while maintaining the low ON resistance due to a superjunction structure and to raise the breakdown voltage performance of the semiconductor device.
    Type: Grant
    Filed: June 28, 2007
    Date of Patent: January 19, 2010
    Assignee: NEC Electronics Corporation
    Inventor: Yoshiya Kawashima
  • Publication number: 20100001362
    Abstract: A semiconductor device has active region (30) and edge termination region (32) which includes a plurality of floating field regions (46). Field plates (54) extend in the edge termination region (32) inwards from contact holes (56) towards the active region (30) over a plurality of floating field regions (46). Pillars (40) may be provided.
    Type: Application
    Filed: May 22, 2006
    Publication date: January 7, 2010
    Applicant: NXP B.V.
    Inventors: Rob Van Dalen, Maarten Jacobus Swanenberg
  • Patent number: 7629665
    Abstract: A semiconductor component has a semiconductor body (100) having a basic doping and a first and second side, an inner region (103) arranged between the first and second sides, and an edge region (104) adjacent to the inner region in a lateral direction, at least one active component zone (12) which is arranged in the inner region (103) in the region of the first side (101) and is doped complementarily to the basic doping, and a channel stop zone (20), which is arranged in the edge region (104) in the region of the first side (101), is of the same conduction type as the basic doping and is doped more heavily than the basic doping, the doping concentration in the channel stop zone (20) decreasing continuously at least in sections in a lateral direction in the direction of the active component zone (12) at least over a distance (d1) of 10 ?m.
    Type: Grant
    Filed: July 6, 2006
    Date of Patent: December 8, 2009
    Assignee: Infineon Technologies AG
    Inventors: Reiner Barthelmess, Hans-Joachim Schulze
  • Patent number: 7605446
    Abstract: A bipolar high voltage/power semiconductor device has a drift region having adjacent its ends regions of different conductivity types respectively. High and low voltage terminals are provided. A first insulated gate terminal and a second insulated gate terminal are also provided. One or more drive circuits provide appropriate voltages to the first and second insulated gate terminals so as to allow current conduction in a first direction or in a second direction that is opposite the first direction.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: October 20, 2009
    Assignee: Cambridge Semiconductor Limited
    Inventors: Florin Udrea, Nishad Udugampola, Gehan A. J. Amaratunga
  • Patent number: 7598585
    Abstract: A structure for preventing leakage of a semiconductor device is provided. The structure comprises a conductive layer, for shielding the features beneath thereof, located under a conductive line which crosses over a region having high voltage device. The conductive layer is wider than the conductive line.
    Type: Grant
    Filed: May 24, 2006
    Date of Patent: October 6, 2009
    Assignee: Himax Technologies Limited
    Inventor: Chan-Liang Wu
  • Patent number: 7582938
    Abstract: A technique to enhancing substrate bias of grounded-gate NMOS fingers (ggNMOSFET's) has been developed. By using this technique, lower triggering voltage of NMOS fingers can be achieved without degrading ESD protection in negative zapping. By introducing a simple gate-coupled effect and a PMOSFET triggering source with this technique, low-voltage triggered NMOS fingers have also been developed in power and I/O ESD protection, respectively. A semiconductor device which includes a P-well which is underneath NMOS fingers. The device includes an N-well ring which is configured so that the inner P-well underneath the NMOS fingers is separated from an outer P-well. The inner P-well and outer P-well are connected by a P-substrate resistance which is much higher than the resistance of the P-wells. A P+-diffusion ring surrounding the N-well ring is configured to connect to VSS, i.e., P-taps.
    Type: Grant
    Filed: October 25, 2005
    Date of Patent: September 1, 2009
    Assignee: LSI Corporation
    Inventor: Jau-Wen Chen
  • Patent number: 7525178
    Abstract: A termination region of a semiconductor die is provided, which includes one or more field rings arranged in the termination region, one or more metal field plates, and an insulation layer disposed to prevent direct electrical contact between the field rings and the field plate such that the at least one field ring is capacitively coupled with the at least one field plate. Such a termination region may also include a polysilicon plate capacitively coupled with a diffusion region laterally spaced from the field rings, the polysilicon plate being located at an outer surface or directly under a passivation layer at an outer surface of the die. The termination region may also include floating field rings. The insulation layer may be a field oxide layer.
    Type: Grant
    Filed: October 25, 2006
    Date of Patent: April 28, 2009
    Assignee: International Rectifier Corporation
    Inventor: Lawrence Kulinsky
  • Publication number: 20090072340
    Abstract: High voltage semiconductor devices with high-voltage termination structures are constructed on lightly doped substrates. Lightly doped p-type substrates are particularly prone to depletion and inversion from positive charges, degrading the ability of associated termination structures to block high voltages. To improve the efficiency and stability of termination structures, second termination regions of the same dopant type as the substrate, more heavily doped than the substrate but more lightly doped than first termination regions, are positioned adjoining the first termination regions. The second termination regions raise the field threshold voltage where the surface is vulnerable and render the termination structure substantially insensitive to positive charges at the surface. The use of higher dopant concentration in the gap region without causing premature avalanche is facilitated by only creating second termination regions for regions lacking field plate protection.
    Type: Application
    Filed: September 9, 2008
    Publication date: March 19, 2009
    Applicant: MICROSEMI CORPORATION
    Inventors: Jinshu Zhang, Dumitru Sdrulla, Dah Wen Tsang
  • Publication number: 20080169526
    Abstract: A power semiconductor device is provided having a field plate that employs a thick metal film in an edge termination structure and which permits edge termination structure width reduction even with large side etching or etching variation, which exhibits superior long-term forward blocking voltage capability reliability, and which allows minimal forward blocking voltage capability variation. The edge termination structure has multiple ring-like p-type guard rings, a first insulating film covering the guard rings, and ring-like field plates, provided via the first insulating film atop the guard rings. The field plates have a polysilicon film and a thicker metal film. The polysilicon film is provided on a first guard ring via first insulating film, and a dual field plate made of the polysilicon film and metal film is provided on a second guard ring. The dual field plate is stacked via a second insulating film. The first and second guard rings alternate.
    Type: Application
    Filed: January 11, 2008
    Publication date: July 17, 2008
    Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.
    Inventors: Hiroki WAKIMOTO, Masahito OTSUKI, Takashi SHIIGI
  • Patent number: 7388266
    Abstract: A structure for preventing leakage of a high voltage device is provided. The structure comprises a conductive layer, for shielding the features beneath thereof, located under a conductive line which crosses over a region having high voltage device. The conductive layer is wider than the conductive line.
    Type: Grant
    Filed: August 18, 2005
    Date of Patent: June 17, 2008
    Assignee: Himax Technologies Limited
    Inventor: Chan-Liang Wu
  • Patent number: 7385273
    Abstract: A power semiconductor device that includes a plurality of gate structure each having a gate insulation of a first thickness, and a termination region, the termination including a field insulation body surrounding the active region and having a recess that includes a bottom insulation thicker than the first thickness.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: June 10, 2008
    Assignee: International Rectifier Corporation
    Inventors: Hugo R Burke, Simon Green
  • Patent number: 7372111
    Abstract: The superjunction semiconductor device includes a drain drift section, which includes a first alternating conductivity type layer formed of first n-type regions and first p-type regions arranged alternately. The device also includes a peripheral section around the drain drift section, which includes a second alternating conductivity type layer formed of second n-type regions and second p-type regions arranged alternately. The peripheral section further includes a third alternating conductivity type layer in its surface portion. The third alternating conductivity type layer is formed of third n-type regions and third p-type regions arranged alternately. At least the peripheral section is configured to improve the avalanche withstanding capability over the entire device.
    Type: Grant
    Filed: August 4, 2005
    Date of Patent: May 13, 2008
    Assignee: Fuji Electric Device Technology Co., Ltd.
    Inventors: Yasuhiko Onishi, Takeyoshi Nishimura, Yasushi Niimura, Masanori Inoue
  • Patent number: 7279768
    Abstract: In a semiconductor device of the present invention, an N-type buried diffusion layer is formed across a substrate and an epitaxial layer. A P-type buried diffusion layer is formed across an upper surface of the N-type buried diffusion layer over a wide range to form a PN junction region for an overvoltage protection. A P-type diffusion region is formed so as to be connected to the P-type buried diffusion layer. A breakdown voltage of the PN junction region is lower than a breakdown voltage between a source and a drain. This structure makes it possible to prevent a concentration of a breakdown current and protect the semiconductor device from an overvoltage.
    Type: Grant
    Filed: February 23, 2006
    Date of Patent: October 9, 2007
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Ryo Kanda, Shuichi Kikuchi, Seiji Otake
  • Patent number: 7276772
    Abstract: A semiconductor device, including: a semiconductor substrate of a first conduction type; an active region used as a function-element-forming region on the semiconductor substrate; a low-resistance region of a second conduction type formed on an outermost periphery of the active region to surround the active region and having contact with the semiconductor substrate, the second conduction type being different from the first conduction type; and an electrode connected to the function element and the low-resistance region. A diode is formed by the semiconductor substrate and the low-resistance region. The function element and the diode are electrically connected in parallel between the semiconductor substrate and the electrode, and, between the semiconductor substrate and the electrode, resistance of the low-resistance region is lower than resistance of an electrical conduction path via the function element.
    Type: Grant
    Filed: March 5, 2007
    Date of Patent: October 2, 2007
    Assignee: Rohm Co., Ltd.
    Inventor: Kenichi Yoshimochi
  • Patent number: 7205628
    Abstract: A semiconductor device, including: a semiconductor substrate of a first conduction type; an active region used as a function-element-forming region on the semiconductor substrate; a low-resistance region of a second conduction type formed on an outermost periphery of the active region to surround the active region and having contact with the semiconductor substrate, the second conduction type being different from the first conduction type; and an electrode connected to the function element and the low-resistance region. A diode is formed by the semiconductor substrate and the low-resistance region. The function element and the diode are electrically connected in parallel between the semiconductor substrate and the electrode, and, between the semiconductor substrate and the electrode, resistance of the low-resistance region is lower than resistance of an electrical conduction path via the function element.
    Type: Grant
    Filed: December 2, 2004
    Date of Patent: April 17, 2007
    Assignee: Rohm Co., Ltd.
    Inventor: Kenichi Yoshimochi
  • Patent number: 7193255
    Abstract: Floating conducting regions at floating potentials are placed on a substrate surface between adjacent conducting regions to which predetermined potentials are applied. This makes it possible to block the spread of a depletion layer to the substrate between the conducting impurity regions. Thus, the leakage of high-frequency signals can be suppressed. In particular, in a case where a floating conducting region is placed between a peripheral impurity region of a common input terminal pad and a resistor in a switch circuit device, it is possible to suppress the leakage of high-frequency signals from an input terminal to control terminals which become high frequency GND and to suppress an increase in insertion loss.
    Type: Grant
    Filed: May 27, 2005
    Date of Patent: March 20, 2007
    Assignee: Sanyo Electric Co., Ltd.
    Inventor: Tetsuro Asano
  • Patent number: 7135742
    Abstract: An insulated gate type semiconductor device comprised of a semiconductor layer serving as an active region isolated from a semiconductor substrate by a substrate isolation insulating film and a T-shaped gate electrode comprised of a trunk-shaped main gate electrode and a crosspiece-shaped conductor pattern provided on the semiconductor layer, wherein the thickness of the gate insulating film directly under the crosspiece-shaped conductor pattern is made greater than the thickness of the gate insulating film directly under the main gate electrode, whereby it is possible to prevent short-circuits between electrodes, prevent short-circuits between separators, and prevent an increase of the parasitic capacitance.
    Type: Grant
    Filed: November 22, 2000
    Date of Patent: November 14, 2006
    Assignee: Fujitsu Limited
    Inventors: Akihiko Harada, Sadanori Akiya, Kazuhiro Furuya, Hisashi Watanabe
  • Patent number: 7119379
    Abstract: A semiconductor device disclosed herein comprises: a first base region which is of a first conductivity type; a second base region which is of a second conductivity type and which is selectively formed on a major surface of the first base region; a stopper region which is of a first conductivity type and which is formed on the major surface of the first base region, the stopper region being a predetermined distance away from the second base region and surrounding the second base region; and a ring region which is of a second conductivity type which is formed on the major surface of the first base region between the second base region and the stopper region, the ring region being spirally around the second base region and electrically connected to the second base region and the stopper region.
    Type: Grant
    Filed: October 22, 2003
    Date of Patent: October 10, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hideaki Ninomiya, Tomoki Inoue
  • Patent number: 7112865
    Abstract: A diode is provided which includes a first-conductivity-type cathode layer, a first-conductivity-type drift layer placed on the cathode region and having a lower concentration than the cathode layer, a generally ring-like second-conductivity-type ring region formed in the drift layer, second-conductivity-type anode region formed in the drift layer located inside the ring region, a cathode electrode formed in contact with the cathode layer, and an anode electrode formed in contact with the anode region, wherein the lowest resistivity of the second-conductivity-type anode region is at least 1/100 of the resistivity of the drift layer, and the thickness of the anode region is smaller than the diffusion depth of the ring region.
    Type: Grant
    Filed: March 3, 2005
    Date of Patent: September 26, 2006
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Tatsuhiko Fujihira, Yasushi Miyasaka
  • Patent number: 7049663
    Abstract: An electrostatic discharge protection device with high voltage and negative voltage tolerance is provided. The electrostatic discharge protection device comprises: a first type substrate; a first type well inside the first type substrate, the first type well being floating; a second type well inside the first type substrate, the second type well separating the first type well from the first type substrate, the second type well being coupled to a first voltage line; a second type first doped region inside the first type well and coupled to a second voltage line; a second type second doped region inside the first type well and coupled to the pad; and an isolation structure between the second type first doped region and the second type second doped region.
    Type: Grant
    Filed: September 23, 2004
    Date of Patent: May 23, 2006
    Assignee: Sunplus Technology Co,Ltd.
    Inventor: Tai-Ho Wang
  • Patent number: 6992362
    Abstract: A method and apparatus for increasing a breakdown voltage of a semiconductor device. The semiconductor device is constructed within an epitaxial tub of a first conductivity type formed within a dielectric material and comprises a surface diffusion region of a second conductivity type, opposite that of the first conductivity type, extending into the epitaxial tub, a trench surrounding and electrically isolating the epitaxial tub, a metallization line coupled to the surface diffusion traversing the semiconductor device and the trench, a first field limiting diffusion region of the second conductivity type disposed between the surface diffusion region and the trench and below the metallization line, a poly field plate positioned over the trench and beneath the metallization line, and a first contact coupled to the field limiting diffusion region, the first contact extending below the metallization line and overlapping the poly field plate.
    Type: Grant
    Filed: April 14, 2003
    Date of Patent: January 31, 2006
    Assignee: General Electronics Applications, Inc.
    Inventor: Joseph Pernyeszi
  • Patent number: 6943406
    Abstract: According to the present invention, there is provided a semiconductor device having, a semiconductor substrate having a surface on which an insulating layer is formed, a first-conductivity-type first semiconductor layer formed on the insulating layer and having a first impurity concentration, a first-conductivity-type second semiconductor region formed in the first semiconductor layer from a surface of the first semiconductor layer to a surface of the insulating layer, and having a concentration higher than the first impurity concentration, a second-conductivity-type third semiconductor region formed in the first semiconductor layer from the surface of the first semiconductor layer to the surface of the insulating layer with a predetermined distance between the second and third semiconductor regions, and having a second impurity concentration, a second-conductivity-type fourth semiconductor region formed in a surface portion of the second semiconductor region, and having a concentration higher than the second
    Type: Grant
    Filed: October 30, 2003
    Date of Patent: September 13, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takeshi Uchihara, Yasunori Usui, Hideyuki Ura, Takuma Hara
  • Patent number: 6943410
    Abstract: A vertical MOS semiconductor device exhibits a high breakdown voltage and low on-resistance, reduces the tradeoff relation between the on-resistance and the breakdown voltage, and realizes high speed switching. The semiconductor device has a breakdown-voltage sustaining layer, such as an n?-type drift layer, and a well region, such as a p-type well region, in the breakdown-voltage sustaining layer. The resistivity ? (?cm) of the breakdown-voltage layer is within a range expressed in terms of the breakdown voltage Vbr (V). The semiconductor device also has stripe shaped surface drain regions that extend from the well region and are surrounded by the well region. The surface area ratio between surface drain regions and the well region, which includes the source region, is from 0.01 to 0.2.
    Type: Grant
    Filed: June 12, 2002
    Date of Patent: September 13, 2005
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Tatsuhiko Fujihira, Takashi Kobayashi, Hitoshi Abe, Yasushi Niimura, Masanori Inoue
  • Patent number: 6906355
    Abstract: A semiconductor device having guard grooves uniformly filled with a semiconductor filler is provided. The four corners of a rectangular ring-shaped guard groove meet at right angles, and outer and inner auxiliary diffusion regions both rounded are connected to the four corners. Since the guard grooves do not have to be rounded, the plane orientation of a silicon single crystal exposed inside the guard grooves can be all {100}. Therefore, epitaxial growth in the guard grooves is uniformly carried out, and the grooves are filled with guard regions without defects.
    Type: Grant
    Filed: October 3, 2003
    Date of Patent: June 14, 2005
    Assignee: Shindengen Electric Manufacturing Co., Ltd.
    Inventors: Toru Kurosaki, Hiroaki Shishido, Mizue Kitada, Shinji Kunori, Kosuke Ohshima
  • Patent number: 6879023
    Abstract: The present invention is directed to a seal structure and a method for forming a seal structure for a semiconductor die. An elongate region which is electrically isolated from the remainder of the substrate, such as a well region of a conductivity type opposite that of the substrate, extends around the major portion of the periphery of the substrate. A gap is left between the two ends of the elongate region along the minor portion of the periphery of the substrate not covered by the elongate region. A conductive seal ring is formed around the periphery of the substrate at the elongate region and spans the gap between the ends of the elongate region. The substrate of the semiconductor die is only brought into electrical contact with the seal ring at the gap between the ends of the elongate region.
    Type: Grant
    Filed: August 29, 2000
    Date of Patent: April 12, 2005
    Assignee: Broadcom Corporation
    Inventor: German Gutierrez
  • Patent number: 6870201
    Abstract: The invention relates to a high voltage resistant edge structure in the edge region of a semiconductor component which has floating guard rings of the first conductivity type and inter-ring zones of the second conductivity type which are arranged between the floating guard rings, wherein the conductivities and/or the inter-ring zones are set such that their charge carriers are totally depleted when blocking voltage is applied. The inventive edge structure achieves a modulation of the electrical field both at the surface and in the volume of the semiconductor body. If the inventive edge structure is suitably dimensioned, the field intensity maximum can easily be situated in the depth; that is, in the region of the vertical p-n junction. Thus, a suitable edge construction which permits a “soft” leakage of the electrical field in the volume can always be provided over a wide range of concentrations of p and n doping.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: March 22, 2005
    Assignee: Infineon Technologies AG
    Inventors: Gerald Deboy, Jenoe Tihanyi, Helmut Strack, Helmut Gassel, Jens-Peer Stengl, Hans Weber
  • Patent number: 6815793
    Abstract: A body (1) consisting of a doped semiconductor material with a pn junction (10) and an area (2) of reduced mean free path length (&lgr;r) for free charge carriers is disclosed. Said area (2) has sections (21, 22) which succeed each other in at least one specified direction (x, y, z) and between which there is at least one region (23), containing a mean free path length (&lgr;0) for the free charge carriers that is larger in relation to the reduced mean free path length (&lgr;r).
    Type: Grant
    Filed: February 28, 2003
    Date of Patent: November 9, 2004
    Assignee: Eupec Europdische Gesellschaft fur Leitungshalbleiter GmbH & Co. KG
    Inventors: Veli Kartal, Hans-Joachim Schulze