Combined With Floating Pn Junction Guard Region Patents (Class 257/490)
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Patent number: 8432013Abstract: A semiconductor device is provided with a peripheral region that has a narrow width and exhibits good electric field relaxation and high robustness against induced charges. The device has an active region for main current flow and a peripheral region surrounding the active region on a principal surface of a semiconductor substrate of a first conductivity type. The peripheral region has a guard ring of a second conductivity type composed of straight sections and curved sections connecting the straight sections formed in a region of the principal surface surrounding the active region, and a pair of polysilicon field plates in a ring shape formed separately on inner and outer circumferential sides of the guard ring. The surface of the guard ring and the pair of polysilicon field plates of the inner circumferential side and the outer circumferential side are electrically connected with a metal film in the curved section.Type: GrantFiled: February 2, 2011Date of Patent: April 30, 2013Assignee: Fuji Electric Co., Ltd.Inventor: Yasuhiko Onishi
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Patent number: 8373247Abstract: According to one embodiment, a semiconductor device includes a first semiconductor region of a first conductivity type, a second semiconductor region of the first conductivity type, a first main electrode, a third semiconductor region of a second conductivity type, a second main electrode, and a plurality of embedded semiconductor regions of the second conductivity type. The second semiconductor region is formed on a first major surface of the first semiconductor region. The first main electrode is formed on a face side opposite to the first major surface of the first semiconductor region. The third semiconductor region is formed on a second major surface of the second semiconductor region on a side opposite to the first semiconductor region. The second main electrode is formed to bond to the third semiconductor region. The embedded semiconductor regions are provided in a termination region.Type: GrantFiled: February 17, 2011Date of Patent: February 12, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Wataru Saito, Syotaro Uno, Munehisa Yabuzaki, Shunji Taniuchi, Miho Watanabe
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Publication number: 20130020671Abstract: This invention discloses a semiconductor power device disposed in a semiconductor substrate comprising a heavily doped region formed on a lightly doped region and having an active cell area and an edge termination area. The edge termination area comprises a plurality of termination trenches formed in the heavily doped region with the termination trenches lined with a dielectric layer and filled with a conductive material therein. The edge termination further includes a plurality of buried guard rings formed as doped regions in the lightly doped region of the semiconductor substrate immediately adjacent to the termination trenches.Type: ApplicationFiled: July 19, 2011Publication date: January 24, 2013Inventors: Yeehang Lee, Madhur Bobde, Yongping Ding, Jongoh Kim, Anup Bhalla
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Patent number: 8357985Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: GrantFiled: January 13, 2012Date of Patent: January 22, 2013Assignee: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
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Patent number: 8274080Abstract: A semiconductor wafer includes semiconductor chip areas on a semiconductor substrate, the semiconductor chip areas having thereon semiconductor circuit patterns and inner guard ring patterns surrounding the semiconductor circuit patterns; and scribe lanes on the semiconductor substrate between the semiconductor chip areas, the scribe lanes having thereon outer guard ring patterns surrounding the inner guard ring patterns and a process monitoring pattern between the outer guard ring patterns, the outer guard ring patterns and the process monitoring pattern being merged with each other.Type: GrantFiled: October 15, 2009Date of Patent: September 25, 2012Assignee: Samsung Electronics Co., Ltd.Inventor: Dong-Hyun Han
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Patent number: 8212323Abstract: A seal ring structure for an integrated circuit includes a seal ring being disposed along a periphery of the integrated circuit and being divided into at least a first portion and a second portion, wherein the second portion is positioned facing an analog and/or RF circuit block and is different from the first portion in structure. A P+ region is provided in a P substrate and positioned under the second portion. A shallow trench isolation (STI) structure surrounds the P+ region and laterally extends underneath a conductive rampart of the second portion.Type: GrantFiled: August 5, 2010Date of Patent: July 3, 2012Assignee: Mediatek Inc.Inventors: Tung-Hsing Lee, Tien-Chang Chang, Yuan-Hung Chung
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Patent number: 8198651Abstract: A semiconductor device for protecting against an electro static discharge is disclosed. In one embodiment, the semiconductor device includes a first low doped region disposed in a substrate, a first heavily doped region disposed within the first low doped region, the first heavily doped region comprising a first conductivity type, and the first low doped region comprising a second conductivity type, the first and the second conductivity types being opposite, the first heavily doped region being coupled to a node to be protected. The semiconductor device further includes a second heavily doped region coupled to a first power supply potential node, the second heavily doped region being separated from the first heavily doped region by a portion of the first low doped region, and a second low doped region disposed adjacent the first low doped region, the second low doped region comprising the first conductivity type.Type: GrantFiled: October 13, 2008Date of Patent: June 12, 2012Assignee: Infineon Technologies AGInventors: Gernot Langguth, Wolfgang Soldner, Cornelius Christian Russ
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Patent number: 8188578Abstract: A seal ring structure disposed along a periphery of an integrated circuit. The seal ring is divided into at least a first portion and a second portion. The second portion is positioned facing and shielding an analog and/or RF circuit block from a noise. A deep N well is disposed in a P substrate and is positioned under the second portion. The deep N well reduces the substrate noise coupling.Type: GrantFiled: November 19, 2008Date of Patent: May 29, 2012Assignee: Mediatek Inc.Inventors: Tung-Hsing Lee, Tien-Chang Chang, Yuan-Hung Chung
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Publication number: 20120112307Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: ApplicationFiled: January 13, 2012Publication date: May 10, 2012Applicant: ANALOG DEVICES, INC.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
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Patent number: 8080858Abstract: A Semiconductor component having a space saving edge structure is disclosed. One embodiment provides a first side, a second side, an inner region, an edge region adjoining the inner region in a lateral direction of the semiconductor body, and a first semiconductor layer extending across the inner region and the edge region and having a basic doping of a first conductivity type. At least one active component zone of a second conductivity type, which is complementary to the first conductivity type, is disposed in the inner region in the first semiconductor layer. An edge structure is disposed in the edge region and includes at least one trench extending from the first side into the semiconductor body. An edge electrode is disposed in the trench, a dielectric layer is disposed in the trench between the edge electrode and the semiconductor body, a first edge zone of the second conductivity type adjoin the trench and are at least partially disposed below the trench.Type: GrantFiled: August 3, 2007Date of Patent: December 20, 2011Assignee: Infineon Technologies Austria AGInventors: Franz Hirler, Ralf Siemieniec, Christian Geissler
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Patent number: 8008734Abstract: A power semiconductor device is provided having a field plate that employs a thick metal film in an edge termination structure and which permits edge termination structure width reduction even with large side etching or etching variation, which exhibits superior long-term forward blocking voltage capability reliability, and which allows minimal forward blocking voltage capability variation. The edge termination structure has multiple ring-like p-type guard rings, a first insulating film covering the guard rings, and ring-like field plates, provided via the first insulating film atop the guard rings. The field plates have a polysilicon film and a thicker metal film. The polysilicon film is provided on a first guard ring via first insulating film, and a dual field plate made of the polysilicon film and metal film is provided on a second guard ring. The dual field plate is stacked via a second insulating film. The first and second guard rings alternate.Type: GrantFiled: January 11, 2008Date of Patent: August 30, 2011Assignee: Fuji Electric Co., Ltd.Inventors: Hiroki Wakimoto, Masahito Otsuki, Takashi Shiigi
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Publication number: 20110204469Abstract: A semiconductor device is provided with a peripheral region that has a narrow width and exhibits good electric field relaxation and high robustness against induced charges. The device has an active region for main current flow and a peripheral region surrounding the active region on a principal surface of a semiconductor substrate of a first conductivity type. The peripheral region has a guard ring of a second conductivity type composed of straight sections and curved sections connecting the straight sections formed in a region of the principal surface surrounding the active region, and a pair of polysilicon field plates in a ring shape formed separately on inner and outer circumferential sides of the guard ring. The surface of the guard ring and the pair of polysilicon field plates of the inner circumferential side and the outer circumferential side are electrically connected with a metal film in the curved section.Type: ApplicationFiled: February 2, 2011Publication date: August 25, 2011Applicant: C/O FUJI ELECTRIC SYSTEMS CO., LTD.Inventor: Yasuhiko ONISHI
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Patent number: 7977762Abstract: An integrated circuit (IC) is disclosed to include a central area of the IC that is partitioned into a first section containing at least one digital circuit and a second section containing at least one analog circuit; and a guard strip (or shield) that is within the central area and that is positioned within between the digital circuit and the analog circuit. The shield or guard strip comprises of n-well and p-tap regions that separate digital and analog circuits.Type: GrantFiled: December 9, 2008Date of Patent: July 12, 2011Assignee: Alvand Technologies, Inc.Inventors: Mansour Keramat, Mehrdad Heshami, Syed S. Islam
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Patent number: 7880260Abstract: A semiconductor device includes an active region with a vertical drift path of a first conduction type and with a near-surface lateral well of a second, complementary conduction type. In addition, the semiconductor device has an edge region surrounding the active region. This edge region has a variable lateral doping material zone of the second conduction type, which adjoins the well. A transition region in which the concentration of doping material gradually decreases from the concentration of the well to the concentration at the start of the variable lateral doping material zone is located between the lateral well and the variable lateral doping material zone.Type: GrantFiled: April 22, 2008Date of Patent: February 1, 2011Assignee: Infineon Technology Austria AGInventors: Elmar Falck, Josef Bauer, Gerhard Schmidt
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Publication number: 20100289110Abstract: A semiconductor device using one or more guard rings includes a p-type guard ring region surrounding a pn junction region, an insulating film covering the p-type guard ring region, one or more conductive films electrically connected with the p-type guard ring region through one or more contact holes made in the insulating film, and a semi-insulating film covering the insulating film and the conductive films. Thus, a desired breakdown voltage characteristic can be ensured even if a foreign matter or the like adheres to a surface of the conductive films.Type: ApplicationFiled: December 31, 2009Publication date: November 18, 2010Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Yoichiro TARUI, Atsushi Narazaki, Ryoichi Fujii
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Patent number: 7804143Abstract: A “tabbed” MOS device provides radiation hardness while supporting reduced gate width requirements. The “tabbed” MOS device also utilizes a body tie ring, which reduces field threshold leakage. In one implementation the “tabbed” MOS device is designed such that a width of the tab is based on at least a channel length of the MOS device such that a radiation-induced parasitic conduction path between the source and drain region of the device has a resistance that is higher than the device channel resistance.Type: GrantFiled: February 18, 2009Date of Patent: September 28, 2010Assignee: Intersil Americas, Inc.Inventors: Stephen Joseph Gaul, Michael D. Church, Brent R. Doyle
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Patent number: 7777292Abstract: A semiconductor device includes a semiconductor substrate of a first conductivity type having a top surface and a bottom surface, a semiconductor layer of a first conductivity type formed on the top surface of the semiconductor substrate, and having an active region and an edge termination region surrounding the active region, a first semiconductor region of a second conductivity type formed in the edge termination region adjacent to an edge of the active region, a second semiconductor region of a second conductivity type buried in the edge termination region in a sheet shape or a mesh shape substantially in parallel with a surface of the semiconductor layer, a first electrode formed on the active region of the semiconductor layer and a part of the first semiconductor region, and a second electrode formed on the bottom surface of the semiconductor substrate.Type: GrantFiled: June 25, 2007Date of Patent: August 17, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Chiharu Ota, Johji Nishio, Tetsuo Hatakeyama, Takashi Shinohe
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Patent number: 7772669Abstract: Second diffusion layers to be guard rings of a second conductivity type are formed on the major surface of a semiconductor substrate of a first conductivity type in a guard ring region. An insulating film is formed on these second diffusion layers. The semiconductor device has a structure wherein a conductive film is formed on the insulating film between adjacent electrodes among a first surface electrode, second surface electrodes, and a third surface electrode.Type: GrantFiled: October 2, 2006Date of Patent: August 10, 2010Assignee: Mitsubishi Electric CorporationInventors: Shigeo Tooi, Tetsujiro Tsunoda
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Publication number: 20100193894Abstract: A semiconductor device includes a semiconductor chip, and a guard ring made of an electrically conductive material and arranged between electrodes on the semiconductor chip and side edges of the semiconductor chip, the guard ring being divided by isolating sections on the semiconductor chip.Type: ApplicationFiled: January 21, 2010Publication date: August 5, 2010Applicant: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.Inventors: Takeshi Hishida, Tsutomu Igarashi
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Patent number: 7709924Abstract: A semiconductor structure and a method for operating the same. The method includes providing a semiconductor structure. The semiconductor structure includes first, second, third, and fourth doped semiconductor regions. The second doped semiconductor region is in direct physical contact with the first and third doped semiconductor regions. The fourth doped semiconductor region is in direct physical contact with the third doped semiconductor region. The first and second doped semiconductor regions are doped with a first doping polarity. The third and fourth doped semiconductor regions are doped with a second doping polarity. The method further includes (i) electrically coupling the first and fourth doped semiconductor regions to a first node and a second node of the semiconductor structure, respectively, and (ii) electrically charging the first and second nodes to first and second electric potentials, respectively. The first electric potential is different from the second electric potential.Type: GrantFiled: July 16, 2007Date of Patent: May 4, 2010Assignee: International Business Machines CorporationInventor: Steven Howard Voldman
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Patent number: 7683453Abstract: All low-temperature processes are used to fabricate a variety of semiconductor devices in a substrate the does not include an epitaxial layer. The devices include a non-isolated lateral DMOS, a non-isolated extended drain or drifted MOS device, a lateral trench DMOS, an isolated lateral DMOS, JFET and depletion-mode devices, and P-N diode clamps and rectifiers and junction terminations. Since the processes eliminate the need for high temperature processing and employ “as-implanted” dopant profiles, they constitute a modular architecture which allows devices to be added or omitted to the IC without the necessity of altering the processes used to produce the remaining devices.Type: GrantFiled: November 5, 2007Date of Patent: March 23, 2010Assignee: Advanced Analogic Technologies, Inc.Inventors: Richard K. Williams, Donald Ray Disney
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Patent number: 7675135Abstract: Instabilities and related drawbacks that arise when interruptions of a perimetral high voltage ring extension implanted regions (RHV) of a main junction (P_tub 1, (P_tub2, . . . ) of an integrated device must be realized may be effectively prevented. This important result is achieved by an extremely simple expedient: whenever an interruption (I) of the high voltage ring extension must be created, it is not realized straight across it along a common orthogonal direction to the perimetral implanted region, on the contrary, the narrow interruption is defined obliquely or slantingly across the width of the perimetral high voltage ring extension. In case of a straight interruption, the angle of slant (?) may be generally comprises between 30 and 60 degrees and more preferably is 45 degrees or close to it. Naturally, the narrow interruption is created by masking it from dopant implantation when realizing the perimetral high voltage ring extension region.Type: GrantFiled: September 12, 2005Date of Patent: March 9, 2010Assignee: STMicroelectronics S.R.L.Inventors: Davide Patti, Giuditta Settanni
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Patent number: 7652307Abstract: In a semiconductor device of the present invention, a MOS transistor is disposed in an elliptical shape. Linear regions in the elliptical shape are respectively used as the active regions, and round regions in the elliptical shape is used respectively as the inactive regions. In each of the inactive regions, a P type diffusion layer is formed to coincide with a round shape. Another P type diffusion layer is formed in a part of one of the inactive regions. These P type diffusion layers are formed as floating diffusion layers, are capacitively coupled to a metal layer on an insulating layer, and assume a state where predetermined potentials are respectively applied thereto. This structure makes it possible to maintain current performance of the active regions, while improving the withstand voltage characteristics in the inactive regions.Type: GrantFiled: September 7, 2006Date of Patent: January 26, 2010Assignee: Sanyo Electric Co., Ltd.Inventors: Shuichi Kikuchi, Kiyofumi Nakaya, Shigeaki Okawa
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Patent number: 7649223Abstract: An n-type drift region includes an active element region and a peripheral region. A p-type base region is formed at least in the active element region. A trench-type gate electrode is formed in each of the active element region and the peripheral region. An n-type source region formed in the base region. A plurality of p-type column regions is selectively formed separately from one another in each of the active element region and the peripheral region. In a peripheral region, a p-type guard region is formed below the gate electrode. In the active element region, the p-type guard region is not formed below the gate electrode. As a result, it is possible to hold the breakdown voltage in the peripheral region at a higher level than in the active element region while maintaining the low ON resistance due to a superjunction structure and to raise the breakdown voltage performance of the semiconductor device.Type: GrantFiled: June 28, 2007Date of Patent: January 19, 2010Assignee: NEC Electronics CorporationInventor: Yoshiya Kawashima
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Publication number: 20100001362Abstract: A semiconductor device has active region (30) and edge termination region (32) which includes a plurality of floating field regions (46). Field plates (54) extend in the edge termination region (32) inwards from contact holes (56) towards the active region (30) over a plurality of floating field regions (46). Pillars (40) may be provided.Type: ApplicationFiled: May 22, 2006Publication date: January 7, 2010Applicant: NXP B.V.Inventors: Rob Van Dalen, Maarten Jacobus Swanenberg
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Patent number: 7629665Abstract: A semiconductor component has a semiconductor body (100) having a basic doping and a first and second side, an inner region (103) arranged between the first and second sides, and an edge region (104) adjacent to the inner region in a lateral direction, at least one active component zone (12) which is arranged in the inner region (103) in the region of the first side (101) and is doped complementarily to the basic doping, and a channel stop zone (20), which is arranged in the edge region (104) in the region of the first side (101), is of the same conduction type as the basic doping and is doped more heavily than the basic doping, the doping concentration in the channel stop zone (20) decreasing continuously at least in sections in a lateral direction in the direction of the active component zone (12) at least over a distance (d1) of 10 ?m.Type: GrantFiled: July 6, 2006Date of Patent: December 8, 2009Assignee: Infineon Technologies AGInventors: Reiner Barthelmess, Hans-Joachim Schulze
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Patent number: 7605446Abstract: A bipolar high voltage/power semiconductor device has a drift region having adjacent its ends regions of different conductivity types respectively. High and low voltage terminals are provided. A first insulated gate terminal and a second insulated gate terminal are also provided. One or more drive circuits provide appropriate voltages to the first and second insulated gate terminals so as to allow current conduction in a first direction or in a second direction that is opposite the first direction.Type: GrantFiled: July 14, 2006Date of Patent: October 20, 2009Assignee: Cambridge Semiconductor LimitedInventors: Florin Udrea, Nishad Udugampola, Gehan A. J. Amaratunga
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Patent number: 7598585Abstract: A structure for preventing leakage of a semiconductor device is provided. The structure comprises a conductive layer, for shielding the features beneath thereof, located under a conductive line which crosses over a region having high voltage device. The conductive layer is wider than the conductive line.Type: GrantFiled: May 24, 2006Date of Patent: October 6, 2009Assignee: Himax Technologies LimitedInventor: Chan-Liang Wu
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Patent number: 7582938Abstract: A technique to enhancing substrate bias of grounded-gate NMOS fingers (ggNMOSFET's) has been developed. By using this technique, lower triggering voltage of NMOS fingers can be achieved without degrading ESD protection in negative zapping. By introducing a simple gate-coupled effect and a PMOSFET triggering source with this technique, low-voltage triggered NMOS fingers have also been developed in power and I/O ESD protection, respectively. A semiconductor device which includes a P-well which is underneath NMOS fingers. The device includes an N-well ring which is configured so that the inner P-well underneath the NMOS fingers is separated from an outer P-well. The inner P-well and outer P-well are connected by a P-substrate resistance which is much higher than the resistance of the P-wells. A P+-diffusion ring surrounding the N-well ring is configured to connect to VSS, i.e., P-taps.Type: GrantFiled: October 25, 2005Date of Patent: September 1, 2009Assignee: LSI CorporationInventor: Jau-Wen Chen
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Patent number: 7525178Abstract: A termination region of a semiconductor die is provided, which includes one or more field rings arranged in the termination region, one or more metal field plates, and an insulation layer disposed to prevent direct electrical contact between the field rings and the field plate such that the at least one field ring is capacitively coupled with the at least one field plate. Such a termination region may also include a polysilicon plate capacitively coupled with a diffusion region laterally spaced from the field rings, the polysilicon plate being located at an outer surface or directly under a passivation layer at an outer surface of the die. The termination region may also include floating field rings. The insulation layer may be a field oxide layer.Type: GrantFiled: October 25, 2006Date of Patent: April 28, 2009Assignee: International Rectifier CorporationInventor: Lawrence Kulinsky
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Publication number: 20090072340Abstract: High voltage semiconductor devices with high-voltage termination structures are constructed on lightly doped substrates. Lightly doped p-type substrates are particularly prone to depletion and inversion from positive charges, degrading the ability of associated termination structures to block high voltages. To improve the efficiency and stability of termination structures, second termination regions of the same dopant type as the substrate, more heavily doped than the substrate but more lightly doped than first termination regions, are positioned adjoining the first termination regions. The second termination regions raise the field threshold voltage where the surface is vulnerable and render the termination structure substantially insensitive to positive charges at the surface. The use of higher dopant concentration in the gap region without causing premature avalanche is facilitated by only creating second termination regions for regions lacking field plate protection.Type: ApplicationFiled: September 9, 2008Publication date: March 19, 2009Applicant: MICROSEMI CORPORATIONInventors: Jinshu Zhang, Dumitru Sdrulla, Dah Wen Tsang
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Publication number: 20080169526Abstract: A power semiconductor device is provided having a field plate that employs a thick metal film in an edge termination structure and which permits edge termination structure width reduction even with large side etching or etching variation, which exhibits superior long-term forward blocking voltage capability reliability, and which allows minimal forward blocking voltage capability variation. The edge termination structure has multiple ring-like p-type guard rings, a first insulating film covering the guard rings, and ring-like field plates, provided via the first insulating film atop the guard rings. The field plates have a polysilicon film and a thicker metal film. The polysilicon film is provided on a first guard ring via first insulating film, and a dual field plate made of the polysilicon film and metal film is provided on a second guard ring. The dual field plate is stacked via a second insulating film. The first and second guard rings alternate.Type: ApplicationFiled: January 11, 2008Publication date: July 17, 2008Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.Inventors: Hiroki WAKIMOTO, Masahito OTSUKI, Takashi SHIIGI
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Patent number: 7388266Abstract: A structure for preventing leakage of a high voltage device is provided. The structure comprises a conductive layer, for shielding the features beneath thereof, located under a conductive line which crosses over a region having high voltage device. The conductive layer is wider than the conductive line.Type: GrantFiled: August 18, 2005Date of Patent: June 17, 2008Assignee: Himax Technologies LimitedInventor: Chan-Liang Wu
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Patent number: 7385273Abstract: A power semiconductor device that includes a plurality of gate structure each having a gate insulation of a first thickness, and a termination region, the termination including a field insulation body surrounding the active region and having a recess that includes a bottom insulation thicker than the first thickness.Type: GrantFiled: June 9, 2006Date of Patent: June 10, 2008Assignee: International Rectifier CorporationInventors: Hugo R Burke, Simon Green
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Patent number: 7372111Abstract: The superjunction semiconductor device includes a drain drift section, which includes a first alternating conductivity type layer formed of first n-type regions and first p-type regions arranged alternately. The device also includes a peripheral section around the drain drift section, which includes a second alternating conductivity type layer formed of second n-type regions and second p-type regions arranged alternately. The peripheral section further includes a third alternating conductivity type layer in its surface portion. The third alternating conductivity type layer is formed of third n-type regions and third p-type regions arranged alternately. At least the peripheral section is configured to improve the avalanche withstanding capability over the entire device.Type: GrantFiled: August 4, 2005Date of Patent: May 13, 2008Assignee: Fuji Electric Device Technology Co., Ltd.Inventors: Yasuhiko Onishi, Takeyoshi Nishimura, Yasushi Niimura, Masanori Inoue
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Patent number: 7279768Abstract: In a semiconductor device of the present invention, an N-type buried diffusion layer is formed across a substrate and an epitaxial layer. A P-type buried diffusion layer is formed across an upper surface of the N-type buried diffusion layer over a wide range to form a PN junction region for an overvoltage protection. A P-type diffusion region is formed so as to be connected to the P-type buried diffusion layer. A breakdown voltage of the PN junction region is lower than a breakdown voltage between a source and a drain. This structure makes it possible to prevent a concentration of a breakdown current and protect the semiconductor device from an overvoltage.Type: GrantFiled: February 23, 2006Date of Patent: October 9, 2007Assignee: Sanyo Electric Co., Ltd.Inventors: Ryo Kanda, Shuichi Kikuchi, Seiji Otake
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Patent number: 7276772Abstract: A semiconductor device, including: a semiconductor substrate of a first conduction type; an active region used as a function-element-forming region on the semiconductor substrate; a low-resistance region of a second conduction type formed on an outermost periphery of the active region to surround the active region and having contact with the semiconductor substrate, the second conduction type being different from the first conduction type; and an electrode connected to the function element and the low-resistance region. A diode is formed by the semiconductor substrate and the low-resistance region. The function element and the diode are electrically connected in parallel between the semiconductor substrate and the electrode, and, between the semiconductor substrate and the electrode, resistance of the low-resistance region is lower than resistance of an electrical conduction path via the function element.Type: GrantFiled: March 5, 2007Date of Patent: October 2, 2007Assignee: Rohm Co., Ltd.Inventor: Kenichi Yoshimochi
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Patent number: 7205628Abstract: A semiconductor device, including: a semiconductor substrate of a first conduction type; an active region used as a function-element-forming region on the semiconductor substrate; a low-resistance region of a second conduction type formed on an outermost periphery of the active region to surround the active region and having contact with the semiconductor substrate, the second conduction type being different from the first conduction type; and an electrode connected to the function element and the low-resistance region. A diode is formed by the semiconductor substrate and the low-resistance region. The function element and the diode are electrically connected in parallel between the semiconductor substrate and the electrode, and, between the semiconductor substrate and the electrode, resistance of the low-resistance region is lower than resistance of an electrical conduction path via the function element.Type: GrantFiled: December 2, 2004Date of Patent: April 17, 2007Assignee: Rohm Co., Ltd.Inventor: Kenichi Yoshimochi
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Patent number: 7193255Abstract: Floating conducting regions at floating potentials are placed on a substrate surface between adjacent conducting regions to which predetermined potentials are applied. This makes it possible to block the spread of a depletion layer to the substrate between the conducting impurity regions. Thus, the leakage of high-frequency signals can be suppressed. In particular, in a case where a floating conducting region is placed between a peripheral impurity region of a common input terminal pad and a resistor in a switch circuit device, it is possible to suppress the leakage of high-frequency signals from an input terminal to control terminals which become high frequency GND and to suppress an increase in insertion loss.Type: GrantFiled: May 27, 2005Date of Patent: March 20, 2007Assignee: Sanyo Electric Co., Ltd.Inventor: Tetsuro Asano
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Patent number: 7135742Abstract: An insulated gate type semiconductor device comprised of a semiconductor layer serving as an active region isolated from a semiconductor substrate by a substrate isolation insulating film and a T-shaped gate electrode comprised of a trunk-shaped main gate electrode and a crosspiece-shaped conductor pattern provided on the semiconductor layer, wherein the thickness of the gate insulating film directly under the crosspiece-shaped conductor pattern is made greater than the thickness of the gate insulating film directly under the main gate electrode, whereby it is possible to prevent short-circuits between electrodes, prevent short-circuits between separators, and prevent an increase of the parasitic capacitance.Type: GrantFiled: November 22, 2000Date of Patent: November 14, 2006Assignee: Fujitsu LimitedInventors: Akihiko Harada, Sadanori Akiya, Kazuhiro Furuya, Hisashi Watanabe
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Patent number: 7119379Abstract: A semiconductor device disclosed herein comprises: a first base region which is of a first conductivity type; a second base region which is of a second conductivity type and which is selectively formed on a major surface of the first base region; a stopper region which is of a first conductivity type and which is formed on the major surface of the first base region, the stopper region being a predetermined distance away from the second base region and surrounding the second base region; and a ring region which is of a second conductivity type which is formed on the major surface of the first base region between the second base region and the stopper region, the ring region being spirally around the second base region and electrically connected to the second base region and the stopper region.Type: GrantFiled: October 22, 2003Date of Patent: October 10, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Hideaki Ninomiya, Tomoki Inoue
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Patent number: 7112865Abstract: A diode is provided which includes a first-conductivity-type cathode layer, a first-conductivity-type drift layer placed on the cathode region and having a lower concentration than the cathode layer, a generally ring-like second-conductivity-type ring region formed in the drift layer, second-conductivity-type anode region formed in the drift layer located inside the ring region, a cathode electrode formed in contact with the cathode layer, and an anode electrode formed in contact with the anode region, wherein the lowest resistivity of the second-conductivity-type anode region is at least 1/100 of the resistivity of the drift layer, and the thickness of the anode region is smaller than the diffusion depth of the ring region.Type: GrantFiled: March 3, 2005Date of Patent: September 26, 2006Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Tatsuhiko Fujihira, Yasushi Miyasaka
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Patent number: 7049663Abstract: An electrostatic discharge protection device with high voltage and negative voltage tolerance is provided. The electrostatic discharge protection device comprises: a first type substrate; a first type well inside the first type substrate, the first type well being floating; a second type well inside the first type substrate, the second type well separating the first type well from the first type substrate, the second type well being coupled to a first voltage line; a second type first doped region inside the first type well and coupled to a second voltage line; a second type second doped region inside the first type well and coupled to the pad; and an isolation structure between the second type first doped region and the second type second doped region.Type: GrantFiled: September 23, 2004Date of Patent: May 23, 2006Assignee: Sunplus Technology Co,Ltd.Inventor: Tai-Ho Wang
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Patent number: 6992362Abstract: A method and apparatus for increasing a breakdown voltage of a semiconductor device. The semiconductor device is constructed within an epitaxial tub of a first conductivity type formed within a dielectric material and comprises a surface diffusion region of a second conductivity type, opposite that of the first conductivity type, extending into the epitaxial tub, a trench surrounding and electrically isolating the epitaxial tub, a metallization line coupled to the surface diffusion traversing the semiconductor device and the trench, a first field limiting diffusion region of the second conductivity type disposed between the surface diffusion region and the trench and below the metallization line, a poly field plate positioned over the trench and beneath the metallization line, and a first contact coupled to the field limiting diffusion region, the first contact extending below the metallization line and overlapping the poly field plate.Type: GrantFiled: April 14, 2003Date of Patent: January 31, 2006Assignee: General Electronics Applications, Inc.Inventor: Joseph Pernyeszi
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Patent number: 6943406Abstract: According to the present invention, there is provided a semiconductor device having, a semiconductor substrate having a surface on which an insulating layer is formed, a first-conductivity-type first semiconductor layer formed on the insulating layer and having a first impurity concentration, a first-conductivity-type second semiconductor region formed in the first semiconductor layer from a surface of the first semiconductor layer to a surface of the insulating layer, and having a concentration higher than the first impurity concentration, a second-conductivity-type third semiconductor region formed in the first semiconductor layer from the surface of the first semiconductor layer to the surface of the insulating layer with a predetermined distance between the second and third semiconductor regions, and having a second impurity concentration, a second-conductivity-type fourth semiconductor region formed in a surface portion of the second semiconductor region, and having a concentration higher than the secondType: GrantFiled: October 30, 2003Date of Patent: September 13, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Takeshi Uchihara, Yasunori Usui, Hideyuki Ura, Takuma Hara
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Patent number: 6943410Abstract: A vertical MOS semiconductor device exhibits a high breakdown voltage and low on-resistance, reduces the tradeoff relation between the on-resistance and the breakdown voltage, and realizes high speed switching. The semiconductor device has a breakdown-voltage sustaining layer, such as an n?-type drift layer, and a well region, such as a p-type well region, in the breakdown-voltage sustaining layer. The resistivity ? (?cm) of the breakdown-voltage layer is within a range expressed in terms of the breakdown voltage Vbr (V). The semiconductor device also has stripe shaped surface drain regions that extend from the well region and are surrounded by the well region. The surface area ratio between surface drain regions and the well region, which includes the source region, is from 0.01 to 0.2.Type: GrantFiled: June 12, 2002Date of Patent: September 13, 2005Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Tatsuhiko Fujihira, Takashi Kobayashi, Hitoshi Abe, Yasushi Niimura, Masanori Inoue
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Patent number: 6906355Abstract: A semiconductor device having guard grooves uniformly filled with a semiconductor filler is provided. The four corners of a rectangular ring-shaped guard groove meet at right angles, and outer and inner auxiliary diffusion regions both rounded are connected to the four corners. Since the guard grooves do not have to be rounded, the plane orientation of a silicon single crystal exposed inside the guard grooves can be all {100}. Therefore, epitaxial growth in the guard grooves is uniformly carried out, and the grooves are filled with guard regions without defects.Type: GrantFiled: October 3, 2003Date of Patent: June 14, 2005Assignee: Shindengen Electric Manufacturing Co., Ltd.Inventors: Toru Kurosaki, Hiroaki Shishido, Mizue Kitada, Shinji Kunori, Kosuke Ohshima
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Patent number: 6879023Abstract: The present invention is directed to a seal structure and a method for forming a seal structure for a semiconductor die. An elongate region which is electrically isolated from the remainder of the substrate, such as a well region of a conductivity type opposite that of the substrate, extends around the major portion of the periphery of the substrate. A gap is left between the two ends of the elongate region along the minor portion of the periphery of the substrate not covered by the elongate region. A conductive seal ring is formed around the periphery of the substrate at the elongate region and spans the gap between the ends of the elongate region. The substrate of the semiconductor die is only brought into electrical contact with the seal ring at the gap between the ends of the elongate region.Type: GrantFiled: August 29, 2000Date of Patent: April 12, 2005Assignee: Broadcom CorporationInventor: German Gutierrez
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Patent number: 6870201Abstract: The invention relates to a high voltage resistant edge structure in the edge region of a semiconductor component which has floating guard rings of the first conductivity type and inter-ring zones of the second conductivity type which are arranged between the floating guard rings, wherein the conductivities and/or the inter-ring zones are set such that their charge carriers are totally depleted when blocking voltage is applied. The inventive edge structure achieves a modulation of the electrical field both at the surface and in the volume of the semiconductor body. If the inventive edge structure is suitably dimensioned, the field intensity maximum can easily be situated in the depth; that is, in the region of the vertical p-n junction. Thus, a suitable edge construction which permits a “soft” leakage of the electrical field in the volume can always be provided over a wide range of concentrations of p and n doping.Type: GrantFiled: November 2, 1998Date of Patent: March 22, 2005Assignee: Infineon Technologies AGInventors: Gerald Deboy, Jenoe Tihanyi, Helmut Strack, Helmut Gassel, Jens-Peer Stengl, Hans Weber
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Patent number: 6815793Abstract: A body (1) consisting of a doped semiconductor material with a pn junction (10) and an area (2) of reduced mean free path length (&lgr;r) for free charge carriers is disclosed. Said area (2) has sections (21, 22) which succeed each other in at least one specified direction (x, y, z) and between which there is at least one region (23), containing a mean free path length (&lgr;0) for the free charge carriers that is larger in relation to the reduced mean free path length (&lgr;r).Type: GrantFiled: February 28, 2003Date of Patent: November 9, 2004Assignee: Eupec Europdische Gesellschaft fur Leitungshalbleiter GmbH & Co. KGInventors: Veli Kartal, Hans-Joachim Schulze